Self-checking device for chip suction nozzle
By combining a backlight source with an industrial camera, the self-inspection device solves the problems of low efficiency and poor consistency in chip nozzle inspection, realizing automated and high-precision nozzle defect inspection, and improving inspection efficiency and result stability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU MTS AUTOMATION EQUIP CO LTD
- Filing Date
- 2025-05-09
- Publication Date
- 2026-04-21
AI Technical Summary
Existing chip nozzle inspection relies on manual visual inspection or contact measurement, which is inefficient and cannot quantify minute surface defects. Some inspection devices are sensitive to the adjustment of light source and camera parameters, and are cumbersome to operate and have poor consistency.
The self-inspection device combines a backlight source with an industrial camera. It uses the backlight source to perform high-contrast imaging of the external contour of the nozzle, and combines image processing algorithms to identify defects, thereby achieving automated and high-precision appearance quality inspection. The modular design simplifies the spatial matching of the light source, nozzle, and camera.
It achieves automated and high-precision detection of nozzle defects, improves detection efficiency and result stability, and eliminates imaging blurring caused by light source offset.
Smart Images

Figure CN224152314U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of chip nozzle testing technology, specifically a self-testing device for chip nozzles. Background Technology
[0002] A chip nozzle inspection device is an automated machine used to automatically identify surface and structural defects in nozzles (precision tools used in chip manufacturing to grip, move, or position tiny components). Through the coordinated work of optical imaging and mechanical positioning, it quickly determines whether the nozzle has cracks, deformation, blockages, or other problems. Due to the tiny size (typically at the micrometer level) and high precision requirements of the nozzles, manual inspection is difficult to reliably identify minute defects. Automated inspection devices can monitor the nozzle status in real time on the production line, avoiding chip assembly errors or equipment damage caused by nozzle failure, thereby ensuring chip manufacturing yield and production efficiency.
[0003] However, most existing chip nozzles rely on manual visual inspection or contact measurement during inspection, which is inefficient and cannot quantify minute surface defects. Some inspection devices are sensitive to the placement of the nozzle, requiring repeated adjustments to the light source angle and camera parameters to obtain a clear outline, which is cumbersome and inconsistent. Utility Model Content
[0004] The purpose of this invention is to provide a self-testing device for chip nozzles to solve the problems mentioned in the background art.
[0005] To achieve the above objectives, this utility model provides the following technical solution:
[0006] A self-testing device for a chip nozzle includes a support frame with a fixing hole at the bottom. The fixing hole is used to bolt through and fix the support frame to an external support device. A support block is bolted to the side of the support frame away from the fixing hole. A clamping block is bolted to the side of the support block opposite to the support frame. A clamping groove is formed between the clamping block and the support block. The clamping groove is used to clamp and fix a backlight source. The clamping groove is located on the external support device along its opposite side and is bolted to a detection mechanism.
[0007] The detection mechanism includes an industrial camera, with a connecting plate fixedly installed on one side of the top of the industrial camera. The shooting end of the industrial camera faces the backlight source in the clamping slot, and is used to acquire images of the chip nozzle located between the clamping slot and the industrial camera by means of backlight illumination.
[0008] Preferably, the detection mechanism further includes an optical lens, which is threaded into a first through hole. The first through hole is located in the middle of the support base, and the optical axis of the optical lens coincides with the central axis of the backlight source.
[0009] Preferably, a pad is bolted to the side of the support away from the optical lens, and a second through hole is formed in the middle of the pad, which is coaxially fitted with the first through hole.
[0010] Preferably, the second through hole is sleeved on the outside of the shooting end of the industrial camera, so that the connecting plate and the pad are in contact, and the connecting plate and the pad are fixed by bolts.
[0011] Preferably, a locking plate is fixedly installed on the side of the pad opposite to the support seat, and the locking plate is installed on the top of the industrial camera by bolts.
[0012] Preferably, the top of the support base has an assembly hole, through which the support base is fixed to the external dust cover by bolts, and a positioning block is fixedly installed on the side of the support base opposite to the assembly hole.
