Boat structure and process furnace

Abstract

The present disclosure relates to the technical field of semiconductor and photovoltaic, and particularly relates to a boat structure and a process furnace, which solves the problems of poor heating uniformity and low temperature rise rate of a sheet in a process furnace in the prior art. The boat structure comprises a plurality of boat pages, a heating assembly is insulatively arranged on the plurality of boat pages, and each heating assembly corresponds to a bearing space. The heating assembly comprises a plurality of electrically connected heating pieces, and the plurality of heating pieces are insulatively arranged at positions corresponding to bearing areas of the plurality of boat pages respectively. The bearing area of each boat page is provided with an opening which is through or not through along a second direction. The heating piece is detachably connected to the side wall of the opening. In the case that the sheet is carried on the bearing area, the distance from the surface of the heating piece on the side of the sheet to the surface of the sheet is greater than or equal to 0. The boat structure and the process furnace provided by the present disclosure can improve the heating uniformity and the temperature rise rate of the sheet in the boat structure, and facilitate the loading and unloading of the heating piece in the boat structure.

Description

Technical Field

[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a boat structure and process furnace. Background Technology

[0002] In the semiconductor and photovoltaic technology fields, coating multiple sheets mounted in a boat structure using coating equipment is a crucial step in the production of semiconductors or photovoltaic cells. Existing coating equipment typically uses heating wires mounted on the sidewalls of the furnace chamber to provide the necessary temperature and heat for the process. However, the considerable distance between the heating wires and the sheets in the boat structure results in low heating efficiency, especially when the process involves alternating temperatures. The heating response becomes sluggish, and the actual heating temperature of the sheets at different locations within the boat structure deviates significantly from the design temperature. This leads to poor heating uniformity and low heating efficiency, ultimately affecting the coating effect on the sheet surfaces. Utility Model Content

[0003] In view of this, the present disclosure provides a boat structure and a process furnace to solve the problems of poor heating uniformity and low temperature rise rate of the sheet material in the process furnace of the reaction furnace in the related art.

[0004] In a first aspect, one embodiment of this disclosure provides a boat structure configured to support a sheet extending along a first direction, and multiple sheets spaced apart along a second direction to form a sheet group. The first and second directions are perpendicular. The boat structure includes: multiple boat blades spaced apart along the second direction, adjacent boat blades being insulated from each other, any two adjacent boat blades being configured to have opposite polarities, each boat blade having multiple support areas spaced apart along the first direction, the support areas being configured to support the sheet, the support areas of the multiple boat blades corresponding one-to-one, and the corresponding multiple support areas enclosing a support space, each support space corresponding to a sheet group. Multiple sets of interconnected or disconnected heating components are arranged along a first direction. The heating components are insulated on multiple boats, and each heating component corresponds to a bearing space. Each heating component includes multiple electrically connected heating elements, which are insulated on the positions of the bearing areas of the multiple boats and insulated from the sheet. The heating elements are configured to heat the sheet carried in the bearing area. Each boat has a bearing area with an opening that is either through or non-through along a second direction. The heating element is detachably connected to the sidewall of the opening. When the sheet is carried in the bearing area, the distance from the surface of the heating element facing the sheet to the surface of the sheet is greater than or equal to 0.

[0005] In some embodiments, the device further includes: a snap-fit ​​assembly disposed on at least one of the boat leaf and the heating element, the snap-fit ​​assembly being configured to snap the heating element onto the sidewall of an opening in the boat leaf, and the snap-fit ​​assembly being located within the opening, wherein the first direction is a first horizontal direction and the second direction is a second horizontal direction.

[0006] In some embodiments, the boat leaf further includes a mounting groove disposed on the sidewall of the opening, the mounting groove being disposed on the periphery of the opening, wherein the boat leaf is recessed inward to form the mounting groove; the snap-fit ​​assembly includes a mating snap-fit ​​protrusion and a snap-fit ​​hole, both the snap-fit ​​protrusion and the snap-fit ​​hole being disposed in the mounting groove, and the snap-fit ​​protrusion being disposed in the snap-fit ​​hole and connected to the hole wall of the snap-fit ​​hole, wherein the snap-fit ​​protrusion is used to snap the first surface of the heating element; the boat leaf includes a blocking portion, the blocking portion being used to block the second surface of the heating element, wherein the first surface and the second surface are disposed opposite to each other.

[0007] In some embodiments, there are four mounting slots, which are arranged sequentially around the opening and are interconnected.

[0008] In some embodiments, two mounting slots are disposed opposite each other along a first direction, and each mounting slot extends along a second direction; the side of the heating element is provided with a clearance notch, and the alignment and engagement of the snap-fit ​​protrusion and the clearance notch enable the heating element to enter the opening, and the heating element located in the opening can move so that the snap-fit ​​protrusion and the clearance notch are misaligned, and the snap-fit ​​protrusion abuts against the heating element to restrict the heating element from coming out of the opening.

[0009] In some embodiments, the boat leaf has a first surface and a second surface facing away from each other, and the bearing area is located on the first surface; when the bearing area has an opening that extends through in the second direction, the second surface has a snap-fit ​​protrusion, and the snap-fit ​​protrusion on the second surface is a blocking part; or a portion of the mounting groove is a blocking part; when the bearing area has an opening that does not extend through in the second direction, the opening is set as a groove on the first surface that does not extend through the boat leaf, and the bottom of the groove is a blocking part.

