Air inlet structure and crystal growing furnace

Abstract

The utility model provides a gas inlet structure and a crystal growing furnace, and relates to the technical field of silicon carbide crystal growing, the gas inlet structure provided by the utility model comprises a gas inlet pipe and a light transmitting mirror, the gas inlet pipe is provided with a main gas inlet channel and an auxiliary gas inlet channel which are independently arranged, and the main gas inlet channel and the auxiliary gas inlet channel extend along the axial direction of the gas inlet pipe; the light transmitting mirror is installed on the air inlet pipe and located at one end of the auxiliary air inlet channel. The gas inlet structure provided by the utility model can ensure that gas is more uniformly distributed in the production cavity, and gas entering from the auxiliary gas inlet channel can also prevent ash from depositing on the light transmitting mirror; the air inlet function of the air inlet pipe, the auxiliary monitoring function serving as a monitoring channel, the anti-coating function of preventing silicon carbide steam from coating a light transmitting mirror and the blowing function of preventing slag ash and dust from contaminating the light transmitting mirror are organically combined.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide crystal growth technology, and in particular to an air intake structure and a crystal growth furnace. Background Technology

[0002] Silicon carbide, as an important wide-bandgap semiconductor material, has shown great application potential in power electronics, microwave radio frequency, and optoelectronic devices due to its excellent physical and chemical properties. In recent years, with the increasing demand for high-performance semiconductor devices, silicon carbide crystal fabrication technology has received widespread attention.

[0003] The main methods for growing silicon carbide crystals include physical vapor transport (PVT), solution methods, and high-temperature chemical vapor deposition (HTCVD). Among these, PVT is currently the most commonly used industrial method for growing single-crystal silicon carbide. In PVT, silicon carbide crystals are generated using a crystal growth furnace. Specifically, the process takes place in a sealed graphite crucible. The raw material powder is placed at the bottom of the crucible, and under the high-temperature environment provided by the crystal growth furnace, the raw material sublimates to form a gaseous substance that migrates upwards and recrystallizes at the slightly cooler seed crystal, thus achieving the growth of silicon carbide crystals.

[0004] The bottom of the crystal growth furnace is equipped with an air inlet structure. The function of this structure is to introduce a specific gas, such as argon or other inert gases, into the growth chamber as a carrier gas. This serves two purposes: firstly, it regulates the pressure within the growth chamber; secondly, it promotes the volatilization of the source material and prevents harmful impurities from entering the growth area, thus ensuring the quality and purity of the silicon carbide crystal. However, existing air inlet structures typically use a single circular cross-section tube, which has a limited function and cannot guarantee a more uniform gas distribution within the production chamber. Utility Model Content

[0005] The purpose of this invention is to provide an air intake structure that ensures a more uniform gas distribution within the production chamber. This structure organically combines air intake functionality, auxiliary monitoring functionality as a monitoring channel, anti-coating functionality to prevent silicon carbide vapor from depositing a coating on the lens, and a purging function to prevent slag and dust from contaminating the lens. Additionally, a crystal growth furnace incorporating the aforementioned air intake structure is also provided.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] In a first aspect, the present invention provides an air intake structure, including an air intake pipe and a light-transmitting mirror. The air intake pipe has an independently configured main air intake channel and an auxiliary air intake channel. Both the main air intake channel and the auxiliary air intake channel extend along the axial direction of the air intake pipe. The light-transmitting mirror is installed on the air intake pipe and located at one end of the auxiliary air intake channel.

[0008] Furthermore, the axis of the auxiliary air intake channel coincides with the axis of the air intake pipe, and the main air intake channel is located around the auxiliary air intake channel.

[0009] Furthermore, the intake pipe includes a first pipe body and a second pipe body sleeved outside the first pipe body and connected to the first pipe body. The first pipe body forms the auxiliary intake channel, and the second pipe body and the first pipe body form the main intake channel. The light-transmitting lens is connected to the first pipe body.

[0010] Furthermore, the air intake pipe also includes a connector, which is connected to one end of the first pipe body and presses the light-transmitting lens onto the end face of the first pipe body.

