Secondary ion mass spectrometry sample holder

Abstract

The utility model discloses a secondary ion mass spectrum sample holder which comprises bases and a back plate, the back plate is located in the base, the back plate and the base are detachably connected through bolts on the side face of the base, the upper surface of the base is fixedly connected with a panel, the back plate is provided with a spring, and the spring is fixedly connected with the panel. And the spring is used for jacking up a sample and fixing the sample on the bottom surface of the panel. The sample loading device is suitable for loading small-size secondary ion mass spectrometry samples, the size of the samples does not need to be enlarged through bonding, test errors caused by the bonding process are reduced, the pretreatment and loading time of the samples is saved, and equipment pollution caused by organic glue in the bonding process is prevented.

Description

Technical Field

[0001] This utility model belongs to the field of secondary ion mass spectrometry testing technology, specifically relating to a secondary ion mass spectrometry sample holder. Background Technology

[0002] Secondary ion mass spectrometry (SIMS) is a highly sensitive surface analysis technique primarily used for trace element and composition analysis of solid materials. Under high vacuum conditions, a primary ion beam, accelerated, purified, and focused to a certain energy, bombards the sample surface, causing atoms or molecules on the sample surface to sputter out. These sputtered particles contain information about various elements and compounds on the sample surface. A portion of these particles are ionized into secondary ions, which are then analyzed by a mass analyzer to obtain information such as the elemental composition, isotopic distribution, and molecular structure of the sample surface.

[0003] Existing technologies for semiconductor chips, lasers, or photovoltaic energy devices use samples that are too small to be placed directly on conventional secondary ion mass spectrometry sample holders. This requires bonding to enlarge the sample size. However, when the bonded sample is loaded onto the sample holder, it is difficult to keep its surface level with that of standard samples, blank samples, and other samples tested in the same batch, which increases the testing error. In addition, the sample bonding process adds extra pretreatment time and detection cycle, and the organic adhesive used in the bonding process may cause equipment contamination. Utility Model Content

[0004] The purpose of this invention is to propose a secondary ion mass spectrometry sample holder to solve the problem that samples with too small a size are not easy to fix in the prior art.

[0005] Therefore, this utility model provides a secondary ion mass spectrometry sample holder, including a base and a back plate. The back plate is located inside the base and is detachably connected to the base by bolts on the side of the base. A panel is fixedly connected to the upper surface of the base, and a spring is provided on the back plate. The spring is used to lift and fix the sample to the bottom surface of the panel.

[0006] Preferably, the panel includes a sample viewing window that accommodates samples of different shapes and sizes for observing and testing samples of different sizes.

[0007] Preferably, the sample window is shaped as one or more of a circle, rectangle, triangle, or polygon.

[0008] Preferably, the back plate is provided with a plurality of fixing positions, the spring is on the fixing positions, and the fixing positions correspond one-to-one with the sample viewing window.

[0009] Preferably, the spring is fixedly connected to the fixed position.

[0010] Preferably, the spring is detachably connected to the fixing position.

[0011] Preferably, the panel is provided with an electron gun adjustment hole for adjusting the electron gun component of the instrument.

[0012] Preferably, a sample introduction guide rail is provided on the side wall of the base, and the guide rail is matched with the storage chamber and analysis chamber of the secondary ion mass spectrometer used.

[0013] Preferably, one end of the base is provided with a sample inlet connection component for connecting with the secondary ion mass spectrometry equipment used to realize the entry and exit of the sample holder.

[0014] Preferably, the sample injection connection component is detachably connected to the base by bolts.

[0015] Beneficial effects:

[0016] 1. This utility model provides a secondary ion mass spectrometry sample holder, which is suitable for loading small-sized secondary ion mass spectrometry samples. It eliminates the need to expand the sample size through bonding, reduces testing errors caused by the bonding process, saves sample pretreatment and loading time, and prevents equipment contamination caused by organic adhesives during the bonding process.

[0017] 2. The fixed spring can precisely lift and press the sample onto the viewing window, which facilitates sample fixation and reduces the risk of sample tilting or even the sample and spring falling into the equipment due to the movement of the test position after the sample enters the instrument.

[0018] 3. Samples of different sizes and shapes can be tested through windows of different sizes and shapes. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of a secondary ion mass spectrometry sample holder according to Embodiment 1 of the present invention.

[0021] Figure 2 A cross-sectional view of Embodiment 1 of a secondary ion mass spectrometer sample holder provided by this utility model.

[0022] In the figure, 1-base, 11-sample inlet guide rail, 12-sample inlet connection component, 2-back plate, 21-fixed position, 3-panel, 31-sample viewing window, 32-electron gun adjustment hole, 4-spring. Detailed Implementation

[0023] The following detailed description of preferred embodiments of the present invention, along with the included examples, will make the content of the present invention more readily understood. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. In case of any conflict, the definitions in this specification shall prevail.

