Magnetic field detector, and magnetic field detection method

Abstract

To provide a magnetic field detector, and a magnetic field detection method that can perform accurate detection.SOLUTION: According to an embodiment, a magnetic field detector includes an acquisition unit that acquires two-dimensional data related to a magnetic field from an object to be detected, and a processing unit that executes a first operation to process the data. The data includes first to third magnetic field distributions along first to third planes. A first distance between the object to be detected and the first plane is shorter than a second distance between the object to be detected and the second plane. The second distance is shorter than a third distance between the object to be detected and the third plane. The processing unit derives, in the first operation, a first derived magnetic field distribution on a first derived plane parallel to the first plane on the basis of the first to third magnetic field distributions. A first derived distance between the object to be detected and the first derived plane in a first direction is different from the first to third distances.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] Embodiments of the present invention relate to a magnetic field detection device and a magnetic field detection method.

Background Art

[0002] For example, an evaluation target is evaluated by detecting a magnetic field generated from an evaluation target such as an electric circuit. Detection with higher accuracy is desired.

Prior Art Documents

Non-Patent Documents

[0003]

Non-Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Embodiments provide a magnetic field detection device and a magnetic field detection method capable of highly accurate detection.

Means for Solving the Problems

[0005] According to an embodiment, a magnetic field detection device includes an acquisition unit configured to acquire two-dimensional data regarding a magnetic field from a detection target, and a processing unit configured to perform a first operation of processing the data acquired by the acquisition unit. The data includes a first magnetic field distribution along a first plane, a second magnetic field distribution along a second plane parallel to the first plane, and a third magnetic field distribution along a third plane parallel to the first plane. A first distance between the detection target and the first plane in a first direction perpendicular to the first plane is shorter than a second distance between the detection target and the second plane in the first direction. The second distance is shorter than a third distance between the detection target and the third plane in the first direction. In the first operation, the processing unit derives a first derived magnetic field distribution in a first derived plane parallel to the first plane based on the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution. A first derived distance between the detection target and the first derived plane in the first direction is different from the first distance, different from the second distance, and different from the third distance.

Brief Description of the Drawings

[0006]

Figure 1

Figure 2

Figure 3

Embodiments for Carrying Out the Invention

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the ratio of the sizes between parts, etc. are not necessarily the same as those in reality. Even when representing the same part, the dimensions and ratios may be represented differently in the drawings. In the present specification and each figure, the same elements as those described above with respect to the previously presented figures are denoted by the same reference numerals, and detailed descriptions thereof are omitted as appropriate.

[0008] (First Embodiment) FIG. 1 and FIG. 2 are schematic diagrams illustrating an inspection apparatus according to the first embodiment. As shown in FIG. 1, a magnetic field detection apparatus 110 according to the embodiment includes an acquisition unit 71 and a processing unit 70.

[0009] The acquisition unit 71 is configured to acquire two-dimensional data 10D regarding the magnetic field from a detection target 80. The processing unit 70 is configured to perform a first operation of processing the data 10D acquired by the acquisition unit 71. The acquisition unit 71 may be, for example, an interface. The processing unit 70 may be, for example, a processor circuit. The processing unit 70 may be, for example, an electric circuit.

[0010] The data 10D may be detected by a detection unit 85. The detection unit 85 is configured to detect two-dimensional data 10D regarding the magnetic field from the detection target 80. The data 10D may be supplied from the detection unit 85 to the acquisition unit 71 by any method of wired or wireless. The data 10D may be stored in a storage unit 70M. The data 10D stored in the storage unit 70M may be processed by the processing unit 70.

[0011] In one example, the detection target 80 includes a conductive member 81 included in an electric device. A magnetic field corresponding to the current flowing through the conductive member 81 is generated. The generated magnetic field is detected by the detection unit 85. The detection unit 85 includes, for example, a sensor element 86. The distance between the detection target 80 and the sensor element 86 is variable.

