Pellicle frame laminate and method for manufacturing pellicle using the same

Abstract

SOLUTION: Provided is a pellicle frame laminate with a first adhesive agent layer on an upper end face of a pellicle frame having the upper end face and a lower end face, the first adhesive agent layer being covered with a first protective sheet, and a second adhesive agent layer on the lower end face, the second adhesive agent layer being covered with a second protective sheet. Also provided is a packaged product obtained by packaging the pellicle frame laminate with a container having a tray on which the pellicle frame laminate is placed and a lid. Further provided is a method for manufacturing pellicle, the method comprising peeling off the first protective sheet of the pellicle frame laminate, attaching a separately prepared pellicle film to the exposed first adhesive agent layer.EFFECT: The present invention enables assembly of pellicle even in a place to which an adhesive agent for a pellicle film cannot be applied, by forming an adhesive agent layer on both an upper end face and a lower end face of a pellicle frame and using the pellicle frame protected by protective sheets on both faces.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a pellicle frame laminate that is attached to a lithography photomask as a dust guard, and a method for manufacturing a pellicle using the same. [Background technology]

[0002] In recent years, LSI design rules have been miniaturized to the sub-quarter micron level, and as a result, the wavelength of exposure light sources has been shortened. That is, exposure light sources have shifted from g-line (436 nm) and i-line (365 nm) from mercury lamps to KrF excimer lasers (248 nm) and ArF excimer lasers (193 nm), and furthermore, EUV exposure using EUV (Extreme Ultra Violet) light with a dominant wavelength of 13.5 nm is being considered.

[0003] In the manufacture of semiconductors such as LSIs and VLSIs, or liquid crystal display panels, patterns are created by irradiating light onto a semiconductor wafer or an original plate for liquid crystal display. However, if dust is attached to the lithography photomasks and reticles (collectively referred to as "exposure original plates") used in this case, the dust can absorb or bend the light, causing the transferred pattern to be deformed or have rough edges, as well as causing the base to become blackened and dirty, compromising the dimensions, quality, appearance, etc.

[0004] These operations are usually carried out in a clean room, but it is still difficult to keep the exposure master clean at all times. Therefore, a method is generally adopted in which a pellicle is attached to the surface of the exposure master as a dust cover before exposure. In this case, foreign particles do not adhere directly to the surface of the exposure master, but to the pellicle, so if the focus is set on the pattern of the exposure master during lithography, the foreign particles on the pellicle will not affect the transfer.

[0005] The basic structure of this pellicle is that a pellicle film with high transmittance to the light used for exposure is stretched on the upper end surface of a pellicle frame made of aluminum or titanium, and an airtight gasket is formed on the lower end surface. The airtight gasket generally uses an adhesive layer made of a pressure-sensitive adhesive, and a protective sheet is attached to protect this adhesive layer. The pellicle film is made of nitrocellulose, cellulose acetate, fluorine-based polymers, etc., which have good transmittance of the light used for exposure (g-line (436 nm) from a mercury lamp, i-line (365 nm), KrF excimer laser (248 nm), ArF excimer laser (193 nm), etc.), but for EUV exposure, ultrathin silicon films and carbon films are being considered as pellicle films.

[0006] Unlike conventional transmissive exposure masters, EUV exposure masters are reflective. Therefore, the EUV light passes through the pellicle film twice. If the EUV light transmittance of the pellicle film is 80%, the final transmittance after the EUV light passes through the pellicle film twice will be 64%. To improve the final transmittance, the EUV light transmittance of the pellicle film must be extremely high. To obtain extremely high transmittance, the pellicle film must be made thin. As a result, the pellicle film becomes very susceptible to cracking.

[0007] When a pellicle having a pellicle film that is easily broken as described above is manufactured by a pellicle manufacturer and shipped to a user, there is a problem that the pellicle film (thin film) is frequently damaged due to vibrations and changes in air pressure during transportation. In order to eliminate this damage to the thin film during transportation, it is considered to manufacture the pellicle film at a location adjacent to the user's photomask manufacturing factory, attach it to a pellicle frame, and complete the pellicle. In other words, by manufacturing the pellicle film at the location where the pellicle will ultimately be used, it is possible to eliminate the need for long-distance transportation and the risk of damage during transportation. On the other hand, the pellicle frame to be combined with the pellicle film can be manufactured by the pellicle manufacturer as usual and shipped to a pellicle assembly factory adjacent to the photomask manufacturing factory. It was considered that the pellicle assembly factory would assemble the pellicle by applying a liquid adhesive to the upper end surface of the pellicle frame, and then attaching a polysilicon thin film to it and hardening the adhesive. However, the photomask manufacturing factory is usually located in a corner of a wafer process factory, and the use of organic materials is restricted, which makes it difficult to apply the adhesive.

