Z-axis adjusting device of manual testing table and light-sensitive chip testing equipment

Abstract

The utility model provides a hand test bench Z-axis adjusting device and light sensing chip test equipment, and relates to the semiconductor test equipment technology field, the hand test bench Z-axis adjusting device comprises a lower loading bench, an upper loading bench, a lifting mechanism, a bearing assembly and an elastic floating assembly; the lower loading platform and the upper loading platform are connected through a lifting mechanism, the lifting mechanism is configured to drive the upper loading platform to lift, and the upper loading platform is provided with a probe; the bearing assembly is connected with the downloading table through the elastic floating assembly so that the bearing assembly can float relative to the downloading table along the Z axis, the bearing assembly is provided with a chip installation cavity opposite to the probe along the Z axis, and the chip installation cavity is located above the probe. The Z-axis adjusting device for the manual test bench is more flexible and obvious in effect, and has the advantages of being high in operability, easy in range control, time-saving and the like.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing equipment technology, and in particular to a hand-held testing stage Z-axis adjustment device and a photosensitive chip testing device. Background Technology

[0002] With the widespread application of photosensitive chips in smart devices, security monitoring, medical testing, and other fields, OLGA (Organic Land Grid Array) packaging technology has gradually become the mainstream packaging form for photosensitive chips due to its high density and high performance. Testing OLGA-packaged photosensitive chips requires measuring the photoelectric conversion characteristics under light source conditions, as well as the electrical characteristics of the underlying pads. This necessitates precise control of the contact state between the probes and the pads, and the light exposure on the chip's surface. However, due to the tolerances of the package thickness and the testing equipment, problems such as incomplete probe-pad contact or light leakage on the chip's surface can easily occur during testing, leading to weak test signals or inaccurate test results.

[0003] In the existing technology, the adjustment of Z-axis height mainly relies on shim adjustment or fine adjustment using calipers. However, shim adjustment has the disadvantages of being inflexible and having an unclear adjustment effect, while fine adjustment using calipers has the disadvantages of poor operability and long adjustment time. Utility Model Content

[0004] The purpose of this invention is to provide a hand-held measuring stage Z-axis adjustment device and a photosensitive chip testing equipment, which is more flexible, has obvious effects, and also has the advantages of strong operability, easy range control, and time saving.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] In the first aspect, this utility model provides a Z-axis adjustment device for a manual measuring platform, including a download platform, a loading platform, a lifting mechanism, a bearing component, and an elastic floating component;

[0007] The download station and the loading station are connected by the lifting mechanism, which is configured to drive the loading station to move up and down. The loading station is equipped with a probe.

[0008] The carrier component is connected to the download stage via an elastic floating component, so that the carrier component floats relative to the download stage along the Z-axis. The carrier component has a chip mounting cavity disposed along the Z-axis opposite to the probe, and the chip mounting cavity is located above the probe.

[0009] In an optional embodiment, the downloading platform is equipped with a guide frame, and the loading platform slides along the Z-axis with the guide frame;

[0010] The lifting mechanism includes an elbow clamp, which is rotatably connected between the guide frame and the upper platform to drive the upper platform to slide relative to the guide frame along the Z-axis.

[0011] In an optional embodiment, the upper platform includes a platform body and a probe mounting base connected to the platform body. The platform body is slidably engaged with the guide frame along the Z-axis and rotatably connected to the elbow clamp. The probe is mounted on the probe mounting base.

[0012] In an optional embodiment, the download platform is provided with a first locking hole, and the loading platform is provided with a second locking hole. When the lifting mechanism drives the loading platform to move up to the position, the first locking hole and the second locking hole are arranged opposite each other in the horizontal direction and cooperate with each other to insert a locking component.

[0013] In an optional embodiment, the elastic floating component includes a connector and an elastic element. The connector passes through the support component and connects to the download platform. The support component slides along the Z-axis with the connector. The elastic element is disposed between the support component and the download platform.

