Reticle case and method for manufacturing semiconductor device

Abstract

To suppress dust emission involved in friction between a reticle case and a pattern surface of a reticle.SOLUTION: A reticle case 101 can store a reticle 200 having a pattern surface 210, and a plurality of outside surfaces 211 to 214 connected to the outer edge of the pattern surface in a plan view. The reticle case 101 includes: a case body 1 where an opening for taking in / out the reticle is formed on the front side in a longitudinal direction; a lid 2 for opening / closing the opening; a moving part 3C for reciprocating in the longitudinal direction along with the opening / closing of the lid; and a plurality of support parts which can be brought into contact with each of the plurality of outside surfaces. The plurality of support parts include a left side support part 4C having a left side contact surface which can be brought into contact with a left side surface 213. Th reticle case 101 further includes a first link mechanism 5C for reciprocating the left side support part 4C in a lateral direction crossing the left side contact surface, involved in the reciprocation of the moving part 3C.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a reticle case and a method for manufacturing a semiconductor device. [Background technology]

[0002] Japanese Patent Laid-Open Publication No. 7-136257 (Patent Document 1) describes a reticle case that includes a pair of pins that sandwich a pattern surface of a reticle on which a transfer pattern is formed and a back surface located on the opposite side. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 7-136257 Summary of the Invention [Problem to be solved by the invention]

[0004] In the above reticle case, it is difficult to prevent the reticle from moving inside the reticle case. If the reticle moves, friction between the pattern surface and the pins occurs in an area close to the transferred pattern, and foreign matter generated by the friction may affect the transferred pattern.

[0005] This disclosure proposes a technique for suppressing dust generation caused by friction between a reticle case and a pattern surface of a reticle. [Means for solving the problem]

[0006] A reticle case according to an embodiment of the present disclosure is a reticle case capable of housing a reticle having a pattern surface and a plurality of outer side surfaces connected to the outer edge of the pattern surface in a plan view. The reticle case includes a case body having an opening formed on the front side in the front-rear direction for inserting and removing the reticle, a lid for opening and closing the opening, a moving part that moves back and forth in the front-rear direction as the lid is opened and closed, and a plurality of support parts that can come into contact with each of the plurality of outer side surfaces. The plurality of support parts include a first support part having a first contact surface that can come into contact with a left side surface or a right side surface that faces a left-right direction intersecting with the front-rear direction among the plurality of outer side surfaces. The reticle case further includes a first link mechanism that moves the first support part back and forth in a direction intersecting with the first contact surface as the moving part moves back and forth. Effect of the Invention

[0007] According to the present disclosure, it is possible to suppress generation of dust due to friction between the reticle case and the pattern surface of the reticle. [Brief description of the drawings]

[0008] [Figure 1] 1 is a top view showing a state in which the lid of reticle case 101 according to the first embodiment is closed. [Diagram 2] Fig. 2A is a partially enlarged top view of reticle case 101 shown in Fig. 1. Fig. 2B is a partially enlarged left side view of reticle case 101 shown in Fig. 2A. [Diagram 3] FIG. 1 is a top view showing a state in which the lid of a reticle case 101 is open. [Figure 4] Fig. 4A is a partially enlarged top view of reticle case 101 shown in Fig. 3. Fig. 4B is a partially enlarged left side view of reticle case 101 shown in Fig. 4A. [Diagram 5] Fig. 5A is a partially enlarged perspective view showing a first support portion of reticle case 101 shown in Fig. 1 and Fig. 2. Fig. 5B is a partially enlarged perspective view showing a first support portion of reticle case 101 shown in Fig. 3 and Fig. 4. [Figure 6]Fig. 6A is a partially enlarged perspective view showing the second support portion of reticle case 101 shown in Fig. 1 and Fig. 2. Fig. 6B is a partially enlarged perspective view showing the second support portion of reticle case 101 shown in Fig. 3 and Fig. 4. [Figure 7] 7 is a flowchart of an example of a method for manufacturing a semiconductor device using reticle case 101 shown in FIGS. 1 to 6. [Figure 8] 13 is a top view showing a state in which the lid of a modified example of reticle case 101 according to the first embodiment is closed. FIG. [Figure 9] 9 is a flowchart of a method for manufacturing a semiconductor device using reticle case 101 shown in FIG. [Figure 10] 11 is a top view showing a state in which the lid of a reticle case 102 according to the second embodiment is closed. FIG. [Figure 11] Fig. 11A is a partially enlarged top view of reticle case 102 shown in Fig. 10. Fig. 11B is a partially enlarged left side view of reticle case 102 shown in Fig. 11A. Fig. 11C is a partially enlarged right side view of reticle case 102 shown in Fig. 11A. [Figure 12] 1 is a top view showing a state in which the lid of the reticle case 102 is open. [Figure 13] Fig. 13A is a partially enlarged top view of reticle case 102 shown in Fig. 12. Fig. 13B is a partially enlarged left side view of reticle case 102 shown in Fig. 13A. Fig. 13C is a partially enlarged right side view of reticle case 102 shown in Fig. 13A. [Figure 14] 13 is a top view showing a state in which the lid of a reticle case 103 according to the third embodiment is closed. FIG. [Figure 15] Fig. 15A is a partially enlarged top view of reticle case 103 shown in Fig. 14. Fig. 15B is a partially enlarged left side view of reticle case 103 shown in Fig. 15A. Fig. 15C is a partially enlarged right side view of reticle case 103 shown in Fig. 15A. [Figure 16] FIG. 1 is a top view showing a state in which the lid of a reticle case 103 is open. [Figure 17]Fig. 17A is a partially enlarged top view of reticle case 103 shown in Fig. 16. Fig. 17B is a partially enlarged left side view of reticle case 103 shown in Fig. 17A. Fig. 17C is a partially enlarged right side view of reticle case 103 shown in Fig. 17A. [Figure 18] Fig. 18A is a diagram for explaining the operation of the cylinder and piston of the suction part when the lid of reticle case 103 is closed, and Fig. 18B is a diagram for explaining the operation of the cylinder and piston of the suction part when the lid of reticle case 103 is opened. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, the embodiments will be described with reference to the drawings. In the following description, the same parts and components are denoted by the same reference numerals. Their names and functions are also the same. Therefore, detailed description thereof will not be repeated. In the drawings, configurations may be omitted or simplified for convenience of explanation. It is also intended from the beginning that any configurations may be extracted from the embodiments and arbitrarily combined.

[0010] Embodiment 1 <Configuration of reticle case 101> As shown in FIGS. 1 to 4, the reticle case 101 according to the first embodiment is provided so as to accommodate and store the reticle 200 and to allow the reticle 200 to be carried in and out. The reticle 200 has a pattern surface 210 on which a transfer pattern is formed, and a plurality of outer side surfaces connected to the outer edge of the pattern surface 210. Hereinafter, the direction along the pattern surface 210 and in which the reticle 200 is carried in and out of the reticle case 101 is referred to as the front-rear direction. The direction along the pattern surface 210 and perpendicular to the front-rear direction is referred to as the left-right direction. The direction perpendicular to the pattern surface 210 is referred to as the up-down direction, and the side to which the pattern surface 210 faces is referred to as the upper side. The field of view when the reticle case 101 is viewed from above is referred to as a plan view. The plurality of outer side surfaces of the reticle 200 include a front side surface 211, a rear side surface 212, a left side surface 213, and a right side surface 214.

[0011] As shown in FIGS. 1 to 4, reticle case 101 includes a case body 1, a lid 2, a plurality of moving parts 3C and 3D, a plurality of supporting parts 4A, 4B, 4C and 4D, and a plurality of first link mechanisms 5C and 5D.

[0012] The case body 1 has a box shape. An opening 1G for loading and unloading the reticle 200 is formed in the case body 1. In the following, in the front-rear direction, one side where the opening 1G is formed with respect to the center of the reticle case 101 in a plan view is referred to as the front side. In the following, the left side when the reticle case 101 is viewed from the front side is referred to as the left side of the reticle case 101, and the right side when the reticle case 101 is viewed from the front side is referred to as the right side of the reticle case 101. The reticle case 101 has a structure that is symmetrical with respect to a center line that passes through the center in the left-right direction in a plan view and extends along the front-rear direction, for example.

[0013] The case body 1 has a front wall 1A, a rear wall 1B, a left side wall 1C, a right side wall 1D, a top wall 1E, and a bottom wall 1F. The front wall 1A faces the rear wall 1B in the front-rear direction. The left side wall 1C faces the right side wall 1D in the left-right direction. The top wall 1E faces the bottom wall 1F in the up-down direction. An opening 1G is formed in the front wall 1A. The left side wall 1C and the right side wall 1D each have positioning portions 1C1, 1D1 for positioning the reticle case 101 in a storage portion when the reticle case 101 is stored in the storage portion of an exposure apparatus or the like.

[0014] The case body 1 further has a plurality of pedestals 1H on which the reticle 200 is placed. Each of the plurality of pedestals 1H is connected to the bottom wall 1F of the case body 1. Each pedestal 1H has a mounting surface that is intended to come into contact with the rear surface of the reticle 200. The mounting surface of each pedestal 1H is disposed above the bottom surface of the bottom wall 1F. The heights of the mounting surfaces of each pedestal 1H relative to the bottom wall 1F are equal to each other.

[0015] The mounting surfaces of the multiple pedestals 1H are arranged at intervals from one another so as to overlap with the left front portion, right front portion, left rear portion, and right rear portion of the reticle 200 in a plan view. The mounting surfaces of the pedestals 1H are arranged at intervals from the rear wall 1B of the case body 1 in the front-rear direction. The mounting surfaces of the pedestals 1H are arranged at intervals from the left side wall 1C and right side wall 1D of the case body 1 in the left-right direction. The mounting surface of the pedestal 1H arranged so as to overlap with the left front portion of the reticle 200 in a plan view and the mounting surface of the pedestal 1H arranged so as to overlap with the right front portion of the reticle 200 in a plan view are connected to, for example, the front wall 1A.

