Electroplating substrate conveying device and electroplating substrate working machine
By using inclined air knife mechanism and upright air knife mechanism in the electroplating substrate conveying device, the problem of high equipment length and cost caused by the large number of air knives in the prior art is solved, realizing efficient substrate blowing and drying, and reducing equipment space occupation and cost.
Patent Information
- Application Number
- CN202521108331.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-30
- Publication Date
- 2026-05-05
- Estimated Expiration
- 2035-05-30
AI Technical Summary
In TGV electroplating, the use of upright air knives for drying requires multiple sets of air knives, resulting in a long conveying mechanism, high cost, and a large footprint.
An inclined air knife mechanism is adopted, including a first air knife and a second air knife arranged at intervals. The length direction of the air knife forms an acute angle with the substrate conveying direction. The airflow forms an inclined flow path on the upper and lower surfaces of the substrate. The inclined air knife mechanism dries the upper and lower surfaces of the substrate, and is combined with a straight air knife mechanism for drying.
It improves drying efficiency, reduces the number of air knives, shortens the length of the conveying mechanism, reduces operating costs and footprint, ensures substrate surface drying, and supports the smooth implementation of subsequent drying processes.
Smart Images
Figure CN224202143U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of electroplating equipment technology, specifically to an electroplating substrate conveying device and electroplating substrate processing machinery. Background Technology
[0002] Currently, in TGV (Through Glass Via) electroplating, the substrate is generally dried by blowing with an upright air knife. The upright air knife is located above the conveying mechanism, and its air outlet is perpendicular to the conveying direction of the substrate.
[0003] However, the water vapor blown away by the upright air knife tends to stick to the glass substrate, and some water vapor in the holes is difficult to blow out. Therefore, multiple sets of upright air knives are usually required to dry the substrate, resulting in a longer overall length of the conveying mechanism, higher operating costs, and a larger footprint. Utility Model Content
[0004] In view of this, the present invention provides an electroplating substrate conveying device and an electroplating substrate processing machine to solve the problem that using upright air knives for drying requires setting up multiple sets of upright air knives, resulting in a long conveying mechanism, high operating costs, and a large footprint.
[0005] In a first aspect, this utility model provides an electroplating substrate conveying device, comprising:
[0006] Equipment body;
[0007] A conveying mechanism is disposed within the device body, and the conveying mechanism includes a first conveying component and a second conveying component that are spaced apart along the conveying direction of the substrate;
[0008] An inclined air knife mechanism is disposed at the gap between the first conveying component and the second conveying component. The inclined air knife mechanism includes a first air knife and a second air knife arranged at intervals. The angle between the length direction of the first air knife and the second air knife and the conveying direction of the substrate is an acute angle. The first air outlet of the first air knife and the second air outlet of the second air knife are arranged opposite to each other. The substrate is adapted to pass through the gap between the first air knife and the second air knife.
[0009] Beneficial effects: The electroplating substrate conveying device of this utility model has an inclined air knife mechanism set at the gap between the first conveying component and the second conveying component. The first air knife and the second air knife of the inclined air knife mechanism can simultaneously dry the upper and lower surfaces of the substrate, improving the drying efficiency. Therefore, a smaller number of inclined air knife mechanisms can achieve the drying effect, thereby shortening the length of the conveying mechanism and reducing the cost and area occupied.
[0010] In one optional embodiment, the length direction of the first air knife and the length direction of the second air knife are consistent, and the angle between the length direction of the first air knife and the conveying direction of the substrate is θ1, satisfying 66°≤θ1≤76°.
[0011] Beneficial effects: Setting the length directions of the first and second air knives to be aligned ensures uniform drying of the upper and lower surfaces of the substrate. By controlling the angle between the length directions of the two air knives and the substrate's conveying direction within a suitable range, the airflow can form an inclined flow path on the upper and lower surfaces of the substrate, resulting in a longer contact time between the airflow and the substrate. This allows for more thorough removal of moisture from the substrate, improving drying efficiency.
