Water-cooled vacuum capacitors

Abstract

This utility model discloses a water-cooled vacuum capacitor, comprising: an insulating shell and two electrode groups. Each electrode group includes an electrode disk and an electrode ring group fixed to the electrode disk. The insulating shell is sealed and connected to the two electrode disks to form a vacuum chamber. The two electrode ring groups are coupled and housed within the vacuum chamber. At least one electrode disk has a water-cooling chamber inside, and also has an inlet and an outlet communicating with the water-cooling chamber. By incorporating a water-cooling chamber within at least one electrode disk, this utility model can directly cool the electrode group from the heat source, significantly improving heat dissipation efficiency, enhancing the voltage withstand stability of the vacuum capacitor, reducing the impact of high temperature on capacitance, thereby ensuring impedance matching of the equipment, improving the electrical performance stability of the vacuum capacitor under high-frequency conditions, and meeting users' requirements for high current and voltage withstand stability of vacuum capacitors.

Description

Technical Field

[0001] This utility model relates to the field of capacitor technology, and in particular to a water-cooled vacuum capacitor. Background Technology

[0002] A vacuum capacitor is a type of capacitor with a ceramic insulating shell, a vacuum as the dielectric, and high-conductivity oxygen-free copper as the electrode material. Typically, the electrode material is pure copper with an impurity content of ≤0.03%. Because vacuum capacitors operate at high frequencies, they are affected by the skin effect, resulting in exceptionally high operating temperatures even with highly conductive internal electrodes. The surface temperature of the capacitor can typically reach 125°C, while the internal electrode temperature can even exceed 250°C. Due to the skin effect, the conductivity of the connecting parts and electrode rings decreases, leading to an increase in the internal operating temperature of the capacitor. This results in a decrease in the insulation strength between the electrodes, a decrease in the capacitor's withstand voltage, and changes in capacitance due to the high temperature, affecting the impedance matching of the equipment.

[0003] As semiconductor manufacturing equipment demands increasingly higher output power from impedance matching devices, users require vacuum capacitors to handle larger currents and operate at higher voltages. Using circulating cooling water to reduce the temperature of vacuum capacitors during operation is a relatively effective measure. For example, the integrated water-cooled variable ceramic vacuum capacitor disclosed in application publication number CN114121484B, while providing some cooling by forming a water circulation channel between the conductor sleeve and the mounting base, does not directly cool the main heat-generating components, namely the electrode assembly, resulting in poor heat dissipation. Therefore, it is necessary to improve the existing technology to overcome its shortcomings. Utility Model Content

[0004] The problem to be solved by this utility model is to provide a water-cooled vacuum capacitor to overcome the defect of poor heat dissipation caused by the fact that the existing water-cooled vacuum capacitors do not directly cool the electrode group.

[0005] The technical solution adopted by this utility model to solve its technical problem is: a water-cooled vacuum capacitor, comprising: an insulating shell and two electrode groups, each of the two electrode groups including an electrode disk and an electrode ring group fixed to the electrode disk, the insulating shell being sealed and connected to the two electrode disks and forming a vacuum chamber, the two electrode ring groups being coupled to each other and housed in the vacuum chamber; at least one of the electrode disks is provided with a water-cooling chamber inside, and is also provided with an inlet and an outlet communicating with the water-cooling chamber.

[0006] As a further improvement of this utility model, the electrode disk includes an upper cover plate and a lower cover plate, the upper cover plate and the lower cover plate are fixedly connected to each other, and the water-cooling chamber is formed between the upper cover plate and the lower cover plate.

[0007] As a further improvement of this utility model, the electrode disk is provided with a central hole in the middle, and a mounting joint is fixed in the central hole, and the water-cooling chamber is distributed around the mounting joint.

[0008] As a further improvement of this utility model, a first water inlet connector is fixedly connected to the water inlet, and a first water outlet connector is fixedly connected to the water outlet. When the water-cooled vacuum capacitor is arranged horizontally, that is, when the axis of the water-cooled vacuum capacitor is distributed in the horizontal direction, the first water inlet connector is set lower than the first water outlet connector.

