A sulfuric acid waste liquid recovery device

Abstract

The utility model relates to sulfuric acid waste liquid technical field, specifically is a kind of sulfuric acid waste liquid recovery device for semiconductor manufacturing process, comprising: processing part, for processing sulfuric acid waste liquid containing hydrogen peroxide;Collecting bucket part is connected with processing part;Backwashing part is connected with processing part, for regenerating resin, the processing part includes: precision filtration device, for filtering small particle impurities in waste liquid. Through the assembly of processing part, collecting bucket part and backwashing part, the sulfuric acid waste liquid generated in the photoresist process of semiconductor manufacturing process is treated, the sulfuric acid is recycled and reused, and the resin used in the treatment of sulfuric acid waste liquid can be backwashed, collected and reused, the hydrogen peroxide, organic matter and metal ions in the sulfuric acid waste liquid are effectively separated / remov ed, the recycling and reuse of resources are realized, the shortcomings of large energy consumption and serious pollution of traditional method are overcome, and good environmental protection is obtained.

Description

Technical Field

[0001] This utility model relates to the field of sulfuric acid waste liquid technology, specifically to a sulfuric acid waste liquid recovery device used in semiconductor manufacturing process. Background Technology

[0002] Sulfuric acid waste containing hydrogen peroxide mainly comes from processes such as metal cleaning, electrolysis, and photoresist removal. If sulfuric acid waste containing hydrogen peroxide is discharged directly into surface water without treatment, it will weaken the self-purification function of the water body and harm the growth of aquatic plants and animals. If it seeps into the ground, it will damage the soil structure and affect plant growth. If it is discharged into sewers, it will corrode sewer pipes and channels.

[0003] Existing neutralization and concentration methods for treating sulfuric acid waste containing hydrogen peroxide suffer from high energy consumption and severe pollution. Therefore, a sulfuric acid waste recovery device for semiconductor manufacturing processes is proposed to treat sulfuric acid waste generated in processes such as photoresist removal, enabling the sulfuric acid to be recovered and reused. It can also backwash and collect the resin used in the treatment of sulfuric acid waste for reuse, overcoming the shortcomings of traditional methods such as high energy consumption and severe pollution, and has better environmental protection. Utility Model Content

[0004] To address the problems in the existing technology, this utility model provides a sulfuric acid waste liquid recovery device for semiconductor manufacturing processes. This device treats sulfuric acid waste liquid generated in processes such as photoresist removal during semiconductor manufacturing, enabling the sulfuric acid to be recovered and reused. It can also backwash and collect the resin used in the sulfuric acid waste liquid used to treat hydrogen peroxide for reuse. This overcomes the disadvantages of traditional methods, such as high energy consumption and serious pollution, and has better environmental protection.

[0005] The technical solution adopted by this utility model to solve its technical problem is a sulfuric acid waste liquid recovery device in the semiconductor manufacturing process, comprising:

[0006] The treatment unit is used to treat sulfuric acid waste liquid containing hydrogen peroxide;

[0007] The collection tank section connects to the processing section;

[0008] The backwashing section, connected to the treatment section, is used for resin regeneration.

[0009] By adopting the above technical solution, the assembly consisting of a processing unit, a collection tank unit, and a backwashing unit is used to treat sulfuric acid waste liquid generated in processes such as photoresist removal in semiconductor manufacturing. This allows the sulfuric acid to be recycled and reused. It can also backwash and collect the resin used in the sulfuric acid waste liquid used to treat hydrogen peroxide for reuse. It effectively separates / removes hydrogen peroxide, organic matter, and metal ions from the sulfuric acid waste liquid, realizing resource recycling and reuse. This overcomes the shortcomings of traditional methods, such as high energy consumption and serious pollution, and has good environmental protection.

[0010] Specifically, the processing unit includes:

[0011] Precision filtration device, used to filter out tiny particulate impurities in waste liquid;

[0012] An oxygen-decomposing device is used to decompose hydrogen peroxide;

[0013] Organic matter removal device, used to remove organic matter from waste liquid;

[0014] Metal ion removal device, used to remove metal ions from waste liquid;

[0015] Evaporation and concentration equipment is used to concentrate sulfuric acid.

[0016] By adopting the above technical solution, hydrogen peroxide, organic matter and metal ions are separated and removed from sulfuric acid waste liquid containing hydrogen peroxide through the treatment unit.

