A semiconductor magazine positioning device

Abstract

This application discloses a semiconductor magazine positioning device, including: a base, a side frame, and a top frame; the base and the top frame are positioned correspondingly, and one side of the base and the top frame are connected through the side frame; the same edge of the base and one side of the side frame have a first gap; wherein, the first gap is used to place the magazine, and the magazine is located between the base and the top frame; wherein, a first clamping plate mechanism for clamping the bottom of the magazine is provided below the base; a second clamping plate mechanism for clamping the top of the magazine is provided above the top frame. This application allows the magazine to be placed between the top frame and the base, and is limited by the side frame; the second clamping plate mechanism on the top frame and the first clamping plate mechanism on the base can clamp the magazine from the top and bottom ends respectively, ensuring that the magazine does not shift left or right, thereby ensuring wafer loading efficiency and accuracy.

Description

Technical Field

[0001] This application belongs to the field of semiconductor positioning device technology, specifically relating to a semiconductor magazine positioning device. Background Technology

[0002] In the precision electronic manufacturing processes of semiconductors, cameras, and other products, products are placed on wafers, and clips are used to hold the wafers—this is a common process carrier. This type of process carrier allows for maximum automation of the process and is the easiest to integrate with automated equipment.

[0003] However, during the placement of the shrapnel, the magazine needs to be clamped and fixed. The fixing method is to clamp from the top and bottom sides, but this method may cause the magazine to shift left and right, thus affecting the efficiency of the shrapnel. Utility Model Content

[0004] This application provides a semiconductor magazine positioning device to solve the above-mentioned technical problems.

[0005] To solve the above-mentioned technical problems, one technical solution adopted in this application is: a semiconductor magazine positioning device, including: a base, a side frame, and a top frame; the base and the top frame are positioned correspondingly, and one side of the base and the top frame are connected through the side frame; the same edge of the base and one side of the side frame have a first gap; wherein, the first gap is used to place the magazine, and the magazine is located between the base and the top frame; wherein, a first clamping plate mechanism for clamping the bottom of the magazine is provided below the base; and a second clamping plate mechanism for clamping the top of the magazine is provided above the top frame.

[0006] Furthermore, the first clamping mechanism includes a first cylinder and a first U-shaped push rod. A first frame plate is provided at the bottom of the base away from the magazine, and the first cylinder is fixed to the first frame plate. Parallel sliding rails are arranged on both sides of the bottom of the base, and a lower slider is provided in the sliding rails. The lower slider is connected to the upper ends of both sides of the first U-shaped push rod. A first locking member is provided at the end of the telescopic rod of the first cylinder, and the first locking member is connected to the first retaining ring in the middle of the first U-shaped push rod. The end of the first U-shaped push rod is provided with a lower deformable clamping plate assembly for clamping the magazine. The lower deformable clamping plate assembly is movably connected to the lower extension plate at the front end of the base.

[0007] Furthermore, the lower deformable clamping plate assembly includes a first lever clamping plate; the bottom two sides of the first lever clamping plate are pivotally connected to one end of the first connecting plate via a first pivot shaft, and the other end of the first connecting plate is pivotally connected to the bottom of the lower T-shaped connector of the first U-shaped push rod via a second pivot shaft; the middle two sides of the first lever clamping plate are pivotally connected to one end of the second connecting plate via a third pivot shaft; the other end of the second connecting plate is pivotally connected to the front two sides of the lower extension plate via a fourth pivot shaft; wherein, the top two sides of the lower T-shaped connector are pivotally connected to a third connecting plate, and the middle of the third connecting plate is connected to the middle of the second connecting plate via a fifth pivot shaft.

[0008] Furthermore, vertical rods are provided on both sides of the rear end of the side frame, and through holes for connecting the vertical rods are provided at the rear end of the top frame. A bushing is provided at the upper end of the through hole, and a positioning collar is provided at the lower end of the through hole. A fastening bolt is provided on the outside of the positioning collar, and a fastening wrench is provided at the outer end of the fastening bolt.

[0009] Furthermore, the second clamping mechanism includes a second cylinder and a second U-shaped push rod. A second frame plate is provided at the top of the top frame away from the magazine, and the second cylinder is fixed to the second frame plate. Upper slide rails are arranged parallel to each other on both sides of the top of the top frame, and upper sliders are provided in the upper slide rails. The upper sliders are connected to the lower ends of both sides of the second U-shaped push rod. A second clamping element is provided at the end of the telescopic rod of the second cylinder, and the second clamping element is connected to the second retaining ring in the middle of the second U-shaped push rod. The end of the second U-shaped push rod is provided with an upper deformable clamping plate assembly for clamping the magazine. The upper deformable clamping plate assembly is movably connected to the upper extension plate at the front end of the top frame.

