Coating equipment

Abstract

The utility model provides coating equipment, relates to the field of processing of semiconductors or photovoltaic materials, and solves the technical problem of non-uniform coating caused by non-uniform distribution of process gas due to a spraying structure of traditional coating equipment. The coating equipment comprises a vacuum cavity; a driving assembly; the spraying block is arranged at the top of the vacuum cavity and is in transmission connection with the second end of the driving assembly, and the spraying block is provided with a first air inlet end and a second air inlet end which are opposite to each other; the two or more air inlet pipes respectively penetrate through the two or more second through holes and are respectively communicated to the first air inlet end and the second air inlet end; the two or more corrugated pipe assemblies are arranged on the two or more air inlet pipes in a sleeving mode respectively. The spraying block is driven by the driving assembly to move in the second horizontal direction, and the gas outlet position of the process gas in the vacuum chamber can be dynamically adjusted, so that the concentration of the process gas at different positions in the vacuum chamber can be flexibly adjusted, and the coating uniformity of sheet materials at different positions is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, specifically to a coating equipment. Background Technology

[0002] Introducing specialty gases for reactions is a common process in many manufacturing industries. These "specialty gases" are introduced into a reaction chamber under specific conditions and along a designated inlet route to participate in the reaction and meet processing requirements. Different production processes have different requirements for parameters such as the inlet route of the specialty gases. Taking solar panel manufacturing as an example, the uniformity of the specialty gas distribution on the silicon wafer surface during the coating process is a crucial process parameter.

[0003] Typically, the special gas is transmitted to the spray pipe or spray plate through the inlet pipe, then enters the vacuum chamber from the outlet of the spray pipe or spray plate, and is finally extracted to the outside of the vacuum chamber by the vacuum pump. This special gas path has two problems: First, because the silicon wafer carrier is a single unit, most of the special gas flows from the outside of the carrier along the back side to the vacuum pump, and the proportion of special gas flowing along the surface of the silicon wafer is quite small. This results in a thicker coating thickness on the silicon wafers near the spray pipe or spray plate and a thinner coating thickness on the silicon wafers far from the spray pipe or spray plate, with large differences in uniformity. Second, because the inlet pipe supplies the special gas to the spray pipe or spray plate from one end, the flow rate of special gas sprayed from the end of the spray pipe or spray plate near the inlet pipe is large, and the flow rate of special gas sprayed from the end far from the inlet pipe is small. This also results in a thicker coating thickness on the silicon wafers near the inlet pipe and a thinner coating thickness on the silicon wafers far from the inlet pipe. The two issues mentioned above result in uneven deposition of the coating on the silicon wafer surface, leading to unstable coating quality and affecting product performance and appearance. Furthermore, due to the poor coating uniformity, it is necessary to increase the coating time to thicken thinner areas, which consumes more energy and gas, increasing costs. Moreover, the longer the coating time, the more difficult and expensive it may be to maintain and repair the spray pipes or spray plates. Utility Model Content

[0004] To address the aforementioned technical problems, this application is proposed. An embodiment of this application provides a coating apparatus.

[0005] In a first aspect, one embodiment of this application provides a coating apparatus, comprising: a vacuum chamber having a vacuum cavity, a first through hole communicating with the vacuum cavity, and two or more second through holes communicating with the vacuum cavity, the vacuum cavity being configured to accommodate a sheet material; a driving assembly having a first end disposed outside the vacuum cavity and a second end extending into the vacuum cavity through the first through hole; and a spray block extending along a first horizontal direction, disposed at the top of the vacuum cavity, and drively connected to the second end of the driving assembly, configured to move along a second horizontal direction under the drive of the driving assembly, the first horizontal direction intersecting the second horizontal direction, the spray block having an inlet... The spray block has multiple air outlets at its bottom that communicate with the air inlet chamber. The spray block has a first air inlet end and a second air inlet end opposite each other in the first horizontal direction. There are two or more air inlet pipes, the first ends of which pass through two or more second through holes and are respectively connected to the first air inlet end and the second air inlet end, and are configured to introduce process gas into the air inlet chamber. There are two or more bellows assemblies, which are respectively sleeved on the two or more air inlet pipes. The first end of each bellows assembly is sealed to the vacuum chamber, and the second end of each bellows assembly is sealed to the sleeved air inlet pipe, and are configured to seal the gap between the vacuum chamber and the air inlet pipe.

[0006] In some embodiments, the spacing between adjacent air outlets decreases along the direction from the first air inlet to the center of the spray block; the spacing between adjacent air outlets also decreases along the direction from the second air inlet to the center of the spray block.

[0007] In some embodiments, the drive assembly includes: a first drive source disposed outside the vacuum chamber; a lead screw, which is driven by the first drive source and configured to rotate under the drive of the first drive source, one end of the lead screw passing through a first through hole and extending into the vacuum chamber, the axial direction of the lead screw being the same as the second horizontal direction; and a nut screwed to the lead screw and connected to the spray block, the lead screw being able to drive the nut to rotate and drive the spray block to move along the second horizontal direction.

