Heteroleptic triazenide metal complexes

Abstract

The invention relates to metal complexes according to the formula [M(L C )(L T )(L Z )]. Where: M = scandium, yttrium, lanthanide or titanium; Lc = unsubstituted, singly alkyl-substituted or multiply alkyl-substituted cyclopentadienide anion; L T = Triazenide anion (R 1 -N3-R 2 ) - , where R 1 and R 2 independently of each other, Lz is a linear alkyl group with 1 to 10 carbon atoms or a branched alkyl group with 3 to 10 carbon atoms; Lz is a) selected independently of Lc from the group specified for Lc, or b) selected independently of L T selected from the list for L TThe invention relates to the use of at least one such metal complex for producing a layer, consisting of or containing at least one metal M, on the surface of a substrate, and for producing an electronic component. Furthermore, the invention relates to a substrate which has a layer on its surface consisting of or containing at least one metal M, and which is produced using such a metal complex.

Description

[0001] Homoleptic and heteroleptic metal complexes which have at least one nitrogen-containing ligand, processes for their preparation and their use as precursors in chemical vapor deposition processes are known in the art.

[0002] In the field of electrical engineering, particularly in the field of semiconductor technology, the production of high-purity layers, which, for example, comprise or consist of a lanthanide(III) oxide, a lanthanide(III)-containing mixed oxide, or a lanthanide(Ln)-containing III-V compound semiconductor, is increasingly becoming the focus of interest. The deposition of such metal layers or metal-containing layers on substrate surfaces can be achieved, for example, using metal-organic chemical vapor deposition (MOCVD), atomic layer deposition (ALD), or metal-organic chemical vapor phase epitaxy (MOVPE).

[0003] At this point and in the following, we will refrain from specifying the exact stoichiometry of a metal layer, metal film, metal-containing layer, or metal-containing film. The terms layer and film are used synonymously, although neither of these terms includes any specification regarding the layer thickness or film thickness.

[0004] In US 2014 / 0335702 A1, lanthanide-containing precursors according to the general formula Ln(R 1 Cp) m (R 2 -NC(R 4 )=NR 2 ) n discloses a method for depositing a lanthanide-containing film on a semiconductor substrate using such a precursor. Where: Ln = Sc, Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu; R 1 and R 2 are independently selected from the group consisting of H and C1-C5 alkyl chains; R 4= H or Me; m and n are in the range from 1 to 2. And each precursor has a melting point below about 105 °C. Examples are shown exclusively for m = 2 and n = 1, i.e. only for Ln(III) complexes, each of which contains two monosubstituted cyclopentadienyl ligands, where R 1 = Me, Et or iPr, and an amidinate ligand. The given synthesis procedures mainly concern precursors, each of which has an N,N'-dialkyl-substituted acetamidinate ligand, where R 1 = R 2 = iPr or tBu and R 4 = Me. Further procedures are for the preparation of complexes each containing an N,N'-dialkyl-substituted formamidinate ligand, where R 1 = R 2 = iPr and R 4 = H is formulated.

[0005] A disadvantage of these Ln(III) complexes, which have one or two amidinate ligands, in particular at least one acetamidinate ligand, is the NC(R 4 )=N of the ligand. This is especially true with regard to the use of these heteroleptic Ln(III) complexes as precursors in chemical vapor deposition processes. There is a significant probability that the resulting Ln layer or Ln-containing layer is contaminated by carbon and thus unsuitable for the intended application, especially in the semiconductor sector.

[0006] WO 2019 / 115646 A1 relates to metal complexes containing at least one ligand L of the formula R 1 -N3-R 2 where R 1 and R 2Hydrocarbon residues, as well as their use for the deposition of the metal or a metal compound from the gas phase. Two examples are shown for the group of lanthanides: [La(tBu-N3-tBu)3] (see page 37, Example 10) and [Ce(tBu-N3-tBu)3] (see page 52, Example 28). These homoleptic lanthanide(III) complexes each have a relatively high molecular weight of more than 600 g / mol (approximately 608 g / mol).

[0007] While the homoleptic cerium(III) complex was prepared by reacting CeCl3 with Li(tBu-N3-tBu), the homoleptic lanthanum(III) complex was prepared starting from [La(hmds)3] (hmds = hexamethyldisilazide) and tBu-HN3-tBu. According to thermogravimetric analysis, the product still contained residual traces of hexamethyldisilazide; a melting process began at a temperature of 103 °C (see page 38).

[0008] The melting temperature of approximately 100 °C and, in particular, the relatively high molecular weight of more than 600 g / mol suggest that this lanthanum(III) triazenide complex possesses a relatively low vapor pressure. A material possessing the aforementioned properties and the typically associated low volatility is rather disadvantageous for use as a precursor in a chemical vapor deposition process (see also WO 2019 / 115646 A1, claim 21). There are many reasons for this: Firstly, the use of a low-volatility material generally requires process conditions that result in a quality of the produced metal layer or metal-containing layer that is inadequate for many end applications. In particular, high temperatures are necessary, which disadvantageously require a complex and thus cost-intensive heating system.The additional equipment required and the increased energy consumption have a negative impact on the economic and ecological balance of the process. In the case of thermal decomposition of a homoleptic precursor, such as [La(tBu-N3-tBu)3], this can also lead to increased incorporation of parasitic impurities into the semiconductor layer, for example, in the form of carbon, which further degrades the layer quality.

[0009] In view of all the above, the previously known precursor materials for chemical vapor deposition processes are to be classified as unsatisfactory from an ecological and (atomic) economic point of view.

[0010] The invention is therefore based on the object of overcoming these and other disadvantages of the prior art and of providing metal complexes containing a metal relevant to the electrical industry, in particular the semiconductor industry, namely scandium, yttrium, a lanthanide, or titanium, and meeting the requirements placed on precursor materials for chemical vapor deposition processes. In particular, the metal complexes should be characterized by high purity and a relatively high vapor pressure and be suitable as precursors for the production of high-quality metal layers or metal-containing layers. Furthermore, the metal complexes should be simple, efficient, reproducible, and as cost-effective as possible, with high purity and in good yields, even on an industrial scale.Furthermore, the invention relates to a method for producing a layer which consists of at least one metal or contains at least one metal, where the metal is scandium, yttrium, a lanthanide or titanium, on a surface of a substrate using at least one of the metal complexes presented here. The invention also relates to a substrate which has at least one layer on a surface which consists of at least one metal or contains at least one metal, where the metal is as defined above and where the respective layer is produced using at least one of the metal complexes presented here. In addition, a method for producing an electronic component using at least one of the metal complexes presented here is to be provided.

[0011] The task is solved by a metal complex according to the general formula [M(LC)(LT)(LZ)] where i. M is a metal central atom selected from the group consisting of scandium (Sc), yttrium (Y), lanthanides and titanium (Ti), ii. Lc is a monoanionic pi-donor ligand selected from the group consisting of - unsubstituted cyclopentadienide anion (C5H5 - ), - simply alkyl-substituted cyclopentadienide anions according to the general formula R A CP - , where R A is selected from the group consisting of linear alkyl groups having 1 to 10 carbon atoms and branched alkyl groups having 3 to 10 carbon atoms, and - multiply alkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C , R D , R E and R Fare independently selected from the group consisting of hydrogen (H), linear alkyl groups having 1 to 10 carbon atoms and branched alkyl groups having 3 to 10 carbon atoms, with the proviso that at least two of the radicals R B , R C, R D , R E and R F are not equal to hydrogen (H); iii. L T a triazenide anion according to the general formula (R 1 -N3-R 2 ) - where the radicals R 1 and R 2 are independently selected from the group consisting of linear alkyl groups having 1 to 10 carbon atoms and branched alkyl groups having 3 to 10 carbon atoms; and iv. Lz a a) monoanionic pi-donor ligand which, independently of the monoanionic pi-donor ligand Lc, is selected from the group consisting of - unsubstituted cyclopentadienide anion (C5H5- ), - simply alkyl-substituted cyclopentadienide anions according to the general formula R A CP - , where R A is selected from the group consisting of linear alkyl groups having 1 to 10 carbon atoms and branched alkyl groups having 3 to 10 carbon atoms, and - multiply alkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C , R D , R E and R F are independently selected from the group consisting of hydrogen (H), linear alkyl groups having 1 to 10 carbon atoms and branched alkyl groups having 3 to 10 carbon atoms, with the proviso that at least two of the radicals R B , R C , R D , R E and R F are not equal to hydrogen (H); or b) Triazenide anion according to the general formula (R 1 -N3-R 2 ) - where the radicals R 1 and R 2 independently of each other and independently of the triazenide anion L T are selected from the group consisting of linear alkyl groups having 1 to 10 carbon atoms and branched alkyl groups having 3 to 10 carbon atoms.

[0012] The general formula [M(L C )(L T )(L Z )] (I) both mononuclear and polynuclear metal complexes.

[0013] In the context of the present invention, the term "lanthanides" refers to the group consisting of lanthanum and the 14 elements with atomic numbers 58 to 71 following lanthanum: cerium (Ce), praseodymium (Pr), neodymium (Nd), promethium (Pm), samarium (Sm), europium (Eu), gadolinium (Gd), terbium (Tb), dysprosium (Dy), holmium (Ho), erbium (Er), thulium (Tm), ytterbium (Yb), and lutetium (Lu). The lanthanides, along with the lighter homologues of lanthanum, scandium (Sc) and yttrium (Y), are referred to as "rare earth metals."

[0014] It should be noted that in a metal complex according to the general formula [M(L C )(L T )(L Z )] (I), where Lz is a monoanionic pi-donor ligand, it can be provided that the monoanionic pi-donor ligand Lc and the monoanionic pi-donor ligand Lz are different or identical. And in a metal complex according to the general formula [M(L C )(L T )(LZ )] (I), where Lz is a triazenide anion according to the general formula (R 1 -N3-R 2 ) - is, the triazenide anion L T and the triazenide anion Lz may be different or identical.

[0015] The rest R A can also be selected from the group consisting of linear alkyl groups having 1 to 9 carbon atoms and branched alkyl groups having 3 to 9 carbon atoms, more advantageously from the group consisting of linear alkyl groups having 1 to 8 carbon atoms and branched alkyl groups having 3 to 8 carbon atoms, even more advantageously from the group consisting of linear alkyl groups having 1 to 7 carbon atoms and branched alkyl groups having 3 to 7 carbon atoms, in particular from the group consisting of linear alkyl groups having 1 to 6 carbon atoms and branched alkyl groups having 3 to 6 carbon atoms.

[0016] In the case of the multiply alkyl-substituted cyclopentadienide anion according to the general formula R B R C R D R E R F CP - is a cyclopentadienide anion that is at least dialkyl-substituted. It can also be a trialkyl-substituted, quadruply alkyl-substituted, or pentaalkyl-substituted cyclopentadienide anion. Particularly in the latter case, it is advantageous if the radicals R B , R C , R D , R E and R F are identical. Then the monoanionic pi-donor ligand is, in the simplest case, the 1,2,3,4,5-pentamethylcyclopentadienide anion, where R B = R C = R D = R E = R F = Methyl applies (CsMe5 - ; Cp*).

[0017] The residues R B , R C, R D , R E and R Fcan also be selected independently of one another from the group consisting of hydrogen (H), linear alkyl groups having 1 to 9 carbon atoms and branched alkyl groups having 3 to 9 carbon atoms, more advantageously from the group consisting of hydrogen (H), linear alkyl groups having 1 to 8 carbon atoms and branched alkyl groups having 3 to 8 carbon atoms, even more advantageously from the group consisting of hydrogen (H), linear alkyl groups having 1 to 7 carbon atoms and branched alkyl groups having 3 to 7 carbon atoms, in particular from the group consisting of hydrogen (H), linear alkyl groups having 1 to 6 carbon atoms and branched alkyl groups having 3 to 6 carbon atoms, in each case with the proviso that at least two of the radicals R B , R C, R D , R E and R F are not equal to hydrogen (H).