[0009] As a further improvement of this utility model, both the first water inlet connector and the first water outlet connector are perpendicular to the axis of the water-cooled vacuum capacitor.

[0010] As a further improvement of this utility model, both electrode groups are static electrode groups, and correspondingly, both electrode disks are static electrode disks, with the lower cover plates of each of the two static electrode disks welded to both ends of the insulating shell.

[0011] As a further improvement of this utility model, the two electrode groups are a static electrode group and a moving electrode group, and the position of the moving electrode group in the vacuum chamber is adjustable to change the coupling length between it and the static electrode group.

[0012] As a further improvement of this utility model, the water-cooled vacuum capacitor also includes a base, a base cover plate, a bellows, a guide sleeve, and a pull rod. The base and the electrode disks of the static electrode group are respectively fixedly connected to both ends of the insulating shell. The moving electrode group is located inside the insulating shell, and the electrode disks of the moving electrode group are sealed to the base through the bellows. The guide sleeve is fixed to the base and located inside the bellows. The pull rod is slidably fitted inside the guide sleeve and fixedly connected to the moving electrode group. A sealing ring is provided between the pull rod and the guide sleeve. The electrode disk of the moving electrode assembly is provided with the water-cooling chamber, the water inlet and the water outlet. The water-cooling chamber is connected to the cavity inside the corrugated pipe through the water inlet and the water outlet. The base cover plate is fixed to the base. The base cover plate is fixedly connected with a second water inlet connector and a second water outlet connector. The base is provided with a plurality of first water passage holes. The second water inlet connector and the second water outlet connector are connected to the cavity inside the corrugated pipe through the first water passage holes.

[0013] As a further improvement of this utility model, the inner diameter of the second water inlet connector is larger than the inner diameter of the second water outlet connector.

[0014] As a further improvement of this utility model, the electrode disk of the static electrode assembly is provided with the water-cooling chamber, the water inlet and the water outlet.

[0015] The beneficial effects of this utility model are as follows: This utility model provides a water-cooled vacuum capacitor. By providing a water-cooling chamber in at least one electrode plate, the cooling water can quickly remove the heat generated by the electrode assembly during the circulation of the cooling water in the water-cooling chamber, which significantly improves the heat dissipation efficiency. Under the same rated current and operating frequency, the surface temperature of the vacuum capacitor drops significantly, below the rated operating temperature by more than 50°C. At the same time, due to the low operating temperature, the withstand voltage stability of the vacuum capacitor is also improved, reducing the impact of high temperature on the capacitance value, thereby ensuring the impedance matching of the equipment, improving the electrical performance stability of the vacuum capacitor under high frequency conditions, and meeting the user's requirements for high current and withstand voltage stability of the vacuum capacitor. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a perspective view of a first embodiment of the water-cooled vacuum capacitor of this utility model; Figure 2 This is a cross-sectional view of Embodiment 1 of the water-cooled vacuum capacitor of this utility model; Figure 3 This is a cross-sectional view of Embodiment 2 of the water-cooled vacuum capacitor of this utility model; Figure 4 This is a perspective view of Embodiment 3 of the water-cooled vacuum capacitor of this utility model; Figure 5 This is a cross-sectional view of Embodiment 3 of the water-cooled vacuum capacitor of this utility model; Figure 6 This is a perspective view of the moving electrode disk of Embodiment 3 of the water-cooled vacuum capacitor of this utility model; Figure 7 This is a perspective view of Embodiment 4 of the water-cooled vacuum capacitor of this utility model; Figure 8 This is a cross-sectional view of Embodiment 4 of the water-cooled vacuum capacitor of this utility model; In the diagram, the arrows indicate the direction of water flow.

