A test device for semiconductor processing

Abstract

The utility model discloses a testing arrangement for semiconductor processing, including conveying frame, the inside of conveying frame is provided with conveyer belt, the front end and rear end of conveyer belt upper middle are respectively arranged with the positioning board of symmetry, the outside of two positioning boards all rotatory mounting has power box, the side of power box away from positioning board is fixedly installed with transmission plate, and the inside of power box at left side is provided with motor cavity, the motor cavity inside of power box is fixedly installed with motor, and the output of motor is fixedly connected with positioning board, the both sides in conveying frame inside are respectively arranged with the slot of symmetry, the both sides of conveying frame are respectively arranged with fixed folding plate of symmetry. It has realized the turnover ability, has increased the practicality, thereby solved the problem that does not have the turnover structure when the appearance defect of semiconductor device is tested, is not favorable to the defect detection of semiconductor device positive and negative sides.

Description

Technical Field

[0001] This utility model relates to the field of testing device technology, specifically a testing device for semiconductor processing. Background Technology

[0002] Semiconductor manufacturing is a highly precise and complex process involving multiple steps and numerous process parameters. In this process, any tiny defect or flaw can have a significant impact on the performance and reliability of the final product. Therefore, visual inspection, as one of the important steps in semiconductor manufacturing testing, aims to ensure that semiconductor devices are free from physical damage, contamination, or other visible defects during the manufacturing process.

[0003] For example, the patent with publication number CN215910363U (a testing device for semiconductor processing) includes a base, a frame disposed at the top of the base and an industrial camera. A cylinder is fixedly installed on the top surface of the frame. The output end of the cylinder passes through the frame and is fixedly installed with a drive unit. A connecting part is fixedly installed on the bottom surface of the drive unit. An upwardly extending receiving groove is opened around the bottom of the connecting part. A fixing plate is fixedly installed on the top of the industrial camera.

[0004] While the aforementioned existing technologies make it more convenient and faster to repair or replace damaged industrial cameras, they lack a flip structure. Consequently, the lack of a flip structure hinders the detection of defects on both sides of semiconductor devices during surface defect testing. Therefore, there is an urgent market need to develop a testing device for semiconductor processing to help solve the existing problems. Utility Model Content

[0005] The purpose of this invention is to provide a testing device for semiconductor processing, in order to solve the problem mentioned in the background art that the lack of a flip structure is not conducive to the detection of defects on both sides of semiconductor devices when testing for appearance defects.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a testing device for semiconductor processing, comprising a conveyor frame, wherein a conveyor belt is provided inside the conveyor frame, and positioning plates are symmetrically arranged at the front end and rear end of the conveyor belt above the middle. A power box is rotatably mounted on the outer side of each of the two positioning plates, and a transmission plate is fixedly mounted on the side of the power box away from the positioning plate. A motor cavity is provided inside the power box on the left side, and a motor is fixedly mounted inside the motor cavity of the power box, and the output end of the motor is fixedly connected to the positioning plate.

[0007] Preferably, slots are symmetrically arranged on both sides of the inside of the conveyor frame, and fixed folding plates are symmetrically arranged on both sides of the conveyor frame. An electric cylinder is fixedly installed on the inner side of the fixed folding plate, and the push rod end of the electric cylinder slides through the fixed folding plate and is fixedly connected to one end of the transmission plate.

[0008] Preferably, a vertical plate is fixedly installed above the power box, and a guide post is fixedly installed on one side of the vertical plate, with one end of the guide post slidingly penetrating through the fixed folding plate.

[0009] Preferably, side plates are symmetrically fixedly installed on both sides of the conveyor frame, and an electric cylinder is fixedly installed on the top of the side plate. The push rod end of the electric cylinder slides through the side plate and is fixedly connected to the fixed folding plate.

[0010] Preferably, guide posts are symmetrically arranged on both sides of the electric cylinder, and the lower end of the guide post slides through the side plate and is fixedly connected to the fixed folding plate.