[0018] The rest R 1 and the rest R 2can also be selected independently of one another from the group consisting of linear alkyl groups having 1 to 9 carbon atoms and branched alkyl groups having 3 to 9 carbon atoms, advantageously from the group consisting of linear alkyl groups having 1 to 8 carbon atoms and branched alkyl groups having 3 to 8 carbon atoms, more advantageously from linear alkyl groups having 1 to 7 carbon atoms and branched alkyl groups having 3 to 7 carbon atoms, even more advantageously from the group consisting of linear alkyl groups having 1 to 6 carbon atoms and branched alkyl groups having 3 to 6 carbon atoms.

[0019] The metal complexes of formula I presented here can be advantageously prepared reproducibly using a simple, (atom-)efficient, and comparatively cost-effective synthesis. They can be prepared in high purity, which meets the requirements for precursor materials for chemical vapor deposition processes, and in good to very good yields and good space-time yields, even on an industrial scale. The compounds of formula I can, in principle, be used in all chemical vapor deposition (CVD) processes.

[0020] In particular, these are MOCVD processes, MOVPE processes and ALD processes.

[0021] The preparation of metal complexes of the type [M(L C )(L T )(L Z)] (I) is carried out starting from an anhydrous metal(III) halide and an alkali metal cyclopentadienide in an aprotic-polar solvent, in particular an ether, for example in THF or in Et2O. The metal(III) halide, in particular a metal(III) chloride, is advantageously present as a THF adduct, optionally generated in situ.

[0022] The term "in situ preparation" or "in situ production" means that the reactants required for the synthesis of a compound or intermediate to be prepared in this way are reacted in a solvent or solvent mixture at a suitable stoichiometry, and the resulting product is not isolated. Rather, the solution or suspension containing the in situ-generated intermediate is used directly, i.e., without isolation and / or further purification.

[0023] The product of the first salt metathesis reaction, for example [(EtCp)2YCl], can advantageously be reacted directly, i.e., without isolation and / or purification, with a lithium triazenide to give the desired product of formula I, for example [(EtCp)2Y(tBu-N3-tBu)]. For this step, it is particularly advantageous to choose an aprotic, nonpolar solvent, for example toluene. The lithium halide, in particular LiCl, which is the only by-product obtained, can then be separated quantitatively or almost quantitatively in a simple and rapid filtration step, decantation step, and / or centrifugation step. Removal of the solvent is followed by a purification of the crude product by distillation and / or sublimation, which is also simple and rapid.

[0024] The compounds according to formula I are - according to 1H-NMR spectroscopy—usually obtained in a purity of at least 97%, advantageously more than 97%, in particular more than 98% or 99%. This is due to the fact that after isolation and purification of the respective metal complex according to formula I, impurities from volatile organic compounds may still be present, in particular from organic solvents used during the synthesis. Experience has shown that this type of impurity is not critical with regard to the use of the metal complexes described here in chemical vapor deposition processes. In other words, this type of impurity does not usually impair the quality of the metal layers or metal-containing layers to be deposited.In the context of the present invention, the terms "high purity" and "ultrapure" refer to a total content of impurities from undesirable metals, undesirable semi-metals, atmospheric oxygen, and water of less than 1 ppm, ideally less than 100 ppb. In the semiconductor industry, such a purity level is referred to as electronic grade. Potential impurities of the type described above, i.e., from volatile organic compounds, particularly from organic solvents used in the synthesis, are not taken into account in this purity specification.

[0025] The yield of the metal complexes according to formula I presented here is generally ≥ 70%. When the process is carried out on an industrial scale, the target compounds are advantageously obtained in comparable yield and purity.

[0026] It is surprising that the metal complexes according to formula I described here are solvent-free after carrying out a simple purification step, namely distillation or sublimation. In other words, the metal complexes according to formula I, for example [(EtCp)Sc(tBu-N3-tBu)2] and [(EtCp)2Y(tBu-N3-tBu)], are not obtained in the form of their solvent adducts or solvent adducts. This is particularly advantageous with regard to their use, in particular as precursors for the production of high-purity metal layers or metal-containing layers by means of chemical vapor deposition processes. The fact that the metal complexes according to formula I are solvent-free is surprising, especially because the low charge-to-radius ratio of lanthanide cations usually results in high coordination numbers. While two cyclopentadienide anions and one amidinate anion according to the general formula (R X-NC(R Y )=NR Z ) - can adequately shield the coordination sphere of Ln(III) cations (cf. US 2014 / 0335702 A1), this is not to be expected, for example, for a ligand regime consisting of two cyclopentadienide anions and one triazenide anion. This is because a triazenide anion exhibits a relatively acute bite angle, especially compared to an amidinate anion.

[0027] The metal complexes of the type [M(L C )(L T )(L Z )] (I) are characterized by a heteroleptic complex design, wherein at least one triazenide ligand according to the general formula (R 1 -N3-R 2 ) - The basic structure of the triazenide ligand advantageously comprises only nitrogen, with the basic structure of the anionic N-donor ligand being formed by the two alkyl radicals R 1 and R 2is stabilized. Due to the nitrogen-containing backbone, the risk inherent in chemical vapor deposition processes of producing contaminated and thus qualitatively unsatisfactory layers – particularly due to carbon – is significantly reduced. Furthermore, the incorporation of the desired elements, particularly the incorporation of nitrogen, into the layers to be produced is promoted, i.e., the incorporation rates of the desired elements are improved. It has been found that this risk can be further reduced by the selection of the two terminal alkyl groups. For example, when using the complex [(EtCp)2Sc(tBu-N3-tBu)] as a precursor material in a MOVPE process, an even lower carbon incorporation rate was observed than when using complexes with sterically less demanding and lower-carbon triazenide ligands, such as [(MeCp)2Sc(R 1 -N3-R 2 )], where R 1 = R 2= Me or Et or iPr.

[0028] Another important advantage of the complex type presented here according to the general formula [M(L C )(L T )(L Z )] (I) is that a multitude of different, especially tailor-made, precursors can be provided in a very simple way. Firstly, the ligand regime is variable, ie either a) a cyclopentadienide ligand Lc, a triazenide ligand L T and a cyclopentadienide ligand Lz, or b) a cyclopentadienide ligand Lc, a triazenide ligand L T and a triazenide ligand Lz. And secondly, each of the three ligands Lc, L T and Lz by varying the residues R A , R B , R C , R D , R E , R F , R 1 and R 2can be modified in a variety of ways. This is particularly advantageous in view of the different process conditions to which the precursor materials can be exposed, for example, depending on the choice of vapor deposition process. Thus, with comparatively little effort, namely simply by varying the ligand regime and / or the substitution patterns of the three ligands Lc, L Tand Lz, tailor-made or application-specifically optimized precursors can be provided. For example, optimization can be carried out for use in an MOCVD process, an ALD process, or a MOVPE process. In this context, it should be mentioned that the synthesis route outlined above can advantageously be pursued essentially independently of the desired metal central atom and the ligand regime. In other words, both the metal central atom and its ligand sphere can be varied within wide ranges, in particular by modifying the substitution patterns of the cyclopentadienide ligand(s) and the triazenide ligand(s), without having to make significant changes to the synthesis protocol. Rather, only minor changes to the synthesis protocol are required, if any, for example, in the form of a solvent change and / or a temperature adjustment.

[0029] It is also particularly advantageous that the metal complexes according to formula I presented here usually have relatively low melting temperatures, generally less than 100 °C or less than 95 °C or less than 90 °C, for example, approximately 80 °C in the case of [(MeCp)2Sc(tBu-N3-tBu)] or approximately 40 °C in the case of [(EtCp)2Y(tBu-N3-tBu)]. In addition, metal complexes can be provided which have molecular weights of less than 600 g / mol, advantageously of at most 595 g / mol, in particular less than 595 g / mol. Complexes according to formula I, where M = Sc, Y or Ti, can, for example, also have molecular weights of less than 550 g / mol or less than 500 g / mol, for example in the range from 350 g / mol to 550 g / mol. This, in combination with a low melting temperature, advantageously results in a relatively high vapor pressure for the metal complexes described here.

[0030] The thermogravimetric analysis (TGA) of selected metal complexes according to formula I, in particular the complexes [(EtCp)2Sc(tBu-N3-tBu)] and [(EtCp)Sc(tBu-N3-tBu)2] (cf.

[0031] Fig. 1 and Fig. 2) found that the transition of these precursor compounds into the gas phase occurs at relatively low temperatures. A particularly advantageous feature is that this transition also occurs without decomposition. Consequently, when using a complex of the type presented here as a precursor in a chemical vapor deposition process, a targeted decomposition of the respective precursor can be advantageously carried out at relatively low process temperatures. Overall, this results in better availability of the precursors in the gas phase and ultimately an increase in the incorporation rate of the desired elements. In addition, the targeted decomposition at comparatively low process temperatures has a positive effect on layer growth. The resulting layers are therefore of high quality in terms of their purity, composition, and morphology.

[0032] In the context of the present invention, the term “high-quality layer” refers to the purity, the composition, in particular the content of the respective metal M, and the morphology of a layer produced by means of a chemical vapor deposition process.

[0033] For example, the complex [(EtCp)2Sc(tBu-N3-tBu)] was used as a precursor material in a MOVPE process for producing AlScN layers. The AlScN layers were deposited, for example, on the surface of a gallium nitride (GaN) substrate. The growth temperature was typically in the range of 900 °C to 1,200 °C, and the internal temperature of the bubbler, also known as the vapor pressure saturator, was generally approximately 50 °C to approximately 100 °C. Surprisingly, a sufficiently high vapor pressure of the precursor was observed even at a relatively low internal temperature of the bubbler in the aforementioned range. A molar flow in the typically selected range was achieved by setting a hydrogen flow (carrier gas) comparable to the flow determined for the precursor. Layer growth rates within the expected range were achieved.Depending on the growth conditions chosen, in particular the substrate selected, the internal temperature of the bubbler, and the process temperature, the AlScN layers produced contained at least approximately 10 atomic percent scandium, i.e., the scandium incorporation rate was at least approximately 10 atomic percent. Thus, the scandium content was at least comparable to the value of ≈ 10% recently reported by Streicher et al. (Phys. Status Solidi RRL 2023, 17, 2200387) for an AlScN layer. This layer was obtained using a MOCVD process using bis(methylcyclopentadienyl)scandium chloride ([(MeCp)2ScCl]2) at a growth temperature of 900 °C.

[0034] Surprisingly, when using the complex [(EtCp)2Sc(tBu-N3-tBu)] presented here - unlike in the case of the previously known precursor [(MeCp)2ScCl]2, which was also used by the inventors under identical process conditions - it was found that the scandium incorporation rate is not dependent on the growth temperature.

[0035] The percentage atomic composition of the AlScN layers produced in connection with this invention was determined by means of high-resolution transmission electron microscopy (HRTEM) in combination with energy-dispersive X-ray analysis (EDXA) on a scanning transmission electron microscope (STEM).

