Coating head and coating device equipped with same

Abstract

To provide a coating head which can achieve improvement of accuracy of the coating position, and to provide a coating device equipped with the coating head.SOLUTION: A coating head 10 applies a coating liquid to a coating surface and comprises: a discharge tool 21 which discharges the coating liquid; an angle adjustment plate 31 configured to adjust an angle of the discharge tool 21 with respect to the coating surface in a discharge direction and be rotatable in a rotation direction along a plane of the angle adjustment plate 31 together with the discharge tool 21, the angle adjustment plate 31 having a plurality of structure parts 35 provided at different positions in the rotation direction; and a positioning part 36 which positions the angle of the discharge tool 21 by fixing the angle adjustment plate 31 in contact with at least one of the plurality of structure parts 35.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a coating head and a coating device including the same. [Background technology]

[0002] When it is necessary to apply a coating liquid locally and with high precision, a dispenser that ejects the coating liquid from the tip of a needle is used. For example, when a quartz crystal oscillator element is bonded to a package in the manufacturing process of a quartz crystal oscillator, a dispenser is used to apply a conductive adhesive to the electrode surface. For example, there is a demand for further improvement in the positional precision of coating for coating devices used in the manufacturing process of electronic components such as quartz crystal oscillators, which have become increasingly miniaturized in recent years.

[0003] For example, Patent Document 1 discloses an adhesive application device that includes a parallel movement means for moving the application tool parallel to the application area, a vertical movement means for moving the application tool so that the application tool has a vertical component to the application area, and an angle change means for changing the inclined angle of the application tool, the angle change means being a stepping motor connected to approximately the center of the application tool's longitudinal center of gravity. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2006-175306 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the adhesive application device described in Patent Document 1, due to gear play in the stepping motor, etc., the angle of the application tool may fluctuate after the angle of the application tool is positioned, causing the application position to fluctuate.

[0006] The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide a coating head that can improve the positional accuracy of coating, and a coating device including the same. [Means for solving the problem]

[0007] A coating head according to one embodiment of the present invention is a coating head that applies a coating liquid to a coating surface, and includes an ejection tool that ejects the coating liquid, and an angle adjustment plate that adjusts the angle of the ejection direction of the ejection tool relative to the coating surface, the angle adjustment plate being configured to be rotatable together with the ejection tool in a rotational direction along the plane of the angle adjustment plate and having a plurality of structural parts provided at different positions in the rotational direction, and a positioning part that positions the angle of the ejection tool by contacting at least one of the plurality of structural parts and fixing the angle adjustment plate. Effect of the Invention

[0008] According to the present invention, it is possible to provide a coating head capable of improving the positional accuracy of coating, and a coating device including the same. [Brief description of the drawings]

[0009] [Figure 1] 1 is a perspective view showing a coating device according to an embodiment of the present invention; [Diagram 2] FIG. [Diagram 3] FIG. [Figure 4] FIG. [Diagram 5] FIG. 13 is a front view showing the application head during angle adjustment. [Figure 6] FIG. 13 is a rear view showing the application head during angle adjustment. [Figure 7] FIG. 13 is a rear view showing the application head during angle adjustment. [Figure 8] 13 is a diagram showing the relationship between the discharge tool whose angle has been adjusted and the coating surface. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] The following describes the embodiments of the present invention. In the following description of the drawings, the same or similar components are denoted by the same or similar reference numerals. The drawings are illustrative, and the dimensions and shapes of each part are schematic, and the technical scope of the present invention should not be interpreted as being limited to the embodiments.

[0011] In addition, in each figure, for the sake of convenience, an orthogonal coordinate system consisting of an X-axis, a Y-axis, and a Z-axis is attached in order to explain the positional relationship, the movement direction, and the like. The directions parallel to the X-axis, Y-axis, and Z-axis are defined as the X-axis direction, the Y-axis direction, and the Z-axis direction, respectively. For the sake of convenience, the positive direction of the Y-axis is defined as the front side, and the negative direction of the Y-axis is defined as the back side, but these designations do not limit the orientation of the coating device 1.