[0012] Let the first direction D1 from the detection target 80 to the sensor element 86 be the Z-axis direction. Let one direction perpendicular to the Z-axis direction be the X-axis direction. Let the direction perpendicular to the Z-axis direction and the X-axis direction be the Y-axis direction.

[0013] In the sensor element 86 and the detection target 80, the relative position along the plane (X-Y plane) perpendicular to the first direction D1 is variable. For example, by changing the relative position, the sensor element 86 can detect the two-dimensional distribution of the magnetic field from the detection target 80. The two-dimensional distribution is the distribution in the plane perpendicular to the first direction D1.

[0014] The detection unit 85 may further include a control unit 87. The change in the relative position may be controlled by the control of the control unit 87. For example, a two-dimensional distribution of the magnetic field may be obtained by providing a plurality of sensor elements 86. For example, data 10D regarding the two-dimensional distribution of the magnetic field may be supplied to the acquisition unit 71 via the control unit 87. The detection unit 85 may be included in the magnetic field detection device 110. The detection unit 85 may be provided separately from the magnetic field detection device 110.

[0015] The data 10D includes a first magnetic field distribution 10a, a second magnetic field distribution 10b, and a third magnetic field distribution 10c. As will be described later, the data 10D may further include a fourth magnetic field distribution 10d. In the first operation, the processing unit 70 derives a first derived magnetic field distribution 10x by processing these magnetic field distributions. The derived first derived magnetic field distribution 10x may be displayed, for example, on a display unit 70D or the like. The display unit 70D and the storage unit 70M may be included in the magnetic field detection device 110.

[0016] FIG. 2 schematically illustrates the above magnetic field distributions. The first magnetic field distribution 10a extends along the first plane P1. The second magnetic field distribution 10b extends along a second plane P2 parallel to the first plane P1. The third magnetic field distribution 10c extends along a third plane P3 parallel to the first plane P1. The first plane P1 is perpendicular to the first direction D1.

[0017] Let the distance between the detection target 80 and the first plane P1 in the first direction D1 perpendicular to the first plane P1 be the first distance d1. Let the distance between the detection target 80 and the second plane P2 in the first direction D1 be the second distance d2. Let the distance between the detection target 80 and the third plane P3 in the first direction D1 be the third distance d3. The first distance d1 is shorter than the second distance. The second distance d2 is shorter than the third distance d3. Thus, in the embodiment, three or more magnetic field distribution data with different distances from the detection target 80 are used.

[0018] In the first operation, the processing unit 70 derives a first derived magnetic field distribution 10x based on the first magnetic field distribution 10a, the second magnetic field distribution 10b, and the third magnetic field distribution 10c. The first derived magnetic field distribution 10x is the magnetic field distribution in a first derived plane Q1 parallel to the first plane P1. The first derived distance dx between the detection target 80 and the first derived plane Q1 in the first direction D1 is different from the first distance d1, different from the second distance d2, and different from the third distance d3.

[0019] The first derived distance dx is arbitrary. In the embodiment, based on three or more magnetic field distribution data at different positions, the magnetic field distribution at an arbitrary distance (the first derived distance dx) is derived with high resolution.

[0020] In one example, the first derived distance dx is shorter than the first distance d1. For example, when an insulating film or the like is provided on the conductive member 81 (wiring) which is the detection target 80, it is difficult to make the distance between the wiring and the sensor element 86 less than or equal to the thickness of the insulating film. In such a case, based on three or more magnetic field distributions with the distance between the wiring and the sensor element 86 being greater than or equal to the thickness of the insulating film, the magnetic field distribution at a distance less than the thickness of the insulating film can be detected with high accuracy and high resolution. According to the embodiment, a magnetic field detection device capable of high-precision detection can be provided.

[0021] For example, the relationship between the magnetic field distribution in an arbitrary plane parallel to the first plane P1, the detection target 80 in the first direction D1, the plane parallel to the first plane P1, and the distance therebetween is represented by a first function of a second formula and a third formula based on the Biot-Savart formula of the following first formula.

