Strong negative pressure sealed quartz furnace tube

Abstract

The utility model discloses a kind of strong negative pressure sealing type quartz furnace tube, belong to quartz furnace tube technical field, its technical scheme main points include quartz furnace tube main body, the bottom of quartz furnace tube main body is fixedly connected with sealing assembly, and the surface of quartz furnace tube main body is fixedly connected with limiting assembly, the sealing assembly includes support plate, solve the poor protection effect of existing quartz furnace tube, in diffusion process, quartz furnace tube needs to rotate steadily with specific speed, ensure that gas is evenly distributed, due to lack of dynamic limiting assembly, leading to quartz furnace tube still exists after installation in high-temperature diffusion furnace Shaking risk, cause quartz tube body to rotate in furnace body, prone to external scratch damage phenomenon, not only can increase production cost, but also can lead to airflow or temperature in quartz tube body uneven, affect the processing effect of workpiece surface, seriously affect the production efficiency of silicon wafer, reduce the practicability of the device.

Description

Technical Field

[0001] This utility model relates to the field of quartz furnace tube technology, and in particular to a strong negative pressure sealed quartz furnace tube. Background Technology

[0002] Quartz furnace tubes, a special industrial glass product made of silicon dioxide, have a wide range of applications in many fields due to their excellent physical and chemical properties. In the photovoltaic industry, high-temperature diffusion furnaces are used in conjunction with quartz tubes to dope monocrystalline and polycrystalline silicon wafers to form PN junctions. Currently, conventional diffusion furnaces use quartz tubes placed inside the furnace cavity to raise the temperature by heating the furnace. The quartz tubes are equipped with inlets and outlets. During the diffusion process, the silicon wafer to be diffused is placed in the center of the quartz tube, the furnace begins to heat up, and impurity source gas enters the tube through the inlet. The impurity source gas reacts at high temperature and diffuses into the silicon wafer.

[0003] The openings of most existing quartz furnace tubes are directly exposed, making them prone to damage during use and providing only limited protection.

[0004] An existing patent (publication number: CN217030264U) discloses a quartz furnace tube with negative pressure protection. By setting a protective sleeve, quartz wool, negative pressure resistant connector, and connecting flange, the protective sleeve and quartz wool can effectively protect the opening of the quartz furnace tube. The quartz wool also prevents hard contact between the protective sleeve and the opening of the quartz furnace tube, making the opening of the quartz furnace tube less susceptible to damage during installation and use. Furthermore, the protective sleeve, reinforcing ribs, and negative pressure resistant connector increase the structural strength and compressive strength of the opening of the quartz furnace tube, improve the protective effect of the quartz furnace tube, and extend the service life of the quartz furnace tube.

[0005] Existing patents offer solutions to the aforementioned problems, but their protective effects are inadequate. In the diffusion process, the quartz furnace tube needs to rotate smoothly at a specific speed to ensure uniform gas distribution. Due to the lack of dynamic restraint components, the quartz furnace tube still faces the risk of shaking after installation in the high-temperature diffusion furnace. This makes the quartz tube prone to external scratches and damage when rotating inside the furnace, which not only increases production costs but also causes uneven airflow or temperature inside the quartz tube, affecting the surface treatment of the workpiece and severely impacting the production efficiency of silicon wafers, thus reducing the practicality of the device.

[0006] To address this, a strong negative pressure sealed quartz furnace tube is proposed. Utility Model Content

[0007] The purpose of this invention is to provide a strong negative pressure sealed quartz furnace tube, which can solve the problems of poor protection effect of existing quartz furnace tubes. In the diffusion process, the quartz furnace tube needs to rotate smoothly at a specific speed to ensure uniform gas distribution. Due to the lack of dynamic limiting components, there is still a risk of shaking after the quartz furnace tube is installed in the high-temperature diffusion furnace. This makes the quartz tube body prone to external scratches and damage when rotating in the furnace body. This not only increases production costs, but also causes uneven airflow or temperature in the quartz tube body, affecting the surface treatment effect of the workpiece, seriously affecting the production efficiency of silicon wafers, and reducing the practicality of the device.

