Quartz tube cleaning machine

Abstract

The utility model belongs to the field of semiconductor cleaning equipment, and particularly relates to a quartz tube cleaning machine. The utility model provides a quartz tube cleaning machine. Comprising a machine body, a machine frame arranged in the machine body, a cleaning tank arranged on the machine frame, a cleaning frame arranged in the cleaning tank and used for bearing a quartz tube, a lifting unit arranged on the machine frame and used for lifting the cleaning frame, and a driving unit arranged at the side end of the cleaning tank and used for driving the cleaning frame to drive the quartz tube to roll, the lifting unit comprises a lifting assembly, a sliding locking assembly which is arranged on the lifting assembly and connected with the upper end of the cleaning frame to drive the cleaning frame to be connected with or separated from the driving unit, and a first motor for driving the lifting assembly. The quartz tubes are repeatedly lifted / put into the cleaning tank through the lifting assembly to achieve the steps of acid pickling, water washing and the like, the cleaning frame and the driving unit can be locked at multiple heights through the sliding locking assembly, the quartz tubes are driven to rotate, the acid pickling and water washing effects are improved, and the complex operation that multiple angles need to be changed during manual purging is avoided.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor cleaning equipment, and in particular relates to a quartz tube cleaning machine. Background Technology

[0002] Quartz tubes are core components commonly used in cleaning equipment for transporting and storing high-purity chemical liquids. Due to their high purity, corrosion resistance, and excellent thermal stability, quartz tubes are widely used in chemical cleaning, etching, and resist removal processes in semiconductor manufacturing. However, quartz tubes easily absorb chemical residues, particulate impurities, or organic contaminants during long-term use. These contaminants directly affect the purity of the cleaning solution, thus impacting the yield of semiconductor chips. Therefore, quartz tube cleaning is an indispensable part of semiconductor manufacturing. Quartz tube cleaning machines are automated devices specifically designed for cleaning quartz tubes. Their design must meet the ultra-high purity requirements of semiconductor manufacturing, and they typically consist of a cleaning tank, a filtration system, a temperature control system, and an automated control system.

[0003] Chinese invention patent CN 113560265 B, published on November 1, 2022, discloses a horizontal quartz boat cleaning device, comprising a cleaning tank, a drive tank, and an electrical control box. The electrical control box is fixed to the side of the cleaning tank, and the drive tank is fixed to the top. The device is characterized by having a water washing tank installation chamber and an acid pickling tank installation chamber arranged side-by-side at the bottom of the inner cavity of the cleaning tank. The water washing tank installation chamber contains a water washing tank, and the acid pickling tank installation chamber contains an acid pickling tank. A robotic arm carrier capable of switching quartz boat workpieces between the water washing tank and the acid pickling tank is installed inside both the cleaning tank and the drive tank. The robotic arm carrier includes a guide rail base, a movable gantry frame, a horizontal displacement guiding mechanism, a horizontal displacement driving mechanism, a vertical displacement driving mechanism, and a lifting device assembly.

[0004] The horizontal quartz boat cleaning device in this Chinese invention patent has the following general usage method and advantages: The invention has a reasonable structural design. The quartz boat can roll during the entire cleaning process, generating relative motion with the cleaning liquid, so that the quartz boat can be thoroughly cleaned, resulting in a better cleaning effect and avoiding contamination during the diffusion process.

[0005] However, the quartz boat cleaning equipment still has at least the following shortcomings in actual use, which are the technical problems that this utility model aims to solve: 1. The quartz boat cleaning equipment relies on a robotic arm and horizontal and vertical displacement mechanisms to move the quartz boat to different process tanks for operation, requiring repeated clamping of the quartz boat, which can easily cause damage to the quartz boat during operation; 2. Although the installation of support rollers to drive the quartz boat to roll improves the cleaning effect, manual operation is still required to continuously change the angle of the quartz boat during other steps such as purging. Therefore, in summary, it is necessary to develop a quartz boat cleaning equipment that can reduce the displacement of the quartz boat and achieve better cleaning results to solve these problems. Utility Model Content

[0006] This utility model provides a quartz tube cleaning machine, including a body, a frame disposed within the body, a cleaning tank disposed on the frame, a cleaning frame disposed within the cleaning tank for supporting the quartz tube, a lifting unit disposed on the frame for raising and lowering the cleaning frame, and a drive unit disposed at the side end of the cleaning tank to drive the cleaning frame to tumble the quartz tube. The lifting unit includes a lifting assembly, a sliding locking assembly disposed on the lifting assembly and connected to the upper end of the cleaning frame to connect / separate the cleaning frame from the drive unit, and a first motor driving the lifting assembly. This utility model avoids the repeated clamping and handling of the quartz boat. The lifting assembly repeatedly lifts / places the quartz tube into the cleaning tank to achieve acid washing and water washing steps. Furthermore, the sliding locking assembly can lock the cleaning frame to the drive unit at multiple heights and drive the quartz tube to rotate, improving the acid washing and water washing effect and avoiding the complex operation of manual blowing that requires changing multiple angles.