[0016] The case body 1 further has a pair of inner walls 1I that are arranged, for example, inside the left side wall 1C and the right side wall 1D in the left-right direction. The pair of inner walls 1I extend in the front-rear direction between the front wall 1A and the rear wall 1B. The lower ends of the pair of inner walls 1I are connected to the bottom wall 1F. The upper ends of the pair of inner walls 1I are arranged above the mounting surfaces of the respective pedestals 1H in the up-down direction. The upper ends of the pair of inner walls 1I are arranged at an interval from the upper wall 1E.

[0017] The upper wall 1E is rotatable about, for example, a shaft 1J. The shaft 1J is disposed rearward of the rear wall 1B.

[0018] The lid 2 opens and closes the opening 1G. The lid 2 is connected to the case body 1 so as to be openable and closable. For example, the lid 2 is connected to the case body 1 via a shaft 2A extending along the left-right direction. The lid 2 is rotatable around the shaft 2A. The shaft 2A is connected to the upper end of the front wall 1A, for example. The lid 2 may be integral with the upper wall 1E and configured to open and close the opening 1G by rotating together with the upper wall 1E around the shaft 1J.

[0019] 1, 2A, and 2B show reticle case 101 with lid 2 closed. FIGS. 3, 4A, and 4B show reticle case 101 with lid 2 fully open. The state in which lid 2 is fully open means a state in which lid 2 is open to such an extent that reticle 200 can be carried in and out of case body 1 through opening 1G. Hereinafter, the state in which lid 2 is closed will be referred to as the closed state. The state in which lid 2 is open will be referred to as the open state. Note that part of moving section 3C is omitted from the illustration in FIG. 2A.

[0020] The distance in the front-to-rear direction between the lid 2 and the rear wall 1B changes when the lid 2 is opened or closed. The distance in the front-to-rear direction between the lid 2 and the rear wall 1B is shortest when the lid 2 is in a closed state. The distance in the front-to-rear direction between the lid 2 and the rear wall 1B is longest when the lid 2 is in a fully open state.

[0021] Each of the multiple moving parts 3C, 3D moves back and forth in the front-rear direction in response to the opening and closing of the lid 2. The moving part 3D is symmetrical to the moving part 3C with respect to the center line. The back-and-forth reciprocating movement of the moving part 3D is synchronized with the back-and-forth reciprocating movement of the moving part 3C.

[0022] Each of the multiple moving parts 3C, 3D moves forward when the lid 2 is opened. Each of the multiple moving parts 3C, 3D moves rearward when the lid 2 is closed. Each of the moving parts 3C, 3D has, for example, a front end 31 connected to the lid 2, a rear end 32 connected to the rear wall 1B of the case body 1, and at least one elastic part 33 (first elastic part) that elastically deforms in the front-rear direction as the lid 2 is opened or closed between the front end 31 and the rear end 32. The elastic part 33 is, for example, a spring. The elastic part 33 expands when the lid 2 is opened, and contracts when the lid 2 is closed. The elastic part 33 is disposed between a part of each of the moving parts 3C, 3D that is connected to a first shaft 53 of the first link mechanism 5C, 5D described later and the rear end.

[0023] Each of the moving parts 3C, 3D has, for example, a plurality of elastic parts 33A, 33B (see FIGS. 2A, 2B) connected in series with each other. One elastic part 33A is disposed, for example, between a part of each of the moving parts 3C, 3D connected to a first shaft 53 of a first link mechanism 5C, 5D (described later) and a part connected to a second shaft 61 of a second link mechanism 6. The other elastic part 33B is disposed, for example, between a part of each of the moving parts 3C, 3D connected to a second shaft 61 of a second link mechanism 6 (described later) and the rear end 32.

[0024] The elastic modulus of elastic portion 33A is appropriately set according to the clamping strength required for left support portion 4C and right support portion 4D in order to properly hold reticle 200. The elastic modulus of elastic portion 33B is appropriately set according to the clamping strength required for rear support portion 4B in order to properly hold reticle 200.

[0025] Each of the multiple supports 4A, 4B, 4C, and 4D can contact each of the multiple outer surfaces of the reticle 200. The multiple supports 4A, 4B, 4C, and 4D have a front support 4A, a rear support 4B, a left support 4C, and a right support 4D. The front support 4A has a front contact surface that can contact the front side 211 of the reticle 200. The rear support 4B has a rear contact surface that can contact the rear side 212 of the reticle 200. The left support 4C has a left contact surface that can contact the left side 213 of the reticle 200. The right support 4D has a right contact surface that can contact the right side 214 of the reticle 200. The contact surfaces of each of the multiple supports 4A, 4B, 4C, and 4D extend along the vertical direction and are provided so as not to contact the pattern surface 210 of the reticle 200.

[0026] The front contact surface of the front support part 4A faces the rear contact surface of the rear support part 4B, for example, in the front-rear direction. The front contact surface of the front support part 4A is provided so as to contact, for example, the center part in the left-right direction of the front side surface 211 of the reticle 200. The rear contact surface of the rear support part 4B is provided so as to contact, for example, the center part in the left-right direction of the rear side surface 212 of the reticle 200.

[0027] The left contact surface of the left support part 4C faces the right contact surface of the right support part 4D in the left-right direction, for example. The left contact surface of the left support part 4C is provided so as to contact, for example, the center part in the front-rear direction of the left side surface 213 of the reticle 200. The right contact surface of the right support part 4D is provided so as to contact, for example, the center part in the front-rear direction of the right side surface 214 of the reticle 200.

[0028] The first link mechanism 5C is provided so that the left contact surface of the left support part 4C comes into contact with the left side surface 213 of the reticle case 101 when the lid 2 is in the closed state. The first link mechanism 5C is provided so as to move the left support part 4C back and forth in the left-right direction intersecting with the left contact surface as the moving part 3C moves back and forth in the front-rear direction.

[0029] The first link mechanism 5C has a first arm 51, a second arm 52, a first shaft 53, and a first revolute pair .

[0030] The first arm 51 is connected to the moving part 3C. The first shaft 53 is connected to the case body 1 and extends along the vertical direction Z. The second arm 52 is rotatable around the first shaft 52. The first revolute pair 54 connects the first arm 51 to the second arm 52 so as to be rotatable therewith.

[0031] In plan view, the first link mechanism 5C has a V-shape. The outer end of the first arm 51 in the left-right direction is connected to the moving part 3C. The outer end of the second arm 52 in the left-right direction is rotatably connected to the first shaft 53. The inner end of the first arm 51 in the left-right direction is rotatably connected to the inner end of the second arm 52 in the left-right direction via the first revolute pair 54. In plan view, the first revolute pair 54 is disposed at the innermost position in the left-right direction of the first link mechanism 5C. The left support part 4C is connected to the first revolute pair 54. The left contact surface of the left support part 4C is disposed on the inner side of the first revolute pair 54.

[0032] The first revolute pair 54 includes, for example, a bolt, a nut, and a washer. The head of the bolt has a larger diameter than the hole diameter of the through hole formed at the inner end of each of the first arm 51 and the second arm 52. The shaft of the bolt is inserted through the through hole formed at the inner end of each of the first arm 51 and the second arm 52 and the through hole of the washer. The nut is disposed on the opposite side of the head of the bolt with respect to the first arm 51 and the second arm 52, and is fastened to the shaft of the bolt. The head of the bolt and the nut are disposed in the washer. The left support part 4C is connected to the washer of the first revolute pair 54. The planar shape of the through hole of the washer is, for example, elliptical. The dimension in the left-right direction of the through hole of the washer (opening width) is, for example, larger than the dimension in the front-rear direction of the through hole of the washer and the dimension of the shaft of the bolt (outer diameter). In this case, the alignment accuracy of the left support part 4C can be adjusted according to the tightening torque of the first arm 51 and the second arm 52 by the first revolute pair .

[0033] The first link mechanism 5C further includes a guide portion 55 that guides, for example, the left-right movement of the first revolute pair 54. The guide portion 55 includes a pin 55A and a guide groove 55B. The pin 55A protrudes downward from the first revolute pair 54, for example. The guide groove 55B is formed on the upper surface of a member connected to the case body 1. In a plan view, the inner peripheral surface of the guide groove 55B has, for example, an elliptical shape. At least a portion of the pin 55A is disposed inside the guide groove 55B and is provided to move along the inner peripheral surface of the guide groove 55B.

[0034] The angle formed between the first arm 51 and the second arm 52 in the open state of the lid 2 shown in Figures 3 and 4A is larger than the angle formed between the first arm 51 and the second arm 52 in the closed state of the lid 2 shown in Figures 1 and 2A. The angle formed between the first arm 51 and the second arm 52 in the closed state of the lid 2 is, for example, an acute angle. The angle formed between the first arm 51 and the second arm 52 in the open state of the lid 2 is, for example, an obtuse angle.

[0035] The first link mechanism 5D is symmetrical to the first link mechanism 5C with respect to the center line. The first link mechanism 5D is provided so that the right contact surface of the right support part 4D comes into contact with the right side surface 214 of the reticle case 101 when the lid 2 is in the closed state. The first link mechanism 5D is provided so that the right support part 4D moves reciprocally in the left-right direction intersecting with the right contact surface as the moving part 3D moves reciprocally in the front-rear direction.

[0036] Reticle case 101 further includes a second link mechanism 6. Second link mechanism 6 is provided so as to bring the rear contact surface of rear support part 4B into contact with rear side surface 212 of reticle case 101 when lid 2 is in the closed state. Second link mechanism 6 moves rear support part 4B back and forth in the front-rear direction intersecting with the rear contact surface in association with the reciprocating movement of moving parts 3C, 3D in the front-rear direction.