[0011] Furthermore, a sealing element is provided between the light-transmitting mirror and the end face of the first tube, and / or an elastic pad is provided between the side of the light-transmitting mirror facing away from the end face of the first tube and the connecting seat.

[0012] Furthermore, the first tube and the second tube have an integral structure.

[0013] Furthermore, the auxiliary air intake channel has an auxiliary air intake port at one end near the light-transmitting lens, and an auxiliary air outlet at the other end away from the light-transmitting lens;

[0014] The main air intake channel has a main air inlet at the end closest to the light-transmitting mirror, and a main air outlet at the end furthest from the light-transmitting mirror.

[0015] Furthermore, the first pipe body has a first air inlet communicating with the auxiliary air inlet and a second air inlet communicating with the main air inlet.

[0016] Secondly, this utility model also provides a crystal growth furnace, including a furnace body and the air intake structure described above. The furnace body has a growth cavity, and the main air intake channel and the auxiliary air intake channel are both connected to the growth cavity.

[0017] Furthermore, the furnace body is provided with a heat-insulating base, the heat-insulating base has a first air intake channel communicating with the auxiliary air intake channel, and the heat-insulating base and the furnace body form a second air intake channel communicating with the main air intake channel.

[0018] The air intake structure and crystal growth furnace provided by this utility model can produce the following beneficial effects:

[0019] In the air intake structure provided by the first aspect of this utility model, the air intake pipe includes a main air intake channel and an auxiliary air intake channel. Gas can enter the growth chamber through different air intake channels to ensure a more uniform distribution of gas in the production chamber. At the same time, since the monitoring mirror is located at one end of the auxiliary air intake channel, the auxiliary air intake channel can also serve as a monitoring channel. Monitoring equipment such as infrared pyrometers can monitor the environmental state in the growth chamber through the light transmission mirror and the auxiliary air intake channel. The gas entering through the auxiliary air intake channel can also purge the light transmission mirror and prevent silicon carbide vapor from depositing a film on the light transmission mirror.

[0020] Compared with the prior art, the air intake structure provided by the first aspect of this utility model can ensure a more uniform distribution of gas in the production chamber. The gas entering through the auxiliary air intake channel can also prevent ash and slag from depositing on the light transmission lens and prevent silicon carbide vapor from coating on the light transmission lens, thus organically combining the air intake function, auxiliary monitoring function as a monitoring channel, anti-coating function and purging function of the air intake pipe.

[0021] The crystal growth furnace provided in the second aspect of this utility model has the air intake structure provided in the first aspect of this utility model, and thus has all the beneficial effects of the air intake structure provided in the first aspect of this utility model. Attached Figure Description

[0022] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0023] Figure 1 A partial cross-sectional schematic diagram of a crystal growth furnace provided for an embodiment of this utility model;

[0024] Figure 2 for Figure 1 Enlarged view of point A;

[0025] Figure 3 This is a three-dimensional structural diagram of an air intake structure connected to an infrared pyrometer, provided as an embodiment of the present invention.

[0026] Icons: 1 - Inlet pipe; 11 - Main inlet channel; 12 - Auxiliary inlet channel; 13 - First pipe body; 131 - First inlet hole; 132 - Second inlet hole; 14 - Second pipe body; 15 - Connecting seat; 16 - Sealing element; 17 - Elastic pad; 2 - Light transmission mirror; 3 - Furnace body; 31 - Growth chamber; 32 - Insulation barrel; 33 - Insulation plate; 34 - Furnace body flange; 4 - Insulation base; 41 - First inlet channel; 42 - Second inlet channel; 5 - First inlet pipe; 6 - Second inlet pipe; 7 - Infrared pyrometer. Detailed Implementation

[0027] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0028] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0030] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.

[0031] The first aspect of this utility model provides an air intake structure, such as... Figure 1 and Figure 2As shown, it includes an intake pipe 1 and a light-transmitting mirror 2. The intake pipe 1 has an independently set main intake channel 11 and an auxiliary intake channel 12. Both the main intake channel 11 and the auxiliary intake channel 12 extend along the axial direction of the intake pipe 1. The light-transmitting mirror 2 is installed on the intake pipe 1 and is located at one end of the auxiliary intake channel 12.

