Substrate heater and substrate heating device
By setting a heating module inside the vacuum chamber and extending the electrical terminal outside the vacuum chamber, combined with a sealing component and an armor module, the problems of sagging and damage to the electrical terminal in wafer heating devices are solved, achieving a high-efficiency and low-loss heating effect.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN ARRAYED MATERIALS TECH CO LTD
- Filing Date
- 2025-04-16
- Publication Date
- 2026-04-14
AI Technical Summary
Existing wafer heating devices suffer from sagging and damage to electrical ports in large-size heating plates, leading to uneven heating and increased costs.
Design a substrate heater where the heating module is located inside a vacuum chamber, the electrical terminal extends outside the vacuum chamber, and a vacuum environment is maintained by a sealing component. An armored module supports the heating module to prevent deformation, and a temperature monitoring module monitors the heating quality.
This avoids deformation of large-size substrates during the heating process, ensures heating quality and the sealing of the vacuum environment, and reduces losses and costs.
Smart Images
Figure CN224124273U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of wafer substrate heating technology, and in particular to a substrate heater and a substrate heating device. Background Technology
[0002] A wafer refers to a silicon wafer used in the fabrication of silicon semiconductor integrated circuits. During wafer manufacturing, wafers need to be expanded into films, a process that requires heating. Heating the wafer substrate is a crucial step in vacuum deposition, directly impacting the performance and quality of the thin film. Heating the wafer substrate surface transforms physical adsorption into chemical adsorption, increasing intermolecular interactions and thus improving adhesion between the film and the substrate. Furthermore, surface heating helps reduce the difference between the recrystallization temperature of vapor molecules and the substrate temperature, reducing or eliminating internal stress between film layers, resulting in a denser film structure and improved mechanical strength.
[0003] Currently, the most common heating method is radiant heating, typically using platinum or nickel-chromium wire. The heating wire is fixed within a vortex-shaped groove of a ceramic heating plate, with its power supply terminal located inside the first vacuum chamber and connected to the outside via a feedthrough electrode. However, as the heating plate increases in size, such as in 8-inch products, the increased area of the ceramic heating plate leads to sagging in the central area due to strength and weight constraints. This sagging worsens after heating, and the cost also increases with the increased heating plate area. Furthermore, in a vacuum environment, the heating wire's power connection is prone to damage, leading to increased losses. Utility Model Content
[0004] This utility model aims to at least solve one of the technical problems existing in the prior art. To this end, this utility model proposes a substrate heater and a substrate heating device. The substrate heater provided in this application places the heating module inside a first vacuum chamber, while the electrical connection terminal of the heating module extends to the outside of the first vacuum chamber. This prevents the electrical connection terminal of the heating module from being damaged due to being in a vacuum environment. Furthermore, since the electrical connection terminal of the heating module needs to be external to the first vacuum chamber, to ensure the vacuum environment of the first vacuum chamber, this application also adds a sealing component at the connection between the electrical connection terminal of the heating module and the first channel of the first vacuum chamber to ensure the sealing of the first vacuum chamber and ensure that the main body of the heating module can always be in a vacuum environment. The substrate heating device uses the substrate heater of this application. The heating module of the substrate heater of this application, supported by an armored module, can prevent deformation of large-size substrates during heating, ensuring the heating quality of the substrate.
[0005] In a first aspect, a substrate heater according to an embodiment of the present invention includes:
[0006] The armored module has a first vacuum chamber with a first channel that can communicate with the outside. A heating module is disposed inside the first vacuum chamber, and the power terminal of the heating module passes through the first channel and is disposed outside the first vacuum chamber.
[0007] The sealing assembly includes a first bottom cover, a sealing sleeve, and a sealing ring. The first bottom cover is used to cover the first channel. The first bottom cover is provided with an outward protruding tube. The sealing sleeve is fitted onto the outside of the outward protruding tube. The sealing ring is located between the outward protruding tube and the sealing sleeve. The power receiving terminal of the heating module can pass through the inside of the outward protruding tube, the sealing ring, and the sealing sleeve. The inside of the sealing ring abuts against the outside of the power receiving terminal to form a sealed connection.
