Automatic optical detection equipment for ceramic substrate

Abstract

The utility model discloses automatic optical detection equipment for a ceramic substrate. The automatic optical detection equipment comprises a conveying module, a feeding module, a front surface detection module, an overturning module, a back surface detection module and a discharging module, the conveying module achieves directional conveying of the ceramic substrate through a conveying belt. The feeding module takes out the ceramic substrates from the stock bin and places the ceramic substrates on the conveying belt with the front faces facing upwards. The front surface detection module performs automatic optical detection on the front surface of the substrate. And the overturning module overturns the substrate subjected to front surface detection, so that the back surface of the substrate faces upwards. The reverse side detection module carries out automatic optical detection on the reverse side of the substrate. And the blanking module automatically classifies the substrates and puts the substrates into different blanking bins according to the detection results of the front and back surfaces. The whole process is precisely and coordinately operated by a control system, and the full-automatic process from automatic feeding to automatic discharging is achieved. The equipment can effectively detect tiny defects on the front and back surfaces of the ceramic substrate, reduces manual intervention, and remarkably improves the detection efficiency and quality.

Description

Technical Field

[0001] This utility model relates to the field of testing technology, and in particular to an automatic optical testing device for ceramic substrates. Background Technology

[0002] Ceramic substrates are high-performance ceramic materials with excellent thermal conductivity, insulation, low dielectric constant and loss, and a coefficient of thermal expansion comparable to silicon. In the context of rapid advancements in electronic technology, ceramic substrates are finding increasingly widespread applications, becoming ideal materials for high-density, high-power, and high-speed integrated circuit packaging and substrates. With the development of emerging technologies such as 5G communication, the Internet of Things, and new energy vehicles, the demand for high-performance ceramic substrates continues to rise.

[0003] Traditional ceramic substrate inspection relies on manual visual inspection, which is highly susceptible to subjective factors, easily leading to missed or over-detected defects and low efficiency. This invention employs a fully automated inspection system, including automatic loading, conveying, camera detection, and unloading of the ceramic substrates. This significantly reduces human error, improves the detection rate, greatly increases production efficiency and capacity, enhances profitability, and makes the inspected ceramic substrates more competitive. Utility Model Content

[0004] Therefore, it is necessary to address the poor hygiene issues in existing bottle cap production systems by providing a method to improve the hygiene standards and quality of the inspected ceramic substrates. This method resolves the problems of missed and over-detected defects in ceramic substrates caused by subjective factors in manual visual inspection, as well as the resulting low inspection efficiency.

[0005] An automated optical inspection device for ceramic substrates, comprising:

[0006] A conveying module includes at least one conveyor belt for conveying the ceramic substrate to be tested along the conveying direction;

[0007] The feeding module includes at least one feeding bin and at least one feeding device. The feeding bin is used to hold the ceramic substrate to be tested, and the feeding device is used to take the ceramic substrate to be tested from the feeding bin and place it face up on the conveyor belt.

[0008] A front detection module is located downstream of the feeding module along the conveying direction and is used to detect the front side of the ceramic substrate to be detected on the conveyor belt.

[0009] A flipping module is located downstream of the front detection module along the conveying direction and is used to flip the ceramic substrate to be detected on the conveyor belt so that its reverse side faces upward.

[0010] A reverse detection module is located downstream of the flipping module along the conveying direction and is used to detect the reverse side located on the conveyor belt;

[0011] A feeding module, located downstream of the reverse detection module along the conveying direction, includes multiple feeding bins and a feeding device. The multiple feeding bins are used to receive ceramic substrates classified according to different detection results. The feeding device is used to place the ceramic substrates to be detected into the corresponding feeding bins based on the detection results of the front and reverse detection modules.

[0012] The control system is used to control the operation of the conveying module, the feeding module, the front detection module, the flipping module, the back detection module, and the unloading module.

[0013] In one embodiment, the conveying module includes at least two belt conveyors arranged linearly in sequence along the conveying direction and having gaps at their ends.

[0014] In one embodiment, the feeding device includes two first feeding bins and two second feeding bins. The two first feeding bins are respectively disposed on both sides of the conveyor belt, and the two second feeding bins are respectively disposed on the conveyor belt and located downstream of the first feeding bins along the conveying direction. The feeding device includes a first feeding device and a second feeding device, which correspond to the first feeding bins and the second feeding bins, respectively.

[0015] In one embodiment, the front detection module includes:

[0016] The first line scan camera is positioned above the conveyor belt;

[0017] A first back-side linear scanning light source is disposed below the conveyor belt and is used to illuminate the ceramic substrate being inspected upwards; and

[0018] The first side line scan light source is located above the side of the conveyor belt and is used to obliquely illuminate the front side of the ceramic substrate being inspected.

[0019] In one embodiment, the flipping module includes:

[0020] A suction cup plate, having multiple suction ports and connected to a first vacuum generator; and

[0021] A flip motor is used to drive the suction cup plate to rotate at least 180 degrees to flip the substrate.