[0012] In one optional embodiment, the inclined air knife mechanism further includes a pair of supports, which are spaced apart on the device body. The opposite ends of the first air knife are rotatably disposed between the pair of supports and fixed by a locking member, and the opposite ends of the second air knife are rotatably disposed between the pair of supports and fixed by a locking member.
[0013] Beneficial effects: The support is used to support the first air knife and the second air knife. The first air knife and the second air knife are rotatably mounted on the support, and the tilt angle of the first air knife and the second air knife can be finely adjusted to further improve the drying efficiency of the substrate.
[0014] In one optional embodiment, the first air outlet is inclined relative to the first air knife, and the inclination angle is θ2, satisfying 0°<θ2≤5°;
[0015] The second air outlet is inclined relative to the blade surface of the second air knife, and the inclination angle is θ3, satisfying 0°<θ3≤5°.
[0016] Beneficial effects: By setting the first and second air outlets at relative angles, a horizontal airflow can be formed when drying the moisture on the substrate, which can drive away the water and drive away the moisture that is not blown off the substrate surface in time, thereby ensuring the relative dryness of the substrate surface and facilitating the smooth implementation of subsequent drying processes.
[0017] In one optional embodiment, the first conveying assembly includes a plurality of spaced-apart first drive shafts, each of which is provided with at least one first roller. The axis of each first drive shaft is perpendicular to the transport direction of the substrate. Along the transport direction of the substrate, the length of the plurality of first drive shafts near the inclined air knife mechanism gradually decreases.
[0018] Beneficial effects: The first conveying assembly uses a first drive shaft in conjunction with multiple first rollers to convey the substrate, which facilitates uniform force distribution on the substrate and prevents damage during transportation. In the substrate transportation direction, the lengths of the multiple first drive shafts near the inclined air knife mechanism gradually decrease to form an installation space for the inclined air knife mechanism, while effectively supporting the substrate.
[0019] In one optional embodiment, the second conveying assembly includes a plurality of spaced second drive shafts, each of which is provided with at least one second roller. The axis of each second drive shaft is perpendicular to the transport direction of the substrate. Along the transport direction of the substrate, the length of the plurality of second drive shafts near the inclined air knife mechanism gradually increases.
[0020] Beneficial effects: The second conveying assembly uses a second drive shaft in conjunction with multiple second rollers to transport the substrate, which facilitates uniform force distribution on the substrate and prevents damage during transportation. In the substrate transport direction, the lengths of the multiple second drive shafts near the inclined air knife mechanism gradually increase to form an installation space for the inclined air knife mechanism, while also effectively supporting the substrate.
[0021] In one optional embodiment, the conveying mechanism further includes a third conveying component and a fourth conveying component, the third conveying component being spaced above the first conveying component, and the fourth conveying component being spaced above the second conveying component.
[0022] Beneficial effects: The gap between the first and third conveying components is used to pass through the substrate, thereby improving the support strength of the substrate. Similarly, the gap between the second and fourth conveying components is also used to pass through the substrate, thereby improving the support strength of the substrate.
[0023] In one optional embodiment, the inclined air knife mechanism further includes a fan and an air inlet pipe. The first air knife has at least one first air inlet on its side, and the second air knife has at least one second air inlet on its side. The first air inlet and the second air inlet are respectively connected to the fan through the air inlet pipe.
[0024] Beneficial effects: The fan is used to provide airflow. The airflow enters the first air inlet of the first air knife through the air inlet pipe and is sprayed onto the upper surface of the substrate from the first air outlet to dry the upper surface of the substrate. The airflow also enters the second air inlet of the second air knife through the air inlet pipe and is sprayed onto the lower surface of the substrate from the second air outlet to dry the lower surface of the substrate.
[0025] In one optional embodiment, an upright air knife mechanism is further included, which is disposed above the second conveying assembly and perpendicular to the conveying direction of the substrate, for drying the substrate.
[0026] Beneficial effects: An upright air knife mechanism is set above the second conveying component, which can dry the substrate after it has been blown dry, so as to combine the blowing and drying processes into a whole and reduce the space occupied by the drying equipment.