[0013] Preferably, mounting plates are fixedly installed on both sides of the support base away from the assembly hole, and a pad is installed on the bottom end of the mounting plate by bolts.
[0014] Preferably, the pad has mounting holes for bolts to pass through and fix the pad to the external support device. A positioning groove is provided on the top of the pad near the fixing hole, and a positioning block is embedded in the positioning groove with an interference fit.
[0015] Compared with the prior art, the beneficial effects of this utility model are:
[0016] This self-inspection device for chip nozzles uses a backlight source to create a high-contrast image of the nozzle's outer contour. An industrial camera directly captures a clear projection of the nozzle's edge, and combined with image processing algorithms, it identifies defects such as nozzle shape deformation, gaps, and surface cracks, achieving automated and high-precision appearance quality inspection.
[0017] This self-testing device for chip nozzles uses a clamping slot for rapid positioning of the backlight source and a modular assembly design for the testing mechanism. Once the nozzle enters the imaging point, it can automatically complete the spatial matching of the light source, nozzle, and camera without manual adjustment. This solves the problem of blurred contour imaging caused by light source offset in traditional solutions and ensures the stability of the test results. Attached Figure Description
[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;
[0019] Figure 2 This is a schematic diagram of the support frame of this utility model;
[0020] Figure 3 This is a schematic diagram of the structure of the support base of this utility model;
[0021] Figure 4 This is a schematic diagram of the structure of the pad block of this utility model;
[0022] Figure 5 This is a schematic diagram of the structure of the pad of this utility model.
[0023] In the diagram: 101, support frame; 102, fixing hole; 103, support block; 104, clamping block; 105, clamping groove; 106, detection mechanism; 201, industrial camera; 202, connecting plate; 204, optical lens; 205, first through hole; 206, support base; 301, pad; 302, second through hole; 303, locking plate; 304, assembly hole; 305, positioning block; 306, mounting plate; 401, pad; 402, mounting hole; 403, positioning groove. Detailed Implementation
[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0025] Please see Figures 1-5 As shown, this utility model provides a technical solution:
[0026] A self-testing device for a chip nozzle includes a support frame 101. A fixing hole 102 is provided at the bottom of the support frame 101 for bolting through and fixing the support frame 101 to an external support device. A support block 103 is bolted to the side of the support frame 101 away from the fixing hole 102. A clamping block 104 is bolted to the side of the support block 103 opposite to the support frame 101. A clamping groove 105 is provided between the clamping block 104 and the support block 103 for clamping and fixing a backlight source. The clamping groove 105 is located on the external support device along its opposite side, and a detection mechanism 106 is bolted thereon.
[0027] The detection mechanism 106 includes an industrial camera 201. A connecting plate 202 is fixedly installed on one side of the top of the industrial camera 201. The shooting end of the industrial camera 201 faces the backlight source in the clamping groove 105 and is used to acquire images of the chip nozzle located between the clamping groove 105 and the industrial camera 201 by means of backlight illumination.
[0028] Through the above scheme, the overall stable positioning of the device can be achieved by bolting the bottom fixing hole of the support frame to the external support device. The clamping range of the clamping slot can be flexibly adjusted by the bolt installation and cooperation of the support block and the clamping block to adapt to backlight sources of different sizes. The clamping slot can fix the backlight source to form uniform backlight to improve the contrast of the nozzle contour imaging. The backlight image can be acquired by pointing the shooting end of the industrial camera in the detection mechanism toward the clamping slot to eliminate the interference of metal surface reflection. The fixed connection between the connecting plate and the industrial camera can ensure the structural stability of the camera body during continuous operation.
[0029] In this embodiment, preferably, the detection mechanism 106 further includes an optical lens 204, which is threaded into a first through hole 205. The first through hole 205 is located in the middle of the support base 206, and the optical axis of the optical lens 204 coincides with the central axis of the backlight source.
[0030] The above scheme achieves precise alignment of the optical axis of the lens with the central axis of the light source by threaded mounting of the optical lens with the first through hole of the support base. Setting the first through hole in the middle position of the support base ensures that the optical lens is centered. The coaxiality of the optical path is guaranteed by aligning the optical lens with the axis of the backlight source, thereby improving the image acquisition accuracy.
