Dissolved ammonia delivery system and method of use

Abstract

The present invention relates to a dissolved ammonia delivery system comprising at least one ultrapure water source configured to supply ultrapure water, at least one carrier gas source configured to supply at least one carrier gas, at least one NH3 source configured to supply ammonia (NH3), and at least one ammonia saturation module having at least one of a main flow path and one bypass flow path in communication with the main flow path if the at least one ammonia saturation module includes both a main flow path and a bypass flow path, the main flow path, if present, configured for ultrapure water from the ultrapure water source to flow therethrough, and the bypass flow path, if present, configured for receiving a portion of the ultrapure water from the main flow path to form at least one ultrapure water bypass stream in the bypass flow path, and NH3 is dissolved in the ultrapure water bypass stream by introducing the carrier gas and NH3 into the ultrapure water bypass stream.

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This patent application claims the benefit of U.S. Provisional Patent Application No. 63 / 289,438, filed December 14, 2021, which is incorporated herein by reference. [Background technology]

[0002] 2. Background of the Invention FIELD OF THEINVENTION

[0003] The present invention relates to a system for delivering dissolved ammonia and a method for producing dissolved ammonia.

[0004] 2. Description of Related Art Dissolved ammonia is currently used in many semiconductor processing applications. For example, in some wafer processing applications, low concentration dissolved ammonia is used to obtain the desired electrical conductivity and to avoid undesirable destructive discharges that could potentially cause destruction of the semiconductor wafer being processed or the structures formed on the semiconductor wafer. Dissolved ammonia is used specifically to avoid copper corrosion.

[0005] A number of methods are currently in use to prepare dissolved ammonia. For example, in some applications, highly concentrated liquid ammonia hydroxide is diluted with deionized water. While this method has proven somewhat useful in the past, a number of drawbacks have been identified. For example, high concentrations of ammonia pose health risks, as high concentrations (i.e., greater than 300 ppm) are immediately hazardous to health. For example, ammonia has been shown to cause severe irritation to the lungs, eyes, and skin.

[0006] In contrast, gaseous ammonia can be mixed directly into deionized water to produce dissolved ammonia. FIG. 1 illustrates an embodiment of a prior art system for producing dissolved ammonia. As illustrated, the system 1 includes a contacting system 3, typically embodied by a packed column or packed tower contactor, in communication with an ultrapure water source 5 (hereinafter UPW source 5) via a UPW source conduit 7. One or more valve devices 9 and / or one or more meters 11 are used to control and monitor the flow to the contactor 3. A carrier gas source 15 is configured to deliver at least one carrier gas (e.g., N2, O2, or a noble gas) to the contactor 3 via a gas conduit 33. The gas is inserted before the contactor. Additionally, an ammonia source 25 is configured to supply ammonia (NH3) to the contactor via a gas conduit 33. One or more valves or flow control devices 19, 29 are used to control and monitor the flow of the carrier gas and ammonia to the contactor 3. Ultra-pure water, carrier gas, and highly soluble ammonia are introduced and mixed into contactor 3. Dissolved ammonia 51 may then be flowed from contactor 3 via dissolved ammonia conduit 53. In addition, waste 61 may be exhausted from contactor 3 via exhaust conduit 63. Finally, outgas 43 may be removed from contactor 3 via outgas conduit 41.

[0007] While this gaseous dissolved ammonia delivery system has proven useful, it has a tendency to produce excessive undesirable gas bubbles due to carrier gas saturation. The presence of too many gas bubbles affects the distribution of ammonia on the wafer. Additionally, larger pumps are used in the system to mitigate the presence of gas bubbles. Unfortunately, the inclusion of larger pumps results in higher system costs and an undesirable increase in the temperature of the dissolved ammonia output from the contactor.

[0008] In view of the above, there is a continuing need for efficient systems and methods for producing dissolved ammonia. Summary of the Invention

[0009] BRIEF SUMMARY OF THE INVETION The present invention has been conceived and developed with the objective of providing a solution to the targeted technical needs mentioned above, as will become apparent from the following description.