[0022] In one embodiment, the reverse detection module includes:

[0023] The second line scanning camera is positioned above the conveyor belt;

[0024] A second back-side linear scanning light source is disposed below the conveyor belt and is used to illuminate the ceramic substrate being inspected upwards; and

[0025] The second side line scan light source is located above the conveyor belt side and is used to obliquely illuminate the back of the ceramic substrate being inspected.

[0026] In one embodiment, the plurality of feeding bins are arranged in a linear fashion, and the feeding device includes a vacuum belt conveyor assembly disposed above the plurality of feeding bins, having a vacuum belt with suction holes, the vacuum belt running on a support bar having a cavity with selective vacuuming capability.

[0027] In one embodiment, the support bar has multiple connection ports on its side, each of which is connected to a cavity and connected to a second vacuum generator through an independent air valve.

[0028] In one embodiment, the unloading device further includes a blower mechanism having an air nozzle corresponding to the unloading bin, for blowing the substrate from the vacuum belt into the corresponding unloading bin by blowing air when the substrate reaches above the target unloading bin.

[0029] In one embodiment, the nozzle of the blower mechanism is connected to an air source via an independently controlled solenoid valve.

[0030] The aforementioned automated optical inspection equipment for ceramic substrates, through the precise coordination of the various modules, achieves a fully automated process from automatic feeding, automatic optical inspection of the front side of the substrate, automatic flipping of the substrate, automatic optical inspection of the back side of the substrate, and finally automatic sorting and unloading based on the inspection results. This effectively improves the quality control level and production efficiency of ceramic substrate production, and enhances the market competitiveness of enterprises. Attached Figure Description

[0031] Figure 1 This is a perspective view of an automatic optical inspection device for ceramic substrates according to one embodiment of the present invention;

[0032] Figure 2 for Figure 1 A perspective view of the loading module of the automated optical inspection equipment for ceramic substrates shown in the figure from one direction;

[0033] Figure 3 for Figure 1 A perspective view of the loading module of the automated optical inspection equipment for ceramic substrates shown from another direction;

[0034] Figure 4 for Figure 1 A perspective view of the front inspection module of the automated optical inspection equipment for ceramic substrates shown in the figure.

[0035] Figure 5 , Figure 6 This is a perspective view of the flip-up module of the automated optical inspection equipment for ceramic substrates, wherein... Figure 5 This is the state during material suction. Figure 6 This refers to the state of the material during discharge.

[0036] Figure 7 for Figure 1 A perspective view of the reverse side inspection module of the automated optical inspection equipment for ceramic substrates shown in the figure.

[0037] Figure 8 for Figure 1 A perspective view of the unloading module of the automated optical inspection equipment for ceramic substrates shown in the figure.

[0038] Figure 9 for Figure 8 A 3D view of the vacuum belt assembly of the feeding module shown;

[0039] Figure 10 This is a 3D view of the support bar for the vacuum belt assembly.

[0040] Explanation of reference numerals in the attached figures:

[0041] 10: First belt conveyor

[0042] 12: Conveyor belt (first belt conveyor)

[0043] 20: Second belt conveyor

[0044] 22: Conveyor belt (second belt conveyor)

[0045] 30: Third belt conveyor

[0046] 32: Conveyor belt (third belt conveyor)

[0047] 40: Fourth Belt Conveyor

[0048] 42: Conveyor belt (fourth belt conveyor)

