Nanoimprint device

Abstract

The utility model discloses a nanoimprint device which comprises a first vacuum cavity, and an extrusion assembly and a first station used for bearing a substrate and a template are arranged in the first vacuum cavity. When the substrate and the template are carried on the first station, the first vacuum cavity can be controlled to maintain a first preset vacuum degree, the extrusion assembly can be driven to be matched with the surface, away from the substrate, of the template and move in the set direction so as to extrude bubbles in the imprinting glue between the template and the substrate, and the set direction is parallel to the bearing surface of the first station. During operation, after a substrate and a template are placed at a first station, bubbles in imprinting glue are promoted to float upwards by controlling the first vacuum cavity to maintain a first preset vacuum degree, and meanwhile, the extrusion assembly is combined to apply pressure to the imprinting glue between the template and the substrate, so that the bubbles are effectively extruded; therefore, the integrity and the precision of template pattern transfer printing in the subsequent imprinting step can be ensured; and meanwhile, the vacuum degree can be adjusted to adapt to high-viscosity imprinting glue.

Description

Nanoimprint device Technical Field

[0001] This invention belongs to the field of nanoimprint technology, specifically relating to a nanoimprint device. Background Technology

[0002] Nanoimprint lithography transfers the micro- and nano-structures of a template onto an imprinting adhesive via mechanical replication, offering advantages such as high resolution and low cost. However, its core equipment, the nanoimprint lithography apparatus, requires precise alignment and pressure control. Nevertheless, when using high-viscosity imprinting adhesives, the adhesive's poor flowability during the imprinting process makes it difficult for gas to escape, easily leading to bubble defects between the substrate and the template, resulting in pattern distortion.

[0003] Therefore, it is necessary to provide a nanoimprinting device to address the aforementioned technical problems. Summary of the Invention

[0004] The purpose of this invention is to provide a nanoimprinting device that can solve the problem that the above-mentioned medium and high viscosity imprinting adhesive is prone to generating bubbles during imprinting and is difficult to remove.

[0005] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows:

[0006] A nanoimprint apparatus includes a first vacuum chamber, within which an extrusion assembly and a first station for supporting a substrate and a template are disposed;

[0007] When the first station carries a substrate and a template, the first vacuum chamber can be controlled to maintain a first preset vacuum level, and the extrusion assembly can be driven to cooperate with the surface of the template away from the substrate and move along a set direction to expel air bubbles in the imprint adhesive between the template and the substrate, wherein the set direction is parallel to the bearing surface of the first station.

[0008] In one or more embodiments of this utility model, an imprinting component is further provided in the first vacuum chamber. When the first station carries a substrate and a template, the first vacuum chamber can be controlled to maintain a second preset vacuum level, and the imprinting component can be controlled to press the imprinting adhesive between the substrate and the template; wherein, the first preset vacuum level is less than the second preset vacuum level.

[0009] In one or more embodiments of this utility model, the first vacuum cavity is formed inside the first housing, and the first housing is connected to a vacuum pumping component so that the inner cavity of the first housing switches between the first preset vacuum level and the second preset vacuum level. The extrusion component and the imprinting component are both disposed in the first housing.

[0010] In one or more embodiments of the present invention, the nanoimprint apparatus further includes a second vacuum chamber, wherein a second station for supporting a substrate and a template is provided in the second vacuum chamber, and the substrate and template on the first station can be controlled to be transferred to the second station;

[0011] An imprinting assembly is provided inside the second vacuum chamber. When the second station carries a substrate and a template, the second vacuum chamber can be controlled to maintain a second preset vacuum level, and the imprinting assembly can be controlled to press the imprinting adhesive between the substrate and the template; wherein, the first preset vacuum level is less than the second preset vacuum level.

[0012] In one or more embodiments of the present invention, the nanoimprint apparatus further includes a second housing and a third housing, wherein the first vacuum cavity is formed within the second housing and the second vacuum cavity is formed within the third housing;

[0013] The extrusion assembly and the first station are disposed in the second housing, and the imprinting assembly and the second station are disposed in the third housing.

[0014] In one or more embodiments of this utility model, a transfer mechanism is provided between the second housing and the third housing for transferring the substrate and template on the first workstation to the second workstation.

[0015] In one or more embodiments of the present invention, the extrusion assembly includes a drive member and a roller, the drive member drives the roller to move along the set direction, and the roller is cooperateably abutted against the template on the first station.

[0016] In one or more embodiments of this utility model, the axial extension length of the roller is greater than or equal to the axial extension length of the template on the roller.

