U-shaped conductive ceramic evaporation boat

Abstract

The utility model discloses a U-shaped conductive ceramic evaporation boat, which relates to the technical field of evaporation boats and comprises a base and a graphite evaporation boat body, the graphite evaporation boat body is arranged at the upper end of the base, and a first graphite heater and a second graphite heater are respectively arranged on two sides of the base. The U-shaped conductive ceramic evaporation boat comprises a graphite evaporation boat body, the upper end of the graphite evaporation boat body is provided with a first gradient evaporation groove, and the lower end of the inner side of the first gradient evaporation groove is provided with a second gradient evaporation groove and a third gradient evaporation groove. At the moment, under the guiding effect of the guide rod, the first clamping plate and the second clamping plate can conveniently move in the approaching direction, so that the graphite evaporation boat body is clamped, impact force generated by clamping can be absorbed through the buffer assembly, and damage to the graphite evaporation boat body caused by rigid clamping is prevented.

Description

Technical Field

[0001] This utility model relates to the field of evaporation boats, and in particular to a U-shaped conductive ceramic evaporation boat. Background Technology

[0002] Evaporation boats, as key components in evaporation coating equipment, are widely used in many fields such as semiconductors, optics, and electronics. Their performance directly affects the quality and efficiency of coating.

[0003] Existing evaporation boats typically lack effective buffering and protection mechanisms during installation and fixation. Excessive clamping force can easily damage the evaporation boat, increasing operating costs. Furthermore, the lack of flexible adjustment structures makes it difficult to adapt to the installation requirements of evaporation boats of different sizes, reducing the equipment's versatility and practicality. Secondly, traditional evaporation boats often suffer from limited heating structure design, making precise temperature gradient control difficult. When evaporating different substances, they often fail to provide a suitable evaporation temperature environment based on the substance's characteristics, leading to poor evaporation results, uneven evaporation, inconsistent coating thickness, and ultimately affecting product performance and quality. To address these issues, we propose a U-shaped conductive ceramic evaporation boat. Utility Model Content

[0004] The main objective of this invention is to provide a U-shaped conductive ceramic evaporation boat, which can effectively solve the problems in the background art.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] A U-shaped conductive ceramic evaporation boat includes a base and a graphite evaporation boat body. The graphite evaporation boat body is located at the upper end of the base. A first graphite heater and a second graphite heater are respectively arranged on both sides of the base. A first gradient evaporation groove is formed at the upper end of the graphite evaporation boat body. A second gradient evaporation groove and a third gradient evaporation groove are formed at the lower inner end of the first gradient evaporation groove. The second gradient evaporation groove and the third gradient evaporation groove are respectively located above the first graphite heater and the second graphite heater. A clamping assembly is provided on the outer side of the graphite evaporation boat body.

[0007] Preferably, the clamping assembly includes a first clamping plate and a second clamping plate, which are slidably connected to the upper end of the base, and the first clamping plate and the second clamping plate are respectively disposed at the front and rear ends of the graphite evaporation boat body.

[0008] Preferably, a handwheel is provided at the front end of the base, and a bidirectional lead screw is fixedly connected to one side of the handwheel. The first clamping plate and the second clamping plate are respectively provided on the forward and reverse threaded sections of the bidirectional lead screw. A guide rod is slidably connected to the outer side of the first clamping plate and the second clamping plate, and the guide rod is fixedly connected to the base.

[0009] Preferably, a first buffer plate is provided at the end of the first clamping plate near the second clamping plate, and a second buffer plate is provided at the end of the second clamping plate near the first clamping plate. The first buffer plate and the second buffer plate are respectively provided at the front and rear ends of the graphite evaporation boat body, and a buffer component is provided at the ends of the first buffer plate and the second buffer plate that are far apart from each other.

[0010] Preferably, the buffer assembly includes a slide rod, and the outer sides of the first clamping plate and the second clamping plate are provided with sliding holes. The slide rod is slidably connected to the inner side of the sliding holes, and a buffer spring is sleeved on the outer side of the slide rod. One side of the buffer spring is fixedly connected to the corresponding first buffer plate or second buffer plate.