[0012] <Coating equipment> First, the configuration of a coating apparatus 1 according to one embodiment of the present invention will be described with reference to Fig. 1. Fig. 1 is a perspective view showing a coating apparatus according to one embodiment of the present invention.

[0013] The coating device 1 includes a coating head 10 and a drive unit 50 .

[0014] The coating head 10 is a dispenser that applies a coating liquid to a coating surface. As an example, the coating surface is the surface of a package electrode of a quartz crystal unit, and the coating liquid is a conductive adhesive that electrically connects the package electrode of the quartz crystal unit and the quartz crystal vibration element. Note that the coating surface and the coating liquid are not limited to those described above.

[0015] The driving unit 50 is an orthogonal robot that moves the coating head 10 in the X-axis direction, the Y-axis direction, and the Z-axis direction. The driving unit 50 has a Z-axis actuator 51, a Y-axis actuator 52, and an X-axis actuator 53. The Z-axis actuator 51 moves the coating head 10 along the Z-axis direction. The Z-axis actuator 51 moves the coating head 10, for example, in a direction perpendicular to the coating surface. The Y-axis actuator 52 moves the coating head 10 and the Z-axis actuator 51 along the Y-axis direction. The X-axis actuator 53 moves the coating head 10, the Z-axis actuator 51, and the Y-axis actuator 52 along the Z-axis direction. The driving unit 50 independently controls the movement of the coating head 10 in each of the X-axis direction, the Y-axis direction, and the Z-axis direction. For example, the driving unit 50 controls the Y-axis actuator 52 and the X-axis actuator 53 to move the coating head 10 directly above the coating surface, and controls the Z-axis actuator 51 to move the coating head 10 closer to or farther away from the coating surface. The Z-axis actuator 51 corresponds to an example of a first moving part that moves the coating head 10 in a direction intersecting with the coating surface. The Y-axis actuator 52 corresponds to an example of a second moving part that moves the coating head 10 in a direction along the coating surface. The X-axis actuator 53 corresponds to an example of a third moving part that moves the coating head 10 in a direction along the coating surface and intersecting with the movement direction of the second moving part.

[0016] Next, the configuration of the coating head 100 will be described with reference to Figures 2 to 4. Figure 2 is a perspective view of the coating head. Figure 3 is a front view of the coating head. Figure 4 is a rear view of the coating head.

[0017] The application head 10 includes a discharge unit 20, an angle adjustment unit 30, and a base plate 40.

[0018] The discharge unit 20 is a mechanism for discharging the coating liquid and includes a needle 21, a syringe 22, a needle guide 23, a syringe holder 24, and a distance measurement sensor 25.

[0019] The needle 21 is a cylindrical member through which the coating liquid can pass, and has a base end provided on the positive side of the Z axis and a tip end 21P provided on the negative side of the Z axis. In the needle 21, the base end corresponds to an inlet for the coating liquid, and the tip end 21P corresponds to an outlet for the coating liquid. The needle 21 is an example of an ejection tool that ejects the coating liquid from the tip end 21P. The shape of the tip end 21P of the needle 21 is, for example, tapered in that the outer diameter becomes smaller as it approaches the tip surface facing the coating surface. The taper angle of the tapered tip end 21P is, for example, about 20 degrees. Note that the shape of the tip end 21P of the needle 21 is not limited to this, and may be tapered with a suitable taper angle, or may be straight in that the outer diameter is constant regardless of the distance from the tip surface.

[0020] In this embodiment, the discharge tool is a needle 21 having a dot-shaped discharge hole for discharging the coating liquid, but the discharge tool is not limited to the above. For example, the discharge tool may have a linear discharge hole.

[0021] The syringe 22 is a cylindrical member having a larger diameter than the needle 21, and has a base end provided on the positive side of the Z axis and a tip end provided on the negative side of the Z axis. The base end of the needle 21 is connected to the tip end of the syringe 22. The syringe 22 is an example of a reservoir that stores the coating liquid to be supplied to the discharge tool 21, and is also an example of a pressurizer that pressurizes the stored coating liquid and supplies it to the needle 21. The amount and speed of the coating liquid discharged from the needle 21 are controlled by the syringe 22.