[0014] In an optional embodiment, the elastic element includes a spring, which is sleeved on the outside of the connector, with one end of the spring abutting against the download platform and the other end of the spring extending into the bearing assembly and abutting against the bearing assembly.

[0015] In an optional embodiment, the supporting component has a mounting hole at one end away from the download platform. A gasket is detachably connected to the mounting hole. The gasket is sleeved on the outside of the connector and is located between the bottom of the mounting hole and the end of the connector away from the download platform.

[0016] In an optional embodiment, the support assembly includes a bracket and a chip carrier frame connected to the bracket. The chip carrier frame is provided with the chip mounting cavity. The bracket slides along the Z-axis with the connector, and the connector passes through the bracket.

[0017] In an optional embodiment, the download platform, the loading platform, the bearing component, and the elastic floating component are all made of metal and have a black antistatic coating on their outer surfaces.

[0018] Secondly, this utility model provides a photosensitive chip testing device, including a hand-held testing stage Z-axis adjustment device as described in any of the foregoing embodiments.

[0019] The hand-held testing platform Z-axis adjustment device and the optical chip testing equipment provided by this utility model can produce the following beneficial effects:

[0020] Compared to existing technologies, the Z-axis adjustment device for the hand-held measuring stage provided by this utility model allows for the initial lifting of the upper platform along the Z-axis via a lifting mechanism. The upper platform then moves the carrier component upwards, allowing the probe to extend from below the chip mounting cavity and contact the chip. The chip remains in place within the chip mounting cavity due to the limiting plate assembly. During this process, the tolerance in the Z-direction can be absorbed by the floating of the carrier component along the Z-axis. The elastic floating component enables more flexible and effective adjustment along the Z-axis, and also offers advantages such as high operability, easy range control, and time saving.

[0021] The photosensitive chip testing equipment provided in the second aspect of this utility model includes the Z-axis adjustment device of the hand test stage provided in the first aspect of this utility model, thereby possessing all the beneficial effects of the Z-axis adjustment device of the hand test stage provided in the first aspect of this utility model. Attached Figure Description

[0022] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0023] Figure 1 A three-dimensional structural schematic diagram of a photosensitive chip testing device provided in an embodiment of this utility model;

[0024] Figure 2 A top view of a photosensitive chip testing device provided in an embodiment of this utility model;

[0025] Figure 3 for Figure 2 A-A cross-sectional view;

[0026] Figure 4 for Figure 2 B-B cross-sectional view;

[0027] Figure 5 An exploded view of a portion of the structure of a Z-axis adjustment device for a hand-held measuring platform provided in an embodiment of this utility model;

[0028] Figure 6 A top view of a Z-axis adjustment device for a hand measuring platform provided in an embodiment of this utility model;

[0029] Figure 7 for Figure 6 C-C partial cross-sectional view.

[0030] Icons: 1 - Download platform; 11 - Guide frame; 111 - Guide hole; 12 - First locking hole; 2 - Upper platform; 21 - Probe; 22 - Platform body; 221 - Second positioning component; 222 - Guide column; 23 - Probe mounting base; 231 - First positioning component; 24 - Second locking hole; 3 - Lifting mechanism; 31 - Elbow clamp; 4 - Bearing assembly; 41 - Bracket; 411 - Mounting hole; 412 - Receiving hole; 42 - Chip frame; 421 - Chip mounting cavity; 422 - First positioning hole; 43 - Gasket; 44 - Limiting component; 5 - Elastic floating assembly; 51 - Connector; 52 - Spring; 6 - Locking component; 7 - Support platform; 8 - Slide rail; 9 - Limiting plate assembly; 91 - Support plate; 92 - Base plate; 921 - Through hole; 93 - Limiting beam; 931 - Slot. Detailed Implementation

[0031] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0032] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0033] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0034] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.

[0035] The first aspect of this utility model provides a Z-axis adjustment device for a hand-held measuring platform, such as... Figures 1 to 7 As shown, it includes a download platform 1, an loading platform 2, a lifting mechanism 3, a load-bearing component 4, and an elastic floating component 5;

[0036] The downloading station 1 and the loading station 2 are connected by a lifting mechanism 3. The lifting mechanism 3 is configured to drive the loading station 2 to rise and fall. The loading station 2 is equipped with a probe 21.