[0018] Referring to the accompanying drawings, the following explanations are provided: 1. Insulating shell; 2. Water-cooled chamber; 3. Mounting connector; 4. First water inlet connector; 5. First water outlet connector; 6. Static electrode assembly; 61. Static electrode disc; 611. Static upper cover plate; 612. Static lower cover plate; 62. Static electrode ring assembly; 7. Moving electrode assembly; 71. Moving electrode disc; 711. Moving upper cover plate; 712. Moving lower cover plate; 72. Moving electrode ring assembly; 701. Second water passage hole; 8. Base; 801. First water passage hole; 9. Base cover plate; 10. Bellows; 11. Guide sleeve; 12. Tie rod; 13. Sealing ring; 14. Second water inlet connector; 15. Second water outlet connector; 16. Transmission mechanism. Detailed Implementation

[0019] The present application will now be described in detail with reference to the accompanying drawings and specific embodiments.

[0020] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0021] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0022] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The illustrations only show the components related to this application and are not drawn according to the number, shape and size of the components in actual implementation. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0023] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0024] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.

[0025] Example 1

[0026] See Figure 1 and Figure 2 This utility model provides a water-cooled vacuum capacitor, including: an insulating shell 1 and two electrode groups. Each electrode group includes an electrode disk and an electrode ring group fixed to the electrode disk. The insulating shell 1 is sealed and connected to the two electrode disks and cooperates to form a vacuum chamber. The two electrode ring groups are coupled to each other and housed in the vacuum chamber.

[0027] It should be noted that the connection method between the insulating shell 1 and the two electrode disks is not limited; it can be a direct sealed connection or an indirect sealed connection. In this embodiment, it is a direct sealed connection.

[0028] Obviously, the water-cooled vacuum capacitor described in this embodiment is a fixed capacitance vacuum capacitor, that is: both electrode groups remain fixed relative to the insulating shell 1, the coupling length between the two electrode ring groups does not change, and the capacitance of the vacuum capacitor is a constant value.

[0029] like Figure 2 As shown, both electrode groups in this embodiment are static electrode groups 6. Correspondingly, each electrode group includes a static electrode disk 61 and a static electrode ring group 62, respectively. The two static electrode ring groups 62 are respectively welded to the inner end faces of the two static electrode disks 61 that are opposite to each other.

[0030] For example, the insulating shell 1 is a cylindrical shape with open ends, typically made of ceramic material; the two static electrode disks 61 are circular and are respectively sealed and fixedly connected to both ends of the insulating shell 1, and the fixing method can be, but is not limited to, brazing. The insulating shell 1 and the two static electrode disks 61 cooperate to form a sealed space, and this sealed space is configured as a vacuum chamber. The two static electrode ring groups 62 are each composed of multiple electrode rings of different diameters arranged concentrically at intervals, and the electrode rings in the two static electrode ring groups 62 are alternately and concentrically arranged in the vacuum chamber, so that the two static electrode ring groups 62 can couple with each other through the electric field formed therebetween.

[0031] The coupling length mentioned in this article refers to the effective length of the two static electrode ring groups 62 that influence and interact with each other under the action of an electric field, that is, the length of the overlap of the two static electrode ring groups 62 facing each other in the radial direction.

[0032] As a significant improvement of this application, at least one static electrode plate 61 is provided with a water-cooled chamber 2 inside, and the static electrode plate 61 is also provided with an inlet and an outlet connecting to the water-cooled chamber 2. Since the static electrode ring assembly 62 is welded to the static electrode plate 61, when the vacuum capacitor is working, the heat generated by the static electrode ring assembly 62 is directly conducted to the static electrode plate 61. Circulating cooling water is injected into the water-cooled chamber 2 inside the static electrode plate 61 through the inlet, and the cooling water flows out through the outlet. During the circulation process, the cooling water can quickly remove the heat generated by the static electrode assembly 6, directly cooling the static electrode assembly 6 from the heat source, which significantly improves the heat dissipation efficiency. Under the same rated current and operating frequency, the surface temperature of the vacuum capacitor drops significantly, below the rated operating temperature by more than 50°C. At the same time, due to the low operating temperature, the withstand voltage stability of the vacuum capacitor is also improved, reducing the impact of high temperature on the capacitance value, thereby ensuring the impedance matching of the equipment and improving the electrical performance stability of the vacuum capacitor under high frequency conditions.