[0008] Patent Document 1 proposes a pellicle that uses a silicone-based adhesive as an adhesive for bonding a pellicle membrane made of fluororesin to the upper end surface of a pellicle frame. In this technology, the pellicle membrane is attached to the pellicle frame in a series of steps, so the pellicle needs to be shipped with the pellicle membrane attached, which entails the risk of damaging the pellicle membrane.

[0009] As a related technique, Patent Document 2 describes a method of manufacturing a pellicle by attaching a specific adhesive sheet to a pellicle membrane and bonding it to a pellicle frame. [Prior art documents] [Patent documents]

[0010] [Patent Document 1] JP 2001-249441 A [Patent Document 2] International Publication No. 2016 / 175019 Summary of the Invention [Problem to be solved by the invention]

[0011] The present invention has been developed in consideration of the above-mentioned circumstances, and aims to provide a pellicle frame laminate that allows for smooth production of a pellicle by attaching a pellicle frame to a pellicle membrane even in places where it is not possible to apply an adhesive for the pellicle membrane, and a method for manufacturing a pellicle using the same. [Means for solving the problem]

[0012] In order to achieve the above-mentioned object, the present invention provides a pellicle frame laminate, characterized in that a pellicle frame having an upper end surface and a lower end surface has a first adhesive layer on the upper end surface, the first adhesive layer being covered with a first protective sheet, and has a second adhesive layer on the lower end surface, the second adhesive layer being covered with a second protective sheet.

[0013] That is, the present invention provides a pellicle frame laminate in which an adhesive layer is formed on both the upper and lower end faces of the pellicle frame, and both are protected by a protective sheet. By using this pellicle frame laminate with double-sided adhesive, the protective cover on the upper end face of the pellicle frame can be peeled off to expose the adhesive layer, and the pellicle can be completed by contacting the pellicle membrane thereto. Therefore, it is possible to omit the application of adhesive for the pellicle membrane at the pellicle manufacturing factory, which has been a problem in the past.

