RPS source detection table

Abstract

The utility model discloses an RPS source detection bench, including main body mechanism, vacuum system mechanism, atmosphere access mechanism and water circulation mechanism, the main body mechanism includes frame, the top of frame is equipped with RPS source interface, the vacuum system mechanism is installed inside the frame, the atmosphere access mechanism is equipped with the RPS source interface, and the water circulation mechanism is equipped with the RPS source interface. The vacuum system mechanism is used for generating a high vacuum environment and feeding back vacuum detection data; according to the RPS source detection platform provided by the utility model, the vacuum system mechanism, the atmosphere access mechanism and the water circulation mechanism are integrated through the rack, the vacuum system mechanism is used for pre-vacuumizing through the vacuum pump, the molecular pump further improves the vacuum degree, the pressure control valve and the pre-vacuumizing valve control the vacuum level, the atmosphere access mechanism accurately controls the gas environment, and the water circulation mechanism is used for water circulation. The water circulation mechanism adjusts the flow of a water cooling bin through a ball valve, overheating is prevented, an industrial personal computer in the electric soft control mechanism achieves system automatic control, and therefore the control precision of the vacuum environment and the environmental adaptability of the experiment are improved.

Description

Technical Field

[0001] This utility model relates to the field of RPS source plasma detection technology, specifically, to an RPS source detection station. Background Technology

[0002] RPS plasma sources are widely used in many high-precision process fields, such as surface treatment, material modification, and thin film deposition. In surface treatment, they are used to change the surface properties of materials, giving them specific adhesion, hydrophobicity, or oxidation resistance. In material modification, they can inject specific elements or chemical groups into materials to improve their physical and chemical properties. In addition, RPS plasma sources play an important role in thin film deposition processes such as semiconductors and photovoltaics, ensuring the uniformity and density of the film layer, thereby meeting the process requirements of high-tech industries.

[0003] With the widespread application of RPS plasma sources in various fields, users have an increasing demand for monitoring their working status and evaluating their performance. Since the generation of plasma jets involves high-energy electric fields, gas flow and ion release, the use of RPS sources is accompanied by problems such as aging of equipment components and performance degradation, which can easily affect the uniformity and stability of the plasma. Therefore, users need a highly reliable device for real-time monitoring of RPS plasma source performance. Utility Model Content

[0004] The purpose of this invention is to provide an RPS source detection station to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: an RPS source detection station, comprising a main body, a vacuum system, an atmosphere access mechanism, and a water circulation mechanism. The main body includes a frame and an RPS source interface disposed on the top of the frame. The vacuum system, atmosphere access mechanism, and water circulation mechanism are respectively mounted on the frame. The main body, the vacuum system, the atmosphere access mechanism, and the water circulation mechanism constitute a complete RPS source detection station.

[0006] Preferably, the vacuum system includes a vacuum pump and a molecular pump. The inlet of the molecular pump is connected to a vacuum chamber via a gate valve. The outlet of the molecular pump is equipped with a pre-vacuum valve. A pressure control valve is installed at the bottom of the vacuum chamber. The inlet of the vacuum pump is connected to a pre-evacuation valve and a pre-vacuum valve. The inlet of the pre-evacuation valve is connected to the pressure control valve.

[0007] Preferably, the atmosphere inlet mechanism includes two solenoid valves, the outlet of each solenoid valve is reserved with an atmosphere outlet pipe, the inlet of each solenoid valve is connected to a flow meter, and the inlet of the flow meter is reserved with an atmosphere inlet pipe.

[0008] Preferably, the water circulation mechanism includes a water-cooled chamber that covers the vacuum chamber, and two second tubes are connected to the water-cooled chamber, with the other end of each second tube connected to a diverter block.

[0009] Preferably, an electrical control mechanism is installed inside the frame, which includes an industrial computer and a compressed air control system. The industrial computer is installed on one side of the frame, and the compressed air control system is installed on the inner wall of one side of the frame.

[0010] Preferably, the compressed air control system is electrically connected to the slide gate valve, the pre-valve, and the pre-extraction valve, respectively, and the industrial computer is electrically connected to the compressed air control system.