[0037] The carrier component 4 is connected to the download stage 1 via the elastic floating component 5, so that the carrier component 4 floats relative to the download stage 1 along the Z-axis. The carrier component 4 is provided with a chip mounting cavity 421 that is arranged opposite to the probe 21 along the Z-axis, and the chip mounting cavity 421 is located above the probe 21.

[0038] In use, the lifting mechanism 3 first raises the upper platform 2 along the Z-axis. The upper platform 2 then moves the carrier component 4 upward. The probe 21 extends from below the chip mounting cavity 421 and contacts the chip. The chip is prevented from detaching from the chip mounting cavity 421 by the limiting plate group 9. During this process, the tolerance in the Z-direction can be absorbed by the floating of the carrier component 4 along the Z-axis. The elastic floating component 5 makes the adjustment along the Z-axis more flexible and effective, and also has the advantages of strong operability, easy range control, and time saving.

[0039] In alternative implementations, such as Figure 1 and Figure 3 As shown, the download platform 1 is equipped with a guide frame 11, and the upper platform 2 slides along the Z-axis with the guide frame 11; the lifting mechanism 3 includes an elbow clamp 31, which is rotatably connected between the guide frame 11 and the upper platform 2 to drive the upper platform 2 to slide relative to the guide frame 11 along the Z-axis.

[0040] When in use, rotating the elbow clamp 31 downwards causes the upper platform 2 to slide downwards relative to the guide frame 11 along the Z-axis. Rotating the elbow clamp 31 upwards causes the upper platform 2 to slide upwards relative to the guide frame 11 along the Z-axis, thereby raising and lowering the upper platform 2. This allows the probe 21 to contact the chip or cancel the contact between the probe 21 and the chip.

[0041] The elbow clamp 31 described above can adopt an existing elbow clamp structure, so the specific structure of the elbow clamp 31 will not be described in detail.

[0042] Of course, the lifting mechanism 3 can also use a pneumatic cylinder, hydraulic cylinder, linear motor or other mechanism for lifting motion. Any structure that can drive the upper platform 2 to lift is acceptable.

[0043] Specifically, such as Figure 3As shown, the guide frame 11 is provided with a guide hole 111, and the upper platform 2 includes a guide post 222 that extends into the guide hole and slides in cooperation with the guide hole.

[0044] In alternative implementations, such as Figure 3 and Figure 5 As shown, the upper stage 2 includes a stage body 22 and a probe mounting base 23 connected to the stage body 22. The bottom end of the stage body 22 has a guide post 222. The guide post 222 slides along the Z-axis with the guide frame 11 and is rotatably connected to the elbow clamp 31. The probe mounting base 23 is equipped with a probe 21.

[0045] The probe mounting base 23 and the stage body 22 can be connected by screws or pins or other connecting parts.

[0046] In an optional implementation, probe 21 is floatable relative to probe mount 23 along the Z-axis. The floating structure is a known existing technology, such as using a spring. When selecting the floating stroke of probe 21, the thickness tolerance of the chip package batch can be considered first, with a probe stroke allowance of more than 0.3mm to ensure electrical contact of the pad pins; second, probe 21 needs to pass through the die holder 42 to contact the chip, and the probe stroke of probe 21 also needs to overlap the thickness of the die holder 42; third, it is also necessary to consider that the bottom of probe 21 needs to form good contact with the pads of the test circuit board, and this pre-compression stroke needs to be added to the circuit board; finally, the compression stroke necessary for the assembly of probe 21 itself and good electrical conduction also needs to be considered. Combining the above factors, the probe stroke that meets the requirements is finally selected.

[0047] In alternative implementations, such as Figure 3 As shown, the download platform 1 is provided with a first locking hole 12, and the loading platform 2 is provided with a second locking hole 24.