[0007] Therefore, this utility model overcomes the shortcomings of the prior art and provides a quartz tube cleaning machine, including a machine body, a frame disposed within the machine body, a cleaning tank disposed on the frame and located at the lower end of the machine body, a cleaning frame disposed within the cleaning tank for supporting the quartz tube, a lifting unit disposed on the frame for raising and lowering the cleaning frame, and a drive unit disposed at the side end of the cleaning tank for driving the cleaning frame to tumble the quartz tube; the lifting unit includes a lifting assembly disposed on the frame and located on one side of the cleaning tank, a sliding locking assembly disposed on the lifting assembly and connected to the upper end of the cleaning frame to drive the cleaning frame to connect / separate from the drive unit, and a first motor disposed on the frame for driving the lifting assembly.

[0008] A further preferred technical solution is that the cleaning frame includes a frame body, multiple connecting rods disposed at the lower ends of both sides of the frame body, a sleeve disposed at the lower end of the connecting rods, two rolling rods disposed inside the sleeve and parallel to the quartz tube, rollers disposed on the rolling rods and in contact with the lower surface of the quartz tube, and a locking block disposed at the end of the rolling rods for engaging the drive unit.

[0009] A further preferred technical solution is that the drive unit includes an extension plate disposed on the side wall of the cleaning tank and extending to the outside of the tank at its upper end, a drive gear disposed on the upper end of the extension plate, a plurality of driven gears arranged vertically on the extension plate and meshing with the drive gear and connected one by one, a secondary gear respectively meshing with the secondary gears on both sides of the driven gears, a groove disposed at the center of the secondary gear and engaging with the locking block, and a second motor disposed on the frame for driving the drive gear to rotate.

[0010] A further preferred technical solution is that the lifting assembly includes a fixed block disposed on the frame, a screw mounted on the fixed block vertically disposed on one side of the cleaning rack and rotatably mounted on the fixed block under the drive of the first motor, a guide rod disposed on the frame and parallel to the screw, a first sliding block screwed onto the screw, a second sliding block slidably disposed on the guide rod, and a connecting block whose two ends are respectively connected to the first sliding block and the second sliding block and used to install the sliding locking assembly to drive the cleaning rack to slide.

[0011] A further preferred technical solution is that the sliding locking assembly includes a through groove disposed on the connecting block for passing through the extended end of the cleaning rack, a first through hole disposed on the upper end face of the connecting block, a blind hole disposed on the bottom surface of the through groove and corresponding to the first through hole, a second through hole disposed on the cleaning rack located at the inner end of the through groove, and a connecting pin passing through the first through hole and the second through hole and connected to the blind hole.

[0012] A further preferred technical solution includes: a liquid storage tank disposed on one side of the cleaning tank; a bidirectional pump disposed at the connection between the cleaning tank and the liquid storage tank for bidirectionally transporting liquid in both the cleaning tank and the liquid storage tank; a purge gun disposed within the machine body; and a control panel disposed on the machine body and electrically connected to the lifting unit, the drive unit, the bidirectional pump, and the purge gun.

[0013] A further preferred technical solution is that the body includes multiple door panels for forming a closed box, an operation window disposed on the door panel, and a lift door disposed on the door panel for opening and closing the operation window.

[0014] A further preferred technical solution is that the lifting door is a transparent door panel.

[0015] A further preferred technical solution is that a smooth and wear-resistant layer is provided on the bottom surface of the through groove.

[0016] A further preferred technical solution is that the roller side end is provided with an anti-slip sealing layer. The beneficial effects of this invention are at least as follows: 1. By changing the height of the quartz tube and timely replacing the liquid in the cleaning tank through the lifting unit, the quartz tube can undergo multiple processes without repeated gripping and moving, reducing potential damage to the quartz tube from the equipment; 2. By setting the cleaning rack and the drive unit that drives the quartz tube to rotate as a separable / connectable structure, the quartz tube can be connected to the drive unit at different processes and heights, driving the quartz tube to roll on the cleaning rack, effectively improving the effects of acid washing, water washing, and purging. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a front view of the present invention;

[0019] Figure 2 This is a rear sectional view of the present invention;

[0020] Figure 3 This is a front sectional view of the cleaning rack and drive unit of this utility model in a connected state.