[0008] To achieve the above objectives, the present invention provides the following technical solution: a strong negative pressure sealed quartz furnace tube, comprising a quartz furnace tube body, a sealing component fixedly connected to the bottom of the quartz furnace tube body, and a limiting component fixedly connected to the surface of the quartz furnace tube body, the sealing component comprising a support plate, an annular fixing block fixedly connected to the top of the support plate, and the inner wall of the annular fixing block contacting the surface of the quartz furnace tube body;

[0009] The limiting component includes a protective shell, the inner wall of which is provided with a partition, and the inner wall of the protective shell is in contact with the surface of the quartz furnace tube body. Several conveying cylinders are fixedly connected to the surface of the protective shell, and a movable plate is movably connected inside the conveying cylinder. A movable rod is fixedly connected to the side of the movable plate away from the quartz furnace tube body, and the other end of the movable rod extends to the outside of the conveying cylinder and is provided with ball bearings. A gas supply pipe is fixedly connected to the top of the protective shell, and a gas pump is fixedly connected to the other end of the gas supply pipe.

[0010] Preferably, the top of the annular fixing block is provided with a sliding groove on both sides, and a positioning plate is fixedly connected inside the sliding groove. The top of the two positioning plates is rotatably connected with a buckle block, and a slider is slidably connected to the surface of the positioning plate. The two sliders are fixedly connected to the bottom of both sides of the quartz furnace tube body, and the surface of the slider is in contact with the inner wall of the sliding groove.

[0011] Preferably, a rubber sealing block is fixedly connected to the top of the support plate, and the surface of the rubber sealing block is in contact with the inner wall of the quartz furnace tube body.

[0012] Preferably, the surface of the rubber sealing block is provided with a magnetic block, the top of the magnetic block is provided with a magnetic ring, and the top of the magnetic ring is fixedly connected to the bottom of the quartz furnace tube body.

[0013] Preferably, the surface of the protective shell has a plurality of mounting holes for use with the conveying cylinder, and the mounting holes are connected to the partition. The top of the protective shell has a connection hole for use with the gas delivery pipe, and the connection hole is connected to the partition.

[0014] Preferably, a spring is fixedly connected to the side of the movable plate away from the main body of the quartz furnace tube, and the other end of the spring is fixedly connected to the side of the inner wall of the conveying cylinder near the ball bearing, and the spring is sleeved on the surface of the movable rod.

[0015] Preferably, a rotating ring is fixedly connected to the surface of the support plate, and a fixed cylinder is rotatably connected to the surface of the rotating ring. A rotating rod is fixedly connected to the bottom of the support plate, and the other end of the rotating rod extends to the bottom of the fixed cylinder and is fixedly connected to a rotating motor.

[0016] Preferably, the inner wall of the fixed cylinder is provided with a rotating groove for use with the rotating ring, and the surface of the rotating ring is in contact with the inner wall of the rotating groove.

[0017] Compared with the prior art, the beneficial effects of this utility model are:

[0018] 1. By setting up a sealing component, this application can form a guiding structure with the help of a positioning plate, form a mechanical lock with the buckle block, and form a magnetic attraction with the magnetic block and the magnetic ring, thereby improving the ease of use of the device.

[0019] 2. By setting up a limiting component, this application can use an air pump to fill the partition and conveying cylinder with air, and use the air pressure to push the ball bearings to contact the inner wall of the high-temperature diffusion furnace, forming a dynamic elastic limit, ensuring the stability of the rotation of the quartz furnace tube body, guaranteeing the production quality of the product, and improving the practicality of the device. Attached Figure Description

[0020] Figure 1 This is an overall structural diagram of the strong negative pressure sealed quartz furnace tube of this utility model;

[0021] Figure 2 This is a front view of the strong negative pressure sealed quartz furnace tube of this utility model;

[0022] Figure 3 This is a schematic diagram showing the connection between the fixed cylinder and the rotating motor of this utility model;

[0023] Figure 4 This is a schematic diagram of the structure of the limiting component of this utility model;

[0024] Figure 5 This is a schematic diagram of the sealing assembly of this utility model.