[0017] In one or more embodiments of this utility model, the vacuum degree of the first preset vacuum degree is in the range of 150-133 Pa; and / or, the vacuum degree of the second preset vacuum degree is in the range of 133-20 Pa.

[0018] In one or more embodiments of this utility model, the nanoimprint apparatus further includes an imprint adhesive curing element configured to cooperate with the imprint assembly; and / or,

[0019] The nanoimprint apparatus further includes a heating element that cooperates with the imprint assembly, the heating element being located on the side of the substrate away from the template.

[0020] Compared with existing technologies, the nanoimprinting device of this invention improves the nanoimprinting effect through optimized structural design. During operation, after placing the substrate and template in the first station, the first vacuum chamber is controlled to maintain a first preset vacuum level, causing air bubbles in the imprinting adhesive to rise to the surface. At the same time, pressure is applied to the imprinting adhesive between the template and the substrate by the extrusion component, effectively squeezing out residual air bubbles. This ensures the integrity and accuracy of the template pattern transfer in subsequent imprinting steps. Furthermore, by adjusting the vacuum level, it can be adapted to high-viscosity imprinting adhesives. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 is a simplified structural diagram of the nanoimprint device in Embodiment 1 of this utility model;

[0023] Figure 2 is a simplified structural diagram of the nanoimprint device in Embodiment 2 of this utility model.

[0024] Explanation of key figure labels:

[0025] 1. First vacuum chamber; 2. Roller; 3. First housing; 4. Imprinted adhesive cured component; 5. Heating component; 6. Second vacuum chamber; 7. Second housing; 8. Third housing; 101. Substrate; 102. Template. Detailed Implementation

[0026] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0027] Nanoimprint lithography is a highly efficient micro-nano fabrication method. By coating an imprinting adhesive on the substrate surface and using a mold with nanopatterns for imprinting, the structure is precisely transferred onto the material. It has the advantages of high resolution, low cost, and suitability for large-scale production.

[0028] In existing technologies, when using high-viscosity imprinting adhesives, the adhesive has poor flowability during the imprinting process, making it difficult for gas to escape and easily forming bubble defects between the substrate and the template, resulting in pattern distortion. The nanoimprinting apparatus of this application can effectively solve the above problems. The nanoimprinting apparatus of this application will be described below with reference to specific embodiments.

[0029] Example 1

[0030] Referring to Figure 1, a nanoimprint apparatus in one embodiment of the present invention includes a first vacuum chamber 1, in which an extrusion assembly and a first station for supporting a substrate 101 and a template 102 are disposed; when the first station supports the substrate 101 and the template 102, the first vacuum chamber 1 can be controlled to maintain a first preset vacuum level, and the extrusion assembly can be driven to cooperate with the surface of the template 102 away from the substrate 101 and move along a set direction to extrude air bubbles in the imprint adhesive between the template 102 and the substrate 101, wherein the set direction is parallel to the bearing surface of the first station.

[0031] During operation, after placing the substrate 101 and template 102 at the first station, the first vacuum chamber 1 is controlled to maintain a first preset vacuum level, causing air bubbles in the imprinting adhesive to rise to the surface. Simultaneously, pressure is applied to the imprinting adhesive between the template 102 and the substrate 101 using the extrusion assembly, effectively squeezing out residual air bubbles. This ensures the integrity and accuracy of the pattern transfer on the template 102 in subsequent imprinting steps. In this embodiment, the nanoimprinting device can adapt to high-viscosity imprinting adhesives by adjusting the vacuum level, ensuring the imprinting effect.

[0032] Referring to Figure 1, in this embodiment, the extrusion assembly includes a drive unit (not shown) and a roller 2. The drive unit drives the roller 2 to move along a set direction, and the roller 2 can cooperate to abut against the template 102 at the first station. In this embodiment, the set direction is parallel to the bearing surface of the first station and also perpendicular to the axis of the roller 2, in order to expel air bubbles in the imprinting adhesive between the substrate 101 and the template 102, ensuring the integrity and accuracy of the pattern transfer of the template 102 during subsequent imprinting processes.

[0033] In one optional embodiment, to ensure the extrusion effect of the roller 2 on the air bubbles in the printing adhesive, the axial extension length of the roller 2 is greater than or equal to the axial extension length of the template 102 on the roller 2.

[0034] Referring to Figure 1, an imprinting assembly (not shown) is also provided inside the first vacuum chamber 1. When the substrate 101 and the template 102 are supported on the first station, the first vacuum chamber 1 can be controlled to maintain a second preset vacuum level, and the imprinting assembly can be controlled to press the imprinting adhesive between the substrate 101 and the template 102. The first preset vacuum level is less than the second preset vacuum level. The vacuum level range of the first preset vacuum level is 150-133 Pa, and the vacuum level range of the second preset vacuum level is 133-20 Pa.