[0021] Figure 4 This is a front sectional view of the cleaning rack and drive unit of this utility model when they are not connected.

[0022] Figure 5 This is a side sectional view of the present invention;

[0023] Figure 6 This is a partial rear view of the present invention;

[0024] Figure 7 This is a top sectional view of the present invention;

[0025] Figure 8 This is a partial top view of the present invention;

[0026] Figure 9 This is a side sectional view of the cleaning rack of this utility model.

[0027] The meanings of the various reference numerals in the figure are as follows:

[0028] Quartz tube a;

[0029] 1. Main body; 2. Frame; 3. Cleaning tank; 4. Cleaning rack; 5. Lifting unit; 6. Drive unit; 7. Liquid storage tank; 8. Two-way pump; 9. Blow gun; 10. Control panel.

[0030] Door panel 11, operating window 12, lifting door 13, frame 41, connecting rod 42, sleeve 43, rolling rod 44, roller 45, locking block 46, lifting assembly 51, sliding locking assembly 52, first motor 53, extension plate 61, driving gear 62, driven gear 63, auxiliary gear 64, groove 65, second motor 66; fixing block 511, screw 512, guide rod 513, first sliding block 514, second sliding block 515, connecting block 516, through groove 521, blind hole 523, second through hole 524, connecting pin 525. Detailed Implementation

[0031] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following description is only a preferred embodiment of the present invention and is not intended to limit the scope of the present invention.

[0032] The directional terms such as up, down, left, right, front, back, front, back, top, bottom, etc., mentioned or possibly used in this specification are defined relative to the structure shown in the accompanying drawings. The terms "inner" and "outer" refer to the direction toward or away from the geometric center of a specific component, respectively. These are relative concepts and may therefore vary depending on their location and usage. Therefore, these or other directional terms should not be interpreted as restrictive terms.

[0033] As attached Figures 1-9As shown, a quartz tube cleaning machine includes a body 1, a frame 2 disposed within the body 1, a cleaning tank 3 disposed on the frame 2 and located at the lower end of the body 1, a cleaning frame 4 disposed within the cleaning tank 3 for supporting the quartz tube a, a lifting unit 5 disposed on the frame 2 for raising and lowering the cleaning frame 4, a drive unit 6 disposed at the side end of the cleaning tank 3 for driving the cleaning frame 4 to tumble the quartz tube a, a liquid storage tank 7 disposed on one side of the cleaning tank 3, and a connection point between the cleaning tank 3 and the liquid storage tank 7 for... A bidirectional pump 8 for bidirectional liquid transport in the cleaning tank 3 and the storage tank 7; a purge gun 9 installed in the body 1; an electrical control system installed on the body 1 and electrically connected to the lifting unit 5, the drive unit 6, the bidirectional pump 8, and the purge gun 9; and a control panel 10 installed on the body and electrically connected to the lifting unit, the drive unit, the bidirectional pump, and the purge gun. The lifting unit 5 includes a lifting assembly 51 installed on the frame 2 and located on one side of the cleaning tank 3; a sliding locking assembly 52 installed on the lifting assembly 51 and connected to the upper end of the cleaning rack 4 to drive the cleaning rack 4 to connect / separate from the drive unit 6; and a first motor 53 installed on the frame 2 for driving the lifting assembly 51. The body 1 includes multiple door panels 11 for forming a closed box; an operation window 12 installed on the door panel 11; and a lifting door 13 installed on the door panel 11 for opening and closing the operation window 12.

