Edge passivation boat and edge passivation apparatus

Abstract

The utility model provides a kind of edge passivation boat and edge passivation equipment, wherein edge passivation boat includes boat frame and first electrode plate, and boat frame is hollow inside to form accommodating space, and accommodating space has interval arrangement and is used to place the wafer box loading channel of battery wafer box, and electrode loading channel is located between adjacent wafer box loading channel;First electrode plate is placed in electrode loading channel, and first electrode plate is opposite with the electrode of battery wafer box, and the two sides of first electrode plate respectively towards the edge to be passivated of battery wafer in adjacent wafer box loading channel;The utility model significantly improves the number of battery wafer that edge passivation boat can carry out edge coating passivation simultaneously.

Description

Technical Field

[0001] This utility model relates to the field of crystalline silicon solar cells, and more specifically, to the field of edge coating around crystalline silicon solar cells. Background Technology

[0002] With the development of the photovoltaic industry and the continuous upgrading of crystalline silicon cell technology, laser dicing technology is used in the cell module production process to divide a whole cell into two or more smaller pieces. This reduces string current and power loss due to reduced series resistance, making it a crucial and effective way to improve the power output of photovoltaic modules. However, laser dicing also impacts cell conversion efficiency. Carrier recombination is more pronounced on the newly cut surfaces (i.e., the unpassivated edges) of the cell, and for high-efficiency cells, edge recombination has a more significant impact on conversion efficiency. To eliminate or reduce the cell conversion efficiency loss caused by laser non-destructive dicing (TLS), a passivation coating process is applied to the newly formed edges of the diced cells. This can effectively reduce or eliminate the conversion efficiency loss caused by dicing.

[0003] Currently, edge passivation equipment is commonly used to coat and passivate solar cell boxes containing solar cells. However, when a large number of solar cells after laser cutting need to undergo edge coating and passivation, the coating and passivation efficiency of the edge passivation equipment in related technologies is very low, which cannot meet the needs of manufacturers for large-scale edge coating and passivation of solar cells. Therefore, how to improve the coating and passivation efficiency of edge passivation equipment has become an urgent problem to be solved. Utility Model Content

[0004] The purpose of this invention is to provide an edge passivation boat and an edge passivation device to solve the problem that the edge passivation devices in the related technology have low efficiency when coating solar cells and cannot quickly achieve large-scale edge passivation coating of solar cells.

[0005] This utility model first proposes an edge-passivating boat, comprising:

[0006] The boat frame has a hollow interior forming a storage space. The storage space has a cell loading channel spaced apart for placing cell boxes and an electrode loading channel located between adjacent cell loading channels.

[0007] The first electrode plate is placed in the electrode loading channel. The first electrode plate is opposite to the electrode of the cell box, and the two sides of the first electrode plate are respectively facing the passivation edge of the cell in the cell box in the adjacent cell loading channel.

[0008] Furthermore, it also includes a second electrode plate and a third electrode plate, which are placed in the electrode loading channel and located on both sides of the first electrode plate. The electrodes of the second electrode plate and the third electrode plate are the same and opposite to the electrodes of the first electrode plate. Both the second electrode plate and the third electrode plate have drainage holes corresponding to the cell boxes. The drainage hole of the second electrode plate corresponds to the passivation edge of the cell in the cell box in one of the cell box loading channels, while the drainage hole of the third electrode plate corresponds to the passivation edge of the cell in the cell box in the other cell box loading channel.

[0009] Furthermore, the boat frame is equipped with a first electrode socket and a second electrode socket. The first electrode socket is electrically connected to the first electrode plate, and the second electrode socket is electrically connected to the battery cell box, the second electrode plate, and the third electrode plate, respectively.

[0010] Furthermore, an electrode extension is provided at one end of the first electrode plate near the first electrode socket, and the electrode extension is electrically connected to the first electrode socket through an electrode connector.

[0011] Furthermore, the ends of the second electrode plate and the third electrode plate near the second electrode socket are connected by conductive connectors. The two ends of the conductive connectors are connected to two conductive supports, and the second electrode socket is electrically connected to one of the conductive supports through a conductive block.

[0012] Furthermore, a conductive placement rack is provided in the cell loading channel of the boat frame. The conductive placement rack has multiple cell carrier positions for placing cell cells. The second electrode socket is electrically connected to the cell cell through the conductive placement rack. An electrode insulating seat is provided on the first electrode socket to block the electrical connection between the first electrode socket and the conductive placement rack.

