Large-size workpiece hoisting system for semiconductor equipment

Abstract

The utility model discloses a large-size workpiece hoisting system for semiconductor equipment. The large-size workpiece hoisting system comprises a trolley, a lifting frame, a hoisting tool, a hoisting bracket, a sliding rail and a lifting moving device, the sliding rail is installed on the hoisting support, the lifting moving device comprises a lifting seat, a lifting rod, a hoisting belt, a lifting driving mechanism, a translation seat and a translation driving mechanism, the translation seat is installed on the sliding rail, the translation driving mechanism and the lifting seat are fixed to the translation seat, the lifting rod is located under the lifting seat, and the hoisting belt is installed on the lifting seat. The lifting rod is connected with the lifting driving mechanism through a plurality of lifting belts; the lifting frame is installed under the front end of a sliding rail in the lifting support and can lift a lifting appliance in the cart upwards to be separated from the cart, lower hanging structures are installed at the two ends of the lifting appliance, and upper hanging structures matched with the lower hanging structures are arranged on the lifting rod. By means of the mode, the stability of hoisting and transferring can be improved, and the damage probability of workpieces is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment processing, and in particular to a large-size workpiece hoisting system for semiconductor equipment. Background Technology

[0002] Semiconductor processing demands high precision, thus placing high demands on the production of corresponding semiconductor processing equipment. For some large semiconductor processing equipment components, overhead cranes are typically used for hoisting and transferring them between different processes. However, existing overhead crane hoisting systems generally only have one or two hoisting points. During the hoisting process, the workpiece amplifies the vibrations generated by the crane's movement downwards, resulting in excessive workpiece swaying and instability when entering the processing station. This is especially true during electroplating, where the large swaying when placed in the electroplating tank can easily cause it to collide with surrounding surfaces, affecting the surface quality. Therefore, it is necessary to optimize the existing overhead crane hoisting system to improve the stability of the entire operation process and enhance the processing quality of semiconductor equipment components. Utility Model Content

[0003] The main technical problem solved by this utility model is to provide a large-size workpiece hoisting system for semiconductor equipment, which can improve the stability of hoisting and transportation and ensure the processing quality of the workpiece.

[0004] To solve the above-mentioned technical problems, the present invention provides a large-size workpiece hoisting system for semiconductor equipment. This system includes a trolley, a lifting frame, a hoisting device, a hoisting support, a slide rail, and a lifting and moving device. Two slide rails are symmetrically installed on both sides of the top of the hoisting support. The lifting and moving device includes a lifting seat, a lifting rod, a hoisting belt, a lifting drive mechanism, a translation seat, and a translation drive mechanism. The translation seat is mounted on the hoisting support along the slide rail. The translation drive mechanism is mounted on the translation seat and can drive the translation seat to reciprocate horizontally along the slide rail. The lifting seat is fixed to the translation seat. The lifting seat includes two symmetrically arranged side plates and a top plate connecting the tops of the two side plates. The lower end of the plate is also provided with a connecting bottom rod. The lifting drive mechanism is installed on the top plate. The lifting rod is located directly below the top plate. The top plate is provided with multiple sling holes. A lifting strap connecting the lifting rod and the lifting drive mechanism is installed in each sling hole. Triangular positioning blocks that are fixedly connected to the translation seat are symmetrically installed on the outer sides of the two side plates. The lifting device can be placed horizontally on the top of the trolley. The lifting frame is installed directly below the front end of the slide rail in the lifting bracket. The trolley can push the workpiece and the lifting device into the lifting frame. The lifting frame can lift the lifting device upward and detach it from the trolley. The two ends of the lifting device are provided with a lower hanging structure. The lifting rod is provided with an upper hanging structure that matches the lower hanging structure and a sling connection position that corresponds one-to-one with the position of the lifting strap.