[0010] In some embodiments, the heating element includes: an insulating housing having a receiving space, the insulating housing being detachably connected to an opening in the leaf blade; and a heating element housed in the receiving space, the heating element being configured to heat the sheet of a corresponding bearing area.

[0011] In some embodiments, the device further includes: multiple sets of conductive connection components, each conductive connection component being conductively connected to multiple heating elements of the same heating component; multiple sets of first electrode components, each electrically connected to one of the multiple sets of heating components, each first electrode component being configured to be heated by the corresponding heating component; and a first power supply component, electrically connected to the multiple sets of first electrode components, the first power supply component being configured to provide heating power to the multiple sets of first electrode components respectively.

[0012] In some embodiments, multiple sets of heating components arranged along a first direction are disconnected, and the heating temperature of each set of heating components is adjusted independently. The boat structure further includes: multiple temperature detection elements, each corresponding to a multiple carrying space, the temperature detection elements being configured to detect the temperature of the corresponding carrying space and generate a detection signal; and a control element, which is electrically connected to the multiple temperature detection elements and the multiple sets of heating components, the control element being configured to receive the detection signal from the temperature detection elements and control the heating temperature of the corresponding heating component according to the detection signal.

[0013] Secondly, embodiments of this disclosure provide a process furnace, including: a furnace body having a furnace cavity; a support member disposed in the furnace cavity; and the boat structure described above, wherein the boat structure can be placed on the support member.

[0014] The boat structure and process furnace provided in this disclosure, by setting heating components corresponding to the sheet group on multiple boat pages, and making multiple heating elements electrically connected in the heating components correspond one-to-one with multiple sheets in the sheet group, enables multiple heating elements to be used to heat each sheet in the sheet group respectively. The heat from the heating elements can be quickly conducted to the corresponding sheet, which is beneficial to improve the temperature rise rate and heating uniformity of the sheets in the sheet group, thereby improving the coating effect on the surface of each sheet.

[0015] Furthermore, by detachably connecting the heating element to the side wall of the opening in the leaf blade, with the opening located in the load-bearing area, the heat from the heating element can be rapidly conducted to the corresponding sheet, further improving the sheet's temperature rise rate. Moreover, the externally detachable heating element facilitates replacement by staff, reducing maintenance difficulty and costs.

[0016] Furthermore, when the sheet is supported in the bearing area, the distance from the surface of the heating element facing the sheet to the surface of the sheet is greater than or equal to the distance from the heating element to the sheet surface, ensuring that the heating element does not protrude from the surface of the boat in the thickness direction (i.e., the second direction). During the process of inserting the sheet from the gap between adjacent boats and supporting it in the bearing area, there is no interference between the sheet and the heating element, preventing the sheet from being deformed or damaged due to collision. Attached Figure Description

[0017] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 The diagram shown is a simplified schematic of a process furnace provided in one embodiment of this disclosure.

[0019] Figure 2 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure.

[0020] Figure 3 for Figure 2 A magnified view of part A in the boat structure shown.

[0021] Figure 4 The diagram shown is a simplified schematic of a boat structure placed in a process furnace according to an embodiment of this disclosure.

[0022] Figure 5 The image shown is a front view of a boat structure provided in an embodiment of this disclosure.

[0023] Figure 6 The image shown is a side view of a boat structure provided in an embodiment of this disclosure.

[0024] Figure 7 The image shown is a top view of a boat structure provided in an embodiment of this disclosure.

[0025] Figure 8 for Figure 7 A magnified view of part B in the boat structure shown.

[0026] Figure 9 The image shown is a front view of a boat page in a boat structure provided in an embodiment of this disclosure.

[0027] Figure 10 for Figure 9 The MM section view of the boat structure shown.

[0028] Figure 11 for Figure 9 The MM section view is shown in another boat structure.

[0029] Figure 12 for Figure 9 The MM section view is shown in another boat structure.

[0030] Figure 13 The image shown is an exploded view of a boat page in a boat structure provided in an embodiment of this disclosure.

[0031] Figure 14 The image shown is a front view of a boat page in a boat structure provided in another embodiment of this disclosure.

[0032] Figure 15 for Figure 14 The NN cross-sectional view of the boat structure shown.

[0033] Figure 16 The image shown is an exploded view of a boat leaf in a boat structure provided in another embodiment of this disclosure.

[0034] Figure 17The diagram shown is a schematic diagram of the snap-fit ​​components in the boat structure provided in another embodiment of this disclosure.

[0035] Figure 18 The diagram shown is a schematic diagram of the heating element being snapped into place by the snap-fit ​​assembly in a boat structure provided in another embodiment of this disclosure.

[0036] Figure 19 The image shown is an exploded view of a heating element provided in an embodiment of this disclosure.