[0049] 50: Feeding Module

[0050] 51a: First feeding bin

[0051] 51b: First feeding bin

[0052] 51c: Second feeding bin

[0053] 51d: Second feeding bin

[0054] 52a: First feeding device

[0055] 521a: First crossbeam

[0056] 522a: First suction cup

[0057] 523a: First vertical rod

[0058] 5241a: First drive motor

[0059] 5242a: First Cam Assembly

[0060] 5243a: First stent

[0061] 52b: Second feeding device

[0062] 521b: Second crossbeam

[0063] 522b: Second suction cup

[0064] 523b: Second vertical rod

[0065] 5241b: Second drive motor

[0066] 5242b: Second Cam Assembly

[0067] 5243b: Second stent

[0068] 60: Front detection module

[0069] 611: First Sensor

[0070] 612: First reverse line scan light source

[0071] 613: First-line scanning camera

[0072] 614: Side-scanning light source

[0073] 70: Flip Module

[0074] 711: Second Sensor

[0075] 712: First Vacuum Generator

[0076] 713: Suction Cup Plate

[0077] 714: Reversing Motor

[0078] 80: Reverse side detection module

[0079] 811: Third Sensor

[0080] 812: Second reverse-side linear scan light source

[0081] 813: Second-line scanning camera

[0082] 814: Second side line scan light source

[0083] 90: Material feeding module

[0084] 91: Feeding bin

[0085] 91a: OK silo

[0086] 91b: Repair hopper

[0087] 91c:NG silo

[0088] 91d: Specify defective hopper

[0089] 91e: Scrap silo

[0090] 92: Fourth sensor

[0091] 93: Feeding device

[0092] 931: Vacuum Belt Conveyor Assembly

[0093] 9311a: Front drive roller

[0094] 9311: Rear drive roller

[0095] 9312: Support bar

[0096] 9316: Vacuum Belt

[0097] 9313: Cavity

[0098] 9314: Adsorption port

[0099] 9315: Connection Port

[0100] 932: Second Vacuum Generator

[0101] 933: Air Valve

[0102] 9341: Air valve

[0103] 100: Rack. Detailed Implementation

[0104] To make the above-mentioned objectives, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model are described clearly and completely below with reference to the accompanying drawings. Obviously, the specific details described below are only a part of the embodiments of this utility model, and this utility model can be implemented in many other embodiments different from those described herein. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0105] In this document, when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The directional terms such as "front," "back," "up," and "down" are defined based on the location of the components in the accompanying drawings and their relative positions, and are merely for clarity and convenience in expressing the technical solution. It should be understood that the use of these directional terms should not limit the scope of protection claimed by this utility model.

[0106] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0107] Please refer to Figure 1 The automatic optical inspection equipment for ceramic substrates in one embodiment of this utility model is used for AOI (Automated Optical Inspection) inspection of ceramic substrates. It includes: a conveying module, a feeding module 50, a front inspection module 60, a flipping module 70, a back inspection module 80, a unloading module 90, and a control system (not shown). All modules are mounted and fixed on an integral frame 100.

[0108] Conveyor Module

[0109] The conveying module is responsible for carrying the ceramic substrate to be tested (hereinafter referred to as "substrate") and conveying it from the previous station to the next station according to a predetermined path and speed, through all stages such as loading, front inspection, flipping, back inspection and unloading.

[0110] In this embodiment, the conveying module consists of a first belt conveyor 10, a second belt conveyor 20, a third belt conveyor 30, and a fourth belt conveyor 40. These four conveyors are positioned along the conveying direction of the substrate (e.g., ...). Figure 1 The substrates are arranged linearly from left to right, with minimal gaps between the beginning and end to ensure a smooth transition.

[0111] The first, second, third, and fourth belt conveyors 10, 20, 30, and 40 each include a frame, at least one main drive roller (not shown), at least one driven roller (not shown), and conveyor belts 12, 22, 32, and 42. The frame is typically a rectangular frame structure made of aluminum profile or stainless steel, providing support. The drive roller is connected to a drive motor (not shown) via a coupling or pulley. The driven roller rotates with the conveyor belt. Preferably, the conveyor belts are two or more (two are preferred in this embodiment) parallel narrow conveyor belts. A predetermined gap is provided between the two belts, the gap width being less than the minimum width of the substrate, ensuring that the substrate can be stably mounted on the two belts while allowing illumination from a detection light source or detection by a sensor below. The conveyor belts 12, 22, 32, and 42 are tensioned and mounted around the corresponding drive and driven rollers of the conveyor.

[0112] Conveyors 10, 20, 30, and 40 are installed and fixed at the same height along a straight line on frame 100 to ensure that the conveying planes are on the same horizontal line. The transition between adjacent conveyors is smooth.

[0113] Feeding module 50

[0114] The feeding module 50 automatically picks up the substrate to be tested from the feeding bin and places it precisely onto the conveyor belt 12 of the first belt conveyor 10 with its face facing up.

[0115] like Figure 2 , 3 As shown, the feeding module 50 includes at least one feeding bin and at least one feeding device. The feeding bin is used to store the ceramic substrate to be tested, and the feeding device is used to automatically grab the substrate to be tested from the bin and accurately place it onto the conveyor belt 12 of the first belt conveyor 10 with its face up.

[0116] In this embodiment, the feeding bins include two first feeding bins 51a and 51b and two second feeding bins 51c and 51d to improve efficiency. The two first feeding bins 51a and 51b are arranged opposite each other on both sides of the conveyor belt 12 of the first belt conveyor 10, and the two second feeding bins 51c and 51d are arranged opposite each other on both sides of the conveyor belt 12 of the first belt conveyor 10, located downstream of the two first feeding bins 51a and 51b along the conveying direction. The bins 51, 51a, 51b, 51c, and 51d are typically in the form of boxes or racks, with specific internal structures (such as guide grooves) for stacking or accommodating a certain number of substrates.

[0117] The feeding device is set up corresponding to the feeding bin. In this embodiment, it includes a first feeding device 52a and a second feeding device 52b. The first feeding device 52a includes a first crossbeam 521a, a first suction cup 522a, a first vertical rod 523a, and a first driving mechanism. The first crossbeam 521a is elongated, and its length direction is perpendicular to the substrate conveying direction (i.e., it extends along the width direction of the first conveyor belt).