[0032] like Figure 1 As shown, in the air intake structure provided by the first aspect of this utility model, gas can not only enter the growth chamber 31 through the main air intake channel 11, but also through the auxiliary air intake channel 12, ensuring a more uniform distribution of gas within the growth chamber 31. While the auxiliary air intake channel is intakeing gas, it can also purge the light transmission mirror, preventing ash and slag in the growth chamber 31 from depositing on the light transmission mirror after entering the auxiliary air intake channel and preventing silicon carbide vapor from coating on the light transmission mirror. At the same time, monitoring devices such as infrared pyrometers can monitor the environmental state within the growth chamber 31 through the light transmission mirror and the auxiliary air intake channel. The air intake pipe 1 not only has an air intake function, but also an auxiliary monitoring function and an anti-coating function.

[0033] In the above embodiments, since both the main intake channel 11 and the auxiliary intake channel 12 extend along the axial direction of the intake pipe 1, the main intake channel 11 and the auxiliary intake channel 12 are located to the side of each other within the intake pipe 1.

[0034] In alternative implementations, such as Figure 1 As shown, the axis of the auxiliary air intake channel 12 coincides with the axis of the intake pipe 1, that is, the auxiliary air intake channel 12 is formed in the middle of the intake pipe 1, and the main air intake channel 11 is located on the periphery of the auxiliary air intake channel 12.

[0035] In the above implementation, since the axis of the auxiliary air intake channel 12 coincides with the axis of the air intake pipe 1, it is convenient for the monitoring equipment to monitor the environmental status inside the growth chamber through the light transmission lens 2 and the auxiliary air intake channel 12.

[0036] The main intake passage 11 and the auxiliary intake passage 12 can be circular, rectangular, elliptical or other irregular cross-sections, or they can be annular cross-sections. In other words, the cross-sectional shape of the main intake passage 11 and the auxiliary intake passage 12 is not limited to one type.

[0037] In an optional embodiment, to facilitate the processing of the intake pipe 1, such as... Figure 1 and Figure 2 As shown, the intake pipe 1 includes a first pipe body 13 and a second pipe body 14 sleeved on the outside of the first pipe body 13 and connected to the first pipe body 13. The first pipe body 13 forms an auxiliary intake channel 12, and the second pipe body 14 and the first pipe body 13 form a main intake channel 11. The light-transmitting lens 2 is connected to the first pipe body 13.

[0038] In the above embodiments, the first tube 13 can be directly enclosed to form the auxiliary air intake channel 12, which facilitates the formation of the auxiliary air intake channel 12. On this basis, the second tube 14 is sleeved on the outside of the first tube 13 and forms the main air intake channel 11 between the second tube 13 and the first tube 13. On the one hand, it facilitates the formation of the main air intake channel 11, and on the other hand, it can form the main air intake channel 11 with an annular cross section. The main air intake channel 11 has a larger flow area, and the gas can quickly enter the growth chamber 31.

[0039] The first tube 13 can be fixed to the outside of the second tube 14 by welding or other means. Preferably, the first tube 13 and the second tube 14 have an integral structure.

[0040] The first tube body 13 and the second tube body 14 have an integrated structure, which makes it easier to process the intake pipe 1. For example, the intake pipe 1 can be a solid tube body. The auxiliary intake channel 12 can be formed by opening a hole from one end of the intake pipe 1 to the other end. The main intake channel 11 can be formed by opening an annular blind hole from one end of the intake pipe 1 to the other end.

[0041] In an optional embodiment, the auxiliary air intake channel 12 has an auxiliary air inlet at one end near the light transmission mirror 2 and an auxiliary air outlet at the other end away from the light transmission mirror 2. While the auxiliary air inlet is intake, it can purge the light transmission mirror 2, ensuring that the monitoring equipment can monitor the environmental state inside the growth chamber 31 through the light transmission mirror 2, while preventing silicon carbide vapor from depositing on the light transmission mirror.

[0042] like Figure 1 As shown, the first tube 13 has a first air inlet 131 that communicates with the auxiliary air inlet, and gas can enter the auxiliary air inlet through the first air inlet 131.