[0037] Figure label: 100. Process furnace; 10. Boat structure; 10a. Temperature detection element; 10b. Control element; 1. Boat flap; 1a. Bearing space; 1b. Bearing area; 1b1. Sub-area; 1A. Opening; 1c. First through hole; 1d. Second through hole; 1e. Third through hole; 11. Mounting groove; 12. First surface; 13. Second surface; 15. Locking point; 2. Heating assembly; 2N. Receiving space; 21. Heating element; 211. Sub-heating element; 21a. First surface; 21b. Second surface; 21c. Clearance notch; 212. Insulating shell; 212a. First insulating shell; 212b. Second insulating shell 213 Insulating shell; 213 Heating element; 213a Fourth through hole; 3 Second electrode assembly; 31 First electrode group; 32 Second electrode group; 4 Insulating connector; 5 Conductive connection assembly; 51 Conductive connector; 52 Insulating protective layer; 6 First electrode assembly; 7 Snap-fit ​​assembly; 71 Snap-fit ​​hole; 72 Snap-fit ​​protrusion; 73 Blocking part; 8 First power supply assembly; 9 Second power supply assembly; 20 Furnace body; 201 Furnace cavity; 30 Support member; 40 Sheet; 40a Sheet group; 40b Half sheet group; X, First direction; Y, Second direction; Z, Third direction. Detailed Implementation

[0038] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0039] Figure 1 The diagram shown is a simplified schematic of a process furnace provided in one embodiment of this disclosure. Figure 2 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure. Figure 3 for Figure 2 A magnified view of part A in the boat structure shown. Figure 4 The diagram shown is a simplified schematic of a boat structure placed in a process furnace according to an embodiment of this disclosure. Figure 5The image shown is a front view of a boat structure provided in an embodiment of this disclosure. Figure 6 The image shown is a side view of a boat structure provided in an embodiment of this disclosure. Figure 7 The image shown is a top view of a boat structure provided in an embodiment of this disclosure. Figure 8 for Figure 7 The diagram shows a partial enlarged view of part B in the boat structure. Arrow X points to a first direction (which can be a first horizontal direction), arrow Y points to a second direction (which can be a second horizontal direction), and arrow Z points to a vertical direction. The first direction X, the second direction Y, and the vertical direction Z intersect each other. In this embodiment, the first direction X, the second direction Y, and the vertical direction Z are perpendicular to each other. The first direction X is the length direction of the boat structure 10, which is also the extension direction of the process furnace 100. The second direction Y is the width direction of the boat structure 10, and the vertical direction Z is the height direction of the boat structure 10, which will not be emphasized separately thereafter.

[0040] This disclosure provides a boat structure, such as Figures 1 to 8 The boat structure 10 is used in the coating equipment. The boat structure 10 is configured to carry the sheet 40, and the coating equipment is configured to process the sheet 40 carried by the boat structure 10.

[0041] It is understandable that, such as Figure 1 The coating equipment can be a plasma-enhanced chemical vapor deposition (PECVD) device. The PECVD device includes a PECVD furnace, which comprises a furnace body 20 having at least one furnace opening. The furnace body 20 has a furnace cavity 201 communicating with the furnace opening. A support member 30 is provided inside the furnace cavity 201. A boat structure 10 carrying a sheet 40 can enter and exit the furnace cavity 201 from the furnace opening and is placed on the support member 30 while inside the furnace cavity 201. In the furnace cavity 201, the surface of the sheet 40 to be processed carried in the boat structure 10 can be coated with one or more thin films. The specific structure of the coating equipment is not described in detail.

[0042] Optionally, the sheet 40 can be a solar cell, also known as a silicon wafer. The solar cell has a surface to be processed on one side in the thickness direction. The sheet 40, supported in the boat structure 10, can be deposited onto the surface to be coated by the escaping plasma in the PECVD furnace to complete the coating. The shape of the sheet 40 can be, for example, rectangular, square, or circular, etc., without specific limitation.

[0043] Among them, such as Figures 2 to 8The boat structure 10 includes multiple boat blades 1, each boat blade 1 extending along a first direction X. The multiple boat blades 1 are spaced apart along a second direction Y, and adjacent boat blades 1 are insulated from each other. Any two adjacent boat blades 1 are configured to have opposite polarities. Each boat blade 1 has multiple load-bearing regions 1b spaced apart along the first direction X. The load-bearing regions 1b are configured to carry sheets 40, and the load-bearing regions 1b of the multiple boat blades 1 correspond one-to-one. When each load-bearing region 1b of the multiple boat blades 1 carries a sheet 40, the multiple sheets 40 carried by the multiple load-bearing regions 1b corresponding along the second direction Y can be referred to as a sheet group 40a (i.e., the multiple sheets 40 of the sheet group 40a are spaced apart along the second direction Y). The corresponding multiple load-bearing regions 1b enclose a load-bearing space 1a, and each load-bearing space 1a corresponds to a sheet group 40a.

[0044] It is understandable that, such as Figure 3 , Figure 6 and Figure 8 The surface of the boat leaf 1 on one side in the second direction Y is configured to support the sheet 40, and multiple sheets 40 are all disposed on the same side of the boat leaf 1 in the second direction Y. The sheet 40 is located in the gap between two adjacent boat leaves 1. The area occupied by the sheet 40 on the boat leaf 1 is called the support area 1b, and the space occupied by the support area 1b along the second direction Y is called the support space 1a. The position, size, and shape of each support area 1b on the boat leaf 1 can be adaptively adjusted according to the position, size, and shape of the supported sheet 40; each support space 1a can be adaptively adjusted according to the number of boat leaves 1 and the arrangement of the support areas 1b on the boat leaf 1, without specific limitations.

[0045] Optionally, multiple boat flaps 1 can be insulatedly connected by insulating connectors 4. Multiple insulating connectors 4 can be provided, and they are located outside the bearing space 1a. Sheets 40 can be inserted through the gaps between adjacent boat flaps 1 to be placed in the bearing area 1b. For example, the insulating connectors 4 can be insulating connecting rods with insulating properties, such as ceramic rods. Each of the multiple boat flaps 1 has a corresponding first through hole 1c extending along the second direction Y. The insulating connecting rods extend along the second direction Y and pass through the corresponding first through hole 1c to insulately connect the multiple boat flaps 1. The multiple insulating connecting rods are arranged around the bearing space 1a.

