Quantitative glue pump

Abstract

The utility model relates to the technical field of semiconductor preparation, in particular to a quantitative glue pump. Comprising a support I, a shaft sleeve, a cavity, an elastic connecting sleeve and a horizontal linear driving mechanism, the horizontal linear driving mechanism is arranged on one side of the support I, the output end of the horizontal linear driving mechanism is connected with the shaft sleeve horizontally penetrating through the support I, the shaft sleeve is sleeved with the elastic connecting sleeve, and one end of the elastic connecting sleeve is connected with the tail end of the shaft sleeve; the other end of the elastic connecting sleeve is connected with the bracket I; the cavity is arranged on the other side of the bracket I and clamps the elastic connecting sleeve; the horizontal linear driving mechanism drives the elastic connecting sleeve to horizontally stretch out and draw back through the shaft sleeve, so that the volume of an inner cavity of the cavity is changed, and glue injection or liquid suction of the cavity is achieved. The inner cavity is free of friction, friction particles are not generated, pumped liquid is not polluted, and quantitative glue pumping is achieved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor fabrication technology, and in particular to a metering gel pump. Background Technology

[0002] Numerous chemicals are used in chip manufacturing, requiring absolute cleanliness and precise flow control. Adhesive pumps, a type of pump, are primarily used to transport high-viscosity fluids. In product manufacturing, when adhesives are applied, adhesive pumps are typically used to deliver the adhesive to the desired location.

[0003] Currently, the glue supply pumps used in the market have many flow-through components, which are prone to damage during use, inconvenient to disassemble during maintenance, and have high maintenance costs. Moreover, they suffer from large material losses during use, and are easily damaged when the pump body pressure is too high. Utility Model Content

[0004] To address the aforementioned problems, the purpose of this utility model is to provide a metering glue pump that solves the issues of existing glue pumps being easily damaged, inconvenient to disassemble during maintenance, and having high maintenance costs.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] This invention provides a metering adhesive pump, comprising a bracket I, a bushing, a cavity, an elastic connecting sleeve, and a horizontal linear drive mechanism. The horizontal linear drive mechanism is disposed on one side of the bracket I, and its output end is connected to the bushing that horizontally penetrates the bracket I. The elastic connecting sleeve is sleeved on the outside of the bushing, with one end connected to the end of the bushing and the other end connected to the bracket I. The cavity is disposed on the other side of the bracket I and clamps the elastic connecting sleeve. The horizontal linear drive mechanism drives the elastic connecting sleeve to extend and retract horizontally through the bushing, causing a change in the internal volume of the cavity, thereby realizing the dispensing or suction of adhesive in the cavity.

[0007] The cavity is equipped with a one-way valve I and a one-way valve II that communicate with the inner cavity. One-way valve I is used for quantitative dispensing of adhesive, and one-way valve II is used for quantitative aspiration of liquid.

[0008] Steel rod I and steel rod II are respectively embedded on the upper and lower sides of the cavity. Both steel rod I and steel rod II are provided with threaded holes. One-way valve I is connected to the threaded hole on steel rod I by bolts; one-way valve II is connected to the threaded hole on steel rod II by bolts.

[0009] The top of the cavity is equipped with a bubble level to ensure the cavity is level.

[0010] The horizontal linear drive mechanism includes a bracket II, a motor, a synchronous belt assembly, a lead screw, and a lead screw nut. The lead screw and the motor are both mounted on the bracket II, and the lead screw is rotatable. The output end of the motor is connected to the lead screw via the synchronous belt assembly. The lead screw nut is threadedly connected to the lead screw to form a threaded pair. The bushing is fitted on the outside of the lead screw and is connected to the lead screw nut at one end.

[0011] The horizontal linear drive mechanism also includes two guide shafts arranged parallel to both sides of the lead screw, with each guide shaft connected at both ends to the bracket I and the bracket II respectively; the lead screw nut is slidably engaged with the two guide shafts.

[0012] The cavity is equipped with a pressure sensor, which provides feedback on the pressure inside the cavity, thereby controlling the torque output of the motor to achieve constant pressure output; the motor is equipped with an encoder, which controls the speed output of the motor to achieve constant flow output.

[0013] The elastic connecting sleeve is a corrugated pipe, and the other end of the corrugated pipe is sealed to the bracket I by a sealing ring.

[0014] The advantages and positive effects of this utility model are as follows: The quantitative glue pump provided by this utility model does not have a volume change mechanism such as a piston, there is no friction in the inner cavity, no friction particles are generated, and the pumped liquid is not contaminated; at the same time, the flexible contact between the elastic connecting sleeve and the cavity will not cause damage to the cavity, improve the service life of the product, and is easy to disassemble and has low maintenance costs.