[0010] According to an embodiment of the present invention, a dissolved ammonia delivery system is proposed, comprising at least one ultrapure water source configured to supply ultrapure water, at least one carrier gas source configured to supply at least one carrier gas, at least one NH3 source configured to supply ammonia (NH3), and at least one ammonia saturation module, which has at least one of a main flow path and a bypass flow path communicating with the main flow path, if the at least one ammonia saturation module includes both a main flow path and a bypass flow path, if the main flow path exists, the main flow path is configured to receive ultrapure water from the ultrapure water source therethrough, and if the main flow path exists, the bypass flow path is configured to receive a portion of the ultrapure water from the main flow path to form at least one ultrapure water bypass stream in the bypass flow path, and NH3 is dissolved in the ultrapure water bypass stream by introducing the carrier gas and NH3 into the ultrapure water bypass stream.

[0011] According to a further aspect of the invention, the carrier gas source is configured to deliver at least one carrier gas to the contactor via a gas conduit, the carrier gas source communicating with the NH3 saturation module via at least one carrier gas conduit and / or at least one NH3 / carrier gas conduit. The ammonia source is configured to supply ammonia to the contactor via the gas conduit. The at least one carrier gas source communicating with the NH3 saturation module via at least one carrier gas conduit and / or at least one NH3 / carrier gas conduit. The ammonia saturation module includes a saturation region where ammonia is diluted directly into the ultrapure water UPW bypass flow. The NH3 saturation module includes a semi-permeable or permeable membrane or structure located in the flowpath flow path near the junction of the ammonia conduit and the flowpath. The ammonia is either gaseous or non-gaseous.

[0012] According to another embodiment of the present invention, a method for producing dissolved ammonia through a delivery system is proposed, comprising: at least one carrier gas source in fluid communication with an ammonia saturation module, the carrier gas source providing ammonia to the ammonia saturation module; controlling an ultrapure water flow from an ultrapure water source through an optional main flow path and at least one bypass flow path of the ammonia saturation module; the bypass flow path in fluid communication with at least one of the carrier gas source and the ammonia source; introducing bubbles formed by at least one of the carrier gas source into an ultrapure water bypass flow in the bypass flow path to form dissolved ammonia; and optionally rejoining the dissolved ammonia into the ultrapure water main flow, and directing the dissolved ammonia into a dissolved ammonia conduit to form a dissolved ammonia output.

[0013] According to a further aspect of the invention, the method further includes releasing the carrier gas to produce one or more gas outputs. The ammonia gas is diluted directly into the ultrapure water bypass stream away from the nitrogen saturated region. The ultrapure water stream reacts with the ammonia in the carrier gas bubbles to form the highly soluble ammonia gas that dissolves in the ultrapure water stream. [Brief description of the drawings]

[0014] Brief description of some figures of the drawing The above and other aspects, features and advantages of the present invention will become more apparent from the following description of the invention, which is presented in the following drawings.

[0015] [Figure 1] FIG. 1 is a diagram of a system for producing dissolved ammonia as known in the prior art.

[0016] [Diagram 2] FIG. 2 is a diagram of a system for producing dissolved ammonia in accordance with an embodiment of the present invention.

[0017] [Diagram 3] FIG. 3 is a representation of a saturation module according to one embodiment of the present invention.

[0018] [Figure 4] FIG. 4 is another representation of a dissolved ammonia delivery system according to the present invention.

[0019] [Figure 4-6] 4-6 show various embodiments of the saturation section of the ammonia saturation module where ammonia is diluted directly into the UPW bypass stream.

[0020] [Figure 7] FIG. 7 illustrates another embodiment of a dissolved ammonia delivery system according to the present invention.

[0021] [Figure 8] FIG. 8 illustrates a further embodiment of a dissolved ammonia delivery system according to the present invention.

[0022] [Figure 9] FIG. 9 shows another embodiment of the NH3 saturation module according to the present invention.

[0023] [Figure 10] FIG. 10 shows further elements of a delivery system according to the present invention.