[0046] It is understandable that when the sheet 40 is supported in the support area 1b of the leaf 1, the sheet 40 and the leaf 1 are electrically connected, so that the sheet 40 and the corresponding leaf 1 have the same polarity.

[0047] For example, multiple leaflets 1 include first leaflets and second leaflets arranged alternately along the second direction Y. The first leaflets are configured as positive electrodes, and the second leaflets are configured as negative electrodes. In adjacent first and second leaflets, the bearing region 1b of the first leaflet is disposed on the surface of the first leaflet facing the second leaflet, and the bearing region 1b of the second leaflet is disposed on the surface of the second leaflet facing away from the first leaflet. Taking the sheet 40 being carried in the bearing region 1b of the first leaflet as an example, the surface of the sheet 40 to be processed is opposite to the second leaflet in the second direction Y. The sheet 40 and the first leaflet have the same polarity, i.e., the sheet 40 is the positive electrode. During the coating process, the positive electrode sheet 40 and the negative electrode second leaflet form an electric field at the gap. The gas in the gap is ionized into dissipated plasma to form a film on the surface of the sheet 40 to be processed. This will not be described in detail.

[0048] Specifically, the boat structure 10 also includes multiple sets of connected or disconnected heating components 2, which are arranged along the first direction X. The heating components 2 are insulated from the multiple boat leaves 1, and each heating component 2 corresponds to a bearing space 1a. The heating component 2 includes multiple electrically connected heating elements 21, which are insulated from the multiple boat leaves 1 at positions corresponding to the bearing areas 1b. The heating elements 21 are insulated from the sheet 40 and are configured to heat the sheet 40 carried in the bearing areas 1b. Each boat leaf 1 has a bearing area 1b with an opening 1A that is either through or non-through along the second direction Y. The heating element 21 is detachably connected to the side wall of the opening 1A. When the sheet 40 is supported in the bearing area 1b, the distance from the surface of the heating element 21 facing the sheet 40 to the surface of the sheet 40 is greater than or equal to 0. The sheet 40 can abut against the mounting groove 11 of the boat leaf 1, and the distance between the bottom wall of the mounting groove 11 and the heating element 21 is greater than 0, or the sheet 40 can abut against the surface of the heating element 21.

[0049] The boat structure provided in this embodiment of the present disclosure provides heating components 2 corresponding to sheet group 40a on multiple boat pages 1, and makes multiple heating elements 21 electrically connected in the heating components 2 correspond one-to-one with multiple sheets 40 in sheet group 40a. This allows the multiple heating elements 21 to be used to heat each sheet 40 in sheet group 40a respectively. The heat from the heating elements 21 can be quickly conducted to the corresponding sheet 40, which is beneficial to improve the temperature rise rate and heating uniformity of the sheets 40 in sheet group 40a, thereby improving the coating effect on the surface of each sheet 40.

[0050] Furthermore, by detachably connecting the heating element 21 to the side wall of the opening 1A of the leaf 1, with the opening 1A located in the bearing area 1b, the heat from the heating element 21 can be quickly conducted to the corresponding sheet 40, further improving the temperature rise rate of the sheet 40. Moreover, the externally detachable heating element 21 facilitates replacement by personnel, reducing maintenance and replacement difficulty and costs.

[0051] Furthermore, when the sheet 40 is supported in the support area 1b, the distance from the surface of the heating element 21 facing the sheet 40 to the surface of the sheet 40 is greater than or equal to 0, ensuring that the heating element 21 does not protrude from the surface of the boat 1 in the thickness direction (i.e., the second direction Y) of the boat 1. During the process of inserting the sheet 40 from the gap between adjacent boats 1 and supporting it in the support area 1b, the sheet 40 does not interfere with the heating element 21, thus preventing the sheet 40 from being deformed or damaged due to collision.

[0052] Optionally, when the boat structure 10 is placed inside the furnace cavity 201, the two ends of the boat structure 10 along the extension direction of the furnace cavity 201 are respectively referred to as the bow and stern in the first direction X. The furnace cavity 201 has poor heat preservation performance at the two ends in the extension direction, meaning that heat is easily lost. Since the bow and stern of the boat structure 10 are close to the two ends of the furnace cavity 201, the actual temperature around the sheet group 40a near the bow and stern will be lower than the process temperature during the coating process. In order to keep the actual temperature around each sheet group 40a at the process temperature, the multiple sets of heating components 2 arranged along the first direction X can be disconnected from each other, so that the heating temperature of each heating component 2 can be individually controlled. This controls the heating temperature of the heating component 2 near the bow and stern to be higher than the heating temperature of the heating component 2 at other locations, ultimately keeping the temperature at each location in the boat structure 10 at the process temperature. This is beneficial to improving the heating uniformity and stability of the sheet 40, thereby improving the coating effect.

[0053] It is understandable that the heating temperatures of each heating component 2 that are individually controlled can be the same or different, and can be adjusted adaptively according to the actual situation without specific limitations.