[0118] At least two first suction cups 522a are installed at both ends of the lower surface of the first crossbeam 521a. The suction cups 522a are hollow inside and are connected to a vacuum source (not shown, such as a vacuum generator or vacuum pump) through an air pipe (not shown).

[0119] The first vertical rod 523a is cylindrical or square in shape, with its axis extending vertically. Its lower end is rigidly connected (e.g., by bolts or welding) to the middle of the first crossbeam 521a. Its upper end is connected to the output end of the first drive mechanism.

[0120] The first drive mechanism is used to drive the first vertical rod 523a and the connected first crossbeam 521a and first suction cup 522a to perform spatial movements (including at least vertical lifting and horizontal movement). As an example, the first drive mechanism includes a first drive motor 5241a and a first cam assembly 5242a. The first drive motor 5241a can be a servo motor or a stepper motor, providing the power source. It is mounted and fixed at a specific position on the frame 100 (e.g., above the loading module area) via a first bracket 5243a. The first cam assembly 5242a includes a specially designed cam and a follower. The output shaft of the first motor 5241a is connected to the input end of the cam assembly 5242a (e.g., to drive the cam to rotate). The profile curve of the cam cooperates with the follower (connected to the upper end of the first vertical rod 523a) to convert the rotational motion of the motor into precise, predetermined vertical lifting and horizontal reciprocating motion (from above the hopper to above the belt) of the first vertical rod 523a.

[0121] The second feeding device 52b has the same structure as the first feeding device 52a, including a second crossbeam 521b, a second suction cup 522b, a second vertical rod 523b, and a second drive mechanism. Its arrangement is similar to that of the first feeding device 52a, serving the second feeding bins 51c and 51d. The second drive mechanism includes a second drive motor 5241b and a second cam assembly 5242b. The second drive motor 5241b is mounted and fixed at a specific position on the frame 100 via a second bracket 5243b.

[0122] The working principle and operation process of the feeding module 50 are as follows:

[0123] 1. The control system issues a feeding command.

[0124] 2. The first driving mechanism drives the first vertical rod 523a to descend, so that the first suction cup 522a contacts the top substrate in the first feeding bin 51a or 51b.

[0125] 3. The vacuum system evacuates the first suction cup 522a to generate negative pressure and adsorb the substrate.

[0126] 4. The first driving mechanism drives the first vertical rod 523a to rise, lifting the substrate.

[0127] 5. The first driving mechanism drives the first vertical rod 523a and the adsorbed substrate to move horizontally to directly above the first belt conveyor 10.

[0128] 6. The first drive mechanism drives the first vertical rod 523a to descend, gently placing the substrate on the two conveyor belts 12, ensuring that the front of the substrate is facing up and located in the middle of the belt.

[0129] 7. The vacuum system stops evacuating, and the first suction cup 522a releases the substrate.

[0130] 8. The first drive mechanism drives the first vertical rod 523a to rise and move horizontally back above the hopper, ready for the next grab.

[0131] 9. Simultaneously or alternately, the second feeding device 52b performs the same material handling and discharging actions on the second feeding bins 51c and 51d. This dual-channel design significantly improves feeding efficiency.

[0132] 10. The first belt conveyor 10 starts (or runs continuously) and transports the placed substrate to the next station - the front detection module 60.

[0133] Front detection module 60

[0134] The front inspection module 60 is used to perform high-precision, non-contact appearance defect inspection on the front side of the delivered substrate.

[0135] like Figure 4 As shown, the front detection module 60 includes a first sensor 611, a first reverse line scan light source 612, a first line scan camera 613, and a side line scan light source 614.

[0136] The first sensor 611 is typically a photoelectric sensor (such as a through-beam or diffuse reflective type), installed at the entrance of the detection area to detect whether the substrate is about to enter the detection field of view. It is fixed to the side of the conveyor frame by a bracket. The signal line is connected to the control system.

[0137] The first reverse-side line scan light source 612 is installed below the gap between the end of the first belt conveyor 10 and the beginning of the second belt conveyor 20, illuminating the edge contour of the substrate vertically upwards. The first reverse-side line scan light source 612 is fixed to the bottom of the conveyor frame by a bracket. The first reverse-side line scan light source 612 is connected to the control system.

[0138] The first line scan camera 613 is an industrial camera employing a linear CCD or CMOS sensor and equipped with a lens. It is mounted directly above the gap between the end of the first belt conveyor 10 and the beginning of the second belt conveyor 20, with the lens vertically downwards and aligned with the gap. It is fixed to a structure above the frame 100 by a bracket. The first line scan camera 613 is connected to an image processing unit and a control system.

[0139] The side-mounted line scan light source 614 is also a linear light source, with a structure similar to the reverse light source, but with a different mounting angle. The side-mounted line scan light source 614 is mounted above both sides of the transport path, illuminating the front of the substrate at an angle.

[0140] Working principle and operation process of front detection module 60:

[0141] 1. The substrate is conveyed to the front detection area by the first belt conveyor 10.