[0036] In summary, the metal complexes presented here are shown to have the general formula [M(L C )(L T )(L Z)] (I) can be easily prepared in high purity in good to very good yields, even on an industrial scale. The heteroleptic, variable complex design, which provides at least one ligand with a nitrogen-based, carbon-free backbone (triazenide ligand), enables the provision of a large number of different metal complexes, which are advantageously tailored or optimized for specific applications. It is particularly advantageous that the metal complexes of the type [M(L C )(L T )(L Z)] (I) satisfy all requirements placed on precursor materials for chemical vapor deposition processes and are thus particularly predestined for use in processes of this type. It is particularly advantageous that the complex design of the compounds according to formula I promotes the incorporation of desired elements into the layer to be produced and also reduces the incorporation of undesired elements, such as carbon. Advantageously, these complexes can be used at ideal process temperatures, so that high-quality metal layers and metal-containing layers can be produced. For example, layers that comprise or consist of a lanthanide-containing III-V compound semiconductor or a Ln oxide. Overall, the use of complexes of the type presented here in chemical vapor deposition processes is particularly advantageous from an (atom-)economic and ecological point of view.

[0037] In an advantageous embodiment of the metal complex described here, the lanthanide is selected from the group consisting of i. La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; or ii. La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Er, Yb and Lu; or iii. La, Ce, Pr, Nd, Eu, Gd, Er, Yb and Lu.

[0038] In particular, the lanthanide is selected from the group consisting of La, Ce, Nd, Eu, Er and Lu.

[0039] According to another embodiment of the metal complex presented here, it is intended that i. the monoanionic pi-donor ligand Lc is selected from the group consisting of - unsubstituted cyclopentadienide anion (C5H5 - ); - simply alkyl-substituted cyclopentadienide anions according to the general formula R A CP - , where the remainder R Ais selected from the group consisting of methyl, ethyl, propyl, butyl, pentyl, and their isomers, in particular from the group consisting of methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl; - multiply alkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C , R D , R E and R F are independently selected from the group consisting of hydrogen (H), methyl, ethyl, propyl, butyl, pentyl, and their isomers, in particular from the group consisting of hydrogen (H), methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl, with the proviso that at least two of the radicals R B , R C , R D , R E and R F are not equal to hydrogen (H); and / or ii. at least one of the residues R 1 and R 2 of the triazenide anion L T is selected from the group consisting of linear alkyl groups having 1 to 6 carbon atoms and branched alkyl groups having 3 to 6 carbon atoms.

[0040] It can also be provided that the monoanionic pi-donor ligand Lc is a multiply alkyl-substituted cyclopentadienide anion according to the general formula R B R C R D R E R F CP - where the radicals R B , R C , R D , R E and R F are independently selected from the group consisting of hydrogen (H), methyl, ethyl, propyl, butyl, pentyl, and their isomers, in particular from the group consisting of hydrogen (H), methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl, with the proviso that at least two of the radicals R B , RC , R D , R E and R F which are not equal to hydrogen (H), are identical.

[0041] Then the pi-donor ligand Lc is, for example, Me4Cp - or Me(Et)2Cp - or Et2Cp - or Et2(iBu)Cp - or Me5Cp - (Cp*).

[0042] In addition, it can be provided that the monoanionic pi-donor ligand Lc is a doubly alkyl-substituted cyclopentadienide anion according to the general formula R B R C R D R E R F CP - where the radicals R B , R C , R D , R E and R Fare independently selected from the group consisting of hydrogen (H), methyl, ethyl, propyl, butyl, pentyl, and their isomers, in particular from the group consisting of hydrogen (H), methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl, with the proviso that exactly two or exactly three or exactly four or exactly five of the radicals R B , R C , R D , R E and R F are not equal to hydrogen (H), advantageously exactly two or exactly five of the radicals R B , R C , R D , R E and R F are not equal to hydrogen (H).

[0043] Then the pi-donor ligand Lc is, for example, an anion selected from the group consisting of Me2Cp - , Me(Et)Cp - , Et2Cp - , Me(iPr)Cp - , Et(iPr)Cp - , iPr2Cp - , Me(iBu)Cp - , Et(iBu)Cp - , iBu2Cp -, Me(sBu)Cp - , Et(sBu)Cp - and sBu2Cp - .

[0044] According to a further advantageous embodiment of the metal complex presented here, the ligand Lz is a monoanionic pi-donor ligand, where i. the monoanionic pi-donor ligand Lc or the monoanionic pi-donor ligand Lz is selected or ii. the monoanionic pi-donor ligand Lc and the monoanionic pi-donor ligand Lz are selected independently of each other from the group consisting of - unsubstituted cyclopentadienide anion (C5H5 - ); - simply alkyl-substituted cyclopentadienide anions according to the general formula R A CP - , where the remainder R Ais selected from the group consisting of methyl, ethyl, propyl, butyl, pentyl, and their isomers, in particular from the group consisting of methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl; - multiply alkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C , R D , R E and R F are independently selected from the group consisting of hydrogen (H), methyl, ethyl, propyl, butyl, pentyl, and their isomers, in particular from the group consisting of hydrogen (H), methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl, with the proviso that at least two of the radicals R B , R C , R D , R E and R F are not equal to hydrogen (H).

[0045] In an alternative or additional embodiment, at least one of the radicals R 1 and R 2 of the triazenide anion L T selected from the group consisting of linear alkyl groups having 1 to 6 carbon atoms and branched alkyl groups having 3 to 6 carbon atoms.

[0046] According to a further embodiment of the metal complex presented here, the radical R 1 and the rest R 2 of the triazenide anion L T independently selected from the group consisting of methyl, ethyl, propyl, butyl, pentyl, and their isomers, in particular from the group consisting of methyl, ethyl, iso-propyl, iso-butyl, sec-butyl and tert-butyl.

[0047] If the ligand Lz is a monoanionic pi-donor ligand, it can also be provided that i. the monoanionic pi-donor ligand Lc or the monoanionic pi-donor ligand Lz is selected or ii. the monoanionic pi-donor ligand Lc and the monoanionic pi-donor ligand Lz are independently selected from the group consisting of multiply alkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C , R D , R E and R F are independently selected from the group consisting of hydrogen (H), methyl, ethyl, propyl, butyl, pentyl, and their isomers, in particular from the group consisting of hydrogen (H), methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl, with the proviso that at least two of the radicals R B , R C , R D , R E and R F which are not equal to hydrogen (H), are identical.

[0048] Then the pi-donor ligand Lc and / or the pi-donor ligand Lz is selected, for example, from the group consisting of Me4Cp - , Me(Et)2Cp - , Et2Cp - , Et2(iBu)Cp - and Me5Cp - (Cp*).

[0049] It may also be provided that i. the monoanionic pi-donor ligand Lc or the monoanionic pi-donor ligand Lz is selected or ii. the monoanionic pi-donor ligand Lc and the monoanionic pi-donor ligand Lz are independently selected from the group consisting of dialkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C , R D , R E and R Fare independently selected from the group consisting of hydrogen (H), methyl, ethyl, propyl, butyl, pentyl, and their isomers, in particular from the group consisting of hydrogen (H), methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl, with the proviso that exactly two or exactly three or exactly four or exactly five of the radicals R B , R C, R D , R E and R F are not equal to hydrogen (H), advantageously exactly two or exactly five of the radicals R B , R C, R D , R E and R F are not equal to hydrogen (H).

[0050] Then the pi-donor ligand Lc and / or the pi-donor ligand Lz is selected, for example, from the group consisting of Me2Cp - , Me(Et)Cp - , Et2Cp - , Me(iPr)Cp - , Et(iPr)Cp - , iPr2Cp - , Me(iBu)Cp - , Et(iBu)Cp - , iBu2Cp -, Me(sBu)Cp - , Et(sBu)Cp - and sBu2Cp - .

[0051] In yet another variant of the metal complex described here, Lz is intended to be a monoanionic pi-donor ligand, where the monoanionic pi-donor ligand Lc and the monoanionic pi-donor ligand Lz are identical.

[0052] According to a further advantageous embodiment of the metal complex presented here, the ligand Lz is a triazenide anion according to the general formula (R 1 -N3-R 2 )-, where at least one of the radicals R 1 and R 2 of the triazenide anion Lz is selected from the group consisting of linear alkyl groups having 1 to 6 carbon atoms and branched alkyl groups having 3 to 6 carbon atoms.

[0053] Another advantageous embodiment provides that the ligand Lz is a triazenide anion according to the general formula (R 1 -N3-R 2 ) -where the remainder R 1 and the rest R 2 of the triazenide anion Lz independently of each other and independently of the triazenide anion L T are selected from the group consisting of methyl, ethyl, propyl, butyl, pentyl, and their isomers, in particular from the group consisting of methyl, ethyl, iso-propyl, iso-butyl, sec-butyl and tert-butyl.

[0054] In another variant of the metal complex presented here, Lz is a triazenide anion according to the general formula (R 1 -N3-R 2 ) - , where the triazenide anion L T and the triazenide anion Lz are identical.

[0055] According to yet another variant of the metal complex presented here, it is intended that i. the remainder R 1 and the rest R 2 of the triazenide anion L T are identical, and / or ii. Lz is a triazenide anion according to the general formula (R 1-N3-R 2 ) - where the remainder R 1 and the rest R 2 of the triazenide anion Lz are identical;

[0056] Yet another advantageous embodiment of the metal complex described here provides that the metal central atom M is selected from the group consisting of Sc, Y, La, Ce, Nd, Eu, Er, Lu and Ti, and A. the ligand Lz is a monoanionic pi-donor ligand, where i. the monoanionic pi-donor ligand Lc or the monoanionic pi-donor ligand Lz is selected or ii. the monoanionic pi-donor ligand Lc and the monoanionic pi-donor ligand Lz are selected independently of each other from the group consisting of - unsubstituted cyclopentadienide anion (C5H5 - ); - simply alkyl-substituted cyclopentadienide anions according to the general formula R A CP - , where the remainder R Ais selected from the group consisting of methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl; - multiply alkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C , R D , R E and R F are independently selected from the group consisting of hydrogen (H), methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl, with the proviso that at least two of the radicals R B , R C , R D , R E and R F which are not equal to hydrogen (H), are identical; and the rest R 1 and the rest R 2 of the triazenide anion L Tare independently selected from the group consisting of methyl, ethyl, iso-propyl, iso-butyl, sec-butyl and tert-butyl; or For example, the ligand Lz is a triazenide anion according to the general formula (R 1 -N3-R 2 ) - is, where i. the residues R 1 and R 2 one of the two triazenide anions L T and Lz are independently selected from the group consisting of methyl, ethyl, iso-propyl, iso-butyl, sec-butyl and tert-butyl, or ii. the residues R 1 and R 2 of the triazenide anion L T and the residues R 1 and R 2 of the triazenide anion Lz are each independently selected from the group consisting of methyl, ethyl, iso-propyl, iso-butyl, sec-butyl and tert-butyl; and the monoanionic pi-donor ligand Lc is selected from the group consisting of - unsubstituted cyclopentadienide anion (C5H5 - ); - simply alkyl-substituted cyclopentadienide anions according to the general formula R A CP - , where the remainder R A is selected from the group consisting of methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl; - multiply alkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C , R D , R E and R F are independently selected from the group consisting of hydrogen (H), methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl, with the proviso that at least two of the radicals R B , R C , R D , R E and R Fwhich are not equal to hydrogen (H), are identical.