[0054] In some alternative embodiments, such as Figure 4The boat structure 10 also includes multiple temperature detection elements 10a and a control element 10b. Each temperature detection element 10a corresponds to one of multiple support spaces 1a. The temperature detection element 10a is configured to detect the temperature of the corresponding support space 1a and generate a detection signal. The control element 10b is electrically connected to the multiple temperature detection elements 10a and multiple sets of heating components 2. The control element 10b is configured to receive the detection signals from the temperature detection elements 10a and control the heating temperature of the corresponding heating components 2 according to the detection signals. This allows the heating temperature of each heating component 2 to be individually controllable. For example, if the temperature detection element 10a detects that the temperature of the support space 1a near the bow and stern is lower than the temperature of the support space 1a in the middle position, the control element 10b can control the increase of the heating temperature of the heating components 2 near the bow and stern sides to maintain the heating temperature of each support space 1a in the boat structure 10 at the same process temperature, thereby ensuring the consistency of the sheet 40 temperature at different locations.

[0055] Optionally, the boat structure 10 further includes multiple sets of conductive connection components 5, multiple sets of first electrode components 6, and a first power supply component 8. Each conductive connection component 5 is conductively connected to multiple heating elements 21 of the same heating component 2. The multiple sets of first electrode components 6 are electrically connected to the multiple sets of heating components 2 in a one-to-one correspondence. Each first electrode component 6 is configured to be heated by the corresponding heating component 2. The first power supply component 8 is electrically connected to the multiple sets of first electrode components 6 and is configured to provide heating power to the multiple sets of first electrode components 6 respectively. The first electrode components 6 and the first power supply component 8 enable each heating component 2 to heat the corresponding sheet group 40a. The heating power supply of the first power supply component 8 can be a DC power supply or an AC power supply. In some optional embodiments, the outer surface of the first electrode component 6 can be covered with an insulating protective layer 52.

[0056] Optionally, the conductive connection assembly 5 includes a plurality of conductive connectors 51, each conductive connector 51 being electrically connected to a heating element 21. The conductive connectors 51 are located between two adjacent leaf blades 1, and the plurality of conductive connectors 51 electrically connected in the same heating assembly 2 are connected in series to electrically connect the plurality of heating elements 21. It is understood that the outer surface of each conductive connector 51 is covered with an insulating protective layer 52.

[0057] In some embodiments, such as Figure 3 and Figure 4 The boat structure 10 also includes a second electrode assembly 3 and a second power supply assembly 9. The second electrode assembly 3 is electrically connected to a plurality of boat leaves 1 and is configured such that any two adjacent boat leaves 1 have opposite polarities. The second power supply assembly 9 is electrically connected to the second electrode assembly 3 and is configured to provide radio frequency power to the second electrode assembly 3.

[0058] Optionally, the second electrode assembly 3 may specifically include a first electrode group 31 and a second electrode group 32. The first electrode group 31 includes a plurality of first conductive connection blocks and a first electrode, and the second electrode group 32 includes a plurality of second conductive connection blocks and a second electrode. One of the first electrode and the second electrode is a positive electrode, and the other is a negative electrode. Along the second direction Y, the plurality of first conductive connection blocks are connected and conductively connected to each leaf 1 located at an even number of positions, and the plurality of second conductive connection blocks are connected and conductively connected to each leaf 1 located at an odd number of positions. The first electrode and the second electrode are electrically connected to the positive and negative terminals of the radio frequency power supply, respectively, so that each pair of adjacent leaf 1 has opposite polarities.

[0059] Optionally, the control unit 10b can be electrically connected to the first power supply assembly 8, the second power supply assembly 9, the first electrode assembly 6, and the second electrode assembly 3.

[0060] Figure 9 The image shown is a front view of a boat page in a boat structure provided in an embodiment of this disclosure. Figure 10 for Figure 9 The MM section view of the boat structure shown. Figure 11 for Figure 9 The MM section view is shown in another boat structure. Figure 12 for Figure 9 The MM section view is shown in another boat structure. Figure 13 The image shown is an exploded view of a boat page in a boat structure provided in an embodiment of this disclosure. Figure 14 The image shown is a front view of a boat page in a boat structure provided in another embodiment of this disclosure. Figure 15 for Figure 14 The NN cross-sectional view of the boat structure shown. Figure 16 The image shown is an exploded view of a boat leaf in a boat structure provided in another embodiment of this disclosure. Figure 17 The diagram shown is a schematic diagram of the snap-fit ​​components in the boat structure provided in another embodiment of this disclosure. Figure 18 The diagram shown is a schematic diagram of the heating element being snapped into place by the snap-fit ​​assembly in a boat structure provided in another embodiment of this disclosure.

[0061] Optionally, sheet 40 can be a whole solar cell or a cut half of a solar cell. For example... Figure 8 The sheet 40 includes two half-sheets after being cut. The same sheet group 40a includes two groups of half-sheet groups 40b arranged at intervals along the first direction X. Each half-sheet group 40b includes multiple half-sheets arranged at intervals along the second direction Y. At this time, the bearing area 1b of the boat 1 is further divided into two sub-areas 1b1 arranged at intervals along the first direction X. Each sub-area 1b1 is configured to bear one half-sheet. Similarly, the bearing space 1a is divided into two sub-bearing spaces 1a to correspond to the two groups of half-sheet groups 40b respectively.

[0062] like Figures 9 to 18 The boat structure 10 also includes a snap-fit ​​assembly 7, which is disposed in at least one of the boat leaf 1 and the heating element 21. The snap-fit ​​assembly 7 is configured to snap the heating element 21 into the side wall of the opening 1A of the boat leaf 1, and the snap-fit ​​assembly 7 is located within the opening 1A. With the snap-fit ​​assembly 7 and the heating element 21 disposed within the opening 1A, the heating element 21 can be used to heat the sheet 40, and during the process of inserting the sheet 40 from the gap between adjacent boat leaves 1 and being carried by the bearing area 1b, the snap-fit ​​assembly 7 and the heating element 21 will not interfere with the sheet 40.