[0025] In the diagram, 1. Quartz furnace tube body; 2. Sealing assembly; 201. Support plate; 202. Annular fixing block; 203. Slide groove; 204. Positioning plate; 205. Buckle block; 206. Slider; 3. Limiting assembly; 301. Protective shell; 302. Partition; 303. Conveying cylinder; 304. Moving plate; 305. Moving rod; 306. Ball bearing; 307. Gas supply pipe; 308. Air pump; 4. Rubber sealing block; 5. Magnetic block; 6. Magnetic ring; 7. Mounting hole; 8. Connecting hole; 9. Spring; 10. Rotating ring; 11. Fixed cylinder; 12. Rotating rod; 13. Rotating motor; 14. Rotating groove. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Please see Figure 1-5 The present invention provides the following technical solution:

[0028] A strong negative pressure sealed quartz furnace tube includes a quartz furnace tube body 1, a sealing component 2 is fixedly connected to the bottom of the quartz furnace tube body 1, and a limiting component 3 is fixedly connected to the surface of the quartz furnace tube body 1. The sealing component 2 includes a support plate 201, and an annular fixing block 202 is fixedly connected to the top of the support plate 201. The inner wall of the annular fixing block 202 is in contact with the surface of the quartz furnace tube body 1.

[0029] The limiting component 3 includes a protective shell 301. The inner wall of the protective shell 301 is provided with a partition 302, and the inner wall of the protective shell 301 is in contact with the surface of the quartz furnace tube body 1. Several conveying cylinders 303 are fixedly connected to the surface of the protective shell 301, and a movable plate 304 is movably connected inside the conveying cylinder 303. A movable rod 305 is fixedly connected to the side of the movable plate 304 away from the quartz furnace tube body 1, and the other end of the movable rod 305 extends to the outside of the conveying cylinder 303 and is provided with a ball bearing 306. A gas supply pipe 307 is fixedly connected to the top of the protective shell 301, and a gas pump 308 is fixedly connected to the other end of the gas supply pipe 307.

[0030] In this embodiment: the positioning plate 204 forms a guiding structure, allowing the quartz furnace tube body 1 to move smoothly under the constraint of the slider 206. At the same time, the locking block 205 is rotated to lock the slider 206, forming a mechanical lock, achieving precise installation and quick disassembly, improving the ease of use of the sealing component 2. Then, under the action of the protective shell 301, a rigid protective structure can be formed, reducing damage to the quartz furnace tube body 1. Simultaneously, the air pump 308 is started, allowing outside air to flow smoothly into the partition 302 through the air supply pipe 307, and finally into the conveying cylinder 303, pushing the moving plate 304 and the moving rod 305 to move, thereby causing the ball bearing 306 to contact the inner wall of the high-temperature diffusion furnace, forming a dynamic elastic limit, ensuring the stable rotation of the quartz furnace tube body 1, and improving the stability of the device.

[0031] Specifically, such as Figure 5 As shown, both sides of the top of the annular fixing block 202 are provided with sliding grooves 203, and the interior of the sliding grooves 203 is fixedly connected with positioning plates 204. The tops of the two positioning plates 204 are rotatably connected with buckle blocks 205, and the surface of the positioning plates 204 is slidably connected with sliders 206. The two sliders 206 are fixedly connected to the bottom of both sides of the quartz furnace tube body 1, and the surface of the sliders 206 is in contact with the inner wall of the sliding grooves 203.

[0032] Specifically, such as Figure 5 As shown, a rubber sealing block 4 is fixedly connected to the top of the support plate 201, and the surface of the rubber sealing block 4 is in contact with the inner wall of the quartz furnace tube body 1.

[0033] Specifically, such as Figure 5 As shown, a magnetic block 5 is provided on the surface of the rubber sealing block 4, and a magnetic ring 6 is provided on the top of the magnetic block 5. The top of the magnetic ring 6 is fixedly connected to the bottom of the quartz furnace tube body 1.