[0043] The aforementioned first air inlet 131 can extend radially along the first tube 13 to reduce the gas flow path.

[0044] like Figure 1 As shown, a first air inlet pipe 5 is connected to the first air inlet 131, and the first air inlet pipe 5 can guide external gas into the first air inlet 131.

[0045] In an optional embodiment, the main air intake channel 11 has a main air inlet at one end near the light-transmitting mirror 2 and a main air outlet at the other end away from the light-transmitting mirror 2. Gas can enter the main air intake channel 11 through the main air inlet and finally enter the growth chamber 31 through the main air outlet.

[0046] Specifically, when the cross-section of the main intake channel 11 is annular, multiple main exhaust ports can be configured, and the multiple main exhaust ports are distributed around the axis of the main intake channel 11.

[0047] like Figure 1As shown, the first tube 13 has a second air inlet 132 that communicates with the main air inlet, and gas can enter the main air inlet through the second air inlet 132.

[0048] The aforementioned second air inlet 132 may include a first extension extending radially along the first tube 13 and a second extension extending axially along the first tube 13, the second extension being connected between the first extension and the main air intake passage 11.

[0049] like Figure 1 As shown, a second air inlet pipe 6 is connected to the first extension of the second air inlet 132, and the second air inlet pipe 6 can guide external gas into the second air inlet 132.

[0050] In alternative implementations, such as Figure 2 As shown, the intake pipe 1 also includes a connecting seat 15, which is connected to one end of the first pipe body 13 and presses the light transmission lens 2 onto the end face of the first pipe body 13.

[0051] The above arrangement facilitates the connection between the light-transmitting lens 2 and the first tube 13, while ensuring the connection strength of the light-transmitting lens 2.

[0052] To ensure a seal between the light-transmitting lens 2 and the first tube 13, a sealing element 16 is provided between the end faces of the light-transmitting lens 2 and the first tube 13.

[0053] The sealing element 16 can be an O-ring, which uses its own elasticity to ensure the seal between the light-transmitting lens 2 and the first tube 13.

[0054] To facilitate the radial positioning of the seal 16 relative to the first tube 13, the end face of the first tube 13 may be recessed with a groove for installing the seal 16.

[0055] In an optional embodiment, an elastic pad 17 is provided between the side of the light-transmitting mirror 2 facing away from the end face of the first tube 13 and the connecting seat 15. The elastic pad 17 can prevent wear between the light-transmitting mirror 2 and the connecting seat 15.

[0056] In an optional implementation, a monitoring device can be connected to the bottom end of the intake pipe 1, such as... Figure 3 As shown, the monitoring device can be an infrared pyrometer 7, which can monitor the temperature inside the growth chamber 31 through the light-transmitting mirror 2 and the auxiliary air intake channel 12.

[0057] A second aspect of this utility model provides a crystal growth furnace, such as... Figure 1 As shown, the crystal growth furnace provided in the second aspect of this utility model includes a furnace body 3 and the above-mentioned air intake structure. The furnace body 3 has a growth cavity 31, and the main air intake channel 11 and the auxiliary air intake channel 12 are both connected to the growth cavity 31.

[0058] During use, the gas can enter the growth chamber 31 through the main intake channel 11 and the auxiliary intake channel 12 respectively, ensuring a more uniform gas distribution within the growth chamber 31.

[0059] In addition, the crystal growth furnace provided by the second aspect of this utility model has the air intake structure provided by the embodiment of the first aspect of this utility model, thereby having all the beneficial effects of the air intake structure provided by the embodiment of the first aspect of this utility model.

[0060] Specifically, such as Figure 1 As shown, the furnace body 3 has an insulation barrel 32 inside, which can play the role of heat preservation and heat insulation. The bottom of the furnace body 3 is equipped with a furnace body flange 34. The furnace body 3 has an insulation plate 33 connected to the furnace body flange 34 inside. The air inlet pipe 1 can be connected to the middle position of the furnace body flange 34.

[0061] In alternative implementations, such as Figure 1 As shown, the furnace body 3 is provided with a heat insulation base 4. The heat insulation base 4 has a first air intake channel 41 that is connected to the auxiliary air intake channel 12. The first air intake channel 41 extends along the axial direction of the heat insulation base 4 and its axis coincides with the axis of the heat insulation base 4 and the axis of the auxiliary air intake channel 12.