[0142] 2. When the leading edge of the substrate triggers the first sensor 611, the sensor sends a signal to the control system.

[0143] 3. The control system synchronously triggers the first line scan camera 613 to start acquiring image lines and illuminates the first reverse line scan light source 612 and the first side line scan light source 614.

[0144] 4. As the substrate passes through the linear field of view of the camera at a constant speed V, the first line scan camera 613 continuously acquires line after line of image data.

[0145] 5. The first reverse light source 612 provides contour information. The first side light source 614 illuminates at a specific angle to enhance the contrast of surface defects.

[0146] 6. The first line scan camera 613 transmits the acquired continuous image line data to the image processing unit in real time.

[0147] 7. The image processing unit stitches these rows of data into a complete two-dimensional image of the front of the substrate, and runs a preset image processing algorithm to analyze and determine whether there are defects and their type, location, and size.

[0148] 8. The inspection results (OK / NG / defect information) are recorded and associated with the substrate.

[0149] 9. At the same time, the second belt conveyor 20 continues to transport the substrate that has completed the front inspection to the next station - the flipping module 70.

[0150] Flip Module 70

[0151] The flip module 70 is used to flip the substrate that has been inspected on the front side by 180 degrees so that the back side is facing up, so as to perform the reverse side inspection.

[0152] like Figure 5 , 6 As shown, the flipping module 70 includes a second sensor 711 and a flipping mechanism. The second sensor 711 is of the same type and is installed in the same way as the first sensor 611. It is installed at the entrance of the flipping station (such as at the end of the second conveyor 20) to detect whether the substrate has reached the flipping position. The signal is connected to the control system.

[0153] The flipping mechanism is located downstream of the front detection module 60, typically positioned between the end of the second belt conveyor 20 and the beginning of the third belt conveyor 30. The flipping mechanism includes a first vacuum generator 712, a suction plate 713, and a flipping motor 714. The first vacuum generator 712 is typically a Venturi vacuum generator or a small vacuum pump, and its suction port is connected to the suction plate 713 via a flexible air tube.

[0154] The suction cup plate 713 is typically a flat, plate-like structure, with its planar dimensions slightly smaller than or equal to the substrate size. Multiple small holes (not shown) are evenly distributed on the working surface (adsorption surface) of the suction cup plate 713 as adsorption ports. A vacuum chamber or channel is provided inside or on the reverse side of the suction cup plate 713, connecting all adsorption ports to one or more vacuum interfaces. The suction cup plate 713 is securely mounted on the output shaft of the flip motor 714 (or connected via a coupling), rotating synchronously with the motor shaft. Its vacuum interface is connected to the suction port of the first vacuum generator 712 via a flexible air tube.

[0155] The tilting motor 714 is typically a servo motor or a stepper motor to achieve precise angle control (precise positioning at 0 degrees and 180 degrees). The tilting motor 714 is fixed to the frame 100, and its output axis is usually horizontally positioned, parallel to the width direction of the conveyor belt. A driving synchronous pulley is mounted on the shaft of the tilting motor 714, and a driven synchronous pulley is mounted on the rotating shaft of the suction cup plate 713. A synchronous belt is wound around the two pulleys and tensioned. When the tilting motor 714 rotates, it drives the suction cup plate 713 to rotate via the synchronous belt.

[0156] The working principle and operation process of the flip module 70 are as follows:

[0157] 1. The substrate is conveyed to the flipping position by the second belt conveyor 20.

[0158] 2. The second sensor 711 detects that the substrate is in place and sends a signal. The second belt conveyor 20 may stop operating.

[0159] 3. The control system starts the first vacuum generator 712, which generates negative pressure through the suction port of the suction plate 713.

[0160] 4. Suction cup plate 713 adsorption substrate.

[0161] 5. The control system commands the flip motor 714 to rotate precisely 180 degrees, causing the suction cup plate 713 and the adsorbed substrate to flip together.

[0162] 6. After being flipped into place, the substrate is now facing upwards and located above the third belt conveyor 30.

[0163] 7. The control system shuts down the first vacuum generator 712 (or opens the vacuum breaking valve), the suction plate 713 releases the vacuum, and the substrate falls onto the belt 32 of the third belt conveyor 30 due to gravity.

[0164] 8. The 714 flip motor can be selected to rotate 180 degrees in the opposite direction to return to the initial feeding position, ready for the next cycle.

[0165] 9. The third belt conveyor 30 starts (or resumes operation) and transports the flipped substrate to the next station - the reverse side inspection module 80.

[0166] Reverse detection module 80

[0167] The reverse inspection module 80 is used to perform high-precision, non-contact appearance defect inspection on substrates that have been flipped over and are facing up.

[0168] like Figure 7 As shown, the reverse side detection module 80 is located downstream of the flipping module 70 and is installed above or around the third belt conveyor 30. The reverse side detection module 80 includes a third sensor 811, a second reverse side line scan light source 812, a second line scan camera 813, and a second side line scan light source 814. The structure of the reverse side detection module 80 is basically the same as or similar to that of the front side detection module 60, the main difference being that its detection object is the reverse side of the substrate, which will not be described in detail here.