[0024] [Figure 11] FIG. 11 shows a flow chart for a method of producing dissolved ammonia. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] Detailed Description of the Invention Exemplary embodiments are described below with reference to the accompanying drawings, in which, unless expressly stated to be so, the sizes, positions, etc. of components, features, elements, etc. as well as distances therebetween are not necessarily to scale and may be disproportionate and / or exaggerated for clarity.

[0026] The terms used herein are for the purpose of describing particular exemplary embodiments only and are not intended to be limiting. As used herein, the singular forms "a," "an," and "the" are also intended to include the plural unless the context clearly indicates otherwise. It should be understood that the terms "comprises" and / or "comprising," as used herein, specify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. Unless otherwise specified, when a range of values ​​is listed, the range includes both the upper and lower limits of the range as well as any subranges therebetween. Unless otherwise indicated, terms such as "first," "second," and the like are used only to distinguish respective elements from one another. For example, one node may be called a "first mirror" and similarly another node may be called a "second mirror," or vice versa.

[0027] Unless otherwise indicated, terms such as "about," "approximately," and the like mean that amounts, sizes, compositions, parameters, and other quantities and characteristics are not, and need not be, exact, but may be approximated and / or larger or smaller, as appropriate, to reflect tolerances, conversion factors, rounding, measurement error, and the like, as well as other factors known to those of ordinary skill in the art.

[0028] Many of the embodiments described in the following description share common components, devices, and / or elements. Similar named components and elements refer consistently to similarly named elements. For example, many of the embodiments described in the following detailed description include at least one ultrapure water source (hereinafter UPW source), carrier gas source, ammonia gas source, main flow path, bypass flow path, etc. Thus, identical or similarly named components or features may be described with reference to other drawings even if not mentioned or described in the corresponding drawing. Also, even elements not labeled with reference numbers may be described with reference to other drawings.

[0029] Many different forms and embodiments are possible without departing from the spirit and scope of this disclosure, and therefore this disclosure should not be construed as limited to the exemplary embodiments set forth herein, but rather these exemplary embodiments are provided so that this disclosure will be thorough and complete, and will convey the scope of the disclosure to those skilled in the art.

[0030] This application discloses various systems and methods for supplying or generating dissolved ammonia. In certain embodiments, the systems disclosed herein may be configured to provide dissolved ammonia based on dissolving gaseous ammonia in at least one stream of ultrapure water without the need for a contactor as required in prior art systems.

[0031] FIG. 2 illustrates an embodiment of a dissolved ammonia delivery system. Unlike prior art ammonia delivery systems, the dissolved ammonia delivery system disclosed in the present application reduces system cost and complexity by eliminating the need for a contactor (see contactor 3 in FIG. 1). As illustrated, the ammonia delivery system 80 includes at least one UPW source 82 having at least one UPW source conduit 84 in fluid communication with the at least one UPW source 82. At least one valve device or flow control device 86 may be disposed on or in communication with the UPW source conduit 84. Additionally, at least one meter, controller, or indicator 88 may be in communication with at least one of the UPW source 82, the UPW source conduit 84, and / or the valve device 86 (if present). As illustrated, the UPW source 82 is in communication with at least one NH3 saturation module 118 via the UPW source conduit 84. The system of FIG. 2 may also include a pump if desired, although the presence of a pump is not required and therefore a pump is not depicted in FIG.

[0032] Referring again to FIG. 2, at least one carrier gas source 90 may be in communication with the NH3 saturation module 118 via at least one carrier gas conduit 92 and / or at least one NH3 / carrier gas conduit 108. In the illustrated embodiment, the carrier gas source 90 is connected to at least one carrier gas conduit 92 which is connected to the NH3 / carrier gas conduit 108, but one skilled in the art will appreciate that the carrier gas source 90 may be in fluid communication with the NH3 saturation module 118 via various conduits. If desired, at least one valve or flow controller 94 and / or meter or indicator 96 may be used to control and monitor the flow of carrier gas from the carrier gas source 90 to the NH3 saturation module 118. If desired, at least one pressure regulator (not shown) may be used in addition to or in place of at least one of the flow controller 94 and meter 96. Exemplary carrier gases used in the present system include, but are not limited to, N2, O2, and various types of noble gases.

