A wafer separating apparatus

Abstract

The utility model belongs to photovoltaic technical field discloses a kind of for silicon wafer separation's device for separating piece. Including material receiving and conveying mechanism, material distribution conveying mechanism, material support turnover mechanism, silicon wafer side clamp centering mechanism, piece separating side clamp centering mechanism being arranged in turn in order, piece separating mechanism is further provided on silicon wafer side clamp centering mechanism, the piece separating mechanism includes piece separating drive assembly, water spraying assembly B, piece separating drive assembly is set in the top of water spraying assembly B, piece separating drive assembly is set on fixed base plate B, and piece separating drive assembly includes cylinder, the cylinder stem front end of cylinder is connected with cylinder connecting plate by cylinder connecting piece, the bottom surface both ends of cylinder connecting plate each connect a guide shaft, guide shaft bottom is set out fixed base plate B, the bottom inside of two guide shafts is set up two vertical rods between two vertical rods and sets up piece separating line;Fixed base plate B bottom surface is provided with water spraying block A. It can stably separate silicon wafer, and separation efficiency is high, and separation is stable and accurate.

Description

Technical Field

[0001] This utility model belongs to the field of photovoltaic technology, and relates to a wafer slicing device for separating silicon wafers. Background Technology

[0002] In the photovoltaic industry, the stable separation of silicon wafers after debinding is a crucial step in ensuring wafer quality and production efficiency. Current technologies have many shortcomings in achieving stable wafer separation. Currently, silicon wafer slicing faces numerous challenges. On the one hand, traditional slicing processes often require significant manpower and time, increasing production costs and leading to quality instability. For example, manual slicing, with wafers only 0.1-0.2mm thick, is thin and brittle, making it highly susceptible to breakage during manual handling, resulting in a high fragmentation rate and making precise quality control difficult. With continuously rising labor costs, the cost disadvantage of this method becomes increasingly apparent. Furthermore, its high labor intensity is detrimental to long-term stable production. Moreover, the work cycle is long, preventing continuous operation of the entire production line. If mechanical clamping separation is used, the wafer thickness is typically between 0.1-0.2mm, making it brittle and fragile. Uneven pressure or clamping position deviations during clamping can easily cause cracks, damage, or even complete shattering. This not only wastes raw materials but also often results in the inability to separate silicon wafers. Production lines also need to be shut down for maintenance. The precision of separation is also a major challenge for current technology. Silicon wafers may be tightly adhered to each other, making stable separation difficult with existing technology, leading to incomplete separation. Utility Model Content

[0003] The purpose of this invention is to overcome the shortcomings in the above-mentioned background technology and provide a wafer separation device for separating silicon wafers, which can stably separate silicon wafers, with high separation efficiency, stable and accurate separation, less waste, stable flow, greatly shorten the working cycle, and low cost.

[0004] The technical solution adopted by this utility model to solve its technical problem is: a wafer slitting device for separating silicon wafers, including a receiving conveying mechanism and a dispensing conveying mechanism arranged in sequence; the receiving conveying mechanism and the dispensing conveying mechanism are arranged at the bottom, and the wafer slitting device also includes a silicon wafer side clamping centering mechanism and a wafer slitting side clamping centering mechanism arranged in sequence at the top; the receiving conveying mechanism and the dispensing conveying mechanism are arranged in a cross arrangement, the silicon wafer side clamping centering mechanism and the wafer slitting side clamping centering mechanism are arranged in a cross arrangement, and a wafer slitting mechanism is also provided on the silicon wafer side clamping centering mechanism, and the wafer slitting mechanism is arranged on the side adjacent to the wafer slitting side clamping centering mechanism;

[0005] The segmentation mechanism includes a segmentation drive assembly and a water spray assembly B. The segmentation drive assembly is positioned above the water spray assembly B and is mounted on a fixed base plate B. The segmentation drive assembly includes a cylinder. The front end of the cylinder rod is connected to a cylinder connecting plate via a cylinder connector. A guide shaft is connected to each end of the bottom surface of the cylinder connecting plate. The bottom of the guide shaft extends out of the fixed base plate B. A vertical rod is provided on the inner side of the bottom of the two guide shafts. A segmentation component is positioned between the two vertical rods. A water spray block A is provided on the bottom surface of the fixed base plate B.

[0006] The cylinder is fixed to the fixed base plate B via a fixed connecting plate. A mounting seat is provided on the fixed base plate B, and a cylinder limit pin is provided on the mounting seat. The cylinder limit pin is located below the cylinder connecting plate.

[0007] The water spray block A has several nozzles, which are equidistant from each other and are commercially available products. The water spray block A is connected to the water inlet pipe via a quick connector, and a water pump is installed on the water inlet pipe.

[0008] The segmenting component is a segmenting line or a segmenting plate, with the segmenting line preferably being a fishing line. The segmenting plate is preferably a plastic plate or a flexible plate, and two segmenting components are preferably provided.

[0009] A linear bearing is installed at the connection between the guide shaft and the fixed base plate B.

[0010] The water spray assembly B includes two opposing water spray groups. Each water spray group includes a water spray support. The bottom of the water spray support is mounted on the housing. A water spray block B is mounted on the upper part of the water spray support. The water spray block B is tilted. A long water spray nozzle is mounted on the top surface of the water spray block B, with the nozzle facing inward. The water spray block B is connected to the water inlet pipe via a quick connector. A water pump is mounted on the water inlet pipe.

[0011] An adjustment groove is provided on the upper part of the water spray support. The water spray block B is set on the water spray support by bolts and the adjustment groove, and the position of the water spray block B is adjusted by the adjustment groove and bolts.

[0012] The distance between the two water spray groups is greater than the inner distance between the two synchronous belts B. The height of both water spray groups is lower than the height of synchronous belt B.

[0013] The driven wheel B at the end of the receiving conveyor mechanism and the driven wheel C at the front end of the distributing conveyor mechanism are intersected and their centers coincide. The side clamp conveying drive wheel at the front end of the wafer side clamp centering mechanism and the driven wheel A at the end of the silicon wafer side clamp centering mechanism are intersected and their centers coincide. The driven wheels B, C, and A all fall on the same vertical line at their centers.

[0014] The silicon wafer side clamping centering mechanism is used to center and clamp the workpiece. When the existing robot picks up the debonding frame and removes the silicon wafer, it keeps the silicon wafer in a stable posture. At the same time, the workpiece silicon wafer is kept in a stable posture and does not deviate during forward conveying.

[0015] The receiving conveyor mechanism is used to receive workpieces and then transfer them to the distributing conveyor mechanism.

[0016] The slitting mechanism is used to stably separate the silicon wafers that need to be retrieved from the remaining silicon wafers.

[0017] The slab clamping and centering mechanism is used to keep the separated workpiece silicon wafers stable and unbiased during forward transport until they are transported to the next process.

[0018] The material conveying mechanism is used to transport separated silicon wafers to the next process.

[0019] The workpiece is a number of silicon wafers.

[0020] The debonding rack is a publicly available or commercially available debonding rack. The debonding rack described in patent CN222705494U can also be implemented.

[0021] The silicon wafer side clamping centering mechanism includes a side clamping centering transmission group A and a side clamping centering transmission group B arranged in opposite directions. The bottom of the side clamping centering transmission group A and the side clamping centering transmission group B are connected by a synchronous belt B. The side clamping centering transmission group A and the side clamping centering transmission group B are fixed on the top surface of the housing.