[0169] The working principle and operation process of the reverse side detection module 80 are as follows:

[0170] 1. The substrate is conveyed to the reverse detection area by the third belt conveyor 30.

[0171] 2. The third sensor 811 detects the substrate and triggers operation.

[0172] 3. The second line scan camera 813, in conjunction with the second reverse light source 812 and the second side light source 814, performs line scan imaging on the reverse side of the substrate that is moving at a constant speed.

[0173] 4. The image data is transmitted to the image processing unit for analysis to detect defects on the reverse side.

[0174] 5. The inspection results (OK / NG / defect information) are recorded and associated with the substrate (in conjunction with the front inspection results).

[0175] 6. At the same time, the third belt conveyor 30 transfers the substrate that has completed double-sided inspection to the fourth belt conveyor 40 and sends it to the next station - the unloading module 90.

[0176] Material feeding module 90

[0177] Based on the combined results of front and back inspections, the unloading module 90 automatically sorts the substrates and places them into the corresponding hoppers.

[0178] like Figure 8-10 As shown, the unloading module 90 includes multiple unloading bins 91, a fourth sensor 92, and an unloading device 93. The number of unloading bins 91 is determined according to classification requirements. Their shape is typically an open box or a trough. In this embodiment, it includes an OK bin 91a, a rework bin 91b, an NG bin 91c, a designated defect bin 91d, and a scrap bin 91e. These bins 91a-e are placed side-by-side or in a specific layout below the unloading device 93.

[0179] The fourth sensor 92 is used to accurately track the position of the substrate on the unloading conveyor path. In this embodiment, a photoelectric sensor is used. Multiple photoelectric sensors can be installed along the unloading conveyor path, and these sensors are connected to the control system.

[0180] The unloading device 93 is responsible for receiving the substrate from the fourth conveyor 40, transporting it above the designated hopper, and then releasing it. In this embodiment, the unloading device 93 includes a vacuum belt conveyor assembly 931, a second vacuum generator 932, and a blower mechanism.

[0181] The vacuum belt conveyor assembly 931 is the core conveying unit for material unloading. It is located after the end of the fourth belt conveyor 40 and is horizontally mounted above all the unloading bins 91. The vacuum belt conveyor assembly 931 includes a front drive roller 9311a, a rear drive roller 9311, support bars 9312, and a vacuum belt 9316. The front drive roller 9311a and the rear drive roller 9311 are arranged at intervals along the conveying direction. One of them is the drive roller, connected to a drive motor.

[0182] The support bar 9312 is located between the front and rear drive rollers, closely attached to the lower surface (non-working surface) of the vacuum belt 9316. It has a long, hollow, strip-shaped structure, internally divided into multiple independent cavities 9313 along its length. The bottom surface of the support bar 9312 has multiple suction ports 9314, which correspond to the holes on the vacuum belt 9316, transmitting vacuum suction to the belt surface. The side of the support bar 9312 has multiple connection ports 9315, each connecting to one of the cavities 9313.

[0183] The vacuum belt 9316 has several through-holes evenly or in a specific pattern. The belt 9316 is wound around the front and rear drive rollers 9311a and 9311 and is tensioned.

[0184] The second vacuum generator 932 functions similarly to the first vacuum generator 712, providing a vacuum source. Its suction port is connected to each connection port 9315 on the side of the support bar 9312 via pipelines and multiple independently controlled air valves 933 (usually solenoid valves), thereby selectively applying or removing vacuum to different areas (corresponding to different cavities) below the vacuum belt 9316.

[0185] The blower mechanism is used to actively blow substrates off the vacuum belt at designated locations. The blower mechanism comprises multiple nozzles 9341 and an air source (not shown), the number typically corresponding to the number of feed hoppers 91. The nozzles 9341 are fixed to the opposite side of the support bar 9312 (the side opposite to the vacuum connection port), each nozzle 9341 pointing vertically downwards towards its corresponding feed hopper area. Multiple nozzles 9341 are connected to the compressed air source via air pipes and independent solenoid valves. Each solenoid valve controls the on / off state of one or a group of nozzles. All solenoid valves are controlled by a control system.

[0186] The end of the fourth conveyor 40 is connected to the beginning of the vacuum belt conveyor assembly 931. The vacuum belt conveyor assembly 931 is horizontally mounted above the feed hopper array. The vacuum generator 932, air valve 933, motor, fourth sensor 92, air nozzle 9341, etc. are all connected to the control system and corresponding power source through pipelines and cables.

[0187] The working principle and operation process of the feeding module 90 are as follows:

[0188] 1. The substrate that has completed double-sided inspection is transported by the fourth belt conveyor 40 to the entrance of the vacuum belt conveyor assembly 931.