[0008] In some embodiments, the drive assembly further includes: a sealing assembly, which is sleeved on the connection area of ​​the lead screw located outside the vacuum cavity, and one end of the sealing assembly is sealed to the vacuum cavity, and the sealing assembly is configured to seal the gap between the lead screw and the vacuum cavity; or, the drive assembly further includes: a first transmission assembly, which is sealed to the vacuum cavity, and a first end of the first transmission assembly is driveably connected to the first drive source, and a second end of the first transmission assembly is driveably connected to the lead screw, and is configured to transmit the rotational force of the first drive source to the lead screw.

[0009] In some embodiments, the drive assembly includes: a second drive source disposed outside the vacuum chamber; a second transmission assembly hermetically connected to the vacuum chamber, a first end of the second transmission assembly being drive-connected to the second drive source, and a second end of the second transmission assembly extending into the vacuum chamber through a first through hole; a first gear disposed inside the vacuum chamber, the first gear being drive-connected to the second end of the second transmission assembly and configured to rotate under the drive of the second transmission assembly; a first rack disposed inside the vacuum chamber and meshing with the first gear, configured to move along a second horizontal direction under the drive of the first gear, and a spray block connected to the first rack.

[0010] In some embodiments, the drive assembly includes: a third drive source disposed outside the vacuum chamber; a third transmission assembly hermetically connected to the vacuum chamber, a first end of the third transmission assembly being drive-connected to the third drive source, and a second end of the third transmission assembly extending into the vacuum chamber through a first through hole; a drive wheel disposed inside the vacuum chamber and drive-connected to the second end of the third transmission assembly, configured to rotate under the drive of the third transmission assembly; a driven wheel disposed inside the vacuum chamber and rotatably connected to the vacuum chamber; a conveyor belt disposed inside the vacuum chamber and sleeved on the drive wheel and the driven wheel; a spray block connected to the conveyor belt, the conveyor belt being configured to move under the drive of the drive wheel to drive the spray block to move along a second horizontal direction.

[0011] In some embodiments, there are two spray blocks and two drive components. Each spray block is drivenly connected to the second end of a drive component. The vacuum chamber has a vertical symmetry plane extending along a first horizontal direction, and the two drive components are symmetrically arranged with respect to the vertical symmetry plane.

[0012] In some embodiments, there are two spray blocks; wherein the driving assembly includes: a fourth driving source disposed outside the vacuum chamber; a fourth transmission assembly hermetically connected to the vacuum chamber, the first end of the fourth transmission assembly being drive-connected to the fourth driving source, and the second end of the fourth transmission assembly extending into the vacuum chamber through a first through hole; a second gear disposed inside the vacuum chamber and drive-connected to the second end of the fourth transmission assembly, configured to rotate under the drive of the fourth transmission assembly; and two second racks disposed inside the vacuum chamber and meshing with the second gear, configured to move along a second horizontal direction under the drive of the second gear, with the two spray blocks respectively connected to the two second racks. Alternatively, the drive assembly includes: a fifth drive source disposed outside the vacuum chamber; a fifth transmission assembly hermetically connected to the vacuum chamber, the first end of the fifth transmission assembly being drive-connected to the fifth drive source, and the second end of the fifth transmission assembly extending into the vacuum chamber through a first through hole; a turntable disposed inside the vacuum chamber and drive-connected to the second end of the fifth transmission assembly, configured to rotate under the drive of the fifth transmission assembly; and two connecting rods disposed inside the vacuum chamber, the first end of each connecting rod being connected to the turntable, and the second end of each connecting rod being connected to a spray block, the two connecting rods being configured to move under the drive of the turntable to drive the two spray blocks to move along a second horizontal direction.

[0013] In some embodiments, the coating apparatus further includes: one or more slide rails disposed on the inner wall of the vacuum chamber; and one or more sliders, each slider being slidably connected to a slide rail and connected to a spray block.

[0014] In some embodiments, the coating apparatus further includes two or more hoses, one end of each hose being connected to the second end of an air inlet pipe, the hoses being configured to supply process gas to the air inlet pipe.

[0015] The coating equipment proposed in this application, by driving the spray block along a second horizontal direction via a drive assembly, can dynamically adjust the outlet position of the process gas within the vacuum chamber. This allows for flexible adjustment of the process gas concentration at different locations within the vacuum chamber, improving the coating uniformity of the sheet material at different locations. For example, the drive assembly can move the spray block to the vicinity of an area with poor coating uniformity on the sheet material and keep the spray block at that position for a longer period, or move it slowly at that position to improve the coating effect in that area. Therefore, this structure can significantly improve the quality and uniformity of the sheet material coating. Furthermore, since the inlet pipe extends into the vacuum chamber through the second through-hole, a gap exists between the vacuum chamber and the inlet pipe at the second through-hole, which can easily cause gas leakage. By providing a bellows assembly, whose two ends can be sealed to the inlet pipe and the vacuum chamber respectively, the airtightness of the coating equipment is improved, ensuring that the vacuum chamber cannot communicate with the outside through this gap without affecting the movement of the inlet pipe. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a structural schematic of a coating apparatus provided in an exemplary embodiment of this application.

[0018] Figure 2 The diagram shown is a schematic diagram of the structure of a spray block provided in an exemplary embodiment of this application.

[0019] Figure 3 The diagram shown is a schematic representation of a driving component provided in an exemplary embodiment of this application.