[0013] Furthermore, the first electrode plate, the second electrode plate, and the third electrode plate are electrically insulated from each other by multiple insulating connectors.

[0014] Furthermore, the boat frame includes a bottom plate, a cover plate, a left side plate, a right side plate, a front end plate, and a rear end plate that together enclose and form an accommodating space.

[0015] Furthermore, a spray assembly is provided on the rear panel, and the spray assembly has a group of spray holes for connecting to the electrode loading channel and spraying process gas.

[0016] This invention also proposes an edge passivation device, including a reactor with a reaction chamber, an edge passivation boat as described above placed in the reaction chamber, and a cell cassette, wherein the cell cassette is placed in a cell cassette loading channel, and the cells in the cell cassette have a passivation edge facing the electrode loading channel.

[0017] Compared with existing technologies, the advantages of the edge passivation boat and edge passivation equipment provided by this invention are as follows: This invention, through the spaced-apart cell loading channels of the edge passivation boat, allows for a greater number of cell cassettes and cells to be loaded. Simultaneously, a first electrode plate is placed in the electrode loading channel located between adjacent cell loading channels. An alternating electric field is formed between the first electrode plate and the edges of the cells to be passivated (located in the cell cassettes on both sides), during which process gas generates plasma to achieve edge coating passivation of the edges of the cells in the cell cassettes on both sides. Therefore, this invention significantly increases the number of cells that can be simultaneously edge-coated and passivated by the edge passivation boat. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A perspective view of the edge-passivated boat provided for a preferred embodiment of the present invention;

[0020] Figure 2 A side view of the first electrode plate provided in a preferred embodiment of this utility model;

[0021] Figure 3 Side views of the second and third electrode plates provided in a preferred embodiment of this utility model;

[0022] Figure 4 A perspective view of the edge-passivated boat provided in a preferred embodiment of the present invention after removing the cover plate, the right side plate and the front end plate;

[0023] Figure 5 A top view of an edge-blunting boat provided in a preferred embodiment of this utility model;

[0024] Figure 6 A schematic diagram of the assembly of the three electrode plates provided in a preferred embodiment of this utility model;

[0025] The main markings in the attached figures are as follows:

[0026] 10. Boat frame; 11. Conductive placement rack; 12. Sheet holder; 13. Base plate; 14. Cover plate; 15. Left side plate; 16. Right side plate; 17. Front end plate; 18. Rear end plate; 19. Weight reduction groove;

[0027] 21. First electrode plate; 22. Second electrode plate; 23. Third electrode plate; 24. Drainage hole; 211. Electrode extension;

[0028] 31. First electrode socket; 32. Second electrode socket; 311. Electrode insulating base; 312. First insulating plate; 313. Second insulating plate;

[0029] 41. Electrode connector; 42. Conductive connector; 43. Conductive support; 44. Conductive block; 45. Conductive spring washer; 46. First insulating nut; 47. Sleeve;

[0030] 51. Insulating connector; 52. Insulating flat washer; 53. Second insulating nut; 54. Insulating sleeve; 55. Support frame;

[0031] 61. Spray assembly. Detailed Implementation

[0032] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0033] To reduce and eliminate the conversion efficiency loss of solar cells caused by laser dicing and half-cell technology in the module manufacturing process, solar cell manufacturers currently use edge passivation technology to passivate the edges of the cells. Edge passivation equipment can passivate the cells in the cell cassette; however, when large quantities of laser-cut cells require edge passivation, the passivation efficiency of existing edge passivation equipment is very low, failing to meet manufacturers' needs for large-scale edge passivation of solar cells. Therefore, improving the passivation efficiency of edge passivation equipment has become an urgent problem to be solved.

[0034] Based on this, the present invention adopts a novel multi-channel edge passivation boat to meet the needs of large-scale edge coating passivation of laser-cut battery cells, thereby increasing the number of battery cell boxes that can be loaded simultaneously in the edge passivation boat, and enabling simultaneous edge coating passivation of battery cells in the multi-channel battery cell boxes within the edge passivation boat.

[0035] Please refer to the following: Figures 1 to 4In a preferred embodiment of this invention, the edge passivation boat includes a boat frame 10 and a first electrode plate 21. The boat frame 10 has a hollow interior forming an accommodating space, which includes a cell loading channel spaced apart for placing cell cassettes and an electrode loading channel located between adjacent cell loading channels. The first electrode plate 21 is placed within the electrode loading channel, with its electrodes opposite to those of the cell cassettes, and both sides of the first electrode plate 21 facing the passivation edges of the cell cassettes within the adjacent cell loading channels.

