Workpiece loading mechanism and vacuum processing chamber

Abstract

The utility model belongs to the technical field of vacuum processing, and discloses a workpiece loading mechanism and a vacuum processing chamber. The workpiece loading mechanism comprises a containing frame and an adjusting assembly, and a plurality of workpieces are rotationally arranged on the containing frame; the multiple adjusting assemblies are arranged at the bottom of the containing frame at intervals, each adjusting assembly comprises a connecting piece, one side of each connecting piece is in sliding fit, rolling fit or fixed connection with the containing frame, and the other side of each connecting piece is provided with a guiding piece; the guide piece can be in sliding fit or rolling fit with the conveying assembly, and the adjusting assembly can adapt to the containing frame to adjust the deflection angle and / or position. According to the workpiece loading mechanism, the guide piece is matched with the conveying assembly so as to adapt to the adjustment of the deflection angle or position of the containing frame, the probability that the containing frame gets stuck due to factors such as vibration and uneven stress in the process of entering and exiting a coating cavity or positioning is reduced, and therefore the requirement for the matching precision of the workpiece loading mechanism in the coating process and the carrying process is lowered, and the working efficiency is improved. And the vacuum treatment quality and the vacuum treatment efficiency of the workpiece are improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum processing technology, and in particular to a workpiece loading mechanism and a vacuum processing chamber. Background Technology

[0002] Sputtering coating, a commonly used thin film preparation technology, falls under the category of physical vapor deposition (PVD). Its principle involves using high-energy particles (such as argon ions) to bombard the surface of a target material, causing the target atoms or molecules to gain sufficient energy to detach from the surface and subsequently deposit a thin film on the workpiece. This technology offers advantages such as good film uniformity, strong adhesion, and a wide range of plating materials, and is widely used in optical devices, electronic components, decorative coatings, and many other fields, playing a crucial role in improving the performance and functionality of workpieces.

[0003] In existing technologies, to improve vacuum processing efficiency, multiple workpieces are typically transported as a single unit. This method improves workpiece loading and unloading efficiency and optimizes the production process. However, currently, the workpiece loading mechanism and the coating chamber use a rigid connection structure, such as flange docking, locating pin insertion, or bolt connection. This rigid connection requires extremely high precision in the fit between the two during the coating and transport processes. When there is a slight deviation in the relative position between the workpiece loading mechanism and the coating chamber, or when factors such as vibration or uneven force occur during movement, the workpiece is prone to jamming or getting stuck during entry, exit, or positioning within the coating chamber. Once such problems occur, not only will the normal coating process be interrupted, affecting vacuum processing efficiency, but it may also damage the workpiece surface and even require shutdown for debugging and maintenance, increasing production and time costs. Utility Model Content

[0004] The purpose of this utility model is to provide a workpiece loading mechanism and a vacuum processing chamber to solve the problem that the workpiece loading mechanism and the coating chamber adopt a rigid connection structure in the prior art, which easily leads to the workpiece getting stuck or jammed due to vibration, uneven force and other factors during the process of entering or leaving the coating chamber or positioning, thus affecting the quality and efficiency of vacuum processing of the workpiece.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] On the one hand, a workpiece loading mechanism is provided, comprising:

[0007] A receiving frame, on which multiple workpieces are rotatably mounted;

[0008] An adjustment assembly is provided at the bottom of the receiving frame and multiple adjustment assemblies are spaced apart. The adjustment assembly includes a connector. One side of the connector is slidably engaged, rolled, or fixedly connected to the receiving frame, and the other side is provided with a guide. The guide can be slidably engaged or rolled with the conveying assembly, and the adjustment assembly can adapt to the adjustment of the receiving frame's deflection angle and / or position.

[0009] As an optional technical solution for the workpiece loading mechanism, the adjustment assembly further includes a universal adjustment component. There are multiple universal adjustment components, which are fixedly connected or rotatably coupled with the receiving frame. A receiving cavity is provided on one side of the connecting component. The universal adjustment component is placed in the receiving cavity and can adapt to the adjustment of the deflection angle and / or position of the receiving frame.