[0189] 2. At this time, the vacuum chamber 9313 corresponding to the inlet area is connected to the second vacuum generator 932 through its gas valve 933, and the vacuum belt 9316 generates suction in this area.

[0190] 3. The substrate is automatically adsorbed onto the surface of the vacuum belt 9316 and moves forward with the belt.

[0191] 4. The control system determines the target hopper to which the substrate should enter based on the previously stored comprehensive test results (OK, NG, Rework, etc.). For example, if it is determined to be an NG product, the target is NG hopper 91c.

[0192] 5. A servo motor precisely drives the vacuum belt conveyor assembly 931 to transport the adsorbed substrate directly above the target hopper. The position of the substrate is fed back to the control system in real time by the fourth sensor 92.

[0193] 6. When the substrate reaches above the target position, the control system executes the unloading action:

[0194] First (or simultaneously), close the air valve 933 that controls the vacuum in the area below the substrate, releasing the vacuum suction force on the substrate. Almost simultaneously or immediately afterward, open the solenoid valve of the blower mechanism above the target hopper. A stream of compressed air is blown downward from the corresponding nozzle 9341, acting on the upper surface of the substrate, actively and quickly pushing it away from the vacuum belt 9316, overcoming any residual suction force and inertia, ensuring it falls accurately into the target hopper 91c below.

[0195] 7. After the blowing action is completed, the corresponding solenoid valve closes.

[0196] 8. The vacuum belt conveyor assembly 931 continues to operate, processing the next substrate.

[0197] 9. This vacuum adsorption conveying + precise positioning + active air blowing unloading method ensures accurate, efficient and reliable substrate classification even at high speeds, avoiding equipment downtime or substrate damage caused by inaccurate unloading.

[0198] control system

[0199] The automatic optical inspection equipment for ceramic substrates described in this utility model also includes a control system, which is the central hub for the operation of the entire automated equipment and is responsible for coordinating, controlling and managing the actions and data processing of all modules.

[0200] The control system is typically integrated into a separate control cabinet (not shown). Its core hardware can be an industrial computer (IPC), or a combination of a programmable logic controller (PLC) and an industrial computer (IPC). The system is equipped with necessary input / output (I / O) modules for signal interaction with various parts of the equipment. In addition, it usually includes a human-machine interface (HMI) (such as a graphical touchscreen or monitor with a keyboard and mouse) for operators to set parameters, monitor status, view results, and operate the equipment.

[0201] The control system is connected to all critical components of the equipment via cables and interfaces.

[0202] The input terminal of the control system is connected to and receives sensor signals from each module, such as the hopper sensor (not shown) of the feeding module 50, the first sensor 611 of the front detection module 60, the second sensor 711 of the flipping module 70, the third sensor 811 of the reverse detection module 80, the position detection device 92 (such as photoelectric sensor 921) of the unloading module 90, and other limit and safety sensors.

[0203] The control system outputs control commands to each actuator, including the drive motors of each belt conveyor in the conveying module, the drive mechanism of the feeding device (such as the first drive motor 5241a), the flipping motor 714 of the flipping module 70, the servo drive motor of the vacuum belt conveyor assembly 931 of the unloading module 90, and various solenoid valves / air valves that control the pneumatic / vacuum on / off (e.g., valves that control the vacuum of the feeding suction cups 522a / 522b, valves that control the vacuum of the flipping suction cup plate 713, air valves 933 that control the on / off of each cavity 9313 of the unloading vacuum belt, solenoid valves that control the air blowing of the blower nozzle 9341, etc.).

[0204] The control system's data interface connects to the first line scan camera 613 and the second line scan camera 813 via a high-speed data interface to receive raw image data. It controls the switching and brightness of the first rear line scan light source 612, the side line scan light source 614, the second rear line scan light source 812, and the second side line scan light source 814 via digital signals or a bus. The control system may be integrated into or connected to a separate image processing unit for executing complex image analysis algorithms.

[0205] Through the integration and coordination of this control system, the automatic optical inspection equipment for ceramic substrates of this invention can achieve fully automated, high-efficiency, and high-precision double-sided inspection and sorting operations.

[0206] The automatic optical inspection equipment for ceramic substrates described in this utility model achieves a fully automated process from automatic feeding, automatic optical inspection of the front side of the substrate, automatic flipping of the substrate, automatic optical inspection of the back side of the substrate, and finally automatic sorting and unloading based on the inspection results through the precise coordination of the above modules.

[0207] 1. High-precision inspection: Using a high-resolution line scan camera and a customized light source solution, it can effectively detect minute defects on both sides of the ceramic substrate, such as scratches, chipping, cracks, dirt, printing defects, etc., significantly reducing missed detections and over-detections.

[0208] 2. High-efficiency production: The design of dual-station feeding, continuous conveying, rapid flipping and high-speed vacuum belt sorting and unloading makes the overall testing efficiency extremely high and greatly improves production efficiency.

[0209] 3. Double-sided inspection: Through the ingenious design of the flip module 70, comprehensive inspection of both key surfaces of the substrate is achieved within a limited equipment space, solving the pain points of single-sided inspection or the need for manual flipping.