[0022] The needle 21 is inserted and held in the needle guide 23. The needle guide 23 is an example of a discharge tool holding portion that holds a discharge tool. The needle guide 23 is connected to an angle adjustment plate 31, which will be described later, and positions the needle 21 with respect to the angle adjustment plate 31. In other words, the needle guide 23 keeps the position of the tip 21P of the needle 21 constant with respect to the angle adjustment plate 31. When viewed from the front as shown in FIG. 3, the base end of the needle 21 and the tip of the syringe 22 are located inside the needle guide 23, and the tip 21P of the needle 21 protrudes from the needle guide 23 in the negative Z-axis direction.

[0023] Syringe holder 24 holds syringe 22. Syringe holder 24 is an example of a reservoir holder that holds a reservoir. Syringe holder 24 is connected to angle adjustment plate 31, which will be described later, and positions syringe 22 with respect to angle adjustment plate 31. Syringe holder 24 has a U-shaped recess into which syringe 22 fits, and syringe 22 is fixed by narrowing this U-shaped recess.

[0024] The distance measurement sensor 25 measures the height of the needle 21. That is, the distance measurement sensor 25 measures the distance in the Z-axis direction between the tip 21P of the needle 21 and the application surface. The Z-axis actuator 51 is driven based on the measurement result of the distance measurement sensor 25, and the height of the needle 21 is controlled. The distance measurement sensor 25 is, for example, a laser path meter.

[0025] The angle adjustment unit 30 is a mechanism for adjusting the angle of the discharge unit 20. The angle adjustment unit 30 includes an angle adjustment plate 31, a guide pin 33A, guide bolts 33B and 33C, and a reference plate .

[0026] The angle adjustment plate 31 is a mechanism for adjusting the angle of the discharge direction of the coating liquid in the needle 21 with respect to the coating surface. The angle adjustment plate 31 has a pair of main surfaces 31a, 31b extending along the ZX plane and facing each other in the Y-axis direction. The main surface 31a is provided on the front side, and the main surface 31b is provided on the back side. The main surfaces 31a, 31b include a plane parallel to the ZX plane. The needle guide 23 and the syringe holder 24 are connected to the main surface 31a of the angle adjustment plate 31. That is, the needle 21 and the syringe 22 are connected to the main surface 31a of the angle adjustment plate 31 via the needle guide 23 and the syringe holder 24, and the discharge unit 20 is interlocked with the angle adjustment plate 31. The main surface 31a of the angle adjustment plate 31 is connected to the main surface on the front side of the base plate 40 so as to be slidable.

[0027] The angle adjustment plate 31 is configured to be rotatable in a rotation direction along a plane (ZX plane) included in the principal surfaces 31a and 31b of the angle adjustment plate 31 together with the discharge unit 20 connected to the principal surface 31a. That is, the angle adjustment plate 31 and the needle 21 are configured to be rotatable in the ZX plane. The angle adjustment plate 31 rotates about the Y axis passing through the tip 21P of the needle 21 as a center (hereinafter referred to as the "rotation center"). The discharge unit 20 linked to the angle adjustment plate 31 rotates in the ZX plane about the tip 21P as a rotation center, similar to the angle adjustment plate 31. That is, the angle of the needle 21 is adjusted about the tip 21P as a center (hereinafter referred to as the "angle center CP").

[0028] The angular center CP of the needle 21, which is also the rotation center of the angle adjustment plate 31 and the discharge unit 20, is, for example, the center of the tip surface of the tip portion 21P that faces the application surface. The center of the tip surface of the tip portion 21P is the center of the discharge hole of the needle 21. The angular center CP may be the edge of the discharge hole where the tip surface of the cylindrical tip portion 21P and the inner side surface are connected. The angular center CP may also be an end of the tip surface of the tip portion 21P. The end of the tip surface of the tip portion 21P is a corner where the tip surface of the cylindrical tip portion 21P and the outer side surface are connected.

[0029] 2 and 3, the angle adjustment plate 31 is provided with guide slits 32A, 32B, and 32C. The guide slits 32A, 32B, and 32C penetrate the angle adjustment plate 31 in the Y-axis direction and open to both the main surface 31a and the main surface 31b. The guide slits 32A, 32B, and 32C are provided in concentric arc shapes centered on the angular center CP. The guide slit 32B is located on the angular center CP side of the guide slit 32A, and the guide slit 32C is located on the angular center CP side of the guide slit 32B.

