Wafer box cleaning equipment

Abstract

The utility model discloses a piece box cleaning device, and relates to the field of semiconductor devices. The wafer box cleaning equipment comprises a rack; the rotating frame is rotatably mounted in the rack through a rotating shaft; the loading frame is mounted on the rotating frame, is used for loading the wafer box and can drive the wafer box to rotate along with the rotating frame, and a locking assembly for selectively locking a door stop of the loading frame is arranged on the loading frame; the inductive sensor is arranged on the loading frame and used for detecting the locking state of the locking assembly; the conductive slip ring comprises a rotor and a stator which are connected with the rotating shaft, the rotor and the rotating frame rotate synchronously, the rotor is provided with a rotor outgoing line, the rotor outgoing line is wound around the rotating frame and then connected with the inductive sensor, and the stator is provided with a stator outgoing line which is used for being externally connected with a power supply. The wafer box cleaning equipment provided by the utility model is stable and reliable in detection effect and higher in safety.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, and more specifically, to a wafer cassette cleaning device. Background Technology

[0002] In semiconductor manufacturing, wafer cassettes are typically used to store and transport semiconductors. To meet cleanroom requirements, wafer cassette cleaning equipment is needed to clean the cassettes. This equipment consists of a rotating frame and a loading rack mounted on the rotating frame to hold the wafer cassettes. The wafer cassettes are cleaned as the rotating frame drives the loading rack to rotate.

[0003] For safety reasons, the loading rack is equipped with a wireless magnetic sensor to detect whether the loading rack door stop is locked. The film cassette cleaning equipment can only execute the cleaning procedure when the wireless magnetic sensor detects that the door stop is locked. However, the sensing distance of the wireless magnetic sensor is affected by its power supply, resulting in unstable detection performance and posing a certain safety hazard to the film cassette cleaning equipment. Utility Model Content

[0004] The purpose of this invention is to provide a tablet / cartridge cleaning device that has higher safety features.

[0005] The embodiments of this utility model provide a technical solution:

[0006] A tablet cartridge cleaning device, comprising:

[0007] frame;

[0008] A rotating frame is rotatably mounted within the frame via a rotating shaft;

[0009] A loading rack, installed on the rotating frame, is used to load tablet cassettes and can drive the tablet cassettes to rotate with the rotating frame. The loading rack is provided with a locking component that can selectively lock its door stop.

[0010] An inductive sensor, mounted on the loading rack, is used to detect the locking state of the locking assembly;

[0011] A conductive slip ring includes a rotor connected to the rotating shaft and a stator at least partially sleeved on the outside of the rotor. The rotor rotates synchronously with the rotating frame and has a rotor lead wire. The rotor lead wire winds around the rotating frame and is connected to the inductive sensor. The stator has a stator lead wire for connecting to an external power source.

[0012] In an optional embodiment, a cleaning assembly is also included, which is mounted in the middle of the rotating frame via a mounting base. The cleaning assembly is used to clean the cassette on the loading frame, and the stator is fixed to the mounting base.

[0013] In an optional embodiment, a connecting component and a fixed shaft are also included, wherein the rotating shaft is connected to the rotating frame via the connecting component, and the rotor is disposed on the connecting component;

[0014] One end of the fixed shaft is connected to the connecting assembly via a bearing, and the other end passes through the stator and rotor and is connected to the mounting base.

[0015] In an optional embodiment, the cleaning assembly includes a base and a spray assembly, wherein the base and the rotating shaft are disposed at opposite ends of the rotating frame, and the rotating frame is rotatable relative to the base;

[0016] One end of the spray assembly is connected to the base, and the other end extends into the interior of the rotating frame and is connected to the mounting base.

[0017] In an optional embodiment, the loading rack includes a frame body disposed on the rotating frame for loading the cassette, a door stop movably disposed on the frame body, and a locking assembly for locking the door stop to the frame body when the door stop is moved to a closed position.

[0018] In an optional embodiment, the locking assembly includes a bracket mounted on the frame and a locking member mounted on the door stop, wherein the bracket engages the locking member when the locking assembly locks the door stop.

[0019] In an optional embodiment, the locking component includes a connecting seat, a swing arm, and a counterweight. The connecting seat is disposed on the door stop, one end of the swing arm is hinged to the connecting seat, and the other end is connected to the counterweight.