[0011] Preferably, a support leg is fixedly installed below the conveyor frame, and a mounting top plate is fixedly installed in the middle of the top of the conveyor frame. The mounting top plate is configured as an inverted U-shaped plate. A U-shaped plate is fixedly installed in the upper part of the interior of the mounting top plate, and a mounting plate is fixedly installed below the U-shaped plate. A vision camera is fixedly installed in the middle below the mounting plate, and lighting lamps are symmetrically fixedly installed on both sides below the mounting plate.

[0012] Preferably, a belt roller one is provided on one side of the inside of the conveyor belt, a belt roller two is provided on the other side of the inside of the conveyor belt, and multiple support rollers are symmetrically provided on both sides of the upper part of the inside of the conveyor belt. The belt roller one, the belt roller two and the support rollers are all rotatably connected to the conveyor frame. A support platform is provided in the middle of the upper part of the inside of the conveyor belt, and the support platform is fixedly connected to the conveyor frame.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] This utility model achieves automated transport of semiconductor devices through a conveyor belt, and uses symmetrically arranged positioning plates to position and clamp the semiconductor devices, ensuring that the semiconductor devices are fixed in position during testing. Furthermore, a motor can drive the positioning plates to automatically flip the semiconductor devices, enabling front and back defect detection, improving the accuracy of front and back defect detection during testing, and increasing practicality.

[0015] This utility model, through symmetrically arranged fixed folding plates and an electric cylinder, can drive the transmission plate to move in translation, thereby driving the two positioning plates. The position of the two positioning plates can be flexibly adjusted according to the different sizes of semiconductor devices and testing requirements, improving the versatility and adaptability of the testing device and increasing its practicality.

[0016] This utility model achieves a fixed connection between the push rod of the electric cylinder two and the fixed folding plate, enabling the electric cylinder two to directly drive the fixed folding plate to move up and down. This facilitates the stable flipping of semiconductor devices, ensures the smooth progress of testing, and increases practicality. Attached Figure Description

[0017] Figure 1 This is a front view of a semiconductor processing testing device according to the present invention;

[0018] Figure 2 This is a cross-sectional view of the conveyor frame of this utility model;

[0019] Figure 3 This is a side sectional view of the connection between the conveyor frame and the positioning plate of this utility model.

[0020] In the diagram: 1. Conveyor frame; 101. Groove; 2. Support leg; 3. Conveyor belt; 4. Mounting top plate; 5. Reverse plate; 6. Mounting plate; 7. Vision camera; 8. Lighting lamp; 9. Roller 1; 10. Roller 2; 11. Support roller; 12. Support platform; 13. Positioning plate; 14. Power box; 15. Transmission plate; 16. Fixed folding plate; 17. Electric cylinder 1; 18. Vertical plate; 19. Guide column 1; 20. Side plate; 21. Electric cylinder 2; 22. Guide column 2. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Please see Figure 1-3 An embodiment of this utility model provides a semiconductor processing testing device, including a conveyor frame 1. A conveyor belt 3 is arranged inside the conveyor frame 1. Positioning plates 13 are symmetrically arranged at the front and rear ends of the conveyor belt 3. A power box 14 is rotatably mounted on the outer side of each of the two positioning plates 13. A transmission plate 15 is fixedly installed on the side of the power box 14 away from the positioning plates 13. A motor cavity is arranged inside the power box 14 on the left side. An electric motor is fixedly installed inside the motor cavity of the power box 14, and the output end of the electric motor is fixedly connected to the positioning plate 13.

[0023] The automated transport of semiconductor devices is achieved through the conveyor belt 3 installed inside the conveyor frame 1, which is beneficial to the continuity and efficiency of the testing process. The positioning plates 13 symmetrically arranged above the drive conveyor belt 3 can position and clamp the semiconductor devices, ensuring that the semiconductor devices are fixed in position during the testing process and avoiding testing errors caused by positional deviation. Furthermore, the motor can drive the positioning plates 13 to automatically flip the semiconductor devices, realizing the detection of defects on both sides. In this way, the automated flipping mechanism can ensure the positioning of the devices during the testing process and improve the accuracy of the detection of defects on both sides during the testing process.

[0024] Furthermore, slots 101 are symmetrically arranged on both sides of the inside of the conveyor frame 1, and fixed folding plates 16 are symmetrically arranged on both sides of the conveyor frame 1. An electric cylinder 17 is fixedly installed on the inner side of the fixed folding plate 16. The push rod end of the electric cylinder 17 slides through the fixed folding plate 16 and is fixedly connected to one end of the transmission plate 15.