[0030] The guide pin 33A is connected to the base plate 40 and inserted into the guide slit 32A. The guide bolt 33B has a tip connected to the base plate 40, a screw portion inserted into the guide slit 32B, and a head located on the main surface 31a side of the angle adjustment plate 31. The guide bolt 33C has a tip connected to the base plate 40, a screw portion inserted into the guide slit 32C, and a head located on the main surface 31a side of the angle adjustment plate 31. The diameter of the head of the guide bolt 33B is larger than the width of the guide slit 32B, and the diameter of the head of the guide bolt 33C is larger than the width of the guide slit 32C. The guide pin 33A moves relatively along the guide slit 32A, allowing the angle adjustment plate 31 to rotate along the rotation direction around the angle center CP as the rotation center, while suppressing fluctuations in a direction intersecting the rotation direction of the angle adjustment plate 31. Similarly, the guide bolt 33B moves relatively along the guide slit 32B, and the guide bolt 33C moves relatively along the guide slit 32C.

[0031] The clearance between guide pin 33A and guide slit 32A is smaller than the clearance between the threaded portion of guide bolt 33B and guide slit 32B, and smaller than the clearance between the threaded portion of guide bolt 33C and guide slit 32C. By making the clearance of guide slit 32A, which is the farthest from the angle center CP among guide slits 32A, 32B, and 32C, the smallest, it is possible to suppress rattling during rotation of angle adjustment plate 31.

[0032] As shown in FIG. 4, a plurality of grooves 35 are provided on the main surface 31b of the angle adjustment plate 31. The plurality of grooves 35 are an example of a plurality of structural parts provided at different positions in the rotation direction of the angle adjustment plate 31. Each of the plurality of grooves 35 is provided linearly in a direction intersecting the rotation direction of the angle adjustment plate 31. The groove 35 is tapered with an inclined surface whose opening width increases in the opening direction, and is a V-shaped recess in which the inclined surfaces are connected at the bottom. The plurality of grooves 35 are aligned in the rotation direction of the angle adjustment plate 31 and provided radially. The interval between the plurality of grooves 35 is the resolution for adjusting the angle of the needle 21. For example, the plurality of grooves 35 are provided so that the angle of the needle 21 can be adjusted in 1 degree increments in an angle range of 0 degrees to 10 degrees.

[0033] In this embodiment, the multiple structures are multiple grooves 35 arranged in a straight line, but the multiple structures are not limited to the above. For example, the multiple structures may be arranged in a dot-like or planar shape. Also, the multiple structures may be convex portions protruding from the plane (ZX plane) of the main surface 31b, or through holes penetrating the angle adjustment plate 31 along the Y-axis direction.

[0034] Furthermore, the angle range and angle resolution in adjusting the angle of the needle 21 are not limited to the above. For example, the multiple grooves 35 may be provided so that the angle of the needle 21 can be adjusted in an angle range of -10 degrees or more and 0 degrees or less, or may be provided so that the angle can be adjusted in an angle range of -10 degrees or more and 10 degrees or less, or may be provided so that the angle can be adjusted in an angle range of 0 degrees or more and 20 degrees or less. The multiple grooves 35 may be provided so that the angle of the needle 21 can be adjusted in increments of 0.5 degrees, or may be provided so that the angle can be adjusted in increments of 2 degrees.

[0035] The reference plate 36 is a thin plate-like member that can move along the Y-axis direction and enter one of the grooves 35. The reference plate 36 that enters one of the grooves 35 comes into contact with both the inclined surface on one side in the rotation direction of the angle adjustment plate 31 and the inclined surface on the other side. As a result, the reference plate 36 limits the rotation of the angle adjustment plate 31 in both the one side and the other side in the rotation direction. The reference plate 36 is connected to the base plate 40 so as to be switchable between a movable state and a fixed state. For example, the reference plate 36 is connected to the base plate 40 by a screw. When the reference plate 36 is moved, the screw is loosened, and when the reference plate 36 is fixed to the base plate 40, the screw is tightened. The reference plate 36 is an example of a positioning unit that positions the angle of the discharge tool by contacting at least one of the multiple structural units and fixing the angle adjustment plate 31.