[0036] This invention features an edge passivation boat with multiple cell loading channels, each capable of holding multiple cell boxes. Each cell box can hold a number of cells at a time, increasing the number of cell boxes and cells that the edge passivation boat can accommodate. Simultaneously, a first electrode plate 21 is placed in the electrode loading channel between adjacent cell loading channels. An alternating electric field is formed between the first electrode plate 21 and the edges of the cells to be passivated (located in the cell boxes on either side of it). During this process, process gas generates plasma to achieve edge coating passivation of the edges of the cells in the cell boxes on both sides. Therefore, this invention significantly increases the number of cells that the edge passivation boat can simultaneously perform edge coating passivation.

[0037] It should be noted that the number of cell cassette loading channels and electrode loading channels within the carrier 10 can be set according to actual needs. For ease of explanation, the preferred embodiment of this utility model is illustrated by an example where the carrier 10 has two cell cassette loading channels and one electrode loading channel. Of course, in other optional embodiments, the carrier 10 can have three cell cassette loading channels and two electrode loading channels, or four cell cassette loading channels and three electrode loading channels, etc. When the number of cell cassette loading channels within the carrier 10 is three or more, double-sided passivation coating of the cells within the cell cassette can also be achieved.

[0038] In the preferred embodiment of this utility model, such as Figure 3 , Figure 4 As shown, the edge passivation boat also includes a second electrode plate 22 and a third electrode plate 23, which are placed in the electrode loading channel and located on both sides of the first electrode plate 21. The electrodes of the second electrode plate 22 and the third electrode plate 23 are the same and opposite to the electrodes of the first electrode plate 21. Both the second electrode plate 22 and the third electrode plate 23 are provided with drainage holes 24. The drainage hole 24 of the second electrode plate 22 corresponds to the edge of the battery cell in the battery cell box in one of the battery cell loading channels to be passivated, while the drainage hole 24 of the third electrode plate 23 corresponds to the edge of the battery cell in the battery cell box in the other battery cell loading channel to be passivated.

[0039] This invention adds a second electrode plate 22 and a third electrode plate 23 to a first electrode plate 21 placed in an electrode loading channel. The first electrode plate 21 is a solid structure, while the second electrode plate 22 and the third electrode plate 23 are provided with multiple drainage holes 24. The multiple drainage holes 24 of the second electrode plate 22 correspond one-to-one with multiple cell boxes (located in one cell box loading channel), and the drainage holes 24 of the second electrode plate 22 correspond to the edge of the cell to be passivated in the cell box. The multiple drainage holes 24 of the third electrode plate 23 correspond one-to-one with multiple cell boxes (located in another cell box loading channel), and the drainage holes 24 of the third electrode plate 23 correspond to the edge of the cell to be passivated in the cell box. This design allows each drainage hole 24 of the second electrode plate 22 to drain and deposit plasma between the second electrode plate 22 and the first electrode plate 21 onto the passivation edge of the solar cell (within the corresponding solar cell box). Similarly, each drainage hole 24 of the third electrode plate 23 can drain and deposit plasma between the third electrode plate 23 and the first electrode plate 21 onto the passivation edge of the solar cell (within the corresponding solar cell box). This achieves superimposed coating passivation of solar cells in all solar cell boxes within the edge passivation boat, which not only increases the number of solar cell boxes that the edge passivation boat can load simultaneously, but also accelerates the coating speed of the edge passivation boat on the solar cells by draining and depositing plasma between the electrode plates onto the passivation edge of the solar cell through the drainage holes 24 in the second electrode plate 22 and the third electrode plate 23, thus improving the coating efficiency of the edge passivation boat.

[0040] It should be noted that the distance between the second electrode plate 22 and the first electrode plate 21 can be set to 10-50 mm, and the distance between the third electrode plate 23 and the first electrode plate 21 can be set to 10-50 mm. The distance between the second electrode plate 22 and the cell cassette located on one side of it can be set to 10-50 mm, and the distance between the third electrode plate 23 and the cell cassette located on one side of it can be set to 10-50 mm. The optimal coating effect of this edge passivation boat can be achieved by adjusting the distance between the electrode plates and between the electrode plates and the cell cassette.