[0020] Figure 4 The diagram shown is a structural schematic of another driving component provided in an exemplary embodiment of this application.

[0021] Figure 5 The diagram shown is a structural schematic of another coating apparatus provided in an exemplary embodiment of this application.

[0022] Figure 6 The diagram shown is a structural schematic of another driving component provided in an exemplary embodiment of this application.

[0023] Figure 7 The diagram shown is a structural schematic of another driving component provided in an exemplary embodiment of this application.

[0024] Figure 8 The diagram shown is a structural schematic of another coating apparatus provided in an exemplary embodiment of this application.

[0025] Figure label:

[0026] 100. Coating equipment; 101. Vacuum chamber; 1011. Vertical symmetry plane; 102. Drive assembly; 1021. First drive source; 1022. Lead screw; 1023. Nut; 1024. Fourth transmission assembly; 1025. Second gear; 1026. Second rack; 1027. Fifth transmission assembly; 1028. Turntable; 1029. Connecting rod; 10210. Sealing assembly; 10211. Second transmission assembly; 10212. First gear; 10213. First rack; 10214. Third transmission assembly; 10215. Drive wheel; 10216. Driven wheel; 10217. Conveyor belt; 10218. Fixing component; 103. Spray block; 1031. First air inlet; 1032. Second air inlet; 1033. Center of spray block; 1034. Air outlet; 104. Air inlet pipe; 105. Bellows assembly; 106. Slide rail; 107. Slider; 108. Hose; 109. Storage tank; 110. Pressure gauge; 111. Flow meter; 112. Pneumatic valve; 113. Manual valve; 114. Pressure regulating valve. Detailed Implementation

[0027] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0028] Application Overview

[0029] Studies have shown that improving the diffusivity of gases in the special gas path can solve the problem of uneven distribution of process gases on the product surface, but how to make the gas diffuse better is a problem that needs to be solved.

[0030] In related technologies, the above problems are usually solved in the following ways.

[0031] First, by setting different gas zones on the spray plate and setting different gas inlets for different gas zones, the goal of achieving independent and uniform reaction of multiple gases can be achieved.

[0032] Second, different gas paths are isolated by using three-dimensional partitioning, planar partitioning, or a combination of both, to ensure the uniform distribution of various gases, allowing the gases to diffuse more evenly and quickly into the chamber and undergo deposition reactions on the substrate.

[0033] Third, three types of air inlet pipes (usually including a main air inlet pipe, a central air inlet pipe, and a compensation air inlet pipe) are set up to form a gas dispersion channel. These three types of air inlet pipes have different sizes and different spacing and size of air outlets, which can control the gas flow rate and velocity, forming a more stable gas model in the reaction chamber to improve the coating quality.

[0034] These methods slightly improve the uniformity and diffusion of the gas, meeting previous process requirements. However, these methods are either structurally complex and inconvenient to install and maintain, or they do not consider the gas's flow direction and diffusion performance. With the promotion of new photovoltaic processes and the demand for large-scale production, these methods are no longer sufficient to ensure the uniformity of the specialty gas meets current process requirements.

[0035] In view of this, this application proposes a coating device that uses a drive assembly to move a spray block along a second horizontal direction, dynamically adjusting the outlet position of the process gas within the vacuum chamber. This allows for flexible adjustment of the process gas concentration at different locations within the vacuum chamber, improving the coating uniformity of the sheet material at different locations. For example, the drive assembly can move the spray block to the vicinity of an area with poor coating uniformity on the sheet material and keep the spray block at that position for a longer period, or move it slowly at that position to improve the coating effect in that area. Therefore, this structure can significantly improve the quality and uniformity of the sheet material coating. Furthermore, since the inlet pipe extends into the vacuum chamber through a second through-hole, there is a gap between the vacuum chamber and the inlet pipe at the second through-hole, which can easily cause gas leakage. By incorporating a bellows assembly, whose two ends can be sealed to the inlet pipe and the vacuum chamber respectively, the airtightness of the coating device is improved, ensuring that the vacuum chamber cannot communicate with the outside through this gap without affecting the movement of the inlet pipe.

[0036] Exemplary device

[0037] Figure 1 The diagram shown is a structural schematic of a coating apparatus provided in an exemplary embodiment of this application. Figure 2 The diagram shown is a schematic diagram of the structure of a spray block provided in an exemplary embodiment of this application.