[0010] Furthermore, the upper deformable plate assembly includes a second lever clamping plate; the bottom two sides of the second lever clamping plate are pivotally connected to one end of the fourth connecting plate via a sixth pivot, and the other end of the fourth connecting plate is pivotally connected to the bottom of the upper T-shaped connector of the second U-shaped push rod via a seventh pivot; the middle two sides of the second lever clamping plate are pivotally connected to one end of the fifth connecting plate via an eighth pivot; the other end of the fifth connecting plate is pivotally connected to the front two sides of the upper extension plate via a ninth pivot; wherein, the top two sides of the upper T-shaped connector are pivotally connected to the sixth connecting plate, and the middle of the sixth connecting plate and the fifth connecting plate are pivotally connected via a tenth pivot.

[0011] Furthermore, the front end of the top frame is connected to a U-shaped protrusion located between the upper extension plates, and the middle part of the support arm is pivotally connected between the ends of the U-shaped protrusion; the front end of the support arm is provided with a wheel frame, and a pressing wheel is provided in the wheel frame; the rear end of the support arm is provided with a through groove, and the middle part of the support plates on both sides of the through groove is provided with a strip-shaped slot.

[0012] Furthermore, a vertical plate is provided on one side of the U-shaped bracket, and a third cylinder is provided at the front end of the vertical plate. The end of the telescopic rod of the third cylinder is connected to the T-shaped connecting rod. The T-shaped connecting rod is located in the through groove and both sides of the T-shaped connecting rod are sleeved in the strip groove. A rangefinder for detecting the height of the rear end of the support arm is provided at the upper end of the vertical plate.

[0013] Furthermore, a limiting plate is provided on the side of the side frame that is close to the magazine, and a photoelectric sensor for detecting the magazine position is connected to the limiting plate.

[0014] The beneficial effects of this application are: the magazine can be placed between the top frame and the base, and limited by the side frame. The second clamping plate mechanism on the top frame and the first clamping plate mechanism on the base can clamp the magazine from the top and bottom respectively, ensuring that the magazine will not shift left or right, thereby ensuring the efficiency and accuracy of the magazine loading. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of an embodiment of the semiconductor magazine positioning device of this application;

[0016] Figure 2 This is a schematic diagram of another embodiment of the semiconductor magazine positioning device of this application;

[0017] Figure 3 yes Figure 1 A schematic diagram of the structure of one embodiment of the first card plate mechanism;

[0018] Figure 4 yes Figure 3 A schematic diagram of the structure of region A in the diagram;

[0019] Figure 5 yes Figure 1 A schematic diagram of the structure of an embodiment of the second card plate mechanism;

[0020] Figure 6 yes Figure 5 A schematic diagram of the structure of region B in the diagram;

[0021] Figure 7 yes Figure 1 A schematic diagram of the structure of one embodiment of the top frame;

[0022] Figure 8 yes Figure 7 A schematic diagram of the structure of region C in the diagram. Detailed Implementation

[0023] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings.

[0024] like Figure 1-8 As shown, a semiconductor magazine 4 positioning device includes: a base 1, a side frame 2, and a top frame 3; the base 1 and the top frame 3 are positioned correspondingly, and one side of the base 1 and the top frame 3 are connected through the side frame 2; the same edge of the base 1 and one side of the side frame 2 have a first gap L; wherein, the first gap L is used to place the magazine 4, and the magazine 4 is located between the base 1 and the top frame 3; wherein, a first clamping plate mechanism 5 for clamping the bottom of the magazine 4 is provided below the base 1; a second clamping plate mechanism 6 for clamping the top of the magazine 4 is provided above the top frame 3. The above design can place the magazine 4 between the base 1, the side frame 2, and the top frame 3, and then the first clamping plate mechanism 5 and the second clamping plate mechanism 6 can firmly clamp the magazine 4 from the top and bottom ends, preventing the magazine 4 from moving left and right during wafer loading, so as to ensure wafer loading efficiency.