[0022] The side clamping centering transmission group A includes a fixed base plate A, on which a centering component for workpiece centering and a side clamping component A for workpiece side clamping are mounted. The centering component is connected to the side clamping component A through a support frame to drive the side clamping component A to move left and right. Two side clamping components A are provided. Each side clamping component A includes a clamping conveyor motor. The output end of the clamping conveyor motor is connected to the drive wheel through a transmission rod A. The drive wheel is connected to the driven wheel A through a synchronous belt B. A horizontal plate is provided between the drive wheel and the driven wheel A. The top of the support frame is connected to the synchronous belt transmission block of the centering component. The clamping conveyor motor is connected to the upper part of the support frame through a motor connecting plate. The top of the support frame is connected to the horizontal plate through a support A.

[0023] The side clamping centering transmission group B includes a fixed base plate B, on which a centering component for workpiece centering and a side clamping component B for workpiece side clamping are installed. The centering component is connected to the side clamping component B through a support frame to drive the side clamping component B to move left and right. Two side clamping components B are provided. Each side clamping component B includes a support C. The top of the support frame is connected to the synchronous belt drive block of the centering component. The top of the support frame is connected to the horizontal plate through a support A.

[0024] The centering component installed on the side clamp centering transmission group A has the same structure as the centering component installed on the side clamp centering transmission group B. The centering component installed on the side clamp centering transmission group A is described below.

[0025] The centering assembly set on the side clamp centering transmission group A includes a side clamp drive motor A. The side clamp drive motor A is set at one end of the fixed base plate A, and the other end of the fixed base plate A is set with a side clamp driven wheel. The output end of the side clamp drive motor A is connected to the side clamp driving wheel. The side clamp driving wheel and the side clamp driven wheel are connected by a synchronous belt A. The synchronous belt A is connected to the support frame through a synchronous belt transmission block.

[0026] The support frame is slidably connected to the fixed base plate A via a guide assembly. The guide assembly includes a linear guide rail C and a slider. The linear guide rail C is disposed on the fixed base plate A, and the slider is disposed on the bottom surface of the support frame. The linear guide rail C and the slider are slidably connected.

[0027] Two linear guides C are preferably provided.

[0028] Limiting seats A are installed at the center of the fixed base plate A and at the two adjacent ends of the linear guide rail C. Buffer blocks are installed on the limiting seats A for limiting and buffering protection.

[0029] The upper synchronous belt A is connected to the support frame after passing through the synchronous belt drive block A. The lower synchronous belt A is connected to another support frame after passing through the synchronous belt drive block B. A rack A is provided on the outer side of the synchronous belt A. A rack B is provided at the connection between the inner side of the synchronous belt drive block A and the synchronous belt drive block B and the synchronous belt A. The rack A and rack B are meshed together.

[0030] Metal pads A and nylon limiting plates A are also provided on both sides of the horizontal plate to prevent the timing belt B from shifting and to support the timing belt B; the nylon limiting plates A are located on the outer side.

[0031] The side clamp drive motor A is fixed to the fixed base plate A via the side clamp drive wheel bracket. The side clamp driven wheel is mounted on the fixed base plate A via the side clamp driven wheel bracket.

[0032] Side clamp centering transmission group A and side clamp centering transmission group B are provided. Side clamp centering transmission group A is located at one end of the top surface of the housing and is fixed on the top surface of the housing via a fixed base plate A. Side clamp centering transmission group B is located at the end adjacent to the segmented side clamp centering mechanism and is fixed on the top surface of the housing via a fixed base plate B.

[0033] The synchronous belt B is preferably a sponge belt.

[0034] The top ends of the two side clamp assemblies A are on the same horizontal plane. The bottom ends of the two side clamp assemblies A are on the same horizontal plane.

[0035] The clamping and conveying motor is connected to the transmission rod A in sequence through reducer A and coupling.

[0036] Driven wheel A is connected to the horizontal plate via a driven wheel A fixing plate, and the horizontal plate has a through hole. Driven wheel A is connected to the horizontal plate via adjusting block A. Adjusting block is set adjacent to adjusting block A. Adjusting block is fixed on the horizontal plate. Bolt is set on adjusting block. The tension of synchronous belt B is adjusted by adjusting the position of adjusting block A through adjusting bolt.

[0037] The material receiving and conveying mechanism includes a conveyor belt A, a conveyor belt B, and a conveyor motor A. Two conveyor belts B are provided, located at both ends of the end of conveyor belt A. The end of conveyor belt A is positioned between the two conveyor belts B to form a cross arrangement. The output end of the conveyor motor A is connected to a synchronous drive wheel. The synchronous drive wheel is connected to two synchronous driven wheels through a synchronous belt C. The two synchronous driven wheels are connected to the conveyor wheel of conveyor belt A and the conveyor drive wheel of conveyor belt B through a transmission shaft to realize the conveying of workpieces.

[0038] Of the two synchronous driven pulleys, one is connected to the drive pulley of the conveyor belt B via drive shaft A, and the other is connected to the conveyor pulley of the conveyor belt A via drive shaft B.

[0039] Drive shaft A is connected to the drive pulley of the adjacent conveyor belt B, and the drive pulley is connected to the drive pulley of another conveyor belt B via drive shaft C.

[0040] The conveyor wheel of conveyor belt A is connected to the driven wheel A via conveyor belt A, and a fixed frame plate is set between the conveyor wheel and the driven wheel A. The conveyor wheel and the driven wheel A are respectively connected to the fixed frame plate via a conveyor wheel fixing plate and a driven wheel fixing plate. A through hole is set on the fixed frame plate. The drive shaft C passes through the through hole and its two ends are respectively connected to the drive wheel of conveyor belt B and the drive wheel of another conveyor belt B.

[0041] Each conveyor belt B has a driving pulley connected to a driven pulley B via the conveyor belt B. A fixed frame plate is installed between the driving pulley and the driven pulley B. The driving pulley and the driven pulley B are connected to the fixed frame plate via a pulley fixing plate and a driven pulley fixing plate, respectively. A tensioning block B for tensioning the conveyor belt B is installed on the fixed frame plate. Bolts are installed on the tensioning block B, and the tension of the conveyor belt B is adjusted by adjusting the position of the bolts.

[0042] Preferably, a tensioning pulley A is also provided on the synchronous belt C connecting the synchronous drive pulley and the synchronous driven pulley. The tensioning pulley A is fixed to the housing by a tensioning bracket, and a tensioning block A for adjusting the tension is also provided at the tensioning pulley A. The tensioning block A is set on the tensioning bracket, and preferably the position of the tensioning block A on the tensioning bracket is adjusted by bolts to adjust the position of the tensioning pulley A, thereby adjusting the tension of the synchronous belt C.

[0043] The conveyor motor A is fixed on the top side of the box, and is secured by the conveyor motor A fixing bracket.

[0044] A speed reducer B is also installed between the conveyor motor A and the synchronous drive wheel.

[0045] The length of conveyor belt B is less than the length of conveyor belt A. The width of conveyor belt B is less than the width of conveyor belt A.

[0046] Conveyor belt A is connected to the fixed frame via a fixed frame plate and a fixed connecting block, and is mounted on the bottom surface of the box via the fixed frame and a fixed base. Conveyor belt B is connected to the fixed frame via a fixed frame plate and a fixed connecting block, and is mounted on the bottom surface of the box via the fixed frame and a fixed base. The distance between the two conveyor belts B is less than the width of the workpiece.

[0047] Both conveyor belt A and conveyor belt B are PU smooth surface synchronous belts.

[0048] The segmentation drive assembly of the segmentation mechanism is mounted on the fixed base plate B on the side clamp centering transmission group B. The water spray assembly B of the segmentation mechanism is mounted on the bottom surface of the tank.