[0017] Specifically, the collection bucket includes:

[0018] Waste liquid tank, used to store sulfuric acid waste liquid containing hydrogen peroxide;

[0019] The first collection tank is connected to the precision filtration device and the oxygen-breaking device;

[0020] The second collection tank is connected to the oxygen-breaking device and the organic matter removal device;

[0021] The third collection tank is connected to the organic matter removal device and the metal ion removal device;

[0022] Sulfuric acid collection tank, connected to a metal ion removal device;

[0023] A sulfuric acid regeneration solution collection tank is connected to an evaporation and concentration device;

[0024] A condensate tank is connected to the evaporation and concentration equipment and is used to collect the condensate from the equipment.

[0025] By adopting the above technical solution, the liquid material after each stage of processing is collected through the collection tanks in the collection bucket.

[0026] Specifically, the backwashing unit includes:

[0027] The alkaline washing section is connected to the organic matter removal device.

[0028] The pickling section is connected to the metal ion removal device;

[0029] Acid-base neutralization reaction tank.

[0030] By adopting the above technical solution, the resin used in the treatment of sulfuric acid waste liquid containing hydrogen peroxide is backwashed and regenerated through the backwashing unit.

[0031] Specifically, the alkaline washing section includes:

[0032] The first resin collection tank is connected to the organic matter removal device;

[0033] An alkali backwashing device is connected to the first resin collection tank;

[0034] An anion exchange resin regeneration collection tank is connected to an alkali backwashing device;

[0035] The low-concentration alkaline waste liquid collection tank is connected to the alkali backwashing device and the acid-base neutralization reaction tank.

[0036] By adopting the above technical solution, the resin in the organic matter removal device is recovered by alkaline washing in the alkaline washing section.

[0037] Specifically, the pickling section includes:

[0038] The second resin collection tank is connected to the metal ion removal device;

[0039] An acid backwashing device is connected to the second resin collection tank;

[0040] A positive resin regeneration collection tank is connected to an acid backwashing device;

[0041] A low-concentration acid waste liquid collection tank is connected to an acid backwashing device and an acid-base neutralization reaction tank.

[0042] By adopting the above technical solution, the resin in the metal ion removal device is acid-washed and recovered through the acid washing section.

[0043] The beneficial effects of this utility model are as follows: The assembly consisting of a processing unit, a collection tank unit, and a backwashing unit enables the treatment of sulfuric acid waste liquid containing hydrogen peroxide generated during processes such as cleaning and electrolysis of metal parts, allowing the sulfuric acid to be recycled and reused. It also enables the backwashing and collection of the resin used in the treatment of sulfuric acid waste liquid containing hydrogen peroxide for reuse, effectively separating hydrogen peroxide, organic matter, and metal ions from the sulfuric acid waste liquid containing hydrogen peroxide. This achieves resource recycling and reuse, overcoming the shortcomings of traditional methods such as high energy consumption and severe pollution, and has better environmental protection. It solves the problems of high energy consumption and severe pollution in the existing neutralization, concentration, and incineration processes for treating sulfuric acid waste liquid containing hydrogen peroxide. Attached Figure Description

[0044] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0045] Figure 1 This is a schematic diagram of the sulfuric acid waste liquid treatment process of this utility model;

[0046] Figure 2 This is a schematic diagram of the backwashing process of this utility model;

[0047] Figure 3 This is a schematic diagram of the evaporation and concentration equipment of this utility model.

[0048] In the diagram: 1. Waste liquid tank; 2. Precision filtration device; 3. First collection tank; 4. Oxygen decomposition device; 5. Second collection tank; 6. Organic matter removal device; 7. Third collection tank; 8. Metal ion removal device; 9. Sulfuric acid collection tank; 10. Evaporation and concentration equipment; 11. Sulfuric acid regeneration liquid collection tank; 12. Condensate tank; 14. First resin collection tank; 15. Second resin collection tank; 16. Alkali backwashing device; 17. Anion exchange resin regeneration collection tank; 18. Low-concentration alkaline waste liquid collection tank; 19. Acid backwashing device; 20. Low-concentration acid waste liquid collection tank; 21. Cation exchange resin regeneration collection tank; 22. Acid-base neutralization reaction tank. Detailed Implementation

[0049] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0050] In order to reduce pollution, such as Figure 1-3 As shown, the present invention provides a sulfuric acid waste liquid recovery device for semiconductor manufacturing processes, comprising:

[0051] The treatment unit is used to treat sulfuric acid waste liquid containing hydrogen peroxide;

[0052] The collection tank section connects to the processing section;

[0053] The backwashing section, connected to the treatment section, is used for resin regeneration.