[0005] In a preferred embodiment of this utility model, the lifting frame includes a lifting drive motor, a transmission roller, a transmission belt, and support walls. There are two support walls, symmetrically arranged on both sides of the front end of the hoisting bracket. Multiple connecting rods are provided on the rear sides of the two support walls. The distance between the two support walls matches the width of the trolley. Each support wall has symmetrically arranged vertical limiting rails. Each vertical limiting rail is equipped with a limiting slide block capable of moving up and down along the vertical limiting rail. The limiting slide block is equipped with a transmission belt clamp, and a lifting device is provided inside the limiting slide block. The support is provided with a drive roller that is symmetrically and rotatably mounted on the back of two support walls. Each end of the drive roller is provided with a synchronous pulley shaft. Each support wall is provided with a corresponding lifting guide frame at its top. There are two drive belts in total. One end of each drive belt is fixed to a drive belt clamp, and the other end is vertically upward and connected to the synchronous pulley shaft on the same side after being redirected by the corresponding lifting guide frame. The lifting drive motor is fixed to the back of the lifting frame by means of the connecting rod. The power output end of the lifting drive motor is connected to the middle of the drive roller through a right-angle reversing gear set. The lifting device includes a lifting rod, with two lower mounting structures symmetrically installed at both ends of the lifting rod. Each lower mounting structure includes a mounting seat and mounting blocks fixed inside the mounting seat. Each mounting seat has at least two mounting blocks, symmetrically distributed on both sides above the lifting rod. The outer end of the mounting seat is also equipped with a positioning block that matches the shape of the lifting device support. The upper mounting structure on the lifting rod includes a mounting plate, which is fixedly installed below the rod and can be inserted between the two mounting seats as the lifting rod moves, and is held in place by the mounting blocks.

[0006] In a preferred embodiment of this utility model, lifting rod limiting rails are symmetrically arranged on the inner sides of the two side plates of the lifting seat, and end plates are symmetrically installed at both ends of the lifting rod. Each end plate is provided with multiple sets of limiting posts that match the lifting rod limiting rails. A ball bearing is installed at the top of each limiting post, and the ball bearing extends into the corresponding lifting rod limiting rail.

[0007] In a preferred embodiment of the present invention, a sling pressure rod is rotatably installed in the sling hole on the top plate.

[0008] In a preferred embodiment of this utility model, the lifting drive mechanism includes a lifting drive roller and a synchronous lifting motor. There are two synchronous lifting motors installed opposite each other above the lifting seat. The lifting drive roller is located directly above the top plate. Both ends of the lifting drive roller are connected to the power output ends of the two synchronous lifting motors through couplings. The roller body of the lifting drive roller is provided with multiple lifting pulleys. Each lifting pulley is equipped with a lifting belt. The tail end of the lifting belt passes vertically downward through the corresponding lifting belt hole and connects to the lower part.

[0009] In a preferred embodiment of this utility model, a support column connected to the translation seat is installed below the body of the lifting drive motor.

[0010] In a preferred embodiment of this utility model, the translation seat includes two slides symmetrically mounted on two slide rails. A triangular positioning block is installed in the middle of the corresponding slide. The front ends of the two slides are connected together by a front connecting rod. A reinforcing rod is also provided between the front connecting rod and the lifting seat. A set of driven wheels is installed at the contact position between the front end of each slide and the rail surface of the corresponding slide rail. A set of driving wheels is installed at the contact position between the rear end of each slide and the rail surface of the corresponding slide rail. The translation drive mechanism includes a translation drive motor and a translation drive roller. The two ends of the translation drive roller are respectively connected to the driving wheel sets at the front ends of the two slides. The translation drive motor is fixed to the top plate. The power output end of the translation drive motor is connected to the middle of the translation drive roller through a right-angle reversing gear set. A protective housing is installed on the outer side of the translation drive roller. A front impact sensor is installed at the front end of each slide, and a rear impact sensor is installed at the rear end of each slide. A front rail clamping wheel set is installed below the front end of each slide, and a rear rail clamping wheel set is installed below the rear end of each slide.

[0011] The beneficial effects of this utility model are as follows: This utility model optimizes the structure of the horizontal moving mechanism and the vertical lifting mechanism of the existing semiconductor workpiece overhead crane hoisting system, and at the same time changes the lifting method to multi-point lifting. This not only improves the stability during the lifting and translation process, but also reduces the vibration of the lifting device during the hoisting process, thereby effectively improving the stability during the hoisting and transfer process. This reduces the probability of the workpiece colliding with surrounding objects due to vibration during the transfer process, improves the accuracy of placement in the processing position, and thus improves the processing quality of semiconductor equipment components. Attached Figure Description

[0012] Figure 1 This is a three-dimensional structural diagram of a preferred embodiment of the present invention;