[0014] Accordingly, the present invention provides the following pellicle frame laminate and method for manufacturing a pellicle. 1. A pellicle frame laminate comprising a pellicle frame having an upper end surface and a lower end surface, a first adhesive layer on the upper end surface, the first adhesive layer being covered with a first protective sheet, and a second adhesive layer on the lower end surface, the second adhesive layer being covered with a second protective sheet. 2. The pellicle frame laminate according to the above item 1, wherein the adhesive layer is formed from a pressure-sensitive adhesive (pressure-sensitive adhesive). 3. The pellicle frame laminate according to 1 or 2 above, wherein the shape or color of the first protective sheet is different from the shape or color of the second protective sheet. 4. The pellicle frame laminate according to any one of the above 1 to 3, wherein the first protective sheet or the second protective sheet has a frame shape that conforms to the shape of the pellicle frame. 5. The pellicle frame laminate according to any one of the above 1 to 4, wherein the first protective sheet or the second protective sheet has a tab. 6. A pellicle frame laminate as described in 5 above, wherein the first protective sheet or the second protective sheet has a frame shape that conforms to the shape of the pellicle frame, and the tab protrudes from the outer edge of the pellicle frame. 7. The pellicle frame laminate according to claim 5 or 6, wherein the tab is provided at a corner of the first protective sheet or the second protective sheet. 8. A pellicle frame laminate described in any of 5 to 7 above, wherein the first protective sheet and the second protective sheet each have a tab, and each tab is arranged so that when the pellicle frame is observed from a direction perpendicular to a plane including the upper end surface, there is an area where the tab of the first protective sheet and the tab of the second protective sheet do not overlap. 9. A pellicle frame laminate described in any of 5 to 7 above, wherein the first protective sheet and the second protective sheet each have a tab, the pellicle frame, the first protective sheet and the second protective sheet are in the form of a rectangular frame, and when the pellicle frame is observed from a direction perpendicular to a plane including the upper end surface, the side of the rectangle on which the tab of the first protective sheet is arranged is different from the side of the rectangle on which the tab of the second protective sheet is arranged. 10. The pellicle frame laminate according to claim 9, wherein the side of the rectangle on which the tab of the first protective sheet is arranged and the side of the rectangle on which the tab of the second protective sheet is arranged are adjacent sides. 11. The pellicle frame laminate according to claim 9, wherein the side of the rectangle on which the tab of the first protective sheet is arranged and the side of the rectangle on which the tab of the second protective sheet is arranged are opposing sides. 12. A pellicle frame laminate described in any one of 5 to 11 above, wherein the first protective sheet and the second protective sheet each have a tab, and the length of the tab of the first protective sheet is different from the length of the tab of the second protective sheet. 13. A pellicle frame laminate according to any one of claims 4 to 12, wherein the outer diameter of the first protective sheet (excluding the tab if there is a tab) or the outer diameter of the second protective sheet has an area that is within ±10% of the outer diameter of the pellicle frame. 14. A pellicle frame laminate described in any one of 4 to 13 above, wherein the inner diameter of the first protective sheet (excluding the tab if present) or the inner diameter of the second protective sheet has an area that is within ±10% of the inner diameter of the pellicle frame. 15. The pellicle frame laminate according to any one of claims 4 to 14, wherein the first protective sheet or the second protective sheet has an area whose width is wider than the width of the pellicle frame. 16. A pellicle frame laminate described in any of 4 to 15 above, wherein the inner diameter of one of the first protective sheet and the second protective sheet is smaller than 90% of the inner diameter of the pellicle frame, the one protective sheet has an area whose width is wider than the width of the pellicle frame, and the other protective sheet has an area whose inner diameter is ±10% of the inner diameter of the pellicle frame. 17. A pellicle frame laminate according to any one of 1 to 16 above, which is used as a pellicle frame of a pellicle for EUV exposure. 18. A packaged product comprising the pellicle frame laminate according to any one of 1 to 17 above packaged in a container having a tray portion for placing the pellicle frame laminate thereon and a lid portion. 19. A method for manufacturing a pellicle, comprising peeling off the first protective sheet of a pellicle frame laminate described in any one of 1 to 17 above, attaching a separately prepared pellicle membrane to the exposed first adhesive layer, and assembling the pellicle membrane to a pellicle frame. 20. A method for producing a pellicle as described in claim 19, wherein the pellicle frame laminate is a pellicle frame laminate after transportation. 21. A method for manufacturing a pellicle as described in claim 20, wherein the transportation includes transportation in an environment having atmospheric pressure fluctuations. 22. A method for manufacturing a pellicle described in any one of 19 to 21 above, in which the pellicle membrane is formed on a frame-shaped support frame, and the pellicle membrane is assembled to the pellicle frame by attaching the support frame to a first adhesive layer. 23. The method for producing a pellicle according to any one of the above 19 to 22, wherein the pellicle to be assembled is a pellicle for EUV exposure. 24. A method for transporting the pellicle frame laminate according to any one of 1 to 17 above or the package according to 18 above in an environment accompanied by atmospheric pressure fluctuations. Effect of the Invention

[0015] According to the present invention, by forming an adhesive layer on both the upper and lower end faces of a pellicle frame and using a pellicle frame in which both are protected by a protective sheet, it is possible to assemble a pellicle even in a place where it is impossible to apply an adhesive for a pellicle membrane. In addition, when manufacturing a pellicle, it is possible to fix the thin film by simply peeling off the protective sheet for the adhesive layer and contacting the pellicle membrane, which simplifies the assembly process. [Brief description of the drawings]

[0016] [Figure 1] FIG. 1 is a schematic cross-sectional view showing an example of a pellicle frame laminate of the present invention. [Diagram 2] 1A and 1B show an example of a pellicle frame, in which (A) is a plan view seen from the upper end surface side, and (B) is a front view seen from the outer short side surface side. [Diagram 3] FIG. 1 shows an example of a protective sheet used in the present invention, where (A) is a plan view of a first protective sheet, and (B) is a plan view of a second protective sheet. [Figure 4]FIG. 13 is a schematic diagram illustrating variations in the arrangement of tabs on the protective sheets, where (A) is a schematic diagram of a first protective sheet, and (B) is a schematic diagram of a second protective sheet. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] The present invention will now be described in further detail. The present invention is a pellicle frame laminate in which an adhesive layer is formed on both the upper and lower end surfaces of a pellicle frame, both of which are protected by a protective sheet.