[0015] This utility model adopts a structure with a motor and lead screw arrangement, which has a reasonable spatial layout and compact size, meeting the requirement of small footprint for installing semiconductor equipment. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a metering adhesive pump according to the present invention;

[0017] Figure 2 This is a schematic diagram of the structure in which the one-way valve is fixed to the cavity in this utility model.

[0018] In the diagram: 1. Steel bar I; 2. One-way valve I; 3. Bubble level; 4. Bellows; 5. Sealing ring; 6. Bracket I; 7. Guide shaft; 8. One-way valve II; 9. Bearing; 10. Driven pulley; 11. Synchronous belt; 12. Drive pulley; 13. Motor; 14. Bracket II; 15. Lead screw; 16. Bushing; 17. Steel bar II; 18. Cavity. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0020] See Figure 1 and Figure 2 As shown, this utility model provides a metering adhesive pump, including a bracket I6, a bushing 16, a cavity 18, an elastic connecting sleeve, and a horizontal linear drive mechanism. The horizontal linear drive mechanism is disposed on one side of the bracket I6, and its output end is connected to the bushing 16 that horizontally penetrates the bracket I6. The elastic connecting sleeve is sleeved on the outside of the bushing 16, with one end connected to the end of the bushing 16 and the other end connected to the bracket I6. The cavity 18 is disposed on the other side of the bracket I6 and clamps the elastic connecting sleeve. The horizontal linear drive mechanism drives the elastic connecting sleeve to extend and retract horizontally through the bushing 16, causing the internal volume of the cavity 18 to change, thereby realizing the dispensing or suction of adhesive in the cavity 18.

[0021] See Figure 1 As shown in the embodiment of the present invention, a one-way valve I2 and a one-way valve II8 communicating with the inner cavity are provided on the cavity 18. The one-way valve I2 is used for quantitative dispensing of adhesive, and the one-way valve II8 is used for quantitative aspiration of liquid.

[0022] Furthermore, steel rod I1 and steel rod II17 are respectively embedded on the upper and lower sides of cavity 18. Both steel rod I1 and steel rod II17 have threaded holes. One-way valve I2 is connected to the threaded hole on steel rod I1 via bolts; one-way valve II8 is connected to the threaded hole on steel rod II17 via bolts. (See [reference]) Figure 2 As shown.

[0023] In an embodiment of the present invention, a bubble level 3 is provided on the top of the cavity 18. The bubble level 3 helps to confirm the installation status of the glue pump, that is, the center of the one-way valve sealing ball coincides with the valve port axis, ensuring that the one-way valve ball can fit against the valve port by gravity and achieve a reliable seal.

[0024] See Figure 1 As shown, in an embodiment of the present invention, the horizontal linear drive mechanism includes a bracket II 14, a motor 13, a synchronous belt assembly, a lead screw 15, and a lead screw nut. The lead screw 15 and the motor 13 are both mounted on the bracket II 14, and the lead screw 15 is rotatably connected to the bracket II 14 through a bearing 9. The output end of the motor 13 is connected to the lead screw 15 through the synchronous belt assembly. The lead screw nut is threadedly connected to the lead screw 15 to form a threaded pair. The bushing 16 is fitted on the outside of the lead screw 15 and is connected to the lead screw nut at one end.

[0025] Specifically, the synchronous belt assembly includes a driven pulley 10, a synchronous belt 11, and a driving pulley 12, wherein the driving pulley 12 is located at the output end of the motor 13, the driven pulley 10 is located at the output end of the lead screw 15, and the driven pulley 10 is connected to the driving pulley 12 via the synchronous belt 11.

[0026] Furthermore, the horizontal linear drive mechanism also includes two guide shafts 7 arranged parallel to both sides of the lead screw 15, with the two ends of each guide shaft 7 connected to bracket I 6 and bracket II 14 respectively; the lead nut is slidably engaged with the two guide shafts 7.

[0027] Preferably, the elastic connecting sleeve is made of a bellows, and the other end of the bellows is sealed to the bracket I6 by a sealing ring 5. The installation method of the sealing ring 5 is simple and has high sealing reliability.

[0028] Specifically, the center of the one-way valve I2 is a sphere. When the internal pressure of the cavity 18 pushes it up, the liquid can flow out along this channel. When it is pressed against the conical surface by an external force, the channel is closed. When installing this pump, the bubble level 3 must ensure that its upper surface is level to prevent gaps from forming between the one-way valve I2 and the conical surface due to tilting.