[0008] A substrate heater according to an embodiment of the present invention has at least the following beneficial effects: The heating module of the substrate heater of this application, supported by an armored module, can prevent deformation of large-sized substrates during heating, ensuring the heating quality of the substrate. Simultaneously, the heating module is located within a first vacuum chamber, preventing direct contact between the heating module and the substrate, thus preventing damage to the substrate due to excessively rapid heating and helping to reduce losses. Furthermore, the substrate heater provided in this application places the heating module within the first vacuum chamber, while the electrical connection of the heating module extends to the outside of the first vacuum chamber. This prevents the electrical connection of the heating module from being damaged in a vacuum environment. Further, since the electrical connection of the heating module needs to be external to the first vacuum chamber, to ensure the vacuum environment of the first vacuum chamber, this application also adds a sealing component at the connection between the electrical connection of the heating module and the first channel of the first vacuum chamber to ensure the sealing of the first vacuum chamber and ensure that the main body of the heating module is always in a vacuum environment.
[0009] According to an embodiment of the present invention, a substrate heater is provided with an electrode connected to the receiving end. The electrode can pass through the inner side of the protruding tube, the sealing ring, and the sealing sleeve. The inner side of the sealing ring abuts against the outer side of the electrode to form a sealed connection.
[0010] According to an embodiment of the present utility model, a substrate heater is provided, wherein the armored module includes a lower base and an upper cover connected to the lower base, the inner wall of the lower base and the inner wall of the upper cover together form a first vacuum cavity, and the first channel is located on the upper cover.
[0011] According to an embodiment of the present invention, a substrate heater further includes a temperature monitoring module located inside the first vacuum chamber. The temperature monitoring module includes a first detector and a second detector. The power terminals of the first detector and the second detector pass through the first channel and are disposed outside the first vacuum chamber. The power terminals of the first detector and the second detector can pass through the inner side of the protruding tube, the sealing ring, and the sealing sleeve. The inner side of the sealing ring abuts against the outer side of the power terminal to form a sealed connection.
[0012] According to an embodiment of the present invention, a substrate heater is provided in which the terminals of the first detector and the second detector are connected to electrodes. The electrodes can pass through the inner side of the protruding tube, the sealing ring, and the sealing sleeve. The inner side of the sealing ring abuts against the outer side of the electrodes to form a sealed connection.
[0013] According to an embodiment of the present invention, a substrate heater is provided with at least three protruding tubes on the first bottom cover, and the power terminals of the heating module, the first detector and the second detector are respectively provided with the three protruding tubes.
[0014] According to an embodiment of the present invention, a substrate heater is provided, wherein the sealing assembly further includes a first connecting pipe that can communicate with the first channel, a first bottom cover is disposed on one end of the first connecting pipe, the first bottom cover is provided with two protruding tubes, the first connecting pipe is provided with a second channel, the second channel is provided with the sealing assembly, the heating module and the power receiving terminal of the first detector are correspondingly disposed with the two protruding tubes of the first bottom cover, and the power receiving terminal of the second detector can pass through the second channel and extend to the outside of the sealing assembly.
[0015] Secondly, a substrate heating device according to an embodiment of the present utility model includes the aforementioned substrate heater;
[0016] A rotating module includes an outer cover with a receiving cavity, a substrate support plate, and a rotating drive component. The receiving cavity has a first opening and a third channel. The substrate support plate is disposed at the first opening and fixedly connected to the outer cover. The rotating drive component can drive the outer cover to rotate. The heating module is disposed inside the receiving cavity. The sealing assembly is disposed outside the third channel and rotatably connected to the outer cover. The power terminal of the heating module can pass through the third channel and be sealed to the sealing assembly.
[0017] According to an embodiment of the present invention, a substrate heating device has at least the following beneficial effects: The substrate heating device utilizes the substrate heater of this application. The heating module of the substrate heater, supported by an armored module, prevents deformation of large-size substrates during heating, ensuring the heating quality of the substrate. Simultaneously, the heating module is located within a first vacuum chamber, preventing direct contact between the heating module and the substrate, thus preventing damage to the substrate due to excessive heating and reducing losses. Furthermore, the substrate heater provided in this application places the heating module within the first vacuum chamber, while the electrical connection of the heating module extends to the outside of the first vacuum chamber. This prevents the electrical connection of the heating module from being damaged in a vacuum environment. Further, since the electrical connection of the heating module needs to be external to the first vacuum chamber, a sealing component is added at the connection between the electrical connection of the heating module and the first channel of the first vacuum chamber to ensure the sealing of the first vacuum chamber and ensure that the main body of the heating module is always in a vacuum environment.