[0037] The second link mechanism 6 has a plurality of second shafts 61 and a third arm 62. Each of the plurality of second shafts 61 is connected to the case body 1 and extends along the left-right direction. The plurality of second shafts 61 are arranged coaxially with each other. Each of the plurality of second shafts 61 is stretched between the left side wall 1C and the inner wall 1I, or between the right side wall 1D and the inner wall 1I. The plurality of second shafts 61 may be connected to each other. The third arm 62 is connected to each of the moving parts 3C, 3D, and is rotatable around the second shaft 61. The third arm 62 has a plurality of first parts 62A arranged at intervals from each other in the left-right direction, and a second part 62B connecting the plurality of first parts 62A. One end of each of the plurality of first parts 62A is connected to the moving part 3C or the moving part 3D. The other end of each of the plurality of first parts 62A is connected to one end or the other end of the second part 62B. A portion located between one end and the other end of the plurality of first portions 62A is rotatably connected to the second shaft 61. The rear support portion 4B is connected to the second portion 62B.

[0038] As the moving parts 3C and 3D reciprocate in the front-rear direction, the third arm 62 rotates about the second shaft 61, and the rear support part 4B reciprocates in the front-rear direction.

[0039] The front support part 4A is connected to the lid 2. As the lid 2 is opened or closed, the front support part 4A moves back and forth in the front-rear direction.

[0040] The reticle case 101 further includes an elastic portion 7A and an elastic portion 7B (second elastic portion). The elastic portion 7A connects between the front support portion 4A and the lid 2. The elastic portion 7A can urge the front support portion 4A rearward relative to the lid 2. The elastic portion 7B connects between the rear support portion 4B and the third arm 62. The elastic portion 7B can urge the rear support portion 4B frontward relative to the case body 1.

[0041] In the reticle case 101, the first link mechanism 5C, 5D is constantly connected to the left support part 4C or the right support part 4D. The second link mechanism 6 is constantly connected to the rear support part 4B.

[0042] <Reticle Case 101 Operation> 1 to 6, the operation of reticle case 101 will be described. In reticle case 101, opening and closing of lid 2 switches between a state in which the contact surfaces of multiple supports 4A, 4B, 4C, and 4D are in contact with each of multiple outer surfaces of reticle 200 to support reticle 200, and a state in which the contact surfaces are retracted from the above-mentioned supporting state and do not support reticle 200.

[0043] When the lid 2 is closed, the reticle case 101 realizes the states shown in FIGS. 1, 2A, 2B, 5A, and 6A.

[0044] As shown in Figures 1, 2A, 2B, 5A, and 6A, when the cover 2 is in the closed state, the elastic parts 33 of the moving parts 3C and 3D are compressed. The connection parts of the moving parts 3C and 3D with the first arm 51 and the connection parts with the third arm 62 are disposed relatively rearward. When the cover 2 is in the closed state, the first link mechanisms 5C and 5D realize and maintain a state in which the left contact surface of the left support part 4C contacts the left side surface 213 of the reticle case 101 and the right contact surface of the right support part 4D contacts the right side surface 214 of the reticle case 101. Furthermore, the cover 2 and the second link mechanism 6 realize and maintain a state in which the front contact surface of the front support part 4A contacts the front side surface 211 of the reticle case 101 and the rear contact surface of the rear support part 4B contacts the rear side surface 212 of the reticle case 101.

[0045] When lid 2 is in the closed state, a state is realized and maintained in which each contact surface of multiple supports 4A, 4B, 4C, 4D is in contact with each of multiple outer surfaces of reticle 200. Therefore, when lid 2 is in the closed state, reticle case 101 can hold reticle 200.

[0046] In the reticle case 101, when the lid 2 is open, the states shown in FIG. 3, FIG. 4A, FIG. 4B, FIG. 5B, and FIG. 6B are realized. When the lid 2 is opened, the elastic parts 33 of the moving parts 3C, 3D are stretched, and the connection parts of the moving parts 3C, 3D with the first arm 51 and the connection parts with the third arm 62 move forward, compared to when the lid 2 is closed. In the first link mechanism 5C, 5D, the angle between the first arm 51 and the second arm 52 becomes larger, compared to when the lid 2 is closed. As a result, the left support part 4C and the right support part 4D move back in the left-right direction, compared to when the lid 2 is closed. When the lid 2 is further opened, the front support part 4A moves forward together with the lid 2, compared to when the lid 2 is closed. In the second link mechanism 6, the second part 62B of the third arm 62 moves rearward, and the rear support part 4B moves rearward.

[0047] When lid 2 is in the open state, a state is realized and maintained in which the contact surfaces of multiple supports 4A, 4B, 4C, 4D are retracted compared to when lid 2 is closed. Therefore, when lid 2 is in the open state, reticle case 101 does not hold reticle 200, and reticle 200 is movable within reticle case 101.

[0048] <Effects of Reticle Case 101> Reticle case 101 can hold reticle 200 by multiple supports 4A, 4B, 4C, and 4D that can come into contact with each of multiple outer surfaces of reticle 200, without using a member that comes into contact with pattern surface 210 of reticle 200. Therefore, reticle case 101 can suppress the occurrence of friction between reticle case 101 and pattern surface 210 of reticle 200, and can suppress the generation of dust associated with that friction.

[0049] In the reticle case 101, in conjunction with the opening and closing operation of the lid 2, a state in which the multiple support parts 4A, 4B, 4C, and 4D hold the reticle 200 and a state in which the multiple support parts 4A, 4B, 4C, and 4D do not hold the reticle 200 are switched.

[0050] Therefore, reticle case 101 can be used in a general apparatus (such as an exposure apparatus) that has a mechanism for opening and closing lid 2. In other words, reticle case 101 does not require an external mechanism for switching between the above two states other than an external mechanism for opening and closing lid 2, and therefore can be used for general purposes in combination with various apparatuses including an exposure apparatus.

[0051] Since reticle case 101 includes moving parts 3C, 3D having elastic part 33A and first link mechanisms 5C, 5D, the clamping strength of reticle 200 by left support part 4C and right support part 4D can be appropriately adjusted according to the elastic coefficient of elastic part 33A.

[0052] In the reticle case 101, the first revolute pair 54 includes a bolt, a nut, and a washer, and the left support part 4C is connected to the washer. Therefore, as described above, the alignment accuracy of the left support part 4C and the right support part 4D can be adjusted according to the tightening torque of the first arm 51 and the second arm 52 by each of the first revolute pairs 54 of the first link mechanisms 5C, 5D.

[0053] <Method of Manufacturing a Semiconductor Device Using Reticle Case 101> The reticle case 101 can be used in a method for manufacturing a semiconductor device.

[0054] 7, first, an exposure apparatus is prepared (preparation step S00). The exposure apparatus includes a housing section that houses reticle case 101 that houses reticle 200, an opening / closing section for opening and closing lid 2 of reticle case 101, and a transport arm for removing reticle 200 from reticle case 101.

[0055] Next, the photosensitive layer formed on the semiconductor substrate is patterned using an exposure device. In this process, first, the lid 2 of the reticle case 101 is half-opened (first process S01). The lid 2 is half-opened by an opening / closing unit of the exposure device. The half-open state of the lid 2 refers to a state in which the lid 2 is open to such an extent that the transport arm of the exposure device can be inserted into the opening 1G but the reticle 200 cannot be carried in or out of the case body 1 through the opening 1G. Even in the half-open state of the lid 2, the elastic parts 33 of the moving parts 3C and 3D are stretched compared to the closed state of the lid 2, and the connecting parts of the moving parts 3C and 3D with the first arm 51 and the connecting parts with the third arm 62 move forward. As a result, in the half-open state of the lid 2, the left support part 4C and the right support part 4D move back in the left and right directions compared to the closed state of the lid 2. Furthermore, when lid 2 is in a half-open state, front support portion 4A and rear support portion 4B are retracted in the front-rear direction compared to when lid 2 is in a closed state. In the first step (S01), reticle 200 is not held in reticle case 101.

[0056] Second, after the first step (S01), the transport arm of the exposure apparatus is inserted into the opening 1G of the reticle case 101 (second step S02). Third, after the second step S2, the transport arm grips the reticle 200. Fourth, after the third step (S03), the lid 2 of the reticle case 101 is fully opened (fourth step S04). The lid 2 is fully opened by an opening / closing unit of the exposure apparatus. Fifth, after the fourth step (S04), the transport arm takes out the reticle 200 from the reticle case 101 (fifth step S05). After the fifth step (S05) is completed, the lid 2 of the reticle case 101 is closed. Sixth, the photosensitive layer formed on the semiconductor substrate is exposed through the reticle 200 taken out of the reticle case 101 (sixth step S06).

[0057] In this manner, a semiconductor device can be manufactured by a semiconductor device manufacturing method including a photolithography process using reticle case 101. As described above, reticle case 101 can suppress dust generation caused by friction between reticle case 101 and pattern surface 210 of reticle 200. Therefore, according to the semiconductor device manufacturing method using reticle case 101, a decrease in the yield of semiconductor devices caused by foreign matter adhering to pattern surface 210 of reticle 200 can be suppressed.

[0058] Furthermore, in the above manufacturing method, the second step S2 in which the transfer arm is inserted into reticle case 101 and the third step S3 in which the transfer arm grips reticle 200 in reticle case 101 are performed with lid 2 in a half-open state. Therefore, the time during which lid 2 is fully open in the above manufacturing method can be shorter than the time during which the lid of the reticle case is fully open in a conventional manufacturing method for a semiconductor device using a reticle case. As a result, the inflow of foreign matter from the outside to the inside of reticle case 101 can be suppressed.

[0059] <Modifications of the reticle case 101> Reticle case 101 does not have to have a structure that is symmetrical with respect to a center line that passes through the center in the left-right direction and extends along the front-rear direction in a plan view.

[0060] The moving part 3 does not need to have an elastic part 33. In this case, the rear end 32 only needs to be provided so as to move in the front-rear direction simultaneously with the front end 31 as the lid 2 is opened and closed. For example, a shaft extending in the left-right direction may be connected to the rear wall 1B, and the rear end 3B may be connected to an end of an arm that rotates around the shaft.