[0033] Preferably, in this embodiment, both static electrode plates 61 are provided with water-cooled chambers 2 inside, and both static electrode plates 61 are provided with water inlets and water outlets that connect to their respective water-cooled chambers 2.

[0034] Furthermore, both electrode disks include an upper cover plate and a lower cover plate, which are fixedly connected to each other, and the water-cooling chamber 2 is formed between the upper cover plate and the lower cover plate. As explained above, the electrode disk in this embodiment is specifically a stationary electrode disk 61. For ease of understanding, the upper cover plate and lower cover plate included in each electrode disk in this embodiment are specifically a stationary upper cover plate 611 and a stationary lower cover plate 612. The stationary lower cover plate 612 of each of the two stationary electrode disks 61 is welded to both ends of the insulating outer shell 1.

[0035] One of the upper static cover plate 611 and the lower static cover plate 612 is provided with a groove. The two cover each other and are welded together to form a hollow static electrode disk 61. The hollow part in the middle of the static electrode disk 61 is the water cooling chamber 2.

[0036] See Figure 1 Each of the two static electrode plates 61 has a first water inlet connector 4 fixedly connected to its water inlet, and a first water outlet connector 5 fixedly connected to its water outlet. When the water-cooled vacuum capacitor is arranged horizontally, that is, when the axis of the water-cooled vacuum capacitor is distributed in the horizontal direction, the first water inlet connector 4 is set lower than the first water outlet connector 5. In this way, the water flow direction is bottom inlet and top outlet, ensuring that the circulating cooling water can fill the entire water-cooling chamber 2 and improve the cooling effect.

[0037] It is worth mentioning that the inlet and outlet are both radially arranged on the outer circumference of the static electrode plate 61, so that the first inlet connector 4 and the first outlet connector 5 are both perpendicular to the axis of the water-cooled vacuum capacitor, which will not increase the overall height of the vacuum capacitor and the installation method of the vacuum capacitor is not affected.

[0038] Preferably, the first water inlet connectors 4 on the two static electrode plates 61 are located on the same side, and the first water outlet connectors 5 on the two static electrode plates 61 are also located on the same side. For any static electrode plate 61, the first water inlet connector 4 and the first water outlet connector 5 are located on the same diameter line.

[0039] It is worth mentioning that the inner diameter of the first water inlet connector 4 is larger than the inner diameter of the first water outlet connector 5. Preferably, the cross-sectional area of ​​the inner hole of the first water outlet connector 5 is less than 50% of the cross-sectional area of ​​the inner hole of the first water inlet connector 4. While ensuring the cooling water flow rate, a certain water pressure difference can be formed to ensure that the cooling water completely fills the water-cooled chamber 2, further improving the cooling effect.

[0040] See again Figure 2 Each of the two static electrode disks 61 has a central hole in its middle, and a mounting connector 3 is welded into the central hole. The water-cooled chambers 2 are distributed around the mounting connectors 3. The mounting connectors 3 have threaded holes inside to facilitate the installation of vacuum capacitors.

[0041] Example 2

[0042] See Figure 3 The difference between this embodiment and embodiment one is that this embodiment has only one static electrode plate 61 with a water cooling chamber 2 and a water inlet and outlet connected to the water cooling chamber 2.

[0043] The other static electrode disk 61 is a solid structure that is welded to one end of the insulating shell 1. At the same time, the outer end face of the static electrode disk 61 is provided with a threaded hole in the middle to replace the mounting connector 3.