[0063] It is understood that in this embodiment of the application, the snap-fit ​​component 7 is only provided on the boat page 1, but is not limited thereto.

[0064] Optionally, if the bearing area 1b is further divided into two sub-areas 1b1, each sub-area 1b1 is provided with an opening 1A, the heating element 21 includes two electrically connected sub-heating elements 211, and the snap-fit ​​assembly 7 snaps the sub-heating elements 211 onto the side wall of the opening 1A of the sub-area 1b1.

[0065] Optionally, along the second direction Y, the boat leaf 1 has a first surface 12 and a second surface 13 facing away from each other. The bearing area 1b is located on the first surface 12. An opening 1A is provided on the first surface 12 and extends from the first surface 12 along the second direction Y toward the second surface 13 to completely penetrate the boat leaf 1 to form a through hole or partially penetrate the boat leaf 1 to form a groove.

[0066] It is understandable that the shape and size of the opening 1A set in the bearing area 1b (or sub-area 1b1) can be adaptively adjusted according to actual needs. For example, the area of ​​the opening 1A can be smaller than the area of ​​the bearing area 1b (or sub-area 1b1), or the area of ​​the opening 1A can be the same as the area of ​​the bearing area 1b (or sub-area 1b1), that is, the opening 1A coincides with the bearing area 1b (or sub-area 1b1), so as to further improve the heating efficiency of the sheet 40.

[0067] In some embodiments, such as Figures 9 to 15 The boat leaf 1 also includes a mounting groove 11 disposed on the side wall of the opening 1A. The mounting groove 11 is disposed on the periphery of the opening 1A, wherein the boat leaf 1 is recessed inward to form the mounting groove 11. The snap-fit ​​assembly 7 includes a engaging snap-fit ​​protrusion 72 and a snap-fit ​​hole 71. Both the snap-fit ​​protrusion 72 and the snap-fit ​​hole 71 are disposed in the mounting groove 11, and the snap-fit ​​protrusion 72 is disposed in the snap-fit ​​hole 71 and connected to the hole wall of the snap-fit ​​hole 71. The snap-fit ​​protrusion 72 is used to snap the first surface 21a of the heating element 21. The boat leaf includes a blocking part 73, which is used to block the second surface 21b of the heating element 21. The first surface 21a and the second surface 21b are disposed opposite to each other.

[0068] In some alternative embodiments, such as Figures 8 to 13 There are four mounting slots 11, which are arranged around the opening in sequence and are interconnected.

[0069] like Figure 10 When the bearing area 1b is provided with an opening 1A that runs through the second direction Y, the size of the heating element 21 is slightly larger than the space enclosed by the four mounting slots 11. Multiple snap-fit ​​protrusions 72 are provided on the first surface 12. The snap-fit ​​protrusions 72 cooperate with the snap-fit ​​holes 71. Part of the snap-fit ​​protrusions 72 contacts the first surface 21a of the heating element 21 and is used to snap the first surface 21a of the heating element 21. Part of the mounting slot 11 acts as a blocking part 73 and abuts against the second surface 21b of the heating element 21.

[0070] like Figure 11 When the bearing area 1b has an opening 1A extending along the second direction Y, the size of the heating element 21 is slightly smaller than the space enclosed by the four mounting slots 11. A portion of the plurality of snap-fit ​​protrusions 72 are disposed on the first surface 12, and another portion is disposed on the second surface 13. Among the plurality of snap-fit ​​protrusions 72 disposed on the first surface 12, the snap-fit ​​protrusion 72 engages with the snap-fit ​​hole 71, and the portion of the snap-fit ​​protrusion 72 contacts the first surface 21a of the heating element 21 for snapping onto the first surface 21a of the heating element 21. Among the plurality of snap-fit ​​protrusions 72 disposed on the second surface 13, the snap-fit ​​protrusion 72 engages with the snap-fit ​​hole 71, and the snap-fit ​​protrusion 72 contacts the second surface 21b of the heating element 21 for acting as a blocking part 73 abutting against the second surface 21b of the heating element 21.

[0071] like Figure 12 When the bearing area 1b is provided with a non-through opening 1A along the second direction Y, the opening 1A is set as a groove that does not penetrate the first surface 12. The size of the heating element 21 is smaller than the space enclosed by the groove. Multiple snap-fit ​​protrusions 72 are provided on the first surface 12. The snap-fit ​​protrusions 72 cooperate with the snap-fit ​​holes 71. Part of the snap-fit ​​protrusions 72 contacts the first surface 21a of the heating element 21 and is used to snap the first surface 21a of the heating element 21. The bottom wall of the groove serves as a blocking part 73 and abuts against the second surface 21b of the heating element 21.

[0072] Optionally, the mounting groove 11 may be provided only on the first surface 12, or it may be provided on both the first surface 12 and the second surface 13. It can be adapted to meet actual needs without being specifically limited.

[0073] Optionally, when the heating element 21 is snapped onto the boat 1, the first surface 21a of the heating element 21 faces the first surface 12 of the boat 1, and the second surface 21b of the heating element 21 faces the second surface 13 of the boat 1. Further, the distance from the first surface 21a to the first surface 12 and the distance from the second surface 21b to the second surface 13 can be set to be equal.