[0018] If the pellicle frame used in the present invention is frame-shaped, its shape corresponds to the shape of the photomask on which the pellicle is to be mounted, and is generally a quadrilateral (rectangular or square) frame shape.

[0019] The pellicle frame has a surface for providing a pellicle film (here, the upper end surface) and a surface that faces the photomask when the photomask is attached (here, the lower end surface).

[0020] There is no limitation on the material of the pellicle frame, and any known material can be used, such as Si, SiO2, SiN, quartz, Invar, titanium, titanium alloys, and aluminum alloys, among which metals are preferred because of their ease of processing and light weight.

[0021] The dimensions of the pellicle frame are not particularly limited, but since the height of the EUV pellicle is limited to 2.5 mm or less, the thickness of the EUV pellicle frame is smaller than that, that is, less than 2.5 mm.

[0022] Furthermore, the thickness of the pellicle frame for EUV is preferably 1.5 mm or less, taking into consideration the thickness of the pellicle film, mask adhesive, etc.

[0023] Furthermore, the outer surface of the pellicle frame is usually provided with a jig hole used for handling or peeling the pellicle from the photomask. The size of the jig hole is 0.5 to 1.0 mm in length in the thickness direction of the pellicle frame (diameter if circular). There is no particular limitation on the shape of the jig hole, and it may be circular or rectangular.

[0024] The pellicle frame is also provided with a vent for mitigating pressure changes inside and outside the pellicle. There is no particular limit to the shape or number of the vent. A cutout may be provided on the upper or lower end surface of the pellicle frame to serve as a vent. A filter may be provided in the vent to prevent foreign matter from entering the pellicle. There is no particular limit to the location where the filter is provided, and examples of the location include the inner surface of the pellicle frame, the inside of the vent, or the outer surface of the pellicle frame.

[0025] An adhesive for the pellicle film is provided on the upper end surface of the pellicle frame. The term "adhesive" here includes not only normal adhesives but also pressure-sensitive adhesives (pressure-sensitive adhesives). There is no limitation on the material of this adhesive, and known resin materials such as silicone-based adhesives and acrylic-based adhesives can be used. In order to strongly hold the pellicle film, it is preferable to adopt an adhesive with strong adhesive power. There is no particular limitation on the shape of the adhesive, but it is preferable to flatten the adhesive so that the pellicle film and the pellicle frame can be attached with a weak force when assembling the pellicle film. There is no particular limitation on the thickness of the adhesive layer, but since the height of the pellicle is limited to 2.5 mm, it is preferable that it is 0.5 mm or less.

[0026] Furthermore, a photomask adhesive for mounting on a photomask is formed on the lower end surface of the pellicle frame. The term "adhesive" here includes not only normal adhesives but also pressure-sensitive adhesives. In general, the photomask adhesive is preferably provided over the entire circumference of the pellicle frame. There is no particular limit to the material of the adhesive, and known resin materials such as silicone-based adhesives and acrylic-based adhesives can be used. There is no particular limit to the shape of the photomask adhesive, and it may be processed to be flat. There is no particular limit to the thickness of the adhesive layer, but since the height of the pellicle is limited to 2.5 mm, it is preferable that the thickness be 0.5 mm or less.

[0027] The pellicle frame laminate of the present invention has a first adhesive layer on the upper end surface of the pellicle frame, the first adhesive layer being covered with a first protective sheet, and a second adhesive layer on the lower end surface, the second adhesive layer being covered with a second protective sheet. That is, in the present invention, protective sheets for protecting the above-mentioned pellicle film adhesive and photomask adhesive are provided so as to cover these adhesives. In the following description, the first protective sheet and the second protective sheet may be simply referred to as "protective sheets".

[0028] The material of the protective sheet is not particularly limited, but may be, for example, polyethylene terephthalate (PET), polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), polyethylene (PE), polycarbonate (PC), polyvinyl chloride (PVC), polypropylene (PP), etc. If necessary, a release agent such as a silicone-based release agent or a fluorine-based release agent may be applied to the surface of the protective sheet. By applying the release agent, it becomes easier to peel the protective sheet from the adhesive layer.