[0025] The slot 101 provides movement space for the push rod of the electric cylinder 17. The symmetrically arranged fixed folding plate 16 and electric cylinder 17 can drive the transmission plate 15 to move in translation, thereby driving the two positioning plates 13. The positions of the two positioning plates 13 can be flexibly adjusted according to the different sizes of semiconductor devices and testing requirements, which improves the versatility and adaptability of the testing device, better meets the testing requirements of semiconductor devices of different specifications, and increases its practicality.

[0026] Furthermore, a vertical plate 18 is fixedly installed on the top of the power box 14, and a guide post 19 is fixedly installed on one side of the vertical plate 18. One end of the guide post 19 slides through the fixed folding plate 16.

[0027] The upright plate 18 and the guide post 19 serve to guide and support. The guide post 19 slides through the fixed folding plate 16, enabling the power box 14 to maintain stable linear motion during movement and avoiding inaccurate positioning due to movement deviation.

[0028] Furthermore, side plates 20 are symmetrically fixedly installed on both sides of the conveyor frame 1, and an electric cylinder 21 is fixedly installed on the top of the side plate 20. The push rod end of the electric cylinder 21 slides through the side plate 20 and is fixedly connected to the fixed folding plate 16.

[0029] The side plate 20 provides a stable mounting position for the electric cylinder 21, ensuring the working stability of the electric cylinder 21. The push rod of the electric cylinder 21 is fixedly connected to the fixed folding plate 16, which allows the electric cylinder 21 to directly drive the fixed folding plate 16 to move up and down, thereby driving the positioning plate 13 to move up and down. This allows the positioning plate 13 to be driven to move up first when the semiconductor device is flipped, so as to ensure the stable flipping of the semiconductor device, ensuring the smooth progress of the test and increasing its practicality.

[0030] Furthermore, guide posts 22 are symmetrically arranged on both sides of the electric cylinder 21. The lower end of the guide post 22 slides through the side plate 20 and is fixedly connected to the fixed folding plate 16.

[0031] The guide post 22 provides guidance for the fixed folding plate 16, enabling the fixed folding plate 16 to maintain stable linear motion during movement, thus increasing its practicality.

[0032] Furthermore, a support leg 2 is fixedly installed below the conveyor frame 1, and a mounting top plate 4 is fixedly installed in the middle of the top of the conveyor frame 1. The mounting top plate 4 is set as an inverted U-shaped plate. A U-shaped plate 5 is fixedly installed in the upper part of the interior of the mounting top plate 4, and a mounting plate 6 is fixedly installed below the U-shaped plate 5. A vision camera 7 is fixedly installed in the middle below the mounting plate 6. The vision camera 7 is electrically connected to the processor terminal of the testing device to facilitate visual inspection. Illumination lamps 8 are symmetrically fixedly installed on both sides below the mounting plate 6.

[0033] The inverted U-shaped mounting top plate 4 not only provides installation space for components such as the U-shaped plate 5 and mounting plate 6, but also has a certain protective function, preventing external objects from interfering with internal components. The visual camera 7 can capture image information of semiconductor devices in real time, providing support for defect detection. The installation of the lighting lamp 8 can provide illumination for the visual camera 7, ensuring that the camera can clearly capture the surface details of semiconductor devices, improving image quality and the accuracy of defect detection.

[0034] Furthermore, a belt roller 9 is provided on one side of the inside of the conveyor belt 3, and a belt roller 10 is provided on the other side of the inside of the conveyor belt 3. Multiple support rollers 11 are symmetrically arranged on both sides of the upper part of the inside of the conveyor belt 3. The belt roller 9, the belt roller 10 and the support rollers 11 are all rotatably connected to the conveyor frame 1. The front end of the conveyor frame 1 is provided with a drive motor for the belt roller 9. A support platform 12 is provided in the middle of the upper part of the inside of the conveyor belt 3. The support platform 12 is fixedly connected to the conveyor frame 1.

