A kind of FIB and TEM associated with carrier network structure

Abstract

The utility model provides a kind of FIB and TEM's net structure of being used together, its technical scheme is: including main body, the side wall of the main body is equipped with slot hole, at least two net supports are fixed with below slot hole on the main body, fixed bolt is equipped on the adjacent surface of slot hole on the main body, one end of fixed bolt is passed through main body to slot hole, the contact surface of fixed bolt and main body is screw connection, the other end of fixed bolt is located outside main body, slot hole is slidably connected with net table.The utility model has the beneficial effects that (1) compatible FIB and TEM is used together, reduces sample transfer loss;(2) strengthen net fixing, avoid sample loss;(3) further strengthen net fixing, while conveniently take net table.

Description

Technical Field

[0001] This utility model belongs to the field of testing equipment technology, and in particular relates to a carrier structure for the combined use of FIB and TEM. Background Technology

[0002] Transmission electron microscopy (TEM) is widely used in semiconductor chip analysis due to its nanometer-scale resolution. However, TEM testing requires a high sample thickness, and focused ion beam (FIB) is often used to prepare TEM samples due to its extremely high precision.

[0003] After FIB sample preparation, the sample carrier needs to be manually removed. In most cases, the sample on the carrier is unique. If the carrier is not handled carefully during the removal process, it may fly away, resulting in sample loss or loss. Summary of the Invention

[0004] To address the problems in the prior art, this utility model provides a mesh carrier structure for use with FIB and TEM. The technical solution is as follows: it includes a main body, the side wall of which has a slot hole, at least two mesh carrier supports are fixedly mounted on the main body below the slot hole, a fixing bolt is mounted on the main body adjacent to the slot hole, one end of the fixing bolt passes through the main body into the slot hole, the contact surface between the fixing bolt and the main body is threaded, the other end of the fixing bolt is located on the outside of the main body, and the slot hole is slidably connected to the mesh carrier platform.

[0005] In a preferred embodiment, the surface of the carrier net is provided with anti-slip texture.

[0006] In a preferred embodiment, the fixing bolt has a gripping part on one end located on the outer side of the main body, which is convenient for manual tightening.

[0007] In a preferred embodiment, the mesh carrier includes a mesh carrier section, the surface of which is provided with a mesh carrier groove, and a connector is fixedly provided on the side of the mesh carrier section near the slot hole. The connector slides within the slot hole, and the shape and structure of the connector are adapted to the slot hole.

[0008] In a more preferred embodiment, the carrier mesh portion is provided with clamping portions on two horizontally adjacent surfaces of the connector.

[0009] In a preferred embodiment, the main body is optionally fixedly connected to the side of the FIB sample holder opposite the slot hole.

[0010] In a more preferred embodiment, the main body and the FIB sample holder form an angle of 5°-10°.

[0011] In a more preferred embodiment, the top of the FIB sample holder is provided with a nail stage hole.

[0012] In another embodiment, the main body is optionally fixedly connected to the side of the TEM sample rod opposite the slot hole.

[0013] In a more preferred embodiment, the TEM sample rod is provided with a vacuum washer and a positioning pin.

[0014] The beneficial effects of this utility model are:

[0015] (1) The main body can be selectively connected to the FIB sample holder or the TEM sample rod, and the transfer from FIB sample preparation to TEM observation can be completed without removing the grid from the grid stage, avoiding sample displacement or damage caused by secondary clamping;

[0016] (2) The net carrier platform slides into the slot hole of the main body through the connector, and with the locking effect of the fixing bolt, the net carrier can be stably restricted in the net carrier slot, which solves the problem that the net carrier is easy to fly away when manually picking up and putting down the net.

[0017] (3) The anti-slip texture on the surface of the carrier increases the friction with the carrier, further preventing the carrier from sliding during transfer or testing; the clamping part facilitates precise operation of tweezers and avoids contamination or damage caused by direct contact with the sample area. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of this utility model combined with the FIB sample holder.

[0019] Figure 2 This is a schematic diagram of the structure of this utility model combined with the TEM sample holder.

[0020] Figure 3 This is a schematic diagram of the structure of the main body and the carrier mesh in this utility model.

[0021] In the figure: 1. Main body; 2. Slot hole; 3. Net holder; 4. Fixing bolt; 5. Anti-slip texture; 6. Net section; 7. Net groove; 8. Connector; 9. Clamping part; 10. FIB sample holder; 11. Pin stage hole; 12. TEM sample rod; 13. Vacuum washer; 14. Positioning pin. Detailed Implementation

[0022] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0023] Example 1

[0024] like Figure 1 , 3The illustrated mesh carrier structure for use with FIB and TEM includes a main body 1. The side wall of the main body 1 has a slot hole 2. At least two mesh carrier supports 3 are fixedly mounted on the main body 1 below the slot hole 2. A fixing bolt 4 is provided on the main body 1 adjacent to the slot hole 2. One end of the fixing bolt 4 passes through the main body 1 into the slot hole 2. The contact surface between the fixing bolt 4 and the main body 1 is threaded. The other end of the fixing bolt 4 is located on the outside of the main body 1. The slot hole 2 is slidably connected to the mesh carrier platform.

[0025] Furthermore, the surface of the net carrier 3 is provided with anti-slip texture 5 to increase the friction between the net carrier platform and the net carrier 3 and reduce the probability of the net carrier platform sliding on the net carrier 3.