[0029] There is no particular restriction on the shape of the protective sheet, so long as it is large enough to completely cover the adhesive. It is desirable for the protective sheet to have a frame shape that matches the shape of the pellicle frame. It is easier to handle and wash than a non-frame-shaped sheet (e.g., a full-sheet shape), making it economical and resource-friendly. In addition, the shape of the protective sheet may be different between the pellicle membrane adhesive side and the photomask adhesive side.

[0030] When the protective sheet has a frame shape, it is desirable that the outer diameter of the protective sheet has a range of ±10% of the outer diameter of the pellicle frame, taking into consideration the ease of handling when inserting a jig pin into a jig hole provided on the outer surface of the pellicle frame, etc. The outer diameter of the protective sheet means the size from the center of the protective sheet to the outer peripheral edge, and in the case of a tab, it is the size to the outer peripheral edge excluding the tab.

[0031] In addition, the inner diameter of the protective sheet desirably has an area that is ±10% of the inner diameter of the pellicle frame in order to easily inspect the inner surface of the pellicle frame after the protective sheet is attached. Note that the inner diameter of the protective sheet means the size from the center of the protective sheet to the inner edge, and if there is a tab, it is the size to the inner peripheral edge excluding the tab.

[0032] The protective sheet may also have an area with a width greater than the width of the pellicle frame. Suction pads, such as vacuum pads, may be used to facilitate handling of the protective sheet.

[0033] Of the first and second protective sheets, one of the protective sheets has an inner diameter smaller than 90% of the inner diameter of the pellicle frame and has a region wider than the width of the pellicle frame, and the other protective sheet has an inner diameter of a region that is ±10% of the inner diameter of the pellicle frame. By using such protective sheets, the inner surface of the pellicle frame can be easily inspected in a state where the pellicle frame laminate has the adhesive layer covered with the protective sheet.

[0034] The thickness of the protective sheet is not particularly limited, but is preferably 0.05 to 0.5 mm. If the thickness of the protective sheet exceeds 0.5 mm, the protective sheet loses flexibility (pliability) and the adhesive layer may be deformed. If the thickness of the protective sheet is less than 0.05 mm, the protective sheet becomes too soft and has poor handling properties.

[0035] The shape or color of the first protective sheet is desirably different from the shape or color of the second protective sheet. By making the protective sheets have different shapes or colors, it becomes easier to determine the upper and lower positions of the pellicle frame, and the workability of assembling the pellicle can be improved.

[0036] A tab can be provided on a part of the protective cover so that the protective sheet can be easily gripped when peeling it off. The tab can be disposed in a manner that protrudes from the outer edge of the pellicle frame or at a corner of the protective sheet. By providing this tab, the protective sheet can be easily peeled off. The number of tabs provided on the protective sheet can be one or more.

[0037] With regard to the arrangement of the above-mentioned tabs, in order to enable easy peeling off of each protective sheet and further improve work efficiency, it is desirable to arrange each tab so that there is an area where the tabs of the first protective sheet and the tabs of the second protective sheet do not overlap when the pellicle frame is observed from a direction perpendicular to the plane including the upper end surface.

[0038] Furthermore, when the pellicle frame, the first protective sheet, and the second protective sheet are in the form of a rectangular frame, when the pellicle frame is observed from a direction perpendicular to a plane including the upper end face, it is preferable that the side of the rectangle on which the tab of the first protective sheet is arranged is different from the side of the rectangle on which the tab of the second protective sheet is arranged. Specific embodiments include an embodiment in which the side of the rectangle on which the tab of the first protective sheet is arranged is adjacent to the side of the rectangle on which the tab of the second protective sheet is arranged, and an embodiment in which the side of the rectangle on which the tab of the first protective sheet is arranged is opposed to the side of the rectangle on which the tab of the second protective sheet is arranged.

[0039] By making the length of the tab of the first protective sheet different from the length of the tab of the second protective sheet, the handleability of the protective sheets can be improved.

[0040] Figure 1 is a schematic cross-sectional view showing an example of a pellicle frame laminate. This pellicle frame laminate 10 is a laminate having a pellicle frame 1 having an upper end surface 1a and a lower end surface 1b, a first adhesive layer 11 on the upper end surface 1a, the first adhesive layer being covered with a first protective sheet 21, and a second adhesive layer 12 on the lower end surface 1b, the second adhesive layer being covered with a second protective sheet 22.