[0031] In this embodiment, preferably, a pad 301 is bolted to the side of the support base 206 away from the optical lens 204. The pad 301 has a second through hole 302 in the middle, and the second through hole 302 is coaxially fitted with the first through hole 205.
[0032] The above solution expands the installation space of the detection mechanism by installing a pad on the side of the support away from the optical lens. The coaxial fit between the second through hole and the first through hole in the middle of the pad maintains the straightness of the optical path transmission. The bolt connection between the support and the pad enables detachable fixing of both, simplifying the maintenance process.
[0033] In this embodiment, preferably, the second through hole 302 is sleeved on the outer side of the shooting end of the industrial camera 201, so that the connecting plate 202 and the pad 301 are in contact, and the connecting plate 202 and the pad 301 are fixed by bolts.
[0034] The above scheme can constrain the radial displacement of the camera by using the second through hole on the outside of the shooting end of the industrial camera to improve the alignment stability of the optical path. The connection rigidity between the industrial camera and the inspection mechanism can be enhanced by the fit of the connecting plate and the pad and the bolt fixing. The combination of multi-level positioning structures can suppress the vibration and displacement of the industrial camera during high-speed shooting.
[0035] In this embodiment, preferably, a locking plate 303 is fixedly installed on one side of the pad block 301 opposite to the support base 206, and the locking plate 303 is installed on the top of the industrial camera 201 by bolts.
[0036] The above solution allows for the installation of a locking plate on the opposite side of the support base to clamp the industrial camera at the top. The bolt connection between the locking plate and the top of the industrial camera further secures the camera position to prevent axial loosening. This dual-fixing structure design enhances the reliability of the detection mechanism under high-frequency operating conditions.
[0037] In this embodiment, preferably, the top of the support base 206 is provided with an assembly hole 304, and the support base 206 is fixed to the external dust cover by bolts passing through the assembly hole 304. A positioning block 305 is fixedly installed on the side of the support base 206 away from the assembly hole 304.
[0038] The above solution isolates the optical lens from environmental dust by fixing it with the bolts of the assembly hole at the top of the support base and the external dust cover, thus maintaining image clarity. The positioning block installed on the side of the support base away from the assembly hole enables the rapid positioning of the detection mechanism and the external support device. The geometric matching of the positioning block simplifies the alignment operation during disassembly and assembly.
[0039] In this embodiment, preferably, mounting plates 306 are fixedly installed on both sides of the support base 206 away from the assembly hole 304, and a pad 401 is installed on the bottom end of the mounting plate 306 by bolts.
[0040] The above scheme can disperse the impact of external loads on the testing mechanism by symmetrically arranging the mounting plates on both sides of the support base. The bolt connection between the bottom of the mounting plate and the pad can form a buffer support structure to improve vibration resistance. The modular installation design can realize flexible connection between the testing mechanism and the external support device.
[0041] In this embodiment, preferably, the pad 401 is provided with a mounting hole 402, which is used for bolts to pass through and fix the pad 401 to the external support device. The top of the pad 401 is provided with a positioning groove 403 on the side near the fixing hole 102, and a positioning block 305 is inserted into the positioning groove 403 with an interference fit.
[0042] The above scheme enables multi-point rigid positioning of the testing mechanism by fixing the mounting holes of the pad to the external support device with bolts. The interference fit between the positioning groove at the top of the pad and the positioning block ensures the reset accuracy of the testing mechanism after repeated disassembly and assembly, thereby reducing calibration time. The embedded installation design of the positioning groove can eliminate accumulated assembly errors and improve the long-term stability of the system.