[0057] According to variant A, for example, it can be provided that the pi-donor ligand Lc and / or the pi-donor ligand Lz is selected from the group consisting of Cp - (C5H5 - ), MeCp - (MeC5H4 - ), EtCp - (EtC5H4 - ), iPrCp - (iPrC5H4 - ), iBuCp - (iBuC5H4 - ), sBuCp - (sBuCsH4 - ), tBuCp - (tBuC5H4 - ), Et2Cp - (Et2C5H3 - ) and Me5Cp - (Cp*, C5Me5 - ). And the triazenide ligand L T can for example be selected from the group consisting of (Me-N3-Me) - , (iPr-N3-iPr) - , (iPr-N3-tBu) - , (tBu-N3-tBu) - and (iBu-N3-iBu) - .

[0058] According to variant B, the triazenide ligand L Tand / or the triazenide ligand Lz may be selected from the group consisting of (Me-N3-Me) - , (iPr-N3-iPr) - , (iPr-N3-tBu) - , (tBu-N3-tBu) - and (iBu-N3-iBu) - . And the monoanionic pi-donor ligand Lc is, for example, selected from the group consisting of Cp - (C5H5 - ), MeCp - (MeC5H4 - ), EtCp - (EtC5H4 - ), iPrCp - (iPrC5H4 - ), iBuCp - (iBuC5H4 - ), sBuCp - (sBuC5H4 - ), tBuCp - (tBuC5H4 - ), Et2Cp - (Et2C5H3 - ), and Me5Cp - (Cp*, C5Me5 - ).

[0059] According to a further embodiment of the metal complex described here, the metal complex has the formula I.1 or the formula I.2 or the formula I.3 or the formula I.4 or the formula I.5 or the formula I.6 or the formula I.7 or the formula I.8 or the formula I.9 or the formula I.10 or the formula I.11:

[0060] According to another advantageous embodiment of the metal complex described here, the metal complex is vaporizable or sublimable without decomposition.

[0061] This is particularly advantageous, especially since the decomposition-free transition of the metal complex into the gas phase increases the incorporation rate of the respective metal M. The incorporation rate of nitrogen is also increased. The resulting layers are of high quality in terms of their purity, composition, and morphology. Overall, this property of the metal complex has a particularly positive impact on the (atom) economic and ecological balance of the process. For further details regarding the advantages of the decomposition-free transition of a precursor compound into the gas phase, please refer to the information provided above.

[0062] According to a further advantageous alternative or additional variant, a molecular weight of the metal complex is less than 600 g / mol, advantageously at most 595 g / mol, in particular less than 595 g / mol.

[0063] In comparison, two homoleptic Ln(III) triazenide complexes (Ln = La or Ce) described in WO 2019 / 115646 each have a molecular weight of more than 600 g / mol (approx. 608 g / mol).

[0064] The generally comparatively low molecular weight of the metal complex according to formula I described here, advantageously of at most 595 g / mol, in particular of less than 595 g / mol, advantageously enables a particularly (energy-)efficient transfer of the metal complex into the gas phase.

[0065] Metal complexes according to formula I, where M = Sc, Y, or Ti, can have molecular weights of less than 550 g / mol or less than 500 g / mol, for example, in the range from 350 g / mol to 550 g / mol. Thus, in the case of the Y(III) compound according to formula I.1 shown above, the molecular weight is between 400 g / mol and 450 g / mol, namely approximately 431 g / mol, and in the case of the Sc(III) complex according to formula I.2 shown above, the molecular weight is between 350 g / mol and 400 g / mol, namely approximately 360 g / mol.

[0066] The object is also achieved by a method for producing a layer which i. consists of at least one metal M, wherein the at least one metal M is selected from the group consisting of scandium, yttrium, lanthanides and titanium, or ii. contains at least one metal M, wherein the at least one metal M is selected from the group consisting of scandium, yttrium, lanthanides and titanium, on a surface of a substrate, in particular a semiconductor substrate, using - at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of the embodiments described above, or - a solution comprising at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of the embodiments described above and an aprotic-nonpolar solvent.

[0067] The procedure includes the following steps: A. Provision - of the at least one metal complex according to one or more of the embodiments described above, or - the solution comprising at least one metal complex according to one or more of the embodiments described above and an aprotic-nonpolar solvent, and B. Deposition of the layer which i. which consists of at least one metal M, or ii. which contains at least one metal M, on the surface of the substrate using the at least one metal complex provided in step A. as a precursor compound.

[0068] The at least one metal complex of the type [M(L C )(L T )(L Z )] (I) or the solution to be provided, comprising at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I), are due to their high purity (according to 1H-NMR spectroscopy) of at least 97%, advantageously more than 97%, in particular more than 98% or 99%, particularly suitable as a precursor compound or as a solution containing a precursor compound for producing a high-quality layer on a surface of a substrate. The layer consists of at least one metal selected from the group consisting of scandium, yttrium, lanthanides, where the lanthanide is, for example, La, Ce, Nd, Eu, Er or Lu, and titanium. The aforementioned metal complexes according to the general formula I and solutions comprising at least one such metal complex are also suitable for producing a high-quality layer containing at least one metal selected from the group consisting of scandium, yttrium, lanthanides, where the lanthanide is, for example, La, Ce, Nd, Eu, Er or Lu, and titanium.

[0069] In the context of the present invention, the expression "high purity" and the term "ultrapure" refer to a total content of impurities from undesirable metals, undesirable semimetals, atmospheric oxygen, and water of less than 1 ppm, ideally less than 100 ppb. In the semiconductor industry, such a degree of purity is referred to as electronic grade. Potential impurities from volatile organic compounds, in particular from organic solvents used during synthesis, are not taken into account in this purity specification. With regard to this type of impurity, the purity of the metal complexes according to formula I is usually at least 97%, advantageously more than 97%, in particular more than 98% or 99%.

[0070] The deposition of the respective scandium layer, yttrium layer, lanthanide layer, where the lanthanide is, for example, La, Ce, Nd, Eu, Er or Lu, or titanium layer or the layer containing at least one of the aforementioned metals can be carried out by means of a CVD process, for example by means of an MOCVD process, an MOVPE process or an ALD process.

[0071] Corundum foils or thin metallic foils, for example, can be used as substrates. The substrate itself can be part of a component and / or already be provided with a semiconductor layer, for example, a layer consisting of a III-V semiconductor such as gallium nitride (GaN).

[0072] In one embodiment of the method described here, the substrate is a wafer. The wafer may comprise silicon, silicon carbide, germanium, gallium nitride, gallium arsenide, indium phosphide, a glass such as SiO2, and / or a plastic such as silicone, or may consist entirely of one or more of these materials. Furthermore, the wafer may have one or more wafer layers, each with a surface. The production of a layer consisting of at least one metal selected from the group consisting of scandium, yttrium, lanthanides, where the lanthanide is, for example, La, Ce, Nd, Eu, Er, or Lu, and titanium, or a layer containing at least one metal selected from the group consisting of scandium, yttrium, lanthanides, where the lanthanide is, for example, La, Ce, Nd, Eu, Er, or Lu, and titanium, may be provided on the surface of one or more wafer layers.The layer containing at least one metal may be a Ln2O3 layer, for example a layer containing a mixed oxide of two lanthanides or consisting of a mixed oxide of two lanthanides.

[0073] The object is also achieved by a substrate which has at least one layer on a surface which i. consists of at least one metal M, wherein the at least one metal M is selected from the group consisting of scandium, yttrium, lanthanides and titanium, or ii. contains at least one metal M, wherein the at least one metal M is selected from the group consisting of scandium, yttrium, lanthanides and titanium, wherein the metal layer consisting of the at least one metal M, or the layer containing the at least one metal M, is produced using - at least one metal complex according to the general formula [M(L C )(L T )(L Z ) (I)] according to one or more of the embodiments described above, or - a solution comprising at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of the embodiments described above and an aprotic-nonpolar solvent.

[0074] The at least one metal complex to be used of the type described above [M(L C )(L T )(L Z )] (I) or the solution to be used, comprising at least one metal complex according to the general formula [M(L C )(L T )(L Z)] (I), are particularly well suited as a precursor compound or as a solution containing a precursor compound for producing a high-quality layer on a surface of a substrate due to their high purity.

[0075] A definition of the term "high purity" is given in the context of the process for producing a layer consisting of at least one metal M or a layer containing at least one metal M on a surface of a substrate.

[0076] The deposition of the respective scandium layer, yttrium layer, lanthanide layer, where the lanthanide is, for example, La, Ce, Nd, Eu, Er or Lu, or titanium layer or the layer containing at least one of the aforementioned metals can be carried out by means of a CVD process, for example by means of an MOCVD process, an MOVPE process or an ALD process.

[0077] The substrate can be, for example, a corundum foil or a thin metallic foil. It can itself be part of a component and / or already be provided with a semiconductor layer, for example, a layer consisting of a III-V semiconductor such as gallium nitride (GaN).

[0078] In one embodiment of the substrate described here, the substrate is a wafer. The wafer may comprise silicon, silicon carbide, germanium, gallium nitride, gallium arsenide, indium phosphide, a glass such as SiO2, and / or a plastic such as silicone, or may consist entirely of one or more of these materials. Furthermore, the wafer may have one or more wafer layers, each having a surface. The production of a layer consisting of at least one metal selected from the group consisting of scandium, yttrium, lanthanides, where the lanthanide is, for example, La, Ce, Nd, Eu, Er, or Lu, and titanium, or a layer containing at least one metal selected from the group consisting of scandium, yttrium, lanthanides, where the lanthanide is, for example, La, Ce, Nd, Eu, Er, or Lu, and titanium, may be provided on the surface of one or more wafer layers.The layer containing at least one metal may be a Ln2O3 layer, for example a layer containing a mixed oxide of two lanthanides or consisting of a mixed oxide of two lanthanides.

[0079] Furthermore, the object is achieved by a method for producing an electronic component, in particular an electronic semiconductor component, using - at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of the embodiments described above, or - a solution comprising at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of the embodiments described above and an aprotic-nonpolar solvent.

[0080] The procedure includes the following steps: A. Provision - of at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more embodiments described above, or - the solution comprising at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of the embodiments described above and an aprotic-nonpolar solvent, B. Deposition of a layer which i. which consists of at least one metal M, or ii. which contains at least one metal M, on a surface of a substrate, and C. Completion of the electronic component, in particular the electronic semiconductor component.

[0081] The electronic component, in particular the electronic semiconductor component, is, for example, a detector, a photoelement, a semiconductor diode, a laser, an electronic switching element, in particular a field-effect transistor or a transistor with high electron mobility, or a fiber-optic emitter or a fiber-optic sensor.

[0082] The at least one metal complex to be used of the type described above [M(L C )(L T )(L Z )] (I) or the solution to be used, comprising at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I), are particularly well suited as a precursor compound or as a solution containing a precursor compound for producing a high-quality layer on a surface of a substrate due to their high purity.

[0083] A definition of the term "high purity" is given in the context of the process for producing a layer consisting of at least one metal M or a layer containing at least one metal M on a surface of a substrate.

[0084] The deposition of the respective scandium layer, yttrium layer, lanthanide layer, where the lanthanide is, for example, La, Ce, Nd, Eu, Er or Lu, or titanium layer or the layer containing at least one of the aforementioned metals can be carried out by means of a CVD process, for example by means of an MOCVD process, an MOVPE process or an ALD process.

[0085] The substrate can be, for example, a corundum foil or a thin metallic foil. It can itself be part of a component and / or already be provided with a semiconductor layer, for example, a layer consisting of a III-V semiconductor such as gallium nitride (GaN).

