Port polishing device for vacuum cavity machining

Abstract

The utility model discloses a port polishing device for vacuum cavity processing, which comprises a bottom plate, the top of the bottom plate is fixedly connected with a vertical plate, one side of the vertical plate is provided with a driving assembly, one side of the vertical plate far away from the driving assembly is provided with two clamping blocks, and the opposite sides of the two clamping blocks are provided with chutes. By arranging the annular pipe, the polisher, the dust collecting box, the fan and the like, the position of the polisher can be adjusted under the driving of the electric guide rail while the connecting plate rotates, so that ports at different positions of the vacuum cavity can be conveniently polished, the working efficiency is improved when the ports of the vacuum cavity are automatically polished, and the labor intensity of workers is reduced. And meanwhile, under the action of a dust removal cover and an annular pipe, dust generated in the grinding process can be adsorbed and collected under the action of a draught fan and a dust collection box, an operator is prevented from adsorbing the dust into the body, and the safety of body health is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of vacuum cavity grinding technology, and in particular to a port grinding device for vacuum cavity processing. Background Technology

[0002] A vacuum chamber is a structure developed to reduce the number of vacuum chambers in semiconductor applications. Therefore, it is generally equipped with a moving vacuum with a pre-installed air bearing and a differential vacuum groove. As a result, during the manufacturing process, the ends of the formed workpiece need to be polished to ensure that they are in a smooth state.

[0003] Existing vacuum chambers have multiple ports, which need to be polished during processing. Traditional polishing devices often require workers to use sandpaper to polish the ports of vacuum chambers, which is inefficient, produces poor polishing results, and can lead to dust inhalation, seriously affecting the operator's health. Safety cannot be guaranteed when polishing the ports of vacuum chambers. Therefore, a port polishing device for vacuum chamber processing is proposed. Utility Model Content

[0004] The technical problem this invention aims to solve is that the use of sandpaper for polishing is inefficient, produces poor polishing results, and causes dust to be inhaled during the polishing process, seriously affecting the operator's health. Furthermore, safety cannot be guaranteed when polishing the port of a vacuum chamber.

[0005] To solve the above-mentioned technical problems, the present invention provides a port grinding device for vacuum cavity processing, comprising a base plate, a vertical plate fixedly connected to the top of the base plate, a driving assembly provided on one side of the vertical plate, two clamping blocks provided on the side of the vertical plate away from the driving assembly, each of the two clamping blocks having an inclined groove on its opposite side, a transmission assembly provided on the side of the vertical plate near the driving assembly, a fixing plate fixedly connected to the top of the base plate, a lead screw rotatably connected between the fixing plate and the vertical plate, a driving block being threadedly connected to the outside of the lead screw, a fixing block fixedly connected to the top of the driving block, a rotating shaft rotatably connected to one side of the fixing block, a connecting plate fixedly connected to one end of the rotating shaft, and an electric guide rail fixedly installed on one side of the connecting plate;

[0006] A grinding machine is fixedly connected to the drive end of the electric guide rail. A dust hood is fixedly connected to one side of the connecting plate. The dust hood is located outside the grinding machine. An annular tube is fixedly connected inside the dust hood. Multiple dust suction ports are opened on one side of the annular tube. A conduit is fixedly connected to the side of the annular tube away from the dust suction ports, and one end of the conduit extends through to the outside of the dust hood. A dust collection box is fixedly connected to one side of the fixing block. A fan is fixedly connected to one side of the dust collection box. One end of the conduit is installed through into the inside of the dust collection box.

[0007] Preferably, the driving assembly includes two limiting plates, which are fixedly connected to one side of the vertical plate. A bidirectional screw is rotatably connected between the two limiting plates. A driving frame is threadedly connected to the outside of the bidirectional screw. One end of each driving frame is fixedly connected to one side of a corresponding clamping block. The driving frame can be moved relative to the other side by the bidirectional screw, thereby adjusting the position of the clamping block and facilitating clamping when grinding the port of the vacuum chamber.