[0013] Figure 2 This is a schematic diagram of the top structure in the illustrated embodiment;

[0014] Figure 3 This is a schematic diagram of the trolley being positioned in the embodiment shown;

[0015] Figure 4 This is a schematic diagram of the structure in which the lifting device is placed on the trolley in the embodiment shown;

[0016] Figure 5 This is a schematic diagram of the connection between the translation seat and the slide rail in the embodiment shown;

[0017] Figure 6 This is a schematic diagram of the workpiece lifting frame structure in the embodiment shown;

[0018] The components in the attached diagram are labeled as follows:

[0019] 1. Workpiece, 2. Trolley, 3. Lifting frame, 4. Plating tank, 5. Lifting tool, 6. Lifting bracket, 7. Slide rail, 8. Lifting seat, 9. Translation seat, 10. Lifting pulley, 11. Lifting drive roller, 12. Lifting rod, 13. Lifting belt, 14. Translation drive motor, 15. Synchronous lifting motor;

[0020] 301. Lifting drive motor; 302. Transmission roller; 303. Transmission belt; 304. Limiting slide; 305. Transmission belt chuck; 306. Lifting device support;

[0021] 501. Hanging rod; 502. Mounting bracket; 503. Mounting clip; 504. Positioning block;

[0022] 801. Side plate; 802. Top plate; 803. Connecting bottom rod; 804. Lifting strap hole; 805. Lifting strap pressure rod; 806. Triangular positioning block;

[0023] 901. Slide table; 902. Protective housing; 903. Front connecting rod; 904. Reinforcing rod; 905. Front impact sensor; 906. Rear impact sensor; 907. Front track clamping wheel assembly; 908. Rear track clamping wheel assembly; 909. Support column; 9010. Driving wheel; 9011. Driven wheel;

[0024] 1201. Pole body, 1202. Mounting plate, 1203. End plate, 1204. Limiting post, 1205. Sling connection position. Detailed Implementation

[0025] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0026] Please see Figures 1 to 6 The embodiments of this utility model include:

[0027] A large-size workpiece hoisting system for semiconductor equipment includes: a trolley 2, a lifting frame 3, a lifting device 5, a hoisting bracket 6, a slide rail 7, and a lifting and moving device. The slide rail 7 consists of two rails symmetrically installed on both sides of the top of the hoisting bracket 6. The lifting and moving device includes a lifting seat 8, a lifting rod 12, a hoisting belt 13, a lifting drive mechanism, a translation seat 9, and a translation drive mechanism. The translation seat 9 is mounted on the hoisting bracket 6 along the slide rail 7. The translation drive mechanism is mounted on the translation seat 9 and can drive the translation seat 9 to reciprocate horizontally along the slide rail 7. The lifting seat 8 is fixed to the translation seat 9. The lifting seat 8 includes two symmetrically arranged side plates 801 and a top plate 802 connecting the tops of the two side plates 801. A connecting bottom rod 803 is also provided at the lower end of the two side plates 801. The lifting drive mechanism is mounted on... On the top plate 802, the lifting rod 12 is located directly below the top plate 802. Four lifting holes 804 are symmetrically arranged on the top plate 802. A lifting strap 13 connecting the lifting rod 12 and the lifting drive mechanism is installed in each lifting hole 804. Triangular positioning blocks 806 fixedly connected to the translation seat 9 are symmetrically installed on the outer sides of the two side plates 801. The lifting device 5 can be placed horizontally on the top of the trolley 2. The lifting frame 3 is installed directly below the front end of the slide rail 7 in the lifting bracket 6. The trolley 1 can push the workpiece 1 and the lifting device 5 into the lifting frame 3. The lifting frame 3 can lift the lifting device 5 upward and detach it from the trolley 1. The lifting device 5 is equipped with a lower hanging structure at both ends. The lifting rod 1201 is provided with an upper hanging structure that matches the lower hanging structure and a lifting strap connection position 1205 that corresponds one-to-one with the position of the lifting strap.