[0034] The frame 2 is welded together from multiple stainless steel square and flat tubes arranged in a crisscross pattern. The surface of the square and flat tubes is covered with 3-5mm thick PP board to prevent corrosion, thus forming the basic framework of the equipment. Multiple door panels 11 are set on the surface of the frame 2 to form the structure of the equipment. They are welded together from 15mm thick imported PP board, forming the body 1. The machine body 1 is divided into multiple spaces to accommodate the cleaning tank 3, the drive unit 6, the liquid storage tank 7, etc. A quartz tube a is placed on the cleaning rack 4. The first motor 53 drives the lifting component 51 to move the cleaning rack 4 up and down, so that the quartz tube a can enter / exit the cleaning tank 3 to complete the replacement of the liquid in the cleaning tank 3 and the cleaning and purging of the quartz tube. When the cleaning rack 4 is moving up and down, the sliding locking component 52 set at the connection between the cleaning rack 4 and the lifting component 51 is in the initial state, and the drive unit 6 is not yet connected to the cleaning rack 4. When the cleaning rack 4 reaches the designated position, the sliding locking component 52 is locked. Under the sliding push of the sliding locking component 52, the cleaning rack 4 moves laterally towards the drive unit 6 and locks the cleaning rack 4 with the drive unit 6. This allows the cleaning rack 4 to act on the quartz tube a under the drive of the drive unit 6, driving the quartz tube a to roll, so as to obtain better cleaning / purging effects.

[0035] The cleaning tank 3 and the storage tank 7 are connected by a bidirectional pump 8, which can realize the mutual replacement of liquids in the two tanks. By extracting the pickling solution and introducing deionized water, or by extracting the used liquid and introducing new liquid, the speed and efficiency of liquid exchange are ensured, meeting the needs of the production process. After cleaning, the quartz tube a needs to be raised to the same height as the operating window 12, and the lifting door 13 is driven to open the operating window. The blow gun 9 is then used to blow and dry the quartz tube a to ensure that there is no moisture residue to avoid affecting subsequent processes. Furthermore, a spray system and an exhaust system can be installed above the cleaning tank 3. The spray nozzles in the spray system point towards the cleaning tank 3, and the spray pipes are connected to the liquid storage tank / cleaning tank to achieve spray cleaning. The exhaust system includes an exhaust port at the top, an exhaust duct connected to the exhaust port and equipped with a cleaning port for easy cleaning, and an exhaust fan connected to the exhaust duct. The lifting unit 5, drive unit 6, bidirectional pump 8, blow gun 9, lifting door 13, spray system, and exhaust system are all electrically connected to the electrical control system. The bidirectional pump 8, blow gun 9, control panel 10, lifting door 13, spray system, exhaust system, and electrical control system are existing technologies well known to those skilled in the art, and will not be described in detail in this embodiment.

[0036] In a preferred embodiment, the cleaning rack 4 includes a frame 41, a plurality of connecting rods 42 disposed at the lower ends of both sides of the frame 41, a sleeve 43 disposed at the lower end of the connecting rods 42, two rolling rods 44 sleeved in the sleeve 43 and parallel to the quartz tube a, a roller 45 disposed on the rolling rods 44 and in contact with the lower surface of the quartz tube a, and a locking block 46 disposed at the end of the rolling rods 44 for engaging the drive unit 6.

[0037] In this embodiment, the frame 41 is formed by two parallel horizontal bars, multiple vertical bars for connecting the two horizontal bars, and a hanging rod that is set above the horizontal bars and extends upward to connect to the lifting assembly 51. The vertical bars are preferably U-shaped or V-shaped to form a space to accommodate the quartz tube a. Multiple vertical connecting rods 42 are provided at the lower end of the horizontal bars. The sleeve 43 is set parallel to the horizontal bars for sleeved with the rolling rod 44. Multiple rollers 45 are provided on the rolling rod 44. The rollers 45 on the two rolling rods 44 are arranged in pairs, and the included angle formed by each pair of rollers 45 is smaller than the included angle of the vertical bar itself to ensure that the rollers can contact the surface of the quartz tube. When the end of the rolling rod 44 approaches the drive unit 6, the locking block 46 engages with the drive unit 6, thereby driving the rolling rod and rollers to rotate. The quartz tube rolls on the frame through friction. The locking block 46 is preferably provided with a protruding cylinder on the side end for easy engagement.

[0038] In a preferred embodiment, the drive unit 6 includes an extension plate 61 disposed on the side wall of the cleaning tank 3 and extending to the outside of the tank at its upper end, a drive gear 62 disposed on the upper end of the extension plate 61, a plurality of driven gears 63 arranged vertically on the extension plate 61 and meshing with the drive gear 62 and connected to each other in sequence, a secondary gear 64 respectively meshing with the driven gear 63 on both sides, a groove 65 disposed at the center of the secondary gear 64 and engaging with the locking block 46, and a second motor 66 disposed on the frame 2 for driving the drive gear 62 to rotate.