[0018] According to an embodiment of the present utility model, a substrate heating device is provided in the receiving cavity, the heat insulation plate is disposed on the top of the heating module, and at least two heat insulation plates are stacked in the vertical direction.
[0019] According to an embodiment of the present invention, a substrate heating device is provided with a notch at one end of the outer cover near the first opening, and the substrate support plate cooperates with the notch to form a feed port for picking up and putting in the substrate, wherein the diameter of the feed port is larger than the diameter of the substrate.
[0020] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description
[0021] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:
[0022] Figure 1 This is a cross-sectional view of the structure of a substrate heating device according to an embodiment of the present invention;
[0023] Figure 2 This is a structural diagram of a substrate heating device according to an embodiment of the present invention;
[0024] Figure 3 This is a structural diagram of a substrate heater according to an embodiment of the present invention;
[0025] Figure 4 This is an enlarged view of the sealing assembly according to an embodiment of the present invention.
[0026] Explanation of reference numerals in the attached figures:
[0027] Second vacuum chamber 1;
[0028] Armored module 100; Heating module 110; Lower base 120; Upper cover 130;
[0029] Sealing assembly 200; first bottom cover 210; protruding tube 211; sealing sleeve 220; sealing ring 230; first connecting tube 240;
[0030] First detector 300;
[0031] Second detector 400;
[0032] Electrode 500;
[0033] Rotating module 600; outer cover 610; heat insulation plate 611; notch 612; substrate support plate 620; rotating drive component 630; second connecting pipe 640; first transmission gear 650; second transmission gear 660; third connecting pipe 670;
[0034] Magnetic coupling mechanism 700; inner magnetic coupling component 710; outer magnetic coupling component 720;
[0035] Substrate 800;
[0036] Sealing flange 900. Detailed Implementation
[0037] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.
[0038] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0039] In the description of a utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If the terms "first" and "second" are used, they are merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly specifying the number of indicated technical features or the order of the indicated technical features.
[0040] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.
[0041] Reference Figures 1 to 2 This utility model embodiment provides a substrate heating device, specifically, the substrate heating device includes... Figures 3 to 4 The substrate heating device shown is used in a substrate heating equipment (not shown in the figure). The substrate heating equipment (not shown in the figure) is equipped with a second vacuum chamber 1, such as... Figure 1 The dashed line in the middle simulates the second vacuum chamber 1. The substrate heater is disposed inside the second vacuum chamber 1. The second vacuum chamber 1 has an outlet through which the power terminal of the heating module can pass. The sealing assembly 200 is located outside the second vacuum chamber 1.
[0042] like Figure 1 As shown, the substrate heating device includes an armored module 100, a heating module 110, a sealing assembly 200, and a temperature monitoring module. Specifically, the armored module 100 includes a lower base 120 and an upper cover 130 connected to the lower base 120. The inner walls of the lower base 120 and the upper cover 130 together form a first vacuum cavity, and a first channel is located on the upper cover 130, allowing the first vacuum cavity to communicate with the external atmosphere. The heating module 110 is disposed inside the first vacuum cavity. However, since the power connection of the heating module 110 needs to be external to the first vacuum cavity, and the first vacuum cavity needs to maintain a vacuum environment, the power connection of the heating module 110 can extend from the first channel to the outside of the first vacuum cavity. At the same time, to ensure the vacuum environment of the first vacuum cavity, a sealing assembly 200 is added at the connection between the power connection of the heating module 110 and the first channel of the first vacuum cavity to ensure the sealing of the first vacuum cavity and ensure that the main body of the heating module 110 can always be in a vacuum environment.