[0028] The lifting frame 3 includes a lifting drive motor 301, a transmission roller 302, a transmission belt 303, and support walls. There are two support walls, symmetrically arranged on both sides of the front end of the hoisting bracket 6. Multiple connecting rods are installed on the rear sides of the two support walls. The distance between the two support walls matches the width of the trolley 1. Vertical limiting rails are symmetrically arranged inside the two support walls. A limiting slide 304, capable of moving up and down along the vertical limiting rail, is installed on each vertical limiting rail. A transmission belt clamp 305 is provided on the limiting slide 304, and a lifting support 306 is provided inside the limiting slide. The rollers 302 are symmetrically and rotatably mounted on the back of the two support walls. The two ends of the transmission rollers 302 are respectively provided with synchronous pulley shafts. Each support wall is provided with a corresponding lifting guide frame at the top. There are two transmission belts 303. One end of each transmission belt 303 is fixed on a transmission belt clamp 305, and the other end is vertically upward and connected to the synchronous pulley shaft on the same side after being redirected by the corresponding lifting guide frame. The lifting drive motor 301 is fixed to the back of the lifting frame 3 by means of the connecting rod. The power output end of the lifting drive motor 301 is connected to the middle of the transmission rollers 302 through a right-angle reversing gear set. The lifting device 4 includes a lifting rod 501. Two lower hanging structures are symmetrically installed at both ends of the lifting rod 501. Each lower hanging structure includes a hanging seat 502 and a hanging block 503 fixed inside the hanging seat 502. There are two hanging blocks 503 on each hanging seat 502, symmetrically distributed on both sides above the lifting rod 501. A positioning pressure block 504 matching the shape of the lifting device support 306 is also installed on the outer end of the hanging seat 502. The upper hanging structure on the rod body 1201 of the lifting rod 12 includes a hanging plate 1202. The hanging plate 1202 is fixedly installed below the rod body 1201 and can be inserted between the two hanging seats 502 as the lifting rod 12 moves, and is locked by the corresponding hanging block 503.

[0029] In this way, after the trolley 2 pushes the workpiece 1 into the lifting frame 3, the lifting drive motor 301 starts, which drives the transmission roller 302 to rotate, thereby pulling the transmission belt 303 and causing the two limit slide seats 304 on both sides to move upward simultaneously, driving the two lifting support seats 306 to move upward synchronously, lifting the positioning pressure blocks 504 at both ends of the lifting device 5 so that the lifting device 5 is separated from the trolley 2. Then, the synchronous lifting motor 15 drives the lifting drive roller 11 to rotate, causing the lifting rod 12 to move downward until the hanging plate 1202 on the rod body 1201 is just below the hanging clamp block 503 on the hanging seat 502. Then, the translation drive motor 14 drives the entire translation seat 9 to move to the front end of the slide rail 7. At this time, the hanging plate 1202 can just be inserted under the hanging clamp block 503. Then, the lifting rod 12 rises to raise the lifting device 5 and remove the workpiece 1 from the trolley 2.

[0030] The lifting seat 8 has symmetrically arranged lifting rod limiting rails on the inner sides of its two side plates 801. The lifting rod 12 has symmetrically installed end plates 1203 at both ends. Each end plate 1203 has multiple sets of limiting posts 1204 that match the lifting rod limiting rails. Each limiting post 1204 has a ball bearing installed at its top, extending into the corresponding lifting rod limiting rail. In this way, by using the limiting posts 1204, the lifting rod 12 will not swing horizontally when moving up and down within the lifting seat 8, thus improving the stability of the workpiece 1 transfer process.

[0031] A sling pressure bar 805 is rotatably installed in the sling hole 804 on the top plate 802. By installing the sling pressure bar, the lifting sling 13 is pressed tight when passing through the sling hole 804, thereby effectively preventing vibration of the lifting sling 13 after being subjected to lifting force and further improving the stability of the transfer process.

[0032] The lifting drive mechanism includes a lifting drive roller 11 and a synchronous lifting motor 15. Two synchronous lifting motors 15 are mounted opposite each other above the lifting seat 8. The lifting drive roller 11 is located directly above the top plate 802, and both ends are connected to the power output ends of the two synchronous lifting motors 15 via couplings. The lifting drive roller 11 has four lifting pulleys 10 on its roller body, and each pulley 10 is equipped with a lifting strap 13. The tail end of the lifting strap 13 passes vertically downward through a corresponding lifting hole 804 and connects to the lower part. A support column 909 connected to the translation seat 9 is installed below the lifting drive motor. In this way, the lifting drive mechanism, translation seat 9, and lifting seat 8 are connected as a whole, enabling stable and reliable lifting operations.

