Cathode assembly of vacuum magnetron sputtering coating device
CN309225606SActive Publication Date: 2025-04-08CHONGQING OUYITENG INTELLIGENT EQUIP CO LTD
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Patent Information
- Application Number
- CN202430429997.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-10
- Publication Date
- 2025-04-08
- Estimated Expiration
- 2039-07-10
Smart Images
Figure 000007_ABST
Abstract
1. The name of the product of this design: cathode assembly of vacuum magnetron sputtering coating device. 2. Purpose of the product of this design: It is installed in the vacuum chamber of the vacuum magnetron sputtering coating device and used as a magnetron cathode. 3. The design key point of this appearance design product lies in the shape of the product. 4. The picture or photo that best illustrates the design points: three-dimensional picture.
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