[0049] The segmented side clamping centering mechanism includes a fixed base plate C, on which a centering drive assembly for workpiece centering and a side clamping conveying assembly for workpiece side clamping are mounted. The centering drive assembly is connected to the side clamping conveying assembly via a support frame to drive the side clamping conveying assembly to move left and right. Two side clamping conveying assemblies are provided, each side clamping conveying assembly including a conveying motor B. The output end of the conveying motor B is connected to the side clamping conveying drive wheel via a transmission rod B. The side clamping conveying drive wheel is connected to the side clamping conveying driven wheel via a side clamping conveying belt. A fixed frame plate is provided between the side clamping conveying drive wheel and the side clamping conveying driven wheel. The top of the support frame is connected to the synchronous belt transmission block of the centering drive assembly. The conveying motor B is connected to the upper part of the support frame via a motor connecting plate. The bottom of the support frame is connected to the fixed frame plate via a vertical rod.

[0050] The driven wheel of the side clamp conveyor is connected to the fixed frame plate through the driven wheel fixing plate, and the fixed frame plate is provided with through holes. The driving wheel of the side clamp conveyor is connected to the fixed frame plate through the adjusting block B. A bolt adjusting block is provided adjacent to the adjusting block B. The bolt adjusting block is fixed on the fixed frame plate and an adjusting bolt is provided on the bolt adjusting block. The tension of the side clamp conveyor belt can be adjusted by adjusting the position of the adjusting bolt and adjusting the adjusting block B.

[0051] The top ends of the two side-clamp conveyor assemblies are on the same horizontal plane. The bottom ends of the two side-clamp conveyor assemblies are on the same horizontal plane.

[0052] The centering drive assembly includes a segmented side clamp drive motor, which is located at one end of a fixed base plate C. A segmented side clamp driven wheel is located at the other end of the fixed base plate C. The output end of the segmented side clamp drive motor is connected to the segmented side clamp driving wheel. The segmented side clamp driving wheel and the segmented side clamp driven wheel are connected by a synchronous belt E. The synchronous belt E is connected to the side clamp conveying assembly through a synchronous belt transmission block and a support frame.

[0053] The support frame is slidably connected to the fixed base plate C via a guide assembly. The guide assembly includes a linear guide rail B and a slider. The linear guide rail B is disposed on the fixed base plate C, and the slider is disposed on the bottom surface of the support frame. The linear guide rail B and the slider are slidably connected.

[0054] Ideally, two linear guides B should be provided.

[0055] Limit seats C are installed at the center of the fixed base plate C and at the two adjacent ends of the linear guide rail B. Buffer blocks are installed on the limit seats C for limit buffer protection.

[0056] The upper synchronous belt E is connected to the support frame B after passing through the synchronous belt drive block D. The lower synchronous belt E is connected to the support frame A after passing through the synchronous belt drive block E. A rack A is provided on the outer side of the synchronous belt E. A rack B is provided at the connection between the inner side of the synchronous belt drive block D and the synchronous belt drive block E and the synchronous belt E. The rack A and rack B are meshed together.

[0057] The side-clamp conveyor belt is preferably a sponge belt.

[0058] The fixed frame plate is also equipped with a metal pad C and a nylon limiting plate C on the side to prevent the side clamp conveyor belt from shifting and to support the side clamp conveyor belt; the nylon limiting plate C is set on the outside.

[0059] The segmented side clamp drive motor is fixed to the fixed base plate C via a segmented side clamp drive motor mounting bracket. The segmented side clamp driven wheel is mounted on the fixed base plate C via a segmented side clamp driven wheel bracket.

[0060] The segmented side clamping centering mechanism is fixed to the top surface of the box body via a fixed base plate C.

[0061] The material distribution and conveying mechanism includes a synchronous belt F, a drive synchronous belt, and a material distribution and conveying motor. The output end of the material distribution and conveying motor is connected to the material distribution and conveying drive wheel. The material distribution and conveying drive wheel is connected to the driven wheel B through the synchronous belt F. The driven wheel B is connected to the belt drive wheel through the transmission shaft D. The belt drive wheel is connected to two driven wheels C through the drive synchronous belt to realize the movement of the drive synchronous belt.

[0062] The drive shaft D is fixed to the bottom surface inside the housing via support B. Two bearings are installed on the drive shaft D, and each bearing is connected to support B.

[0063] A mounting plate is set between the two driven wheels C. One driven wheel C is connected to the mounting plate through a driven wheel B fixing plate, and the mounting plate has a through hole. The other driven wheel C is connected to the mounting plate through a driven wheel C adjustment plate. A tensioning block D is set adjacent to the driven wheel C adjustment plate. The tensioning block D is fixed on the mounting plate and bolts are set on the tensioning block D. The tension of the drive timing belt is adjusted by adjusting the position of the bolts.

[0064] A tensioning pulley B is also provided on the drive timing belt. The tensioning pulley B is located below the mounting plate and is movably connected to the mounting plate by bolts and a tensioning pulley fixing plate.

[0065] The drive timing belt is connected to the mounting plate and the fixed connecting block, and is set on the bottom surface of the housing through the fixed frame and the fixed base.

[0066] A reducer C is also installed between the material conveying motor and the material conveying drive wheel. The material conveying motor is fixed to the top side of the box via a motor mounting plate. A tensioning block C for tensioning the synchronous belt F is installed on the side of the motor mounting plate. The tensioning block C is fixed to the top side of the box, and two bolts are horizontally installed on the tensioning block C. The tension of the synchronous belt F is adjusted by moving these two bolts back and forth.

[0067] The drive timing belt is a PU smooth timing belt.

[0068] Metal pads B and nylon limiting plates B are also provided on the top and bottom surfaces of the mounting plate to prevent the drive timing belt from shifting and to support the drive timing belt; the nylon limiting plates B are located on the outer side.

[0069] The advantages of this utility model compared with the prior art are:

[0070] The wafer separation device provided by this utility model replaces manual wafer separation, can stably separate silicon wafers, has high separation efficiency, stable and accurate separation, and produces fewer waste parts. It can operate stably, greatly shorten the working cycle, and has low cost. Attached Figure Description

[0071] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0072] Figure 1 This is a front view of a wafer slitting device for separating silicon wafers according to this utility model.

[0073] Figure 2 This is a perspective view of a wafer-splitting device for separating silicon wafers according to this utility model.

[0074] Figure 3 This is a diagram showing the state of a wafer slicing device for separating silicon wafers, as described in this utility model, installed inside a housing.

[0075] Figure 4This is a front view of a wafer slitting device for separating silicon wafers after removing the slitting side clamping centering mechanism.

[0076] Figure 5 This is a schematic diagram of the silicon wafer side clamping centering mechanism and the slitting mechanism of this utility model installed on the housing.

[0077] Figure 6 This is a top view of the silicon wafer side clamping centering mechanism and the wafer splitting mechanism of this utility model.

[0078] Figure 7 This is a front view of the silicon wafer side clamping centering mechanism and the wafer splitting mechanism of this utility model.

[0079] Figure 8 This is a perspective view A of the silicon wafer side clamping centering mechanism and the wafer splitting mechanism of this utility model.

[0080] Figure 9 This is a side view of the silicon wafer side clamping centering mechanism and the wafer splitting mechanism of this utility model.

[0081] Figure 10 This is a three-dimensional view of the segmentation mechanism of this utility model.

[0082] Figure 11 This is a rear view of the segmentation mechanism of this utility model.

[0083] Figure 12 This is a schematic diagram of the bottom water spray component of the segmented mechanism of this utility model.

[0084] Figure 13 This is a perspective view of the silicon wafer side clamping centering mechanism and the wafer splitting mechanism of this utility model.

[0085] Figure 14 This is a schematic diagram of the material receiving and conveying mechanism of this utility model installed on the box.

[0086] Figure 15 This is a top view of the material receiving and conveying mechanism of this utility model.

[0087] Figure 16 This is the front view of the material receiving and conveying mechanism of this utility model.

[0088] Figure 17 This is a perspective view A of the material receiving and conveying mechanism of this utility model.