[0048] When in use, when the lifting mechanism 3 moves the upper platform 2 to the position, the first locking hole 12 and the second locking hole 24 are set opposite each other in the horizontal direction. The user can insert the locking piece 6 into the first locking hole 12 and the second locking hole 24 to limit the position of the upper platform 2 relative to the lower platform 1 along the Z-axis.

[0049] In alternative implementations, such as Figure 4 As shown, the platform body 22 has a second positioning member 221, which extends along the Z-axis in a direction away from the download platform 1.

[0050] When the lifting mechanism 3 drives the upper platform 2 to rise, the second positioning member 221 can extend into the through hole 921 in the limiting plate group 9, thereby limiting the position of the upper platform 2 relative to the limiting plate group 9 along the X-axis and Y-axis.

[0051] It is understandable that the X-axis, Y-axis and Z-axis mentioned above are perpendicular to each other.

[0052] In alternative implementations, such as Figure 5 As shown, the probe mounting base 23 has a first positioning element 231.

[0053] When the lifting mechanism 3 drives the upper platform 2 to rise, the first positioning member 231 can extend into the first positioning hole 422 of the bearing component 4, thereby correcting the position of the bearing component 4 relative to the upper platform 2 along the X-axis and Y-axis.

[0054] Specifically, in addition to meeting the above-mentioned floating stroke, the length of the probe 21 protruding from the probe mounting base 23 must also be lower than the height of the first positioning member 231 protruding from the probe mounting base 23. This ensures that during the upward movement of the upper stage 2, the contact between the first positioning member 231 and the first positioning hole 422 occurs before the probe 21 enters the slide frame 42, thus avoiding the risk of the probe 21 being scraped or broken during the movement.

[0055] Specifically, the first positioning element 231 can be configured as one or multiple. When multiple first positioning elements 231 are configured, the multiple first positioning elements 231 are arranged around the probe 21, and the first positioning holes 422 are configured as multiple ones corresponding one-to-one with the first positioning elements 231.

[0056] The top end of the first positioning member 231 may include a variable diameter section. Along the Z-axis upward direction, the outer diameter of the variable diameter section gradually decreases. The above arrangement facilitates the first positioning member 231 to enter the first positioning hole 422.

[0057] In alternative implementations, such as Figure 7 As shown, the elastic floating component 5 includes a connector 51 and an elastic element. The connector 51 passes through the bearing component 4 and is connected to the download platform 1. The bearing component 4 slides along the Z-axis with the connector 51. The elastic element is disposed between the bearing component 4 and the download platform 1.

[0058] When in use, if there is a tolerance in the Z-axis between the bearing component 4 and the upper platform 2 and the limiting plate group 9, the Z-axis position of the bearing component 4 can be adjusted by the elastic force of the elastic element, thereby absorbing the tolerance in the Z direction. The adjustment is flexible and highly operable.

[0059] The connector 51 can be a bolt, screw, or pin, etc.

[0060] In alternative implementations, such as Figure 7 As shown, the elastic element includes a spring 52, which is sleeved on the outside of the connector 51. One end of the spring 52 abuts against the download platform 1, and the other end of the spring 52 extends into the bearing assembly 4 and abuts against the bearing assembly 4.

[0061] When the load-bearing component 4 needs to float downwards, the spring 52 can be compressed; conversely, the spring 52 can release its elastic force to make the load-bearing component 4 float upwards.

[0062] In an optional embodiment, the support component 4 has a floating margin relative to the connector 51 along the X-axis.

[0063] In use, the lifting mechanism 3 drives the upper platform 2 to move upward relative to the lower platform 1 along the Z-axis. During this process, the first positioning component 231 on the upper platform 2 can be inserted into the first positioning hole 422, reducing the tolerance of the combined structure caused by the separate setting of the bearing component 4 and the upper platform 2. At the same time, since the bearing component 4 has a floating margin relative to the connecting component 51 along the X-axis, the X-axis positioning correction can be performed through the floating space, thereby achieving the requirement of accurate positioning.