[0061] The reticle case 101 may include at least one of the first link mechanism 5C (or the first link mechanism 5D) among the first link mechanisms 5C, 5D and the second link mechanism 6. Even in this case, when the cover 2 is opened or closed, the front support part 4A moves back and forth in the front-rear direction, and the left support part 4C connected to the first link mechanism 5C or the right support part 4D connected to the first link mechanism 5D moves back and forth in the left-right direction. Therefore, a state in which the entire outer side surface of the reticle 200 is supported by each support part is switched to a state in which at least the front side surface 211 and the left side surface 213 (or the right side surface 214) of the reticle 200 are not supported by the front support part 4A and the left support part 4C (or the right support part 4D). As a result, the opening and closing operation of the cover 2 can switch between a state in which the reticle case 101 holds the reticle 200 and a state in which the reticle case 101 does not hold the reticle 200.

[0062] 8, reticle case 101 does not necessarily have to include second link mechanism 6. Elastic portion 7B capable of biasing rear support portion 4B forward with respect to case body 1 may be connected between rear wall 1B of case body 1 and rear support portion 4B.

[0063] FIG. 9 is a flowchart of an example of a method for manufacturing a semiconductor device using reticle case 101 shown in FIG.

[0064] As shown in FIG. 9, in the process of patterning a photosensitive layer formed on a semiconductor substrate, first, lid 2 of reticle case 101 shown in FIG. 8 is fully opened (seventh step S07). In this step (S07), front support portion 4A moves forward, and reticle 200 is urged only forward by elastic portion 7B, so that reticle 200 is pushed forward. After the seventh step (S07), reticle 200 is taken out of reticle case 101 by a transport arm (eighth step S08). After the eighth step (S08) is completed, lid 2 of reticle case 101 is closed. Thereafter, the sixth step (S06) is performed.

[0065] 8 also can suppress dust generation due to friction between reticle case 101 and pattern surface 210 of reticle 200. Therefore, the semiconductor device manufacturing method shown in FIG. 9 also can suppress a decrease in the yield of semiconductor devices caused by foreign matter adhering to pattern surface 210 of reticle 200.

[0066] Embodiment 2 10 to 13, a reticle case 102 according to the second embodiment will be described. Unless otherwise specified, reticle case 102 according to the second embodiment has the same configuration and effect as reticle case 101 according to the first embodiment described above. Therefore, the same configuration as reticle case 101 described above is given the same reference numerals, and description thereof will not be repeated.

[0067] As shown in FIG. 10 to FIG. 13, the reticle case 102 includes third link mechanisms 8C, 8D and fourth link mechanisms 9C, 9D. The reticle case 102 further includes a first front support portion 4A1, a second front support portion 4A2, a first rear support portion 4B1, a second rear support portion 4B2, a first left support portion 4C1, a second left support portion 4C2, a first right support portion 4D1, and a second right support portion 4D2. The first front support portion 4A1 and the second front support portion 4A2 are arranged at intervals from each other in the left-right direction. The first rear support portion 4B1 and the second rear support portion 4B2 are arranged at intervals from each other in the left-right direction. The first left support portion 4C1 and the second left support portion 4C2 are arranged at intervals from each other in the front-rear direction. The first right support portion 4D1 and the second right support portion 4D2 are arranged at intervals from each other in the front-rear direction.

[0068] In a plan view, each support is provided so as to contact an area located near the corner on two outer sides intersecting at each corner of reticle 200. For example, first left support 4C1 and first rear support 4B1 are provided so as to contact an area located near the left rear corner of reticle 200 on each of the left and rear sides of reticle 200. Second left support 4C2 and first front support 4A1 are provided so as to contact an area located near the left front corner of reticle 200 on each of the left and front sides of reticle 200.

[0069] The first front support portion 4A1 and the second front support portion 4A2 are connected to the lid 2. The first left support portion 4C1 and the first rear support portion 4B1 are connectable to the third link mechanism 8C. The first right support portion 4D1 and the second rear support portion 4B2 are connectable to the third link mechanism 8D. The second left support portion 4C2 is connectable to the fourth link mechanism 9C. The second right support portion 4D2 is connectable to the fourth link mechanism 9D.

[0070] In the reticle case 102, when the lid 2 is in the closed state, a third state is realized in which the third link mechanism 8C is connected to each of the first left support portion 4C1 and the first rear support portion 4B1, and the fourth link mechanism 9C is connected to the second left support portion 4C2. In the third state, the third link mechanism 8D is further connected to each of the first right support portion 4D1 and the second rear support portion 4B2, and the fourth link mechanism 9D is connected to the second right support portion 4D2.

[0071] When the lid 2 is in the open state, a fourth state is realized in which the third link mechanism 8C is not connected to either the first left support portion 4C1 or the first rear support portion 4B1, and the fourth link mechanism 9C is not connected to the second left support portion 4C2. In the fourth state, furthermore, the third link mechanism 8D is not connected to either the first right support portion 4D1 or the second rear support portion 4B2, and the fourth link mechanism 9D is not connected to the second right support portion 4D2.

[0072] The third link mechanism 8C and the fourth link mechanism 9C are provided to switch between the third state and the fourth state in accordance with the reciprocating movement of the moving part 3C. The third link mechanism 8D and the fourth link mechanism 9D are provided to switch between the third state and the fourth state in accordance with the reciprocating movement of the moving part 3D.

[0073] Each of the first left support part 4C1, the second left support part 4C2, the first right support part 4D1, the second right support part 4D2, the first rear support part 4B1, and the second rear support part 4B2 is provided such that, in the fourth state, the position of the respective contact surface moves in a direction intersecting the contact surface depending on whether or not the weight of the reticle 200 is received. In the reticle case 102, in the fourth state, it is possible to switch between a first state in which the reticle 200 is placed on the pedestal 1H and a second state in which the reticle 200 is not placed on the pedestal 1H. Each of the first left support part 4C1, the second left support part 4C2, the first right support part 4D1, the second right support part 4D2, the first rear support part 4B1, and the second rear support part 4B2 is provided such that, by switching between the first state and the second state, the position of the respective contact surface moves in a direction intersecting the contact surface. From a different perspective, in reticle case 102, simply switching from the third state to the fourth state maintains each of the first rear support portion 4B1, the second rear support portion 4B2, the first left side support portion 4C1, the second left side support portion 4C2, the first right side support portion 4D1, and the second right side support portion 4D2 in contact with the respective outer surfaces of reticle 200.

[0074] The first right support portion 4D1, the second right support portion 4D2, and the second rear support portion 4B2 have the same configurations as the first left support portion 4C1, the second left support portion 4C2, and the first rear support portion 4B1, respectively. The third link mechanism 8D and the fourth link mechanism 9D have the same configurations as the third link mechanism 8C and the fourth link mechanism 9C, respectively, with respect to the center line. Below, the first left support portion 4C1, the second left support portion 4C2, the first rear support portion 4B1, the third link mechanism 8C, and the fourth link mechanism 9C will be described as representatives.

[0075] The left contact surface of the first left support portion 4C1 is positioned at a first position where it can contact the left side surface 213 of the reticle 200 in the first state, and is positioned at a second position that is retreated left-right from the first state in the second state.

[0076] In the first state, second left support portion 4C2 is disposed at a fifth position where it can come into contact with left side surface 213 of reticle 200, and in the second state, it is disposed at a sixth position that is retracted left and right from the first state.

[0077] The rear contact surface of the first rear support part 4B1 is positioned at a third position where it can contact the rear side 212 of the reticle 200 in the first state, and is positioned at a fourth position retreated in the fore-and-aft direction relative to the first state in the second state.

[0078] The third link mechanism 8C has a fourth arm 81 and a fifth arm 82 that move with the reciprocating movement of the moving part 3C in the front-rear direction. The fourth arm 81 can restrict the movement of the first left side support part 4C1 from the first position to the second position in the third state. The fourth arm 81 cannot restrict the movement of the first left side support part 4C1 from the first position to the second position in the fourth state. The fifth arm 82 can restrict the movement of the first rear side support part 4B1 from the third position to the fourth position in the third state. The fifth arm 82 cannot restrict the movement of the first rear side support part 4B1 from the third position to the fourth position in the fourth state.

[0079] The fourth link mechanism 9C has a seventh arm 91 that moves in accordance with the reciprocating movement of the moving part 3C in the front-rear direction. In the third state, the seventh arm 91 can restrict the movement of the second left side support part 4C2 from the fifth position to the sixth position. In the fourth state, the seventh arm 91 cannot restrict the movement of the second left side support part 4C2 from the first position to the second position.

[0080] The third link mechanism 8C and the fourth link mechanism 9C act as a locking mechanism that positions each of the first left side support portion 4C1, the first rear support portion 4B1, and the second left side support portion 4C2 in the third state, and allows each of the first left side support portion 4C1, the first rear support portion 4B1, and the second left side support portion 4C2 to move in the fourth state.

[0081] Specific configuration examples of the first left support portion 4C1, the first rear support portion 4B1, and the third link mechanism 8C will be described below as representative examples.

[0082] Each of the first left support part 4C1, the second left support part 4C2, and the first rear support part 4B1 has, for example, a lower side part 41, an upper side part 42, and an elastic part 43 (third elastic part). The lower side part 41 has one end located inside the outer edge of the pedestal 1H in a plan view, and the other end located outside the outer edge of the pedestal 1H. The upper side part 42 has a lower end connected to the other end of the lower side part 41, an upper end protruding upward from the pedestal 1H, and a left contact surface or a rear contact surface. The elastic part 43 is connected to the one end of the lower side part 41. The elastic part 43 compresses under the weight of the reticle 200 in a first state in which the reticle 200 is placed on the pedestal 1H, and expands in a second state in which the reticle 200 is not placed on the pedestal 1H compared to the first state.

[0083] The third link mechanism 8C includes, in addition to the fourth arm 81 and the fifth arm 82, a third shaft 83, a sixth arm 84, a second revolute pair 85, and a third revolute pair 86.