[0010] As an optional technical solution for the workpiece loading mechanism, the universal adjustment component is a spherical connector, the spherical connector is made of flexible material, and the spherical connector is fixedly connected to the receiving frame.

[0011] As an optional technical solution for the workpiece loading mechanism, the universal adjustment component is a spherical connector, which is made of rigid material and rotates with the receiving frame.

[0012] As an optional technical solution for the workpiece loading mechanism, the adjustment component further includes a connecting seat. The connecting seats are multiple and spaced apart at the bottom of the receiving frame. The universal adjustment component corresponds to each of the connecting seats and is fixedly connected or rotatably engaged.

[0013] As an optional technical solution for the workpiece loading mechanism, the adjustment component also includes magnetic components. The magnetic components are multiple and grouped in pairs. Each group of magnetic components is respectively disposed at the bottom of the receiving frame and the bottom of the vacuum processing chamber and their positions correspond. The same poles of each group of magnetic components are close to each other, so that a gap can be generated between the guide tube and the conveying component, thereby adapting to the adjustment of the deflection angle and / or position of the receiving frame.

[0014] On the other hand, a vacuum processing chamber is provided, including the conveying assembly and the workpiece loading mechanism. The receiving frame is detachably disposed in the vacuum processing chamber. The conveying assembly includes mating parts, which are spaced apart along a first direction or extend along the first direction. The guide members slide or roll with the mating parts to accommodate the position adjustment of the receiving frame in the first direction.

[0015] As an optional technical solution for a vacuum processing chamber, the mating component is a guide wheel, and multiple guide wheels are spaced apart along the first direction. The conveying assembly also includes a support member, which extends along the first direction or is spaced apart along the first direction. The guide wheels are rotatably mounted on the support member.

[0016] As an optional technical solution for the vacuum processing chamber, the conveying assembly also includes a synchronizing element, and two adjacent guide wheels are connected by the synchronizing element to achieve synchronous rotation.

[0017] As an optional technical solution for a vacuum processing chamber, the mating component is a guide rail, which extends along the first direction.

[0018] The beneficial effects of this utility model are:

[0019] This application discloses a workpiece loading mechanism and a vacuum processing chamber. The workpiece loading mechanism includes a receiving frame and an adjusting assembly, with multiple workpieces rotatably mounted on the receiving frame. Multiple adjusting assemblies are located at the bottom of the receiving frame and spaced apart. Each adjusting assembly includes a connecting member, one side of which is slidably, rollingly, or fixedly connected to the receiving frame, and the other side is provided with a guide member. The guide member can slide or rollly engage with a conveying assembly, and the adjusting assembly can adapt to the adjusted deflection angle and / or position of the receiving frame. By cooperating with the conveying assembly, the adjusting assembly can adapt to the adjusted deflection angle or position of the receiving frame, reducing the probability of the receiving frame getting stuck or jammed due to vibration, uneven force, or other factors during entry / exit from the coating chamber or during positioning. This reduces the precision requirements of the workpiece loading mechanism during the coating and conveying processes, improving the vacuum processing quality and efficiency of the workpieces. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0021] Figure 1 This is a first-view structural schematic diagram of the workpiece loading mechanism provided in this embodiment of the utility model;

[0022] Figure 2 This is a second-view structural schematic diagram of the workpiece loading mechanism provided in this embodiment of the utility model;

[0023] Figure 3 This is the first embodiment of the adjustment component of the workpiece loading mechanism provided by this utility model;

[0024] Figure 4 This is the second embodiment of the adjustment component of the workpiece loading mechanism provided by this utility model;

[0025] Figure 5This is the third embodiment of the adjustment component of the workpiece loading mechanism provided by this utility model.