[0089] Figure 18 This is a perspective view B of the material receiving and conveying mechanism of this utility model.

[0090] Figure 19 This is a perspective view of the segmented side clamping centering mechanism of this utility model.

[0091] Figure 20 This is a top view of the segmented side clamping centering mechanism of this utility model.

[0092] Figure 21 This is a side view of the segmented side clamping centering mechanism of this utility model.

[0093] Figure 22 This is a schematic diagram of the material conveying mechanism of this utility model installed on the box.

[0094] Figure 23 This is a perspective view A of the material conveying mechanism of this utility model.

[0095] Figure 24 This is a perspective view B of the material conveying mechanism of this utility model.

[0096] In the diagram: 1. Housing; 2. Silicon wafer side clamping centering mechanism; 3. Receiving and conveying mechanism; 4. Segmentation mechanism; 5. Segmentation side clamping centering mechanism; 6. Segmentation and conveying mechanism; 7. Workpiece; 8. Debonding rack; 201. Fixed base plate A; 202. Side clamping drive motor A; 203. Synchronous belt A; 204. Synchronous belt transmission block A; 205. Synchronous belt B; 206. Horizontal plate; 207. Limiting seat A; 208. Clamping and conveying motor; 209. Support A; 210. Transmission rod A; 211. Drive wheel; 212. Coupling; 213. Metal pad A; 214. Nylon limiting plate A; 215. Side clamp driven wheel; 216. Side clamping drive wheel; 217. Synchronous belt transmission block B; 218. Reducer A; 219. Side clamp driven wheel. 220. Side clamp drive wheel bracket, 221. Adjusting block A, 222. Adjusting block, 301. Conveyor belt A, 302. Conveyor motor A, 303. Conveyor belt B, 304. Drive shaft A, 305. Drive shaft B, 306. Fixed frame, 307. Reducer B, 308. Tensioning block A, 309. Tensioning wheel A, 310. Synchronous belt C, 311. Drive shaft C, 312. Conveyor driven wheel A, 313. Conveyor drive wheel, 314. Tensioning block B, 315. Driven wheel fixing plate, 316. Conveyor driven wheel B, 401. Segmented drive assembly, 402. Water spray assembly B, 403. Fixed base plate B, 404. Side clamp drive motor B, 405. Synchronous belt D, 406. Synchronous belt transmission block C. 407. Limiting seat B, 408. Driven wheel A, 409. Limiting buffer block A, 410. Linear guide rail A, 501. Fixed base plate C, 502. Segmented side clamp drive motor, 503. Synchronous belt E, 504. Segmented side clamp driving wheel, 505. Segmented side clamp driven wheel, 506. Synchronous belt transmission block D, 507. Support frame A, 508. Support frame B, 509. Conveyor motor B, 510. Transmission rod B, 511. Side clamp conveyor driving wheel, 512. Side clamp conveyor belt, 513. Adjusting block B, 514. Adjusting bolt, 515. Side clamp conveyor driven wheel, 516. Limiting seat C, 517. Vertical rod, 601. Material distribution conveyor motor, 602. Synchronous belt F, 603. Transmission shaft D, 604. Drive synchronous belt 605. Stepping belt, 606. Reducer C, 607. Motor mounting plate, 608. Material conveyor drive wheel, 609. Tensioning block C, 610. Driven wheel B, 611. Support B, 612. Tensioning wheel B, 613. Driven wheel C fixing plate, 614. Mounting plate, 615. Metal pad B, 616. Nylon limit plate B, 617. Tensioning block D, 618. Belt drive wheel, 40101. Cylinder, 40102. Guide shaft, 40103. Upright pole, 40104. Segmentation piece, 40105. Cylinder connecting plate, 40106. Fixed connecting plate, 40107. Water spray block A, 40108. Mounting base, 40109. Linear bearing, 40110. Cylinder limit pin, 40201.Water spray support, 40202. Water spray block B, 40203. Adjustment groove, 40204. Water spray nozzle. Detailed Implementation

[0097] The present invention will be further described below with reference to the accompanying drawings, but the present invention is not limited to the following embodiments.

[0098] The method of using the wafer slitting device for separating silicon wafers according to this utility model:

[0099] S1. The degummed frame or workpiece is placed manually or automatically onto the receiving conveyor mechanism;

[0100] S2. The existing debonding frame detaches, allowing the workpiece silicon wafer to be placed onto the receiving conveyor mechanism;

[0101] S3. The silicon wafer side clamping centering mechanism centers and clamps the workpiece;

[0102] S4. The conveyor belt A and the synchronous belt B of the receiving conveyor mechanism and the silicon wafer side clamping centering mechanism simultaneously convey the workpiece silicon wafer forward. The workpiece silicon wafer to be separated is conveyed to the material distribution conveyor mechanism and the wafer side clamping centering mechanism. The material distribution conveyor mechanism assists the wafer side clamping centering mechanism in clamping the workpiece silicon wafer.

[0103] S5. The slitting mechanism begins to slit the silicon wafers. The bottom water spray component B and the upper water spray block in the slitting mechanism are opened, and the water pump sprays water at a set pressure onto the silicon wafers. The silicon wafers are separated under the pressure of the water spray. At the same time, the upper cylinder drives the slitting line or slitting plate to separate the separated silicon wafers, preventing the silicon wafers from sticking together and separating the silicon wafers that need to be separated from the remaining silicon wafers. The water spraying and the cylinder are synchronized to achieve stable separation of the silicon wafers.

[0104] S6. The receiving conveyor and the silicon wafer side clamping centering mechanism stop conveying, while the separating conveyor and the slicing side clamping centering mechanism convey, leaving the remaining silicon wafers stationary, and the separated silicon wafers are conveyed to the next process.

[0105] Example 1

[0106] A slitting device for separating silicon wafers, such as Figure 1-24As shown, the entire assembly is housed within the tank body 1 of the water tank, including a receiving conveyor mechanism 3 and a distributing conveyor mechanism 6 arranged sequentially at the bottom. The receiving conveyor mechanism 3 and the distributing conveyor mechanism 6 are located at the bottom of the tank body 1. The wafer slitting device for separating silicon wafers also includes a silicon wafer side clamping centering mechanism 2 and a wafer slitting side clamping centering mechanism 5 arranged sequentially at the top of the tank body 1. The receiving conveyor mechanism 3 and the distributing conveyor mechanism 6 are arranged crosswise, with the driven wheel B316 at the end of the receiving conveyor mechanism 3 and the driven wheel C612 at the front end of the distributing conveyor mechanism 6 intersecting. The wafer side clamping centering mechanism 2 and the slicing side clamping centering mechanism 5 are arranged in a cross pattern. The side clamping conveying drive wheel 511 at the front end of the slicing side clamping centering mechanism 5 and the driven wheel A408 at the end of the wafer side clamping centering mechanism 2 are arranged in a cross pattern and their centers coincide. The driven wheel B316, the driven wheel C612, the side clamping conveying drive wheel 511, and the driven wheel A408 fall on the same vertical line at the center. The wafer side clamping centering mechanism 2 is also provided with a slicing mechanism 4, which is located on the side adjacent to the slicing side clamping centering mechanism 5.

[0107] The segmentation drive assembly 401 of the segmentation mechanism 4 is mounted on the fixed base plate B403 on the side clamp centering transmission group B. The water spray assembly B402 of the segmentation mechanism 4 is mounted on the bottom surface of the housing 1.