[0011] Preferably, a thin-film gauge and a vacuum gauge are installed on the vacuum chamber.

[0012] Preferably, the electrical control mechanism further includes an electrical control box, which is installed inside the frame.

[0013] Preferably, the bottom of the frame is equipped with wheels.

[0014] Preferably, the ball valve is installed at the bottom of the frame, and one end of the ball valve is connected to the flow divider block.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows: The RPS source detection station provided by this utility model integrates a vacuum system mechanism, an atmosphere inlet mechanism, and a water circulation mechanism through a frame. The vacuum system mechanism uses a vacuum pump for pre-vacuuming, a molecular pump to further improve the vacuum degree, a pressure control valve and a pre-vacuuming valve to control the vacuum level, an atmosphere inlet mechanism to precisely control the gas environment, a water circulation mechanism to regulate the flow of the water cooling chamber with a ball valve to prevent overheating, and an industrial control computer in the electrical soft control mechanism to realize automatic system control, thereby improving the control accuracy of the vacuum environment and the environmental adaptability of the experiment, simplifying operation, and enhancing the safety and reliability of the equipment. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the RPS source detection station according to an embodiment of the present invention;

[0017] Figure 2 This is a schematic diagram of the main structure of the RPS source detection station in an embodiment of the present invention;

[0018] Figure 3 This is a schematic diagram of the vacuum system mechanism in the RPS source detection stage according to an embodiment of the present invention;

[0019] Figure 4 This is a schematic diagram of the electrical soft control mechanism in the RPS source detection station according to an embodiment of the present invention;

[0020] Figure 5 This is a schematic diagram of the atmosphere access mechanism in the RPS source detection station according to an embodiment of the present invention;

[0021] Figure 6 This is a schematic diagram of the water circulation mechanism in the RPS source detection station according to an embodiment of the present invention.

[0022] In the picture:

[0023] 1. Main structure; 11. Frame; 12. Electrical installation compartment; 13. Cover plate; 14. RPS source interface; 15. Wheels;

[0024] 2. Vacuum system components; 21. Molecular pump; 22. Vacuum pump; 23. Membrane gauge; 24. Vacuum gauge; 25. Gate valve; 26. Pressure control valve; 27. Fore-stage valve; 28. Pre-evacuation valve; 29. ​​Vacuum chamber;

[0025] 3. Electrical control mechanism; 31. Industrial computer; 32. Electrical control box; 33. Compressed air control system;

[0026] 4. Atmosphere inlet mechanism; 41. Flow meter; 42. Solenoid valve; 43. Atmosphere inlet pipe;

[0027] 5. Water circulation mechanism; 51. Ball valve; 52. Diverter block; 53. Water cooling chamber; 54. Second pipe body. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] Please see Figures 1-4 An embodiment of this utility model provides an RPS source detection station, including: a main body mechanism 1, a vacuum system mechanism 2, an atmosphere access mechanism 4, and a water circulation mechanism 5.

[0030] The main body 1 includes a frame 11, with an RPS source interface 14 on the top of the frame 11, cover plates 13 on both sides of the frame 11, an electrical installation compartment 12 on the front surface of the frame 11, and a vacuum system mechanism 2 installed on the top of the frame 11.

[0031] In this embodiment, as Figures 1-4As shown, the vacuum system mechanism 2 includes a vacuum pump 22 and a molecular pump 21. The inlet of the molecular pump 21 is connected to a vacuum chamber 29 through a gate valve 25. The outlet of the molecular pump 21 is equipped with a pre-vacuum valve 27. The bottom of the vacuum chamber 29 is equipped with a pressure control valve 26. The inlet of the vacuum pump 22 is connected to a pre-evacuation valve 28 and a pre-vacuum valve 27. The two ends of the pre-evacuation valve 28 are respectively connected to the vacuum pump 22 and the pressure control valve 26.

[0032] Specifically, the vacuum pump 22 in the vacuum system mechanism 2 is used for primary evacuation to form a pre-evacuation environment, while the molecular pump 21 is used to further improve the vacuum level to meet the high vacuum requirements. The molecular pump 21 is connected to the vacuum chamber 29 through the gate valve 25, and the fore-stage valve 27 is connected to the outlet of the molecular pump 21 to maintain vacuum stability. The pressure control valve 26 is installed at the bottom of the vacuum chamber 29 to control the pressure and maintain an appropriate vacuum level. The pre-evacuation valve 28 ensures communication with the vacuum pump 22 and the pressure control valve 26 during the pre-evacuation process.