[0033] As shown in FIG. 2, at least one ammonia source 100 may be in communication with the NH3 saturation module 118 via at least one carrier ammonia conduit 102 and / or at least one NH3 / carrier gas conduit 108. In one embodiment, the ammonia source 100 is configured to provide gaseous ammonia to the NH3 saturation module 118. As shown, the ammonia source 100 is coupled to at least one ammonia conduit 102, which is coupled to the NH3 / carrier gas conduit 108, although one skilled in the art will appreciate that the ammonia source 100 may be in fluid communication with the NH3 saturation module 118 via various conduits. At least one valve or flow controller 104 and / or mass flow meter 106 may be used to control and monitor the flow of gaseous ammonia from the ammonia source 100 to the NH3 saturation module 118. Again, at least one pressure regulator (not shown) may be used in addition to, or in place of, the flow controller 104 and mass flow meter 106, if desired.

[0034] 2 and 3, the NH3 saturation module 118 may include at least one main flowpath 120 and at least one bypass flowpath 122, or may include only the bypass flowpath 122. The main flowpath 120 and the bypass flowpath 122 are configured to flow therethrough ultrapure water from the UPW source 82. As shown in FIG. 3, the main flowpath 120 defines at least one main flowpath passage 142 configured to receive therein a UPW flow 144. Similarly, the bypass flowpath 122 defines at least one bypass flowpath passage 146 configured to channel therein a portion of the UPW flow 144 from the main flowpath 120, thereby forming at least one UPW bypass flow 148. In the illustrated embodiment, the bypass flowpath 122 is in fluid communication with at least one of the carrier gas source 90 and the ammonia source 100 via at least one NH3 / carrier gas conduit 108. Bubbles 150 formed by at least one of the carrier gas / ammonia gas from the NH3 / carrier gas conduit 108 are introduced into the UPW bypass flow 148 in the bypass path 122, and the highly soluble ammonia gas dissolves in the UPW bypass flow 148 to form dissolved ammonia 132. The dissolved ammonia 132 is then directed to the dissolved ammonia conduit 130 configured to rejoin the UPW main flow 144 and form the dissolved ammonia output 132. In addition, the carrier gas may be released through at least one outgas conduit 124 to generate one or more outgas outputs 126. In another embodiment of the invention, the entire liquid flow may be captured by the bypass line. The presence of the main flow line is not required, and the main flow line is optional. By dividing the flow rate and providing the bypass line, the saturation of the carrier gas in the processing liquid is reduced, and the formation of undesirable bubbles is reduced.

[0035] FIG. 4 is another representation of a dissolved ammonia delivery system according to the present invention. Those skilled in the art will appreciate that similarly named and numbered components perform similar functions as the previous embodiment. As shown, the dissolved ammonia delivery system 118 includes at least one main flow path 120 defining at least one main flow flow path 242 therein. The main flow path 242 can be configured to receive at least one ultrapure water flow 244 therein. In addition, the dissolved ammonia delivery system 118 further includes at least one bypass flow path 122 defining at least one bypass flow path 246. As shown, the bypass flow path 246 is in fluid communication with the main flow path 242. Thus, the bypass flow path 246 can be configured to direct at least one UPW bypass flow 248 through the bypass flow path 246.

[0036] As shown in FIG. 4, at least a portion of the NH3 / carrier gas conduit 108 may be located within or in fluid communication with a bypass flow passage 246 formed in the bypass flow path 122. Additionally, the NH3 / carrier gas conduit 108 is in fluid communication with at least one of the carrier gas source 90 and / or the ammonia source 100 (see FIG. 2). As in the previous embodiment, bubbles 250 formed by at least one of the carrier gas / ammonia gas from the NH3 / carrier gas conduit 108 are introduced into the UPW bypass flow 248 in the bypass path 122, where the highly soluble ammonia gas dissolves and forms dissolved ammonia 132. The dissolved ammonia 132 is then directed to at least one dissolved ammonia conduit 130 configured to rejoin the UPW main flow 244 and form at least one dissolved ammonia output 132. Additionally, the carrier gas may be released through at least one outgassing conduit 124 to generate one or more outgassing outputs 126 .