[0041] Fig. 2(A) is a plan view of the pellicle frame 1 as viewed from the upper end surface side, and (B) is a front view as viewed from the short side outer surface side. In each drawing, reference numeral 1a denotes the upper end surface of the pellicle frame, and reference numeral 1b denotes the lower end surface of the pellicle frame. In the upper end surface of the pellicle frame 1 in Fig. 1, one notch portion 1c, 1c is provided on each of the upper end surfaces of the short sides, and one notch portion 1c, 1c is also provided on each of the upper end surfaces of the long sides, for a total of four notches. The notches are formed in communication from the outer surface 1d to the inner surface 1e.

[0042] 3(A) is a plan view of the first protective sheet 21, and (B) is a plan view of the second protective sheet 22. In FIG. 3(A), the first protective sheet has a wide frame shape, and a substantially rectangular tab 21a protrudes from the outer edge of the pellicle frame near one end (corner) of the long side of the protective sheet. On the other hand, as shown in FIG. 3(B), the second protective sheet 22 has a frame shape narrower than the first protective sheet, and a substantially rectangular tab 22a protrudes from the outer edge of the pellicle frame near one end (corner) of the long side of the protective sheet. However, when the pellicle frame is observed from a direction perpendicular to the plane including the upper end surface, the long side of the rectangle on which the tab of the first protective sheet is arranged and the long side of the rectangle on which the tab of the second protective sheet is arranged do not overlap, but are opposite sides.

[0043] Fig. 4 explains variations in the arrangement of the tabs of the protective sheet shown in Fig. 3. Various arrangements of the tabs are exemplified, without being limited to those shown in Fig. 3. Fig. 4(A) shows variations of the tabs (21b to 21d) provided on the first protective sheet, and examples include tab 21b provided at one of the four corners (corner portion) of the first protective sheet 21, tab 21c provided midway along the long side, and tab 21d provided near the corner portion on the short side. As shown in Fig. 4(A), each tab (21b to 21d) is arranged so as not to overlap with tab 22a of the second protective sheet located below the pellicle frame when viewed from above.

[0044] 4(B) shows variations of tabs (22b to 22h) provided on the second protective sheet, including tab 22b provided near the corner of the short side of second protective sheet 22, tab 22c provided on the inside of protective sheet 22, and tabs 22d, 22f, and 22h provided midway along the long side or near the corner. As shown in FIG. 4(B), each tab (22b to 22h) is arranged so as not to overlap with tab 21a of the first protective sheet located above the pellicle frame when viewed from above.

[0045] The shape of the tab is a square or rectangular shape as shown in the drawings, but various other shapes, such as a shape partially including a curved portion such as a circular arc, can also be used.

[0046] [Transportation method to pellicle assembly factory] A method for transporting the pellicle frame laminate to the pellicle assembly factory will be described below, but this is merely an example and is not intended to limit the interpretation of the present invention.

[0047] The pellicle frame laminate is stored in a dedicated container, and the pellicle is assembled and transported to a factory. There is no particular restriction on the shape of the dedicated storage container, but a container having a structure consisting of a lid and a tray is preferable because of the ease of cleaning the storage container. There is no particular restriction on the material of the storage container, and resins such as polycarbonate and metals such as aluminum can be used. After storing the pellicle frame laminate in this storage container, the four corners of the storage container are fastened with clips. There is no restriction on the material of the clips. The storage container with clips is placed in a clean bag, and the bag is closed with tape. This can be packed in a cardboard box together with cushioning material and transported to a pellicle assembly factory.

[0048] Since the pellicle frame laminate does not have a pellicle membrane attached, there is no problem of damage to the pellicle membrane even when it is transported to a pellicle assembly factory in an environment with atmospheric pressure fluctuations. The transportation method involves various environments such as in the air on an airplane, or by putting the package or laminate in a bag and vacuuming it.

[0049] [Manufacturing method of pellicle at pellicle assembly factory] The method for manufacturing a pellicle at a pellicle assembly plant comprises the steps of removing the pellicle frame laminate from a storage container, peeling off the first protective sheet located on the upper end surface side of the pellicle frame, and pressing a pellicle membrane onto the exposed first adhesive layer.

[0050] There are no particular limitations on the method for removing the pellicle frame from the storage container, and examples include a method in which after lifting the protective sheet, a jig is inserted into the jig hole in the pellicle frame to lift the pellicle frame, or a method in which an adsorption pad is attached to the first protective sheet on the upper end surface side of the pellicle frame and adsorbed thereto to lift it up.