[0064] In alternative implementations, such as Figure 7 As shown, the bearing component 4 has a mounting hole 411 at the end away from the download platform 1. A gasket 43 is detachably connected in the mounting hole 411. The gasket 43 is sleeved on the outside of the connector 51, and the gasket 43 is located between the bottom of the mounting hole 411 and the end of the connector 51 away from the download platform 1.

[0065] By adding shims 43, changing the thickness of shims 43, and replacing springs 52 with different strokes, the floating stroke of the bearing assembly 4 along the Z-axis can be adjusted, which satisfies both efficiency requirements and the problem of large errors in multiple stations.

[0066] In alternative implementations, such as Figure 5 As shown, the carrier component 4 includes a bracket 41 and a chip carrier frame 42 connected to the bracket 41. The chip carrier frame 42 is provided with a chip mounting cavity 421. The bracket 41 slides along the Z-axis with a connector 51. The connector 51 passes through the bracket 41. The bracket 41 is provided with the aforementioned mounting hole 411. The chip carrier frame 42 is provided with a first positioning hole 422.

[0067] like Figure 7 As shown, the end of the bracket 41 near the download platform 1 is provided with a receiving hole 412, and the end of the spring away from the download platform 1 extends into the receiving hole 412 and abuts against the bracket 41.

[0068] In alternative implementations, such as Figure 5 As shown, the support assembly 4 also includes a limiting member 44, which is connected to the side wall of the bracket 41. The limiting member 44 is used to engage with the limiting plate group 9 to limit the position of the bracket 41 relative to the limiting plate group 9 along the X-axis.

[0069] The limiting component 44 can be a bolt or a pin, etc.

[0070] To facilitate the connection of the limiting member 44, the limiting member can be a bolt, with one end of the bolt threaded to the side wall of the bracket 41 and the other end protruding from the side wall of the bracket 41.

[0071] In an optional implementation, the download platform 1, the loading platform 2, the bearing component 4, and the elastic floating component 5 are all made of metal, and the outer surface is provided with a black anti-static coating to improve hardness while ensuring that the leakage of the light path is not increased.

[0072] In the above embodiments, the carrier component 4 may also be made of antistatic material only for the surface that contacts the chip.

[0073] The second aspect of this utility model provides a photosensitive chip testing device, which includes the aforementioned hand-held testing platform Z-axis adjustment device.

[0074] The photosensitive chip testing equipment provided in the second aspect of this utility model includes the hand-held test stage Z-axis adjustment device provided in the first aspect of this utility model, thereby possessing all the beneficial effects of the hand-held test stage Z-axis adjustment device provided in the first aspect of this utility model.

[0075] In an optional embodiment, the photosensitive chip testing equipment further includes a support platform 7, a slide rail 8, and a limiting plate group 9. The slide rail 8 is connected to the support platform 7, and the download stage 1 slides along the X-axis in cooperation with the slide rail 8. The limiting plate group 9 includes a support plate 91, a base plate 92, and a limiting beam 93.

[0076] The base plate 92 is connected to the support platform 7 via the support plate 91 and is used to abut against the top surface of the bearing component 4. The base plate 92 has a through hole 921 for insertion into the second positioning member 221 in the upper platform 2.

[0077] The limiting beam 93 is connected to the base plate 92. The bottom end of the limiting beam 93 is recessed with a groove 931 that engages with the limiting member 44 in the bearing assembly 4, so as to limit the position of the bearing assembly 4 relative to the limiting beam 93 along the X-axis.

[0078] In use, the download platform 1 slides relative to the slide rail 8 along the X-axis. When it slides into position, the limiting member 44 engages with the slot 931. Then, the lifting mechanism 3 drives the upper platform 2 to move upward relative to the download platform 1 along the Z-axis. After the download platform 1 moves upward into position, the carrier frame 42 abuts against the base plate 92. During the upward movement of the download platform 1, the first positioning member 231 on the upper platform 2 can be inserted into the first positioning hole 422. At the same time, the first positioning member 231 can be inserted into the first positioning hole 422. The bearing component 4 absorbs the tolerance in the Z-direction through the elastic floating component 5. The bearing component 4 is positioned and corrected by floating relative to the connecting member 51 along the X-axis, thereby achieving the requirement of accurate positioning.