[0037] 4-6 show various embodiments of the saturation region 260 of the ammonia saturation module 118 where ammonia is diluted directly into the UPW bypass flow 248. As shown in FIG. 5, the bypass path 122 is located in the main flow path 120. The NH3 / carrier gas conduit 108 is located in the bypass path 122 configured to release or introduce ammonia gas 250 from the ammonia source 100 (see FIG. 2) into the UPW bypass flow 248 to generate the dissolved ammonia output 132. As shown in FIG. 5, the ammonia gas from the NH3 / carrier gas conduit 108 is diluted directly into the UPW bypass flow 248 away from the N2 saturation region 262, thereby dramatically reducing gas bubbles in the dissolved ammonia output 132. In contrast, FIG. 6 shows another embodiment of the bypass path 122 having one or more apertures or orifices 223 formed proximate to the N2 saturation region 262 in the saturation region 260. As with the previous embodiment, ammonia gas from the NH3 / carrier gas conduit 108 is diluted directly into the UPW bypass flow 248 away from the N2 saturated region 262, dramatically reducing gas bubbles in the dissolved ammonia output 132.

[0038] 7 illustrates another embodiment of a dissolved ammonia delivery system. The ammonia delivery system 280 includes at least one UPW source 282 having at least one UPW source conduit 824 in fluid communication with the at least one UPW source 282. At least one valve device or flow control device 286 may be located on or in communication with the UPW source conduit 284. Additionally, at least one meter, controller, or indicator 288 may be in communication with at least one of the UPW source 282, the UPW source conduit 284, and / or the valve device 286 (if present). As illustrated, the UPW source 282 is in communication with at least one NH3 saturation module 318 via the UPW source conduit 284.

[0039] 7, at least one carrier gas source 290 may be in communication with the NH3 saturation module 318 via at least one carrier gas conduit 292. Optionally, at least one valve or flow controller 294 and / or meter or indicator 296 may be used to control and monitor the flow of carrier gas from the carrier gas source 290 to the NH3 saturation module 318. Optionally, one or more pressure regulators (not shown) may be used in addition to or in place of the flow controller 294 and / or meter 296. Exemplary carrier gases used in the present system include, but are not limited to, N2, O2, and various types of noble gases.

[0040] 7, at least one ammonia source 300 may be in communication with the NH3 saturation module 318 via at least one ammonia conduit 302. In one embodiment, the ammonia source 300 is configured to supply gaseous ammonia to the NH3 saturation module 318. At least one valve or flow controller 304 and / or mass flow meter 306 may be used to control and monitor the flow of gaseous ammonia from the ammonia source 300 to the NH3 saturation module 318. Optionally, at least one pressure regulator (not shown) may be used in combination with or in place of the flow controller 304 and / or mass flow meter 306.

[0041] 7-9, the NH3 saturation module 318 includes at least one flowpath 320. The flowpath 320 is configured to have ultrapure water from the UPW source 282 flow therethrough. As shown in FIG. 7, the flowpath 320 defines at least one flowpath channel 342 configured to receive the UPW flow 344 therein. In the illustrated embodiment, the carrier gas conduit 292 is in fluid communication with the flowpath channel 342 and is configured to provide at least one carrier gas to the UPW flow 344. Similarly, the ammonia conduit 302 is in communication with the flowpath 342 and is configured to provide ammonia gas to the UPW flow 344. As shown, at least one carrier gas bubble 310 is formed and maintained within the flowpath channel 342. To this end, at least one valve or flow control device 294 may be used to regulate or control the pressure, size, and volume of the carrier gas bubble 310 within the UPW flow 344. Gaseous ammonia from an ammonia source 300 is introduced into the carrier gas bubbles 310. UPW stream 344 reacts with the ammonia in the carrier gas bubbles 310 to form dissolved ammonia 332 by dissolving highly soluble ammonia gas into the UPW stream 344. The dissolved ammonia 332 is directed into the dissolved ammonia conduit 330. Additionally, the carrier gas may be released via at least one outgassing conduit 324 to generate one or more outgassing outputs 326.