[0084] The third shaft 83 is connected to the case body 1 and extends in the up-down direction. The third shaft 83 is connected to, for example, the bottom wall of the case body 1. The sixth arm 84 is rotatable around the third shaft 83. The second revolute pair 85 rotatably connects the sixth arm 84 to the fourth arm 81. The third revolute pair 86 rotatably connects the fifth arm 82 to the sixth arm 84. The fourth arm 81 is connected to the moving part 3C.

[0085] As the moving part 3C reciprocates in the front-rear direction, the fourth arm 81 reciprocates in the front-rear direction, the sixth arm 84 rotates about the third shaft 83, and the fifth arm 82 reciprocates in the left-right direction. This causes a switch between a third state in which the first left side support part 4C1 is connected to the fourth arm 81 and the first rear side support part 4B1 is connected to the fifth arm 82, and a fourth state in which the first left side support part 4C1 is not connected to the fourth arm 81 and the first rear side support part 4B1 is not connected to the fifth arm 82.

[0086] The fourth link mechanism 9C further has an eighth arm 92 and a fourth shaft 93 in addition to the seventh arm 91. The eighth arm 92 is connected to the moving part 3C. The fourth shaft 93 is connected to the case main body 1 and extends in the left-right direction. The seventh arm 91 and the eighth arm 92 are integrally rotatable around the fourth shaft.

[0087] As the movable part 3C reciprocates in the front-rear direction, the seventh arm 91 and the eighth arm 92 rotate around the fourth shaft 93. This switches between a third state in which the seventh arm 91 is connected to the second left side support part 4C2 and a fourth state in which the seventh arm 91 is not connected to the second left side support part 4C2.

[0088] <Operation of the reticle case 102> 10 to 13, the operation of reticle case 102 will be described. In reticle case 102, opening and closing of lid 2 switches between a state in which the contact surfaces of the multiple support parts are in contact with each of the multiple outer surfaces of reticle 200 to support reticle 200, and a state in which the contact surfaces are retracted from the above-mentioned supporting state and do not support reticle 200.

[0089] When the lid 2 is closed, the reticle case 102 is in the state shown in FIGS. 10, 11A, 11B, and 11C.

[0090] As shown in Figures 10, 11A, 11B, and 11C, when the cover 2 is closed, the elastic parts 33 of the moving parts 3C and 3D are compressed. The connection parts of the moving parts 3C and 3D with the first arm 51 and the connection parts with the third arm 62 are relatively located on the rear side. When the cover 2 is closed, the third state is realized. In the third state, the first left support part 4C1 and the first rear support part 4B1 positioned by the third link mechanism 8C contact the left side surface 213 and the rear side surface 212 located near the left rear corner of the reticle 200. The first right support part 4D1 and the second rear support part 4B2 positioned by the third link mechanism 8D contact the right side surface 214 and the rear side surface 212 located near the right rear corner of the reticle 200. The second left support portion 4C2 positioned by the fourth link mechanism 9C comes into contact with the left side surface 213 located near the left front corner of the reticle 200. The second right support portion 4D2 positioned by the fourth link mechanism 9D comes into contact with the right side surface 214 located near the right front corner of the reticle 200. Furthermore, when the lid 2 is in the closed state, the first front support portion 4A1 and the second front support portion 4A2 come into contact with the front side surface 211 located near the left front corner or the right front corner of the reticle 200. This allows the reticle case 102 to hold the reticle 200 when the lid 2 is in the closed state.

[0091] In the reticle case 102, when the lid 2 is open, the states shown in Figures 12, 13A, 13B, and 13C are realized. When the lid 2 is opened, the elastic parts 33 of the moving parts 3C and 3D are stretched compared to when the lid 2 is closed, and the connection parts of the moving parts 3C and 3D with the fourth arm 81 and the connection parts of the eighth arm 92 move forward. Accordingly, in the third link mechanism 8C, the sixth arm 84 rotates around the third shaft 83, and the fifth arm 82 reciprocates in the left-right direction. In the fourth link mechanism 9C, the seventh arm 91 and the eighth arm 92 rotate around the fourth shaft 93. This realizes the fourth state.

[0092] As described above, simply switching from the third state to the fourth state maintains each of the first rear support portion 4B1, the second rear support portion 4B2, the first left side support portion 4C1, the second left side support portion 4C2, the first right side support portion 4D1, and the second right side support portion 4D2 in contact with their respective outer surfaces of the reticle 200.

[0093] In the fourth state, when the reticle 200 placed on the pedestal 1H is lifted slightly upward by the transport arm and at least a part of the weight of the reticle 200 is applied to the transport arm, the elastic parts 43 of the first rear support part 4B1, the second rear support part 4B2, the first left support part 4C1, the second left support part 4C2, the first right support part 4D1, and the second right support part 4D2 are stretched and the respective upper side parts 42 recede from the respective contact surfaces. This causes a transition from the first state in which the reticle 200 is placed on the pedestal 1H to a second state in which the reticle 200 is not placed on the pedestal 1H. As a result, the first rear support portion 4B1, the second rear support portion 4B2, the first left support portion 4C1, the second left support portion 4C2, the first right support portion 4D1, and the second right support portion 4D2 are each retracted in a direction intersecting with each contact surface, compared to the first state. As a result, in the second state, reticle case 102 does not hold reticle 200, and reticle 200 becomes movable within reticle case 102.

[0094] The method of manufacturing a semiconductor device using reticle case 102 has the same configuration and effects as the method of manufacturing a semiconductor device using reticle case 101.

[0095] <Effects of Reticle Case 102> As described above, reticle case 102 has the same effects as reticle case 101 .

[0096] In the reticle case 102, each of the first rear support portion 4B1, the second rear support portion 4B2, the first left support portion 4C1, the second left support portion 4C2, the first right support portion 4D1, and the second right support portion 4D2 is provided so as to move in a direction intersecting each contact surface while receiving the weight of the reticle 200. Therefore, in the method of manufacturing a semiconductor device using the reticle case 102, the reticle case 102 can hold the reticle 200 until immediately before the reticle 200 is carried out after the lid 2 is semi-opened or fully opened.

[0097] <Modification example of the reticle case 102> The reticle case 102 can also be deformed in the same manner as the reticle case 101.

[0098] The reticle case 102 only needs to include at least one of the third link mechanisms 8C and 8D or the third link mechanism 8D among the third link mechanisms 8C and 8D and the fourth link mechanisms 9C and 9D. Even in this case, with the opening and closing of the lid 2, the state in which the reticle case 102 holds the reticle 200 and the state in which the reticle case 102 does not hold the reticle 200 can be switched.

[0099] The first link mechanisms 5C and 5D, the second link mechanism 6, the third link mechanisms 8C and 8D, and the fourth link mechanisms 9C and 9D may be arbitrarily combined. For example, the reticle case 102 may include the third link mechanism 8C and the first link mechanism 5C.

[0100] Embodiment 3. With reference to FIGS. 14 to 18, the reticle case 103 according to Embodiment 3 will be described. The reticle case 103 according to Embodiment 3 has the same configuration and effects as the reticle case 101 according to Embodiment 1 above unless otherwise specified. Therefore, the same components as those of the reticle case 103 above are denoted by the same reference numerals, and the description will not be repeated. In FIGS. 15A and 17A, the illustration of the moving portion 3C is omitted.

[0101] 14 to 17, in reticle case 103, first openings 1K are formed in the upper surfaces of the plurality of pedestals 1H of case body 1. Reticle case 103 includes a plurality of suction portions 10 and a plurality of fifth link mechanisms 20.

[0102] Each of the plurality of suction portions 10 is capable of suctioning the rear surface of the reticle 200 through a first opening 1K formed in each pedestal 1H.

[0103] Each of the plurality of suction units 10 has a cylinder 11, a piston 12, and a tube portion 13. The cylinder 11 is connected to the case body 1. The piston 12 reciprocates relative to the cylinder 11. The piston 12 divides the inside of the cylinder 11 into a first space and a second space. As shown in FIG. 18, the cylinder 11 is formed with a second opening 11B communicating with the second space and a third opening 11A communicating with the first space. The second opening 11B is always open. The tube portion 13 connects between the third opening 11A and the first opening 1K. Each of the plurality of suction units 10 is provided so as to switch between a fifth state in which the first opening 1K acts as an intake port and a sixth state in which the first opening 1K acts as an exhaust port by the reciprocating movement of the piston 12 relative to the cylinder 11.

[0104] The fifth state is realized when the cylinder 11 is pushed into the piston 12. In the fifth state, the air pressure in the second space is positive relative to the external space, and the air pressure in the first space is negative relative to the external space. The sixth state is realized when the cylinder 11 is pulled out by the piston 12. In the sixth state, the air pressure in the first space is positive relative to the external space, and the air pressure in the second space is negative relative to the external space.

[0105] Each of the plurality of fifth link mechanisms 20 reciprocates the piston 12 of each of the plurality of attraction portions 10 relative to the cylinder 11 in accordance with the reciprocating movement of the moving portions 3C, 3D in the front-rear direction.

[0106] Each fifth link mechanism 20 has a fifth shaft 21 and a ninth arm 22. The fifth shaft 21 is connected to the case body 1 and extends along the left - right direction intersecting the front - rear direction. The ninth arm 22 is rotatable around the fifth shaft 21.

[0107] The ninth arm 22 of each fifth link mechanism 20 has one end connected to the moving part 3C or the moving part 3D and the other end connected to the piston 12 of one suction part 10. Along with the reciprocating movement of the moving parts 3C, 3D in the front - rear direction, in each fifth link mechanism 20, the ninth arm 22 rotates around the fifth shaft 21, and the piston 12 of each suction part 10 reciprocates in the front - rear direction.

[0108] In the reticle case 103, a space for accommodating a plurality of pedestals 1H and the reticle 200 is separated from a space for accommodating the moving parts 3C, 3D, a plurality of fifth link mechanisms 20, and the cylinders 11 and pistons 12 of a plurality of suction parts 10 by a pair of inner walls 1I of the case body 1. The pipe part 13 of each suction part 10 penetrates the inner wall 1I. Preferably, the pipe part 13 is air - tightly connected to the inner wall 1I.