[0041] It should also be noted that, since the passivation edges of all the cells inside the cell box are located at the opening of the cell box, the size of the drainage hole 24 only needs to be greater than or equal to the length and width of the opening of the cell box. The number and shape of the drainage holes 24 can be set according to actual needs. In this preferred embodiment, for example... Figure 3 As shown, the second electrode plate 22 and the third electrode plate 23 have eight drainage holes 24, and the drainage holes 24 are square holes. Of course, in other optional embodiments, the shape of the drainage holes 24 can also be elliptical, rhomboid, or irregular, etc.

[0042] In the preferred embodiment of this utility model, such as Figure 1 , Figure 4 As shown, the boat frame 10 is provided with a first electrode socket 31 and a second electrode socket 32. The first electrode socket 31 is electrically connected to the first electrode plate 21, and the second electrode socket 32 ​​is electrically connected to the battery cell box, the second electrode plate 22 and the third electrode plate 23 respectively.

[0043] It should be noted that the first electrode socket 31 and the second electrode socket 32 ​​are connected to different electrodes. For example, when the first electrode socket 31 is connected to the positive electrode, the second electrode socket 32 ​​is connected to the negative electrode. Conversely, when the first electrode socket 31 is connected to the negative electrode, the second electrode socket 32 ​​is connected to the positive electrode. At the same time, the first electrode socket 31 has the same electrode as the first electrode plate 21, and the second electrode socket 32 ​​has the same electrode as the second electrode plate 22, the third electrode plate 23, and all the cells in the cell boxes within the edge passivation boat.

[0044] In the preferred embodiment of this utility model, such as Figure 2 , Figure 4 As shown, an electrode extension 211 is provided at one end of the first electrode plate 21 near the first electrode socket 31. The electrode extension 211 is electrically connected to the first electrode socket 31 through the electrode connector 41.

[0045] It should be noted that the electrode connector 41 has an insulating sleeve made of insulating material, which prevents the current from the electrode connector 41 from conducting through the second electrode plate 22 and the third electrode plate 23. An electrode extension 211 is provided at the lower part of the first electrode plate 21 near the first electrode socket 31. This electrode extension 211 is a protruding right angle. This electrode extension 211 can extend outward a certain distance relative to the second electrode plate 22 and the third electrode plate 23. Then, the electrode extension 211 of the first electrode plate 21 connects with the electrode connector 41 and conducts electricity, thereby further preventing the current from the first electrode socket 31 and the electrode connector 41 from flowing through to the second electrode plate 22 and the third electrode plate 23.

[0046] In the preferred embodiment of this utility model, such as Figures 4 to 6 As shown, the second electrode plate 22 and the third electrode plate 23 are each connected at one end near the second electrode socket 32 ​​via a conductive connector 42. The two ends of the conductive connector 42 are connected to two conductive supports 43 respectively. The second electrode socket 32 ​​is electrically connected to one of the conductive supports 43 via a conductive block 44. This design ensures that both the second electrode plate 22 and the third electrode plate 23 conduct current to the second electrode socket 32, meaning that the first electrode plate 21 and the third electrode plate 23 carry the same current.

[0047] It should be noted that the second electrode plate 22 and the third electrode plate 23 are electrically connected via conductive connectors 42. Both ends of the second electrode plate 22 and the third electrode plate 23 can be connected via conductive connectors 42, with each end of each conductive connector 42 connected to two conductive support members 43. Preferably, the conductive connector 42 is a conductive rod, with conductive spring pads 45 at each end. The body of the conductive connector 42 can be fitted with a sleeve 47. The portion of the sleeve 47 between the second electrode plate 22 and the third electrode plate 23 is an insulating section, while the remaining portion is a conductive section, ensuring further enhancement of the conductivity of the conductive connector 42. Simultaneously, the sleeve 47 surrounding the conductive connector 42 prevents damage caused by long-term use. Both the conductive connector 42 and the conductive spring pads 45 are made of conductive materials, such as graphite, as long as they achieve conductivity; no specific limitation is imposed here. In addition, each end of the conductive connector 42 is provided with a first insulating nut 46. The first insulating nut 46 is made of insulating material, such as ceramic, quartz, or tile, as long as it can achieve the function of insulation. No limitation is made here.