[0026] In the picture:

[0027] 1. Workpiece;

[0028] 10. Storage rack;

[0029] 20. Adjustment component; 21. Connector; 22. Universal adjustment component; 23. Connecting base; 24. Magnetic component;

[0030] 30. Conveying components; 31. Mating parts; 32. Supporting parts; 33. Synchronizing parts. Detailed Implementation

[0031] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0032] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0035] In existing technologies, to improve vacuum processing efficiency, multiple workpieces are typically transported as a single unit. This method improves workpiece loading and unloading efficiency and optimizes the production process. However, currently, the workpiece loading mechanism and the coating chamber use a rigid connection structure, such as flange docking, locating pin insertion, or bolt connection. This rigid connection requires extremely high precision in the fit between the two during the coating and transport processes. When there is a slight deviation in the relative position between the workpiece loading mechanism and the coating chamber, or when factors such as vibration or uneven force occur during movement, the workpiece is prone to jamming or getting stuck during entry, exit, or positioning within the coating chamber. Once such problems occur, not only will the normal coating process be interrupted, affecting vacuum processing efficiency, but it may also damage the workpiece surface and even require shutdown for debugging and maintenance, increasing production and time costs.

[0036] To address the aforementioned problems, this embodiment provides a workpiece loading mechanism, see reference. Figure 1 and Figure 2 The workpiece loading mechanism includes a housing frame 10 and an adjustment assembly 20.

[0037] Furthermore, multiple workpieces 1 are rotatably mounted on a receiving frame 10, which is detachably mounted within the vacuum processing chamber. Specifically, the vacuum processing chamber includes a workpiece rack on which multiple workpieces 1 are loaded. The workpiece rack has a central shaft arranged vertically, and the workpiece rack can rotate around the central shaft within the receiving frame 10. Specifically, the receiving frame 10 is configured as a square frame structure or a support base to simultaneously support multiple workpieces 1. Specifically, the central shaft is disposed at the center of the workpiece rack, and shaft holes are provided on both the upper and lower sides of the receiving frame 10. The two ends of the central shaft pass through the two shaft holes respectively and are clearance-fitted with the shaft holes. To increase the smoothness of the workpiece rack's rotation, bearings can also be installed between the central shaft and the shaft holes. Specifically, the workpiece rack is configured as a rotating workpiece loading rack, with the coated surface of the workpiece 1 facing outwards and hung on the rotating workpiece loading rack. Since the rotating workpiece loading rack is existing technology, its structure and principle will not be described in detail here.

[0038] Furthermore, multiple adjustment components 20 are located at the bottom of the housing frame 10 and spaced apart. Each adjustment component 20 includes a connector 21. One side of the connector 21 is slidably, rollably, or fixedly connected to the housing frame 10, and the other side is provided with a guide. The guide can slide or rollably engage with the conveying component 30, and the adjustment component 20 can adapt to the adjustment of the deflection angle and / or position of the housing frame 10. By cooperating with the conveying component 30, the adjustment of the deflection angle or position of the housing frame 10 is adapted, reducing the probability of the housing frame 10 getting stuck or jammed due to vibration, uneven force, or other factors during entry into or exit from the coating chamber or during positioning. This reduces the precision requirements of the workpiece loading mechanism during the coating and conveying processes, and improves the vacuum treatment quality and efficiency of the workpiece 1.

[0039] In this embodiment, the guide is a guide groove, which can slide or roll with the conveying assembly 30. In other embodiments, the guide groove can also be provided on the conveying assembly 30, and a mating block can be provided on the other side of the connector 21, so that the mating block engages with the guide groove to achieve a sliding or rolling engagement between the connector 21 and the conveying assembly 30. In other embodiments, the guide can be a pulley or a ball bearing, etc.

[0040] See Figure 3 In the first embodiment, one side of the connector 21 is fixedly connected to the housing 10.