[0036] The positioning portion is not limited to a thin plate-shaped member, and the shape of the positioning portion is determined according to the shape of the structural portion. For example, if the structural portion is circular, the positioning portion may be circular to fit into the structural portion. The positioning portion may contact not only one structural portion but two or more structural portions to position the angle of the discharge tool.

[0037] The base plate 40 connects the application head 10 to the drive unit 50. The back surface of the base plate 40 is connected to the Z-axis actuator 51, and the front surface of the base plate 40 is connected to the angle adjustment plate 31. In other words, the angle adjustment unit 30 is connected to the Z-axis actuator 51 via the base plate 40, and the discharge unit 20 is connected to the base plate 40 via the angle adjustment unit 30.

[0038] <Application method> Next, a coating method using the coating device 1 according to one embodiment of the present invention will be described with reference to Fig. 5 to Fig. 8. Fig. 5 is a front view showing the coating head during angle adjustment. Fig. 6 is a rear view showing the coating head during angle adjustment. Fig. 7 is a rear view showing the coating head during angle adjustment. Fig. 8 is a diagram showing the relationship between the discharge tool whose angle has been adjusted and the coating surface.

[0039] First, the angle adjustment plate 31 is rotated at a desired rotation angle θ around the angle center CP as the center of rotation, as shown in Fig. 5. While the angle adjustment plate 31 is being rotated, the reference plate 36 is pulled toward the rear side and separated from the angle adjustment plate 31, as shown in Fig. 6.

[0040] 7, the reference plate 36 is moved to the front side and inserted into the groove 35, and the screw for fixing the reference plate 36 to the base plate 40 is tightened. This fixes the angle adjustment plate 31 to the base plate 40, and the angle of the needle 21 of the discharge unit 20 is positioned.

[0041] Next, as shown in FIG. 8, the tip 21P of the needle 21 is brought close to the electrode surface SF of the electrode E provided inside the concave package PK. Specifically, the Z-axis actuator 51 is driven to lower the coating head 10. At this time, the needle 21 is tilted from the Z axis at a rotation angle θ with the tip 21P as the angular center CP. The package PK has a bottom wall portion BT having an upper surface and a lower surface extending in the XY plane, and a side wall portion SD extending from the outer edge of the bottom wall portion BT to the positive direction of the Z axis. The electrode E is provided on the upper surface of the bottom wall portion BT and in the vicinity of the side wall portion SD. Since the needle 21 is tilted in a direction away from the side wall portion SD with the tip portion 21P as the angular center, the needle 21 can be brought close to the electrode surface SF without colliding with the side wall portion SD. At this time, the needle 21 moves in a direction perpendicular to the electrode surface SF to approach the electrode surface SF.

[0042] 8, a conductive adhesive AD is discharged from a tip 21P of a needle 21 that has been brought close to the electrode surface SF of the electrode E. The conductive adhesive AD is applied to the vicinity of a side wall portion SD of the electrode surface SF. Finally, the needle 21 is moved in a direction perpendicular to the electrode surface SF to be separated from the electrode surface SF.

[0043] As described above, the coating head 10 according to one embodiment of the present invention includes the needle 21 that discharges the coating liquid, the angle adjustment plate 31 that adjusts the angle of the discharge direction of the needle 21 with respect to the coating surface, and the reference plate 36 that positions the angle of the needle 21. The angle adjustment plate 31 is configured to be rotatable together with the needle 21 in a rotational direction along the plane of the angle adjustment plate 31, and has a plurality of grooves 35 provided at different positions in the rotational direction. The reference plate 36 contacts at least one of the plurality of grooves 35 to fix the angle adjustment plate 31.

[0044] According to this embodiment, even if an obstacle is present near the application surface, such as when applying the application liquid to an inner corner of a recess, the angle of the needle 21 can be adjusted to allow the needle 21 to approach the application surface while avoiding contact between the obstacle and the needle 21. In other words, it is possible to suppress the restriction of the application position to avoid contact between the needle 21 and the obstacle, and the fluctuation of the application position due to the needle 21 contacting the obstacle. In addition, damage to the needle 21 due to collision between the obstacle and the needle 21 can be suppressed.