[0079] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A Z-axis adjustment device for a manual measuring stage, characterized in that, It includes a download platform (1), an loading platform (2), a lifting mechanism (3), a load-bearing component (4), and a flexible floating component (5); The download station (1) and the loading station (2) are connected by the lifting mechanism (3), which is configured to drive the loading station (2) to rise and fall. The loading station (2) is equipped with a probe (21). The carrier component (4) is connected to the download stage (1) via an elastic floating component (5) so that the carrier component (4) floats relative to the download stage (1) along the Z-axis. The carrier component (4) is provided with a chip mounting cavity (421) disposed opposite to the probe (21) along the Z-axis. The chip mounting cavity (421) is located above the probe (21).

2. The Z-axis adjustment device for the manual measuring stage according to claim 1, characterized in that, The download platform (1) is equipped with a guide frame (11), and the loading platform (2) slides along the Z-axis with the guide frame (11); The lifting mechanism (3) includes an elbow clamp (31), which is rotatably connected between the guide frame (11) and the upper platform (2) to drive the upper platform (2) to slide relative to the guide frame (11) along the Z-axis.

3. The Z-axis adjustment device for the manual measuring stage according to claim 2, characterized in that, The upper platform (2) includes a platform body (22) and a probe mounting base (23) connected to the platform body (22). The platform body (22) is slidably engaged with the guide frame (11) along the Z-axis and rotatably connected with the elbow clamp (31). The probe mounting base (23) is equipped with the probe (21).

4. The Z-axis adjustment device for the manual measuring stage according to claim 1, characterized in that, The download platform (1) is provided with a first locking hole (12), and the loading platform (2) is provided with a second locking hole (24). When the lifting mechanism (3) drives the loading platform (2) to move up to the position, the first locking hole (12) and the second locking hole (24) are arranged opposite to each other in the horizontal direction and cooperate to insert the locking component (6).

5. The Z-axis adjustment device for the manual measuring stage according to any one of claims 1-4, characterized in that, The elastic floating component (5) includes a connector (51) and an elastic element. The connector (51) passes through the bearing component (4) and is connected to the download platform (1). The bearing component (4) slides along the Z-axis with the connector (51). The elastic element is disposed between the bearing component (4) and the download platform (1).

6. The Z-axis adjustment device for the manual measuring stage according to claim 5, characterized in that, The elastic element includes a spring (52), which is sleeved on the outside of the connector (51). One end of the spring (52) abuts against the download platform (1), and the other end of the spring (52) extends into the bearing assembly (4) and abuts against the bearing assembly (4).

7. The Z-axis adjustment device for the manual measuring stage according to claim 6, characterized in that, The supporting component (4) has a mounting hole (411) at one end away from the download platform (1). A gasket (43) is detachably connected in the mounting hole (411). The gasket (43) is sleeved on the outside of the connector (51), and the gasket (43) is located between the bottom of the mounting hole (411) and the end of the connector (51) away from the download platform (1).

8. The Z-axis adjustment device for the manual measuring stage according to claim 5, characterized in that, The carrier component (4) includes a bracket (41) and a chip carrier frame (42) connected to the bracket (41). The chip carrier frame (42) is provided with the chip mounting cavity (421). The bracket (41) slides along the Z-axis with the connector (51). The connector (51) passes through the bracket (41).

9. The Z-axis adjustment device for the manual measuring stage according to any one of claims 1-4, characterized in that, The download platform (1), the loading platform (2), the bearing component (4), and the elastic floating component (5) are all made of metal and have a black anti-static coating on their outer surfaces.

10. A photosensitive chip testing device, characterized in that, Includes the Z-axis adjustment device for the manual measuring stage as described in any one of claims 1-9.

Images