[0011] Preferably, the base has anti-collision grooves at both the front and rear ends, and the slide bar is located inside the anti-collision grooves.

[0012] Preferably, a partition is provided at the lower end of the base, the partition is located at the upper end of the first graphite heater and the second graphite heater, and the partition is fixedly connected to the base.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. This U-shaped conductive ceramic evaporation boat, by rotating a handwheel, will drive the connected bidirectional lead screw to rotate. Under the guidance of the guide rod, the first clamping plate and the second clamping plate can be easily moved in the same direction to clamp the graphite evaporation boat body. During the clamping process, the first buffer plate on the first clamping plate and the second buffer plate on the second clamping plate first come into contact with the graphite evaporation boat body. At this time, after the first buffer plate and the second buffer plate are subjected to the reaction force, they will compress the buffer spring, causing the slide rod to slide in the sliding hole. The buffer spring undergoes elastic deformation, absorbing and dispersing the impact force generated by clamping, preventing damage to the graphite evaporation boat body caused by rigid clamping.

[0015] 2. This U-shaped conductive ceramic evaporation boat, by placing a first graphite heater and a second graphite heater on both sides of the base, generates heat after being energized and conducts it upward to the graphite evaporation boat body located at the upper end of the base. Through the first gradient evaporation tank on the graphite evaporation boat body and the second gradient evaporation tank and the third gradient evaporation tank at its lower inner end, the operator can place the substance to be evaporated in the second gradient evaporation tank or the third gradient evaporation tank as needed, and then turn on the corresponding first graphite heater or the second graphite heater to achieve selective evaporation of the substance to be evaporated, and to provide the most suitable evaporation temperature environment according to the different material properties. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of a U-shaped conductive ceramic evaporation boat according to the present invention;

[0017] Figure 2 This is a schematic diagram of the overall exploded structure of a U-shaped conductive ceramic evaporation boat according to this utility model;

[0018] Figure 3 This is a partial structural schematic diagram of a U-shaped conductive ceramic evaporation boat according to the present invention;

[0019] Figure 4 This is an enlarged structural diagram of point A of the U-shaped conductive ceramic evaporation boat of this utility model.

[0020] In the diagram: 1. Base; 2. Graphite evaporation boat body; 3. First graphite heater; 4. Second graphite heater; 5. Partition plate; 6. First gradient evaporation tank; 7. Second gradient evaporation tank; 8. Handwheel; 9. Two-way lead screw; 10. Guide rod; 11. First clamping plate; 12. Second clamping plate; 13. Sliding hole; 14. Sliding rod; 15. Buffer spring; 16. First buffer plate; 17. Second buffer plate; 18. Anti-collision groove; 19. Third gradient evaporation tank. Detailed Implementation

[0021] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0022] like Figure 1-4As shown, a U-shaped conductive ceramic evaporation boat includes a base 1 and a graphite evaporation boat body 2. The graphite evaporation boat body 2 is located at the upper end of the base 1. A first graphite heater 3 and a second graphite heater 4 are respectively arranged on both sides of the base 1. A first gradient evaporation groove 6 is opened at the upper end of the graphite evaporation boat body 2. A second gradient evaporation groove 7 and a third gradient evaporation groove 19 are opened at the lower inner side of the first gradient evaporation groove 6. The second gradient evaporation groove 7 and the third gradient evaporation groove 19 are respectively located above the first graphite heater 3 and the second graphite heater 4. A clamping assembly is arranged on the outer side of the graphite evaporation boat body 2.

[0023] In this embodiment, the clamping assembly includes a first clamping plate 11 and a second clamping plate 12. The first clamping plate 11 and the second clamping plate 12 are slidably connected to the upper end of the base 1, and the first clamping plate 11 and the second clamping plate 12 are respectively located at the front and rear ends of the graphite evaporation boat body 2. A handwheel 8 is provided at the front end of the base 1. A bidirectional lead screw 9 is fixedly connected to one side of the handwheel 8. The first clamping plate 11 and the second clamping plate 12 are respectively located on the forward and reverse threaded sections of the bidirectional lead screw 9. A guide rod 10 is slidably connected to the outer sides of the first clamping plate 11 and the second clamping plate 12. The guide rod 10 is fixedly connected to the base 1.