[0086] In one embodiment of the method described here, the substrate is a wafer. The wafer may comprise silicon, silicon carbide, germanium, gallium nitride, gallium arsenide, indium phosphide, a glass such as SiO2, and / or a plastic such as silicone, or may consist entirely of one or more of these materials. Furthermore, the wafer may have one or more wafer layers, each with a surface. The production of a layer consisting of at least one metal selected from the group consisting of scandium, yttrium, lanthanides, where the lanthanide is, for example, La, Ce, Nd, Eu, Er, or Lu, and titanium, or a layer containing at least one metal selected from the group consisting of scandium, yttrium, lanthanides, where the lanthanide is, for example, La, Ce, Nd, Eu, Er, or Lu, and titanium, may be provided on the surface of one or more wafer layers.The layer containing at least one metal may be a Ln2O3 layer, for example a layer containing a mixed oxide of two lanthanides or consisting of a mixed oxide of two lanthanides.

[0087] Further features, details, and advantages of the invention will become apparent from the wording of the claims and from the following description of exemplary embodiments and drawings. They show: Fig. 1 a TGA curve and an SDTA curve (synchronous differential thermal analysis curve performed simultaneously with the TGA measurement) of the metal complex [(EtCp)2Sc(dbt)], where dbt = di-tert-butyl triazenide anion, prepared according to Example 3.1; Fig. 2 a TGA curve and an SDTA curve of the metal complex [(EtCp)Sc(dbt)2], where dbt = di-tert-butyl triazenide anion, prepared according to Example 4; and Fig. 3 a TGA curve and an SDTA curve of the previously known complex [(MeCp)2ScCl]2.

[0088] The Fig. 1 and in Fig. The TGA curves shown in Figure 2 were recorded from two metal complexes according to the general formula I, where for both complexes: M = Sc, Lc = EtCp - and L T = (tBu-N3-tBu) - . For the first metal complex, Lz = Lc applies, and for the second metal complex, Lz = L T .

[0089] In Fig. For comparison purposes, Figure 3 shows a TGA curve of the previously known precursor material [(MeCp)2ScCl]2. This Sc(III) complex was prepared according to a procedure given in WO 2018 / 086730 A9.

[0090] The temperature in °C is plotted on the x-axis for both the TGA measurement and the SDTA measurement, with the relevant numerical values ​​given above the x-axis.

[0091] For the TGA measurement, the left y-axis is also important, on which the sample weight is plotted in mg, as well as the second y-axis (from the left; in Fig. 3 not shown), on which the remaining mass is plotted in %. The heat flow difference in mW is plotted on the right y-axis, relevant for the SDTA measurement.

[0092] From the Fig. 1 and in Fig. The TGA curves shown in Figure 2 show that both the Sc(III) complex [(EtCp)2Sc(dbt)] and the Sc(III) complex [(EtCp)Sc(dbt)2] can be advantageously vaporized without decomposition at low temperatures, namely in the range of 200 °C. The low melting temperatures of these compounds can be seen from the corresponding SDTA curves: approximately 10 °C for the complex [(EtCp)2Sc(dbt)] and approximately 45 °C for the compound [(EtCp)Sc(dbt)2].

[0093] In contrast, the Fig.The TGA curve shown in Figure 3 shows that the previously known Sc(III) precursor [(MeCp)2ScCl]2 unfortunately does not exhibit decomposition-free evaporation. The melting temperature of this previously known complex is approximately 160 °C.

[0094] Due to the fact that the Sc(III) complexes [(EtCp)2Sc(dbt)] and [(EtCp)Sc(dbt)2] can be produced in high purity, even on an industrial scale, and can be vaporized without decomposition – the latter even at relatively low temperatures in the range of 200 °C – they are ideal precursor materials in chemical vapor deposition (CVD) processes, particularly for the production of high-quality scandium or scandium-containing layers, e.g., AlScN layers, on semiconductor substrates. This was confirmed, for example, by using the complex [(EtCp)2Sc(dbt)] in a MOVPE process. Relevant information is provided above.

[0095] Arbeitsvorschriften zur Synthese von [(EtCp)2Y(dbt)], [(MeCp)2Sc(dbt)], [(EtCp)2Sc(dbt)], [(EtCp)Sc(dbt) 2] , [(Cp)2Ti(pbt)], [(iPrCp)(EtCp)Eu(dbt)], [(iPrCp)Lu(dbt)2], [(tBuCp)Er(dmt)(dpt)], [(Et2Cp)La(dbt)2], [(Cp*)(MeCp)Ce(dmt)], [(iPrCp)(MeCp)Nd(dibt)]

[0096] Dabei gilt: Cp = Cyclopentadienid-Anion, C5H5 - ; MeCp = Methylcyclopentadienid-Anion, MeC5H4 - ; EtCp = Ethylcyclopentadienid-Anion, EtC5H4 - ; Et2Cp = Di-ethyl-cyclopentadienid-Anion, Et2C5H3 - ; iPrCp = iso-Propyl-cyclopentadienid-Anion, / PrC5H4 - ; tBuCp = tert-Butylcyclopentadienid-Anion, tBuC5H4 - ; Cp* = 1,2,3,4,5-Pentamethylcyclopentadienid-Anion, C5Me5 - ; dmt = Di-methyl-triazenid-Anion, (Me-N3-Me) - ; dpt = Di-iso-propyltriazenid-Anion, (iPr-N3-iPr) - ; pbt = iso-Propyl-tert-butyl-triazenid-Anion, (iPr-N3-tBu) - ; dbt = Di-tert-butyl-triazenid-Anion, (tBu-N3-tBu) -; dibt = di-iso-butyl triazenide anion (iBu-N3-iBu) - . Materials and methods

[0097] All reactions were carried out under a protective gas atmosphere using standard Schlenk techniques. The reactants and solvents used were of pa purity.

[0098] All nuclear magnetic resonance measurements were performed on a Bruker AV II 300 instrument. 1 H-NMR and 13 C-NMR spectra were calibrated to the corresponding residual proton signal of the solvent (C6D6) as an internal standard: 1 H: 7.16 ppm (s); 13C: 128.0 ppm (tr). The chemical shifts are given in ppm and refer to the δ scale. All signals are abbreviated according to their splitting pattern: s (singlet), t (triplet), q (quartet), or m (multiplet). The coupling between two nuclei A and B via n bonds is expressed by the coupling constant of the form n J AB in Hertz (Hz).

[0099] Infrared spectra were measured in substance using a Bruker Alpha ATR-IR spectrometer. The absorption bands are given in wavenumber (cm -1 ) and the intensity is described with the following abbreviations: w (weak), m (moderate), s (strong). The spectra were always normalized to the band with the highest intensity.

[0100] The thermogravimetric analyses were performed on a TGA / DSC 3+ STAR system from Mettler Toledo. A coupled SDTA measurement was performed for each TGA measurement. Depending on the method and the physical state, the samples were measured in aluminum oxide, aluminum, or sapphire crucibles. The samples were heated to the final temperature at a specific heating rate between 5 K / min and 25 K / min. The resulting spectra were analyzed using Mettler Toledo's STARe software. Example 1.1: Preparation of [(EtCp)2Y(dbt)] starting from YCl3 YCl3→RT,3dTHF[YCl3*3THF]→THF, 4h, 0°C2 eq EtCpLi[(EtCp)2YCl]→Toloul / THF, 0°C+Li(dbt)[(EtCp)2Y(dbt)] 5.0 g of YCl3 (25.6 mmol) were dissolved in 150 mL of THF at -60°C and, after warming to room temperature, stirred for 3 days. A solution of EtCpLi (56.3 mmol) in 50 mL of THF was added dropwise to the resulting colorless suspension at 0°C over a period of 4 hours. The reaction mixture cleared completely upon thawing to room temperature and was stirred at room temperature for 16 hours. The solvent was removed under vacuum. The residue was taken up in 50 mL of toluene, and the resulting suspension was filtered. The filter cake was washed three times with 20 mL of toluene each time. The filtrate was diluted with 50 mL of toluene and cooled to 0°C. 4.2 g of Li(dbt) (25.6 mmol) were then added portionwise. The reaction mixture was first warmed to room temperature and then heated to boiling for 3 hours. The resulting suspension was filtered.The solvent from the filtrate was removed under vacuum, and the crude product was condensed under vacuum at 180 °C. The product was obtained as a colorless oil, which slowly solidified at room temperature. Yield: 75% (6.0 g; 19.3 mmol). Example 1.2: Representation of [(EtCp)2Y(dbt)] starting from [(EtCp)2YCI] [(EtCp)2YCl]→Hexane, 0°C+Li(dbt)[(EtCp)2Y(dbt)]

[0101] To 90.5 g of (EtCp)2YCl (291 mmol) in 600 mL of n-hexane at 0 °C, 47.5 g of Li(dbt) (291 mmol) were added portionwise over 2 hours. The reaction mixture was stirred at 0 °C for 2 hours and then at room temperature for 16 h. The reaction mixture was then heated to boiling for 3 hours. The resulting suspension was filtered, and the filter cake was washed three times with 50 mL of n-hexane each time. The solvent from the filtrate was removed under vacuum, and the crude product was recondensed under vacuum at 180 °C. The product was obtained as a colorless oil, which slowly solidified at room temperature. Yield: 78% (98 g; 227 mmol).

[0102] Melting temperature: approx. 40 °C; 1 H NMR (300 MHz; C6D6): δ = 1.14 (t, 3 J HH = 7.6 H, 6H, CH2CH3), 1.20 (s, 18H, C(CH3)3), 2.45 (q, 3 J HH = 7.6 H, 4H, CH2CH3), 5.96 (m, 4H, CH arom. ), 6.02 (m, 4H, CH arom. ) ppm; 13C-NMR (75 MHz; C6D6): δ = 16,4 (s, 2C, CH2CH3), 23,3 (s, 2C, CH2CH3), 30,2 (s, 6C, C(CH3)3), 56,8 (s, 1C, C(CH3)3), 56,9 (s, 1C, C(CH3)3), 110,2 (s, 1C, CH arom. ), 110,2 (s, 1C, CH arom. ), 110,7 (s, 1C CH arom. ), 110,7 (s, 1C, CH arom. ), 130,3 (s, 1C, C arom. quatär ) ppm; IR (Substanz): ṽ = 3064 (w), 2965 (m), 2928 (w), 2897 (w), 2867 (w), 1471 (w), 1459 (w), 1382 (w), 1357 (m), 1318 (w), 1278 (s), 1248 (m), 1202 (s), 1043 (w), 1027 (m), 911 (w), 854 (m), 764 (s), 665 (w), 619 (s), 554 (w), 487 (w), 465 (w), 426 (w) cm -1 . Beispiel 2: Darstellung von [(MeCp)2Sc(dbt)] [ScCl3*3 THF]→THF, 1h2 eq MeCpK[(MeCp)2ScCl]→Toloul / THF, 0°C+Li(dbt)[(MeCp)2Sc(dbt)] 7.35 g of [ScCl3*3 THF] (20 mmol) were suspended in 50 mL of THF. A solution of MeCpK (40 mmol) in 100 mL of THF was added dropwise at room temperature over 1 hour. The reaction mixture was then stirred at room temperature for 16 hours. The solvent was removed under vacuum, and the residue was taken up in 50 mL of toluene. The resulting suspension was filtered, and the filter cake was washed three times with 20 mL of toluene each time. The filtrate was concentrated to a volume of approximately 30 mL and cooled to 0 °C. Subsequently, 3.2 g of Li(dbt) (20 mmol) were added portionwise. After thawing, 5 mL of THF were added, and the reaction mixture was stirred at room temperature for 16 hours. The resulting suspension was filtered, the solvent from the filtrate was removed under vacuum, and the crude product was condensed under vacuum at 150 °C. The product was obtained as a yellowish solid. Yield: 66% (5 g; 13.3 mmol).

