Chip etching basket structure

Abstract

This utility model relates to a chip etching basket structure, belonging to the field of integrated circuit or discrete device technology. It includes a base frame and a pressure cap. The base frame has a storage cavity, within which a chip holder is mounted. Several slots are formed on each chip holder, and chips are held in these slots. One end of the pressure cap is hinged to the top of the base frame. The pressure cap rotates around the hinge point, either closing onto the top of the base frame and pressing against the top of the chip holder, or opening the base frame. The pressure cap includes two spaced-apart top plates, with multiple parallel pressure rods between them. The two ends of each pressure rod are fixed to the corresponding top plate. One top plate is hinged to the base frame, and the other top plate and base frame each have insertion holes for inserting pins. This application features a simple structure, convenient operation, improved strength of the lower support rod, prevention of chip etching basket deformation, and reduced chip fragmentation due to chip movement.

Description

Technical Field

[0001] This utility model relates to a chip etching basket structure, belonging to the field of integrated circuit or discrete device technology. Background Technology

[0002] After thinning processes, chips are characterized by their thinness and high stress, making them prone to fragmentation during subsequent processing, including etching. The chip etching basket is a key tool in semiconductor manufacturing used in wet etching or cleaning processes. It is primarily used to fix and transport the die holder, ensuring uniform treatment of the chip in the chemical etching or cleaning solution. Currently, during etching, the etching basket is prone to deformation, increasing production costs; excessive movement of the die holder within the etching basket also causes chip fragmentation. Summary of the Invention

[0003] The technical problem to be solved by this utility model is to provide a chip etching basket structure that is simple in structure, avoids deformation of the etching basket, and reduces chip fragmentation caused by chip carrier shaking.

[0004] The technical solution adopted by this utility model to solve the above problems is as follows: a chip etching basket structure, including a base frame and a cover, wherein the base frame has a storage cavity, and a chip holder is mounted in the storage cavity. Several slots are opened on any one of the chip holders, and the chip is held in the slots; one end of the cover is hinged to the top of the base frame, and the cover rotates around the hinge point, so that the cover closes to the top of the base frame and abuts against the top of the chip holder, or the cover opens the base frame;

[0005] The pressure cap includes two spaced-apart top plates, with multiple parallel pressure rods between the top plates. The two ends of each pressure rod are fixed to the corresponding top plate. One top plate is hinged to the base frame, and the other top plate and the base frame have insertion holes, into which pins are inserted.

[0006] The base frame includes two oppositely arranged side plates, and two symmetrically arranged lower support rods are provided at the bottom of the two side plates. The two ends of the lower support rods are respectively fixed to the side plates, and the bottom of the sheet frame is supported by the lower support rods. The top of the side plates is provided with two symmetrically arranged upper support rods, and the top two ends of the sheet frame are supported by the upper support rods.

[0007] The spacing between the upper support rods is greater than the spacing between the lower support rods.

[0008] The lower support rod has a load-bearing shaft at its center. The lower support rod is made of PVDF material, and the load-bearing shaft is made of stainless steel.

[0009] Compared with existing technologies, the advantages of this utility model are: a chip etching basket structure that is simple in structure, easy to operate, improves the strength of the lower support rod, and avoids deformation of the etching basket. By using a pressure rod to hold the chip holder in place, it reduces chip fragmentation caused by chip holder movement. Attached Figure Description

[0010] Figure 1 This is a three-dimensional diagram of a chip etching basket structure according to an embodiment of the present invention;

[0011] Figure 2 This is a front view of a chip etching basket structure according to an embodiment of the present invention;

[0012] Figure 3 for Figure 2 Side view;

[0013] Figure 4 This is a schematic diagram showing the film holder supported by the lower support rod.