Number

Number

Number

[0022] The above first function and second function are determined based on the first magnetic field distribution 10a, the second magnetic field distribution 10b, and the third magnetic field distribution 10c. Thus, in the first operation, the processing unit 70 uses a first function related to the magnetic field distribution in a plane parallel to the first plane P1, the detection target 80 in the first direction D1, and the distance between the plane parallel to the first plane P1, and based on the first magnetic field distribution 10a, the second magnetic field distribution 10b, and the third magnetic field distribution 10c, derives the first derived magnetic field distribution 10x.

[0023] The above-described first coefficient and second coefficient can be derived, for example, from two magnetic field distributions. However, in this case, the two magnetic field distributions are linearly approximated to derive a first derived magnetic field distribution 10x. Therefore, the accuracy of the derived result is insufficient.

[0024] In an embodiment, the first derived magnetic field distribution 10x is derived using three or more magnetization distributions. In this case, instead of a linear approximation, derivation by a higher-order approximation is possible. For example, derivation considering the change rate of the magnetic field distribution in space is possible. Therefore, high accuracy can be obtained.

[0025] In an embodiment, the measurement result of the first magnetic field distribution 10a may include noise. In this case, the amplitude of this noise corresponds to the change in the distance along the first direction D1 (first length). In an embodiment, the first absolute value of the first difference between the first distance d1 and the second distance d2 may be set to be longer than the first length along the first direction D1 corresponding to the first amplitude of the first noise included in the first magnetic field distribution 10a. Thereby, the influence of noise can be suppressed.

[0026] In an embodiment, the second absolute value of the second difference between the second distance d2 and the third distance d3 may be set to be longer than the second length along the first direction D1 corresponding to the second amplitude of the second noise included in the second magnetic field distribution 10b.

[0027] In an embodiment, in the first operation, the processing unit 70 may further derive the first derived magnetic field distribution 10x based on the fourth magnetic field distribution 10d. The fourth magnetic field distribution 10d may be included in the data 10D. As shown in FIG. 2, the fourth magnetic field distribution 10d is along a fourth plane P4 parallel to the first plane P1. The fourth distance d4 between the detection target 80 in the first direction D1 and the fourth plane P4 is different from the first distance d1, different from the second distance d2, different from the third distance d3, and different from the first derived distance dx. By using four or more magnetic distributions, even higher accuracy can be obtained.

[0028] FIG. 3 is a schematic diagram illustrating an inspection apparatus according to the first embodiment. As shown in FIG. 3, the acquisition unit 71 acquires data 10D (step S11). The processing unit 70 derives a first derived magnetic field distribution 10x based on, for example, a first magnetic field distribution 10a, a second magnetic field distribution 10b, and a third magnetic field distribution 10c in the first operation (step S12).

[0029] The resolution in the derived first derived magnetic field distribution 10x is compared with a first value (threshold value) (step S13). When the resolution in the derived first derived magnetic field distribution 10x is lower than the first value, the processing unit 70 derives the first derived magnetic field distribution 10x based further on a fourth magnetic field distribution 10d in the second operation (step S15). At this time, between step S13 and step S14, data 10D including the fourth magnetic field distribution 10d may be acquired further (step S14). Alternatively, the fourth magnetic field distribution 10d may be acquired in step S11.

[0030] By deriving the first derived magnetic field distribution 10x based further on the fourth magnetic field distribution 10d, a result with higher accuracy can be obtained. This result may be compared with the first value (threshold value) further (step S13). Steps S13, S14, and S15 may be repeated.

[0031] When the resolution is equal to or higher than the first value (threshold value), the first derived magnetic field distribution 10x is output (step S16).