[0044] Example 3

[0045] The difference between this embodiment and Embodiment 1 is that in this embodiment, the water-cooled vacuum capacitor is a variable capacitance vacuum capacitor, that is, the relative position of the two electrode groups in the vacuum chamber is adjustable to change the coupling length between the two electrode ring groups, thereby changing the coupling area and thus achieving capacitance adjustment.

[0046] See Figure 4 and Figure 5 The water-cooled vacuum capacitor includes an insulating shell 1, two electrode groups, a base 8, a base cover plate 9, a bellows 10, a guide sleeve 11, a pull rod 12, and a transmission mechanism 16.

[0047] Both electrode groups include an electrode disk and an electrode ring group fixed to the electrode disk. In this embodiment, the two electrode groups are specifically a static electrode group 6 and a moving electrode group 7. The position of the moving electrode group 7 in the vacuum chamber is adjustable to change the coupling length between it and the static electrode group 6.

[0048] In this embodiment, the static electrode assembly 6 includes an electrode disk and an electrode ring assembly, specifically a static electrode disk 61 and a static electrode ring assembly 62. The static electrode disk 61 is a solid, integral structure without a water-cooling chamber 2, inlet, or outlet. The static electrode ring assembly 62 is welded to the inner end face of the static electrode disk 61. The static electrode disk 61 and the base 8 are respectively welded to both ends of the insulating shell 1.

[0049] In this embodiment, the moving electrode assembly 7 includes an electrode disk and an electrode ring assembly, specifically a moving electrode disk 71 and a moving electrode ring assembly 72, with the moving electrode ring assembly 72 welded to the end face of the moving electrode disk 71 facing the stationary electrode disk 61.

[0050] See Figure 5 The moving electrode assembly 7 is located inside the insulating shell 1, and the moving electrode disk 71 is sealed to the base 8 through the bellows 10, thereby forming a closed space between the insulating shell 1, the base 8, the bellows 10, the moving electrode disk 71 and the stationary electrode disk 61, and this closed space is configured as a vacuum chamber.

[0051] Similarly, both the stationary electrode ring group 62 and the moving electrode ring group 72 are composed of multiple electrode rings of different diameters arranged concentrically at intervals. The electrode rings in the stationary electrode ring group 62 and the electrode rings in the moving electrode ring group 72 are alternately and concentrically arranged in the vacuum chamber. The stationary electrode ring group 62 and the moving electrode ring group 72 can couple with each other through the electric field formed between them.

[0052] Furthermore, the guide sleeve 11 is fixed to the middle of the base 8 and located inside the bellows 10. The pull rod 12 is slidably fitted inside the guide sleeve 11 and fixedly connected to the moving electrode disk 71. The transmission mechanism 16, consisting of a screw and a nut, is connected to the pull rod 12. When an external power device, such as a motor, drives the pull rod 12 to move up and down axially through the transmission mechanism 16, the pull rod 12 will synchronously drive the moving electrode group 7 to move. At the same time, the bellows 10 will be compressed / stretched accordingly, so that the coupling length between the moving electrode ring group 72 and the stationary electrode ring group 62 changes, thereby realizing the adjustment of the capacitance value of the vacuum capacitor.

[0053] In this embodiment, the moving electrode disk 71 is provided with a water-cooling chamber 2, a water inlet and a water outlet.

[0054] Specifically, the moving electrode disk 71 includes a moving upper cover plate 711 and a moving lower cover plate 712. One of the moving upper cover plate 711 and the moving lower cover plate 712 is provided with a groove. The two cover each other and are welded together to form a moving electrode disk 71 with a hollow center. The hollow center of the moving electrode disk 71 is the water cooling chamber 2.

[0055] See Figure 5 and Figure 6 The top of the movable upper cover plate 711 has multiple second water passage holes 701, some of which serve as water inlets for the movable electrode plate 71, while the remaining second water passage holes 701 serve as water outlets for the movable electrode plate 71. The water-cooled chamber 2 is connected to the cavity inside the bellows 10 through the water inlets and outlets (i.e., the second water passage holes 701).