[0020] The card holder has a card slot. When the locking assembly locks the door stop, the swing arm rotates relative to the connecting seat to be embedded in the card slot. The connecting seat and the counterweight are respectively located at both ends of the card slot.

[0021] In an optional embodiment, the inductive sensor is an inductive proximity sensor, which is mounted on the loading rack;

[0022] When the swing arm rotates to be inserted into the slot, the counterweight moves into the area above the inductive proximity sensor, and the inductive proximity sensor sends a positioning signal.

[0023] In an optional embodiment, a driving component is further included, which is connected to the rotating shaft and is used to drive the rotating shaft to rotate the rotating frame.

[0024] In an optional embodiment, the tablet cassette cleaning apparatus further includes a drying assembly for drying the tablet cassettes on the loading rack.

[0025] Compared to existing technologies, the cartridge cleaning equipment provided by this invention uses an inductive sensor instead of a wireless magnetic sensor, and is equipped with a corresponding conductive slip ring. The rotor output of the conductive slip ring is connected to the inductive sensor, while the stator output is connected to an external power supply. Because the rotor, loading frame, and inductive sensor rotate synchronously, the rotor output connecting to the inductive sensor will not experience cable tangling. This ensures that the inductive sensor can stably transmit signals while rotating with the loading frame, achieving stable and reliable detection results, thereby improving the safety of the cartridge cleaning equipment. Therefore, the beneficial effects of the cartridge cleaning equipment provided by this invention include: stable and reliable detection results and higher safety. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this utility model and therefore should not be considered as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without any creative effort.

[0027] Figure 1 A schematic diagram of the structure of a tablet cassette cleaning device provided for an embodiment of this utility model;

[0028] Figure 2 for Figure 1 Enlarged view of region A in the middle;

[0029] Figure 3 A cross-sectional view of a tablet cassette cleaning device provided for an embodiment of this utility model;

[0030] Figure 4 for Figure 3 A magnified view of region B in the middle.

[0031] Icons: 100-Disc cassette cleaning equipment; 110-Rotating frame; 120-Rotating shaft; 130-Loading frame; 131-Door stop; 132-Frame body; 140-Locking assembly; 141-Card holder; 142-Connecting seat; 143-Swing arm; 144-Counterweight; 150-Inductive sensor; 160-Conductive slip ring; 161-Rotor; 162-Stator; 170-Mounting seat; 180-Cleaning assembly; 181-Base; 182-Spray assembly; 190-Connecting assembly; 195-Fixed shaft; 196-Bearing; 199-Drive component. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0033] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0034] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0035] In the description of this utility model, it should be understood that the terms "upper", "lower", "inner", "outer", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the utility model product is usually placed in during use, or the orientation or positional relationship that is commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0036] Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0037] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, terms such as "set" and "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0038] The specific embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0039] Example

[0040] Please refer to Figure 1, Figure 1 The diagram shown is a partial structural schematic of the tablet cassette cleaning device 100 provided in this embodiment.

[0041] The tablet cassette cleaning device 100 provided in this embodiment includes a frame (not shown in the figure), a rotating frame 110, a loading frame 130, and a cleaning assembly 180. The rotating frame 110 is rotatably installed in the frame; the loading frame 130 is installed on the rotating frame 110 and is used to load tablets, and can drive the tablets to rotate with the rotating frame 110; the cleaning assembly 180 cooperates with the rotating frame 110 and can remain fixed during the rotation of the rotating frame 110.

[0042] In practical applications, after the tablet cassettes are loaded onto the loading rack 130, the rotating frame 110 drives the loading rack 130 to rotate. During this process, the cleaning component 180 remains stationary and cleans the tablet cassettes on the loading rack 130. The loading rack 130 is equipped with a door stop 131. The door stop 131 opens during the loading of the tablet cassettes and closes and locks after the loading of the tablet cassettes is completed.

[0043] Please refer to the following: Figure 2 , Figure 2 As shown Figure 1 An enlarged schematic diagram of region A in the middle.

[0044] For safety reasons, the loading rack 130 is also equipped with a locking component 140 for selectively locking the door stop 131. When the door stop 131 is closed, the locking component 140 locks the door stop 131 to prevent the door stop 131 from being thrown off during the rotation of the loading rack 130 with the rotating frame 110.