[0038] like Figure 1 and Figure 2As shown in the illustration, this application provides a coating apparatus 100, which includes: a vacuum chamber 101, a drive assembly 102, a spray block 103, two or more air inlet pipes 104, and two or more bellows assemblies 105. The vacuum chamber 101 has a vacuum chamber, a first through-hole communicating with the vacuum chamber, and two or more second through-holes communicating with the vacuum chamber. The vacuum chamber is configured to accommodate sheet-like material. A first end of the drive assembly 102 is disposed outside the vacuum chamber, and a second end of the drive assembly 102 extends into the vacuum chamber through the first through-hole. The spray block 103 extends along a first horizontal direction (X direction in the figure), is disposed at the top of the vacuum chamber, and is drivenly connected to the second end of the drive assembly 102. It is configured to move along a second horizontal direction (Y direction in the figure) under the drive of the drive assembly 102. The first horizontal direction intersects the second horizontal direction. The spray block 103 has an air inlet chamber, and the bottom of the spray block 103 has a plurality of air outlets 1034 communicating with the air inlet chamber. The spray block 103 has a first air inlet end 1031 and a second air inlet end 1032 opposite to each other in the first horizontal direction. The first pipe ends of two or more air inlet pipes 104 pass through two or more second through holes (i.e., each air inlet pipe 104 passes through a corresponding second through hole) and are respectively connected to the first air inlet end 1031 and the second air inlet end 1032, and are configured to introduce process gas into the air inlet chamber. Two or more bellows assemblies 105 are respectively fitted onto two or more air inlet pipes 104 (i.e., each bellows assembly 105 is fitted onto a corresponding air inlet pipe 104). The first end of each bellows assembly 105 is sealed to the vacuum chamber 101, and the second end of each bellows assembly 105 is sealed to the fitted air inlet pipe 104, and is configured to seal the gap between the vacuum chamber 101 and the air inlet pipe 104.

[0039] For example, the coating equipment 100 in this application embodiment can be applied to the field of solar cell manufacturing technology, such as plate coating equipment (vertical or horizontal) for various substrates, such as plasma enhanced chemical vapor deposition (PECVD) equipment, hot filament catalytic chemical vapor deposition (CATCVD) equipment, metal-organic chemical vapor deposition (MOCVD) equipment, physical vapor deposition (PVD) equipment, and atomic layer deposition (ALD) equipment.

[0040] For example, the sheet material can be a glass substrate, a silicon wafer, a crystal wafer, etc.

[0041] For example, the angle between the first horizontal direction and the second horizontal direction is 90 degrees.

[0042] For example, the spray block 103 is a strip structure extending along a first horizontal direction, such as a cuboid structure or a cylindrical structure. If the spray block 103 has this structure, it is smaller in size, lighter in weight, and easier to install compared to the large plate-shaped structure in the related art that occupies almost the top space of the vacuum chamber.

[0043] For example, the portion between the first air inlet end 1031 and the second air inlet end 1032 of the spray block 103 further has at least one air inlet, each air inlet communicating with an air inlet pipe 104. The more air inlets provided on the spray block 103, the more uniform the gas sprayed from the spray block 103 will be. For instance, if the spray block 103 is relatively long in the first horizontal direction, an air inlet can be provided at the center 1033 of the spray block 103, communicating with the air inlet pipe 103, thereby increasing the gas flow rate from the air outlet 1034 at the center 1033 of the spray block 103.

[0044] For example, the bellows assembly 105 includes a body, a first flange, and a second flange. The body has a cavity extending through it along a second horizontal direction. The body has a first end and a second end along the second horizontal direction. The first end of the body is connected to the first flange, and the second end of the body is connected to the second flange. The first flange is hermetically connected to the vacuum chamber 101, and the second flange is hermetically connected to the air inlet pipe 104.

[0045] For example, the coating apparatus 100 further includes a carrier plate. The carrier plate is disposed within a vacuum chamber and is capable of supporting sheet material.

[0046] For example, the coating apparatus 100 also includes a vacuum pump. The vacuum pump is in communication with a vacuum chamber and is configured to extract gas from the vacuum chamber.

[0047] In the above embodiments, by driving the spray block 103 along the second horizontal direction via the drive component 102, the outlet position of the process gas in the vacuum chamber can be dynamically adjusted. This allows for flexible adjustment of the concentration of the process gas at different locations within the vacuum chamber, improving the coating uniformity of the sheet material at different locations. For example, the drive component 102 can drive the spray block 103 to a region with poor coating uniformity on the sheet material and keep it at that position for a longer period, or move it slowly at that position, to improve the coating effect in that region. In practical applications, the film thickness at various points on the surface of the coated sheet material can be measured multiple times, and the control parameters of the drive component 102 can be adjusted accordingly. During the next coating operation, the drive component 102 can be controlled based on the adjusted control parameters, thereby precisely controlling the movement of the spray block 103 and improving coating uniformity. In addition, since the air inlet pipe 104 extends into the vacuum chamber through the second through hole, there is a gap between the vacuum chamber and the air inlet pipe 104 at the second through hole, which can easily cause gas leakage. By setting the bellows assembly 105, since both ends of the bellows assembly 105 can be sealed to the air inlet pipe 104 and the vacuum chamber respectively, it can ensure that the vacuum chamber cannot communicate with the outside through the gap without affecting the movement of the air inlet pipe 104, thereby improving the airtightness of the coating equipment 100.

[0048] In some embodiments, such as Figure 2 As shown, along the direction from the first air inlet 1031 to the center 1033 of the spray block 103, the distance between adjacent air outlets 1034 decreases; along the direction from the second air inlet 1032 to the center 1033 of the spray block 103, the distance between adjacent air outlets 1034 also decreases.

[0049] Since the process gas enters the air inlet chamber of the spray block 103 from the first air inlet 1031 and the second air inlet 1032, the flow rate of the process gas ejected from the air outlets 1034 at both ends of the spray block 103 is relatively large, while the flow rate of the process gas ejected from the air outlet 1034 at the center 1033 is relatively small, resulting in uneven coating of the sheet material. In the above embodiment, by gradually increasing the density of the air outlets 1034 from both ends of the spray block 103 to the center 1033, the flow rate of the process gas ejected from the air outlets 1034 at both ends of the spray block 103 is reduced, while the flow rate of the process gas ejected from the air outlet 1034 at the center 1033 is increased, thereby making the flow rate of the process gas ejected from the spray block 103 more uniform.