[0024] Specifically, the graphite evaporation boat body 2 is first placed on the upper end of the base 1. Then, the handwheel 8 at the front end of the base 1 is rotated. The rotation of the handwheel 8 will drive the bidirectional lead screw 9 connected to it to rotate. Under the guidance of the guide rod 10, the first clamping plate 11 and the second clamping plate 12 can be easily moved in the same direction, thereby clamping the graphite evaporation boat body 2.

[0025] In this embodiment, a first buffer plate 16 is provided at the end of the first clamping plate 11 near the second clamping plate 12, and a second buffer plate 17 is provided at the end of the second clamping plate 12 near the first clamping plate 11. The first buffer plate 16 and the second buffer plate 17 are respectively provided at the front and rear ends of the graphite evaporation boat body 2. A buffer assembly is provided at the ends of the first buffer plate 16 and the second buffer plate 17 that are far apart. The buffer assembly includes a slide rod 14. A sliding hole 13 is provided on the outer side of the first clamping plate 11 and the second clamping plate 12. The slide rod 14 is slidably connected to the inner side of the sliding hole 13. A buffer spring 15 is sleeved on the outer side of the slide rod 14. One side of the buffer spring 15 is fixedly connected to the corresponding first buffer plate 16 or second buffer plate 17. Anti-collision grooves 18 are provided at the front and rear ends of the base 1. The slide rod 14 is located on the inner side of the anti-collision groove 18.

[0026] Specifically, during the clamping process, the first buffer plate 16 on the first clamping plate 11 and the second buffer plate 17 on the second clamping plate 12 first come into contact with the graphite evaporation boat body 2. At this time, after the first buffer plate 16 and the second buffer plate 17 are subjected to the reaction force, they will compress the buffer spring 15, causing the slide rod 14 to slide in the sliding hole 13. The buffer spring 15 undergoes elastic deformation, absorbing and dispersing the impact force generated by clamping, preventing damage to the graphite evaporation boat body 2 caused by rigid clamping. At the same time, the anti-collision grooves 18 opened at both ends of the base 1 can provide movement space for the slide rod 14, avoiding collision between the slide rod 14 and the base 1.

[0027] In this embodiment, a partition 5 is provided at the lower end of the base 1. The partition 5 is located at the upper end of the first graphite heater 3 and the second graphite heater 4, and the partition 5 is fixedly connected to the base 1.

[0028] Specifically, by placing the first graphite heater 3 and the second graphite heater 4 on both sides of the base 1, heat is generated after being powered on and conducted upward to the graphite evaporation boat body 2 located at the upper end of the base 1. Through the first gradient evaporation tank 6 on the graphite evaporation boat body 2 and the second gradient evaporation tank 7 and the third gradient evaporation tank 19 at the lower end of its inner side, the staff can place the substance to be evaporated in the second gradient evaporation tank 7 or the third gradient evaporation tank 19 as needed, and then turn on the corresponding first graphite heater 3 or the second graphite heater 4 to achieve selective evaporation of the substance to be evaporated. The partition (5) at the lower end of the base (1) located above the first graphite heater (3) and the second graphite heater (4) has the function of isolating and guiding heat. Through the design of the partition 5, heat loss is reduced and heat utilization is improved.