[0045] Furthermore, the cartridge cleaning device 100 provided in this embodiment also includes an inductive sensor 150, which is disposed on the loading rack 130 and used to detect the locking state of the locking assembly 140. It is understood that the locking state of the locking assembly 140 includes both complete locking and incomplete locking. When the inductive sensor 150 detects that the locking assembly 140 has completed locking, it sends a position signal.

[0046] The cartridge cleaning device 100 provided in this embodiment may include a controller. The controller can only execute the cleaning program after receiving the position signal from the inductive sensor 150, so that the rotating frame 110 drives the loading frame 130 to rotate, and the cleaning component 180 cleans the cartridges on the loading frame 130.

[0047] In fact, the loading rack 130 includes a frame 132, which is mounted on the rotating frame 110 for loading tablets. A door stop 131 is movably mounted on the frame 132. A locking assembly 140 is used to lock the door stop 131 to the frame 132 when the door stop 131 is moved to the closed state of the frame 132.

[0048] Specifically, the frame 132 has a loading cavity for loading cassettes, the opening of the loading cavity is located on one side of the frame 132, the door stop 131 is hinged to the frame 132, and can rotate relative to the frame 132 to block or open the loading cavity opening after being subjected to force, and the locking assembly 140 is used to lock the door stop 131 when the door stop 131 rotates to block the opening of the loading cavity.

[0049] In this embodiment, the locking assembly 140 includes a card holder 141 mounted on the frame 132 and a locking member mounted on the door stop 131. When the locking assembly 140 locks the door stop 131, the card holder 141 engages the locking member. In other words, when the card holder 141 engages the locking member, the inductive sensor 150 is triggered to detect and send a positioning signal.

[0050] Specifically, the locking component includes a connecting seat 142, a swing arm 143, and a counterweight 144. The connecting seat 142 is disposed on the door stop 131. One end of the swing arm 143 is hinged to the connecting seat 142, and the other end is connected to the counterweight 144. The locking seat 141 has a slot. When the locking assembly 140 locks the door stop 131, the swing arm 143 rotates relative to the connecting seat 142 to fit into the slot. The connecting seat 142 and the counterweight 144 are respectively located at both ends of the slot.

[0051] During the rotation of the door stop 131 relative to the frame 132, the connecting seat 142, the swing rod 143, and the counterweight 144 move synchronously. When the door stop 131 rotates to block the opening of the loading cavity, the swing rod 143 can rotate into the slot of the card seat 141 to complete the locking. In this embodiment, the opening of the slot faces upward. After the swing rod 143 rotates into the slot, the counterweight 144 is located at the end of the slot away from the connecting seat 142. In the width direction of the slot, the size of the counterweight 144 is larger than the width of the slot, which can abut against the card seat 141 to prevent the swing rod 143 from exiting the slot from the extension direction of the slot.

[0052] Understandably, in practical applications, with the door stop 131 open, the swing arm 143 can be in a roughly vertical position, and the counterweight 144 is located at the top of the swing arm 143 and supported by it. When the door stop 131 rotates to the closed frame 132, the counterweight 144 continues to move under inertia, causing the swing arm 143 to rotate downwards around the connecting seat 142 until the swing arm 143 is inserted into the slot, and the locking assembly 140 reaches the locked state.

[0053] In this embodiment, the inductive sensor 150 is an inductive proximity sensor, which is mounted on the loading rack 130. When the swing arm 143 rotates to the embedded slot, the counterweight 144 rotates into the area above the inductive proximity sensor, and the inductive proximity sensor sends a positioning signal.

[0054] Please refer to the following: Figure 3 and Figure 4 , Figure 3 The image shown is a cross-sectional view of the cartridge cleaning device 100. Figure 4 As shown Figure 3 A magnified view of region B in the middle.

[0055] In fact, the rotating frame 110 is rotatably mounted in the frame via the rotating shaft 120. The cartridge cleaning device 100 also includes a conductive slip ring 160, which includes a rotor 161 connected to the rotating shaft 120 and a stator 162 at least partially sleeved on the outside of the rotor 161. The rotor 161 rotates synchronously with the rotating frame 110 and has a rotor 161 outlet wire. The rotor 161 outlet wire is wound around the rotating frame 110 and connected to the inductive sensor 150. The stator 162 has a stator 162 outlet wire, which is used for external power supply.