[0103] Melting point: approx. 80°C (estimated); 1 H NMR (300 MHz; C6D6): δ = 1.23 (s, 18H, C(CH3)3), 1.98 (s, 6H, cp-CH3), 5.82 (m, 4H, CH arom ), 6.89 (m, 4H, CH arom ) ppm; 13 C-NMR (75 MHz; C6D6): δ = 15.7 (s, 2C, cp-CH3), 30.4 (s, 6C, C(CH3)3), 57.3 (s, 2C, C(CH3)3), 110.3 (s, 2C, CH arom ), 113.5 (s, 2C, CH arom ), 121.4 (s, 1C, C arom . quatär ) ppm; IR (substance): ṽ = 2965 (m), 2925 (w), 2898 (w), 2864 (w), 1469 (w), 1454 (w), 1383 (w), 1354 (m), 1283 (s), 1243 (m), 1201 (s), 1047 (m), 932 (w), 842 (m), 773 (s), 618 (s), 555 (w), 493 (m), 469 (m), 436 (w), 425 (w) cm -1 . Note on Example 2:

[0104] The synthesis of [(MeCp)2Sc(dbt)] can be carried out - analogously to Example 1.2 - starting from [(MeCp)2ScCl]. Example 3.1: Preparation of [(EtCp)2Sc(dbt)] starting from [ScCl3*3 THF] [ScCl3*3 THF]→THF, 2h2 eq EtCpK[(EtCp)2ScCl]→Hexane, 0°C+Li(dbt)[(EtCp)2Sc(dbt)] 206.6 g of [ScCl3*3 THF] (562 mmol) as a solid were added portionwise over 3 hours to a solution of EtCpK (1.12 mol) in 900 mL THF at 0 °C. The reaction mixture was then stirred at room temperature for 2 hours and then heated to boiling for 5 hours. The solvent was removed in vacuo, and the residue was taken up in 500 mL n-hexane. The resulting suspension was filtered hot, and the residue was washed three times with 100 mL n-hexane each time. The filtrate was concentrated to a volume of approximately 250 mL and stored overnight at 0 °C. The crystalline [(EtCp)2ScCl] was then separated from the mother liquor by decantation, and the residue was dried in vacuo (yield: 75%; 127 g; 477 mmol). By recrystallization from the mother liquor, the yield of [(EtCp)2ScCl] could be further increased.

[0105] 73 g of [(EtCp)2ScCl] (273 mmol) were dissolved in 500 mL of n-hexane in a 1 L flask. 44.6 g of Li(dbt) (273 mmol) were then added in portions at 0 °C. After thawing, the mixture was stirred at room temperature for 16 hours. The resulting suspension was heated to boiling for 3 hours and then filtered while hot. The solvent in the filtrate was removed by distillation. [(EtCp)2Sc(dbt)] was isolated by distillation of the residue (under dynamic vacuum, i.e., at approximately 1*10 -3 mbar, at 155 °C) as a yellow oil. Yield: 73% (80 g; 201 mmol). Example 3.2: Representation of [(EtCp)2Sc(dbt)] starting from [(EtCp)2ScCl] [(EtCp)2ScCl]→Hexane, 0°C+Li(dbt)[(EtCp)2Sc(dbt)]

[0106] To 70 g of [(EtCp)2ScCl] (262 mmol) in 600 mL of n-hexane were added portionwise over 2 hours at 0 °C. The reaction mixture was stirred for 2 hours at 0 °C and then for 16 h at room temperature. The reaction mixture was then heated to boiling for 3 hours. The resulting suspension was filtered, and the filter cake was washed three times with 50 mL of n-hexane each time. The solvent of the filtrate was removed under vacuum. [(EtCp)2Sc(dbt)] was isolated by distillation of the residue (under dynamic vacuum, i.e., at approximately 1*10 -3 mbar, at 155 °C) as a yellow oil. Yield: 81% (82 g; 212 mmol).

[0107] Melting temperature: approx. 10 °C; 1 H NMR (300 MHz; C6D6): δ = 1.13 (t, 3 J HH = 7.6 H, 6H, CH2CH3), 1.24 (s, 18H, C(CH3)3), 2.37 (q, 3 J HH = 7.6H, 4H, CH2CH3), 5.89 (m, 8H, CH arom. ) ppm; 13C-NMR (75 MHz; C6D6): δ = 16.4 (s, 2C, CH2CH3), 23.8 (s, 2C, CH2CH3), 30.4 (s, 6C, C(CH3)3), 57.4 (s, 1C, C(CH3)3), 110.4 (s, 4C, CH arom ), 112.1 (s, 4C, CH arom. ), 128.6 (s, 2C, C arom, quartär ) ppm. Example 4: Preparation of [(EtCp)Sc(dbt)2] starting from [ScCl3*3 THF] [ScCl3*3 THF]→THF, 1hEtCpK[(EtCp)2ScCl2]→Toloul / THF, 0°C+2 eq Li(dbt)[(EtCp)Sc(dbt)2] 7.35 g of [ScCl3*3 THF] (20 mmol) were suspended in 50 mL of THF. A solution of EtCpK (20 mmol) in 100 mL of THF was added dropwise at room temperature over 1 hour. The reaction mixture was then stirred at room temperature for 16 hours. The solvent was removed under vacuum, and the residue was taken up in 50 mL of toluene. The resulting suspension was filtered, and the filter cake was washed three times with 20 mL of toluene each time. The filtrate was concentrated to a volume of approximately 30 mL and cooled to 0 °C. 6.4 g of Li(dbt) (20 mmol) were then added portionwise. After thawing, 5 mL of THF were added, and the reaction mixture was stirred at room temperature for 16 hours. The resulting suspension was filtered, the solvent from the filtrate was removed under vacuum, and the crude product was condensed under vacuum at 150°C. The product was obtained as a yellowish solid. Yield: 73% (6.6 g; 14.6 mmol).

[0108] Melting temperature: approx. 45 °C;1 H NMR (300 MHz; C6D6): δ = 1.18 (t, 3 J HH = 7.6 H, 3H, CH3), 1.31 (s, 36H, NC(CH3)3), 2.55 (q, 3 J HH = 7.6 Hz, 2H, CH2), 6.28 (s, 4H, CpH) ppm. Example 5: Preparation of [Cp2Ti(pbt)] starting from [Cp2TiCl]

[0109] To 10.68 g of [Cp2TiCl] (50 mmol) in 150 mL of n-hexane at 0 °C, 7.46 g of Li(pbt) (50 mmol) are added portionwise over 2 hours. The reaction mixture is stirred for 2 hours at 0 °C and then for 16 h at room temperature. The reaction mixture is then heated to boiling for 3 hours. The resulting suspension is filtered, and the filter cake is washed three times with 50 mL of n-hexane each time. The solvent of the filtrate is removed under vacuum. [(Cp)2Ti(pbt)] is obtained by distillation of the residue.

[0110] From the successful synthesis according to Example 1.2 and Example 3.2, it is concluded that a reaction of [Cp2TiCl] with Li(pbt) - analogous to Example 1.2 and Example 3.2 - results in the desired target compound [(Cp)2Ti(pbt)].

[0111] According to Example 1.2, the compound [(EtCp)2Y(dbt)] was obtained starting from [(EtCp)2YCl] and Li(dbt). Analogously, according to Example 3.2, the complex [(EtCp)2Sc(dbt)] was obtained starting from [(EtCp)2ScCl] and Li(dbt), in comparable yield and purity to the complex [(EtCp)2Y(dbt)].

[0112] If, instead of [(EtCp)2YCl] or [(EtCp)2ScCl], the titanium(III) complex [Cp2TiCl] is reacted with Li(pbt) - analogously to Example 1.2 or Example 3.2 - [(Cp)2Ti(pbt)] is obtained. Because Ti 3+ -Complexes, Y 3+ -Complexes and Sc 3+ -Complexes behave chemically analogously.

[0113] The yield and purity of [(Cp)2Ti(pbt)] obtained according to this example are similar or identical to those obtained by the syntheses described above for [(EtCp)2Y(dbt)] (Example 1.2) and for [(EtCp)2Sc(dbt)] (Example 3.2). Example 6: Preparation of [(iPrCp)(EtCp)Eu(dbt)] starting from [(iPrCp)(EtCp)EuCl]

[0114] 8.16 g of Li(dbt) (50 mmol) are added portionwise over 2 hours to 19.4 g of [(iPrCp)(EtCp)EuCl] (50 mmol) in 150 mL of n-hexane at 0 °C. The reaction mixture is stirred for 2 hours at 0 °C and then for 16 hours at room temperature. The reaction mixture is then heated to boiling for 3 hours. The resulting suspension is filtered, and the filter cake is washed three times with 50 mL of n-hexane each time. The solvent in the filtrate is removed under vacuum.

[0115] [(iPrCp)(EtCp)Eu(dbt)] is obtained by distillation of the residue.

[0116] From the successful synthesis according to Example 1.2 and Example 3.2, it is concluded that a reaction of [(iPrCp)(EtCp)EuCl] with Li(pbt) - analogous to Example 1.2 and Example 3.2 - results in the desired target compound [(iPrCp)(EtCp)Eu(dbt)].

[0117] According to Example 1.2, the compound [(EtCp)2Y(dbt)] was obtained starting from [(EtCp)2YCl] and Li(dbt). Analogously, according to Example 3.2, the complex [(EtCp)2Sc(dbt)] was obtained starting from [(EtCp)2ScCl] and Li(dbt), in comparable yield and purity to the complex [(EtCp)2Y(dbt)].

[0118] If, instead of [(EtCp)2YCl] or [(EtCp)2ScCl], the europium(III) complex [(iPrCp)(EtCp)EuCl] is reacted with Li(pbt) - analogously to Example 1.2 or Example 3.2 -, [(iPrCp)(EtCp)Eu(dbt)] is obtained. This is because lanthanide(III) complexes, such as Eu, which is used here as the starting material, 3+ -complex, behave chemically analogous to Y 3+-Complexes and Sc 3+ -complexes.

[0119] The yield and purity of [(iPrCp)(EtCp)Eu(dbt)] obtained according to this example are similar or identical to those obtained by the syntheses described above for [(EtCp)2Y(dbt)] (Example 1.2) and for [(EtCp)2Sc(dbt)] (Example 3.2). Example 7: Preparation of [(iPrCp)Lu(dbt)2] starting from [(iPrCp)LuCl2]

[0120] To 17.65 g of [(iPrCp)LuCl2] (50 mmol) in 150 mL of n-hexane at 0 °C, 16.32 g of Li(dbt) (100 mmol) are added portionwise over 2 hours. The reaction mixture is stirred for 2 hours at 0 °C and then for 16 hours at room temperature. The reaction mixture is then heated to boiling for 3 hours. The resulting suspension is filtered, and the filter cake is washed three times with 50 mL of n-hexane each time. The solvent of the filtrate is removed under vacuum. [(iPrCp)Lu(dbt)2] is obtained by distillation of the residue.

[0121] From the successful synthesis according to Example 1.2 and Example 3.2, it is concluded that a reaction of isopropyl cyclopentadienyllutetium dichloride [(iPrCp)LuCl2] with Li(pbt) - analogous to Example 1.2 and Example 3.2, but with a molar ratio [(iPrCp)LuCl2] : Li(pbt) of 1 : 2 - results in the desired target compound [(iPrCp)Lu(dbt)2].

[0122] According to Example 4, the compound [(EtCp)2Y(dbt)] was obtained starting from [(EtCp)2YCl] and Li(dbt), with a molar ratio of the reactants of 1:1. Analogously, according to Example 3.2, the complex [(EtCp)2Sc(dbt)] was obtained starting from [(EtCp)2ScCl] and Li(dbt), in a yield and purity comparable to the complex [(EtCp)2Y(dbt)].