[0109] <Operation of the reticle case 103> Next, with reference to FIGS. 14 to 17, the operation of the reticle case 103 will be described. In the reticle case 103, a state where each of the plurality of suction parts 10 sucks the back surface of the reticle 200 and supports the reticle 200, and a state where each of the plurality of suction parts 10 does not suck the back surface of the reticle 200 and does not support the reticle 200 are switched by the opening and closing of the lid 2.

[0110] In the reticle case 103, in the closed state of the lid 2, the states shown in FIGS. 14, 15A, 15B, and 15C are realized.

[0111] As shown in FIG. 14, FIG. 15A, FIG. 15B, and FIG. 15C, when the lid 2 is closed, the elastic parts 33 of the moving parts 3C, 3D are compressed. The connection parts of the moving parts 3C, 3D with the ninth arm 22 are disposed relatively rearward. When the lid 2 is closed, the fifth state is realized. In the fifth state, the pistons 12 of the suction parts 10 are pushed into the cylinders 11 by the fifth link mechanisms 20, and the air pressure in the first space connected to the first openings 1K becomes negative relative to the external space. As a result, the first openings 1K act as air intakes, and the back surface of the reticle 200 placed on the base 1H is sucked to the base 1H. As a result, when the lid 2 is closed, the reticle case 103 can hold the reticle 200.

[0112] When the lid 2 is open, the reticle case 103 realizes the states shown in Figures 16, 17A, 17B, and 17C. When the lid 2 is open, the elastic parts 33 of the moving parts 3C and 3D are stretched compared to when the lid 2 is closed, and the connection parts of the moving parts 3C and 3D with the ninth arms 22 move forward. Accordingly, in each of the fifth link mechanisms 20, the ninth arms 22 rotate around the fifth shafts 21, and the pistons 12 move rearward. This realizes the sixth state. In the sixth state, the reticle case 103 does not hold the reticle 200, and the reticle 200 is movable within the reticle case 103.

[0113] The method of manufacturing a semiconductor device using reticle case 103 has the same configuration and effects as the method of manufacturing a semiconductor device using reticle case 101.

[0114] <Effects of Reticle Case 103> As described above, reticle case 103 has the same effects as reticle case 101 .

[0115] In reticle case 103, the space in which reticle 200 is housed can be separated from the space in which all of the members that are driven in association with the opening and closing of lid 2 are housed. Therefore, in reticle case 103, dust generation within reticle case 103 in association with the opening and closing of lid 2 can be more effectively suppressed. Furthermore, in reticle case 103, the intrusion of foreign matter into the space in which reticle 200 is housed can be more effectively suppressed.

[0116] Various aspects of the present disclosure are summarized below as appendices. [Appendix 1] A reticle case capable of accommodating a reticle having a pattern surface and a plurality of outer surfaces connected to an outer edge of the pattern surface in a plan view, comprising: a case body having an opening formed on a front side in a front-rear direction for inserting and removing the reticle; A cover for opening and closing the opening; a moving unit that moves back and forth in the front-rear direction in response to opening and closing of the lid; a plurality of support portions contactable with each of the plurality of outer surfaces; the plurality of support portions include a first support portion having a first contact surface capable of coming into contact with a left side surface or a right side surface of the plurality of outer surfaces facing a left-right direction intersecting with the front-rear direction, The reticle case further includes a first link mechanism that causes the first support portion to reciprocate in a direction intersecting the first contact surface in accordance with the reciprocating movement of the moving portion. [Appendix 2] The first link mechanism includes: A first arm connected to the moving part; a first shaft connected to the case body and extending in the up-down direction; a second arm rotatable about the first shaft; a first revolute pair that rotatably connects the first arm to the second arm, The first support portion is connected to the first revolute pair, 2. The reticle case of claim 1, wherein as the movable part reciprocates in the front-to-rear direction, the second arm rotates relative to the first arm, and the first revolute pair and the first support part reciprocate in a left-to-right direction that intersects with the front-to-rear direction. [Appendix 3] the moving portion has a front end connected to the lid, a rear end connected to the case body, and a first elastic portion that elastically deforms in the front-rear direction, 3. The reticle case of claim 2, wherein the first elastic portion is disposed between a portion of the moving portion connected to the first arm and the rear end. [Appendix 4] The plurality of support portions include a second support portion having a second contact surface capable of contacting a rear side surface of the plurality of outer surfaces facing the front side in the front-rear direction, and a third support portion having a third contact surface capable of contacting a front side surface of the plurality of outer surfaces facing the rear side in the front-rear direction, The third support is connected to the lid, 4. The reticle case according to claim 2, further comprising a second elastic portion capable of urging the second support portion forward relative to the case body. [Appendix 5] the plurality of support portions include a second support portion having a second contact surface capable of coming into contact with a rear side surface of the plurality of outer sides facing the front side in the front-rear direction, a second link mechanism that reciprocates the second support portion in a direction intersecting the second contact surface in accordance with the reciprocating movement of the moving portion in the front-rear direction, The second link mechanism includes: a second shaft connected to the case body and extending along a left-right direction intersecting the front-rear direction; a third arm connected to the moving portion and rotatable about the second shaft; The second support portion is connected to the third arm, 5. A reticle case as described in any one of appendices 2 to 4, wherein the third arm rotates around the second shaft and the second support part reciprocates in the front-to-rear direction in response to the reciprocating movement of the movable part in the front-to-rear direction. [Appendix 6] A reticle case capable of accommodating a reticle having a pattern surface and a plurality of outer surfaces connected to an outer edge of the pattern surface in a plan view, comprising: a case body having an opening formed on a front side in a front-rear direction for inserting and removing the reticle; A cover for opening and closing the opening; a moving part having a front end connected to the lid and a rear end connected to the case body, the moving part moving back and forth in the front-rear direction as the lid is opened and closed; a plurality of support portions contactable with each of the plurality of outer surfaces; the plurality of support portions include a second support portion having a second contact surface capable of coming into contact with a rear side surface of the plurality of outer sides facing the front side in the front-rear direction, The reticle case further includes a second link mechanism that reciprocates the second support portion in a direction intersecting the second contact surface in association with opening and closing of the lid. [Appendix 7] A reticle case capable of accommodating a reticle having a pattern surface and a plurality of outer surfaces connected to an outer edge of the pattern surface in a plan view, comprising: a case body having an opening formed on a front side in a front-rear direction for inserting and removing the reticle; A cover for opening and closing the opening; a moving part having a front end connected to the lid and a rear end connected to the case body, the moving part moving back and forth in the front-rear direction as the lid is opened and closed; A plurality of supports contactable with each of the plurality of outer surfaces; a third link mechanism having a fourth arm and a fifth arm that move in association with the reciprocating movement of the moving part in the front-rear direction, the case body has a base on which the reticle is placed, the plurality of support parts include a first support part having a first contact surface capable of contacting a left side surface or a right side surface of the plurality of outer sides of the reticle placed on the pedestal, the left side surface or the right side surface facing a left-right direction intersecting with the front-rear direction, and a second support part having a second contact surface capable of contacting a rear side surface of the plurality of outer sides facing a front side in the front-rear direction, In a first state in which the reticle is placed on the pedestal, the first contact surface is disposed at a first position capable of contacting the left side surface or the right side surface, and the second contact surface is disposed at a third position capable of contacting the rear side surface; In a second state in which the reticle is not placed on the pedestal, the first contact surface is disposed at a second position that is retreated in the left-right direction from the first state, and the second contact surface is disposed at a fourth position that is retreated in the front-rear direction from the first state, the third link mechanism is configured to switch between a third state in which the fourth arm limits the movement of the first support part from the first position to the second position and the fifth arm limits the movement of the second support part from the third position to the fourth position in association with the reciprocating movement of the movable part, and a fourth state in which the fourth arm is unable to limit the movement of the first support part from the first position to the second position and the fifth arm is unable to limit the movement of the second support part from the third position to the fourth position. [Appendix 8] The third link mechanism is a third shaft connected to the case body and extending in the up-down direction; a sixth arm rotatable about the third shaft; A second revolute pair that rotatably connects the sixth arm to the fourth arm; a third rotation pair that rotatably connects the fifth arm to the sixth arm, The fourth arm is connected to the moving part, 8. The reticle case of claim 7, wherein as the movable part reciprocates in the front-rear direction, the fourth arm reciprocates in the front-rear direction, the sixth arm rotates about the third shaft, and the fifth arm reciprocates in the left-right direction, switching between the third state in which the first support part is connected to the fourth arm and the second support part is connected to the fifth arm, and the fourth state in which the first support part is not connected to the fourth arm and the second support part is not connected to the fifth arm. [Appendix 9] Each of the first support portion and the second support portion is a lower side portion having one end located inside an outer edge of the base in the plan view and the other end located outside the outer edge of the base; an upper side portion having a lower end connected to the other end of the lower side portion, an upper end protruding above the base, and the first contact surface or the second contact surface; and a third elastic portion connected to the one end of the lower side portion, the third elastic portion being compressed in the first state and expanded in the second state. [Appendix 10] the plurality of support portions are disposed forward of the first support portion and further include a third support portion having a third contact surface; the third contact surface is capable of coming into contact with the left side surface or the right side surface of the reticle that is capable of being contacted by the first contact surface, among the plurality of outer sides of the reticle; In the first state, the third contact surface is disposed at a fifth position where the third contact surface can come into contact with the left side surface or the right side surface, and in the second state, the third contact surface is disposed at a sixth position where the third contact surface is retreated relative to the first state; a fourth link mechanism having a seventh arm that moves in association with the reciprocating movement of the moving part in the front-rear direction; 8. The reticle case of claim 7, wherein the seventh arm is capable of restricting movement of the third support part from the fifth position to the sixth position in the third state, and is not capable of restricting movement of the third support part from the first position to the second position in the fourth state. [Appendix 11] A reticle case capable of accommodating a reticle having a pattern surface and a plurality of outer surfaces connected to an outer edge of the pattern surface in a plan view, comprising: a case body having an opening formed on a front side in a front-rear direction for inserting and removing the reticle; A cover for opening and closing the opening; a moving part having a front end connected to the lid and a rear end connected to the case body, the moving part moving back and forth in the front-rear direction as the lid is opened and closed; A plurality of supports contactable with each of the plurality of outer surfaces; a fourth link mechanism having a seventh arm that moves in association with the reciprocating movement of the moving part in the front-rear direction, the case body has a base on which the reticle is placed, the plurality of support parts includes a third support part having a third contact surface capable of contacting the left side surface or the right side surface of the reticle that is capable of contacting the first contact surface, among the plurality of outer sides of the reticle placed on the pedestal; In a first state in which the reticle is placed on the pedestal, the third contact surface is disposed at a fifth position capable of contacting the left side surface or the right side surface, and in a second state in which the reticle is not placed on the pedestal, the third contact surface is disposed at a sixth position which is retreated relative to the first state; the fourth link mechanism is configured to switch between a state in which the seventh arm limits the movement of the third support part from the fifth position to the sixth position and a state in which the seventh arm cannot limit the movement of the third support part from the fifth position to the sixth position. [Appendix 12] The fourth link mechanism is An eighth arm connected to the moving part; a fourth shaft connected to the case body and extending along a left-right direction intersecting the front-rear direction, the seventh arm and the eighth arm are integrally rotatable around the fourth shaft, 12. The reticle case of claim 11, wherein the seventh arm and the eighth arm rotate about the fourth shaft in response to the reciprocating movement of the movable part in the forward and backward directions, thereby switching between the third state in which the seventh arm is connected to the first support part and the fourth state in which the seventh arm is not connected to the first support part. [Appendix 13] A reticle case capable of accommodating a reticle having a pattern surface and a back surface located opposite to the pattern surface, a case body having an opening formed on a front side in a front-rear direction for inserting and removing the reticle; A cover for opening and closing the opening; a moving part having a front end connected to the lid and a rear end connected to the case body, the moving part moving back and forth in the front-rear direction as the lid is opened and closed; the case body includes a base on which the reticle is placed and has an upper surface capable of coming into contact with the back surface of the reticle; A first opening is formed in the upper surface of the base, at least one suction portion capable of suctioning the back surface of the reticle through the first opening, the at least one suction unit has a cylinder connected to the case body and a piston that reciprocates relative to the cylinder, and is configured to switch between a fifth state in which the first opening acts as an intake port and a sixth state in which the first opening acts as an exhaust port by the reciprocating movement of the piston relative to the cylinder; the reticle case further comprising a fifth link mechanism that causes the piston to reciprocate relative to the cylinder in accordance with the reciprocating movement of the moving part in the forward and backward directions. [Appendix 14] the at least one suction portion is a plurality of the suction portions arranged at intervals from each other in the plan view, the case body further includes a wall portion that separates a space in which the base and the reticle are accommodated from a space in which the moving unit, the fifth link mechanism, and the cylinder and the piston of each of the plurality of suction units are accommodated; The piston divides the inside of the cylinder into a first space and a second space, The cylinder is formed with a second opening communicating with the second space and a third opening communicating with the first space, 14. The reticle case of claim 13, wherein each of the plurality of suction portions connects between the third opening and the first opening and further has a tube portion penetrating the wall portion. [Appendix 15] The fifth link mechanism is a fifth shaft connected to the case body and extending along a left-right direction intersecting the front-rear direction; a ninth arm rotatable about the fifth shaft; the ninth arm has one end connected to the moving portion and the other end connected to the piston of the adsorption portion, 15. The reticle case of claim 13, wherein the ninth arm rotates about the fifth shaft and the piston reciprocates in the front-rear direction in response to the reciprocating movement of the movable part in the front-rear direction. [Appendix 16] A method for manufacturing a semiconductor device by using a reticle case according to any one of claims 1 to 15, a step of preparing an exposure apparatus including a housing section in which the reticle case housing the reticle is housed, an opening / closing section for opening and closing a lid of the reticle case, and a transport arm for removing the reticle from the reticle case; and patterning a photosensitive layer formed on a semiconductor substrate using the exposure apparatus. The patterning step includes: a first step in which the opening / closing unit half-opens the lid of the reticle case; a second step of inserting the transfer arm into the reticle case after the first step; a third step of holding the reticle housed in the reticle case with the transport arm; a third step of fully opening the lid after the third step; a fifth step of removing the reticle from the reticle case after the fourth step; and a sixth step of exposing a photosensitive layer formed on a semiconductor substrate through the reticle removed from the reticle case. [Appendix 17] A method for manufacturing a semiconductor device using the reticle case according to claim 4, a step of preparing an exposure apparatus including a housing section for housing the reticle case, an opening / closing section for opening and closing a lid of the reticle case, and a transport arm for removing the reticle from the reticle case; and patterning a photosensitive layer formed on a semiconductor substrate using the exposure apparatus. The patterning step includes: A sixth step in which the opening / closing unit fully opens the lid; a seventh step of inserting the transfer arm into the reticle case after the sixth step; an eighth step of holding the reticle housed in the reticle case with the transport arm; and a ninth step of exposing a photosensitive layer formed on a semiconductor substrate through the reticle taken out of the reticle case, In the sixth step, the reticle is moved forward by a restoring force of the second elastic portion when the lid is fully opened.