[0041] See Figure 4 In the second embodiment, one side of the connector 21 is slidably or rollably engaged with the receiving frame 10. Specifically, the adjustment assembly 20 also includes multiple universal adjustment members 22, which are fixedly connected to or rotatably engaged with the receiving frame 10. One side of the connector 21 is provided with a receiving cavity, and the universal adjustment member 22 is placed in the receiving cavity and can adapt to the adjustment of the deflection angle and / or position of the receiving frame 10.

[0042] Furthermore, the universal adjustment component 22 is a spherical connector made of flexible material, and is fixedly connected to the housing frame 10. Specifically, the universal adjustment component 22 is an aerosol ball, an elastic rubber ball, or other spherical elastomer with deformation capability. When the housing frame 10 needs to adjust its deflection angle or position, the aerosol ball can deform to adapt to the adjustment of the housing frame 10, reducing the probability of the housing frame 10 getting stuck or jammed due to vibration, uneven force, or other factors during entry into or exit from the coating chamber or during positioning.

[0043] Furthermore, the universal adjustment component 22 is a spherical connector made of rigid material, and it rotates in conjunction with the receiving frame 10. Specifically, the universal adjustment component 22 is a universal ball or a ball bearing. When the receiving frame 10 needs to adjust its deflection angle or position, the universal ball or ball bearing can slide or roll relative to the receiving frame 10 or the receiving cavity, thereby adapting to the adjustment of the receiving frame 10 and reducing the probability of the receiving frame 10 getting stuck or jammed due to vibration, uneven force, or other factors during entry into or exit from the coating chamber or during positioning.

[0044] Furthermore, the adjusting assembly 20 also includes connecting seats 23, which are multiple and spaced apart at the bottom of the receiving frame 10. The universal adjusting member 22 corresponds to each connecting seat 23 and is fixedly connected or rotatably engaged. Specifically, when the universal adjusting member 22 is made of flexible material, it is bonded to the connecting seat 23 with adhesive or coated; when the universal adjusting member 22 is made of rigid material, mating holes can be provided in the connecting seat 23, allowing for rotatable engagement between the universal adjusting member 22 and the connecting seat 23. It should be noted that ball-and-hole mating requires appropriate lubrication, which is existing technology and will not be elaborated here.

[0045] See Figure 5 In the third embodiment, one side of the connector 21 is fixedly connected to the receiving frame 10. Specifically, the adjustment assembly 20 also includes magnetic elements 24. Multiple magnetic elements 24 are arranged in pairs, with each pair of magnetic elements 24 positioned at the bottom of the receiving frame 10 and the bottom of the vacuum processing chamber, respectively. The same poles of each pair of magnetic elements 24 are close to each other, creating a gap between the guide and the conveying assembly 30, thereby accommodating adjustments to the deflection angle and / or position of the receiving frame 10. Specifically, the magnetic elements 24 are located in the vacuum processing chamber where the receiving frame 10 needs to cooperate with other components. After cooperation, the receiving frame 10 can move, causing the two magnetic elements 24 to misalign, thus allowing the guide and the conveying assembly 30 to re-engage. It should be noted that high-magnetic-strength magnets can be used for the magnetic elements 24 to ensure long-term magnetism. When ordinary magnets are used for the magnetic elements 24, the magnets only need to be replaced periodically.

[0046] This application also provides a vacuum processing chamber, including a conveying assembly 30 and a workpiece loading mechanism. The receiving frame 10 is detachably disposed in the vacuum processing chamber. The conveying assembly 30 includes a mating member 31. Multiple mating members 31 are spaced apart along a first direction or extend along the first direction. The guide member slides or rolls with the mating member 31 to adapt to the position adjustment of the receiving frame 10 in the first direction.