[0043] In this embodiment, a self-testing device for a chip nozzle is first used by connecting the support frame 101 to the external support device via bolts through the bottom fixing hole 102, and then positioning the pad 401 to the external support device via bolts through the mounting hole 402, ensuring the stability of the device during the testing process. A backlight source fixed in the clamping groove 105 emits uniform light to illuminate the nozzle under test, forming a backlight. At this time, the industrial camera 201, assisted by the optical lens 204 of the support base 206, captures the outline projection and internal structural features of the nozzle. The optical lens 204 is precisely installed in the first through hole 205 of the support base 206 via threads, and its optical axis remains coaxial with the shooting end of the industrial camera 201 through the second through hole 302 of the pad 301, ensuring image clarity. The combined design of clamping block 104 and support block 103 allows for quick replacement of light sources of different specifications by adjusting the tightness of the bolts. The double fixing of locking plate 303 and connecting plate 202 effectively suppresses the vibration and displacement of industrial camera 201 during continuous operation. During the detection process, the interference fit (H7 / p6 tolerance standard) between positioning block 305 and positioning groove 403 of pad 401 ensures the optical path reset accuracy of detection mechanism 106 after each disassembly and assembly. Combined with the buffer support of mounting plate 306, the system's repeatability error is reduced. The dust cover covers the optical components through assembly hole 304 to prevent environmental dust from contaminating the lens surface. This design scheme, through the combination of backlight imaging principle and modular assembly structure, achieves a simultaneous improvement in nozzle defect detection efficiency and recognition accuracy.
[0044] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.
Claims
1. A self-checking device for chip aspirators, comprising a support frame (101), characterized in that: The support frame (101) has a fixing hole (102) at its bottom end. The fixing hole (102) is used for bolts to pass through and fix the support frame (101) to the external support device. A support block (103) is installed on the side of the support frame (101) away from the fixing hole (102) by bolts. A clamping block (104) is installed on the side of the support block (103) opposite to the support frame (101) by bolts. A clamping groove (105) is provided between the clamping block (104) and the support block (103). The clamping groove (105) is used for clamping and fixing the backlight source. The clamping groove (105) is located on the external support device along its opposite side and is equipped with a detection mechanism (106) by bolts. The detection mechanism (106) includes an industrial camera (201). A connecting plate (202) is fixedly installed on one side of the top of the industrial camera (201). The shooting end of the industrial camera (201) faces the backlight source in the clamping groove (105) and is used to acquire images of the chip nozzle located between the clamping groove (105) and the industrial camera (201) by means of backlight illumination.
2. The self-checking device for a chip aspirator nozzle of claim 1, wherein: The detection mechanism (106) also includes an optical lens (204), which is threaded into a first through hole (205). The first through hole (205) is located in the middle of the support base (206), and the optical axis of the optical lens (204) coincides with the central axis of the backlight source.
3. The self-testing device for a chip nozzle according to claim 2, characterized in that: The support base (206) is mounted with a pad (301) on the side away from the optical lens (204) by bolts. The pad (301) has a second through hole (302) in the middle, and the second through hole (302) is coaxially fitted with the first through hole (205).
4. The self-checking device for a chip aspirator nozzle of claim 3, wherein: The second through hole (302) is sleeved on the outside of the shooting end of the industrial camera (201), so that the connecting plate (202) and the pad (301) are in contact, and the connecting plate (202) and the pad (301) are fixed by bolts.
5. The self-checking device for a chip aspirator nozzle of claim 4, wherein: A locking plate (303) is fixedly installed on one side of the support base (206) opposite to the pad (301), and the locking plate (303) is installed on the top of the industrial camera (201) by bolts.
6. The self-checking device for a chip aspirator nozzle of claim 5, wherein: The support base (206) has an assembly hole (304) at its top. The assembly hole (304) is used to fix the support base (206) to the external dust cover by bolts. A positioning block (305) is fixedly installed on the side of the support base (206) away from the assembly hole (304).
7. The self-checking device for a chip aspirator nozzle of claim 6, wherein: Mounting plates (306) are fixedly installed on both sides of the support base (206) away from the assembly hole (304), and a pad (401) is installed on the bottom end of the mounting plate (306) by bolts.
8. The self-checking device for a chip aspirator nozzle of claim 7, wherein: The pad (401) has a mounting hole (402) for bolts to pass through and fix the pad (401) to the external support device. The top of the pad (401) near the fixing hole (102) has a positioning groove (403) and a positioning block (305) is inserted into the positioning groove (403) with an interference fit.