[0039] In this embodiment, the extension plate 61 is used to install the drive gear 62, which is higher than the cleaning tank. The drive gear 62 passes through the extension plate 61 and is connected to the output end of the second motor 66 located on the side of the cleaning tank 3. The second motor 66 drives the drive gear 62 to rotate, which in turn drives the driven gear 63 meshing below it to rotate. Multiple driven gears 63 can be provided and are arranged vertically below the drive gear 62. Their vertical projection overlaps with the vertical projection of the drive gear. The auxiliary gears 64 are arranged in pairs on both sides of each driven gear 63 and rotate under the drive of the driven gear 63. The size of the auxiliary gears 64 is smaller than that of the driven gears 63 to avoid vertical interference. A groove 65 matching the locking block 46 is provided on the surface of the auxiliary gear 64 near the cleaning frame. When the rolling rod slides close to the auxiliary gear, the two engage and become fixed.

[0040] In a preferred embodiment, the lifting assembly 51 includes a fixing block 511 disposed on the frame 2, a screw 512 vertically disposed on one side of the cleaning rack 4 and rotatably mounted on the fixing block 511 under the drive of the first motor 53, a guide rod 513 disposed on the frame 2 and parallel to the screw 512, a first sliding block 514 screwed onto the screw 512, a second sliding block 515 slidably disposed on the guide rod 513, and a connecting block 516 whose two ends are respectively connected to the first sliding block 514 and the second sliding block 515 and is used to install the sliding locking assembly 52 to drive the cleaning rack 4 to slide.

[0041] In this embodiment, the first motor 53 drives the screw 512 to rotate, the guide rod 513 is set on the top of the machine body and extends vertically downwards, the first slider 514 is screwed onto the screw 512, and the second slider 515 is sleeved on the guide rod 513. The first slider 514 and the second slider 515 are connected by a connecting block 516. When the screw 512 rotates, it drives the first slider 514 to rotate synchronously. Due to the restriction of the second slider 515 and the guide rod 513, the first slider 514 cannot rotate and thus moves up and down on the screw 512. The hanging rod in the cleaning rack is connected to the connecting block 516, thus driving the cleaning rack to move up and down. Figure 6In the embodiment shown, the first motor is arranged parallel to one side of the screw 512 and fixed to the frame. The output end of the first motor is linked to the end of the screw 512 through a rack.

[0042] In a preferred embodiment, the sliding locking assembly 52 includes a through groove 521 disposed on the connecting block 516 for passing through the protruding end of the cleaning rack 4, a first through hole 522 disposed on the upper end face of the connecting block 516, a blind hole 523 disposed on the inner bottom surface of the through groove 521 and corresponding to the first through hole 522, a second through hole 524 disposed on the inner end of the cleaning rack 4 located in the through groove 521, and a connecting pin 525 passing through the first through hole 522 and the second through hole 524 and connected to the blind hole 523.

[0043] In this embodiment, the end of the hanging rod in the cleaning rack extends towards the connecting block and into the through groove 521, so that the cleaning rack is hung on the lifting assembly. The length of the tub groove 521 is the sliding range of the cleaning rack, which facilitates the cleaning rack to be raised and lowered without interference from the drive unit and to be connected to the drive unit when rotating. The position of the cleaning rack can be adjusted according to actual needs, and the cleaning rack is locked by the connecting pin 525 passing through the first through hole 522, the second through hole 524 and connecting to the blind hole 523. Furthermore, the tail end of the hanging rod can be provided with a downwardly extending blocking section, that is, the upper end of the hanging rod is set in an inverted U-shape to enhance the stability during the sliding process.

[0044] As a preferred embodiment, the lifting door 13 is a transparent door panel.

[0045] In this embodiment, the lifting door 13 is configured as a transparent door panel so that the operator can observe the situation inside the equipment in a timely manner when the door panel is closed, which facilitates handling.

[0046] As a preferred embodiment, the bottom surface of the through groove 521 is provided with a smooth and wear-resistant layer.

[0047] In this embodiment, the smooth wear-resistant layer can be set as a hard alloy coating (such as tungsten carbide), a polytetrafluoroethylene coating, a polymer sliding layer (such as Ertalyte™ PET), etc., which effectively improves the ease of operation.

[0048] As a preferred embodiment, the roller 45 is provided with an anti-slip sealing layer on its side.

[0049] In this embodiment, the anti-slip sealing layer is preferably a rubber layer, which seals the gaps in the rollers on the one hand, and increases the friction between the rollers and the quartz tube on the other hand to ensure the effectiveness of the rolling drive.

[0050] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of this utility model.