[0050] In some embodiments, such as Figure 1As shown, the drive assembly 102 includes a first drive source 1021, a lead screw 1022, and a nut 1023. The first drive source 1021 is located outside the vacuum chamber. The lead screw 1022 is driveably connected to the first drive source 1021 and is configured to rotate under the drive of the first drive source 1021. One end of the lead screw 1022 passes through a first through hole and extends into the vacuum chamber. The axial direction of the lead screw 1022 is the same as the second horizontal direction. The nut 1023 is screwed to the lead screw 1022 and connected to the spray block 103. The lead screw 1022 can drive the nut 1023 to rotate, thereby causing the spray block 103 to move along the second horizontal direction.

[0051] For example, the first driving source 1021 may include components such as a speed reducer and a servo motor.

[0052] For example, the nut 1023 is connected to the center 1033 of the spray block 103, thereby enabling the spray block 103 to remain balanced and avoid skewing.

[0053] For example, the lead screw 1022 can be a ball screw, and the nut 1023 can be a ball screw nut.

[0054] In the above embodiment, the first driving source 1021 can drive the lead screw 1022 to rotate. The rotation of the lead screw 1022 can drive the nut 1023 to move along the second horizontal direction, thereby driving the spray block 103 to move along the second horizontal direction. The structure is simple and easy to manufacture.

[0055] In some embodiments, such as Figure 1 As shown, the drive assembly 102 further includes: a sealing assembly 10210, which is sleeved on the connection area of ​​the lead screw 1022 located outside the vacuum chamber 101, and one end of the sealing assembly 10210 is sealed to the vacuum chamber 101. The sealing assembly 10210 is configured to seal the gap between the lead screw 1022 and the vacuum chamber 101; or, the drive assembly 102 further includes: a first transmission assembly, which is sealed to the vacuum chamber 101, and the first end of the first transmission assembly is drive-connected to the first drive source 1021, and the second end of the first transmission assembly is drive-connected to the lead screw 1022, configured to transmit the rotational force of the first drive source 1021 to the lead screw 1022.

[0056] For example, the sealing assembly 10210 includes a magnetohydrodynamic seal that does not have a drive shaft.

[0057] For example, the first transmission assembly includes a magnetohydrodynamic seal having a transmission shaft, and a lead screw 1022 is transmissionally connected to the transmission shaft.

[0058] In the above embodiments, by providing the sealing component 10210, the lead screw 1022 and the vacuum chamber 101 can be sealed, thereby improving the airtightness of the coating equipment 100; by providing the first transmission component, the power of the first drive source 1021 can be transmitted to the lead screw 1022 while sealing the lead screw 1022 and the vacuum chamber 101.

[0059] Figure 3 The diagram shown is a schematic representation of a driving component provided in an exemplary embodiment of this application.

[0060] In some embodiments, such as Figure 3 As shown, the drive assembly 102 includes: a second drive source (not shown), a second transmission assembly 10211, a first gear 10212, and a first rack 10213. The second drive source is located outside the vacuum chamber. The second transmission assembly 10211 is hermetically connected to the vacuum chamber 101. The first end of the second transmission assembly 10211 is driveably connected to the second drive source, and the second end of the second transmission assembly 10211 extends into the vacuum chamber through a first through hole. The first gear 10212 is located inside the vacuum chamber and is drively connected to the second end of the second transmission assembly 10211, and is configured to rotate under the drive of the second transmission assembly 10211. The first rack 10213 is located inside the vacuum chamber and meshes with the first gear 10212, and is configured to move along a second horizontal direction under the drive of the first gear 10212. The spray block 103 is connected to the first rack 10213.

[0061] For example, the second driving source may include a servo motor, a speed reducer, etc.

[0062] For example, the second transmission assembly 10211 includes a magnetohydrodynamic seal having a transmission shaft, and a first gear 10212 is connected to the transmission shaft for transmission.

[0063] In the above embodiment, with this structure, the second drive source can drive the first gear 10212 to rotate through the second transmission component 10211. The rotation of the first gear 10212 drives the first rack 10213 to move along the second horizontal direction, thereby driving the spray block 103 to move along the second horizontal direction. The structure is simple and easy to manufacture. Furthermore, by setting the second transmission component 10211, the airtightness of the coating equipment 100 can also be guaranteed.

[0064] Figure 4 The diagram shown is a structural schematic of another driving component provided in an exemplary embodiment of this application.