[0027] Secondly, this utility model also provides an electroplating substrate processing machine, including: the above-mentioned electroplating substrate conveying device.
[0028] Beneficial effects: Since the electroplating substrate processing machinery includes an electroplating substrate conveying device, it has the same effect as the electroplating substrate conveying device, so it will not be elaborated here. Attached Figure Description
[0029] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0030] Figure 1 This is a schematic diagram of the structure of an electroplating substrate conveying device according to an embodiment of the present invention;
[0031] Figure 2 for Figure 1 A top view of an electroplating substrate conveying device is shown.
[0032] Figure 3 This is a schematic diagram of the inclined air knife mechanism of an electroplating substrate conveying device according to an embodiment of the present invention;
[0033] Figure 4 This is a schematic diagram of the structure of the second air knife of an electroplating substrate conveying device according to an embodiment of the present invention;
[0034] Figure 5 This is a schematic diagram showing the tilt angle between the first air knife and the substrate conveying direction of an electroplating substrate conveying device according to an embodiment of the present invention.
[0035] Figure 6 This is a partial structural schematic diagram of the first air knife of an electroplating substrate conveying device according to an embodiment of the present invention;
[0036] Figure 7 This is a partial structural schematic diagram of an electroplating substrate conveying device according to an embodiment of the present utility model.
[0037] Explanation of reference numerals in the attached figures:
[0038] 1. Equipment body; 2. Conveying mechanism; 201. First conveying component; 2011. First drive shaft; 2012. First roller; 202. Second conveying component; 2021. Second drive shaft; 2022. Second roller; 203. Third conveying component; 204. Fourth conveying component; 3. Inclined air knife mechanism; 301. First air knife; 3011. First air outlet; 302. Second air knife; 3021. Second air outlet; 3022. Second air inlet; 303. Support; 304. Fan; 305. Air inlet pipe; 4. Upright air knife mechanism. Detailed Implementation
[0039] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0040] The following is combined with Figures 1 to 7 The following describes embodiments of the present invention.
[0041] According to embodiments of the present invention, on the one hand, such as Figure 1 and Figure 2 As shown, an electroplating substrate conveying device is provided, mainly including: a device body 1, a conveying mechanism 2, and an inclined air knife mechanism 3. The conveying mechanism 2 is disposed within the device body 1, and includes a first conveying component 201 and a second conveying component 202 spaced apart along the conveying direction of the substrate. The inclined air knife mechanism 3 is disposed at the gap between the first conveying component 201 and the second conveying component 202, and includes a first air knife 301 and a second air knife 302 spaced apart vertically. The angle between the length direction of the first air knife 301 and the second air knife 302 and the conveying direction of the substrate is an acute angle. The first air outlet 3011 of the first air knife 301 and the second air outlet 3021 of the second air knife 302 are arranged opposite to each other, and the substrate is adapted to pass through the gap between the first air knife 301 and the second air knife 302.
[0042] Therefore, the electroplating substrate conveying device provided in this embodiment of the present invention has an inclined air knife mechanism 3 set at the gap between the first conveying component 201 and the second conveying component 202. The first air knife 301 and the second air knife 302 of the inclined air knife mechanism 3 can simultaneously dry the upper and lower surfaces of the substrate, thereby improving the drying efficiency. Therefore, a smaller number of inclined air knife mechanisms 3 can achieve the drying effect, thereby shortening the length of the conveying mechanism 2 and reducing the cost and area occupied.
[0043] Specifically, to avoid external interference, the equipment body 1 may also be provided with a housing (not shown in the figure), and the conveying mechanism 2 and the inclined air knife mechanism 3 are disposed inside the housing. The transport direction of the substrate is as follows: Figure 2 As shown by arrow A in the diagram. The substrate is generally transported in a horizontal direction, perpendicular to the vertical direction.