[0008] Preferably, the transmission assembly includes a first servo motor, which is fixedly connected to one side of the vertical plate. A main gear is fixedly connected to the output end of the first servo motor. A driven gear is fixedly connected to the outside of the bidirectional screw. The driven gear and the main gear are meshed together. The main gear is driven to rotate by the first servo motor, and the main gear meshes with and drives the driven gear to rotate. After the first servo motor stops, a self-locking effect can be achieved to ensure stability between the main gear and the driven gear.

[0009] Preferably, two transverse grooves are symmetrically formed on the top of the base plate, and a slider is embedded in each of the two transverse grooves. One side of each slider is fixedly connected to both sides of the drive block. By allowing the sliders to slide inside the transverse grooves, the drive block can be limited while ensuring greater stability when the drive block moves.

[0010] Preferably, a motor is fixedly connected to one side of the surface of the fixed plate, and the output end of the motor extends through to one side of the fixed plate and is fixedly connected to one end of the lead screw. The motor can drive the lead screw on one side of the fixed plate.

[0011] Preferably, a second servo motor is fixedly connected to one side of the fixed block, and the output end of the second servo motor passes through the fixed block and is fixedly connected to one end of the rotating shaft. The rotating shaft can be driven by the second servo motor.

[0012] Preferably, a collection box is slidably installed on one side of the dust collection box, so that the dust adsorbed by the dust collection box falls into the collection box for easy cleaning.

[0013] The beneficial effects of this utility model are as follows:

[0014] 1. This utility model, by setting up a structure including an annular tube, a grinder, a dust collection box, and a fan, allows the grinder to be positioned and adjusted under the drive of an electric guide rail while the connecting plate rotates. This facilitates grinding of different ports in the vacuum chamber, improving work efficiency by automating the grinding of the vacuum chamber ports. At the same time, the dust removal hood and annular tube, along with the action of the fan and dust collection box, can adsorb and collect the dust generated during grinding, preventing the operator from inhaling dust and ensuring safety for their health.

[0015] 2. This utility model, by setting up a drive assembly, a transmission assembly, a clamping block, and an inclined groove, can rotate a bidirectional lead screw under the meshing transmission of the main gear and the driven gear, and can drive the clamping block on one side of the drive frame, which is convenient for clamping when grinding the port of the vacuum chamber, helps to maintain stability during the grinding of the vacuum chamber, and improves the overall use effect. Attached Figure Description

[0016] Figure 1 This is a first-view perspective perspective view of a port grinding device for vacuum cavity processing according to the present invention.

[0017] Figure 2 This is a second-view perspective perspective view of a port grinding device for vacuum cavity processing according to the present invention.

[0018] Figure 3 This is a partial structural schematic diagram of a port grinding device for vacuum cavity processing according to the present invention;

[0019] Figure 4 This utility model Figure 2 A magnified view of A in the middle.

[0020] In the diagram: 1. Vertical plate; 2. Base plate; 3. Main gear; 4. First servo motor; 5. Bidirectional screw; 6. Drive frame; 7. Limiting plate; 8. Clamping block; 9. Annular tube; 10. Dust hood; 11. Connecting plate; 12. Conduit; 13. Dust suction port; 14. Motor; 15. Fixing plate; 16. Lead screw; 17. Fixing block; 18. Driven gear; 19. Horizontal groove; 20. Inclined groove; 21. Fan; 22. Dust collection box; 23. Second servo motor; 24. Grinding machine; 25. Electric guide rail; 26. Rotating shaft; 27. Slider; 28. Drive block. Detailed Implementation

[0021] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0022] Please see Figures 1 to 3A port grinding device for vacuum cavity processing includes a base plate 2, a vertical plate 1 fixedly connected to the top of the base plate 2, a drive assembly on one side of the vertical plate 1, two clamping blocks 8 on the side of the vertical plate 1 away from the drive assembly, and inclined grooves 20 on opposite sides of the two clamping blocks 8 to facilitate clamping and fixing the vacuum cavity. A transmission assembly is provided on the side of the vertical plate 1 near the drive assembly. A fixing plate 15 is fixedly connected to the top of the base plate 2, and a lead screw 16 is rotatably connected between the fixing plate 15 and the vertical plate 1. A drive block 28 is threadedly connected to the outside of the lead screw 16, and a fixing block 17 is fixedly connected to the top of the drive block 28. The drive block 28 is moved by the rotation of the lead screw 16, and the fixing block 17 is moved by the movement of the drive block 28. A rotating shaft 26 is rotatably connected to one side of the fixing block 17, and a connecting plate 11 is fixedly connected to one end of the rotating shaft 26. The rotating shaft 26 facilitates the rotation of the connecting plate 11. An electric guide rail 25 is fixedly installed on one side of the connecting plate 11.