[0108] The segmentation mechanism 4 includes a segmentation drive assembly 401 and a water spray assembly B402. The segmentation drive assembly 401 is positioned above the water spray assembly B402 and is mounted on a fixed base plate B403. The segmentation drive assembly 401 includes a cylinder 40101. The front end of the cylinder rod of the cylinder 40101 is connected to a cylinder connecting plate 40105 via a cylinder connector. A guide shaft 40102 is connected to each end of the bottom surface of the cylinder connecting plate 40105. The bottom of the guide shaft 40102 extends out of the fixed base plate B403. A vertical rod 40103 is provided on the inner side of the bottom of the two guide shafts 40102. A segmentation component 40104 is provided between the two vertical rods 40103. A water spray block A40107 is provided on the bottom surface of the fixed base plate B403.

[0109] Cylinder 40101 is fixed to base plate B403 via fixed connecting plate 40106. Mounting seat 40108 is provided on base plate B403, and cylinder limit pin 40110 is provided on mounting seat 40108. Cylinder limit pin 40110 is located below cylinder connecting plate 40105.

[0110] The water spray block A40107 is equipped with several nozzles, which are equidistant from each other. The nozzles are commercially available products. The water spray block A40107 is connected to the water inlet pipe via a quick connector, and a water pump is installed on the water inlet pipe.

[0111] The segment 40104 is preferably a fishing line. Two segments 40104 are preferably provided.

[0112] A linear bearing 40109 is installed at the connection between the guide shaft 40102 and the fixed base plate B403.

[0113] The water spray assembly B402 includes two opposing water spray groups. Each water spray group includes a water spray support 40201. The bottom of the water spray support 40201 is mounted on the housing 1. A water spray block B40202 is mounted on the upper part of the water spray support 40201. The water spray block B40202 is inclined. A long water spray nozzle 40204 is mounted on the top surface of the water spray block B40202. The water spray nozzle 40204 is positioned inward. The water spray block B40202 is connected to a water inlet pipe via a quick connector. A water pump is mounted on the water inlet pipe.

[0114] An adjustment groove 40203 is provided on the upper part of the water spray support 40201. The water spray block B40202 is set on the water spray support 40201 by bolts and the adjustment groove 40203, and the position of the water spray block B40202 is adjusted by the adjustment groove 40203 and bolts.

[0115] The distance between the two water spray units is greater than the inner distance between the two synchronous belts B205. The height of both water spray units is lower than the height of the synchronous belts B205.

[0116] The workpiece 7 consists of several silicon wafers.

[0117] The debonding frame 8 is a publicly available debonding frame 8 or a commercially available debonding frame 8. The debonding frame 8 in the published patent CN222705494U can also be implemented.

[0118] The silicon wafer side clamping centering mechanism 2 includes a side clamping centering transmission group A and a side clamping centering transmission group B arranged opposite to each other. The bottom of the side clamping centering transmission group A and the side clamping centering transmission group B are connected by a synchronous belt B205. The side clamping centering transmission group A and the side clamping centering transmission group B are fixed on the top surface of the housing 1.

[0119] The side clamping centering transmission group A includes a fixed base plate A201. The fixed base plate A201 is equipped with a centering component for centering workpiece 7 and a side clamping component A for side clamping workpiece 7. The centering component is connected to the side clamping component A through a support frame to drive the side clamping component A to move left and right. There are two side clamping components A. Each side clamping component A includes a clamping conveyor motor 208. The output end of the clamping conveyor motor 208 is connected to the drive drive wheel 211 through a transmission rod A210. The drive drive wheel 211 is connected to the driven wheel A408 through a synchronous belt B205. A horizontal plate 206 is set between the drive drive wheel 211 and the driven wheel A408. The top of the support frame is connected to the synchronous belt transmission block of the centering component. The clamping conveyor motor 208 is connected to the upper part of the support frame through a motor connecting plate. The top of the support frame is connected to the horizontal plate 206 through a support A209.

[0120] The side clamping centering transmission group B includes a fixed base plate B403. The fixed base plate B403 is equipped with a centering component for centering workpiece 7 and a side clamping component B for side clamping workpiece 7. The centering component is connected to the side clamping component B through a support frame to drive the side clamping component B to move left and right. Two side clamping components B are provided. Each side clamping component B includes a support C. The top of the support frame is connected to the synchronous belt drive block of the centering component. The top of the support frame is connected to the horizontal plate 206 through a support A209.

[0121] The centering component installed on the side clamp centering transmission group A has the same structure as the centering component installed on the side clamp centering transmission group B. The centering component installed on the side clamp centering transmission group A is described below.

[0122] The centering assembly set on the side clamp centering transmission group A includes a side clamp drive motor A202. The side clamp drive motor A202 is set at one end of the fixed base plate A201, and the other end of the fixed base plate A201 is set with a side clamp driven wheel 215. The output end of the side clamp drive motor A202 is connected to the side clamp driving wheel 216. The side clamp driving wheel 216 and the side clamp driven wheel 215 are connected by a synchronous belt A203. The synchronous belt A203 is connected to the support frame through a synchronous belt transmission block.

[0123] The support frame is slidably connected to the fixed base plate A201 via a guide assembly. The guide assembly includes a linear guide rail C and a slider. The linear guide rail C is disposed on the fixed base plate A201, and the slider is disposed on the bottom surface of the support frame. The linear guide rail C and the slider are slidably connected.

[0124] Two linear guides C are preferably provided.

[0125] Limiting seats A207 are provided at the center of the fixed base plate A201 and at the adjacent ends of the linear guide rail C. Buffer blocks are provided on the limiting seats A207 for limiting and buffering protection.

[0126] The upper synchronous belt A203 is connected to the support frame after passing through the synchronous belt drive block A204. The lower synchronous belt A203 is connected to another support frame after passing through the synchronous belt drive block B217. A rack A is provided on the outer side of the synchronous belt A203. A rack B is provided at the connection between the inner side of the synchronous belt drive block A204 and the synchronous belt drive block B217 and the synchronous belt A203. The rack A and rack B are meshed together.

[0127] Metal pads A213 and nylon limiting plates A214 are also provided on both sides of the horizontal plate 206 to prevent the timing belt B205 from shifting and to support the timing belt B205; the nylon limiting plates A214 are located on the outer side.

[0128] The side clamp drive motor A202 is fixed to the fixed base plate A201 via the side clamp drive wheel bracket 220. The side clamp driven wheel 215 is mounted on the fixed base plate A201 via the side clamp driven wheel bracket 219.

[0129] Side clamp centering transmission group A and side clamp centering transmission group B are provided. Side clamp centering transmission group A is located at one end of the top surface of the housing 1 and is fixed on the top surface of the housing 1 through a fixed base plate A201. Side clamp centering transmission group B is located at the end adjacent to the segmented side clamp centering mechanism 5 and is fixed on the top surface of the housing 1 through a fixed base plate B403.

[0130] The timing belt B205 is preferably a sponge belt.

[0131] The top ends of the two side clamp assemblies A are on the same horizontal plane. The bottom ends of the two side clamp assemblies A are on the same horizontal plane.

[0132] The clamping and conveying motor 208 is connected to the transmission rod A210 in sequence through the reducer A218 and the coupling 212.

[0133] Driven wheel A408 is connected to horizontal plate 206 via driven wheel A fixing plate, and horizontal plate 206 is provided with through hole. Driven wheel 211 is connected to horizontal plate 206 via adjusting block A221. Adjusting block 222 is provided adjacent to adjusting block A221. Adjusting block 222 is fixed on horizontal plate 206. Bolt is provided on adjusting block 222. The tension of synchronous belt B205 can be adjusted by adjusting the position of adjusting bolt and adjusting block A221.