[0033] Furthermore, a thin-film gauge 23 and a vacuum gauge 24 are respectively installed on the vacuum chamber 29. The vacuum gauge 24 is used to monitor the vacuum level inside the vacuum chamber 29 in real time, and the thin-film gauge 23 is used for high vacuum detection.

[0034] In this embodiment, as Figures 1-5 As shown, the atmosphere inlet mechanism 4 is installed inside the frame 11. The atmosphere inlet mechanism 4 includes two solenoid valves 42. The outlet of the solenoid valve 42 is reserved with an atmosphere inlet pipe. The inlet of the solenoid valve 42 is connected to a flow meter 41. The inlet of the flow meter 41 is connected to an atmosphere inlet pipe 43.

[0035] Specifically, it is installed inside the frame 11 and consists of two solenoid valves 42 and a flow meter 41. The solenoid valves 42 are used to switch the atmosphere on and off, while the flow meter 41 controls the gas flow to ensure a suitable atmosphere environment.

[0036] In this embodiment, as Figures 1-6 As shown, the water circulation mechanism 5 is installed at the bottom of the frame 11. The water circulation mechanism 5 includes two ball valves 51 and a water cooling chamber 53. The water cooling chamber 53 covers the vacuum chamber 29. The ball valves 51 are installed at the bottom of the frame 11. Each ball valve 51 is equipped with a diverter block 52. The diverter block 52 is connected to a second pipe body 54. One end of each of the two second pipe bodies 54 is connected to the water cooling chamber 53.

[0037] Specifically, the water circulation mechanism 5 controls the flow of water through ball valves 51 installed at the bottom of the frame 11. Each ball valve 51 is connected to a diversion block 52. Two of the second pipes 54 on the diversion block 52 introduce cooling water into the water-cooled chamber 53, thereby effectively cooling the vacuum chamber 29. Water is discharged through the other two second pipes 54 to prevent the vacuum chamber 29 from overheating.

[0038] In this embodiment, as Figures 1-4 As shown, an electrical control mechanism 3 is installed inside the frame 11. The electrical control mechanism 3 includes an industrial computer 31 and a compressed air control system 33. The industrial computer 31 is installed on one side of the frame 11, and the compressed air control system 33 is installed on the inner wall of one side of the frame 11. The compressed air control system 33 is electrically connected to the slide gate valve 25, the pre-stage valve 27 and the pre-extraction valve 28 respectively. The industrial computer 31 is electrically connected to the compressed air control system 33.

[0039] Furthermore, the electrical control mechanism 3 also includes an electrical control box 32, which is installed inside the frame 11. The electrical control mechanism 3 includes an industrial computer 31 and a compressed air control system 33, which are used to control the electrical operation of the vacuum pump 22, slide gate valve 25, fore-stage valve 27, pre-evacuation valve 28, pressure control valve 26 and molecular pump 21. Precise control is achieved through the instructions of the industrial computer 31 to complete the automation and stable operation of the vacuum system. The electrical control box 32 can provide stable power distribution and circuit protection for the equipment.

[0040] like Figure 1 As shown, the bottom of the frame 11 is equipped with wheels 15, which makes it easy to manually push the main body 1 to move.

[0041] Based on the above technical solution, the working steps of this solution are summarized as follows: In the RPS source detection station provided by this utility model, the main body 1 integrates and installs the vacuum system mechanism 2, the atmosphere access mechanism 4, and the water circulation mechanism 5 through its frame 11. The vacuum system mechanism 2 mainly includes a vacuum pump 22 and a molecular pump 21. The vacuum pump 22 is used for primary evacuation to form a pre-evacuation vacuum environment, while the molecular pump 21 is used to further improve the vacuum degree to meet the high vacuum requirements. The molecular pump 21 is connected to the vacuum chamber 29 through a gate valve 25, and the pre-stage valve 27 is connected to the outlet of the molecular pump 21 to maintain vacuum stability. The pressure control valve 26 is installed at the bottom of the vacuum chamber 29 to control the pressure and maintain an appropriate vacuum level. The pre-evacuation valve 28 ensures communication with the vacuum pump 22 and the pressure control valve 26 during the pre-evacuation process.