[0117] Although the embodiment of the present disclosure has been described above, the above-mentioned embodiment can be modified in various ways. The scope of the present disclosure is not limited to the above-mentioned embodiment. The scope of the present disclosure is defined by the claims, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0118] 1 Case body, 1A front wall, 1B rear wall, 1C left wall, 1D right wall, 1E top wall, 1F bottom wall, 1G opening, 1H pedestal, 1I inner wall, 1J shaft, 1K 1st opening, 2 lid, 2A shaft, 3C,3D moving part, 31 front end, 32 rear end, 4A front support part, 4A1 1st front support part, 4A2 2nd front support part, 4B Rear support part, 4B1 1st rear support part, 4B2 2nd rear support part, 4C Left support part, 4C1 1st left support part, 4C2 2nd left support part, 4D Right support part, 4D1 1st right support part, 4D2 2nd right support part, 5C,5D 1st link mechanism, 6 2nd link mechanism, 7A, 7B, 33, 33A, 33B, 43 Elastic portion, 8C, 8D third link mechanism, 9C, 9D fourth link mechanism, 10 suction portion, 11 cylinder, 11A third opening, 11B second opening, 12 piston, 13 tube portion, 20 fifth link mechanism, 21 fifth shaft, 22 ninth arm, 41 lower side portion, 42 upper side portion, 51 first arm, 52 second arm, 53 first shaft, 54 first revolute pair, 55 guide portion, 55A pin, 55B guide groove, 61 second shaft, 62 third arm, 62A first portion, 62B second portion, 81 fourth arm, 82 fifth arm, 83 third shaft, 84 sixth arm, 85 second revolute pair, 86 third revolute pair, 91 seventh arm, 92 eighth arm, 93 fourth shaft, 101, 102, 103 reticle case, 200 Reticle, 210 pattern surface, 211 front side, 212 rear side, 213 left side, 214 right side.

Claims

1. A reticle case capable of accommodating a reticle having a pattern surface and a plurality of outer surfaces connected to an outer edge of the pattern surface in a plan view, a case body having an opening formed on the front side in the front-to-rear direction for inserting and removing the reticle; a lid for opening and closing the opening; a moving unit that moves back and forth in the front-rear direction in response to opening and closing of the lid; a plurality of support portions that can come into contact with each of the plurality of outer surfaces; the plurality of support portions include a first support portion having a first contact surface that can come into contact with a left side surface or a right side surface of the plurality of outer surfaces that faces a left-right direction intersecting with the front-rear direction, The reticle case further includes a first link mechanism that reciprocates the first support portion in a direction intersecting the first contact surface in accordance with the reciprocating movement of the moving portion.

2. The first link mechanism is a first arm connected to the moving part; a first shaft connected to the case body and extending in the up-down direction; a second arm rotatable about the first shaft; a first revolute pair that rotatably connects the first arm to the second arm, The first support portion is connected to the first revolute pair, 2. The reticle case according to claim 1, wherein the second arm rotates relative to the first arm as the movable part reciprocates in the front-to-rear direction, and the first revolute pair and the first support part reciprocate in a left-to-right direction that intersects with the front-to-rear direction.

3. the moving portion has a front end connected to the lid, a rear end connected to the case body, and a first elastic portion that elastically deforms in the front-rear direction, 3. The reticle case according to claim 2, wherein the first elastic portion is disposed between the rear end and a portion of the moving portion connected to the first arm.

4. the plurality of support portions include a second support portion having a second contact surface that can come into contact with a rear side surface of the plurality of outer surfaces that faces the front side in the front-to-rear direction, and a third support portion having a third contact surface that can come into contact with a front side surface of the plurality of outer surfaces that faces the rear side in the front-to-rear direction, the third support portion is connected to the lid, 4. The reticle case according to claim 2, further comprising a second elastic portion capable of biasing said second support portion forward relative to said case body.

5. the plurality of support portions include a second support portion having a second contact surface that can come into contact with a rear surface of the plurality of outer surfaces that faces forward in the front-to-rear direction, a second link mechanism that reciprocates the second support portion in a direction intersecting the second contact surface in accordance with the reciprocating movement of the moving portion in the front-rear direction, The second link mechanism is a second shaft connected to the case body and extending along a left-right direction intersecting the front-rear direction; a third arm connected to the moving part and rotatable around the second shaft; the second support portion is connected to the third arm, 4. The reticle case according to claim 2, wherein the third arm rotates about the second shaft and the second support part reciprocates in the front-rear direction in response to the reciprocating movement of the moving part in the front-rear direction.