[0026] Furthermore, the fixing bolt 4 is provided with a grip on one end located on the outside of the main body, which is convenient for manual tightening. The lever principle is used to reduce the force required for tightening and increase the comfort of use.

[0027] Furthermore, the net carrier platform includes a net carrier section 6, the surface of which is provided with a net carrier groove 7, and a connector 8 is fixedly provided on the side of the net carrier section 6 near the slot hole 2. The connector 8 slides in the slot hole 2, and the shape and structure of the connector 8 are adapted to the slot hole 2.

[0028] The net carrier is placed on the net carrier support 3, and its connector 8 is inserted into the slot hole 2. Then, the holding part of the fixing bolt 4 is manually tightened, and one end of the fixing bolt 4 is pressed against the side wall of the connector 8 to complete the fixing of the net carrier.

[0029] Furthermore, the carrier mesh 6 is provided with clamping parts 9 on two horizontally adjacent surfaces of the connector 8. The clamping parts 9 facilitate the precise operation of operating tools such as tweezers and avoid direct contact with the sample area, thus preventing contamination or damage.

[0030] Furthermore, the main body 1 is located opposite the slot hole 2 and can be selectively fixedly connected to the side of the FIB sample holder 10.

[0031] Furthermore, the main body 1 and the FIB sample holder 10 are at an angle of 5°-10° to adapt to the ion beam angle of the FIB and improve sample accuracy.

[0032] Furthermore, the top of the FIB sample holder 10 is provided with a nail station hole 11 for placing a nail station.

[0033] Example 2

[0034] like Figure 2 , 3 The diagram shows a carrier structure for use with FIB and TEM, wherein the main body 1 is located opposite the slot hole 2 and can be selectively fixedly connected to the side of the TEM sample rod 12.

[0035] The FIB sample holder has the same insertion hole as the TEM sample rod, which facilitates the overall transfer of the screen stage, rather than removing the screen from the screen stage and placing it into the TEM sample rod, thus reducing the chance of sample falling or being damaged.

[0036] Furthermore, the TEM sample rod 12 is provided with a vacuum washer 13 and a positioning pin 14 on its body.

[0037] Example 3

[0038] Using the structure of the above embodiments 1-2, the process is as follows: Step 1, the FIB sample holder 10 containing the sample, the grid stage and the main body 1 is placed in the FIB sample chamber, and the TEM sample is obtained by ion beam.

[0039] Step 2: Remove the FIB sample holder 10 and take the download mesh from the slot hole 2 of the FIB sample holder;

[0040] Step 3: Install the screen carrier directly into the slot 2 on the TEM sample rod. You can choose to have the front or back of the screen carrier facing up, depending on the shooting requirements.

[0041] Step 4: Place the TEM sample rod 12 into the TEM device for imaging.

[0042] The carrier structure of this invention can simultaneously match the FIB sample holder and the TEM sample rod, avoiding the risks caused by manual sample handling and effectively saving sample preparation costs.

Claims

1. A carrier network structure for combining FIB and TEM, comprising a main body (1), characterized in that, The main body (1) has a slot hole (2) on its side wall. At least two net holders (3) are fixedly provided on the main body (1) below the slot hole (2). A fixing bolt (4) is provided on the main body (1) adjacent to the slot hole (2). One end of the fixing bolt (4) passes through the main body (1) into the slot hole (2). The contact surface between the fixing bolt (4) and the main body (1) is threaded. The other end of the fixing bolt (4) is located on the outside of the main body (1). The slot hole (2) is slidably connected to the net holder.

2. The carrier network structure for combining FIB and TEM according to claim 1, characterized in that, The surface of the carrier net holder (3) is provided with anti-slip texture (5).

3. The carrier network structure for combining FIB and TEM according to claim 1, characterized in that, The fixing bolt (4) is provided with a grip part on one end of the outer side of the main body for easy manual tightening.

4. The carrier network structure for combining FIB and TEM according to claim 1, characterized in that, The net carrier platform includes a net carrier section (6), and a net carrier groove (7) is provided on the surface of the net carrier section (6). A connector (8) is fixedly provided on the side of the net carrier section (6) near the slot hole (2). The connector (8) slides in the slot hole (2), and the shape and structure of the connector (8) are adapted to the slot hole (2).

5. A carrier network structure for combining FIB and TEM according to claim 4, characterized in that, The carrier part (6) is provided with clamping parts (9) on two horizontally adjacent surfaces of the connector (8).

6. A carrier network structure for combining FIB and TEM according to any one of claims 1-5, characterized in that, The main body (1) is located opposite the slot hole (2) and can be optionally fixedly connected to the side of the FIB sample holder (10).

7. A carrier network structure for combining FIB and TEM according to claim 6, characterized in that, The main body (1) and the FIB sample holder (10) form an angle of 5°-10°.

8. A carrier network structure for combining FIB and TEM according to claim 6, characterized in that, The top of the FIB sample holder (10) is provided with a nail stage hole (11).

9. A carrier network structure for combining FIB and TEM according to any one of claims 1-5, characterized in that, The main body (1) is located opposite the slot hole (2) and can be optionally fixedly connected to the side of the TEM sample rod (12).

10. A carrier network structure for combining FIB and TEM according to claim 9, characterized in that, The TEM sample rod (12) is provided with a vacuum washer (13) and a positioning pin (14) on its body.

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