[0123] If, instead of [(EtCp)2YCl] or [(EtCp)2ScCl], the lutetium(III) complex [(iPrCp)LuCl2] is reacted with Li(pbt) - analogously to Example 1.2 or Example 3.2, but with a molar ratio [(iPrCp)LuCl2] : Li(pbt) of 1 : 2 -, [(iPrCp)Lu(dbt)2] is obtained. This is because lanthanide(III) complexes, such as Lu used here as the starting material, 3+ -complex, behave chemically analogous to Y 3+ -Complexes and Sc 3+ -complexes.

[0124] The yield and purity of [(iPrCp)Lu(dbt)2] obtained according to this example are similar or identical to those obtained by the syntheses described above for [(EtCp)2Y(dbt)] (Example 1.2) and for [(EtCp)2Sc(dbt)] (Example 3.2). Example 8: Preparation of [(tBuCp)Er(dmt)(dpt)] starting from [(tBuCp)ErCl2]

[0125] To 17.97 g of [(tBuCp)ErCl2] (50 mmol) in 150 mL of n-hexane at 0 °C, 3.95 g of Li(dmt) (50 mmol) are added portionwise over 2 hours. Then, at 0 °C, 6.76 g of Li(dpt) (50 mmol) are added portionwise over 2 hours. The reaction mixture is stirred for 2 hours at 0 °C and then for 16 hours at room temperature. The reaction mixture is then heated to boiling for 3 hours. The resulting suspension is filtered, and the filter cake is washed three times with 50 mL of n-hexane each time. The solvent of the filtrate is removed under vacuum. [(tBuCp)Er(dmt)(dpt)] is obtained by distillation of the residue.

[0126] From the successful synthesis according to Example 1.2 and Example 3.2, it is concluded that a reaction of tert-butylcyclopentadienylerbium dichloride [(tBuCp)ErCl2] with the lithium salts Li(dmt) and Li(dpt) - analogous to Example 1.2 and Example 3.2, but with a molar ratio [(tBuCp)ErCl2]: lithium salts of 1 : 2 - results in the desired target compound [(tBuCp)Er(dmt)(dpt)].

[0127] According to Example 1.2, the compound [(EtCp)2Y(dbt)] was obtained starting from [(EtCp)2YCl] and Li(dbt), with a molar ratio of the reactants of 1:1. Analogously, according to Example 3.2, the complex [(EtCp)2Sc(dbt)] was obtained starting from [(EtCp)2ScCl] and Li(dbt), in a yield and purity comparable to the complex [(EtCp)2Y(dbt)].

[0128] If, instead of [(EtCp)2YCl] or [(EtCp)2ScCl], the erbium(III) complex [(tBuCp)ErCl2] - analogous to Example 1.2 or Example 3.2, but with a molar ratio of [(tBuCp)ErCl2] to lithium salts of 1 : 2 - is reacted with Li(dmt) and Li(dpt), [(tBuCp)Er(dmt)(dpt)] is obtained. This is because lanthanide(III) complexes, such as the Er used here as the starting material, 3+ -complex, behave chemically analogous to Y 3+ -Complexes and Sc 3+ -complexes.

[0129] The yield and purity of [(tBuCp)Er(dmt)(dpt)] obtained according to this example are similar or identical to those obtained by the syntheses described above for [(EtCp)2Y(dbt)] (Example 1.2) and for [(EtCp)2Sc(dbt)] (Example 3.2). Example 9: Preparation of [(Et2Cp)La(dbt)2] starting from [(Et2Cp)LaCl2]

[0130] To 16.55 g of [(Et2Cp)LaCl2] (50 mmol) in 200 mL of n-hexane at 0 °C, 16.32 g of Li(dbt) (100 mmol) are added portionwise over 2 hours. The reaction mixture is stirred for 2 hours at 0 °C and then for 16 hours at room temperature. The reaction mixture is then heated to boiling for 3 hours. The resulting suspension is filtered, and the filter cake is washed three times with 50 mL of n-hexane each time. The solvent of the filtrate is removed under vacuum. [(Et2Cp)La(dbt)2] is obtained by distillation of the residue.

[0131] From the successful synthesis according to Example 1.2 and Example 3.2, it is concluded that a reaction of diethylcyclopentadienyllanthanum dichloride [(Et2Cp)LaCl2] with the lithium salt Li(dbt) - analogous to Example 1.2 and Example 3.2, but with a molar ratio [(Et2Cp)LaCl2] : lithium salt of 1 : 2 - results in the desired target compound [(Et2Cp)La(dbt)2].

[0132] According to Example 1.2, the compound [(EtCp)2Y(dbt)] was obtained starting from [(EtCp)2YCl] and Li(dbt), with a molar ratio of the reactants of 1:1. Analogously, according to Example 3.2, the complex [(EtCp)2Sc(dbt)] was obtained starting from [(EtCp)2ScCl] and Li(dbt), in a yield and purity comparable to the complex [(EtCp)2Y(dbt)].

[0133] If, instead of [(EtCp)2YCl] or [(EtCp)2ScCl], the lanthanum(III) complex [(Et2Cp)LaCl2] is reacted with Li(dbt) - analogously to Example 1.2 or Example 3.2, but with a molar ratio of [(Et2Cp)LaCl2] to lithium salts of 1 : 2 -, [(Et2Cp)La(dbt)2] is obtained. This is because lanthanide(III) complexes, such as La, which is used here as the starting material, 3+ -complex, behave chemically analogous to Y 3+ -Complexes and Sc 3+ -complexes.

[0134] Yield and purity of [(Et2Cp)La(dbt) 2]obtained according to this example are similar or identical to those obtained by the syntheses described above for [(EtCp)2Y(dbt)] (Example 1.2) and for [(EtCp)2Sc(dbt)] (Example 3.2). Example 10: Representation of [(Cp*)(MeCp)Ce(dmt)] starting from [(Cp*)(MeCp)CeCl]

[0135] To 19.5 g of [(Cp*)(MeCp)CeCl] (50 mmol) in 200 mL of n-hexane at 0 °C, 3.95 g of Li(dmt) (50 mmol) are added portionwise over 2 hours. The reaction mixture is stirred for 2 hours at 0 °C and then for 16 hours at room temperature. The reaction mixture is then heated to boiling for 3 hours. The resulting suspension is filtered, and the filter cake is washed three times with 50 mL of n-hexane each time. The solvent of the filtrate is removed under vacuum. [(Cp*)(MeCp)Ce(dmt)] is obtained by distillation of the residue.

[0136] From the successful synthesis according to Example 1.2 and Example 3.2, it is concluded that a reaction of [(Cp*)(MeCp)CeCl] with Li(dmt) - analogous to Example 1.2 and Example 3.2 - results in the desired target compound [(Cp*)(MeCp)Ce(dmt)].

[0137] According to Example 1.2, the compound [(EtCp)2Y(dbt)] was obtained starting from [(EtCp)2YCl] and Li(dbt). Analogously, according to Example 3.2, the complex [(EtCp)2Sc(dbt)] was obtained starting from [(EtCp)2ScCl] and Li(dbt), in comparable yield and purity to the complex [(EtCp)2Y(dbt)].

[0138] If, instead of [(EtCp)2YCl] or [(EtCp)2ScCl], the cerium(III) complex [(Cp*)(MeCp)CeCl] is reacted with Li(dmt) - analogously to Example 1.2 or Example 3.2 -, [(Cp*)(MeCp)Ce(dmt)] is obtained. This is because lanthanide(III) complexes, such as the Ce used here as the starting material, 3+ -complex, behave chemically analogous to Y 3+ -Complexes and Sc 3+-complexes.

[0139] The yield and purity of [(Cp*)(MeCp)Ce(dmt)] obtained according to this example are similar or identical to those obtained by the syntheses described above for [(EtCp)2Y(dbt)] (Example 1.2) and for [(EtCp)2Sc(dbt)] (Example 3.2). Example 11: Preparation of [(iPrCp)(MeCp)Nd(dibt)] starting from [(iPrCp)(MeCp)NdCl]

[0140] 8.16 g of Li(dibt) (50 mmol) are added portionwise over 2 hours to 18.3 g of [(iPrCp)(MeCp)NdCl] (50 mmol) in 200 mL of n-hexane at 0 °C. The reaction mixture is stirred for 2 hours at 0 °C and then for 16 hours at room temperature. The reaction mixture is then heated to boiling for 3 hours. The resulting suspension is filtered, and the filter cake is washed three times with 50 mL of n-hexane each time. The solvent of the filtrate is removed under vacuum. [(iPrCp)(MeCp)Nd(dibt)] is obtained by distillation of the residue.

[0141] From the successful synthesis according to Example 1.2 and Example 3.2, it is concluded that a reaction of [(iPrCp)(MeCp)NdCl] with Li(dibt) - analogous to Example 1.2 and Example 3.2 - results in the desired target compound [(iPrCp)(MeCp)Nd(dibt)].

[0142] According to Example 1.2, the compound [(EtCp)2Y(dbt)] was obtained starting from [(EtCp)2YCl] and Li(dbt). Analogously, according to Example 3.2, the complex [(EtCp)2Sc(dbt)] was obtained starting from [(EtCp)2ScCl] and Li(dbt), in comparable yield and purity to the complex [(EtCp)2Y(dbt)].

[0143] If, instead of [(EtCp)2YCl] or [(EtCp)2ScCl], the cerium(III) complex [(iPrCp)(MeCp)NdCl] is reacted with Li(dibt) - analogously to Example 1.2 or Example 3.2 -, [(iPrCp)(MeCp)Nd(dibt)] is obtained. This is because lanthanide(III) complexes, such as Nd, which is used here as the starting material, 3+ -complex, behave chemically analogous to Y3+ -Complexes and Sc 3+ -complexes.

[0144] The yield and purity of [(iPrCp)(MeCp)Nd(dibt)] obtained according to this example are similar or identical to those obtained by the syntheses described above for [(EtCp)2Y(dbt)] (Example 1.2) and for [(EtCp)2Sc(dbt)] (Example 3.2).

[0145] The invention is not limited to one of the embodiments described above, but can be modified in many ways.

[0146] It can be seen that the invention relates to metal complexes according to the formula [M(L C )(L T )(L Z )]. Where: M = scandium, yttrium, lanthanide or titanium; Lc = unsubstituted cyclopentadienide anion, monoalkyl-substituted or polyalkyl-substituted cyclopentadienide anion; L T = Triazenide anion (R 1 -N3-R 2 ) - , where R 1 and R 2are independently a linear alkyl group having 1 to 10 carbon atoms or a branched alkyl group having 3 to 10 carbon atoms; Lz is a) independently of Lc selected from the group mentioned for Lc, or b) independently of L T selected from the for L T mentioned group.

[0147] The invention further relates to the use of at least one such metal complex for producing a layer consisting of at least one metal M or containing at least one metal M on a surface of a substrate, and for producing an electronic component. Furthermore, the invention relates to a substrate having a layer on a surface consisting of at least one metal M or containing at least one metal M and produced using such a metal complex.

[0148] The metal complexes presented here according to the general formula [M(L C )(LT )(L Z )] (I) can be prepared in a simple manner in high purity in good to very good yields, even on an industrial scale. Surprisingly and advantageously, these compounds are solvent-free after their isolation and purification by distillation or sublimation. It is particularly advantageous that the heteroleptic, variable complex design, which provides at least one ligand with a nitrogen-based, carbon-free backbone (triazenide ligand), enables the preparation of a large number of different, in particular tailor-made or application-specifically optimized, metal complexes. The synthesis protocol described herein can advantageously generally be used without significant changes to prepare a compound of the type [M(L C )(L T )(L Z )] (I) may be applied.