[0032] As already described, the magnetic field detection device 110 may further include a detection unit 85 configured to detect data 10D. For example, after the detection unit 85 detects the first magnetic field distribution 10a, the second magnetic field distribution 10b, and the third magnetic field distribution 10c, the processing unit 70 may perform the above-described first operation. And when the resolution in the first derived magnetic field distribution 10x derived in the first operation is lower than the first value (threshold value), the detection unit 85 may detect the fourth magnetic field distribution 10d. For example, when the resolution is high, the fourth magnetic field distribution 10d may not be detected. The time for detecting the magnetic field distribution can be shortened.

[0033] After detecting the first magnetic field distribution 10a, the detection unit 85 may detect one of the second magnetic field distribution 10b and the third magnetic field distribution 10c. After detecting one of the second magnetic field distribution 10b and the third magnetic field distribution 10c, the detection unit 85 may detect the other of the second magnetic field distribution 10b and the third magnetic field distribution 10c. For example, the detection of the magnetic field at the position closest to the detection target 80 is performed first. This makes it easier to shorten the detection time.

[0034] (Second Embodiment) The second embodiment relates to a magnetic field detection method. The magnetic field detection method may correspond to a magnetic field distribution image derivation method.

[0035] The magnetic field detection method according to the embodiment acquires two-dimensional data 10D regarding the magnetic field from the detection target 80 and performs a first operation of processing the data 10D. The data 10D includes a first magnetic field distribution 10a along a first plane P1, a second magnetic field distribution 10b along a second plane P2 parallel to the first plane P1, and a third magnetic field distribution 10c along a third plane P3 parallel to the first plane P1.

[0036] A first distance d1 between the detection target 80 and the first plane P1 in a first direction D1 perpendicular to the first plane P1 is shorter than a second distance d2 between the detection target 80 and the second plane P2 in the first direction D1. The second distance d2 is shorter than a third distance d3 between the detection target 80 and the third plane P3 in the first direction D1.

[0037] In the first operation, based on the first magnetic field distribution 10a, the second magnetic field distribution 10b, and the third magnetic field distribution 10c, a first derived magnetic field distribution 10x in a first derived plane Q1 parallel to the first plane P1 is derived. A first derived distance dx between the detection target 80 and the first derived plane Q1 in the first direction D1 is different from the first distance d1, different from the second distance d2, and different from the third distance d3. Thereby, a magnetic field detection method capable of highly accurate detection is provided.

[0038] For example, the first derived distance dx may be shorter than the first distance d1. For example, the first absolute value of the first difference between the first distance d1 and the second distance d2 is preferably longer than the first length along the first direction D1 corresponding to the first amplitude of the first noise included in the first magnetic field distribution 10a. The second absolute value of the second difference between the second distance d2 and the third distance d3 is preferably longer than the second length along the first direction D1 corresponding to the second amplitude of the second noise included in the second magnetic field distribution 10b.

[0039] In the first operation, a first derived magnetic field distribution 10x is derived based on the first magnetic field distribution 10a, the second magnetic field distribution 10b, and the third magnetic field distribution 10c using a first function regarding the magnetic field distribution in any plane parallel to the first plane P1, the distance between the detection target 80 in the first direction D1 and the above-mentioned plane parallel to the first plane P1.

[0040] The first function includes a first coefficient and a second coefficient. The first coefficient and the second coefficient are determined based on the first magnetic field distribution 10a, the second magnetic field distribution 10b, and the third magnetic field distribution 10c.

[0041] When the resolution in the derived first derived magnetic field distribution 10x is lower than the first value, the second operation may be performed. In the second operation, the first derived magnetic field distribution 10x may be further derived based on the fourth magnetic field distribution 10d. The fourth magnetic field distribution 10d may be included in the data 10D. The fourth magnetic field distribution 10d is along a fourth plane P4 parallel to the first plane P1. The fourth distance d4 between the detection target 80 in the first direction D1 and the fourth plane P4 is different from the first distance d1, different from the second distance d2, different from the third distance d3, and different from the first derived distance dx.