[0043] Specifically, such as Figure 4As shown, the sealing assembly 200 includes a first bottom cover 210, a sealing sleeve 220, and a sealing ring 230. The first bottom cover 210 covers the first channel and has an outwardly protruding tube 211. The sealing sleeve 220 is fitted onto the outside of the outwardly protruding tube 211. The sealing ring 230 is located between the outwardly protruding tube 211 and the sealing sleeve 220. The power receiving end of the heating module 110 can pass through the inside of the outwardly protruding tube 211, the sealing ring 230, and the sealing sleeve 220. The inside of the sealing ring 230 abuts against the outside of the power receiving end to form a sealed connection.
[0044] As a further improvement to the design, as shown in the figure, a power receiving electrode 500 is connected to the power receiving end. The power receiving electrode 500 can pass through the inside of the protruding tube 211, the sealing ring 230, and the sealing sleeve 220. The inside of the sealing ring 230 abuts against the outside of the power receiving electrode 500 to form a sealed connection. Specifically, the power receiving electrode 500 is a feedthrough electrode.
[0045] Advantageously, by using the feedthrough electrode as the connection electrode 500 between the heating module 110 and the external power supply or communication equipment, the connection electrode 500 of the heating module 110 has a feedthrough function. Furthermore, the feedthrough electrode can transmit electrical signals in a vacuum or sealed environment while maintaining the system's airtightness, so that the first vacuum chamber can maintain a vacuum environment, ensuring the heat transfer efficiency of the heating module 110 and ensuring that the substrate 800 can be heated uniformly.
[0046] According to some embodiments of this application, the temperature monitoring module includes a first detector 300 and a second detector 400. The power terminals of the first detector 300 and the second detector 400 pass through the first channel and are disposed outside the first vacuum chamber. The power terminals of the first detector 300 and the second detector 400 can pass through the inner side of the protruding tube 211, the sealing ring 230, and the sealing sleeve 220. The inner side of the sealing ring 230 abuts against the outer side of the power terminal to form a sealed connection.
[0047] Specifically, the first detector 300 is used to monitor whether the temperature of the heating module 110 meets the heating requirements and whether the heating module 110 is in normal operation, while the second detector 400 is used to monitor whether the temperature rise of the lower base 120 in the armor module 100 is normal.
[0048] That is, it can be understood that the lower base 120 in the armored module 100 has a heating surface, the heated surface of the substrate 800 is in contact with the heating surface, and the heat generated by the heating module 110 can be transferred to the heating surface to heat the surface of the substrate 800. The detection end of the second detector 400 can be connected to the heating surface of the lower base 120. In addition, the detection end of the first detector 300 is connected to the heating module 110.
[0049] Furthermore, the terminals of the first detector 300 and the second detector 400 also need to be externally located outside the first vacuum chamber, and the terminals of the first detector 300 and the second detector 400 are also provided with feedthrough electrodes to ensure the vacuum environment of the first vacuum chamber.
[0050] According to some embodiments of this application, as shown in the figure, the heating module 110 of this application is a disc-shaped heating wire. The heating wire is distributed in a spiral shape and fixedly connected to the lower base 120. By supporting the heating wire with the lower base 120, the heating wire can be prevented from sagging during the heating of the substrate 800 surface, which would cause the substrate 800 to deform, thus effectively protecting the substrate 800.
[0051] According to some embodiments of this application, the first bottom cover 210 is provided with three protruding tubes 211, and the power terminals of the first detector 300, the second detector 400, and the heating module 110 are respectively provided with the three protruding tubes 211.
[0052] Alternatively, as shown in the figure, the first bottom cover 210 is provided with two protruding tubes 211. The first bottom cover 210 is sealed to the upper cover 130 of the armored module 100 through a first connecting tube 240. The first connecting tube 240 is provided with a second channel, and the second channel is also connected to a sealing component 200. The power terminal of the second detector 400 can pass through the second channel and the sealing component 200 in sequence, and the power terminal of the second detector 400 is also sealed to the sealing component 200. That is, it can be understood that the first detector 300, the second detector 400, and the heating module 110 each have independent wiring channels to avoid electromagnetic interference.
[0053] As shown in the figure, the substrate heating device provided in this application also includes a rotation module 600.