[0035] In this embodiment, the first preset vacuum level ensures the debubbling effect of the imprinting adhesive between the substrate 101 and the template 102, while the second preset vacuum level ensures the pressing and transfer effect of the pattern on the template 102. It should be noted that bubbles can rise to the surface of the imprinting adhesive at both the first and second preset vacuum levels. However, in this embodiment, the second preset vacuum level is relatively high, causing the bubbles to expand more significantly. When these bubbles burst and gas escapes, it may push some imprinting adhesive outside the substrate 101 and template 102, affecting the subsequent transfer effect. Conversely, the first preset vacuum level is relatively low, resulting in smaller bubbles and a lower likelihood of adhesive overflow. Therefore, in this embodiment, by reasonably controlling the first and second preset vacuum levels, both the debubbling and pressing / transfer effects can be ensured.

[0036] Referring to Figure 1, a first vacuum chamber 1 is formed within a first housing 3. A vacuum-evacuating component is connected to the first housing 3 to allow the cavity within the first housing 3 to switch between a first preset vacuum level and a second preset vacuum level. Both the extrusion assembly and the imprinting assembly are fitted into the first housing 3. Therefore, the vacuum level within the first housing 3 can be changed by the vacuum-evacuating component, allowing the degassing process of the imprinting adhesive to be completed first within the first housing 3, followed by the imprinting process. The imprinting assembly is a conventional technique in this field and will not be described in detail here.

[0037] Example 2

[0038] Referring to FIG2, the nanoimprint apparatus in one embodiment of the present invention includes a first vacuum chamber 1 and a second vacuum chamber 6.

[0039] The first vacuum chamber 1 is equipped with an extrusion assembly and a first station for supporting the substrate 101 and the template 102. When the first station supports the substrate 101 and the template 102, the first vacuum chamber 1 can be controlled to maintain a first preset vacuum level. The extrusion assembly can be driven to engage with the surface of the template 102 away from the substrate 101 and move along a set direction to extrude air bubbles in the imprinting adhesive between the template 102 and the substrate 101. The set direction is parallel to the bearing surface of the first station. The structure of the extrusion assembly in this embodiment is the same as that in Embodiment 1, and will not be described in detail here.

[0040] The second vacuum chamber 6 is provided with a second station for supporting the substrate 101 and the template 102. The substrate 101 and the template 102 on the first station can be controllably transferred to the second station. The second vacuum chamber 6 is provided with an imprinting assembly. When the substrate 101 and the template 102 are supported on the second station, the second vacuum chamber 6 can be controllably maintained at a second preset vacuum level, and the imprinting assembly can controllably press the imprinting adhesive between the substrate 101 and the template 102. The first preset vacuum level is less than the second preset vacuum level. The vacuum level range of the first preset vacuum level is 150-133 Pa, and the vacuum level range of the second preset vacuum level is 133-20 Pa.

[0041] In this embodiment, the reasons for setting the first preset vacuum degree and the second preset vacuum degree are the same as in Embodiment 1, and will not be repeated here.

[0042] During operation, after placing the substrate 101 and template 102 at the first station, the first vacuum chamber 1 is controlled to maintain a first preset vacuum level, causing air bubbles in the imprinting adhesive to rise to the surface. Simultaneously, pressure is applied to the imprinting adhesive between the template 102 and the substrate 101 using an extrusion assembly, effectively squeezing out residual air bubbles, thus achieving a pre-treatment to remove air bubbles from the imprinting adhesive. After the pre-treatment, the substrate 101, template 102, and the imprinting adhesive therein are transferred to the second station, where the imprinting adhesive is pressed under a second preset vacuum level using an imprinting assembly to ensure the integrity and accuracy of the pattern transfer on the template 102.

[0043] Referring to Figure 2, the nanoimprint apparatus further includes a second housing 7 and a third housing 8. A first vacuum chamber 1 is formed within the second housing 7, and a second vacuum chamber 6 is formed within the third housing 8. An extrusion assembly and a first station are configured in the second housing 7, and an imprint assembly and a second station are configured in the third housing 8. Since the vacuum levels in the first vacuum chamber 1 and the second vacuum chamber 6 are different, the compressive strength requirements of their internal structures differ under different vacuum environments. In this embodiment, because the first preset vacuum level is lower than the second preset vacuum level, the compressive strength design of the extrusion assembly in the first vacuum chamber 1 can be lower than that of the pressing assembly in the second vacuum chamber 6, thereby saving material costs.

