Device for safely switching target material power supply

Abstract

The utility model discloses a device for safely switching a target material power supply, belongs to the technical field of target material power supply switching, and is particularly suitable for automatic switching control of a radio frequency (RF) power supply and a direct current (DC) power supply. According to the device, the target material is driven by the cylinder assembly to be physically connected with different power interfaces, and the on-off actions of the direct current contactor and the radio frequency contactor are coordinated by combining the programmable logic of the PLC, so that the automatic switching of power modes is realized. Wherein the mechanical interlocking mechanism feeds back a target material in-place signal through a limit switch, and the electrical interlocking circuit forms hardware-level interlocking by using a normally-closed contact of a contactor to ensure that the DC power supply and the RF power supply are not conducted at the same time. In addition, the state monitoring unit collects the state and current data of the contactor in real time, and triggers emergency power-off protection when abnormity occurs. The automatic switching device solves the problems of potential safety hazards and low efficiency of traditional manual switching, has the advantages of being safe in operation, efficient in switching, stable in operation and the like, and can be widely applied to the fields of vacuum coating, semiconductor processing and the like.

Description

Technical Field

[0001] This utility model belongs to the field of target material power switching technology, and in particular relates to a device for safely switching between radio frequency (RF) power and DC power through automated control in coating equipment. Background Technology

[0002] In the coating process, switching the target power supply is a crucial step in achieving different coating methods (such as RF coating and DC coating). Traditional methods typically rely on manual power switching, which has the following drawbacks:

[0003] 1. Safety hazards: Operators need to be in close contact with high-voltage equipment, which can easily cause electric shock or arcing injuries;

[0004] 2. Low efficiency: Manual switching is time-consuming, affecting production continuity;

[0005] 3. Insufficient reliability: Manual operation is prone to power conflicts or equipment damage due to erroneous actions.

[0006] While existing technologies employ PLCs (Programmable Logic Controllers) and high-current contactors to achieve partial automation control, they still suffer from problems such as simplistic switching logic and a lack of interlocking protection. Therefore, there is an urgent need for a target material power switching device that can balance safety, efficiency, and stability. Utility Model Content

[0007] 1. Technical problem to be solved:

[0008] In view of the problems existing in the prior art, this utility model aims to solve the problems of safety hazards, low efficiency and insufficient reliability in the traditional target material power switching process, and provides a safe switching device based on automatic control to ensure conflict-free switching of different power modes and improve the overall efficiency of the coating process.

[0009] 2. Technical Solution:

[0010] To solve the above problems, the present invention adopts the following technical solution.

[0011] A device for safely switching the power supply of a target material includes a cylinder assembly, a DC contactor, a radio frequency contactor, a PLC controller, a solenoid valve, a mechanical interlock mechanism, an electrical interlock circuit, and a status monitoring unit.

[0012] The cylinder assembly drives the target support through the linear motion of the piston rod, so that the target is physically connected to the DC power interface or the radio frequency power interface.

[0013] The DC contactor and the RF contactor are connected in series in the DC power supply circuit and the RF power supply circuit, respectively, to control the on / off state of the corresponding power supply.

[0014] The PLC controller has a built-in interlock logic program, which connects to the control coils of the DC contactor and the RF contactor through the output port, and sends commands to the solenoid valve.

[0015] The solenoid valve receives a signal from the PLC controller to switch the air path direction and drive the piston rod of the cylinder assembly to move.

[0016] The mechanical interlock mechanism includes two limit switches, which are fixed at both ends of the cylinder stroke. When the target support moves to the preset position of the DC power interface or the RF power interface, the corresponding limit switch is triggered, generating a position signal and feeding it back to the PLC controller.

[0017] In the electrical interlock circuit, the normally closed contact of the DC contactor is connected in series with the control coil of the RF contactor, and the normally closed contact of the RF contactor is connected in series with the control coil of the DC contactor, forming a physically isolated bidirectional interlock to ensure that the DC power supply and the RF power supply cannot be turned on at the same time.

[0018] The status monitoring unit collects the auxiliary contact signals and current sensor data of the contactor in real time, and triggers the emergency power-off relay to cut off the main power supply when an abnormality occurs.

[0019] The status monitoring unit includes a Hall current sensor, which is installed in the main circuit of the DC power supply circuit and the RF power supply circuit to collect current data in real time.

[0020] Furthermore, the mechanical interlock mechanism includes two limit switches, which correspond to the positions of the target material connected to the DC power interface and the RF power interface, respectively. The limit switch signals are connected to the input port of the PLC controller.

[0021] In the electrical interlock circuit, the normally closed contact (KM1-NC) of the DC contactor is connected in series with the control coil (KM2) of the RF contactor, and the normally closed contact (KM2-NC) of the RF contactor is connected in series with the control coil (KM1) of the DC contactor, forming a bidirectional interlock.

[0022] Furthermore, the rated current of the main contacts of the DC contactor and the RF contactor is adapted to the power load requirements of different coating processes.

[0023] Furthermore, the solenoid valve is a two-position five-way valve, which controls the extension or retraction of the cylinder through a 24V DC signal output by the PLC controller.

[0024] Furthermore, the interlock logic program of the PLC controller includes the following steps:

[0025] S1. After receiving the limit switch signal, delay for 0.5 seconds to confirm that the mechanical position is stable;

[0026] S2. Send a command through the output port to disconnect the contactor of the current power supply;

[0027] S3. After confirming complete disconnection through the auxiliary contact of the contactor, drive the solenoid valve to switch the air path direction and control the cylinder action.