[0048] In the preferred embodiment of this utility model, such as Figure 4 As shown, a conductive placement rack 11 is provided in the cell loading channel of the boat frame 10. The conductive placement rack 11 has multiple cell carrier positions 12 for placing cell cells. The second electrode socket 32 ​​is electrically connected to the cell cell through the conductive placement rack 11. An electrode insulating seat 311 is provided on the first electrode socket 31 to block the electrical connection between the first electrode socket 31 and the conductive placement rack 11.

[0049] It should be noted that multiple conductive placement racks 11 located in different cell loading channels can be electrically connected via conductive connecting rods. The second electrode socket 32 ​​is directly electrically connected to one of the conductive placement racks 11, thereby enabling the second electrode socket 32 ​​to be electrically connected to all conductive placement racks 11 and all cell boxes in the edge passivation boat. The first electrode socket 31 achieves current isolation from the cell box through an electrode insulating base 311 and an insulating plate. The electrode insulating base 311 is sleeved on the body of the first electrode socket 31, and the insulating plate includes a first insulating plate 312 and a second insulating plate 313. This design ensures that after the RF power supply is connected, the electrodes of the first electrode plate 21 are opposite to those of the cell boxes on both sides, generating a high-frequency alternating electric field between the first electrode plate 21 and the cell boxes on both sides. This generates plasma from the process gas, enabling simultaneous plasma chemical vapor deposition coating of the cell edges in the cell boxes on both sides.

[0050] In the preferred embodiment of this utility model, such as Figures 4 to 6As shown, the first electrode plate 21, the second electrode plate 22 and the third electrode plate 23 are electrically insulated from each other by a plurality of insulating connectors 51.

[0051] It should be noted that the insulating connector 51 is preferably an insulating rod. Each end of the insulating connector 51 is provided with an insulating flat washer 52 and a second insulating nut 53 to strengthen the fixing effect between the multiple electrode plates. The body of the insulating connector 51 can be fitted with an insulating sleeve 54 to prevent damage caused by long-term use. The insulating flat washer 52, the second insulating nut 53, and the insulating connector 51 are all made of insulating material, such as ceramic, quartz, or tile, as long as it can achieve the insulating function; no limitation is made here. This prevents current conduction between the first electrode plate 21, the third electrode plate 23, and the second electrode plate 22, thereby ensuring that the electrodes of the first electrode plate 21 and the second electrode plate 22 are opposite, and the electrodes of the third electrode plate 23 and the first electrode plate 21 are opposite. Furthermore, the insulating connector 51 is divided into a long insulating connector and a short insulating connector. The two ends of the long insulating connector are connected to two support frames 55 respectively to strengthen the fixing effect of the multiple electrode plates within the boat frame 10.

[0052] In the preferred embodiment of this utility model, such as Figure 1 , Figure 4 As shown, the boat frame 10 includes a bottom plate 13, a cover plate 14, a left side plate 15, a right side plate 16, a front end plate 17, and a rear end plate 18 that together enclose and form an accommodating space.

[0053] It should be noted that the base plate 13, cover plate 14, left side plate 15, right side plate 16, front end plate 17, and rear end plate 18 can form a closed accommodating space, allowing all the cell boxes in the edge passivation boat to undergo edge coating passivation within the closed space. This prevents the plasma generated from flowing to other locations outside the edge passivation boat, increasing the plasma concentration during the edge passivation coating process and accelerating the edge passivation speed of the cells within the cell boxes, thereby improving the coating efficiency. Furthermore, in this preferred embodiment, the first electrode socket 31 and the second electrode socket 32 ​​are disposed on the front end plate 17. The left side plate 15 and the right side plate 16 have multiple weight-reducing grooves 19, preferably rhomboid in shape.

[0054] In the preferred embodiment of this utility model, such as Figure 4 , Figure 5 As shown, a spray assembly 61 is provided on the rear end plate 18. The spray assembly 61 adopts an approximately cuboid structure design and has a group of spray holes for connecting to the electrode loading channel and spraying process gas. It should be understood that the number, shape, and size of the spray holes in the spray hole group can be set according to actual needs and are not limited here.

[0055] This utility model also provides an edge passivation device, including a reactor with a reaction chamber, an edge passivation boat placed inside the reaction chamber, and a cell cassette. The structure of the edge passivation boat has been described in detail above and will not be repeated here. The edge passivation boat has a cassette loading channel and an electrode loading channel, wherein the cell cassette is placed within the cassette loading channel, and the cell cassette has an edge to be passivated facing the electrode loading channel.

