Ion implanter bushing polishing device

Abstract

The utility model discloses an ion implanter bushing polishing device in the technical field of machining equipment, which comprises a base mounted on a lathe, a stepped shaft is arranged at the center of the surface of the base, a part fixing seat is mounted above the base, an adjustable mounting structure is arranged at the bottom of the base, and the adjustable mounting structure is connected with the stepped shaft. A clamping mechanism is arranged on the surface of the part fixing seat, a barrel with a stepped hole is arranged in the center of the bottom of the part fixing seat, a bearing assembly is embedded between the stepped shaft and the stepped hole, the base and the part fixing seat are in running fit through the bearing assembly, and a tool module is installed on the lathe. The tool module is arranged close to the part fixing base, and the lathe is further provided with a rotation driving shaft capable of driving the part fixing base to rotate. According to the scheme, lathe driving replaces manual operation, efficiency is remarkably improved, precision is high, stability is good, machining errors are eliminated due to the design of the bearing assembly and the stepped shaft hole, and the requirements of parts of different sizes and machining faces are met.

Description

Technical Field

[0001] This utility model relates to a bushing polishing device for an ion implanter, belonging to the technical field of mechanical processing equipment. Background Technology

[0002] Bushings are accessories used on the outside of mechanical parts to achieve functions such as sealing and wear protection. They refer to rings that act as gaskets and are generally made of corrosion-resistant materials such as polytetrafluoroethylene or graphite.

[0003] In existing bushing repair processes, after filling surface pits, material overflow often leads to unevenness on the part surface, requiring grinding to restore flatness. Traditional methods rely on manual grinding using tools such as sandpaper and abrasive wheels, which is labor-intensive, requires long working hours, is labor-intensive, inefficient, slow, and difficult to meet the needs of mass production; it also lacks precision, and manual operation is prone to processing errors, affecting the consistency of part flatness. Summary of the Invention

[0004] The purpose of this utility model is to overcome the shortcomings of the existing technology and provide an ion implanter bushing grinding device that replaces manual grinding with mechanical automation, solving the problems of low efficiency and poor precision in the existing technology, while being adaptable to lathes of different sizes and processing needs.

[0005] To achieve the above objectives, this utility model employs the following technical solution:

[0006] In a first aspect, this utility model provides an ion implanter bushing polishing device, including a base mounted on a lathe, with a stepped shaft at the center of the base surface, a part fixing seat mounted above the base, an adjustable mounting structure at the bottom of the base, a clamping mechanism on the surface of the part fixing seat, and a cylindrical body with a stepped hole at the center of the bottom of the part fixing seat. A bearing assembly is embedded between the stepped shaft and the stepped hole, and the base and the part fixing seat are rotatably engaged through the bearing assembly. A tool module is mounted on the lathe and is positioned close to the part fixing seat. The lathe also has a rotary drive shaft capable of driving the part fixing seat to rotate.

[0007] Furthermore, the bottom of the base is provided with an adjustable mounting structure, which includes a strip slide rail installed at the bottom of the base, and a sliding connector is provided at the strip slide rail. A fixed connector is provided at one end of the strip slide rail. The lathe is fixed to the base through the fixed connector and the sliding connector.

[0008] Furthermore, the bearing assembly includes a lower bearing and an upper bearing, and the lower bearing and the upper bearing are respectively installed in the stepped shaft of the base and the stepped hole of the part fixing seat.

[0009] Furthermore, the part fixing base is a disc structure, and a ring of mounting holes is formed on the surface of the disc near the edge. The clamping mechanism is installed in the mounting holes by means of bolts.

[0010] Furthermore, the rotating drive shaft is connected to the cylindrical body of the part fixing seat via a transmission belt, and a ring of teeth is formed on the outer wall of the cylindrical body.

[0011] Furthermore, the tool module includes boring tools and milling cutters.

[0012] Compared with the prior art, the beneficial effects achieved by this utility model are as follows:

[0013] This invention designs a bushing grinding device for an ion implanter. By replacing manual operation with lathe drive, it significantly improves efficiency, achieves high precision and good stability. The bearing assembly and stepped shaft hole design eliminate machining errors. The device is highly adaptable, with an adjustable base and multiple tool configurations to meet the needs of parts of different sizes and machining surfaces. Overall, it greatly saves costs, reduces manpower input, and lowers the processing cycle and production costs. Attached Figure Description

[0014] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments and descriptions of this utility model are used to explain this utility model and do not constitute an undue limitation thereof. In the drawings:

[0015] Figure 1 A schematic diagram of the structure of an ion implanter bushing polishing device provided in an embodiment of this utility model;

[0016] Figure 2 This is a schematic diagram of the working state of an ion implanter bushing polishing device provided in an embodiment of the present invention.

[0017] In the diagram: 1. Base; 2. Lower bearing; 3. Upper bearing; 4. Part holder; 5. Tool module. Detailed Implementation

[0018] The present invention will now be described in detail with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described herein can be combined with each other.

[0019] The following detailed description is exemplary and intended to provide further detailed explanation of the present invention. Unless otherwise specified, all technical terms used in this invention have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this invention is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this invention.

[0020] Example:

[0021] This embodiment discloses a bushing polishing device for an ion implanter. Please refer to [link / reference]. Figure 1 The device includes the following core components:

[0022] Base 1: Fixedly installed on the lathe. A stepped shaft is provided at the center of the surface of the base 1 for cooperating with the bearing assembly. The bottom of the base 1 is provided with an adjustable mounting structure to adapt to lathes of different sizes. In this embodiment, the adjustable mounting structure includes a strip slide rail installed at the bottom of the base 1, and a sliding connector is provided at the strip slide rail. A fixed connector is provided at one end of the strip slide rail. The lathe is fixed to the base 1 by connecting the fixed connector and the sliding connector. Since the distance between the sliding connector and the fixed connector is adjustable, it can adapt to lathes of different sizes.