[0047] Specifically, see Figure 2In one embodiment, the mating component 31 is a guide wheel, and multiple guide wheels are spaced apart along a first direction. The conveying assembly 30 also includes a support component 32, which extends along the first direction or has multiple support components spaced apart along the first direction. The guide wheels are rotatably mounted on the support component 32. Specifically, the conveying assembly 30 also includes a synchronizing component 33, which connects adjacent guide wheels to achieve synchronous rotation. In this embodiment, a sprocket is provided on one side of each guide wheel, and adjacent sprockets are connected by a chain to achieve synchronous transmission. It should be noted that sprocket and chain transmission is prior art and will not be described further here. In other embodiments, the synchronizing component 33 can be a timing belt or a non-elastic rope, etc.

[0048] In one embodiment, the mating component 31 is a guide rail that extends along a first direction. It should be noted that the use of a guide rail and a guide groove to transport the workpiece 1 is prior art and will not be elaborated upon here.

[0049] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A workpiece loading mechanism, characterized by, include: A receiving frame (10) on which multiple workpieces (1) are rotatably disposed; Adjustment component (20), wherein multiple adjustment components (20) are provided at the bottom of the receiving frame (10) and spaced apart, the adjustment component (20) includes a connector (21), one side of the connector (21) is slidably engaged, rolled or fixedly connected with the receiving frame (10), and the other side is provided with a guide, the guide can be slidably engaged or rolled with the conveying component (30) and the adjustment component (20) can adapt to the adjustment of the deflection angle and / or position of the receiving frame (10).

2. The workpiece loading mechanism of claim 1, wherein, The adjustment assembly (20) further includes a universal adjustment component (22), which is multiple and is fixedly connected to or rotatably engaged with the receiving frame (10). A receiving cavity is provided on one side of the connecting component (21), and the universal adjustment component (22) is placed in the receiving cavity and can adapt to the adjustment of the deflection angle and / or position of the receiving frame (10).

3. The workpiece loading mechanism of claim 2, wherein, The universal adjustment component (22) is a spherical connector made of flexible material, and the spherical connector is fixedly connected to the housing frame (10).

4. The workpiece loading mechanism of claim 2, wherein, The universal adjustment component (22) is a spherical connector made of rigid material, and the spherical connector is rotatably engaged with the housing frame (10).

5. The workpiece loading mechanism of claim 2, wherein, The adjustment component (20) also includes a connecting seat (23), which is a plurality of connecting seats (23) and is spaced apart at the bottom of the receiving frame (10). The universal adjustment component (22) corresponds to the connecting seat (23) and is fixedly connected or rotatably engaged.

6. The workpiece loading mechanism of claim 1, wherein, The adjustment assembly (20) also includes magnetic components (24), which are multiple and grouped in pairs. Each group of magnetic components (24) is respectively disposed at the bottom of the housing frame (10) and the bottom of the vacuum processing chamber and their positions correspond. The same poles of each group of magnetic components (24) are close to each other, so that a gap can be generated between the guide and the conveying assembly (30), thereby adapting to the adjustment of the deflection angle and / or position of the housing frame (10).

7. A vacuum processing chamber, characterized in that, The device includes the conveying assembly (30) and the workpiece loading mechanism as described in any one of claims 1-6. The receiving frame (10) is detachably disposed in the vacuum processing chamber. The conveying assembly (30) includes mating parts (31). Multiple mating parts (31) are spaced apart along a first direction or extend along the first direction. The guide is slidably or rollingly engaged with the mating parts (31) to accommodate the adjustment of the receiving frame (10) in the first direction.

8. The vacuum processing chamber of claim 7, wherein, The mating component (31) is a guide wheel, and multiple guide wheels are spaced apart along the first direction. The conveying assembly (30) also includes a support component (32), which extends along the first direction or is spaced apart along the first direction. The guide wheels are rotatably mounted on the support component (32).

9. The vacuum processing chamber of claim 8, wherein, The conveying assembly (30) also includes a synchronizing element (33), which connects two adjacent guide wheels to achieve synchronous rotation.

10. The vacuum processing chamber of claim 7, wherein, The fitting (31) is a guide rail, which extends in the first direction.

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