[0035] Multiple support rollers 11 are symmetrically arranged inside the conveyor belt 3 above, providing support for the conveyor belt 3 and preventing it from sagging during operation. This is conducive to the smooth operation of the conveyor belt 3. The setting of the support platform 12 further enhances the support strength of the middle part of the conveyor belt 3, enabling the semiconductor device to be tested stably, improving the reliability of the testing device and increasing its practicality.

[0036] Working principle: During use, the conveyor belt 3 is driven and supported by the belt roller 9, the belt roller 10 and multiple support rollers 11 to transport semiconductor devices. When the semiconductor device reaches the test position, two electric cylinders 17 drive two symmetrically arranged positioning plates 13 to move through the corresponding transmission plates 15 to complete the clamping and positioning of the semiconductor device. The vision camera 7 located in the mounting top plate 4, with the assistance of the lighting lamp 8, collects images of the front and back surfaces of the semiconductor device for defect detection and analysis. When it is necessary to flip the device during the test, the motor in the power box 14 drives the positioning plate 13 to automatically flip the semiconductor device. The lifting and adjustment function is achieved by the electric cylinder 21 driving the fixed folding plate 16 to ensure that the flipping action is smooth and reliable.

[0037] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A testing apparatus for semiconductor processing, comprising a conveyor (1), characterized in that: The conveyor frame (1) is equipped with a conveyor belt (3) inside. Positioning plates (13) are symmetrically arranged at the front and rear ends of the conveyor belt (3) above the middle. Power boxes (14) are rotatably installed on the outer sides of the two positioning plates (13). A transmission plate (15) is fixedly installed on the side of the power box (14) away from the positioning plate (13). A motor cavity is provided inside the power box (14) on the left side. An electric motor is fixedly installed inside the motor cavity of the power box (14), and the output end of the electric motor is fixedly connected to the positioning plate (13).

2. The semiconductor processing testing apparatus according to claim 1, characterized in that: The conveyor frame (1) has symmetrical slots (101) on both sides inside. The conveyor frame (1) has symmetrical fixed folding plates (16) on both sides. An electric cylinder (17) is fixedly installed on the inner side of the fixed folding plate (16). The push rod end of the electric cylinder (17) slides through the fixed folding plate (16) and is fixedly connected to one end of the transmission plate (15).

3. The semiconductor processing testing apparatus according to claim 2, characterized in that: A vertical plate (18) is fixedly installed on the top of the power box (14), and a guide post (19) is fixedly installed on one side of the vertical plate (18). One end of the guide post (19) slides through the fixed folding plate (16).

4. The semiconductor processing testing apparatus according to claim 3, characterized in that: Side plates (20) are symmetrically fixedly installed on both sides of the conveyor frame (1). An electric cylinder (21) is fixedly installed on the top of the side plate (20). The push rod end of the electric cylinder (21) slides through the side plate (20) and is fixedly connected to the fixed folding plate (16).

5. The semiconductor processing testing apparatus according to claim 4, characterized in that: The electric cylinder 2 (21) is symmetrically provided with guide posts 2 (22) on both sides. The lower end of the guide post 2 (22) slides through the side plate (20) and is fixedly connected to the fixed folding plate (16).

6. The semiconductor processing testing apparatus according to claim 1, characterized in that: A support leg (2) is fixedly installed below the conveyor frame (1). A mounting plate (4) is fixedly installed in the middle above the conveyor frame (1). The mounting plate (4) is set as an inverted U-shaped plate. A spiral plate (5) is fixedly installed in the upper part of the mounting plate (4). A mounting plate (6) is fixedly installed below the spiral plate (5). A vision camera (7) is fixedly installed in the middle below the mounting plate (6). Lighting lamps (8) are symmetrically fixedly installed on both sides below the mounting plate (6).

7. The semiconductor processing testing apparatus according to claim 1, characterized in that: One side of the conveyor belt (3) is provided with a belt roller (9), and the other side of the conveyor belt (3) is provided with a belt roller (10). Multiple support rollers (11) are symmetrically arranged on both sides of the upper part of the conveyor belt (3). The belt roller (9), belt roller (10) and support rollers (11) are all rotatably connected to the conveyor frame (1). A support platform (12) is provided in the middle of the upper part of the conveyor belt (3). The support platform (12) is fixedly connected to the conveyor frame (1).

Images