[0056] Furthermore, the base cover plate 9 is welded to the top of the base 8, and the base cover plate 9 is fixedly connected with the second water inlet connector 14 and the second water outlet connector 15. The base 8 is provided with a plurality of first water passage holes 801. The second water inlet connector 14 is connected to the cavity inside the corrugated pipe 10 through the corresponding first water passage hole 801, and at the same time, the cavity inside the corrugated pipe 10 is connected to the second water outlet connector 15 through another first water passage hole 801.

[0057] During operation, cooling water enters the bellows 10 through the second inlet connector 14 and the corresponding first water passage 801. Then, it enters the water-cooling chamber 2 through the inlet of the moving electrode plate 71. After absorbing the heat generated by the moving electrode assembly 7, the cooling water returns to the bellows 10 through the outlet of the moving electrode plate 71 and is finally discharged from the second outlet connector 15 through another first water passage 801.

[0058] Since the moving electrode ring assembly 72 is welded to the moving electrode disk 71, when the vacuum capacitor is working, the heat generated by the moving electrode ring assembly 72 is directly conducted to the moving electrode disk 71. Circulating cooling water is injected into the water-cooling chamber 2 inside the moving electrode disk 71 through the second water inlet connector 14. During the circulation process, the cooling water can quickly remove the heat generated by the moving electrode ring assembly 72, directly cooling the moving electrode assembly 7 from the heat source, which significantly improves the heat dissipation efficiency. Under the same rated current and operating frequency, the surface temperature of the vacuum capacitor drops significantly, below the rated operating temperature by more than 50°C. At the same time, due to the low operating temperature, the withstand voltage stability of the vacuum capacitor is also improved, reducing the impact of high temperature on the capacitance value, thereby ensuring the impedance matching of the equipment and improving the electrical performance stability of the vacuum capacitor under high frequency conditions.

[0059] like Figure 4As shown, the second water inlet connector 14 and the second water outlet connector 15 are both radially arranged on the outer circumferential surface of the base cover plate 9, and the second water inlet connector 14 and the second water outlet connector 15 are located on the same diameter line. To ensure that the cooling water can completely fill the water-cooled chamber 2 inside the bellows 10 and the moving electrode plate 71, on the one hand, this application sets the inner diameter of the second water inlet connector 14 to be larger than the inner diameter of the second water outlet connector 15. Preferably, the cross-sectional area of ​​the inner hole of the second water outlet connector 15 is less than 50% of the cross-sectional area of ​​the inner hole of the second water inlet connector 14. On the other hand, when the water-cooled vacuum capacitor is installed, its axis is distributed in the horizontal direction, with the second water inlet connector 14 facing downward and the second water outlet connector 15 facing upward, forming a water flow direction of bottom inlet and top outlet, thereby improving the cooling effect.

[0060] In addition, to prevent cooling water from leaking into the transmission mechanism 16, a sealing ring 13 is provided between the pull rod 12 and the guide sleeve 11 in this embodiment.

[0061] Example 4

[0062] See Figure 7 and Figure 8 The difference between this embodiment and embodiment three is that, in addition to the water-cooled chamber 2, water inlet and water outlet provided on the moving electrode plate 71, this embodiment also provides a water-cooled chamber 2, water inlet and water outlet on the static electrode plate 61 of the static electrode group 6.

[0063] The static electrode group 6 in this embodiment is the same as the static electrode group 6 described in Embodiment 1, so it will not be described again.

[0064] This embodiment provides water-cooling chambers 2 on both the static electrode disk 61 of the static electrode group 6 and the moving electrode disk 71 of the moving electrode group 7, directly cooling the two electrode groups from the heat source. This significantly improves heat dissipation efficiency, enhances the withstand voltage stability of the vacuum capacitor, reduces the impact of high temperature on capacitance, and thus ensures impedance matching of the equipment. It also improves the electrical performance stability of the vacuum capacitor under high-frequency conditions, meeting the user's requirements for high current and withstand voltage stability of the vacuum capacitor.