[0023] The drive end of the electric guide rail 25 is fixedly connected to the grinder 24, which facilitates the movement of the grinder 24. A dust cover 10 is fixedly connected to one side of the connecting plate 11. The dust cover 10 is located outside the grinder 24. An annular tube 9 is fixedly connected inside the dust cover 10. Multiple suction ports 13 are opened on one side of the annular tube 9. A conduit 12 is fixedly connected to the side of the annular tube 9 away from the suction ports 13, and one end of the conduit 12 extends through to the outside of the dust cover 10. A dust collection box 22 is fixedly connected to one side of the fixing block 17. A fan 21 is fixedly connected to one side of the dust collection box 22. One end of the conduit 12 is installed through to the inside of the dust collection box 22, which can adsorb and collect the dust generated during the grinding process. A collection box is slidably installed on one side of the dust collection box 22, which facilitates the dust adsorbed by the dust collection box 22 to fall into the collection box for easy cleaning.

[0024] like Figure 1 , Figure 2 as well as Figure 4 As shown, two horizontal slots 19 are symmetrically opened on the top of the base plate 2. A slider 27 is slidably connected inside each horizontal slot 19. One side of the two sliders 27 is fixedly connected to both sides of the drive block 28. By sliding the sliders 27 inside the horizontal slots 19, the drive block 28 can be limited while ensuring that the drive block 28 moves more stably. A motor 14 is fixedly connected to one side of the surface of the fixed plate 15. The output end of the motor 14 extends through to one side of the fixed plate 15 and is fixedly connected to one end of the lead screw 16. The motor 14 can drive the lead screw 16 on one side of the fixed plate 15. A second servo motor 23 is fixedly connected to one side of the fixed block 17. The output end of the second servo motor 23 passes through the fixed block 17 and is fixedly connected to one end of the rotating shaft 26. The second servo motor 23 can drive the rotating shaft 26.

[0025] like Figure 1 and Figure 2 As shown, the drive assembly includes two limiting plates 7, which are fixedly connected to one side of the vertical plate 1. A bidirectional screw 5 is rotatably connected between the two limiting plates 7. A drive frame 6 is threadedly connected to the outside of the bidirectional screw 5. One end of each drive frame 6 is fixedly connected to one side of a corresponding clamping block 8. The drive frame 6 can be moved relative to the bidirectional screw 5, thereby adjusting the position of the clamping block 8 and facilitating clamping during grinding of the vacuum chamber port. The transmission assembly includes a first servo motor 4, which is fixedly connected to one side of the vertical plate 1. A main gear 3 is fixedly connected to the output end of the first servo motor 4. A driven gear 18 is fixedly connected to the outside of the bidirectional screw 5. The driven gear 18 meshes with the main gear 3. The first servo motor 4 drives the main gear 3 to rotate, and the main gear 3 meshes with the driven gear 18 to rotate. After the first servo motor 4 stops, a self-locking effect is achieved to ensure stability between the main gear 3 and the driven gear 18.

[0026] In use, the vacuum chamber to be processed is placed between two clamping blocks 8. The first servo motor 4 is turned on, driving the main gear 3 to rotate. The rotation of the main gear 3 drives the driven gear 18 to rotate, which in turn drives the bidirectional screw 5 to rotate. The rotation of the bidirectional screw 5 moves the drive frame 6, which in turn moves the two clamping blocks 8. Simultaneously, the inclined groove 20 clamps and fixes the vacuum chamber to maintain relative stability. At the same time, the motor 14 is turned on, driving the lead screw 16 to rotate. The rotation of the lead screw 16 moves the drive block 28, which in turn moves the vacuum chamber. The moving fixed block 17 is moved so that the dust removal hood 10 is placed outside the vacuum chamber. The second servo motor 23 is turned on, and the second servo motor 23 drives the rotating shaft 26 to rotate. The rotating shaft 26 can drive the connecting plate 11 to rotate, and the grinding machine 24 can be moved to a suitable position by the action of the electric guide rail 25. Grinding can be performed on the ports at different positions. Dust will be generated during the grinding process. The fan 21 is turned on, and the dust collection box 22 and the duct 12 create a negative pressure inside the dust collection box 22. The dust is adsorbed by the cooperation of the annular pipe 9 and the suction port 13. When the work is stopped, the collection box on one side of the dust collection box 22 can be opened for centralized cleaning, which is very convenient.