[0044] In one embodiment, such as Figure 2 , Figure 3 and Figure 5 As shown, the length direction of the first air knife 301 is consistent with the length direction of the second air knife 302. The angle between the length direction of the first air knife 301 and the conveying direction of the substrate is θ1, satisfying 66°≤θ1≤76°. The angle between the length direction of the second air knife 302 and the conveying direction of the substrate is equal to θ1. Setting the length directions of the first air knife 301 and the second air knife 302 consistent ensures uniform drying of the upper and lower surfaces of the substrate. By controlling the angle between the length directions of the two air knives and the conveying direction of the substrate within a suitable range, the airflow can form an inclined flow path on the upper and lower surfaces of the substrate, resulting in a longer contact time between the airflow and the substrate. This allows for more thorough removal of moisture from the substrate, improving drying efficiency.
[0045] For example, the angle θ1 between the length direction of the first air knife 301 and the conveying direction of the substrate can be 66°, 71°, 76°, etc.
[0046] Furthermore, in one embodiment, such as Figure 1 and Figure 3 As shown, the inclined air knife mechanism 3 also includes a pair of supports 303, which are spaced apart on the device body 1. The opposite ends of the first air knife 301 are rotatably disposed between the pair of supports 303 and fixed by locking members. The opposite ends of the second air knife 302 are also rotatably disposed between the pair of supports 303 and fixed by locking members. The supports 303 are used to support the first air knife 301 and the second air knife 302. The first air knife 301 and the second air knife 302 are rotatably disposed on the supports 303, and the tilt angle of the first air knife 301 and the second air knife 302 can be finely adjusted to further improve the drying efficiency of the substrate.
[0047] Specifically, the support 303 is fixed to the equipment body 1, and the fixed connection can be achieved through conventional methods such as screw connection or welding. The first air knife 301 and the second air knife 302 can be rotatably mounted on the support 303 through bearings and fixed by pins, that is, the locking element can be a pin.
[0048] Furthermore, in one embodiment, such as Figure 6As shown, the first air outlet 3011 is inclined relative to the blade surface of the first air knife 301, with an inclination angle of θ2, satisfying 0° < θ2 ≤ 5°. The second air outlet 3021 is inclined relative to the blade surface of the second air knife 302, with an inclination angle of θ3, satisfying 0° < θ3 ≤ 5°. By setting the first air outlet 3011 and the second air outlet 3021 relatively inclined, a transverse airflow can be formed when drying the moisture on the substrate, thus driving away any remaining moisture from the substrate surface and ensuring relative dryness of the substrate surface, facilitating the smooth implementation of subsequent drying processes.
[0049] For example, the inclination angle θ2 of the first air outlet 3011 relative to the blade surface of the first air knife 301 can be 1°, 2°, 5°, etc. Similarly, the inclination angle θ3 of the second air outlet 3021 relative to the blade surface of the second air knife 302 can be 1°, 2°, 5°, etc.
[0050] Furthermore, in one embodiment, the tilt angle θ2 is equal to the tilt angle θ3.
[0051] In one embodiment, such as Figure 7 As shown, the first conveying assembly 201 includes multiple spaced-apart first drive shafts 2011, each of which is equipped with at least one first roller 2012. The axes of each first drive shaft 2011 are perpendicular to the transport direction of the substrate. Along the transport direction of the substrate, the lengths of the multiple first drive shafts 2011 near the inclined air knife mechanism 3 gradually decrease. The first conveying assembly 201 uses the first drive shafts 2011 in conjunction with multiple first rollers 2012 to transport the substrate, which facilitates uniform force distribution on the substrate and avoids damage to the substrate during transport. In the transport direction of the substrate, the lengths of the multiple first drive shafts 2011 near the inclined air knife mechanism 3 gradually decrease to form an installation space for the inclined air knife mechanism 3, while also effectively supporting the substrate.