[0065] In some embodiments, such as Figure 4As shown, the drive assembly 102 includes: a third drive source (not shown), a third transmission assembly 10214, a drive wheel 10215, a driven wheel 10216, and a conveyor belt 10217. The third drive source is located outside the vacuum chamber. The third transmission assembly 10214 is hermetically connected to the vacuum chamber 101. The first end of the third transmission assembly 10214 is driveably connected to the third drive source, and the second end of the third transmission assembly 10214 extends into the vacuum chamber through a first through hole. The drive wheel 10215 is located inside the vacuum chamber and is drively connected to the second end of the third transmission assembly 10214, and is configured to rotate under the drive of the third transmission assembly 10214. The driven wheel 10216 is located inside the vacuum chamber and is rotatably connected to the vacuum chamber 101. The conveyor belt 10217 is disposed in the vacuum chamber and is fitted onto the drive wheel 10215 and the driven wheel 10216. The spray block 103 is connected to the conveyor belt 10217. The conveyor belt 10217 is configured to move under the drive of the drive wheel 10215 to drive the spray block 103 to move along the second horizontal direction.

[0066] For example, the third driving source may include: a servo motor, a speed reducer, etc.

[0067] For example, the third transmission assembly 10214 includes a magnetohydrodynamic seal having a transmission shaft, and a drive wheel 10215 is connected to the transmission shaft for transmission.

[0068] For example, the drive assembly 102 further includes: a rotating shaft disposed in the vacuum chamber, a driven wheel 10216 sleeved on the rotating shaft, the driven wheel 10216 being rotatable relative to the rotating shaft, or the rotating shaft being rotatable relative to the vacuum chamber 101.

[0069] For example, the drive assembly 102 further includes a bearing disposed in the vacuum chamber, and the driven wheel 10216 is connected to the bearing.

[0070] For example, the drive assembly 102 further includes a fastener 10218, which is connected to the conveyor belt 10217 and the spray block 103. That is, the conveyor belt 10217 is connected to the spray block 103 through the fastener 10218, and the fastener 10218 is exemplarily a clamp.

[0071] For example, the driving wheel 10215 is a synchronous wheel, the driven wheel 10216 is a synchronous wheel, and the conveyor belt 10217 is a synchronous belt.

[0072] For example, the driving wheel 10215 is a sprocket, the driven wheel 10216 is a sprocket, and the conveyor belt 10217 is a chain.

[0073] In the above embodiment, with this structure, the third drive source can drive the drive wheel 10215 to rotate through the third transmission component 10214. The rotation of the drive wheel 10215 drives the conveyor belt 10217 to move and the driven wheel 10216 to rotate. The movement of the conveyor belt 10217 drives the spray block 103 to move along the second horizontal direction. The structure is simple and easy to manufacture. Furthermore, by setting the third transmission component 10214, the airtightness of the coating equipment 100 can be guaranteed.

[0074] Figure 5 The diagram shown is a structural schematic of another coating apparatus provided in an exemplary embodiment of this application.

[0075] In some embodiments, such as Figure 5 As shown, there are two spray blocks 103 and two drive components 102. Each spray block 103 is connected to the second end of a drive component 102. The vacuum chamber 101 has a vertical symmetry plane 1011 extending along a first horizontal direction. The two drive components 102 are symmetrically arranged with respect to the vertical symmetry plane 1011.

[0076] For example, there are two drive components 102, such as Figure 5 As shown, each drive assembly 102 includes: a sealing assembly 10210 or a first transmission assembly, a first drive source 1021, a lead screw 1022, and a nut 1023; or, as... Figure 3 As shown, each drive assembly 102 includes: a second drive source, a second transmission assembly, a first gear 10212, and a first rack 10213; or, as... Figure 4 As shown, each drive assembly 102 includes: a third drive source, a third transmission assembly, a drive wheel 10215, a driven wheel 10216, and a conveyor belt 10217.

[0077] In the above embodiments, by using two sets of drive components 102 and two spray blocks 103, the movement stroke of each spray block 103 can be shortened, thereby improving the coating efficiency.

[0078] Figure 6 The diagram shown is a structural schematic of another driving component provided in an exemplary embodiment of this application.

[0079] In some embodiments, such as Figure 6As shown, there are two spray blocks 103. The drive assembly 102 includes a fourth drive source (not shown), a fourth transmission assembly 1024, a second gear 1025, and two second racks 1026. The fourth drive source is located outside the vacuum chamber. The fourth transmission assembly 1024 is hermetically connected to the vacuum chamber 101. The first end of the fourth transmission assembly 1024 is drive-connected to the fourth drive source 1024, and the second end of the fourth transmission assembly 1024 extends into the vacuum chamber through a first through-hole. The second gear 1025 is located inside the vacuum chamber and is drive-connected to the second end of the fourth transmission assembly 1024, configured to rotate under the drive of the fourth transmission assembly 1024. The two second racks 1026 are located inside the vacuum chamber and mesh with the second gear 1025, configured to move along a second horizontal direction under the drive of the second gear 1025. The two spray blocks 103 are respectively connected to the two second racks 1026.

[0080] For example, the fourth driving source may include: a servo motor, a speed reducer, etc.

[0081] For example, the fourth transmission assembly 1024 includes a magnetohydrodynamic seal having a transmission shaft, and a second gear 1025 being drivenly connected to the transmission shaft.

[0082] In the above embodiments, this structure allows a fourth driving source to drive two spray blocks 103 to reciprocate synchronously, shortening the travel distance of each spray block 103, improving coating efficiency, and saving costs by using only one fourth driving source, thus reducing the space occupied by the driving component 102.

[0083] Figure 7 The diagram shown is a structural schematic of another driving component provided in an exemplary embodiment of this application.