[0034] In this embodiment: by using the magnetic block 5 and the magnetic ring 6 together, the magnetic block 5 and the magnetic ring 6 come into contact and are attracted and fixed by their magnetic force, so as to realize the rapid installation of the quartz furnace tube body 1. At the same time, the rubber sealing block 4 is precisely embedded in the quartz furnace tube body 1, forming an efficient sealing environment, preventing gas leakage, ensuring the production quality of the product, and improving the ease of use of the sealing component 2.

[0035] Specifically, such as Figure 4 As shown, the protective housing 301 has several mounting holes 7 for use with the conveying cylinder 303, and the mounting holes 7 are connected to the partition 302. The top of the protective housing 301 has a connection hole 8 for use with the gas pipe 307, and the connection hole 8 is connected to the partition 302.

[0036] Specifically, such as Figure 4As shown, a spring 9 is fixedly connected to the side of the movable plate 304 away from the quartz furnace tube body 1. The other end of the spring 9 is fixedly connected to the side of the inner wall of the conveying cylinder 303 near the ball bearing 306, and the spring 9 is sleeved on the surface of the movable rod 305.

[0037] In this embodiment: the airflow generated by the air pump 308 flows smoothly into the partition 302 through the connecting hole 8, and at the same time, under the action of the mounting hole 7, the airflow flows smoothly into the conveying cylinder 303, simultaneously pushing the moving plate 304 and the moving rod 305 to move in the conveying cylinder 303, thereby causing the ball bearing 306 to contact the inner wall of the high-temperature diffusion furnace, forming a dynamic elastic limit, ensuring the stability of the rotation of the quartz furnace tube body 1. After processing is completed, the gas supply is stopped, and with the help of the elastic action of the spring 9, the ball bearing 306 can be driven to reset, which facilitates subsequent disassembly and maintenance and improves the convenience of using the limiting component 3.

[0038] Specifically, such as Figure 3 , Figure 5 As shown, a rotating ring 10 is fixedly connected to the surface of the support plate 201, and a fixed cylinder 11 is rotatably connected to the surface of the rotating ring 10. A rotating rod 12 is fixedly connected to the bottom of the support plate 201, and the other end of the rotating rod 12 extends to the bottom of the fixed cylinder 11 and is fixedly connected to a rotating motor 13.

[0039] Specifically, such as Figure 3 As shown, the inner wall of the fixed cylinder 11 is provided with a rotating groove 14 for use with the rotating ring 10, and the surface of the rotating ring 10 is in contact with the inner wall of the rotating groove 14.

[0040] In this embodiment: the rotating rod 12 is driven to rotate by the rotating motor 13, which drives the support plate 201 to rotate smoothly under the restriction of the rotating ring 10, and synchronously drives the quartz furnace tube body 1 to rotate, ensuring that the airflow distribution inside the quartz furnace tube body 1 is uniform and the heating is consistent, thus ensuring the production quality of the product and improving the ease of use of the device.

[0041] Working Principle: During silicon wafer production, firstly, the locking block 205 is rotated to release the locking state of the slider 206, aligning the slider 206 with the positioning plate 204 to form a guiding structure, ensuring precise installation of the quartz furnace tube body 1. This allows the magnetic block 5 to contact the magnetic ring 6, using their magnetic force to form an adsorption fixation. Then, the locking block 205 is rotated in the opposite direction for secondary reinforcement. Combined with the rubber sealing block 4, this creates an efficient sealing environment, preventing gas leakage and completing precise installation and quick disassembly. Next, the protective shell 301 is fitted onto the surface of the quartz furnace tube body 1, forming a rigid protective structure to reduce damage to the quartz furnace tube body 1. Simultaneously, the air pump 308 is activated, allowing outside air to pass through... The gas supply pipe 307 smoothly flows into the partition 302 and finally into the conveying cylinder 303, pushing the moving plate 304 and the moving rod 305 to move. This causes the ball bearing 306 to contact the inner wall of the high-temperature diffusion furnace, forming a dynamic elastic limit to ensure the stable rotation of the quartz furnace tube body 1. After the installation and positioning of the quartz furnace tube body 1 are completed, the rotating motor 13 is started to drive the rotating rod 12 to rotate, causing the quartz furnace tube body 1 to rotate smoothly under the restriction of the ball bearing 306 and the rotating ring 10. This ensures that the airflow distribution inside the quartz furnace tube body 1 is uniform and the heating is consistent, thus ensuring the quality of silicon wafer processing. After processing is completed, the gas supply is stopped. With the help of the elasticity of the spring 9, the ball bearing 306 can be reset, which is convenient for subsequent disassembly and maintenance.