[0054] In use, the system processes sulfuric acid waste liquid generated during semiconductor manufacturing processes, such as photoresist removal, through a treatment section, a collection tank section, and a backwashing section. This allows the sulfuric acid to be recycled and reused, and the resin used in the treatment of sulfuric acid waste liquid can be backwashed, collected, and reused, achieving resource recycling and reuse, and exhibiting good environmental performance.

[0055] For example, to recover sulfuric acid, such as Figure 1 As shown, the present invention also includes, the processing unit comprising:

[0056] Precision filtration device 2 is used to filter out tiny particulate impurities in waste liquid;

[0057] Oxygen-decomposing device 4 is used to decompose hydrogen peroxide;

[0058] Organic matter removal device 6 is used to remove organic matter from waste liquid;

[0059] Metal ion removal device 8 is used to remove metal ions from waste liquid;

[0060] Evaporation and concentration equipment 10 is used to concentrate sulfuric acid.

[0061] The oxygen-breaking device 4 is a heated aeration tank or heated container, the evaporation and concentration equipment 10 is a single-effect or double-effect evaporator, and the organic matter removal device 6 and the metal ion removal device 8 are both resin adsorption devices.

[0062] During use, the fine particulate impurities in the sulfuric acid waste liquid containing hydrogen peroxide are filtered through the precision filter device 2.

[0063] For example, such as Figure 1 As shown, the present invention also includes, the collecting bucket part comprising:

[0064] Waste liquid tank 1 is used to store sulfuric acid waste liquid containing hydrogen peroxide;

[0065] The first collection tank 3 is connected to the precision filter device 2 and the oxygen-breaking device 4;

[0066] The second collection tank 5 is connected to the oxygen-breaking device 4 and the organic matter removal device 6;

[0067] The third collection tank 7 is connected to the organic matter removal device 6 and the metal ion removal device 8;

[0068] Sulfuric acid collection tank 9 is connected to metal ion removal device 8;

[0069] The sulfuric acid regeneration liquid collection tank 11 is connected to the evaporation and concentration equipment 10;

[0070] The condensate tank 12 is connected to the evaporation and concentration equipment 10 and is used to collect the condensate from the evaporation and concentration equipment 10.

[0071] For example, such as Figure 2 As shown, the present invention also includes, the backwashing section comprising:

[0072] The alkaline washing section is connected to the organic matter removal device 6;

[0073] The pickling section is connected to the metal ion removal device 8;

[0074] Acid-base neutralization reaction tank 22.

[0075] During use, the resin in the organic matter removal device 6 and the metal ion removal device 8 is backwashed through the alkaline washing section and the acid washing section, so that the resin can be regenerated and reused.

[0076] For example, such as Figure 2 As shown, this utility model also includes, the alkaline washing section comprising:

[0077] The first resin collection tank 14 is connected to the organic matter removal device 6;

[0078] The alkali backwashing device 16 is connected to the first resin collection tank 14;

[0079] An anion exchange resin regeneration collection tank 17 is connected to an alkali backwashing device 16;

[0080] The low-concentration alkaline waste liquid collection tank 18 is connected to the alkali backwashing device 16 and the acid-base neutralization reaction tank 22.

[0081] For example, such as Figure 2 As shown, the present invention also includes, the pickling section comprising:

[0082] The second resin collection tank 15 is connected to the metal ion removal device 8;

[0083] The acid backwashing device 19 is connected to the second resin collection tank 15;

[0084] The positive resin regeneration collection tank 21 is connected to the acid backwashing device 19;

[0085] The low-concentration acid waste liquid collection tank 20 is connected to the acid backwashing device 19 and the acid-base neutralization reaction tank 22.

[0086] In use, this utility model centrally stores sulfuric acid waste liquid in waste liquid tank 1. The sulfuric acid waste liquid in waste liquid tank 1 is pumped to precision filtration device 2, where fine particulate impurities in the sulfuric acid waste liquid are filtered out. The sulfuric acid waste liquid filtered by precision filtration device 2 is collected in first collection tank 3. The liquid in first collection tank 3 is pumped to oxygen decomposition device 4, where hydrogen peroxide in the liquid is decomposed by heating. The sulfuric acid waste liquid is then collected in second collection tank 5 and pumped to organic matter removal device 6, where organic matter in the waste liquid is absorbed and removed. The sulfuric acid waste liquid with removed organic matter is then collected in third collection tank 7 and pumped to metal ion removal device 8, where metal ions in the sulfuric acid waste liquid are adsorbed and collected. The sulfuric acid liquid discharged from metal ion removal device 8 is collected in sulfuric acid collection tank 9 and pumped to evaporation and concentration equipment 10 for concentration to obtain concentrated sulfuric acid regenerated liquid. This concentrated sulfuric acid regenerated liquid is collected in sulfuric acid regenerated liquid collection tank 11 and then fed into the production line to achieve the recycling of sulfuric acid.