[0074] In other alternative embodiments, such as Figures 14 to 18 There are two mounting slots 11, which are arranged opposite each other along the first direction X, and each mounting slot 11 extends along the second direction Y. The heating element 21 has a clearance notch 21c on its side. The alignment and cooperation between the snap-fit ​​protrusion 72 and the clearance notch 21c allows the heating element 21 to enter the opening 1A. The heating element 21 located in the opening 1A can move so that the snap-fit ​​protrusion 72 and the clearance notch 21c are misaligned. The snap-fit ​​protrusion 72 abuts against the heating element 21 to restrict the heating element 21 from coming out of the opening 1A.

[0075] like Figure 15 When the bearing area 1b is provided with a non-through opening 1A along the second direction Y, the opening 1A is set as a groove that does not penetrate the first surface 12 of the leaf 1. The size of the heating element 21 is smaller than the space enclosed by the groove, and the heating element 21 can be accommodated in the groove. The bottom of the groove is a blocking part 73, and the snap-fit ​​protrusion 72 is connected to the snap-fit ​​hole 71.

[0076] like Figures 16 to 18 With the clearance notch 21c of the heating element 21 aligned with the snap-fit ​​protrusion 72 on the mounting groove 11, the heating element 21 can be smoothly placed into or removed from the opening 1A (groove). When the heating element 21 is placed in the groove, it can be moved vertically in the Z direction, causing the snap-fit ​​protrusion 72 to misalign with the clearance notch 21c, and the snap-fit ​​protrusion 72 to contact the first surface 21a of the heating element 21, thus engaging the first surface 21a of the heating element 21. By providing the clearance notch 21c, the replacement of the heating element 21 can be further facilitated, effectively preventing damage to the heating element 21 and the snap-fit ​​protrusion 72.

[0077] In some alternative embodiments, the first surface 12 and / or the second surface 13 are provided with a plurality of locking points 15, which are arranged around the periphery of the opening 1A. The locking points 15 are configured to engage the sheet 40 with the bearing area 1b (or sub-area 1b1). For example, the locking points 15 can be configured as protruding structures of the boat 1, i.e., locking portions, in which the sheet 40 can be confined within the gap formed between the locking portion and the boat 1, and the sheet 40 can be in contact with the corresponding boat 1 so that the sheet 40 has the same polarity, while preventing the sheet 40 from falling off. The locking portion can be configured as a conductive element or an insulating element. The locking portion can be integrally formed with the boat 1, or a second through hole 1d can be provided on the boat 1, and the locking portion can be detachably connected to the boat 1 by means of threaded connection, locking, etc., without specific limitation.

[0078] Figure 19 The image shown is an exploded view of a heating element provided in an embodiment of this disclosure.

[0079] In some alternative embodiments, such as Figure 19 The heating element 21 includes an insulating housing 212 and a heating element 213. The insulating housing 212 has a receiving space 2N, and the heating element 213 is housed in the receiving space 2N to avoid mutual interference between the heating circuit and the radio frequency circuit.

[0080] Optionally, the insulating housing 212 may include a first insulating housing 212a and a second insulating housing 212b that are detachably connected. The first insulating housing 212a and the second insulating housing 212b enclose a receiving space 2N. The first insulating housing 212a and the second insulating housing 212b are provided with a fourth through hole 213a that communicates with the receiving space 2N. A portion of the conductive connector 51 can pass through the fourth through hole 213a and be electrically connected to the heating element 213 in the receiving space 2N. The accommodating space 2N can be one of the following: the middle area of ​​each of the opposite sides of the first insulating shell 212a and the second insulating shell 212b has an accommodating groove, the edge areas of the opposite sides of the first insulating shell 212a and the second insulating shell 212b are connected, and the two accommodating grooves together form the accommodating space 2N; or, the middle area of ​​one of the opposite sides of the first insulating shell 212a and the second insulating shell 212b has an accommodating groove, and the other opposite side and the accommodating groove together form the accommodating space 2N; or, the heating element 213 is sandwiched between the opposite sides of the first insulating shell 212a and the second insulating shell 212b, and the area between the opposite sides of the first insulating shell 212a and the second insulating shell 212b is the accommodating space 2N.

[0081] It is understandable that, such as Figure 9 , Figure 13 and Figure 16The specific position of the third through hole 1e on the hull 1 can be adjusted according to actual needs. For example, when the sheet 40 is a whole solar cell, the third through hole 1e should be set outside the bearing area 1b. Or, when the sheet 40 is two half sheets, the third through hole 1e should be set outside the sub-area 1b1. Specifically, it can be set at the position between the two sub-areas 1b1 corresponding to the same bearing area 1b, so as to avoid interference with the sheet 40 when multiple conductive connectors 51 in the conductive connection assembly 5 are connected in series.

[0082] Optionally, the outer surface of each conductive connector 51 in the conductive connection assembly 5 is covered with an insulating protective layer 52 to prevent impurities from adhering to the surface of the conductive connector 51 and affecting the heating performance.

[0083] Optionally, the heating element 213 may be made of graphite. It is understood that the material of the heating element 213 may be the same as or different from the material of the leaf 1. The shape of the heating element 213 may be a serpentine arrangement of heating strips located on the plane formed by the vertical direction Z and the first direction X. The plane containing the heating strips is parallel to the surface of the sheet 40 to be processed. The beginning and end of the heating strips are electrically connected to the positive and negative electrodes of the first electrode assembly 6 via conductive connectors 5, respectively, so that the heating strips can generate heat. Further details are not provided.