[0027] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A port polishing device for vacuum chamber processing comprising a base plate (2) characterised in that: A vertical plate (1) is fixedly connected to the top of the base plate (2). A drive assembly is provided on one side of the vertical plate (1). Two clamping blocks (8) are provided on the side of the vertical plate (1) away from the drive assembly. An inclined groove (20) is opened on the opposite side of the two clamping blocks (8). A transmission assembly is provided on the side of the vertical plate (1) near the drive assembly. A fixing plate (15) is fixedly connected to the top of the base plate (2). A lead screw (16) is rotatably connected between the fixing plate (15) and the vertical plate (1). A drive block (28) is threadedly connected to the outside of the lead screw (16). A fixing block (17) is fixedly connected to the top of the drive block (28). A rotating shaft (26) is rotatably connected to one side of the fixing block (17). A connecting plate (11) is fixedly connected to one end of the rotating shaft (26). An electric guide rail (25) is fixedly installed on one side of the connecting plate (11). The electric guide rail (25) is fixedly connected to a grinding machine (24) for processing the port of the vacuum chamber. A dust hood (10) is fixedly connected to one side of the connecting plate (11). The dust hood (10) is located outside the grinding machine (24). An annular tube (9) is fixedly connected inside the dust hood (10). Multiple dust suction ports (13) are opened on one side of the annular tube (9). A conduit (12) is fixedly connected to the side of the annular tube (9) away from the dust suction ports (13). One end of the conduit (12) extends through to the outside of the dust hood (10). A dust collection box (22) is fixedly connected to one side of the fixing block (17). A fan (21) is fixedly connected to one side of the dust collection box (22). One end of the conduit (12) is installed through to the inside of the dust collection box (22).

2. A port polishing device for vacuum chamber processing as defined in claim 1, wherein: The drive assembly includes two limiting plates (7), which are fixedly connected to one side of the vertical plate (1). A bidirectional screw (5) is rotatably connected between the two limiting plates (7). A drive frame (6) is threadedly connected to the outside of the bidirectional screw (5). One end of the two drive frames (6) is fixedly connected to one side of the corresponding clamping block (8).

3. A port polishing device for vacuum chamber processing as defined in claim 2, wherein: The transmission assembly includes a first servo motor (4), which is fixedly connected to one side of the vertical plate (1). The output end of the first servo motor (4) is fixedly connected to a main gear (3). A driven gear (18) is fixedly connected to the outside of the bidirectional screw (5). The driven gear (18) and the main gear (3) are meshed together.

4. A port polishing device for vacuum chamber processing as defined in claim 1, wherein: The bottom plate (2) has two symmetrical horizontal grooves (19) on its top. Each of the two horizontal grooves (19) has a slider (27) embedded in it. One side of each slider (27) is fixedly connected to both sides of the drive block (28).

5. A port polishing device for vacuum chamber processing as defined in claim 1, wherein: A motor (14) is fixedly connected to one side of the surface of the fixed plate (15), and the output end of the motor (14) extends through to one side of the fixed plate (15) and is fixedly connected to one end of the lead screw (16).

6. A port polishing device for vacuum chamber processing as defined in claim 1, wherein: A second servo motor (23) is fixedly connected to one side of the fixed block (17), and the output end of the second servo motor (23) passes through the fixed block (17) and is fixedly connected to one end of the rotating shaft (26).

7. The port grinding device for vacuum cavity processing according to claim 1, characterized in that: The dust collecting box (22) is slidably installed on one side of the collecting box.

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