[0149] Another important advantage of the metal complexes of the type [M(L C )(L T )(L Z)] (I) is that they satisfy all the requirements placed on precursor materials for chemical vapor deposition (CVD) processes, such as MOCVD processes, MOVPE processes, and ALD processes, and are thus particularly predestined for use in processes of this type. The complex design of the compounds according to formula I not only advantageously promotes the incorporation of desired elements, namely the respective metal M and nitrogen, into the layer to be produced, but also reduces the incorporation of undesired elements, such as carbon. The use of these complexes can advantageously take place under ideal process temperatures, so that high-quality metal layers and metal-containing layers can be produced. The produced layers are of high quality in terms of their purity, composition, and morphology.Overall, the use of complexes of the type presented here in chemical vapor deposition processes is particularly advantageous from an (atomic) economic and ecological point of view.

[0150] All features and advantages arising from the claims, the description and the figures, including structural details, spatial arrangements and method steps, can be essential to the invention both individually and in a wide variety of combinations. QUOTES CONTAINED IN THE DESCRIPTION

[0000] This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature

[0000] US 2014 / 0335702 A1 [0004, 0026] WO 2019 / 115646 A1 [0006, 0008] WO 2019 / 115646

[0063] WO 2018 / 086730 A9

[0089]

Claims

[1] Metal complex according to the general formula [M(LC)(LT)(LZ)] (I), where i. M is a metal central atom selected from the group consisting of scandium (Sc), yttrium (Y), lanthanides and titanium (Ti), ii. Lc is a monoanionic pi-donor ligand selected from the group consisting of - unsubstituted cyclopentadienide anion, - simply alkyl-substituted cyclopentadienide anions according to the general formula R A CP - , where R A is selected from the group consisting of linear alkyl groups having 1 to 10 carbon atoms and branched alkyl groups having 3 to 10 carbon atoms, and - multiply alkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C , R D , R E and RF are independently selected from the group consisting of hydrogen (H), linear alkyl groups having 1 to 10 carbon atoms and branched alkyl groups having 3 to 10 carbon atoms, with the proviso that at least two of the radicals R B , R C, R D , R E and R F are not equal to hydrogen (H); iii. L T a triazenide anion according to the general formula (R 1 -N3-R 2 ) - where the radicals R 1 and R 2 are independently selected from the group consisting of linear alkyl groups having 1 to 10 carbon atoms and branched alkyl groups having 3 to 10 carbon atoms; and iv. Lz a a) monoanionic pi-donor ligand which, independently of the monoanionic pi-donor ligand Lc, is selected from the group consisting of - unsubstituted cyclopentadienide anion (C5H5 - ), - simply alkyl-substituted cyclopentadienide anions according to the general formula R A CP - , where R A is selected from the group consisting of linear alkyl groups having 1 to 10 carbon atoms and branched alkyl groups having 3 to 10 carbon atoms, and - multiply alkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C , R D , R E and R F are independently selected from the group consisting of hydrogen (H), linear alkyl groups having 1 to 10 carbon atoms and branched alkyl groups having 3 to 10 carbon atoms, with the proviso that at least two of the radicals R B , R C , R D , R E and RF are not equal to hydrogen (H); or b) Triazenide anion according to the general formula (R 1 -N3-R 2 ) - where the radicals R 1 and R 2 independently of each other and independently of the triazenide anion L T are selected from the group consisting of linear alkyl groups having 1 to 10 carbon atoms and branched alkyl groups having 3 to 10 carbon atoms. [2] A metal complex according to claim 1, wherein the lanthanide is selected from the group consisting of i. La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu; or ii. La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Er, Yb and Lu; or iii. La, Ce, Pr, Nd, Eu, Gd, Er, Yb and Lu; or iv. La, Ce, Nd, Eu, Er and Lu. [3] A metal complex according to claim 1 or claim 2, wherein i. the monoanionic pi-donor ligand Lc is selected from the group consisting of - unsubstituted cyclopentadienide anion (C5H5 - ); - simply alkyl-substituted cyclopentadienide anions according to the general formula R A CP - , where the rest R A is selected from the group consisting of methyl, ethyl, propyl, butyl, pentyl, and their isomers; - multiply alkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C, R D , R E and R F are independently selected from the group consisting of hydrogen (H), methyl, ethyl, propyl, butyl, pentyl, and their isomers, with the proviso that at least two of the radicals R B , R C , R D , R E and RF are not equal to hydrogen (H); and / or ii. at least one of the residues R 1 and R 2 of the triazenide anion L T is selected from the group consisting of linear alkyl groups having 1 to 6 carbon atoms and branched alkyl groups having 3 to 6 carbon atoms. [4] Metal complex according to at least one of claims 1 to 3, wherein the ligand Lz a) is a monoanionic pi-donor ligand, wherein the monoanionic pi-donor ligand Lz is selected from the group consisting of - unsubstituted cyclopentadienide anion (C5H5 - ); - simply alkyl-substituted cyclopentadienide anions according to the general Formula R A CP - , where the remainder R A is selected from the group consisting of methyl, ethyl, propyl, butyl, pentyl, and their isomers; - multiply alkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C, R D , R E and R F are independently selected from the group consisting of hydrogen (H), methyl, ethyl, propyl, butyl, pentyl, and their isomers, with the proviso that at least two of the radicals R B , R C, R D , R E and R F are not equal to hydrogen (H); or b) a triazenide anion according to the general formula (R 1 -N3-R 2 ) - wherein at least one of the radicals R 1 and R 2 of the triazenide anion Lz is selected from the group consisting of linear alkyl groups having 1 to 6 carbon atoms and branched alkyl groups having 3 to 6 carbon atoms. [5] Metal complex according to one or more of the preceding claims, wherein the metal complex has one or more of the following properties: i. the remainder R 1 and the rest R 2 of the triazenide anion L T are independently selected from the group consisting of methyl, ethyl, propyl, butyl, pentyl, and their isomers; ii. the remainder R 1 and the rest R 2 of the triazenide anion L T are identical; iii. Lz is a monoanionic pi-donor ligand, where the monoanionic pi-donor ligand Lc and the monoanionic pi-donor ligand Lz are identical; iv. Lz is a triazenide anion according to the general formula (R 1 -N3-R 2 ) - , where the remainder R 1 and the rest R 2 of the triazenide anion Lz are independently selected from the group consisting of methyl, ethyl, propyl, butyl, pentyl, and their isomers; v. Lz is a triazenide anion according to the general formula (R 1 -N3-R 2 ) - , where the remainder R 1 and the rest R 2 of the triazenide anion Lz are identical; vi. Lz is a triazenide anion according to the general formula (R 1 -N3-R 2 ) - , where the triazenide anion L T and the triazenide anion Lz are identical. [6] Metal complex according to one or more of the preceding claims, wherein the metal central atom M is selected from the group consisting of Sc, Y, La, Ce, Nd, Eu, Er, Lu and Ti, and A. the ligand Lz is a monoanionic pi-donor ligand, where i. the monoanionic pi-donor ligand Lc or the monoanionic pi-donor ligand Lz is selected or ii. the monoanionic pi-donor ligand Lc and the monoanionic pi-donor ligand Lz are selected independently of each other from the group consisting of - unsubstituted cyclopentadienide anion (C5H5 - ); - simply alkyl-substituted cyclopentadienide anions according to the general formula R A CP - , where the rest R A is selected from the group consisting of methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl; - multiply alkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C, R D , R E and R F are independently selected from the group consisting of hydrogen (H), methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl, with the proviso that at least two of the radicals R B , R C , R D , R E and R Fwhich are not equal to hydrogen (H), are identical; and the rest R 1 and the rest R 2 of the triazenide anion L T are independently selected from the group consisting of methyl, ethyl, iso-propyl, iso-butyl, sec-butyl and tert-butyl; or For example, the ligand Lz is a triazenide anion according to the general formula (R 1 -N3-R 2 ) - is, where i. the residues R 1 and R 2 one of the two triazenide anions L T and Lz are independently selected from the group consisting of methyl, ethyl, iso-propyl, iso-butyl, sec-butyl and tert-butyl, or ii. the residues R 1 and R 2 of the triazenide anion L T and the residues R 1 and R 2of the triazenide anion Lz are each independently selected from the group consisting of methyl, ethyl, iso-propyl, iso-butyl, sec-butyl and tert-butyl; and the monoanionic pi-donor ligand Lc is selected from the group consisting of - unsubstituted cyclopentadienide anion (C5H5 - ); - simply alkyl-substituted cyclopentadienide anions according to the general formula R A CP - , where the rest R A is selected from the group consisting of methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl; - multiply alkyl-substituted cyclopentadienide anions according to the general formula R B R C R D R E R F CP - , where the residues R B , R C , R D , R E and R Fare independently selected from the group consisting of hydrogen (H), methyl, ethyl, n-propyl, iso-propyl, n-butyl, iso-butyl, sec-butyl and tert-butyl, with the proviso that at least two of the radicals R B , R C , R D , R E and R F which are not equal to hydrogen (H), are identical. [7] Metal complex according to one or more of the preceding claims, wherein the metal complex i. is vaporizable without decomposition or is sublimable without decomposition, and / or ii. the molecular weight of the metal complex is less than 600 g / mol. [8] Method for producing a layer which i. consists of at least one metal M, wherein the at least one metal M is selected from the group consisting of scandium, yttrium, lanthanides and titanium, or ii. contains at least one metal M, wherein the at least one metal M is selected from the group consisting of scandium, yttrium, lanthanides and titanium, on a surface of a substrate, in particular a semiconductor substrate, using - at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of claims 1 to 7, or - a solution comprising at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of claims 1 to 7 and an aprotic-nonpolar solvent, comprising the following steps: A. Provision - of at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of claims 1 to 7, or - the solution comprising at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of claims 1 to 7 and an aprotic-nonpolar solvent, and B. Deposition of the layer which i. which consists of at least one metal M, or ii. which contains at least one metal M, on the surface of the substrate using the at least one metal complex provided in step A. as a precursor compound. [9] Substrate having on a surface at least one layer which i. consists of at least one metal M, wherein the at least one metal M is selected from the group consisting of scandium, yttrium, lanthanides and titanium, or ii. contains at least one metal M, wherein the at least one metal M is selected from the group consisting of scandium, yttrium, lanthanides and titanium, wherein the metal layer consisting of the at least one metal M, or the layer containing the at least one metal M, is produced using - at least one metal complex according to the general formula [M(L C )(L T )(L Z ) (I)] according to one or more of claims 1 to 7, or - a solution comprising at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of claims 1 to 7 and an aprotic-nonpolar solvent. [10] Method for producing an electronic component, in particular an electronic semiconductor component, using - at least one metal complex according to the general formula [M(L C )(L T )(LZ )] (I) according to one or more of claims 1 to 7, or - a solution comprising at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of claims 1 to 7 and an aprotic-nonpolar solvent, comprising the following steps: A. Provision - of at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of claims 1 to 7, or - the solution comprising at least one metal complex according to the general formula [M(L C )(L T )(L Z )] (I) according to one or more of claims 1 to 7 and an aprotic-nonpolar solvent, B. Deposition of a layer which i. consists of at least one metal M, or ii. containing at least one metal M, on a surface of a substrate, and C. Completion of the electronic component, in particular the electronic semiconductor component.

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