[0052] Furthermore, in one embodiment, such as Figure 7 As shown, the second conveying assembly 202 includes multiple spaced-apart second drive shafts 2021, each with at least one second roller 2022. The axes of each second drive shaft 2021 are perpendicular to the transport direction of the substrate. Along the transport direction of the substrate, the lengths of the multiple second drive shafts 2021 near the inclined air knife mechanism 3 gradually increase. The second conveying assembly 202 uses the second drive shafts 2021 in conjunction with multiple second rollers 2022 to transport the substrate, which facilitates uniform force distribution on the substrate and prevents damage during transport. The gradual increase in length of the multiple second drive shafts 2021 near the inclined air knife mechanism 3 in the transport direction of the substrate forms the installation space for the inclined air knife mechanism 3 and effectively supports the substrate.
[0053] It should be noted that the present invention does not limit the number of the first drive shaft 2011 and the second drive shaft 2021, and the number can be selected as needed.
[0054] Furthermore, there is no limitation on the number of first rollers 2012 on each first drive shaft 2011 or the number of second rollers 2022 on each second drive shaft 2021. For example, the first conveying assembly 201 adopts a three-point transportation method, and three rollers are provided on the first drive shaft 2011.
[0055] In one embodiment, such as Figure 7 As shown, the conveying mechanism 2 further includes a third conveying component 203 and a fourth conveying component 204. The third conveying component 203 is spaced above the first conveying component 201, and the fourth conveying component 204 is spaced above the second conveying component 202. The gap between the first conveying component 201 and the third conveying component 203 is used to pass through the substrate to improve the support strength of the substrate. Similarly, the gap between the second conveying component 202 and the fourth conveying component 204 is also used to pass through the substrate to improve the support strength of the substrate.
[0056] Specifically, the third conveying component 203 and the fourth conveying component 204 can also adopt a roller and shaft structure. The roller is driven to rotate by the shaft, and the substrate is placed on the roller to realize the transport of the substrate. This embodiment of the present invention will not be described in detail.
[0057] In one embodiment, such as Figures 1 to 4 As shown, the inclined air knife mechanism 3 also includes a fan 304 and an air inlet pipe 305. The first air knife 301 has at least one first air inlet on its side, and the second air knife 302 has at least one second air inlet 3022 on its side. The first air inlet and the second air inlet 3022 are respectively connected to the fan 304 through the air inlet pipe 305. The fan 304 is used to provide airflow. The airflow enters the first air inlet of the first air knife 301 through the air inlet pipe 305 and is sprayed onto the upper surface of the substrate from the first air outlet 3011 to dry the upper surface of the substrate. The airflow also enters the second air inlet 3022 of the second air knife 302 through the air inlet pipe 305 and is sprayed onto the lower surface of the substrate from the second air outlet 3021 to dry the lower surface of the substrate.
[0058] Specifically, such as Figure 1 As shown, the fan 304 is located on one side of the equipment body 1, and the air outlet of the fan 304 is connected to the inlet of the air inlet pipe 305.
[0059] In one embodiment, such as Figure 1 and Figure 2As shown, the electroplating substrate conveying device also includes a positive air knife mechanism 4. The positive air knife mechanism 4 is located above the second conveying assembly 202 and perpendicular to the conveying direction of the substrate, and is used to dry the substrate. The positive air knife mechanism 4 is located above the second conveying assembly 202, which can dry the substrate after it has been blown dry, so as to combine the blowing and drying processes into a whole and reduce the space occupied by the drying equipment.
[0060] It should be noted that the upright air knife mechanism 4 can adopt any existing structure. For example, the upright air knife mechanism 4 also adopts a pair of air knives with their air outlets facing each other. The substrate passes through the gap between the pair of air knives to achieve drying of the upper and lower surfaces of the substrate.
[0061] To achieve the basic functions of the electroplating substrate conveying device, the electroplating substrate conveying device in this embodiment may also include other necessary modules or components, such as control valves, control systems, and drive mechanisms. It should be noted that any suitable existing structure can be selected from the other necessary modules or components included in the electroplating substrate conveying device. To clearly and concisely illustrate the technical solution provided in this embodiment, the above-mentioned parts will not be repeated here, and the accompanying drawings have also been simplified accordingly. However, it should be understood that the scope of this utility model is not limited thereto.