[0065] The same or similar parts between the various embodiments in this specification can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments.

[0066] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A water-cooled vacuum capacitor comprising: An insulating shell (1) and two electrode groups, each of the two electrode groups including an electrode disk and an electrode ring group fixed to the electrode disk, the insulating shell (1) is sealed and connected to the two electrode disks and cooperates to form a vacuum chamber, and the two electrode ring groups are coupled to each other and housed in the vacuum chamber; characterized in that: at least one of the electrode disks is provided with a water-cooled chamber (2) inside, and is also provided with an inlet and an outlet communicating with the water-cooled chamber (2).

2. The water-cooled vacuum capacitor of claim 1, wherein: The electrode disk includes an upper cover plate and a lower cover plate, the upper cover plate and the lower cover plate are fixedly connected to each other, and the water-cooling chamber (2) is formed between the upper cover plate and the lower cover plate.

3. The water-cooled vacuum capacitor of claim 1, wherein: The electrode disk has a central hole in the middle, and a mounting connector (3) is fixed in the central hole. The water-cooling chamber (2) is distributed around the mounting connector (3).

4. The water-cooled vacuum capacitor of claim 1, wherein: A first water inlet connector (4) is fixedly connected to the water inlet, and a first water outlet connector (5) is fixedly connected to the water outlet. When the water-cooled vacuum capacitor is arranged horizontally, that is, when the axis of the water-cooled vacuum capacitor is distributed in the horizontal direction, the first water inlet connector (4) is set lower than the first water outlet connector (5).

5. The water-cooled vacuum capacitor of claim 4, wherein: The first water inlet connector (4) and the first water outlet connector (5) are both perpendicular to the axis of the water-cooled vacuum capacitor.

6. The water-cooled vacuum capacitor of claim 2, wherein: Both of the electrode groups are static electrode groups (6), and correspondingly, both of the electrode disks are static electrode disks (61). The lower cover plates of each of the two static electrode disks (61) are respectively welded to both ends of the insulating shell (1).

7. The water-cooled vacuum capacitor of claim 1, wherein: The two electrode groups are a static electrode group (6) and a moving electrode group (7), and the position of the moving electrode group (7) in the vacuum chamber is adjustable to change the coupling length between it and the static electrode group (6).

8. The water-cooled vacuum capacitor of claim 7, wherein: It also includes a base (8), a base cover plate (9), a bellows (10), a guide sleeve (11), and a pull rod (12). The base (8) and the electrode disks of the static electrode group (6) are respectively fixedly connected to the two ends of the insulating shell (1). The moving electrode group (7) is located inside the insulating shell (1), and the electrode disks of the moving electrode group (7) are sealed to the base (8) through the bellows (10). The guide sleeve (11) is fixed to the base (8) and located inside the bellows (10). The pull rod (12) is slidably fitted inside the guide sleeve (11) and fixedly connected to the moving electrode group (7). A sealing ring (13) is provided between the pull rod (12) and the guide sleeve (11). The electrode disk of the moving electrode group (7) is provided with the water-cooled chamber (2), the water inlet and the water outlet. The water-cooled chamber (2) is connected to the cavity inside the corrugated pipe (10) through the water inlet and the water outlet. The base cover plate (9) is fixed to the base (8). The base cover plate (9) is fixedly connected with the second water inlet connector (14) and the second water outlet connector (15). The base (8) is provided with a plurality of first water passage holes (801). The second water inlet connector (14) and the second water outlet connector (15) are connected to the cavity inside the corrugated pipe (10) through the first water passage holes (801).

9. The water-cooled vacuum capacitor of claim 8, wherein: The inner diameter of the second water inlet connector (14) is larger than the inner diameter of the second water outlet connector (15).

10. The water-cooled vacuum capacitor of claim 7 or 8, wherein: The electrode plate of the static electrode group (6) is provided with the water-cooling chamber (2), the water inlet and the water outlet.

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