[0033] The translation seat 9 includes two slides 901 symmetrically mounted on two slide rails 7. The triangular positioning block 806 is installed in the middle of the corresponding slide 901. The front ends of the two slides 901 are connected together by a front connecting rod 903. A reinforcing rod 904 is also provided between the front connecting rod 903 and the lifting seat 8. A set of passive wheels 9011 are installed at the contact position between the front end of the slide 901 and the rail surface of the corresponding slide rail 7. A set of active wheels 9010 are installed at the contact position between the rear end of the slide 901 and the rail surface of the corresponding slide rail. The translation drive mechanism includes a translation drive motor 14 and a translation drive roller. The two ends of the translation drive roller are respectively connected to the active wheel sets 9010 at the front ends of the two slides 901. The translation drive motor 14 is fixed on the top plate 802. The power output end of the translation drive motor 14 is connected to the middle of the translation drive roller through a right-angle reversing gear set. A protective shell 902 is installed on the outside of the translation drive roller. Each slide 901 is equipped with a front impact sensor 905 at its front end and a rear impact sensor 906 at its rear end. A front track clamping wheel assembly 907 is installed below the front end of each slide 901, and a rear track clamping wheel assembly 908 is installed below the rear end of each slide 901. Through this method, the translation seat 9 can move horizontally back and forth on the slide rail 7 as needed. The use of the front track clamping wheel assembly 907 and the rear track clamping wheel assembly 908 effectively improves the lateral stability of the slide 901's movement, while the front impact sensor 905 and the rear impact sensor 906 can promptly issue an emergency stop signal when encountering obstacles, preventing impact damage.

[0034] This implementation is mainly used for the transfer of large-size semiconductor workpieces 1 in different processing steps, especially the electroplating process. During the transfer process, a special trolley 1 is first pushed together with the workpiece and the assembled fixture 5 into the lifting frame 3. The lifting frame 3 lifts the fixture 5 upwards. Then, the lifting rod 12 is lowered to the corresponding position and then moved horizontally to the front end of the slide rail 7, just enough to lock the mounting plate 1202 into the mounting block 503. Then, the lifting rod 12 rises up to lift the fixture 5 and the workpiece 1 together, and moves horizontally backwards to above the plating tank 4. Then, the lifting rod 12 falls down to put the workpiece into the plating tank. After the electroplating is completed, the lifting rod 12 is lifted up to transport the workpiece 1 to the next processing step.

[0035] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A large-size workpiece hoisting system for semiconductor equipment, characterized in that, The semiconductor equipment large-size workpiece hoisting and processing system includes: a trolley, a lifting frame, a lifting tool, a hoisting bracket, a slide rail, and a lifting and moving device; There are two slide rails, symmetrically installed on both sides of the top of the hoisting bracket. The lifting and moving device includes a lifting seat, a lifting rod, a hoisting belt, a lifting drive mechanism, a translation seat, and a translation drive mechanism. The translation seat is installed on the hoisting bracket based on the slide rail. The translation drive mechanism is installed on the translation seat and can drive the translation seat to move horizontally back and forth along the slide rail. The lifting seat is fixed on the translation seat. The lifting seat includes two symmetrically arranged side plates and a top plate connecting the top of the two side plates. The lower end of the two side plates is also provided with a connecting bottom rod. The lifting drive mechanism is installed on the top plate. The lifting rod is located directly below the top plate. The top plate is provided with multiple hoisting belt holes. A hoisting belt connecting the lifting rod and the lifting drive mechanism is installed in each hoisting belt hole. Triangular positioning blocks that are fixedly connected to the translation seat are symmetrically installed on the outer side of the two side plates. The lifting device can be placed horizontally on top of the trolley. The lifting frame is installed directly below the front end of the slide rail inside the lifting bracket. The trolley can push the workpiece and the lifting device into the lifting frame. The lifting frame can lift the lifting device upward and detach it from the trolley. The lifting device has a lower hanging structure installed at both ends. The lifting rod has an upper hanging structure that matches the lower hanging structure and a sling connection position that corresponds one-to-one with the position of the lifting sling.