[0042] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A strong negative pressure sealed quartz furnace tube, comprising a quartz furnace tube body (1), characterized in that: A sealing component (2) is fixedly connected to the bottom of the quartz furnace tube body (1), and a limiting component (3) is fixedly connected to the surface of the quartz furnace tube body (1). The sealing component (2) includes a support plate (201), and an annular fixing block (202) is fixedly connected to the top of the support plate (201). The inner wall of the annular fixing block (202) is in contact with the surface of the quartz furnace tube body (1). The limiting component (3) includes a protective shell (301), the inner wall of which is provided with a partition (302), and the inner wall of the protective shell (301) is in contact with the surface of the quartz furnace tube body (1). A plurality of conveying cylinders (303) are fixedly connected to the surface of the protective shell (301), and a movable plate (304) is movably connected inside the conveying cylinder (303). A movable rod (305) is fixedly connected to the side of the movable plate (304) away from the quartz furnace tube body (1), and the other end of the movable rod (305) extends to the outside of the conveying cylinder (303) and is provided with a ball bearing (306). A gas supply pipe (307) is fixedly connected to the top of the protective shell (301), and a gas pump (308) is fixedly connected to the other end of the gas supply pipe (307).

2. The strong negative pressure sealed quartz furnace tube according to claim 1, characterized in that: The top of the annular fixing block (202) is provided with sliding grooves (203) on both sides, and the interior of the sliding groove (203) is fixedly connected with positioning plates (204). The top of the two positioning plates (204) is rotatably connected with buckle blocks (205), and the surface of the positioning plate (204) is slidably connected with sliders (206). The two sliders (206) are fixedly connected to the bottom of both sides of the quartz furnace tube body (1), and the surface of the sliders (206) is in contact with the inner wall of the sliding groove (203).

3. The strong negative pressure sealed quartz furnace tube according to claim 1, characterized in that: A rubber sealing block (4) is fixedly connected to the top of the support plate (201), and the surface of the rubber sealing block (4) is in contact with the inner wall of the quartz furnace tube body (1).

4. The strong negative pressure sealed quartz furnace tube according to claim 3, characterized in that: The surface of the rubber sealing block (4) is provided with a magnetic block (5), and the top of the magnetic block (5) is provided with a magnetic ring (6), and the top of the magnetic ring (6) is fixedly connected to the bottom of the quartz furnace tube body (1).

5. The strong negative pressure sealed quartz furnace tube according to claim 1, characterized in that: The protective shell (301) has several mounting holes (7) on its surface for use with the conveying cylinder (303), and the mounting holes (7) are connected to the partition (302). The top of the protective shell (301) has a connecting hole (8) for use with the gas pipe (307), and the connecting hole (8) is connected to the partition (302).

6. The strong negative pressure sealed quartz furnace tube according to claim 1, characterized in that: A spring (9) is fixedly connected to the side of the movable plate (304) away from the quartz furnace tube body (1). The other end of the spring (9) is fixedly connected to the side of the inner wall of the conveying cylinder (303) near the ball (306), and the spring (9) is sleeved on the surface of the movable rod (305).

7. The strong negative pressure sealed quartz furnace tube according to claim 1, characterized in that: A rotating ring (10) is fixedly connected to the surface of the support plate (201), and a fixed cylinder (11) is rotatably connected to the surface of the rotating ring (10). A rotating rod (12) is fixedly connected to the bottom of the support plate (201), and the other end of the rotating rod (12) extends to the bottom of the fixed cylinder (11) and is fixedly connected to a rotating motor (13).

8. A strong negative pressure sealed quartz furnace tube according to claim 7, characterized in that: The inner wall of the fixed cylinder (11) is provided with a rotating groove (14) for use with the rotating ring (10), and the surface of the rotating ring (10) is in contact with the inner wall of the rotating groove (14).

Images