Vacuum pump

Abstract

A vacuum pump 10, such as a turbomolecular pump, comprises a rotor 12 in a housing 26 and comprising a rotor shaft 32. A stator 14 in the housing cooperatives with the rotor. A magnet device 16 acts o

Claims

1. A vacuum pump (10), particularly a turbomolecular pump, comprising: a housing (26);a rotor (12) arranged in the housing (26), the rotor (12) comprising a rotor-shaft (32);a stator (14) arranged in the housing (26) and cooperatively associated with the rotor (12); anda magnet device (16) acting on the rotor (12), the magnet device (16) comprising a coil wound on a coil carrier (20);wherein the coil carrier (20) is adapted to seal a vacuum area (36) of the vacuum pump (10) against an external environment (38).

2. The vacuum pump (10) according to claim 1, wherein the housing (26) and the coil carrier (20) form a casing enclosing a chamber, particularly a vacuum chamber, of the vacuum pump (10).

3. The vacuum pump (10) according to claim 1 or 2, wherein the coil carrier and / or the coil (18) is arranged surrounding, preferably concentrically surrounding, the rotor shaft (32).

4. The vacuum pump (10) according to any one of claims 1-3, wherein the coil (18) is arranged in the external environment (38), preferably the atmosphere, outside the vacuum area (36).

5. The vacuum pump (10) according to any one of claims 1-4, wherein the coil carrier (20) comprises, particularly consist of, of one or more of the following materials POM, PC, PET, PBT, PSU, PPS, PI, PEI, PAI and PEEK.

6. The vacuum pump (10) according to any one of claims 1-5, wherein the magnet device (16) comprises at least two coils (18), preferably in a differential coil arrangement, wound on the coil carrier (20).7, The vacuum pump (10) according to any one of claims 1-6, wherein the vacuum pump (10) comprises an active magnetic bearing (19) supporting the rotor (12), wherein the coil (18) of the magnet device corresponds to the actuator of the magnetic bearing (19).

8. The vacuum pump (10) according to claim 7, wherein the magnetic bearing (19) is an axial magnetic bearing (19).

9. The vacuum pump (10) according to any one of claims 1 to 8, wherein the rotor (12) comprises a, preferably passive, magnetic counterpart for the coil (18), magnetically interacting with the coil (18).

10. The vacuum pump (10) according to claim 9, wherein the counterpart protrudes radially from the rotor (12).

11. The vacuum pump (10) according to any one of claims 1 to 10, wherein the vacuum pump (10) comprises at least one sealing element, particularly an O-ring, arranged between the housing (26) and the coil carrier and / or between a cover (24) of the vacuum pump (10) and the coil carrier (20).

12. The vacuum pump (10) according to any one of claims 1 to 11, wherein the vacuum pump (10) comprises a passive emergency bearing that axially supports the rotor (12).

13. The vacuum pump (10) according to any one of claims 1 to 12, wherein the coil carrier (20) is arranged on a pre-vacuum side (54) of the vacuum pump (10).

14. The vacuum pump (10) according to any one of claims 1 to 13, wherein the vacuum pump (10) comprises a radial bearing (40) for the rotor (12), preferably a passive magnetic bearing."14

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