[0025] The first clamping mechanism 5 includes a first cylinder 51 and a first U-shaped push rod 52. A first support plate 53 is provided at the bottom of the base 1, away from the magazine 4, and the first cylinder 51 is fixedly connected to the first support plate 53. Parallel lower slide rails 54 are arranged on both sides of the bottom of the base 1, and a lower slider 55 is provided in the lower slide rails 54. The lower slider 55 is connected to the upper ends of both sides of the first U-shaped push rod 52. A first clamping element 56 is provided at the end of the telescopic rod of the first cylinder 51, and the first clamping element 56 is connected to a first retaining ring 57 in the middle of the first U-shaped push rod 52. The end of the first U-shaped push rod 52 is provided with a lower deformable clamping plate assembly 7 for clamping the magazine 4. The lower deformable clamping plate assembly 7 is movably connected to the lower extension plate 11 at the front end of the base 1. In the above design, the telescopic movement of the first cylinder 51 can push and pull the first U-shaped push rod 52, thereby causing the first U-shaped push rod 52 to move back and forth along the lower slide rail 54, so that the lower deformable clamping plate assembly 7 can clamp or release the magazine 4 from below.

[0026] The lower deformable clamping plate assembly 7 includes a first lever clamping plate 71; the bottom two sides of the first lever clamping plate 71 are pivotally connected to one end of a first connecting plate 73 via a first pivot 72, and the other end of the first connecting plate 73 is pivotally connected to the bottom of the lower T-shaped connector 58 of the first U-shaped push rod 52 via a second pivot 74; the middle two sides of the first lever clamping plate 71 are pivotally connected to one end of a second connecting plate 76 via a third pivot 75; the other end of the second connecting plate 76 is pivotally connected to the front two sides of the lower extension plate 11 via a fourth pivot 77; wherein, the top two sides of the lower T-shaped connector 58 are pivotally connected to a third connecting plate 78, and the third connecting plate 78 is connected to the middle of the second connecting plate 76 via a fifth pivot 79. In the above design, the lower T-shaped connector 58 can move back and forth with the first U-shaped push rod 52. When the lower T-shaped connector 58 moves forward, the first connecting plate 73 pushes the bottom of the first lever pressing plate 71 forward. At this time, the third connecting plate 78 at the upper end of the lower T-shaped connector 58 pulls the second connection backward, causing the upper end of the first connecting plate 73 to move backward and abut against the bottom of the magazine 4, thus interacting with the side frame 2 to clamp the magazine 4. When the lower T-shaped connector 58 moves backward, the first connecting plate 73 pulls the bottom of the first lever pressing plate 71 backward. At this time, the third connecting plate 78 at the upper end of the lower T-shaped connector 58 pushes the second connection forward, thereby releasing the magazine 4.

[0027] The side frame 2 has vertical rods 21 on both sides of its rear end. The top frame 3 has through holes 22 at its rear end for connecting the vertical rods 21. A bushing 23 is provided at the upper end of the through hole 22, and a positioning collar 24 is provided at the lower end of the through hole 22. A fastening bolt 25 is provided on the outside of the positioning collar 24, and a fastening wrench 26 is provided on the outer end of the fastening bolt 25. In the above design, the height of the top frame 3 can be adjusted up and down along the vertical rods 21 to accommodate different magazines 4. Once the position is determined, the fastening bolt 25 can be rotated by the fastening wrench 26 to fix the position of the positioning collar 24 to support the top frame 3.

[0028] The second clamping mechanism 6 includes a second cylinder 61 and a second U-shaped push rod 62. A second frame plate 63 is located at the top of the top frame 3, away from the magazine 4, and the second cylinder 61 is fixedly connected to the second frame plate 63. Upper slide rails 64 are arranged parallel to each other on both sides of the top of the top frame 3. Upper slide blocks 65 are located within the upper slide rails 64 and are connected to the lower ends of both sides of the second U-shaped push rod 62. A second clamping element 66 is located at the end of the telescopic rod of the second cylinder 61, and is connected to a second retaining ring 67 in the middle of the second U-shaped push rod 62. The end of the second U-shaped push rod 62 is equipped with an upper deformable clamping plate assembly 8 for clamping the magazine 4. The upper deformable clamping plate assembly 8 is movably connected to the upper extension plate 31 at the front end of the top frame 3. In the above design, the second cylinder 61 can push the second U-shaped push rod 62 to move back and forth along the upper slide rail 64, thereby allowing the upper deformable clamping plate assembly 8 to clamp or release the magazine 4 from above. The upper slide rail 64 and the lower slide rail 54 are arranged in parallel. Therefore, both the upper deformable clamping plate assembly 8 and the lower deformable clamping plate assembly 7 move in a direction perpendicular to the side frame 2, thereby clamping the magazine 4.