[0062] According to an embodiment of the present invention, another aspect provides an electroplating substrate processing machine, including: an electroplating substrate conveying device.
[0063] Since the electroplating substrate processing machinery includes an electroplating substrate conveying device, which has the same effect as the electroplating substrate conveying device, it will not be described in detail here.
[0064] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.
Claims
1. A substrate conveying device for electroplating, characterized in that, include: Equipment body (1); A conveying mechanism (2) is provided inside the device body (1). The conveying mechanism (2) includes a first conveying component (201) and a second conveying component (202) that are spaced apart along the conveying direction of the substrate. An inclined air knife mechanism (3) is disposed at the gap between the first conveying component (201) and the second conveying component (202). The inclined air knife mechanism (3) includes a first air knife (301) and a second air knife (302) arranged at intervals. The angle between the length direction of the first air knife (301) and the second air knife (302) and the conveying direction of the substrate is an acute angle. The first air outlet (3011) of the first air knife (301) and the second air outlet (3021) of the second air knife (302) are arranged opposite to each other. The substrate is adapted to pass through the gap between the first air knife (301) and the second air knife (302).
2. The electroplating substrate conveying device according to claim 1, characterized in that, The length direction of the first air knife (301) is consistent with the length direction of the second air knife (302), and the angle between the length direction of the first air knife (301) and the conveying direction of the substrate is θ1, which satisfies 66°≤θ1≤76°.
3. The electroplating substrate conveying device according to claim 2, characterized in that, The inclined air knife mechanism (3) further includes a pair of supports (303), which are spaced apart on the equipment body (1). The opposite ends of the first air knife (301) are rotatably disposed between the pair of supports (303) and fixed by a locking member. The opposite ends of the second air knife (302) are rotatably disposed between the pair of supports (303) and fixed by a locking member.
4. The electroplating substrate conveying device according to claim 3, characterized in that, The first air outlet (3011) is inclined relative to the length direction of the first air knife (301), and the included angle is θ2, which satisfies 0°<θ2≤5°; The second air outlet (3021) is inclined relative to the length direction of the second air knife (302), and the included angle is θ3, which satisfies 0°<θ3≤5°.
5. The electroplating substrate conveying device according to claim 1, characterized in that, The first conveying assembly (201) includes a plurality of spaced first drive shafts (2011), each of which is provided with at least one first roller (2012). The axis of each first drive shaft (2011) is perpendicular to the transport direction of the substrate. Along the transport direction of the substrate, the length of the plurality of first drive shafts (2011) near the inclined air knife mechanism (3) gradually decreases.
6. The electroplating substrate conveying device according to claim 5, characterized in that, The second conveying assembly (202) includes a plurality of spaced second drive shafts (2021), each of which is provided with at least one second roller (2022). The axis of each second drive shaft (2021) is perpendicular to the transport direction of the substrate. Along the transport direction of the substrate, the length of the plurality of second drive shafts (2021) near the inclined air knife mechanism (3) gradually increases.
7. The electroplating substrate conveying device according to claim 1, characterized in that, The conveying mechanism (2) further includes a third conveying component (203) and a fourth conveying component (204), wherein the third conveying component (203) is spaced above the first conveying component (201) and the fourth conveying component (204) is spaced above the second conveying component (202).
8. The electroplating substrate conveying device according to claim 1, characterized in that, The inclined air knife mechanism (3) further includes a fan (304) and an air inlet pipe (305). The first air knife (301) has at least one first air inlet on its side, and the second air knife (302) has at least one second air inlet (3022) on its side. The first air inlet and the second air inlet (3022) are respectively connected to the fan (304) through the air inlet pipe (305).
9. The electroplating substrate conveying device according to claim 1, characterized in that, It also includes a positive air knife mechanism (4), which is located above the second conveying assembly (202) and perpendicular to the conveying direction of the substrate, for drying the substrate.
10. A machine for electroplating substrates, characterized in that, include: The electroplating substrate conveying device according to any one of claims 1 to 9.