6. A reticle case capable of accommodating a reticle having a pattern surface and a plurality of outer surfaces connected to an outer edge of the pattern surface in a plan view, a case body having an opening formed on the front side in the front-to-rear direction for inserting and removing the reticle; a lid for opening and closing the opening; a moving part having a front end connected to the lid and a rear end connected to the case body, the moving part moving back and forth in the front-rear direction as the lid is opened and closed; a plurality of support portions that can come into contact with each of the plurality of outer surfaces; the plurality of support portions include a second support portion having a second contact surface that can come into contact with a rear surface of the plurality of outer surfaces that faces forward in the front-to-rear direction, The reticle case further includes a second link mechanism that reciprocates the second support portion in a direction intersecting the second contact surface as the lid is opened or closed.

7. A reticle case capable of accommodating a reticle having a pattern surface and a plurality of outer surfaces connected to an outer edge of the pattern surface in a plan view, a case body having an opening formed on the front side in the front-to-rear direction for inserting and removing the reticle; a lid for opening and closing the opening; a moving part having a front end connected to the lid and a rear end connected to the case body, the moving part moving back and forth in the front-rear direction as the lid is opened and closed; a plurality of support portions contactable with each of the plurality of outer surfaces; a third link mechanism having a fourth arm and a fifth arm that move in association with the reciprocating movement of the moving part in the front-rear direction, the case body has a base on which the reticle is placed, the plurality of support parts include a first support part having a first contact surface that can come into contact with a left side surface or a right side surface of the plurality of outer surfaces of the reticle placed on the pedestal, the left side surface or the right side surface facing a left-right direction that intersects with the front-rear direction, and a second support part having a second contact surface that can come into contact with a rear side surface of the plurality of outer surfaces facing a front side in the front-rear direction, In a first state in which the reticle is placed on the pedestal, the first contact surface is disposed at a first position where it can come into contact with the left side surface or the right side surface, and the second contact surface is disposed at a third position where it can come into contact with the rear side surface; In a second state in which the reticle is not placed on the pedestal, the first contact surface is disposed at a second position that is recessed in the left-right direction relative to the first state, and the second contact surface is disposed at a fourth position that is recessed in the front-rear direction relative to the first state; the third link mechanism is configured to switch, in accordance with the reciprocating movement of the movable part, between a third state in which the fourth arm restricts the movement of the first support part from the first position to the second position and the fifth arm restricts the movement of the second support part from the third position to the fourth position, and a fourth state in which the fourth arm cannot restrict the movement of the first support part from the first position to the second position and the fifth arm cannot restrict the movement of the second support part from the third position to the fourth position.

8. The third link mechanism is a third shaft connected to the case body and extending in the up-down direction; a sixth arm rotatable about the third shaft; a second revolute pair that rotatably connects the sixth arm to the fourth arm; a third rotation pair that rotatably connects the fifth arm to the sixth arm, the fourth arm is connected to the moving part, As the moving part reciprocates in the front-rear direction, the fourth arm reciprocates in the front-rear direction.

8. The reticle case according to claim 7, wherein the reticle case moves in the left-right direction, the sixth arm rotates about the third shaft, the fifth arm moves back and forth in the left-right direction, and the reticle case is switched between the third state in which the first support portion is connected to the fourth arm and the second support portion is connected to the fifth arm, and the fourth state in which the first support portion is not connected to the fourth arm and the second support portion is not connected to the fifth arm.

9. Each of the first support portion and the second support portion is a lower side portion having one end located inside an outer edge of the base in the plan view and the other end located outside the outer edge of the base; an upper side portion having a lower end connected to the other end of the lower side portion, an upper end protruding above the base, and the first contact surface or the second contact surface; 9. The reticle case according to claim 7, further comprising a third elastic portion connected to the one end of the lower side portion, the third elastic portion being compressed in the first state and being expanded in the second state.

10. the plurality of support portions further include a third support portion disposed forward of the first support portion and having a third contact surface; the third contact surface is capable of coming into contact with the left side surface or the right side surface of the reticle that is capable of coming into contact with the first contact surface, among the plurality of outer surfaces of the reticle; In the first state, the third contact surface is disposed at a fifth position where the third contact surface can come into contact with the left side surface or the right side surface, and in the second state, the third contact surface is disposed at a sixth position where the third contact surface is retracted relative to the first state, a fourth link mechanism having a seventh arm that moves in accordance with the reciprocating movement of the moving part in the front-rear direction, 8. The reticle case according to claim 7, wherein the seventh arm is capable of restricting movement of the third support part from the fifth position to the sixth position in the third state, and is not capable of restricting movement of the third support part from the fifth position to the sixth position in the fourth state.

11. A reticle case capable of accommodating a reticle having a pattern surface and a plurality of outer surfaces connected to an outer edge of the pattern surface in a plan view, a case body having an opening formed on the front side in the front-to-rear direction for inserting and removing the reticle; a lid for opening and closing the opening; a moving part having a front end connected to the lid and a rear end connected to the case body, the moving part moving back and forth in the front-rear direction as the lid is opened and closed; a plurality of support portions contactable with each of the plurality of outer surfaces; a fourth link mechanism having a seventh arm that moves in accordance with the reciprocating movement of the moving part in the front-rear direction, the case body has a base on which the reticle is placed, the plurality of support parts includes a third support part having a third contact surface that can come into contact with the left side surface or the right side surface of the reticle that is contactable with the first contact surface, among the plurality of outer surfaces of the reticle placed on the pedestal; In a first state in which the reticle is placed on the pedestal, the third contact surface is disposed at a fifth position where it can come into contact with the left side surface or the right side surface, and in a second state in which the reticle is not placed on the pedestal, the third contact surface is disposed at a sixth position that is retracted relative to the first state; the fourth link mechanism is configured to switch between a third state in which the seventh arm restricts movement of the third support part from the fifth position to the sixth position, and a fourth state in which the seventh arm cannot restrict movement of the third support part from the fifth position to the sixth position.

12. The fourth link mechanism is an eighth arm connected to the moving part; a fourth shaft connected to the case body and extending along a left-right direction intersecting the front-rear direction, the seventh arm and the eighth arm are rotatable together around the fourth shaft, 12. The reticle case according to claim 11, wherein the seventh arm and the eighth arm rotate about the fourth shaft in accordance with the reciprocating movement of the movable part in the forward and backward directions, thereby switching between the third state in which the seventh arm is connected to the third support part and the fourth state in which the seventh arm is not connected to the third support part.

13. A reticle case capable of accommodating a reticle having a pattern surface and a back surface located opposite to the pattern surface, a case body having an opening formed on the front side in the front-to-rear direction for inserting and removing the reticle; a lid for opening and closing the opening; a moving part having a front end connected to the lid and a rear end connected to the case body, the moving part moving back and forth in the front-rear direction as the lid is opened and closed, the case body has a base on which the reticle is placed and which has an upper surface that can come into contact with the back surface of the reticle; A first opening is formed in the top surface of the base, at least one suction portion capable of suction-attaching the back surface of the reticle through the first opening; the at least one suction unit has a cylinder connected to the case body and a piston that reciprocates relative to the cylinder, and is configured to switch between a fifth state in which the first opening acts as an intake port and a sixth state in which the first opening acts as an exhaust port by the reciprocating movement of the piston relative to the cylinder, The reticle case further includes a fifth link mechanism that causes the piston to reciprocate relative to the cylinder in accordance with the reciprocating movement of the moving part in the forward and backward directions.

14. the at least one suction portion is a plurality of suction portions that are arranged at intervals from one another in the plan view, the case body further includes a wall portion that separates a space in which the base and the reticle are accommodated from a space in which the moving unit, the fifth link mechanism, and the cylinder and the piston of each of the plurality of suction units are accommodated; the piston divides the interior of the cylinder into a first space and a second space, The cylinder is formed with a second opening communicating with the second space and a third opening communicating with the first space, 14. The reticle case according to claim 13, wherein each of the plurality of suction portions further includes a tube portion that connects the third opening and the first opening and penetrates the wall portion.

15. The fifth link mechanism is a fifth shaft connected to the case body and extending along a left-right direction intersecting the front-rear direction; a ninth arm rotatable about the fifth shaft, the ninth arm has one end connected to the moving portion and the other end connected to the piston of the suction portion, 15. The reticle case according to claim 13, wherein the ninth arm rotates about the fifth shaft and the piston reciprocates in the front-rear direction in accordance with the reciprocating movement of the moving part in the front-rear direction.

16. A method of manufacturing a semiconductor device using a reticle case according to any one of claims 1, 6, 7, 11 and 13, comprising the steps of: a step of preparing an exposure apparatus including a housing section in which the reticle case containing the reticle is housed, an opening / closing section for opening and closing a lid of the reticle case, and a transport arm for removing the reticle from the reticle case; and patterning a photosensitive layer formed on a semiconductor substrate using the exposure apparatus, The patterning step includes: a first step in which the opening / closing unit half-opens the lid of the reticle case; a second step of inserting the transfer arm into the reticle case after the first step; a third step of holding the reticle housed in the reticle case with the transport arm; a third step of fully opening the lid after the third step; a fifth step of removing the reticle from the reticle case after the fourth step; and a sixth step of exposing a photosensitive layer formed on a semiconductor substrate through the reticle taken out of the reticle case.

17. A method of manufacturing a semiconductor device using the reticle case according to claim 4, comprising the steps of: a step of preparing an exposure apparatus including a housing section for housing the reticle case, an opening / closing section for opening and closing a lid of the reticle case, and a transport arm for removing the reticle from the reticle case; and patterning a photosensitive layer formed on a semiconductor substrate using the exposure apparatus, The patterning step includes: a sixth step in which the opening / closing unit fully opens the lid; a seventh step of inserting the transfer arm into the reticle case after the sixth step; an eighth step of holding the reticle housed in the reticle case with the transport arm; a ninth step of exposing a photosensitive layer formed on a semiconductor substrate through the reticle taken out of the reticle case; In the sixth step, the cover is fully opened, whereby the reticle moves forward by the restoring force of the second elastic portion.

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