[0029] The upper deformable clamping plate assembly 8 includes a second lever clamping plate 81; the bottom two sides of the second lever clamping plate 81 are pivotally connected to one end of a fourth connecting plate 83 via a sixth pivot 82, and the other end of the fourth connecting plate 83 is pivotally connected to the bottom of the upper T-shaped connector 68 of the second U-shaped push rod 62 via a seventh pivot 84; the middle two sides of the second lever clamping plate 81 are pivotally connected to one end of a fifth connecting plate 86 via an eighth pivot 85; the other end of the fifth connecting plate 86 is pivotally connected to the front two sides of the upper extension plate 31 via a ninth pivot 87; wherein, the upper T-shaped connector 68 is pivotally connected to the top two sides of the sixth connecting plate 88, and the middle of the sixth connecting plate 88 and the fifth connecting plate 86 are pivotally connected via a tenth pivot 89. In the above design, the upper T-shaped connector 68 can move back and forth with the second U-shaped push rod 62. When the upper T-shaped connector 68 moves forward, the second connecting plate 76 pushes the top of the second lever pressing plate 81 forward. At this time, the sixth connecting plate 88 at the lower end of the upper T-shaped connector 68 pulls the fifth connecting plate 86 backward, causing the lower end of the fourth connecting plate to move backward and abut against the top of the magazine 4, thus interacting with the side frame 2 to clamp the magazine 4. When the upper T-shaped connector 68 moves backward, the fourth connecting plate pulls the top of the second lever pressing plate 81 backward. At this time, the sixth connecting plate 88 at the lower end of the upper T-shaped connector 68 pushes the fifth connecting plate 86 forward, thereby releasing the magazine 4.

[0030] The top frame 3 is connected to a U-shaped protrusion 32 located between the upper extension plates 31 at its front end. The middle part of the support arm 9 is pivotally connected between the ends of the U-shaped protrusion 32. The front end of the support arm 9 is provided with a wheel frame 91, and a pressing wheel 92 is provided in the wheel frame 91. The rear end of the support arm 9 is provided with a through groove 93, and the middle part of the support plates on both sides of the through groove 93 is provided with a strip-shaped slot 94. In the above design, the support arm 9 set on the U-shaped protrusion 32 controls the lifting and lowering of the rear end of the support arm 9, so that the pressing wheel 92 at the front end presses or releases the magazine 4 from directly above.

[0031] A vertical plate 33 is provided on one side of the U-shaped bracket 32. A third cylinder 34 is provided at the front end of the vertical plate 33. The end of the telescopic rod of the third cylinder 34 is connected to a T-shaped connecting rod 35. The T-shaped connecting rod 35 is located in the through groove 93 and its two sides are sleeved in the strip slot 94. A rangefinder 36 for detecting the height of the rear end of the support arm is provided at the upper end of the vertical plate 33. In the above design, the third cylinder 34 can control the lifting and lowering of the rear end of the support arm 9 through the T-shaped connecting rod 35, so as to control the tension of the pressing wheel 92.

[0032] A limiting plate 27 is provided on the side of the side frame 2 that is adjacent to the magazine 4. A photoelectric sensor 28 for detecting the position of the magazine 4 is connected to the limiting plate 21. The photoelectric sensor 28 in the above design can detect whether the magazine 4 has reached the preset position.

[0033] In this application, each cylinder and sensor is connected to an external main control terminal (e.g., computer, PLC). When the external transport mechanism places the magazine 4 between the base 1, side frame 2, and top frame 3, the photoelectric sensor 28 detects whether the magazine 4 has reached the preset position. If the magazine 4 has reached the preset position, the main control terminal activates the third cylinder 34, which presses the magazine 4 from above using the pressing wheel 92. Then, the first cylinder 51 and the second cylinder 61 are activated to clamp the magazine 4 from below and above, respectively, thus securing the magazine 4. After the magazine is loaded, the first cylinder 51 and the second cylinder 61 are released first, followed by the third cylinder 34, so that the external transport mechanism can remove the loaded magazine 4.

[0034] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A semiconductor cartridge positioning device, characterized by, include: The device comprises a base, a side frame, and a top frame; the base and the top frame are positioned correspondingly, and one side of the base and the top frame are connected via the side frame; the same edge of the base and one side of the side frame have a first gap; wherein the first gap is used to place a magazine, and the magazine is located between the base and the top frame; wherein a first clamping plate mechanism for clamping the bottom of the magazine is provided below the base; and a second clamping plate mechanism for clamping the top of the magazine is provided above the top frame.