[0023] The bearing assembly includes a lower angular contact bearing 2 (bearing S7311 in this embodiment) and an upper bearing 3 (bearing S7310 in this embodiment), which are respectively installed in the stepped shaft and stepped hole of the base 1 and the part fixing seat 4 to achieve axial force support and circumferential stability.

[0024] Part holder 4: A disc structure with a clamping mechanism on its surface for clamping the bushing part to be processed. In this embodiment, a ring of mounting holes is formed near the edge of the disc surface of the part holder 4. The clamping mechanism is installed in the mounting holes by bolts. The clamping mechanism can be a limit clamp or the like. A cylindrical body with a stepped hole is provided at the bottom center of the part holder 4. The stepped hole is used to mate with the bearing assembly. The part holder 4 is connected to the base 1 through the bearing assembly. The dimensions of the stepped hole, the bearing assembly, and the stepped shaft are mutually compatible. Please refer to [link to relevant documentation]. Figure 2 After installation, the stepped shaft and bearing assembly of the base 1 are completely enclosed by the cylinder. The part fixing seat 4 can rotate relative to the base 1 around the axis. In addition, the rotation of the part fixing seat 4 is driven by a lathe. The connection between the lathe and the part fixing seat 4 can be that the cylinder and the rotation drive shaft of the lathe are connected by a transmission belt. When the rotation drive shaft is started, the cylinder and the part fixing seat 4 are rotated by the transmission belt. A toothed groove can be opened on the outer wall of the cylinder to increase the friction at the connection between the transmission belt and the cylinder.

[0025] Tool module 5: Mounted on the lathe, and positioned close to the part mounting base 4, tool module 5 is equipped with various tools such as boring tools and milling cutters, and is driven by the lathe to realize multi-dimensional bushing machining on the plane and side.

[0026] During installation, the sliding connector at the bottom of base 1 is first adjusted to match the dimensions of the lathe mounting surface. Then, base 1 is fastened to the lathe using the connector. Next, bearing S7311 is installed on the stepped shaft of base 1, and bearing S7310 is installed in the stepped hole of fixed seat 4, forming a double-support structure. Finally, the bushing part to be machined is placed into the clamping mechanism of part fixed seat 4, thus completing the pre-machining preparations. Figure 2 The process of rotating the bushing part held by the part holder and cutting the surface with a cutting tool is demonstrated. The lathe is started to drive the part holder 4 to rotate at a speed of 100-300 r / min. The cutting tool (such as a face milling cutter) is selected according to the machining surface, and the tool feed and cutting depth are adjusted. The machining angle is adjusted by rotating the fixed seat to complete continuous machining in multiple positions. The flatness is monitored in real time during the machining process, and the tolerance is ensured to be ≤0.02mm by fine-tuning the tool position.

[0027] As is known from common technical knowledge, this utility model can be implemented through other embodiments that do not depart from its spirit or essential characteristics. Therefore, the disclosed embodiments described above are merely illustrative in all respects and are not the only ones. All modifications within the scope of this utility model or its equivalents are included in this utility model.

[0028] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and not to limit it. Although the utility model has been described in detail with reference to the above embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the specific implementation of this utility model. Any modifications or equivalent substitutions that do not depart from the spirit and scope of this utility model should be covered within the protection scope of the claims of this utility model.

Claims

1. A bushing polishing device for an ion implanter, characterized in that, The system includes a base (1) mounted on a lathe, with a stepped shaft at the center of the surface of the base (1). A part fixing seat (4) is mounted on top of the base (1). An adjustable mounting structure is provided at the bottom of the base (1). A clamping mechanism is provided on the surface of the part fixing seat (4). A cylindrical body with a stepped hole is provided at the center of the bottom of the part fixing seat (4). A bearing assembly is embedded between the stepped shaft and the stepped hole. The base (1) and the part fixing seat (4) are rotatably engaged by the bearing assembly. A tool module (5) is mounted on the lathe and is located close to the part fixing seat (4). The lathe is also equipped with a rotary drive shaft that can drive the part fixing seat (4) to rotate.

2. The ion implanter bushing polishing device according to claim 1, characterized in that, The adjustable installation structure includes a strip slide rail installed at the bottom of the base (1), and a sliding connector is provided at the strip slide rail. A fixed connector is provided at one end of the strip slide rail. The lathe is fixed to the base (1) through the fixed connector and the sliding connector.

3. The ion implanter bushing polishing device according to claim 1, characterized in that, The bearing assembly includes a lower bearing (2) and an upper bearing (3), and the lower bearing (2) and the upper bearing (3) are respectively installed in the stepped shaft of the base (1) and the stepped hole of the part fixing seat (4).

4. The ion implanter bushing polishing device according to claim 1, characterized in that, The part fixing seat (4) is a disc structure, and a ring of mounting holes is opened on the surface of the disc near the edge. The clamping mechanism is installed in the mounting holes by bolt fixing.

5. The ion implanter bushing polishing device according to claim 1, characterized in that, The rotating drive shaft is connected to the cylindrical body of the part fixing seat (4) via a transmission belt, and a ring of teeth is opened on the outer wall of the cylindrical body.

6. The ion implanter bushing polishing device according to claim 1, characterized in that, The tool module (5) includes a boring bar and a milling cutter.

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