2. The semiconductor equipment large-size workpiece hoisting system according to claim 1, characterized in that, The lifting frame includes a lifting drive motor, transmission rollers, transmission belts, and support walls. There are two support walls, symmetrically arranged on both sides of the front end of the hoisting bracket. Multiple connecting rods are provided on the rear side of the two support walls. The distance between the two support walls matches the width of the trolley. Each support wall has a symmetrically arranged vertical limiting rail. A limiting slide that can move up and down along the vertical limiting rail is installed on each vertical limiting rail. The limiting slide has a transmission belt clamp. A lifting device support is provided inside the limiting slide. The transmission rollers are symmetrically and rotatably mounted on the back of the two support walls at both ends. Synchronous pulleys are provided at both ends of the transmission rollers. A corresponding lifting guide frame is provided at the top of each support wall. There are two transmission belts. One end of each transmission belt is fixed to a transmission belt clamp, and the other end is vertically upward and changed direction by the corresponding lifting guide frame before connecting to the synchronous pulley on the same side. The lifting drive motor is fixed to the back of the lifting frame by the connecting rods. The power output end of the lifting drive motor is connected to the middle of the transmission roller through a right-angle reversing gear set.

3. The semiconductor equipment large-size workpiece hoisting system according to claim 2, characterized in that, The lifting device includes a lifting rod, with two lower mounting structures symmetrically installed at both ends of the lifting rod. Each lower mounting structure includes a mounting seat and mounting blocks fixed inside the mounting seat. Each mounting seat has at least two mounting blocks, symmetrically distributed on both sides above the lifting rod. The outer end of the mounting seat is also equipped with a positioning block that matches the shape of the lifting device support. The upper mounting structure on the lifting rod includes a mounting plate, which is fixedly installed below the rod and can be inserted between the two mounting seats as the lifting rod moves, and is held in place by the mounting blocks.

4. The semiconductor equipment large-size workpiece hoisting system according to claim 1, characterized in that, The lifting seat has symmetrical lifting rod limiting rails arranged on the inner side of the two side plates. The lifting rod has end plates symmetrically installed at both ends. Each end plate has multiple sets of limiting posts that match the lifting rod limiting rails. Each limiting post has a ball bearing installed at its top, and the ball bearing extends into the corresponding lifting rod limiting rail.

5. The semiconductor equipment large-size workpiece hoisting system according to claim 1, characterized in that, A sling pressure rod is rotatably installed in the sling hole on the top plate.

6. The semiconductor equipment large-size workpiece hoisting system according to claim 1, characterized in that, The lifting drive mechanism includes a lifting drive roller and a synchronous lifting motor. There are two synchronous lifting motors, which are installed opposite each other above the lifting seat. The lifting drive roller is located directly above the top plate. Both ends of the lifting drive roller are connected to the power output ends of the two synchronous lifting motors through couplings. The roller body of the lifting drive roller is provided with multiple lifting wheels, and a lifting belt is installed on each lifting wheel. The tail end of the lifting belt passes vertically downward through the corresponding lifting hole and connects to the bottom.

7. The semiconductor equipment large-size workpiece hoisting system according to claim 1, characterized in that, A support column connected to the translation seat is installed below the body of the lifting drive motor.

8. The semiconductor equipment large-size workpiece hoisting system according to claim 1, characterized in that, The translation base includes two slides symmetrically mounted on two slide rails. The triangular positioning block is installed in the middle of the corresponding slide. The front ends of the two slides are connected together by a front connecting rod. A reinforcing rod is also provided between the front connecting rod and the lifting base. A set of driven wheels is installed at the contact position between the front end of the slide and the rail surface of the corresponding slide. A set of driving wheels is installed at the contact position between the rear end of the slide and the rail surface of the corresponding slide. The translation drive mechanism includes a translation drive motor and a translation drive roller. The two ends of the translation drive roller are respectively connected to the driving wheel sets at the front ends of the two slides. The translation drive motor is fixed on the top plate. The power output end of the translation drive motor is connected to the middle of the translation drive roller through a right-angle reversing gear set. A protective shell is installed on the outside of the translation drive roller.

9. The semiconductor equipment large-size workpiece hoisting system according to claim 8, characterized in that, Each slide is equipped with a front impact sensor at the front end and a rear impact sensor at the rear end.

10. The semiconductor equipment large-size workpiece hoisting system according to claim 8, characterized in that, Each slide is equipped with a front rail clamping wheel assembly at the lower front end and a rear rail clamping wheel assembly at the lower rear end.

Images