[0044] Referring to Figure 2, a transfer mechanism (not shown in the figure) is provided between the second housing 7 and the third housing 8 to transfer the substrate 101 and template 102 from the first station to the second station. The transfer mechanism can be a robotic arm, which grasps and transfers the substrate 101 and template 102.

[0045] In one optional embodiment, the nanoimprint apparatus further includes an imprint adhesive curing component 4 that cooperates with the imprint assembly. In both Embodiments 1 and 2, the imprint adhesive fixing component can be a UV curing lamp, which cures the imprint adhesive using UV light.

[0046] In one optional embodiment, the nanoimprint apparatus further includes a heating element 5 configured to cooperate with the imprint assembly, the heating element 5 being located on the side of the substrate 101 away from the template 102. During the imprinting process, the heating element 5 can heat the imprint adhesive between the substrate 101 and the template 102 to ensure its good fluidity, thereby ensuring the transfer effect of the pattern on the template 102.

[0047] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0048] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A nanoimprinting device, characterized in that, The system includes a first vacuum chamber (1), in which an extrusion assembly and a first station for supporting a substrate (101) and a template (102) are provided. When the first station supports the substrate (101) and the template (102), the first vacuum chamber (1) can be controlled to maintain a first preset vacuum level. The extrusion assembly can be driven to engage with the surface of the template (102) away from the substrate (101) and move along a set direction to expel air bubbles in the imprint adhesive between the template (102) and the substrate (101). The set direction is parallel to the bearing surface of the first station.

2. The nanoimprint apparatus according to claim 1, characterized in that, The first vacuum chamber (1) is also provided with an imprinting component. When the first station carries a substrate (101) and a template (102), the first vacuum chamber (1) can be controlled to maintain a second preset vacuum level. The imprinting component can be controlled to press the imprinting adhesive between the substrate (101) and the template (102). The first preset vacuum level is less than the second preset vacuum level.

3. The nanoimprint apparatus according to claim 2, characterized in that, The first vacuum chamber (1) is formed inside the first housing (3), and the first housing (3) is connected to a vacuum pumping component so that the cavity inside the first housing (3) switches between the first preset vacuum level and the second preset vacuum level. The extrusion component and the imprinting component are both disposed in the first housing (3).

4. The nanoimprint apparatus according to claim 1, characterized in that, The nanoimprint apparatus further includes a second vacuum chamber (6), which is provided with a second station for supporting a substrate (101) and a template (102). The substrate (101) and the template (102) on the first station can be controlled to be transferred to the second station. An imprinting component is provided in the second vacuum chamber (6). When the substrate (101) and the template (102) are supported on the second station, the second vacuum chamber (6) can be controlled to maintain a second preset vacuum level. The imprinting component can be controlled to press the imprinting adhesive between the substrate (101) and the template (102). The first preset vacuum level is less than the second preset vacuum level.

5. The nanoimprint apparatus according to claim 4, characterized in that, The nanoimprint apparatus further includes a second housing (7) and a third housing (8), wherein the first vacuum chamber (1) is formed in the second housing (7) and the second vacuum chamber (6) is formed in the third housing (8); the extrusion assembly and the first station are disposed in the second housing (7) and the imprint assembly and the second station are disposed in the third housing (8).

6. The nanoimprint apparatus according to claim 5, characterized in that, A transfer mechanism is provided between the second housing (7) and the third housing (8) for transferring the substrate (101) and template (102) on the first work station to the second work station.

7. The nanoimprint apparatus according to any one of claims 1-6, characterized in that, The extrusion assembly includes a drive unit and a roller (2). The drive unit drives the roller (2) to move along the set direction. The roller (2) is compatible with the template (102) on the first station.

8. The nanoimprint apparatus according to claim 7, characterized in that, The length of the roller (2) in its axial direction is greater than or equal to the length of the template (102) in the axial direction of the roller (2).

9. The nanoimprint apparatus according to any one of claims 2-6, characterized in that, The first preset vacuum degree has a vacuum degree range of 150-133 Pa; and / or, the second preset vacuum degree has a vacuum degree range of 133-20 Pa.

10. The nanoimprint apparatus according to any one of claims 2-6, characterized in that, The nanoimprint apparatus further includes an imprint adhesive curing element (4) configured to cooperate with the imprint assembly; and / or, the nanoimprint apparatus further includes a heating element (5) configured to cooperate with the imprint assembly, the heating element (5) being located on the side of the substrate (101) away from the template (102).

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