[0054] Specifically, the rotating module 600 includes an outer cover 610 with a receiving cavity, a substrate support plate 620, a rotating assembly, and a rotating drive 630. In addition, the heater armor module 100 and the heating module 110 are both installed in the receiving cavity of the outer cover 610, and the substrate support plate 620 is disposed at the opening of the receiving cavity to support the substrate 800 to be heated.
[0055] As shown in the figure, the rotating assembly includes a second connecting pipe 640, a first flange sleeved outside the second connecting pipe 640, and a magnetic coupling mechanism 700. The magnetic coupling mechanism 700 includes an inner magnetic coupling component 710 sleeved outside the second connecting pipe 640 and an outer magnetic coupling component 720 sleeved outside the inner magnetic coupling component 710. The inner magnetic coupling component 710 is connected to one end of the second connecting pipe 640, and the other end of the second connecting pipe 640 is connected to the outer cover 610. One end of the inner magnetic coupling component 710 is connected to the first connecting pipe 240 of the sealing assembly 200. The power terminals of the heating module 110, the first detector 300, and the second detector 400 pass sequentially through the first channel and the second connecting pipe 640, extending to the outside of the first vacuum chamber. Through the dual detectors, the independent channel design of the dual detectors, and the cooperation of the magnetic coupling mechanism 700, both monitoring accuracy and electromagnetic coupling interference between the sensor cables and the heating cables are ensured. Furthermore, the rotating drive component 630 is connected to the outer magnetic coupling component 720 for transmission. Specifically, as shown in the figure, a first transmission gear 650 is installed on the external magnetic coupling component 720, and a second transmission gear 660 is connected to the output end of the rotary drive component 630. The first transmission gear 650 and the second transmission gear 660 are meshed and connected. Through gear transmission, the outer cover 610 is rotated, thereby causing the substrate 800 on the substrate support plate 620 to rotate accordingly. However, the heating module 110 in this application is rotatably connected to the outer cover 610. When the outer cover 610 rotates, the heating module 110 is stationary to improve temperature uniformity, ensure that the substrate 800 is rotated and heated, and ensure that the gear transmission is stable, thus ensuring that the substrate 800 is heated evenly.
[0056] Furthermore, the armored module 100 is externally sealed with a third connecting pipe 670, wherein the second connecting pipe 640 is sleeved on the outside of the third connecting pipe 670, and the end of the third connecting pipe 670 away from the heating module 110 is sealed to the first connecting pipe 240. The power terminals of the heating module 110, the first detector 300, and the second detector 400 pass through the first channel and the third connecting pipe 670 in sequence to the outside of the first vacuum chamber and are sealed to the sealing assembly 200.
[0057] As shown in the figure, the second connecting pipe 640 and the third connecting pipe 670 can also pass through the second vacuum chamber 1. To further ensure that the second vacuum chamber 1 can maintain a vacuum environment, a sealing flange 900 is provided at the outlet of the second vacuum chamber 1. The second connecting pipe 640 is sealed to the sealing flange 900 to ensure this. At the same time, the second connecting pipe 640 and the sealing flange 900 can rotate relative to each other.
[0058] That is, it can be understood that, through the joint cooperation of the sealing flange 900 and the sealing assembly 200, the heating module 110 can always be kept in a vacuum environment, while the power connection of the heating module is in the atmospheric environment, and the sealing flange 900 and the sealing assembly 200 play the role of vacuum sealing.
[0059] As a further improvement to the solution, a heat insulation plate 611 is provided inside the cavity, and the heat insulation plate 611 covers the heating module 110. At least two heat insulation plates 611 are stacked in the vertical direction.
[0060] Beneficially, the stacked insulation panel 611 design optimizes the thermal field distribution, reduces energy loss, and protects external components.
[0061] As a further improvement to the solution, the outer cover 610 is provided with a notch 612 at one end near the first opening. The substrate tray 620 cooperates with the notch 612 to form a feed port for taking out and putting in the substrate 800. The diameter of the feed port is larger than the diameter of the substrate 800 to facilitate the user to take out or put in the substrate 800.
[0062] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0063] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.