[0134] The material receiving and conveying mechanism 3 includes a conveyor belt A301, a conveyor belt B303, and a conveyor motor A302. Two conveyor belts B303 are provided, located at both ends of the end of the conveyor belt A301. The end of the conveyor belt A301 is arranged between the two conveyor belts B303 to form a cross arrangement. The output end of the conveyor motor A302 is connected to a synchronous drive wheel. The synchronous drive wheel is connected to two synchronous driven wheels through a synchronous belt C310. The two synchronous driven wheels are connected to the conveyor wheel of the conveyor belt A301 and the conveyor drive wheel 313 of the conveyor belt B303 through a drive shaft to realize the conveying of the workpiece 7.

[0135] Of the two synchronous driven pulleys, one is connected to the drive pulley 313 of the conveyor belt B303 via drive shaft A304, and the other is connected to the conveyor pulley of the conveyor belt A301 via drive shaft B305.

[0136] The drive shaft A304 is connected to the drive pulley 313 of the adjacent conveyor belt B303, and the drive pulley is connected to the drive pulley 313 of another conveyor belt B303 via the drive shaft C311.

[0137] The conveyor wheel of the conveyor belt A301 is connected to the driven wheel A312 via the conveyor belt A301, and a fixed frame plate is provided between the conveyor wheel and the driven wheel A312. The conveyor wheel and the driven wheel A312 are respectively connected to the fixed frame plate via the conveyor wheel fixing plate and the driven wheel fixing plate 315. The fixed frame plate is provided with through holes. The drive shaft C311 passes through the through holes and its two ends are respectively connected to the drive wheel 313 of the conveyor belt B303 and the drive wheel 313 of the other conveyor belt B303.

[0138] Each conveyor belt B303 has a driving pulley 313 connected to a driven pulley B316 via the conveyor belt B303. A fixed frame plate is provided between the driving pulley 313 and the driven pulley B316. The driving pulley 313 and the driven pulley B316 are respectively connected to the fixed frame plate via a conveyor wheel fixing plate and a driven wheel fixing plate 315. A tensioning block B314 for tensioning the conveyor belt B303 is provided on the fixed frame plate. Bolts are provided on the tensioning block B314, and the tension of the conveyor belt B303 is adjusted by adjusting the position of the bolts.

[0139] Preferably, a tensioning pulley A309 is also provided on the synchronous belt C310 connecting the synchronous drive pulley and the synchronous driven pulley. The tensioning pulley A309 is fixed to the housing 1 by a tensioning bracket, and a tensioning block A308 for adjusting the tension is also provided at the tensioning pulley A309. The tensioning block A308 is set on the tensioning bracket, and preferably the position of the tensioning block A308 on the tensioning bracket is adjusted by bolts to adjust the position of the tensioning pulley A309, thereby adjusting the tension of the synchronous belt C310.

[0140] The conveyor motor A302 is fixed on the top side surface of the top of the housing 1, and the conveyor motor A302 is fixed by the conveyor motor A fixing bracket.

[0141] A speed reducer B307 is also installed between the conveyor motor A302 and the synchronous drive wheel.

[0142] The length of conveyor belt B303 is less than the length of conveyor belt A301. The width of conveyor belt B303 is less than the width of conveyor belt A301.

[0143] Conveyor belt A301 is connected to the fixed frame 306 via a fixed frame plate and a fixed connecting block, and is mounted on the bottom surface inside the housing 1 via the fixed frame 306 and a fixed base. Conveyor belt B303 is connected to the fixed frame 306 via a fixed frame plate and a fixed connecting block, and is mounted on the bottom surface inside the housing 1 via the fixed frame 306 and a fixed base. The distance between the two conveyor belts B303 is less than the width of the workpiece 7.

[0144] Both conveyor belts A301 and B303 are PU smooth surface synchronous belts.

[0145] The segmented side clamping centering mechanism 5 includes a fixed base plate C501. The fixed base plate C501 is equipped with a centering drive assembly for centering the workpiece 7 and a side clamping conveying assembly for side clamping the workpiece 7. The centering drive assembly is connected to the side clamping conveying assembly through a support frame to drive the side clamping conveying assembly to move left and right. Two side clamping conveying assemblies are provided. Each side clamping conveying assembly includes a conveying motor B509. The output end of the conveying motor B509 is connected to the side clamping conveying drive wheel 511 through a transmission rod B510. The side clamping conveying drive wheel 511 is connected to the side clamping conveying driven wheel 515 through a side clamping conveying belt 512. A fixed frame plate is provided between the side clamping conveying drive wheel 511 and the side clamping conveying driven wheel 515. The top of the support frame is connected to the synchronous belt transmission block of the centering drive assembly. The conveying motor B509 is connected to the upper part of the support frame through a motor connecting plate. The bottom of the support frame is connected to the fixed frame plate through a vertical rod 517.

[0146] The driven wheel 515 of the side clamp conveyor is connected to the fixed frame plate through the driven wheel fixing plate of the side clamp conveyor, and the fixed frame plate is provided with a through hole. The driving wheel 511 of the side clamp conveyor is connected to the fixed frame plate through the adjusting block B513. A bolt adjusting block is provided adjacent to the adjusting block B513. The bolt adjusting block is fixed to the fixed frame plate. An adjusting bolt 514 is provided on the bolt adjusting block. The tension of the side clamp conveyor belt 512 can be adjusted by adjusting the position of the adjusting bolt 514 and adjusting the adjusting block B513.

[0147] The top ends of the two side-clamp conveyor assemblies are on the same horizontal plane. The bottom ends of the two side-clamp conveyor assemblies are on the same horizontal plane.

[0148] The centering drive assembly includes a segmented side clamp drive motor 502, which is located at one end of a fixed base plate C501. A segmented side clamp driven wheel 505 is located at the other end of the fixed base plate C501. The output end of the segmented side clamp drive motor 502 is connected to a segmented side clamp drive wheel 504. The segmented side clamp drive wheel 504 and the segmented side clamp driven wheel 505 are connected by a synchronous belt E503. The synchronous belt E503 is connected to the side clamp conveying assembly through a synchronous belt drive block and a support frame, respectively.

[0149] The support frame is slidably connected to the fixed base plate C501 via a guide assembly. The guide assembly includes a linear guide rail B and a slider. The linear guide rail B is disposed on the fixed base plate C501, and the slider is disposed on the bottom surface of the support frame. The linear guide rail B and the slider are slidably connected.

[0150] Ideally, two linear guides B should be provided.

[0151] Limit seats C516 are installed at the center of the fixed base plate C501 and at the adjacent ends of the linear guide rail B. Buffer blocks are installed on the limit seats C516 for limit buffer protection.

[0152] The upper synchronous belt E503 is connected to the support frame B508 after passing through the synchronous belt drive block D506. The lower synchronous belt E503 is connected to the support frame A507 after passing through the synchronous belt drive block E. A rack A is provided on the outer side of the synchronous belt E503. A rack B is provided at the connection between the inner side of the synchronous belt drive block D506 and the synchronous belt drive block E and the synchronous belt E503. The rack A and the rack B are meshed together.

[0153] The side-clamp conveyor belt 512 is preferably a sponge belt.

[0154] Metal pad C and nylon limiting plate C are also provided on the side of the fixed frame plate to prevent the side clamp conveyor belt 512 from shifting and to support the side clamp conveyor belt 512; the nylon limiting plate C is set on the outside.

[0155] The segmented side clamp drive motor 502 is fixed to the fixed base plate C501 via the segmented side clamp drive motor mounting bracket. The segmented side clamp driven wheel 505 is mounted on the fixed base plate C501 via the segmented side clamp driven wheel bracket.

[0156] The segmented side clamping centering mechanism 5 is fixed to the top surface of the box 1 via a fixed base plate C501.

[0157] The material distribution and conveying mechanism 6 includes a synchronous belt F602, a drive synchronous belt 604, and a material distribution and conveying motor 601. The output end of the material distribution and conveying motor 601 is connected to the material distribution and conveying drive wheel 607. The material distribution and conveying drive wheel 607 is connected to the driven wheel B609 through the synchronous belt F602. The driven wheel B609 is connected to the belt drive wheel 818 through the transmission shaft D603. The belt drive wheel 818 is connected to two driven wheels C612 through the drive synchronous belt 604 to realize the movement of the drive synchronous belt 604.