[0024] Example 1:

[0025] Provided such as Figures 1-2 The secondary ion mass spectrometer sample holder shown includes a base 1 and a back plate 2. The back plate 2 is located inside the base 1. The back plate 2 and the base 1 are detachably connected by bolts on the side of the base 1. A panel 3 is fixedly connected to the upper surface of the base 1. A spring 4 is provided on the back plate 2. The spring 4 is used to lift the sample and fix it to the bottom surface of the panel 3.

[0026] Panel 3 includes sample viewing windows 31 that accommodate samples of different shapes and sizes for observing and testing samples of varying sizes. In one embodiment, the base 1 is made of highly conductive stainless steel, combining mechanical strength and corrosion resistance, making it suitable for vacuum testing environments. Panel 3 is made of high-purity tantalum, exhibiting high corrosion resistance and toughness, and a low coefficient of thermal expansion, making it suitable for vacuum testing environments. Panel 3 is a flat circular piece with a diameter of 24-28 cm, connected to the sample holder base 1 by spot welding. Different samples can be observed and tested through the sample viewing windows 31 with different sample shapes and sizes.

[0027] Panel 3 is equipped with an electron gun adjustment hole 32 for adjusting the electron gun components of the instrument. The electron gun adjustment hole 32 is used to assist in adjusting the electron gun components of the secondary ion mass spectrometer. For samples with poor conductivity, the electron gun of the instrument is used to neutralize the charge and eliminate test errors.

[0028] The sample window 31 can be one or more of the following shapes: circular, rectangular, triangular, or polygonal. In one embodiment, the size of the sample window 31 is between 0.25mm and 3mm to accommodate different samples. For special samples, the panel 3 and the windows on the panel 3 can be customized in advance for replacement. Multiple sample windows 31 can support the simultaneous loading of samples of different sizes or shapes, enabling efficient batch testing.

[0029] The back plate 2 has several fixing positions 21, and the spring 4 is located on each fixing position 21, with each fixing position 21 corresponding to a sample viewing window 31. In one embodiment, the spring 4 and the fixing position 21 are fixedly connected by welding. In another embodiment, the spring 4 and the fixing position 21 are detachably connected by bolts, allowing the spring 4 to be fixedly installed or removed. Optionally, a fixing plate is provided on the top of the spring 4 to press the sample firmly. The fixing plate on the top of the spring 4 uses elastic pressure to keep the sample tightly against the bottom surface of the viewing window, ensuring the optical flatness of the test surface.

[0030] A sample introduction guide rail 11 is provided on the side wall of the base 1, and the guide rail is matched with the position of the storage chamber and analysis chamber of the secondary ion mass spectrometer. The sample introduction guide rail 11 is used for the smooth entry and exit of the sample rack and its placement in the storage chamber and analysis chamber of the secondary ion mass spectrometer. The bottom dimensions of the panel 3 of the base 1 are precisely matched with the back plate 2 to ensure a stable fit between the back plate 2 and the base 1 and sample support during loading and unloading. The back plate 2 is nested inside the base 1, forming a closed structure with the base 1 to avoid external contamination.

[0031] One end of the base 1 is provided with a sample introduction connection component 12 for connecting to the secondary ion mass spectrometry equipment used to enable sample rack loading and unloading. The sample introduction connection component 12 is detachably connected to the base 1 by bolts. The side of the connected base 1 has matching recesses to reserve space for automatic sample loading. In one embodiment, the sample introduction connection component 12 is matched to an automated sample loading secondary ion mass spectrometer from CAMECA.

[0032] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and not to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A secondary ion mass spectrometry sample holder, characterized in that, The device includes a base and a back plate, with the back plate located inside the base. The back plate is detachably connected to the base via bolts on the side of the base. A panel is fixedly connected to the upper surface of the base. A spring is provided on the back plate to lift and fix the sample to the bottom surface of the panel. The panel includes a viewing window for accommodating samples of different shapes and sizes for observing and testing samples of different sizes. Several fixing positions are provided on the back plate, and the spring is located at each fixing position, with each fixing position corresponding to a sample viewing window.

2. The secondary ion mass spectrometry sample holder according to claim 1, characterized in that, The sample window can be one or more of the following shapes: circle, rectangle, triangle, polygon.

3. A secondary ion mass spectrometry sample holder according to claim 1, characterized in that, The spring is fixedly connected to the fixed position.

4. A secondary ion mass spectrometry sample holder according to claim 1, characterized in that, The spring is detachably connected to the fixed position.

5. A secondary ion mass spectrometry sample holder according to any one of claims 1-4, characterized in that, The panel is equipped with an electron gun adjustment hole for adjusting the electron gun component of the instrument.

6. A secondary ion mass spectrometry sample holder according to claim 1, characterized in that, The base is provided with a sample introduction guide rail, which is matched with the storage chamber and analysis chamber of the secondary ion mass spectrometer used.

7. A secondary ion mass spectrometry sample holder according to claim 1, characterized in that, One end of the base is provided with a sample inlet connection component, which is used to connect with the secondary ion mass spectrometry equipment to realize the entry and exit of the sample holder.

8. A secondary ion mass spectrometry sample holder according to claim 7, characterized in that, The sample injection connection component is detachably connected to the base by bolts.

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