[0062] In the above embodiment, since the first air intake channel 41 extends along the axial direction of the heat insulation base 4 and its axis coincides with the axis of the heat insulation base 4 and the axis of the auxiliary air intake channel 12, it is convenient to directly guide the gas in the auxiliary air intake channel 12 to the middle of the growth chamber 31. At the same time, it also enables the infrared pyrometer 7 to monitor the temperature in the middle of the growth chamber 31, and the temperature monitored by the infrared pyrometer 7 is more accurate.

[0063] In alternative implementations, such as Figure 1 As shown, a second air intake channel 42 is formed between the periphery of the heat insulation base 4 and the furnace body 3. The second air intake channel 42 can be connected to the main air intake channel 11 through the rotary channel at the bottom of the furnace body 3.

[0064] In the above embodiments, the second air intake channel 42 is used in conjunction with the first air intake channel 41, so that the gas can not only enter the growth chamber 31 from the middle of the heat insulation base 4, but also enter the growth chamber 31 from the edge of the heat insulation base 4, ensuring that the gas can be more evenly distributed in the growth chamber 31.

[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. An air intake structure, characterized in that, It includes an air intake pipe (1) and a light transmission lens (2). The air intake pipe (1) has an independently set main air intake channel (11) and an auxiliary air intake channel (12). The main air intake channel (11) and the auxiliary air intake channel (12) both extend along the axial direction of the air intake pipe (1). The light transmission lens (2) is installed on the air intake pipe (1) and located at one end of the auxiliary air intake channel (12).

2. The intake structure according to claim 1, characterized in that, The axis of the auxiliary air intake channel (12) coincides with the axis of the air intake pipe (1), and the main air intake channel (11) is located on the periphery of the auxiliary air intake channel (12).

3. The intake structure according to claim 1, characterized in that, The air intake pipe (1) includes a first pipe body (13) and a second pipe body (14) sleeved on the outside of the first pipe body (13) and connected to the first pipe body (13). The first pipe body (13) forms the auxiliary air intake channel (12), and the second pipe body (14) and the first pipe body (13) form the main air intake channel (11). The light-transmitting lens (2) is connected to the first pipe body (13).

4. The intake structure according to claim 3, characterized in that, The air intake pipe (1) also includes a connecting seat (15), which is connected to one end of the first pipe body (13) and presses the light-transmitting lens (2) onto the end face of the first pipe body (13).

5. The intake structure according to claim 4, characterized in that, A sealing element (16) is provided between the light-transmitting mirror (2) and the end face of the first tube (13), and / or an elastic pad (17) is provided between the side of the light-transmitting mirror (2) away from the end face of the first tube (13) and the connecting seat (15).

6. The intake structure according to claim 3, characterized in that, The first tube (13) and the second tube (14) have an integral structure.

7. The intake structure according to claim 3, characterized in that, The auxiliary air intake channel (12) has an auxiliary air intake port at one end near the light-transmitting mirror (2), and an auxiliary air outlet at the other end away from the light-transmitting mirror (2); The main air intake channel (11) has a main air inlet at one end near the light-transmitting mirror (2), and a main air outlet at the other end away from the light-transmitting mirror (2).

8. The intake structure according to claim 7, characterized in that, The first tube (13) has a first air inlet (131) that communicates with the auxiliary air inlet and a second air inlet (132) that communicates with the main air inlet.

9. A crystal growth furnace, characterized in that, The furnace includes a furnace body (3) and an air intake structure as described in any one of claims 1-8, wherein the furnace body (3) has a growth chamber (31), and the main air intake channel (11) and the auxiliary air intake channel (12) are both connected to the growth chamber (31).

10. The crystal growth furnace according to claim 9, characterized in that, The furnace body (3) is provided with a heat-insulating base (4), which has a first air intake channel (41) connected to the auxiliary air intake channel (12), and a second air intake channel (42) connected to the main air intake channel (11) is formed between the heat-insulating base (4) and the furnace body (3).

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