[0158] The drive shaft D603 is fixed to the bottom surface inside the housing 1 via a support B610. Two bearings are installed on the drive shaft D603, and the two bearings are connected to the support B610 respectively.

[0159] A mounting plate 614 is provided between the two driven wheels C612. One driven wheel C612 is connected to the mounting plate 614 through a driven wheel B fixing plate 613, and the mounting plate 614 is provided with a through hole. The other driven wheel C612 is connected to the mounting plate 614 through a driven wheel C adjusting plate. A tensioning block D617 is provided adjacent to the driven wheel C adjusting plate. The tensioning block D617 is fixed on the mounting plate 614. Bolts are provided on the tensioning block D617. The tension of the drive synchronous belt 604 is adjusted by adjusting the position of the bolts.

[0160] A tensioning pulley B611 is also provided on the drive timing belt 604. The tensioning pulley B611 is located below the mounting plate 614 and is movably connected to the mounting plate 614 by bolts and a tensioning pulley fixing plate.

[0161] The drive timing belt 604 is connected to the mounting bracket via the mounting plate 614 and the fixed connecting block, and is set on the bottom surface inside the housing 1 via the fixed bracket and the fixed base.

[0162] A reducer C605 is also installed between the material conveying motor 601 and the material conveying drive wheel 607. The material conveying motor 601 is fixed to the top side surface of the housing 1 via a motor mounting plate 606. A tensioning block C608 for tensioning the synchronous belt F602 is installed on the side of the motor mounting plate 606. The tensioning block C608 is fixed to the top side surface of the housing 1, and two bolts are horizontally installed on the tensioning block C608. The tension of the synchronous belt F602 is adjusted by moving the two bolts back and forth.

[0163] The drive timing belt 604 is a PU smooth timing belt.

[0164] Metal pads B615 and nylon limiting plates B616 are also provided on the top and bottom surfaces of the mounting plate 614 to prevent the drive timing belt 604 from shifting and to support the drive timing belt 604; the nylon limiting plates B616 are located on the outer side.

[0165] In practical use, the wafer slitting device for separating silicon wafers is arranged entirely within the tank 1 of a water tank. The wafer retrieval process takes place in water. A manual crane or an automatic gantry robot (both existing equipment, unrelated to the structure of this utility model, and not described in detail; their function is sufficient) removes the debonded wafer-containing debonding frame (existing technology) from the water tanker (existing equipment) and places it onto the conveyor belt A301 of the receiving and conveying mechanism 3. The wafer pressing device presses the wafers down from above, the debonding frame bottom rod automatically opens, and the debonding frame is lifted (this part is not described in this utility model's technical solution). The synchronous belt B of the wafer side clamping and centering mechanism 2, made of sponge material, clamps the wafers and conveys them forward. The silicon wafers are transported to the slicing position of the slicing mechanism 4. The bottom water spray component B and the upper water spray block A are opened. The water pump sets the pressure to spray water onto the silicon wafers. The silicon wafers are separated under the pressure of the water spray. At this time, the upper cylinder 40101 drives the slicing component 40104 to separate the separated silicon wafers and prevent the front and rear silicon wafers from sticking together. The receiving conveyor mechanism 3 and the silicon wafer side clamping centering mechanism 2 stop rotating, while the separating conveyor mechanism 6 and the slab-separating side clamping centering mechanism 5 operate to transport the separated silicon wafers to the next process. Specifically, when the silicon wafer side clamping centering mechanism 2 is working: the side clamping centering transmission group A and the side clamping centering transmission group B start working simultaneously. The side clamping drive motors on the two centering components start working, driving the side clamping drive wheel 216, which in turn drives the side clamping driven wheel 215 to move via the synchronous belt A203. This causes the synchronous belt A203 to drive the synchronous belt transmission block to move. The linear guide rail and slider on the guide component then drive the support frame to slide on the fixed base plate. This allows the two centering components to drive the two support frames on the same side to move, which in turn drives the horizontal plate 206 at the bottom of the support frame to move, causing the two parallel synchronous belts B205 to begin moving towards or away from each other. This achieves stable workpiece clamping on the conveyor belt A301. Simultaneously, side clamping assemblies A and B also begin to operate. The clamping and conveying motor 208 drives the transmission rod A210, which in turn drives the drive wheel 211 to rotate. This, in turn, drives the synchronous belt B205 to move with the help of the driven wheel A408, thus achieving stable clamping and conveying of several silicon wafers by the silicon wafer side clamping centering mechanism 2, without the need for other fixing equipment. The nylon limiting plates A and 214 and the metal pad A213 ensure stable operation of the synchronous belt B205 in water without scratching the workpieces. The operating time is also stable, resulting in low maintenance and minimal wear.

[0166] When the receiving and conveying mechanism 3 is in operation: several silicon wafers are placed onto the conveyor belt A301 of the receiving and conveying mechanism 3 after the previous process. The conveyor motor A302 works, and then power is transmitted through the synchronous belt C310, the synchronous driven wheel, the drive shaft B305, and the conveyor wheel of the conveyor belt A301. With the cooperation of the conveyor driven wheel A, the conveyor belt A301 is moved to transfer the workpiece. Simultaneously, the conveyor motor A302 works, and then power is transmitted through the synchronous belt C310, the synchronous driven wheel, the drive shaft A304, and the conveyor drive wheel 313 of the conveyor belt B303. With the cooperation of the conveyor driven wheel B316, the conveyor belt B303 is moved to transfer the workpiece, achieving stable synchronous transportation. In this way, the conveyor belt A301 stably transports the workpiece onto the two conveyor belts B303.

[0167] In operation, the wafer slicing mechanism 4 works as follows: At the slicing position of the wafer slicing mechanism 4, the bottom water spray assembly B402 and the upper water spray block A40107 open. Water at a set pressure from the water pump sprays water onto the silicon wafers, causing them to separate under water pressure. At this time, the upper cylinder 40101 drives the wafer slicing component 40104 to separate the wafers, preventing them from sticking together. Due to the specific positioning and structure of the water spray assembly B402 combined with the positioning of the wafer slicing component 40104, stable separation of the silicon wafers is achieved. This results in stable wafer separation, stable operation, and a low failure rate.

[0168] In operation, the segmented side clamping centering mechanism 5 works as follows: The segmented side clamping drive motor 502 on the centering drive assembly starts working. The segmented side clamping drive motor 502 drives the segmented side clamping drive wheel 504 to transmit power, which is then transmitted to the segmented side clamping driven wheel 505 through the synchronous belt E503, thus moving the synchronous belt E503. The synchronous belt E503 is engaged with the synchronous belt transmission block, thereby moving the two support frames. In turn, the vertical rod 517 at the bottom of the support frame drives the two fixed frame plates to move, thus causing the two parallel side clamping conveyor belts 512 to move towards each other or away from each other. This achieves stable movement of the workpiece on the conveyor belt, and the support frame slides through the guide component at the bottom. Simultaneously, the side clamping conveyor assembly also operates synchronously. The conveyor motor B509 drives the transmission rod B510, which in turn drives the side clamping conveyor drive wheel 511 to rotate. This, in turn, drives the side clamping conveyor belt 512, which, in conjunction with the side clamping conveyor driven wheel 515, moves to achieve transmission. This enables the stable clamping and transmission of several silicon wafers after slicing by the slicing side clamping centering mechanism 5, without the need for other fixed equipment. The metal pad C and nylon limiting plate C ensure stable operation of the side clamping conveyor belt 512 in water without scratching the workpiece. The operating time is also stable, resulting in low maintenance and minimal wear.