[0056] By configuring the conductive slip ring 160 to connect the inductive sensor 150, during the rotation of the inductive sensor 150 with the loading frame 130, the stator 162 wires are wound around the cleaning assembly and connected to the external power supply and remain stationary, while the rotor 161 wires move synchronously with the rotor 161. This is equivalent to the rotor 161 wires and the inductive sensor 150 remaining relatively stationary, and the stator 162 wires remaining relatively stationary with the stator 162. This avoids the cables connecting the conductive slip ring 160 and the inductive sensor 150, and the cables connecting the conductive slip ring 160 and the power supply from getting tangled, ensuring that the inductive sensor 150 can stably transmit signals while rotating with the loading frame 130.

[0057] The cleaning assembly 180 is mounted in the middle of the rotating frame 110 via the mounting base 170, and the stator 162 is fixed on the mounting base 170. In fact, the cartridge cleaning device 100 also includes a connecting assembly 190 and a fixed shaft 195. The rotating shaft 120 is connected to the rotating frame 110 via the connecting assembly 190, and the rotor 161 is mounted on the connecting assembly 190. One end of the fixed shaft 195 is connected to the connecting assembly 190 via a bearing 196, and the other end passes through the rotor 161 and the stator 162 and is connected to the mounting base 170.

[0058] In practical applications, the rotating shaft 120 drives the rotating frame 110 to rotate via the connecting assembly 190, and the connecting assembly 190 drives the rotor 161 to rotate relative to the stator 162. Since the fixed shaft 195 is connected to the connecting assembly 190 via the bearing 196, the fixed shaft 195 can remain fixed and not rotate with the connecting assembly 190. The stator 162, the fixed shaft 195, and the mounting base 170 are connected to form a fixed overall structure.

[0059] In this embodiment, the connecting assembly 190 has an installation channel coaxially arranged with the rotating shaft 120. One end of the fixed shaft 195 is inserted into the installation channel. The inner edge of the bearing 196 is sleeved on the outer side wall of the fixed shaft 195, and the outer edge of the bearing 196 is circumferentially connected to the side wall of the installation channel. The rotor 161 protrudes from the end of the connecting assembly 190 away from the rotating shaft 120 and is rotatably sleeved on the outer side of the fixed shaft 195. The stator 162 is disposed on the outer side of the rotor 161.

[0060] In another embodiment, the specific structure of the connecting component 190 may be adjusted according to the actual application conditions, and in other embodiments, the stator 162 may also be disposed on the outside of the rotor 161.

[0061] In this embodiment, the cleaning assembly 180 includes a base 181 and a spray assembly 182. The base 181 and the rotating shaft 120 are disposed at opposite ends of the rotating frame 110, and the rotating frame 110 can rotate relative to the base 181. One end of the spray assembly 182 is connected to the base 181, and the other end extends into the interior of the rotating frame 110 and is connected to the mounting base 170.

[0062] In practice, the base 181 of the cleaning assembly 180 supports the rotating frame 110 and the spray assembly 182. The cassette cleaning device 100 provided in this embodiment also includes a drive component 199, which is connected to the rotating shaft 120 and used to drive the rotating shaft 120 to rotate the rotating frame 110. In practical applications, the drive component 199 drives the rotating shaft 120 to rotate the rotating frame 110 relative to the base 181, during which the spray assembly 182 and the mounting base 170 remain fixed.

[0063] The spray assembly 182 includes at least one spray pipe, one end of which is connected to the base 181 and the other end to the mounting base 170. Multiple nozzles are provided on the side wall of the spray pipe. During the rotation of the loading rack 130 by the rotating frame 110, the multiple nozzles on the spray pipe spray cleaning agent onto the loading rack 130 to rinse the multiple tablets loaded on the loading rack 130.

[0064] In addition, the tablet cassette cleaning device 100 provided in this embodiment also includes a drying assembly (not shown in the figure), which is used to dry the tablet cassettes on the loading rack 130. It is understood that the drying assembly can be mounted on the rack, and after the cleaning assembly 180 completes the cleaning of the tablet cassettes, the controller controls the drying assembly to dry the tablet cassettes.