[0051] The method for peeling off the protective sheet on the upper end surface of the pellicle frame is not particularly limited, and for example, the protective sheet can be peeled off manually or automatically.

[0052] There is no particular limitation on the method of pressing the pellicle membrane onto the exposed first adhesive layer. Since the above-mentioned first adhesive layer is made of an adhesive, it is possible to fix the pellicle membrane by simply placing it on the adhesive without pressing it hard. The pellicle membrane may be made larger than the pellicle frame, and after assembling it to the pellicle frame, the excess pellicle membrane may be cut off, or a pellicle membrane previously cut to the size of the pellicle frame may be attached to the pellicle frame. The latter method is preferably adopted because it reduces the possibility of foreign matter adhering.

[0053] The pellicle film is not limited to a thin film, and a pellicle film including a support frame for supporting the pellicle film can also be used. For example, as described in the above-mentioned Patent Document 2, a method of producing a pellicle film can be used in which a pellicle film is formed on a silicon wafer and only the portion to be used as the pellicle film is removed from the silicon wafer by back-etching. In this case, the pellicle film is obtained in a state supported by the silicon frame. In the method of producing a pellicle of the present invention, by bonding the above-mentioned silicon frame to an adhesive for the pellicle film, it is possible to easily assemble the pellicle film to the pellicle frame and produce a pellicle while suppressing damage to the pellicle film when the pellicle film is bonded to the pellicle frame.

[0054] In this way, by adopting the pellicle frame laminate of the present invention and the manufacturing method of a pellicle using the same (pellicle assembly method), it is not necessary to transport the pellicle membrane for long periods of time, and the risk of damage to the pellicle membrane can be significantly reduced. EXAMPLES

[0055] Although the present invention is described below in terms of embodiments, the present invention can be embodied in many different forms and should not be interpreted as being limited to the contents described in the embodiments. In addition, the numerical values ​​described in the examples are merely examples and do not limit the interpretation of the present invention.

[0056] An example of a pellicle frame is shown in Figure 2(A) (external dimensions 150 mm x 118 mm x 1.5 mm, frame width 4.0 mm). Although not specifically shown, two jig holes, each 52 mm away from the center of the side toward the corner, are provided on the outer surface of the long side of the pellicle frame, each having a diameter of 1 mm and a depth of 1.2 mm. In addition, as shown in Figure 2(B), a cutout portion measuring 90 mm in width (W) x 0.1 mm in height (T) x 4 mm in depth (D) is provided on the upper end surface at the center of each side of the pellicle frame. This cutout portion is formed from the outer surface to the inner surface.

[0057] A 0.1 mm thick adhesive (pressure-sensitive adhesive) for the pellicle film is applied to the upper end surface of the pellicle frame, excluding the cutout portion of the frame. The surface of the adhesive layer is processed to be flat. Meanwhile, a 0.1 mm thick adhesive (pressure-sensitive adhesive) for the photomask is applied to the entire periphery of the lower end surface of the pellicle frame. The surface of the adhesive layer is processed to be flat.

[0058] The pellicle film adhesive and photomask adhesive are provided with a protective sheet (outer dimensions 151 mm × 117 mm, width 6 mm, thickness 0.13 mm) to protect the adhesive during transportation. This protective sheet has tabs near the corners of the long sides so as to protrude from the outer edge of the pellicle frame, as shown in Figures 3(A) and (B) above.

[0059] FIG. 1 shows a schematic diagram of a laminate of a pellicle frame, a pressure-sensitive adhesive, and a pellicle frame equipped with a protective sheet, viewed from the side. [Explanation of symbols]

[0060] 10 Pellicle frame laminate 1 Pellicle frame 1a Top surface of pellicle frame 1b Bottom surface of pellicle frame 1c Cutout 1d Outer surface of pellicle frame 1e Inner surface of pellicle frame 11 First adhesive layer (for pellicle membrane) 12 Second adhesive layer (for photomask) 21 First protective sheet 22 Second protective sheet 21a Tab (First protective sheet) 22a Tab (Second protective sheet)

Claims

[Claim 1] A pellicle frame laminate comprising a pellicle frame having an upper end surface and a lower end surface, a first adhesive layer on the upper end surface, the first adhesive layer being covered with a first protective sheet, and a second adhesive layer on the lower end surface, the second adhesive layer being covered with a second protective sheet.

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