[0210] 4. Automation and Intelligence: The entire process requires no manual intervention, reducing labor costs and human error. Test results can be automatically recorded, statistically analyzed, and used for subsequent quality control and process improvement.

[0211] 5. Compact structure and easy maintenance: The modular design of each function makes the structure relatively simple and clear, which facilitates installation, debugging and daily maintenance.

[0212] 6. Wide applicability: The design concept and structure of this equipment are suitable for double-sided appearance inspection of various ceramic substrates or other similar sheet materials, and it has significant advantages, especially in AOI visual inspection application scenarios that require high precision and high efficiency.

[0213] By implementing this utility model, the quality control level and production efficiency of ceramic substrate production can be effectively improved, thereby enhancing the market competitiveness of enterprises.

[0214] The embodiments described above are merely examples of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. An automated optical inspection device for ceramic substrates, characterized in that, include: A conveying module includes at least one conveyor belt for conveying the ceramic substrate to be tested along the conveying direction; The feeding module includes at least one feeding bin and at least one feeding device. The feeding bin is used to hold the ceramic substrate to be tested, and the feeding device is used to take the ceramic substrate to be tested from the feeding bin and place it face up on the conveyor belt. A front detection module is located downstream of the feeding module along the conveying direction and is used to detect the front side of the ceramic substrate to be detected on the conveyor belt. A flipping module is located downstream of the front detection module along the conveying direction and is used to flip the ceramic substrate to be detected on the conveyor belt so that its reverse side faces upward. A reverse detection module is located downstream of the flipping module along the conveying direction and is used to detect the reverse side of the ceramic substrate to be detected on the conveyor belt. A feeding module, located downstream of the reverse detection module along the conveying direction, includes multiple feeding bins and a feeding device. The multiple feeding bins are used to receive ceramic substrates classified according to different detection results. The feeding device is used to place the ceramic substrates to be detected into the corresponding feeding bins based on the detection results of the front and reverse detection modules. The control system is used to control the operation of the conveying module, the feeding module, the front detection module, the flipping module, the back detection module, and the unloading module.

2. The ceramic substrate automated optical inspection apparatus of claim 1, wherein, The conveying module includes at least two belt conveyors arranged linearly along the conveying direction with gaps at the beginning and end, and each belt conveyor includes at least one conveyor belt.

3. The ceramic substrate automated optical inspection apparatus of claim 1, wherein, The feeding device includes two first feeding bins and two second feeding bins. The two first feeding bins are respectively located on both sides of the conveyor belt, and the two second feeding bins are respectively located on the conveyor belt and downstream of the first feeding bins along the conveying direction. The feeding device includes a first feeding device and a second feeding device, which correspond to the first feeding bins and the second feeding bins, respectively.

4. The ceramic substrate automated optical inspection apparatus of claim 1, wherein, The front detection module includes: The first line scan camera is positioned above the conveyor belt; A first back-side linear scanning light source is disposed below the conveyor belt and is used to illuminate the ceramic substrate being inspected upwards; and The first side line scan light source is located above the side of the conveyor belt and is used to obliquely illuminate the front side of the ceramic substrate being inspected.

5. The ceramic substrate automated optical inspection apparatus of claim 1, wherein, The flipping module includes: A suction cup plate, having multiple suction ports and connected to a first vacuum generator; and A flipping mechanism is used to drive the suction cup plate to rotate at least 180 degrees to flip the substrate.

6. The ceramic substrate automated optical inspection apparatus of claim 1, wherein, The reverse side detection module includes: The second line scanning camera is positioned above the conveyor belt; A second back-side linear scanning light source is disposed below the conveyor belt and is used to illuminate the ceramic substrate being inspected upwards; and The second side line scan light source is located above the conveyor belt side and is used to obliquely illuminate the back of the ceramic substrate being inspected.

7. The ceramic substrate automatic optical inspection apparatus according to any one of claims 1 to 6, characterized by, The multiple feeding bins are arranged in a linear fashion. The feeding device includes a vacuum belt conveyor assembly, which is disposed above the multiple feeding bins and has a vacuum belt with suction holes. The vacuum belt runs on a support bar with a cavity that can be selectively evacuated.

8. The automatic optical inspection equipment for ceramic substrates according to claim 7, characterized in that, The support bar has multiple connection ports on its side, each of which is connected to a cavity and connected to a second vacuum generator through an independent air valve.

9. The ceramic substrate automated optical inspection apparatus of claim 7, wherein, The unloading device further includes a blower mechanism, which has an air nozzle corresponding to the unloading bin, for blowing the substrate from the vacuum belt into the corresponding unloading bin by blowing air when the substrate reaches above the target unloading bin.

10. The ceramic substrate automated optical inspection apparatus of claim 9, wherein, The nozzle of the blower mechanism is connected to the air source via an independently controlled solenoid valve.

Images