[0084] This disclosure also provides a process furnace, such as... Figure 1 and Figure 2 The process furnace 100 includes a furnace body 20, a support member 30, and a boat structure 10. The furnace body 20 has a furnace cavity 201, the support member 30 is disposed in the furnace cavity 201, and the boat structure 10 can be placed on the support member 30.

[0085] It is understood that the boat structure 10 can be referred to the relevant descriptions of the above embodiments, and will not be repeated here.

[0086] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, or other methods.

[0087] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0088] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0089] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0090] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0091] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. A boat structure, characterized in that, Configured to support a sheet extending along a first direction, and multiple sheets spaced apart along a second direction to form a sheet group, wherein the first direction and the second direction are perpendicular, the boat structure includes: Multiple planks are arranged at intervals along the second direction, with adjacent planks insulated from each other. Any two adjacent planks are configured to have opposite polarities. Each plank has multiple load-bearing areas arranged at intervals along the first direction. The load-bearing areas are configured to carry the sheet. The load-bearing areas of the multiple planks correspond one-to-one, and the corresponding multiple load-bearing areas enclose a load-bearing space. Each load-bearing space corresponds to a sheet group. Multiple sets of connected or disconnected heating components are arranged along the first direction. The heating components are insulated from the multiple boats, and each heating component corresponds to a carrying space. Each heating component includes multiple electrically connected heating elements. The multiple heating elements are insulated from the multiple boats at positions corresponding to the carrying area, and the heating elements are insulated from the sheet. The heating elements are configured to heat the sheet carried in the carrying area. Each of the boat-shaped sheets has a bearing area with an opening that is either through or non-through along the second direction. The heating element is detachably connected to the sidewall of the opening. When the sheet is supported in the bearing area, the distance from the surface of the heating element facing the sheet to the surface of the sheet is greater than or equal to 0.

2. The boat structure according to claim 1, characterized in that, Also includes: A snap-fit ​​assembly is disposed on at least one of the boat leaf and the heating element, the snap-fit ​​assembly being configured to snap the heating element onto the sidewall of the opening of the boat leaf, and the snap-fit ​​assembly being located within the opening, wherein the first direction is a first horizontal direction and the second direction is a second horizontal direction.

3. The boat structure according to claim 2, characterized in that, The boat leaf also includes a mounting groove disposed on the side wall of the opening, the mounting groove being disposed on the periphery of the opening, wherein the boat leaf is recessed inward to form the mounting groove; The snap-fit ​​assembly includes a snap-fit ​​protrusion and a snap-fit ​​hole, both of which are disposed in the mounting groove. The snap-fit ​​protrusion is disposed in the snap-fit ​​hole and connected to the hole wall of the snap-fit ​​hole. The snap-fit ​​protrusion is used to snap the first surface of the heating element. The boat leaf includes a blocking portion for blocking the second surface of the heating element, wherein the first surface and the second surface are disposed opposite to each other.

4. The boat structure according to claim 3, characterized in that, There are four mounting slots, which are arranged sequentially around the opening and are interconnected.

5. The boat structure according to claim 3, characterized in that, The two mounting slots are disposed opposite each other along the first direction, and each mounting slot extends along the second direction; The heating element has a clearance notch on its side. The engagement of the snap-fit ​​protrusion with the clearance notch allows the heating element to enter the opening. The heating element located in the opening can move so that the snap-fit ​​protrusion and the clearance notch are misaligned. The snap-fit ​​protrusion abuts against the heating element to prevent the heating element from coming out of the opening.

6. The boat structure according to any one of claims 3 or 4, characterized in that, The boat leaf has a first surface and a second surface facing away from each other, and the bearing area is located on the first surface; When the bearing area has the opening extending along the second direction, the second surface has the snap-fit ​​protrusion, and the snap-fit ​​protrusion on the second surface is the blocking part; or a portion of the mounting groove is the blocking part; When the bearing area is provided with an opening that is not through along the second direction, the opening is configured as a groove that is not through the leaf blade on the first surface, and the bottom of the groove is the blocking part.

7. The boat structure according to any one of claims 1-5, characterized in that, The heating element includes: An insulating housing having a receiving space, the insulating housing being detachably connected to the opening of the boat leaf; A heating element is housed in the receiving space and is configured to heat the sheet in the corresponding bearing area.

8. The boat structure according to any one of claims 1-5, characterized in that, Also includes: Multiple sets of conductive connection components, each of which is conductively connected to multiple heating elements of the same heating component; Multiple sets of first electrode assemblies are electrically connected to multiple sets of heating assemblies one-to-one, and each first electrode assembly is configured to be heated by the corresponding heating assembly. A first power supply assembly is electrically connected to a plurality of the first electrode assemblies, the first power supply assembly being configured to provide heating power to the plurality of the first electrode assemblies respectively.

9. The boat structure according to any one of claims 1-5, characterized in that, The multiple sets of heating components arranged along the first direction are disconnected, and the heating temperature of each set of heating components can be adjusted independently. The boat structure also includes: Multiple temperature sensors are configured to detect the temperature of the corresponding carrying space and generate a detection signal. The control unit is electrically connected to multiple temperature sensors and multiple sets of heating components, and is configured to receive detection signals from the temperature sensors and control the heating temperature of the corresponding heating components according to the detection signals.

10. A process furnace, characterized in that, include: The furnace body has a furnace cavity; Support members are provided in the furnace cavity; The boat structure according to any one of claims 1-9, wherein the boat structure can be placed on the support member.

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