[0084] In some embodiments, such as Figure 7 As shown, the drive assembly 102 includes: a fifth drive source (not shown), a fifth transmission assembly 1027, a turntable 1028, and two connecting rods 1029. The fifth drive source is located outside the vacuum chamber. The fifth transmission assembly 1027 is hermetically connected to the vacuum chamber 101. The first end of the fifth transmission assembly 1027 is driveably connected to the fifth drive source, and the second end of the fifth transmission assembly 1027 extends into the vacuum chamber through a first through hole. The turntable 1028 is located inside the vacuum chamber and is drively connected to the second end of the fifth transmission assembly 1027, and is configured to rotate under the drive of the fifth transmission assembly 1027. The two connecting rods 1029 are located inside the vacuum chamber. The first end of each connecting rod 1029 is connected to the turntable 1028, and the second end of each connecting rod 1029 is connected to a spray block 103. The two connecting rods 1029 are configured to move under the drive of the turntable 1028 to drive the two spray blocks 103 to move along a second horizontal direction.

[0085] For example, the fifth driving source may include: a servo motor, a speed reducer, etc.

[0086] For example, the fifth transmission assembly 1027 includes a magnetohydrodynamic seal having a transmission shaft, and a turntable 1028 is transmissionally connected to the transmission shaft.

[0087] In the above embodiments, this structure allows one fifth drive source to drive two spray blocks 103 to reciprocate synchronously, shortening the travel distance of each spray block 103, improving coating efficiency, and saving costs by using only one fifth drive source, thus reducing the space occupied by the drive assembly 102.

[0088] In some embodiments, such as Figure 1 and Figures 3-7 As shown, the coating equipment 100 further includes one or more slide rails 106 and one or more sliders 107. One or more slide rails 106 are disposed on the inner wall of the vacuum chamber. Each slider 107 is slidably connected to a slide rail 106 and connected to a spray block 103.

[0089] For example, each spray block 103 is connected to at least one slider 107, such as Figure 1 As shown, the spray block 103 is connected to two sliders 107.

[0090] For example, each spray block 103 is correspondingly provided with at least two sliders 107, and the corresponding sliders 107 of each spray block 103 are respectively connected to both ends of the spray block 103, thereby reducing the risk of the spray block 103 deflecting and tipping over.

[0091] In the above embodiments, by setting the slide rail 106 and the slider 107, the movement direction of the spray block 103 can be guided, and the risk of the spray block 103 deflecting and tipping over can be reduced.

[0092] In some embodiments, such as Figure 1 and Figure 5 As shown, the coating equipment 100 also includes two or more hoses 108. One end of each hose 108 is connected to the second end of an air inlet pipe 104, and the hose 108 is configured to supply process gas to the air inlet pipe 104.

[0093] For example, one end of the hose 108 is connected to a gas supply device (such as a gas source cabinet), and the other end is connected to the second end of the inlet pipe 104, and is configured to deliver process gas provided by the gas supply device to the inlet pipe 104.

[0094] In the above embodiments, process gas is supplied to the intake pipe 104 by setting a hose 108. The hose 108 can move flexibly with the intake pipe 104 during the movement of the intake pipe 104.

[0095] Figure 8 The diagram shown is a structural schematic of another coating apparatus provided in an exemplary embodiment of this application.

[0096] In some embodiments, such as Figure 8 As shown, the coating equipment 100 also includes: a storage tank 109, a pressure gauge 110, a flow meter 111, a pneumatic valve 112, a manual valve 113, and a pressure regulating valve 114. The storage tank 109 is configured to store and release process gas, the pressure gauge 110 is configured to detect gas pressure, the flow meter 111 is configured to detect gas flow rate, the pneumatic valve 112 and the manual valve 113 are configured to control the on / off state and / or flow rate of the gas, and the pressure regulating valve 114 is configured to regulate the gas pressure.

[0097] In the above embodiments, by setting multiple gas regulating elements and gas detection elements in the gas path, the flow rate, pressure, and on / off state of the process gas can be precisely controlled, thereby improving the uniformity of the process gas in the vacuum chamber and enhancing the coating effect.

[0098] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0099] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0100] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0101] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0102] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A coating equipment, characterized in that, include: A vacuum chamber having a vacuum chamber, a first through-hole communicating with the vacuum chamber, and two or more second through-holes communicating with the vacuum chamber, the vacuum chamber being configured to contain sheet material; A drive assembly, wherein a first end of the drive assembly is disposed outside the vacuum chamber, and a second end of the drive assembly extends into the vacuum chamber through the first through hole; A spray block extends along a first horizontal direction, is disposed at the top of the vacuum chamber, and is drivenly connected to the second end of the drive assembly. It is configured to move along a second horizontal direction under the drive of the drive assembly. The first horizontal direction intersects the second horizontal direction. The spray block has an air inlet chamber. The bottom of the spray block has a plurality of air outlets communicating with the air inlet chamber. The spray block has a first air inlet end and a second air inlet end opposite to each other in the first horizontal direction. Two or more air inlet pipes, the first pipe ends of the two or more air inlet pipes respectively pass through two or more second through holes and are respectively connected to the first air inlet end and the second air inlet end, and are configured to introduce process gas into the air inlet chamber; Two or more bellows assemblies are respectively fitted onto two or more air inlet pipes. The first end of each bellows assembly is sealed to the vacuum chamber, and the second end of each bellows assembly is sealed to the fitted air inlet pipe, and is configured to seal the gap between the vacuum chamber and the air inlet pipe.