2. A semiconductor cartridge positioning device according to claim 1, wherein The first clamping mechanism includes a first cylinder and a first U-shaped push rod. A first frame plate is provided at the bottom of the base away from the magazine, and the first cylinder is fixed to the first frame plate. Parallel sliding rails are arranged on both sides of the bottom of the base, and a lower slider is provided in the sliding rail. The lower slider is connected to the upper ends of both sides of the first U-shaped push rod. A first locking member is provided at the end of the telescopic rod of the first cylinder, and the first locking member is connected to a first retaining ring in the middle of the first U-shaped push rod. The end of the first U-shaped push rod is provided with a lower deformable clamping plate assembly for clamping the magazine. The lower deformable clamping plate assembly is movably connected to the lower extension plate at the front end of the base.

3. A semiconductor cartridge positioning device according to claim 2, wherein The lower deformable clamping plate assembly includes a first lever clamping plate; the bottom two sides of the first lever clamping plate are pivotally connected to one end of a first connecting plate via a first pivot, and the other end of the first connecting plate is pivotally connected to the bottom of the lower T-shaped connector of the first U-shaped push rod via a second pivot; the middle two sides of the first lever clamping plate are pivotally connected to one end of a second connecting plate via a third pivot; the other end of the second connecting plate is pivotally connected to the front two sides of the lower extension plate via a fourth pivot; wherein, the top two sides of the lower T-shaped connector are pivotally connected to a third connecting plate, and the third connecting plate is connected to the middle of the second connecting plate via a fifth pivot.

4. The semiconductor magazine positioning apparatus of claim 1, wherein The side frame has vertical rods on both sides of the rear end, and the top frame has a through hole at the rear end for fitting the vertical rod. The upper end of the through hole has a bushing, and the lower end of the through hole has a positioning collar. The outer side of the positioning collar has a fastening bolt, and the outer end of the fastening bolt has a fastening wrench.

5. A semiconductor magazine positioning device according to claim 4, characterized in that, The second clamping mechanism includes a second cylinder and a second U-shaped push rod. A second frame plate is provided at the top of the top frame away from the magazine, and the second cylinder is fixed to the second frame plate. Upper slide rails are arranged parallel to each other on both sides of the top of the top frame, and upper sliders are provided in the upper slide rails. The upper sliders are connected to the lower ends of both sides of the second U-shaped push rod. A second clamping member is provided at the end of the telescopic rod of the second cylinder, and the second clamping member is connected to the second retaining ring in the middle of the second U-shaped push rod. The end of the second U-shaped push rod is provided with an upper deformable clamping plate assembly for clamping the magazine. The upper deformable clamping plate assembly is movably connected to the upper extension plate at the front end of the top frame.

6. A semiconductor magazine positioning device according to claim 5, characterized in that, The upper deformable clamping plate assembly includes a second lever clamping plate; the bottom two sides of the second lever clamping plate are pivotally connected to one end of a fourth connecting plate via a sixth pivot, and the other end of the fourth connecting plate is pivotally connected to the bottom of the upper T-shaped connector of the second U-shaped push rod via a seventh pivot; the middle two sides of the second lever clamping plate are pivotally connected to one end of a fifth connecting plate via an eighth pivot; the other end of the fifth connecting plate is pivotally connected to the front two sides of the upper extension plate via a ninth pivot; wherein, the top two sides of the upper T-shaped connector are pivotally connected to a sixth connecting plate, and the middle of the sixth connecting plate is pivotally connected to the middle of the fifth connecting plate via a tenth pivot.

7. A semiconductor magazine positioning device according to claim 5, characterized in that, The top frame is connected to a U-shaped bracket between the upper extension plates at its front end, and the middle part of the support arm is pivotally connected between the ends of the U-shaped bracket; the front end of the support arm is provided with a wheel frame, and a pressing wheel is provided in the wheel frame; the rear end of the support arm is provided with a through groove, and the middle part of the support plates on both sides of the through groove is provided with a strip-shaped slot.

8. A semiconductor magazine positioning device according to claim 7, characterized in that, A vertical plate is provided on one side of the U-shaped bracket, and a third cylinder is provided at the front end of the vertical plate. The end of the telescopic rod of the third cylinder is connected to a T-shaped connecting rod. The T-shaped connecting rod is located in the through groove and both sides of the T-shaped connecting rod are sleeved in the strip groove. A rangefinder for detecting the height of the rear end of the support arm is provided at the upper end of the vertical plate.

9. A semiconductor magazine positioning device according to claim 1, characterized in that, A limiting plate is provided on the side of the side frame that is close to the magazine, and a photoelectric sensor for detecting the position of the magazine is connected to the limiting plate.

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