[0169] In operation, the material distribution and conveying mechanism 6 works as follows: the material distribution and conveying motor 601 starts working, which in turn drives the driving wheel 607 to drive the synchronous belt F602 to drive the driven wheel B609; the driven wheel B609 drives the belt drive wheel 818 through the transmission shaft D603, and the belt drive wheel 818 drives the two driven wheels C612 through the synchronous belt 604 to achieve power transmission, thereby driving the synchronous belt 604 to move and transfer the workpiece, achieving stable and synchronous transportation. The workpiece is then transferred to the next process.

[0170] Although the present invention has been described in detail above with general descriptions and specific embodiments, some modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, all such modifications or improvements made without departing from the spirit of the present invention fall within the scope of protection claimed by the present invention.

Claims

1. A wafer-splitting device for separating silicon wafers, characterized in that, The device includes a silicon wafer side clamping centering mechanism (2) and a slitting side clamping centering mechanism (5) arranged sequentially at the top; a slitting mechanism (4) is also provided on the silicon wafer side clamping centering mechanism (2), and the slitting mechanism (4) is located on the side adjacent to the slitting side clamping centering mechanism (5); the slitting device for separating silicon wafers also includes a receiving conveying mechanism (3) and a distributing conveying mechanism (6) arranged sequentially at the bottom; the slitting mechanism (4) includes a slitting drive assembly (401) and a water spray assembly B (402), the slitting drive assembly (401) is located above the water spray assembly B (402), and the slitting drive assembly (401) is located on the solid On the fixed base plate B (403), the segmented drive assembly (401) includes a cylinder (40101). The front end of the cylinder rod of the cylinder (40101) is connected to the cylinder connecting plate (40105) through the cylinder connector. Each end of the bottom surface of the cylinder connecting plate (40105) is connected to a guide shaft (40102). The bottom of the guide shaft (40102) extends out of the fixed base plate B (403). The bottom inner side of the two guide shafts (40102) is provided with a vertical rod (40103). The segmented piece (40104) is provided between the two vertical rods (40103). The bottom surface of the fixed base plate B (403) is provided with a water spray block A (40107).

2. A wafer slitting device for separating silicon wafers as described in claim 1, characterized in that, The receiving conveyor (3) and the distributing conveyor (6) are arranged in a cross manner. The conveying driven wheel B (316) at the end of the receiving conveyor (3) and the driven wheel C (612) at the front end of the distributing conveyor (6) are arranged in a cross manner and their centers coincide.

3. A wafer slitting device for separating silicon wafers as described in claim 1, characterized in that, The silicon wafer side clamping centering mechanism (2) and the slab side clamping centering mechanism (5) are arranged in a cross manner. The side clamping conveying drive wheel (511) at the front end of the slab side clamping centering mechanism (5) and the driven wheel A (408) at the end of the silicon wafer side clamping centering mechanism (2) are arranged in a cross manner and their centers coincide. The conveying driven wheel B (316), driven wheel C (612), side clamping conveying drive wheel (511), and driven wheel A (408) fall on the same vertical line at the center.

4. A wafer slitting device for separating silicon wafers as described in claim 1, characterized in that, The silicon wafer side clamp centering mechanism (2) includes a side clamp centering transmission group A and a side clamp centering transmission group B arranged in opposite directions. The bottom of the side clamp centering transmission group A and the side clamp centering transmission group B are connected by a synchronous belt B (205). The silicon wafer side clamping centering mechanism (2) is used to center and clamp the workpiece.

5. A wafer slitting device for separating silicon wafers as described in claim 1, characterized in that, The material receiving and conveying mechanism (3) includes a conveyor belt A (301), a conveyor belt B (303), and a conveyor motor A (302). Two conveyor belts B (303) are provided, located at both ends of the end of the conveyor belt A (301). The end of the conveyor belt A (301) is arranged between the two conveyor belts B (303) to form a cross arrangement. The output end of the conveyor motor A (302) is connected to a synchronous drive wheel. The synchronous drive wheel is connected to two synchronous driven wheels through a synchronous belt C (310). The two synchronous driven wheels are connected to the conveyor belt A (301) through a transmission shaft. The conveyor pulley (313) of conveyor belt B (303) is connected to the conveyor drive pulley (313) to realize the conveying of workpiece (7); of the two synchronous driven pulleys, one is connected to the conveyor drive pulley (313) of conveyor belt B (303) through drive shaft A (304), and the other is connected to the conveyor pulley of conveyor belt A (301) through drive shaft B (305). Drive shaft A (304) is connected to the conveyor drive pulley (313) of the adjacent conveyor belt B (303). The conveyor pulley is connected to the conveyor drive pulley (313) of another conveyor belt B (303) through drive shaft C (311).

6. A wafer slitting device for separating silicon wafers as described in claim 4, characterized in that, The side clamp centering transmission group B includes a fixed base plate B (403), on which a centering component for centering the workpiece (7) and a side clamping component B for side clamping the workpiece (7) are provided. The centering component is connected to the side clamping component B through a support frame to drive the side clamping component B to move left and right. Two side clamping components B are provided. Each side clamping component B includes a support C. The top of the support frame is connected to the synchronous belt drive block of the centering component. The top of the support frame is connected to the horizontal plate (206) through a support A (209).

7. A wafer slitting device for separating silicon wafers as described in claim 4, characterized in that, The side clamping centering transmission group A includes a fixed base plate A (201), on which a centering component for centering the workpiece (7) and a side clamping component A for side clamping the workpiece (7) are provided. The centering component is connected to the side clamping component A through a support frame to drive the side clamping component A to move left and right. Two side clamping components A are provided. Each side clamping component A includes a clamping conveyor motor (208). The output end of the clamping conveyor motor (208) is connected to the drive drive wheel (211) through a transmission rod A (210). The drive drive wheel (211) is connected to the driven wheel A (408) through a synchronous belt B (205). The support frame is connected to the synchronous belt drive block of the centering component. The clamping conveyor motor (208) is connected to the upper part of the support frame through the motor connecting plate. The top of the support frame is connected to the horizontal plate (206) through the support A (209). The support frame is slidably connected to the fixed base plate A (201) through the guide component. The guide component includes a linear guide rail C and a slider. The linear guide rail C is set on the fixed base plate A (201), and the slider is set on the bottom surface of the support frame. The linear guide rail C and the slider are slidably connected.

8. A wafer slitting device for separating silicon wafers as described in claim 4, characterized in that, The centering component installed on the side clamp centering transmission group A has the same structure as the centering component installed on the side clamp centering transmission group B.

9. A wafer slitting device for separating silicon wafers as described in claim 8, characterized in that, The centering assembly set on the side clamp centering transmission group A includes a side clamp drive motor A (202). The side clamp drive motor A (202) is set at one end of the fixed base plate A (201), and the other end of the fixed base plate A (201) is set with a side clamp driven wheel (215). The output end of the side clamp drive motor A (202) is connected to the side clamp driving wheel (216). The side clamp driving wheel (216) and the side clamp driven wheel (215) are connected by a synchronous belt A (203). The synchronous belt A (203) is connected to the support frame through a synchronous belt drive block.

10. A wafer slitting device for separating silicon wafers as described in claim 8, characterized in that, The upper synchronous belt A (203) is connected to the support frame after passing through the synchronous belt drive block A (204). The lower synchronous belt A (203) is connected to another support frame after passing through the synchronous belt drive block B (217). A rack A is provided on the outer side of the synchronous belt A (203). A rack B is provided at the connection between the inner side of the synchronous belt drive block A (204) and the synchronous belt drive block B (217) and the synchronous belt A (203). The rack A and the rack B are meshed together.

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