[0045] In addition, the angle precision of the needle 21 is higher than in a configuration in which the angle of the needle 21 is adjusted by a stepping motor or the like. For example, in a configuration in which the angle of the needle 21 is adjusted by a stepping motor or the like, the angle of the needle 21 may vary by the amount of gear play even after positioning. In contrast, in this embodiment, the angle of the needle 21 is positioned by physical contact between the multiple grooves 35 of the angle adjustment plate 31 and the reference plate 36, so there is almost no play compared to a stepping motor or the like, and the variation in the angle of the needle 21 after positioning is small. Therefore, the position precision of application can be improved.

[0046] In addition, the angle adjustment unit 30 including the groove portion 35 and the reference plate 36 is smaller than a stepping motor or the like, so that it is possible to prevent the application head 10 from becoming large due to the angle adjustment function. The angle adjustment unit 30 is lighter than a stepping motor or the like, so that it is possible to prevent the application head 10 from becoming misaligned due to the weight of the application head 10. The angle adjustment unit 30 has a simpler structure than a stepping motor or the like, so that it is possible to improve the maintainability of the application head 10.

[0047] In one embodiment of the above, the angle adjustment plate 31 and the needle 21 are configured to be rotatable about the tip portion 21P of the needle 21 from which the coating liquid is discharged.

[0048] According to this embodiment, since the position of the tip 21P of the needle 21 is small when adjusting the angle of the needle 21, it is possible to suppress a decrease in the monitoring accuracy and position control accuracy of the tip 21P caused by fluctuations in the position of the tip 21P after the angle adjustment.

[0049] In one embodiment of the above, each of the multiple grooves 35 is a groove provided in a straight line extending in a direction intersecting the rotation direction, and the reference plate 36 is configured to be insertable into the inside of the groove 35.

[0050] According to this embodiment, the groove portion 35 and the reference plate 36 contact each other over a wide area in a direction intersecting the rotation direction. Since the displacement in the direction intersecting the contact surface is limited, the extension of the contact surface in the direction intersecting the rotation direction effectively limits the fluctuation of the angle adjustment plate 31 in the rotation direction. Therefore, the fluctuation of the angle adjustment plate 31 after positioning can be further suppressed.

[0051] In one embodiment of the above, the plurality of grooves 35 are tapered, each having an inclined surface whose opening width increases in the opening direction.

[0052] According to this embodiment, the reference plate 36 contacts both the inclined surface on one side of the rotation direction of the angle adjustment plate 31 and the inclined surface on the other side of the groove portion 35. This allows the reference plate 36 to limit the rotation of the angle adjustment plate 31 in both directions of the rotation direction. Therefore, it is possible to further suppress the movement of the angle adjustment plate 31 after positioning.

[0053] In one embodiment, the coating device 1 includes a Z-axis actuator 51 that moves the coating head 10 in a direction perpendicular to the coating surface.

[0054] According to this embodiment, the needle 21 can be moved toward or away from the application surface by only the Z-axis actuator 51. Therefore, it is possible to improve the control accuracy regarding the position of the tip 21P of the needle 21 compared to a configuration in which the needle is moved along the angular direction of the needle.

[0055] Some or all of the embodiments of the present invention will be described below. Note that the present invention is not limited to the following descriptions.

[0056] [Appendix 1] A coating head that applies a coating liquid to a coating surface, A discharge tool that discharges a coating liquid; an angle adjustment plate for adjusting an angle of a discharge direction of a discharge tool relative to a coating surface, the angle adjustment plate being configured to be rotatable together with the discharge tool in a rotation direction along a plane of the angle adjustment plate, and having a plurality of structural parts provided at different positions in the rotation direction; a positioning portion that positions the angle of the discharge tool by contacting at least one of the plurality of structural portions and fixing the angle adjustment plate; Equipped Coating head.