Claims
1. A substrate heater, characterized in that, include: The armored module (100) has a first vacuum chamber, the first vacuum chamber has a first channel that can communicate with the outside, and a heating module (110) is disposed in the first vacuum chamber. The power terminal of the heating module (110) passes through the first channel and is disposed outside the first vacuum chamber. The sealing assembly (200) includes a first bottom cover (210), a sealing sleeve (220), and a sealing ring (230). The first bottom cover (210) is used to cover the first channel. The first bottom cover (210) is provided with an outward protruding tube (211). The sealing sleeve (220) is fitted onto the outside of the outward protruding tube (211). The sealing ring (230) is located between the outward protruding tube (211) and the sealing sleeve (220). The power receiving end of the heating module (110) can pass through the inside of the outward protruding tube (211), the sealing ring (230), and the sealing sleeve (220). The inside of the sealing ring (230) abuts against the outside of the power receiving end to form a sealed connection.
2. A substrate heater according to claim 1, characterized in that, The heating module (110) is connected to an electrode (500) at its electrical terminal. The electrode (500) can pass through the inside of the protruding tube (211), the sealing ring (230), and the sealing sleeve (220). The inside of the sealing ring (230) abuts against the outside of the electrode (500) to form a sealed connection.
3. A substrate heater according to claim 1, characterized in that, The armor module (100) includes a lower base (120) and an upper cover (130) connected to the lower base (120). The inner wall of the lower base (120) and the inner wall of the upper cover (130) together form the first vacuum cavity, and the first channel is located on the upper cover (130).
4. A substrate heater according to claim 1, characterized in that, It also includes a temperature monitoring module located inside the first vacuum chamber. The temperature monitoring module includes a first detector (300) and a second detector (400). The power terminals of the first detector (300) and the second detector (400) pass through the first channel and are located outside the first vacuum chamber. The power terminals of the first detector (300) and the second detector (400) can pass through the inside of the protruding tube (211), the sealing ring (230), and the sealing sleeve (220). The inside of the sealing ring (230) abuts against the outside of the power terminal to form a sealed connection.
5. A substrate heater according to claim 4, characterized in that, Both the first detector (300) and the second detector (400) have an electrode (500) connected to their terminals. The electrode (500) can pass through the inside of the protruding tube (211), the sealing ring (230), and the sealing sleeve (220). The inside of the sealing ring (230) abuts against the outside of the electrode (500) to form a sealed connection.
6. A substrate heater according to claim 5, characterized in that, The first bottom cover (210) is provided with at least three protruding tubes (211), and the power terminals of the heating module (110), the first detector (300) and the second detector (400) are respectively provided with the three protruding tubes (211).
7. A substrate heater according to claim 5, characterized in that, The sealing assembly (200) further includes a first connecting pipe (240) that can communicate with the first channel. The first bottom cover (210) is disposed on one end of the first connecting pipe (240). The first bottom cover (210) is provided with two protruding tubes (211). The first connecting pipe (240) is provided with a second channel. The sealing assembly (200) is disposed in the second channel. The heating module (110) and the power terminals of the first detector (300) are correspondingly disposed with the two protruding tubes (211) of the first bottom cover (210). The power terminals of the second detector (400) can pass through the second channel and extend to the outside of the sealing assembly (200).
8. A substrate heating device, comprising the substrate heater according to any one of claims 1 to 7, characterized in that: The rotating module (600) includes an outer cover (610) with a receiving cavity, a substrate support plate (620), and a rotating drive (630). The receiving cavity has a first opening and a third channel. The substrate support plate (620) is disposed at the first opening and fixedly connected to the outer cover (610). The rotating drive (630) can drive the outer cover (610) to rotate. The heating module (110) is disposed in the receiving cavity. The sealing assembly (200) is disposed outside the third channel and rotatably connected to the outer cover (610). The power terminal of the heating module (110) can pass through the third channel and be sealed and connected to the sealing assembly (200).
9. A substrate heating device according to claim 8, characterized in that, A heat insulation plate (611) is provided inside the cavity, and the heat insulation plate (611) is placed on top of the heating module (110). At least two heat insulation plates (611) are stacked vertically.
10. A substrate (800) heating device according to claim 8, characterized in that, The outer cover (610) has a notch (612) at one end near the first opening. The substrate tray (620) cooperates with the notch (612) to form a feed port for picking up and putting in the substrate (800). The diameter of the feed port is larger than the diameter of the substrate (800).