[0056] In practical applications, the reaction chamber can be fed and removed by an automatic feeding and unloading mechanism. The edge coating and passivation process of the solar cells is performed by fully automatic control of factors such as the electric field, gas field, temperature field, and time within the reaction chamber. It simultaneously meets the gas field, electric field, and temperature field requirements of ALD, PECVD, and annealing processes, enabling the effective and stable implementation of ALD, PECVD, and annealing processes, and allowing seamless switching between multiple processes in the same working environment. The equipment has strong process scalability; silicon nitride film deposition and annealing processes can be added to the same passivation process formula to achieve the superposition of multiple processes for better passivation results.

[0057] The edge passivation boat and equipment provided by this invention significantly increase the number of solar cells that can be simultaneously passivated by the edge passivation boat. It enables efficient, high-volume, and controllable deposition of various passivation films using ALD+PECVD processes on the edges of solar cells, realizing the industrialization of edge passivation deposition for half-cell solar cells. The combination of ALD+PECVD processes ensures passivation effectiveness while greatly increasing the film deposition rate and resulting in high-quality films. Furthermore, the process route employing multiple deposition processes to generate composite passivation films can more effectively reduce and repair conversion efficiency losses after a solar cell is cracked. This invention has advantages such as stable process, excellent passivation films, high deposition efficiency, compatibility with multiple deposition types, and low manufacturing cost.

[0058] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An edge-passivated boat, characterized in that, include: The boat frame has a hollow interior forming an accommodating space, which has a cell loading channel spaced apart for placing cell boxes and an electrode loading channel located between adjacent cell loading channels. A first electrode plate is placed in the electrode loading channel. The first electrode plate is opposite to the electrode of the cell cassette, and the two sides of the first electrode plate face the passivation edge of the cell in the cell cassette in the adjacent cell loading channel.

2. The edge-passivated boat as described in claim 1, characterized in that, It also includes a second electrode plate and a third electrode plate, which are placed in the electrode loading channel and located on both sides of the first electrode plate. The electrodes of the second electrode plate and the third electrode plate are the same and opposite to the electrodes of the first electrode plate. Both the second electrode plate and the third electrode plate are provided with drainage holes. The drainage hole of the second electrode plate corresponds to the edge of the battery cell in the battery cell cassette in one of the cell loading channels that needs to be passivated, while the drainage hole of the third electrode plate corresponds to the edge of the battery cell in the battery cell cassette in the other cell loading channel that needs to be passivated.

3. The edge-passivated boat as described in claim 2, characterized in that, The boat frame is provided with a first electrode socket and a second electrode socket. The first electrode socket is electrically connected to the first electrode plate, and the second electrode socket is electrically connected to the battery cell box, the second electrode plate and the third electrode plate respectively.

4. The edge-passivated boat as described in claim 3, characterized in that, An electrode extension is provided at one end of the first electrode plate near the first electrode socket, and the electrode extension is electrically connected to the first electrode socket through an electrode connector.

5. The edge-passivated boat as described in claim 3, characterized in that, The second electrode plate and the third electrode plate are each connected at one end near the second electrode socket via a conductive connector. The two ends of the conductive connector are connected to two conductive supports. The second electrode socket is electrically connected to one of the conductive supports via a conductive block.

6. The edge-passivated boat as described in claim 3, characterized in that, A conductive placement rack is provided in the cell loading channel of the boat frame. The conductive placement rack has multiple cell carrier positions for placing cell cells. The second electrode socket is electrically connected to the cell cell through the conductive placement rack. An electrode insulating seat is provided on the first electrode socket to block the electrical connection between the first electrode socket and the conductive placement rack.

7. The edge-passivated boat as described in claim 3, characterized in that, The first electrode plate, the second electrode plate, and the third electrode plate are electrically insulated from each other by a plurality of insulating connectors.

8. The edge-passivated boat as described in any one of claims 1 to 7, characterized in that, The boat frame includes a bottom plate, a cover plate, a left side plate, a right side plate, a front end plate, and a rear end plate that together enclose the accommodating space.

9. The edge-passivated boat as described in claim 8, characterized in that, The rear end plate is provided with a spray assembly, which has a group of spray holes for connecting to the electrode loading channel and spraying process gas.

10. An edge passivation device, characterized in that, The device includes a reactor having a reaction chamber, an edge passivation boat as described in any one of claims 1 to 9 placed within the reaction chamber, and a cell cassette, wherein the cell cassette is placed within the cell cassette loading channel, and the cells within the cell cassette have passivation edges facing the electrode loading channel.

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