[0014] Figure 5 This is a sectional view of the lower support rod;

[0015] In the diagram: 1 Side plate, 2 Lower support rod, 3 Upper support rod, 4 Top plate, 5 Pressure rod, 6 Pin, 7 Load-bearing shaft, 8 Sheet frame. Detailed Implementation

[0016] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0017] like Figure 1-5 As shown, a chip etching basket structure in this embodiment includes a base frame and a cover. The base frame has a storage cavity containing multiple chip holders 8. Each chip holder 8 has several slots, and the chip is held in one of the slots. One end of the cover is hinged to the top of the base frame. The cover rotates around the hinge point, so that the cover closes to the top of the base frame and abuts against the top of the chip holder, preventing the chip holder from shaking; or the cover opens the base frame, facilitating the installation and removal of the chip holder.

[0018] The base frame includes two oppositely arranged side plates 1. Two symmetrically arranged lower support rods 2 are provided at the bottom of each side plate 1, with both ends of the lower support rods 2 fixed to the side plates 1. The bottom of the shelf 8 is supported on the two lower support rods 2. Two symmetrically arranged upper support rods 3 are provided at the top of each side plate 1. The upper support rods 3 are parallel to the lower support rods 2, and the distance between the two upper support rods is greater than the distance between the two lower support rods. The top ends of the shelf 8 are supported on the two upper support rods, allowing the shelf 8 to be positioned within the storage cavity.

[0019] The cover includes two spaced-apart top plates 4, corresponding to side plates 1. Multiple parallel pressure rods 5 are arranged between the top plates 4, with both ends of the pressure rods 5 fixed to the corresponding side top plate 4. One top plate 4 is hinged to the corresponding side plate 1, and insertion holes are respectively opened on the side of the other top plate 4 and the corresponding side plate 1. When one top plate rotates around the hinge point, it drives the other top plate and pressure rods to rotate synchronously, aligning the insertion holes of the other top plate with those of the corresponding side plate, and then inserting a pin 6 to fix the cover unit to the base frame. Removing the pin causes the top plate to rotate in the opposite direction around the hinge point, opening the base frame.

[0020] like Figure 5 As shown, the lower support rod is made of PVDF material, and the center of the lower support rod has a stainless steel load-bearing shaft 7, which improves the hardness of the lower support rod, reduces the deformation of the lower support rod, and extends the service life of the lower support rod.

[0021] This application features a simple structure and convenient operation, improves the strength of the lower support rod, and prevents deformation of the wafer tray due to corrosion. The pressure rod holds the chip holder in place, reducing chip breakage caused by chip holder movement.

[0022] In addition to the above embodiments, this utility model also includes other implementation methods. All technical solutions formed by equivalent transformation or equivalent substitution should fall within the protection scope of the claims of this utility model.

Claims

1. A chip etch basket structure, characterized by: The device includes a base frame and a cover. The base frame has a storage cavity, and a chip holder is mounted in the storage cavity. Several slots are provided on each chip holder, and the chip is inserted into the slots. One end of the cover is hinged to the top of the base frame. The cover rotates around the hinge point, so that the cover closes to the top of the base frame and abuts against the top of the chip holder, or the cover opens the base frame. The pressure cap includes two spaced-apart top plates, with multiple parallel pressure rods between the top plates. The two ends of each pressure rod are fixed to the corresponding top plate. One top plate is hinged to the base frame, and the other top plate and the base frame have insertion holes, into which pins are inserted.

2. The chip etch basket structure of claim 1, wherein: The base frame includes two oppositely arranged side plates, and two symmetrically arranged lower support rods are provided at the bottom of the two side plates. The two ends of the lower support rods are respectively fixed to the side plates, and the bottom of the sheet frame is supported by the lower support rods. The top of the side plates is provided with two symmetrically arranged upper support rods, and the top two ends of the sheet frame are supported by the upper support rods.

3. The chip etch basket structure of claim 2, wherein: The spacing between the upper support rods is greater than the spacing between the lower support rods.

4. The chip etch basket structure of claim 2, wherein: The lower support rod has a load-bearing shaft at its center. The lower support rod is made of PVDF material, and the load-bearing shaft is made of stainless steel.

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