2. The coating equipment according to claim 1, characterized in that, Along the direction from the first air inlet to the center of the spray block, the spacing between adjacent air outlets becomes smaller; Along the direction from the second air inlet to the center of the spray block, the spacing between adjacent air outlets becomes smaller.

3. The coating equipment according to claim 1 or 2, characterized in that, The driving component includes: The first driving source is located outside the vacuum chamber; A lead screw, which is connected to the first drive source, is configured to rotate under the drive of the first drive source. One end of the lead screw passes through the first through hole and extends into the vacuum chamber. The axial direction of the lead screw is the same as the second horizontal direction. A nut is screwed to the lead screw and connected to the spray block. The lead screw can drive the nut to rotate and cause the spray block to move along the second horizontal direction.

4. The coating equipment according to claim 3, characterized in that, The driving component also includes: A sealing assembly is sleeved on the connection area of ​​the lead screw located outside the vacuum cavity, and one end of the sealing assembly is sealed to the vacuum cavity. The sealing assembly is configured to seal the gap between the lead screw and the vacuum cavity. Alternatively, the driving component may further include: A first transmission assembly is hermetically connected to the vacuum chamber, and a first end of the first transmission assembly is drivenly connected to the first drive source, and a second end of the first transmission assembly is drivenly connected to the lead screw, configured to transmit the rotational force of the first drive source to the lead screw.

5. The coating equipment according to claim 1 or 2, characterized in that, The driving component includes: The second driving source is located outside the vacuum chamber. The second transmission component is sealed to the vacuum chamber. The first end of the second transmission component is connected to the second drive source. The second end of the second transmission component extends into the vacuum chamber through the first through hole. A first gear is disposed in the vacuum chamber and is connected to the second end of the second transmission assembly, and is configured to rotate under the drive of the second transmission assembly; A first rack is disposed in the vacuum chamber and meshes with the first gear, and is configured to move along the second horizontal direction under the drive of the first gear, and the spray block is connected to the first rack.

6. The coating equipment according to claim 1 or 2, characterized in that, The driving component includes: The third driving source is located outside the vacuum chamber. The third transmission assembly is sealed to the vacuum chamber. The first end of the third transmission assembly is connected to the third drive source. The second end of the third transmission assembly extends into the vacuum chamber through the first through hole. The drive wheel is disposed in the vacuum chamber and is connected to the second end of the third transmission assembly, and is configured to rotate under the drive of the third transmission assembly; A driven wheel is disposed within the vacuum chamber and is rotatably connected to the vacuum chamber body; A conveyor belt is disposed within the vacuum chamber and fitted onto the driving wheel and the driven wheel. The spray block is connected to the conveyor belt, which is configured to move under the drive of the driving wheel to drive the spray block to move along the second horizontal direction.

7. The coating equipment according to claim 1 or 2, characterized in that, The number of spray blocks is two, the number of drive components is two, each spray block is connected to the second end of one of the drive components, the vacuum chamber has a vertical symmetry plane extending along the first horizontal direction, and the two drive components are symmetrically arranged with respect to the vertical symmetry plane.

8. The coating equipment according to claim 1 or 2, characterized in that, There are two spray blocks; The driving component includes: The fourth drive source is located outside the vacuum chamber. The fourth transmission component is hermetically connected to the vacuum chamber. The first end of the fourth transmission component is connected to the fourth drive source, and the second end of the fourth transmission component extends into the vacuum chamber through the first through hole. The second gear is disposed in the vacuum chamber and is connected to the second end of the fourth transmission assembly, and is configured to rotate under the drive of the fourth transmission assembly; Two second racks are disposed in the vacuum chamber and mesh with the second gear, and are configured to move along the second horizontal direction under the drive of the second gear; the two spray blocks are respectively connected to the two second racks. or, The driving component includes: The fifth drive source is located outside the vacuum chamber. The fifth transmission component is sealed to the vacuum chamber. The first end of the fifth transmission component is connected to the fifth drive source, and the second end of the fifth transmission component extends into the vacuum chamber through the first through hole. A turntable, disposed within the vacuum chamber and connected to the second end of the fifth transmission assembly, is configured to rotate under the drive of the fifth transmission assembly. Two connecting rods are disposed in the vacuum chamber. The first end of each connecting rod is connected to the turntable, and the second end of each connecting rod is connected to one of the spray blocks. The two connecting rods are configured to move under the drive of the turntable to drive the two spray blocks to move along the second horizontal direction.

9. The coating equipment according to claim 1 or 2, characterized in that, Also includes: One or more slide rails are provided on the inner wall of the vacuum chamber; One or more sliders, each slider being slidably connected to one of the slide rails and connected to one of the spray blocks.

10. The coating equipment according to claim 1 or 2, characterized in that, Also includes: Two or more hoses, one end of each hose being connected to a second end of one of the intake pipes, the hoses being configured to supply process gas to the intake pipes.

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