[0029] In this embodiment of the invention, to prevent liquid contamination, all materials in contact with the liquid are made of plastic. Therefore, the strength of the cavity 18 body is relatively low, making it unsuitable for tapping. Instead, holes are drilled in the cavity 18 to insert steel rods I1 and II17. Threaded holes are pre-drilled in the steel rods I1 and II17, thus firmly fixing the one-way valves I2 and II8 to the cavity 18.

[0030] Furthermore, motor 13 is a stepper motor with integrated drive and control, which further saves space and makes wiring more convenient and simple.

[0031] Furthermore, the cavity 18 is equipped with a pressure sensor, which provides feedback on the pressure inside the cavity 18, thereby controlling the torque output of the motor 13 to achieve constant pressure output. The motor 13 is equipped with an encoder, which controls the speed output of the motor 13 to achieve constant flow output.

[0032] This utility model provides a metering adhesive pump, the working principle of which is as follows:

[0033] Motor 13 drives lead screw 15 to rotate via synchronous belt 11, which in turn moves lead screw nut forward. Lead screw nut pushes bellows forward via bushing 16, compressing the space inside cavity 18 and creating a pressure difference. This causes the liquid inside cavity 18 to be discharged through one-way valve I2 at the outlet. Motor 13 reverses direction, driving lead screw nut backward. Bellows is compressed, and the space inside cavity 18 expands, creating suction. This draws external liquid into the cavity 18 through one-way valve II8 at the inlet. This reciprocating motion continues. One-way valves I2 and II8 are sealed by gravity, so a bubble level 3 ensures the pump body is in a relatively horizontal state.

[0034] The above description is merely an embodiment of this utility model and is not intended to limit the scope of protection of this utility model. Any modifications, equivalent substitutions, improvements, extensions, etc., made within the spirit and principles of this utility model are included within the scope of protection of this utility model.

Claims

1. A metering adhesive pump, characterized in that, The device includes a bracket I (6), a bushing (16), a cavity (18), an elastic connecting sleeve, and a horizontal linear drive mechanism. The horizontal linear drive mechanism is located on one side of the bracket I (6), and its output end is connected to the bushing (16) that passes through the bracket I (6). The elastic connecting sleeve is fitted on the outside of the bushing (16), with one end connected to the end of the bushing (16) and the other end connected to the bracket I (6). The cavity (18) is located on the other side of the bracket I (6) and clamps the elastic connecting sleeve. The horizontal linear drive mechanism drives the elastic connecting sleeve to extend and retract horizontally through the bushing (16), causing the internal volume of the cavity (18) to change, thereby realizing the injection of glue or the absorption of liquid in the cavity (18).

2. The metering pump according to claim 1, characterized in that, The cavity (18) is provided with a one-way valve I (2) and a one-way valve II (8) that communicate with the inner cavity. The one-way valve I (2) is used for quantitative injection of glue, and the one-way valve II (8) is used for quantitative aspiration of liquid.

3. The metering pump according to claim 2, characterized in that, Steel rod I (1) and steel rod II (17) are respectively embedded on the upper and lower sides of the cavity (18). Both steel rod I (1) and steel rod II (17) are provided with threaded holes. The one-way valve I (2) is connected to the threaded hole on steel rod I (1) by bolts. The one-way valve II (8) is connected to the threaded hole on steel rod II (17) by bolts.

4. The metering pump according to claim 1, characterized in that, The top of the cavity (18) is equipped with a bubble level (3) to ensure the levelness of the cavity (18).

5. The metering pump according to claim 1, characterized in that, The horizontal linear drive mechanism includes a bracket II (14), a motor (13), a timing belt assembly, a lead screw (15), and a lead screw nut. The lead screw (15) and the motor (13) are both mounted on the bracket II (14), and the lead screw (15) can rotate. The output end of the motor (13) is connected to the lead screw (15) through the timing belt assembly. The lead screw nut is threadedly connected to the lead screw (15) to form a threaded pair. The bushing (16) is fitted on the outside of the lead screw (15) and one end is connected to the lead screw nut.

6. The metering pump according to claim 5, characterized in that, The horizontal linear drive mechanism also includes two guide shafts (7) arranged parallel to both sides of the lead screw (15), with the two ends of each guide shaft (7) connected to the bracket I (6) and the bracket II (14) respectively; the lead nut is slidably engaged with the two guide shafts (7).

7. The metering pump according to claim 5, characterized in that, The cavity (18) is equipped with a pressure sensor, which feeds back the pressure inside the cavity (18) to control the torque output of the motor (13) and achieve constant pressure output; the motor (13) is equipped with an encoder, which controls the speed output of the motor (13) to achieve constant flow output.

8. The metering pump according to claim 1, characterized in that, The elastic connecting sleeve is a bellows, and the other end of the bellows is sealed to the bracket I (6) by a sealing ring (5).

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