[0087] In the treatment and recovery of sulfuric acid, the resins in the organic matter removal device 6 and the metal ion removal device 8 are collected by the first resin collection tank 14 and the second resin collection tank 15, respectively. The resin collected in the first resin collection tank 14 is backwashed with alkali by the alkali backwashing device 16, and the resin collected in the second resin collection tank 15 is backwashed with acid by the acid backwashing device 19. This allows the resins in the organic matter removal device 6 and the metal ion removal device 8 to be regenerated and reused. The low-concentration alkali waste liquid and low-concentration acid waste liquid generated during backwashing are collected by the low-concentration alkali waste liquid collection tank 18 and the low-concentration acid waste liquid collection tank 20, and then pumped to the acid-base neutralization reaction tank 22 for neutralization, thus completing the recovery and reuse of the resin.

[0088] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The descriptions of the above embodiments and specifications are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of protection claimed by this utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A sulfuric acid spent liquor recovery apparatus, characterized by, include: Treatment section: used to treat sulfuric acid waste liquid containing hydrogen peroxide; Collection tank section: connected to the treatment section; Backwashing section: connected to the treatment section. The processing unit includes a primary filtration unit, an oxygen-depleting unit, an organic matter filtration unit, a metal ion filtration unit, and an evaporation and concentration unit connected in sequence. The backwashing unit is connected to the organic matter filtration unit and the metal ion filtration unit respectively. The evaporation and concentration unit outputs sulfuric acid regenerated liquid from its outlet.

2. A sulphuric acid waste liquor recovery apparatus according to claim 1, characterised in that, In the processing unit: The primary filtration unit is a precision filtration device (2) used to filter out tiny particulate impurities in the waste liquid; The oxygen-breaking unit is an oxygen-breaking device (4) used to decompose hydrogen peroxide; The organic matter filtration unit is an organic matter removal device (6) used to remove organic matter from waste liquid; The ion filtration unit is a device for removing metal ions (8), used to remove metal ions from waste liquid; Evaporation and concentration equipment (10) is used to concentrate sulfuric acid.

3. A sulphuric acid waste liquor recovery apparatus according to claim 2, characterised in that, The collection bucket includes: Waste liquid tank (1) is used to store sulfuric acid waste liquid containing hydrogen peroxide; The first collection tank (3) is connected to the precision filter (2) and the oxygen-breaking device (4); The second collection tank (5) is connected to the oxygen-breaking device (4) and the organic matter removal device (6); The third collection tank (7) is connected to the organic matter removal device (6) and the metal ion removal device (8); Sulfuric acid collection tank (9) is connected to metal ion removal device (8); A sulfuric acid regeneration liquid collection tank (11) is connected to an evaporation and concentration device (10); A condensate tank (12) is connected to an evaporation and concentration device (10) and is used to collect the condensate from the evaporation and concentration device (10).

4. A sulphuric acid waste liquor recovery apparatus according to claim 2, characterised in that, The backwashing unit includes: The alkaline washing section is connected to the organic matter removal device (6); The pickling section is connected to the metal ion removal device (8); An acid-base neutralization reaction tank (22) is connected to the alkaline washing section and the acid washing section.

5. A sulphuric acid waste liquor recovery apparatus according to claim 4, characterised in that, The alkaline washing section includes: The first resin collection tank (14) is connected to the organic matter removal device (6); An alkali backwashing device (16) is connected to the first resin collection tank (14); An anion exchange resin regeneration collection tank (17) is connected to an alkali backwashing device (16); The low-concentration alkaline waste liquid collection tank (18) is connected to the alkali backwashing device (16) and the acid-base neutralization reaction tank (22).

6. A sulphuric acid waste liquor recovery apparatus according to claim 4, characterised in that, The pickling section includes: The second resin collection tank (15) is connected to the metal ion removal device (8); An acid backwashing device (19) is connected to a second resin collection tank (15); A positive resin regeneration collection tank (21) is connected to an acid backwashing device (19); A low-concentration acid waste liquid collection tank (20) is connected to an acid backwashing device (19) and an acid-base neutralization reaction tank (22).

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