[0029] It should be noted that this utility model is a U-shaped conductive ceramic evaporation boat. The user first places the graphite evaporation boat body 2 on the upper end of the base 1. Then, rotating the handwheel 8 at the front end of the base 1 will cause the connected bidirectional lead screw 9 to rotate. Guided by the guide rod 10, the first clamping plate 11 and the second clamping plate 12 can easily move towards each other, thus clamping the graphite evaporation boat body 2. During clamping, the first buffer plate 16 on the first clamping plate 11 and the second buffer plate 17 on the second clamping plate 12 first contact the graphite evaporation boat body 2. When the first buffer plate 16 and the second buffer plate 17 are subjected to a reaction force, they compress the buffer spring 15, causing the slide rod 14 to slide within the slide hole 13. The buffer spring 15 undergoes elastic deformation, absorbing and dispersing the impact force generated by clamping, preventing hard clamping. The system prevents damage to the graphite evaporation boat body 2. Meanwhile, the anti-collision grooves 18 at both ends of the base 1 provide movement space for the sliding rod 14, preventing collisions between the sliding rod 14 and the base 1. The first graphite heater 3 and the second graphite heater 4 are located on both sides of the base 1. When powered on, they generate heat, which is then conducted upwards to the graphite evaporation boat body 2 located on the upper part of the base 1. Through the first gradient evaporation tank 6 on the graphite evaporation boat body 2, and the second gradient evaporation tank 7 and the third gradient evaporation tank 19 at its lower inner end, workers can place the substance to be evaporated in the second gradient evaporation tank 7 or the third gradient evaporation tank 19 as needed, and then turn on the corresponding first graphite heater 3 or second graphite heater 4 to achieve selective evaporation of the substance. The design of the partition 5 isolates and guides heat, reducing heat loss and improving heat utilization, making it quite practical.

[0030] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A U-shaped conductive ceramic evaporation boat comprising a base (1) and a graphite evaporation boat body (2), characterized in that: The graphite evaporation boat body (2) is located at the upper end of the base (1). The base (1) is provided with a first graphite heater (3) and a second graphite heater (4) on both sides. The upper end of the graphite evaporation boat body (2) is provided with a first gradient evaporation tank (6). The lower inner side of the first gradient evaporation tank (6) is provided with a second gradient evaporation tank (7) and a third gradient evaporation tank (19). The second gradient evaporation tank (7) and the third gradient evaporation tank (19) are respectively located above the first graphite heater (3) and the second graphite heater (4). The outer side of the graphite evaporation boat body (2) is provided with a clamping assembly.

2. The U-shaped conductive ceramic evaporation boat according to claim 1, characterized in that: The clamping assembly includes a first clamping plate (11) and a second clamping plate (12). The first clamping plate (11) and the second clamping plate (12) are slidably connected to the upper end of the base (1), and the first clamping plate (11) and the second clamping plate (12) are respectively located at the front and rear ends of the graphite evaporation boat body (2).

3. The U-shaped conductive ceramic evaporation boat according to claim 2, characterized in that: The base (1) is provided with a handwheel (8) at the front end. A two-way screw (9) is fixedly connected to one side of the handwheel (8). The first clamping plate (11) and the second clamping plate (12) are respectively provided on the forward and reverse threaded sections of the two-way screw (9). A guide rod (10) is slidably connected to the outer side of the first clamping plate (11) and the second clamping plate (12). The guide rod (10) is fixedly connected to the base (1).

4. The U-shaped conductive ceramic evaporation boat according to claim 3, characterized in that: A first buffer plate (16) is provided at one end of the first clamping plate (11) near the second clamping plate (12), and a second buffer plate (17) is provided at one end of the second clamping plate (12) near the first clamping plate (11). The first buffer plate (16) and the second buffer plate (17) are respectively located at the front and rear ends of the graphite evaporation boat body (2). Buffer components are provided at the ends of the first buffer plate (16) and the second buffer plate (17) that are far apart from each other.

5. The U-shaped conductive ceramic evaporation boat according to claim 4, characterized in that: The buffer assembly includes a slide rod (14), and the outer sides of the first clamping plate (11) and the second clamping plate (12) are provided with sliding holes (13). The slide rod (14) is slidably connected to the inner side of the sliding hole (13). A buffer spring (15) is sleeved on the outer side of the slide rod (14). One side of the buffer spring (15) is fixedly connected to the corresponding first buffer plate (16) or second buffer plate (17).

6. The U-shaped conductive ceramic evaporation boat according to claim 5, characterized in that: The base (1) has anti-collision grooves (18) at both the front and rear ends, and the slide rod (14) is located inside the anti-collision grooves (18).

7. The U-shaped conductive ceramic evaporation boat according to claim 1, characterized in that: The lower end of the base (1) is provided with a partition (5), which is located at the upper end of the first graphite heater (3) and the second graphite heater (4), and the partition (5) is fixedly connected to the base (1).

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