[0028] S4. After the target material is in place, engage the contactor of the target power supply and monitor the current in real time to ensure it is normal.

[0029] S5. If the current exceeds the threshold or the contactor fails to engage, an emergency power outage and alarm will be triggered.

[0030] 3. Beneficial effects:

[0031] Compared with existing technologies, the advantages of this utility model are:

[0032] (1) Enhanced safety: Through interlocking logic and automatic control, the risks of manual operation are completely eliminated;

[0033] (2) Efficiency optimization: The fully automated switching process shortens the process interval time and improves the continuity of coating;

[0034] (3) Enhanced reliability: Through the dual redundancy design of mechanical limit switches and electrical contact interlocking, as well as the real-time status monitoring of PLC, the system’s anti-interference capability is improved and the malfunction rate is reduced to below 0.1%. Attached Figure Description

[0035] Figure 1 This is a mechanical schematic diagram of the present invention, showing the connection structure between the cylinder and the target material;

[0036] Figure 2 This is the electrical schematic diagram of the present invention, describing the PLC control logic and the contactor interlock circuit. Detailed Implementation

[0037] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0038] Please see Figures 1-2 A device for safely switching the power supply of a target material, comprising the following components:

[0039] 1. Implementing agency:

[0040] Cylinder assembly, used to drive the physical connection between the target material and different power interfaces;

[0041] DC contactors and RF contactors control the switching on and off of DC power and RF power, respectively;

[0042] 2. Control Unit:

[0043] The PLC controller has a built-in interlock logic program to coordinate the cylinder action and the contactor switching.

[0044] Solenoid valve, receives PLC signals to control the direction of cylinder movement;

[0045] The solenoid valve is a two-position five-way valve (such as the SMC SY series), which is compatible with 24V DC control signals;

[0046] 3. Interlock protection module:

[0047] PLC programming ensures that the DC power supply and RF power supply do not conduct at the same time, thus avoiding the risk of short circuits.

[0048] Real-time monitoring of contactor status triggers emergency power-off protection in case of abnormality.

[0049] In the electrical interlock circuit, the normally closed contact (KM1-NC) of the DC contactor is connected in series with the control coil (KM2) of the RF contactor, and the normally closed contact (KM2-NC) of the RF contactor is connected in series with the control coil (KM1) of the DC contactor, forming a bidirectional interlock.

[0050] The implementation process of this device is as follows:

[0051] 1. DC power supply mode:

[0052] The PLC sends a command, the DC contactor engages, and at the same time the solenoid valve drives the cylinder to connect the target material to the DC interface.

[0053] The PLC disconnects the RF contactor via an interlock procedure to ensure that the RF power supply is off.

[0054] 2. RF power mode:

[0055] PLC switching command, DC contactor disconnects, solenoid valve reverses action to drive cylinder connected to RF interface;

[0056] The radio frequency contactor and PLC continuously monitor the current status and trigger a protection mechanism when an abnormality occurs.

[0057] Through the above process, this device can achieve safe and efficient switching of the target power supply, adapting to the needs of various coating processes.

[0058] The above description is merely a preferred embodiment of this utility model; however, the protection scope of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the technical scope disclosed in this utility model, based on the technical solution and its improved concept, should be included within the protection scope of this utility model.

Claims

1. A device for safely switching the power supply of a target material, comprising a cylinder assembly, a DC contactor, an RF contactor, a PLC controller, a solenoid valve, a mechanical interlock mechanism, an electrical interlock circuit, and a status monitoring unit, characterized in that: The cylinder assembly drives the target support through the linear motion of the piston rod, so that the target is physically connected to the DC power interface or the radio frequency power interface. The DC contactor and the RF contactor are connected in series in the DC power supply circuit and the RF power supply circuit, respectively, to control the on / off state of the corresponding power supply. The PLC controller has a built-in interlock logic program, which connects to the control coils of the DC contactor and the RF contactor through the output port, and sends commands to the solenoid valve. The solenoid valve receives a signal from the PLC controller to switch the air path direction and drive the piston rod of the cylinder assembly to move. The mechanical interlock mechanism includes two limit switches, which are fixed at both ends of the cylinder stroke. When the target support moves to the preset position of the DC power interface or the RF power interface, the corresponding limit switch is triggered, generating a position signal and feeding it back to the PLC controller. In the electrical interlock circuit, the normally closed contact of the DC contactor is connected in series with the control coil of the RF contactor, and the normally closed contact of the RF contactor is connected in series with the control coil of the DC contactor, forming a physically isolated bidirectional interlock to ensure that the DC power supply and the RF power supply cannot be turned on at the same time. The status monitoring unit collects the auxiliary contact signals and current sensor data of the contactor in real time, and triggers the emergency power-off relay to cut off the main power supply when an abnormality occurs.

2. The apparatus of claim 1, wherein: The mechanical interlock mechanism includes two limit switches, which correspond to the target material being connected to the DC power interface and the RF power interface respectively. The limit switch signals are connected to the input port of the PLC controller.

3. The device for safely switching the power supply of a target material according to claim 1, characterized in that: The rated current of the main contacts of the DC contactor and the RF contactor is adapted to the power load requirements of different coating processes.

4. The device for safely switching the power supply of a target material according to claim 1, characterized in that: The solenoid valve is a two-position five-way valve, which controls the extension or retraction of the cylinder through a 24V DC signal output by the PLC controller.

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