[0057] [Appendix 2] The angle adjustment plate and the discharge tool are configured to be rotatable in a rotation direction around a tip portion of the discharge tool from which the coating liquid is discharged. [Appendix 1] A coating head as described in the above.

[0058] [Appendix 3] Each of the plurality of structural portions is a groove portion provided linearly extending in a direction intersecting the rotation direction, The positioning portion is configured to be insertable into the groove portion. A coating head according to [Appendix 1] or [Appendix 2].

[0059] [Appendix 4] The plurality of grooves are tapered having an inclined surface whose opening width increases in the opening direction. [Appendix 3] A coating head as described in the above.

[0060] [Appendix 5] a reservoir that stores a coating liquid to be supplied to the discharge tool; A discharge tool holding portion for holding a discharge tool; A reservoir holder that holds the reservoir; Further equipped with The dispense tool holder and the reservoir holder are attached to an angle adjustment plate. A coating head described in any one of [Appendix 1] to [Appendix 4].

[0061] [Appendix 6] A coating head according to any one of [Appendix 1] to [Appendix 5], A first moving unit that moves the coating head in a direction intersecting with the coating surface; A second moving unit that moves the application head in a direction along the application surface; a third moving unit that moves the coating head in a direction along the coating surface and intersecting with the moving direction of the second moving unit; The coating device comprises:

[0062] As described above, according to one aspect of the present invention, it is possible to provide a coating head capable of improving the positional accuracy of coating, and a coating device including the same.

[0063] The application head may further include an encoder that detects the angle of the discharge tool. For example, the application head may further include a read head that is provided on the base plate and reads the multiple structures provided on the angle adjustment plate as an encoder scale. The application head may further include an encoder scale provided on the angle adjustment plate in addition to the multiple structures.

[0064] The above-described embodiments are intended to facilitate understanding of the present invention, and are not intended to limit the present invention. The elements of the embodiments, as well as their arrangements, materials, conditions, shapes, sizes, etc., are not limited to those illustrated, and can be changed as appropriate. In addition, configurations shown in different embodiments can be partially substituted or combined with each other. [Explanation of symbols]

[0065] 1... Coating device 10…Application head 20…Discharge unit 21...Needle 21P...Tip CP…Angle center 22...Syringe 23…Needle guide 24…Syringe holder 25...Distance sensor 30...Angle adjustment unit 31...Angle adjustment plate 32A, 32B, 32C...Guide slits 33A…Guide pin 33B, 33C...Guide bolt 35…Groove 36...Reference plate 40…Base plate 50…Drive unit 51...Z-axis actuator 52...Y-axis actuator 53…X-axis actuator

Claims

1. A coating head that applies a coating liquid to a coating surface, A discharge tool that discharges the coating liquid; an angle adjustment plate that adjusts an angle of a discharge direction of the discharge tool relative to the coating surface, the angle adjustment plate being configured to be rotatable together with the discharge tool in a rotation direction along a plane of the angle adjustment plate, and having a plurality of structural parts provided at different positions in the rotation direction; a positioning portion that positions the angle of the discharge tool by contacting at least one of the plurality of structural portions and fixing the angle adjustment plate; Equipped Coating head.

2. the angle adjustment plate and the discharge tool are configured to be rotatable in the rotation direction around a tip end portion of the discharge tool from which the coating liquid is discharged. The application head according to claim 1 .

3. Each of the plurality of structural portions is a groove portion provided linearly extending in a direction intersecting the rotation direction, The positioning portion is configured to be insertable into the groove portion. The application head according to claim 1 .

4. The plurality of grooves are tapered having an inclined surface whose opening width increases in the opening direction. The coating head according to claim 3.

5. a reservoir that stores the coating liquid to be supplied to the discharge tool; A discharge tool holding portion for holding the discharge tool; a reservoir holder that holds the reservoir; Further equipped with The dispense tool holder and the reservoir holder are attached to the angle adjustment plate. The application head according to claim 1 .

6. A coating head according to any one of claims 1 to 5; A first moving unit that moves the coating head in a direction perpendicular to the coating surface; A second moving unit that moves the coating head in a direction along the coating surface; a third moving unit that moves the coating head in a direction along the coating surface and intersects with a moving direction of the second moving unit; The coating device comprises:

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