[0042] In another embodiment, Figure 9 illustrates an embodiment of the NH3 saturation module 318 shown in Figure 7. As illustrated, the NH3 saturation module 318 includes a semi-permeable or permeable membrane or structure 311 located in a flowpath flowpath 342 near the junction of the ammonia conduit 304 and the flowpath 320. In use, a UPW stream 344 is established in the flowpath flowpath 342. Gaseous ammonia from an ammonia source 300 (see Figure 7) is introduced in a controlled manner into the UPS stream 344 via the ammonia conduit 304 and the membrane 311. One or more valve members or flow controllers may be used to control the flow of ammonia into the flowpath flowpath. The UPW stream 344 reacts with the highly soluble ammonia to produce dissolved ammonia 332.

[0043] FIG. 10 shows further elements of a delivery system according to the present invention.

[0044] In ammonia systems available in the art, nitrogen was used to drive ammonia out of the ammonia delivery system to get a faster reaction from the ammonia delivery system. There was a pressure controller located to the left of the mass flow controllers that flushed all of the mass flow controllers to remove ammonia from the system. However, when a set point change or flow change occurs, ammonia needs to be transported to the contact system more quickly.

[0045] A different approach to flushing ammonia from the delivery system is shown in FIG. 10, where different sized mass flow controllers are placed in series, with mass flow controller A being the largest and mass flow controller C being the smallest. The illustrated configuration with three such mass flow controllers placed in series is only an exemplary configuration, and any number of such controllers can be used. In the illustrated configuration, it is the ammonia itself that is used to flush the system, or more precisely, it is the ammonia that is used to flush the smaller mass flow controllers to improve the dynamics of the system. More specifically, the larger mass flow controller always flushes the smaller mass flow controller to improve the dynamics of the system. For example, at system start-up, the system may have a remnant of air or nitrogen inside and have a large force between them. For a fast system start-up, it is first necessary to flush each undesirable gas from the system, and therefore the flushing starts with MFC A. MFC A has a very large ammonia flow to flush. This operation is used only for the start-up of the ammonia delivery system. All other quantities in the system must always have ammonia inside the system. Utilizing such a flush system ensures that the ammonia delivery system always operates at a constant pressure. This is very important, as the gas regions are always maintained at a constant pressure. The best functioning of the system relies on the pressure or relative pressure within the system being maintained stable, especially in the gas portion, as otherwise the dynamics of the system would change.

[0046] FIG. 11 shows a flow chart of a method for producing dissolved ammonia. According to the present invention, a method 1000 for producing dissolved ammonia is proposed. The method includes at least a carrier gas source in fluid communication with an ammonia saturation module, whereby the carrier gas source supplies ammonia to the ammonia saturation module. The method further includes a step 1004 of controlling an ultrapure water stream and an ultrapure water source through an optional main flow path and at least one bypass flow path of the ammonia saturation module. The bypass flow path is in fluid communication with at least one of the carrier gas source and the ammonia source. The method 1000 further includes, in step 1006, introducing bubbles formed by at least one of the carrier gas sources into the ultrapure water bypass flow in the bypass flow path to form dissolved ammonia. The method 1000 further includes, optionally, in step 1110, rejoining the dissolved ammonia with the ultrapure water main flow and directing the dissolved ammonia into a dissolved ammonia conduit to form a dissolved ammonia output.

[0047] The method 1000 may further include releasing the carrier gas to generate one or more gas outputs at step 1110. The ammonia gas may be diluted directly into an ultrapure water bypass stream away from the nitrogen-saturated region. The ultrapure water stream reacts with the ammonia in the carrier gas bubbles to form highly soluble ammonia gas that dissolves in the ultrapure water stream.