[0065] In summary, the cartridge cleaning equipment 100 provided in this embodiment uses an inductive sensor 150 instead of a wireless magnetic sensor, and a conductive slip ring 160 is configured to connect the inductive sensor 150. This ensures that the inductive sensor 150 can stably transmit signals while rotating with the loading frame 130, thereby obtaining a stable and reliable detection effect and improving the safety of the cartridge cleaning equipment 100.

[0066] It is evident that the detection effect of the cartridge cleaning device 100 provided by this utility model is stable and reliable, and has higher safety.

[0067] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A cassette cleaning apparatus characterized by comprising: include: frame; A rotating frame (110) is rotatably mounted within the frame via a rotating shaft (120); A loading rack (130) is installed on the rotating frame (110) for loading tablet boxes and can drive the tablet boxes to rotate with the rotating frame (110). The loading rack (130) is provided with a locking assembly (140) that selectively locks its door stop (131). An inductive sensor (150) is disposed on the loading rack (130) for detecting the locking state of the locking assembly (140); The conductive slip ring (160) includes a rotor (161) connected to the rotating shaft (120) and a stator (162) at least partially sleeved on the outside of the rotor. The rotor (161) rotates synchronously with the rotating frame (110), and the rotor (161) has a rotor lead wire. The rotor lead wire is wound around the rotating frame (110) and connected to the inductive sensor (150). The stator (162) has a stator lead wire for connecting to an external power supply.

2. The magazine cleaning apparatus of claim 1, wherein It also includes a cleaning assembly (180) mounted in the middle of the rotating frame (110) via a mounting base (170), the cleaning assembly (180) being used to clean the cassette on the loading frame (130), and the stator (162) being fixed on the mounting base (170).

3. The magazine cleaning apparatus of claim 2, wherein It also includes a connecting assembly (190) and a fixed shaft (195), the rotating shaft (120) is connected to the rotating frame (110) through the connecting assembly (190), and the rotor (161) is disposed on the connecting assembly (190); One end of the fixed shaft (195) is connected to the connecting assembly (190) via a bearing, and the other end passes through the stator (162) and the rotor and is connected to the mounting base (170).

4. The magazine cleaning apparatus of claim 2, wherein The cleaning assembly (180) includes a base (181) and a spray assembly (182). The base (181) and the rotating shaft (120) are disposed at opposite ends of the rotating frame (110). The rotating frame (110) can rotate relative to the base (181). One end of the spray assembly (182) is connected to the base (181), and the other end extends into the interior of the rotating frame (110) and is connected to the mounting base (170).

5. The magazine cleaning apparatus of claim 1, wherein The loading rack (130) includes a frame (132) disposed on the rotating frame (110) for loading the cassette. The door stop (131) is movably disposed on the frame (132). The locking assembly (140) is used to lock the door stop (131) to the frame (132) when the door stop (131) is moved to the state of closing the frame (132).

6. The magazine cleaning apparatus of claim 5, wherein The locking assembly (140) includes a card holder (141) mounted on the frame (132) and a locking member mounted on the door stop (131). When the locking assembly (140) locks the door stop (131), the card holder (141) holds the locking member.

7. The magazine cleaning apparatus of claim 6, wherein The locking component includes a connecting seat (142), a swing rod (143), and a counterweight (144). The connecting seat (142) is disposed on the door stop (131). One end of the swing rod (143) is hinged to the connecting seat (142), and the other end is connected to the counterweight (144). The card holder (141) has a card slot. When the locking assembly (140) locks the door stop (131), the swing rod (143) rotates relative to the connecting seat (142) to be embedded in the card slot. The connecting seat (142) and the counterweight (144) are respectively located at both ends of the card slot.

8. The magazine cleaning apparatus of claim 7, wherein, The inductive sensor (150) is an inductive proximity sensor and is mounted on the loading rack (130); When the swing arm (143) rotates to be inserted into the slot, the counterweight (144) rotates into the area above the inductive proximity sensor, and the inductive proximity sensor sends a positioning signal.

9. The magazine cleaning apparatus of claim 1, wherein, It also includes a drive unit (199), which is connected to the rotating shaft (120) and is used to drive the rotating shaft (120) to rotate the rotating frame (110).

10. The magazine cleaning apparatus of claim 1, wherein, It also includes a drying assembly for drying the cassette on the loading rack (130).

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