Claims

1. A quartz tube cleaning machine characterized by comprising: The system includes a body (1), a frame (2) disposed within the body (1), a cleaning tank (3) disposed on the frame (2) and located at the lower end of the body (1), a cleaning rack (4) disposed within the cleaning tank (3) for supporting the quartz tube (a), a lifting unit (5) disposed on the frame (2) for raising and lowering the cleaning rack (4), and a drive unit (6) disposed on the side end of the cleaning tank (3) to drive the cleaning rack (4) to tumble the quartz tube (a); the lifting unit (5) includes a lifting assembly (51) disposed on the frame (2) and located on one side of the cleaning tank (3), a sliding locking assembly (52) disposed on the lifting assembly (51) and connected to the upper end of the cleaning rack (4) to drive the cleaning rack (4) to connect / separate from the drive unit (6), and a first motor (53) disposed on the frame (2) for driving the lifting assembly (51).

2. A quartz tube cleaning machine according to claim 1, characterized in that: The cleaning rack (4) includes a frame (41), multiple connecting rods (42) disposed at the lower ends of both sides of the frame (41), a sleeve (43) disposed at the lower end of the connecting rod (42), two rolling rods (44) sleeved in the sleeve (43) and parallel to the quartz tube (a), a roller (45) disposed on the rolling rod (44) and in contact with the lower surface of the quartz tube (a), and a locking block (46) disposed at the end of the rolling rod (44) for engaging the drive unit (6).

3. A quartz tube cleaning machine according to claim 2, characterized in that: The drive unit (6) includes an extension plate (61) disposed on the side wall of the cleaning tank (3) and extending to the outside of the tank at its upper end, a drive gear (62) disposed on the upper end of the extension plate (61), a plurality of driven gears (63) arranged vertically on the extension plate (61) and meshing with the drive gear (62) and connected to each other in sequence, a secondary gear (64) respectively meshing with the secondary gear (63) on both sides, a groove (65) disposed at the center of the secondary gear (64) and engaging with the locking block (46), and a second motor (66) disposed on the frame (2) for driving the drive gear (62) to rotate.

4. The quartz tube cleaning machine according to claim 1, characterized in that: The lifting assembly (51) includes a fixed block (511) disposed on the frame (2), a screw (512) vertically disposed on one side of the cleaning rack (4) and rotatably mounted on the fixed block (511) under the drive of the first motor (53), a guide rod (513) disposed on the frame (2) and parallel to the screw (512), a first sliding block (514) screwed onto the screw (512), a second sliding block (515) slidably disposed on the guide rod (513), and a connecting block (516) whose two ends are respectively connected to the first sliding block (514) and the second sliding block (515) and used to install the sliding locking assembly (52) to drive the cleaning rack (4) to slide.

5. A quartz tube cleaning machine according to claim 4, characterized in that: The sliding locking assembly (52) includes a through groove (521) disposed on the connecting block (516) for passing through the extended end of the cleaning rack (4), a first through hole (522) disposed on the upper end face of the connecting block (516), a blind hole (523) disposed on the inner bottom surface of the through groove (521) and corresponding to the first through hole (522), a second through hole (524) disposed on the inner end of the cleaning rack (4) located in the through groove (521), and a connecting pin (525) passing through the first through hole (522) and the second through hole (524) and connected to the blind hole (523).

6. A quartz tube cleaning machine according to claim 1, characterized in that: It also includes a liquid storage tank (7) disposed on one side of the cleaning tank (3), a bidirectional pump (8) disposed at the connection between the cleaning tank (3) and the liquid storage tank (7) for bidirectional transport of liquid in the cleaning tank (3) and the liquid storage tank (7), a purge gun (9) disposed in the body (1), and a control panel (10) disposed on the body (1) and electrically connected to the lifting unit (5), the drive unit (6), the bidirectional pump (8) and the purge gun (9).

7. A quartz tube cleaning machine according to claim 1, characterized in that: The body (1) includes multiple door panels (11) for forming a closed box, an operation window (12) provided on the door panel (11), and a lifting door (13) provided on the door panel (11) for opening and closing the operation window (12).

8. A quartz tube cleaning machine according to claim 7, characterized in that: The lifting door (13) is a transparent door panel.

9. A quartz tube cleaning machine according to claim 5, characterized in that: The bottom surface of the through groove (521) is provided with a smooth and wear-resistant layer.

10. The quartz tube cleaning machine according to claim 2, characterized in that: The roller (45) has an anti-slip sealing layer on its side.

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