[0048] As detailed above, the solution presented by the present invention consists of a system with a simpler configuration than those known in the prior art, which allows to provide a system with reduced costs without sacrificing performance. In the present system, carrier gas saturation is minimized, which results in minimal bubbles and outgassing at the point of use. At the same time, the use of a static bypass in the present system allows to always keep the system away from the carrier gas saturation point. Furthermore, the carrier gas consumption in the unit is reduced. The present system achieves high forces and at the same time stable behavior with constant water / gas pressure settings. Furthermore, the temperature rise is reduced by using a smaller pump system.

[0049] The solution of the invention is characterized by the fact that its configuration does not require a contactor. This minimizes the amount of carrier gas used. The use of a bypass dilutes the dissolved ammonia directly, moving it away from the carrier gas saturation point, which results in a drastic reduction or even absence of the amount of bubbles. Furthermore, the use of large pumps is avoided, so that no sudden temperature rises occur. All these advantages translate into significant cost savings regarding the system and its operating costs, without sacrificing performance.

[0050] The embodiments disclosed herein are illustrative of the principles of the invention. Other modifications may be made within the scope of the invention. Thus, the devices disclosed in this application are not limited to the exact ones shown and described herein.

Claims

1. at least one ultrapure water source configured to supply ultrapure water; at least one carrier gas source configured to supply at least one carrier gas; at least one ammonia (NH3) source configured to supply NH3; at least one ammonia saturation module, where the at least one ammonia saturation module includes both a main flow path and a bypass flow path, the at least one ammonia saturation module having at least one of a main flow path and a bypass flow path communicating with the main flow path; Equipped with the main flow path, if present, is configured to allow ultrapure water from the ultrapure water source to flow therethrough; the bypass flow path is configured to receive a portion of the ultrapure water from the main flow path, if present, to form at least one ultrapure water bypass flow in the bypass flow path; NH3 is dissolved in the ultrapure water bypass stream by introducing the carrier gas and NH3 into the ultrapure water bypass stream. Dissolved ammonia delivery system.

2. the carrier gas source is configured to deliver at least one carrier gas to the contactor via a gas conduit; The carrier gas source communicates with the NH3 saturation module via at least one carrier gas conduit and / or at least one NH3 / carrier gas conduit; The system of claim 1 .

3. 3. The system of claim 2, wherein the ammonia source is configured to supply ammonia to the contactor via the gas conduit.

4. 10. The system of claim 1, wherein the at least one carrier gas source communicates with the NH3 saturation module via at least one carrier gas conduit and / or at least one NH3 / carrier gas conduit.

5. 10. The system of claim 1, wherein the ammonia saturation module includes a saturation region where ammonia is diluted directly into the ultrapure water UPW bypass flow.

6. 10. The system of claim 1, wherein the NH3 saturation module comprises a semi-permeable or permeable membrane or structure located within the flowpath flow path proximate a junction of the ammonia conduit and the flowpath.

7. 1. A method for producing dissolved ammonia via a delivery system, comprising: at least one carrier gas source is fluidly connected to the ammonia saturation module, the carrier gas source providing ammonia to the ammonia saturation module; controlling the flow of ultrapure water from an ultrapure water source through an optional main flow path and at least one bypass flow path of the ammonia saturation module; the bypass flow path is in fluid communication with at least one of the carrier gas source and the ammonia source; introducing bubbles formed by at least one of said carrier gas sources into said bypass flow path of ultrapure water to form dissolved ammonia; Optionally, recombining the dissolved ammonia with the main ultrapure water flow and directing the dissolved ammonia into a dissolved ammonia conduit to form a dissolved ammonia output. method.

8. The method of claim 7 , further comprising releasing the carrier gas to produce one or more gas outputs.

9. 8. The method of claim 7, wherein the ammonia gas is diluted directly into the ultrapure water bypass stream away from the nitrogen saturated region.

10. 8. The method of claim 7, further comprising reacting with the ammonia in the carrier gas bubbles to form the highly soluble ammonia gas which dissolves in the ultrapure water stream.

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