[0042] The atmosphere inlet mechanism 4 is installed inside the frame 11 and consists of two solenoid valves 42 and a flow meter 41. The solenoid valves 42 are used for atmosphere switching, and the flow meter 41 controls the gas flow to ensure a suitable atmosphere environment. The water circulation mechanism 5 controls the inlet and outlet water flow of the water-cooled chamber 53 through the ball valve 51 to ensure that the vacuum system mechanism 2 and the vacuum chamber 29 will not overheat. The electrical soft control mechanism 3 includes an industrial computer 31 and a compressed air control system 33, which is used to control the electrical operation of the vacuum pump 22, the slide gate valve 25, the fore-stage valve 27, the pre-evacuation valve 28, the pressure control valve 26, and the molecular pump 21. Precise control is achieved through the instructions of the industrial computer 31 to complete the automation and stable operation of the vacuum system.

[0043] All parts not described in this utility model are the same as or can be implemented using existing technology. Although embodiments of this utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this utility model, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An RPS source detection station, comprising a main body (1), characterized in that: The main body (1) includes a frame (11) and an RPS source interface (14) located on the top of the frame (11). A vacuum system mechanism (2), an atmosphere access mechanism (4) and a water circulation mechanism (5) are respectively installed on the frame (11). The main body (1), the vacuum system mechanism (2), the atmosphere access mechanism (4) and the water circulation mechanism (5) constitute an RPS source detection station.

2. The RPS source detection station according to claim 1, characterized in that: The vacuum system mechanism (2) includes a vacuum pump (22) and a molecular pump (21). The inlet of the molecular pump (21) is connected to a vacuum chamber (29) through a gate valve (25). The outlet of the molecular pump (21) is equipped with a pre-valve (27). The bottom of the vacuum chamber (29) is equipped with a pressure control valve (26). The inlet of the vacuum pump (22) is connected to the pre-valve (27) and a pre-evacuation valve (28). The inlet of the pre-evacuation valve (28) is connected to the pressure control valve (26).

3. The RPS source detection station according to claim 1, characterized in that: The atmosphere inlet mechanism (4) includes two solenoid valves (42), the outlet of the solenoid valve (42) is reserved with an atmosphere outlet pipe, the inlet of the solenoid valve (42) is connected to a flow meter (41), and the inlet of the flow meter (41) is reserved with an atmosphere inlet pipe (43).

4. The RPS source detection station according to claim 2, characterized in that: The water circulation mechanism (5) includes a water cooling chamber (53), which covers the vacuum chamber (29). Two second tubes (54) are connected to the water cooling chamber (53), and the other end of each second tube (54) is connected to a diverter block (52).

5. The RPS source detection station according to claim 2, characterized in that: The frame (11) is equipped with an electrical control mechanism (3), which includes an industrial computer (31) and a compressed air control system (33). The industrial computer (31) is installed on one side of the frame (11), and the compressed air control system (33) is installed on the inner wall of one side of the frame (11).

6. The RPS source detection station according to claim 5, characterized in that: The compressed air control system (33) is electrically connected to the vacuum pump (22), the gate valve (25), the pre-valve (27), the pressure control valve (26), and the molecular pump (21), respectively. The industrial computer (31) is electrically connected to the compressed air control system (33).

7. The RPS source detection station according to claim 2, characterized in that: The vacuum chamber (29) is equipped with a thin film gauge (23) and a vacuum gauge (24).

8. The RPS source detection station according to claim 5, characterized in that: The electrical control mechanism (3) also includes an electrical control box (32), which is installed inside the frame (11).

9. The RPS source detection station according to claim 1, characterized in that: The bottom of the frame (11) is equipped with wheels (15).

10. An RPS source detection station according to claim 4, characterized in that: A ball valve (51) is installed at the bottom of the frame (11), and one end of the ball valve (51) is connected to the diverter block (52).

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