[0042] In the magnetic field detection method according to the embodiment, the data 10D may be detected by the detection unit 85. After the detection unit 85 detects the first magnetic field distribution 10a, the second magnetic field distribution 10b, and the third magnetic field distribution 10c, the first operation is performed. When the resolution in the first derived magnetic field distribution 10x derived in the first operation is lower than the first value, the fourth magnetic field distribution 10d may be detected by the detection unit 85.

[0043] For example, after detecting the first magnetic field distribution 10a, the detection unit 85 may detect one of the second magnetic field distribution 10b and the third magnetic field distribution 10c. After detecting one of the second magnetic field distribution 10b and the third magnetic field distribution 10c, the detection unit 85 may detect the other of the second magnetic field distribution 10b and the third magnetic field distribution 10c. The detection target 80 may include a conductive member 81 included in the electrical device.

[0044] The embodiment may include the following configurations (for example, technical solutions). (Technical solution 1) An acquisition unit configured to acquire two-dimensional data regarding a magnetic field from a detection target, A processing unit configured to perform a first operation of processing the data acquired by the acquisition unit, Comprising, The data includes a first magnetic field distribution along a first plane, a second magnetic field distribution along a second plane parallel to the first plane, and a third magnetic field distribution along a third plane parallel to the first plane, A first distance between the detection target and the first plane in a first direction perpendicular to the first plane is shorter than a second distance between the detection target and the second plane in the first direction, The second distance is shorter than a third distance between the detection target and the third plane in the first direction, In the first operation, the processing unit derives a first derived magnetic field distribution in a first derived plane parallel to the first plane based on the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution, A first derived distance between the detection target and the first derived plane in the first direction is different from the first distance, different from the second distance, and different from the third distance, a magnetic field detection device.

[0045] (Technical solution 2) The magnetic field detection device according to Technical solution 1, wherein the first derived distance is shorter than the first distance.

[0046] (Technical solution 3) The absolute value of the first difference between the first distance and the second distance is longer than the first length along the first direction corresponding to the first amplitude of the first noise included in the first magnetic field distribution, the magnetic field detection device according to Technical Solution 1 or 2.

[0047] (Technical Solution 4) The absolute value of the second difference between the second distance and the third distance is longer than the second length along the first direction corresponding to the second amplitude of the second noise included in the second magnetic field distribution, the magnetic field detection device according to any one of Technical Solutions 1 to 3.

[0048] (Technical Solution 5) In the first operation, the processing unit uses a first function related to the magnetic field distribution in a plane parallel to the first plane and the distance between the detection target in the first direction and the plane parallel to the first plane, and based on the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution, to derive the first derived magnetic field distribution, the magnetic field detection device according to any one of Technical Solutions 1 to 4.

[0049] (Technical Solution 6) The first function includes a first coefficient and a second coefficient, The first coefficient and the second coefficient are determined based on the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution, the magnetic field detection device according to Technical Solution 5.

[0050] (Technical Solution 7) When the resolution in the derived first derived magnetic field distribution is lower than a first value, the processing unit derives the first derived magnetic field distribution based on a fourth magnetic field distribution in a second operation, The fourth magnetic field distribution is along a fourth plane parallel to the first plane, The fourth distance between the detection target in the first direction and the fourth plane is different from the first distance, different from the second distance, different from the third distance, and different from the first derived distance, the magnetic field detection device according to any one of Technical Solutions 1 to 6.

[0051] (Technical Solution 8) Further comprising a detection unit configured to detect the data. After the detection unit detects the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution, the processing unit performs the first operation. When the resolution in the first derived magnetic field distribution derived in the first operation is lower than the first value, the detection unit detects the fourth magnetic field distribution. The magnetic field detection device according to Technical Proposal 7.

[0052] (Technical Proposal 9) After detecting the first magnetic field distribution, the detection unit detects one of the second magnetic field distribution and the third magnetic field distribution. After the detection unit detects one of the second magnetic field distribution and the third magnetic field distribution. The detection unit detects the other of the second magnetic field distribution and the third magnetic field distribution. The magnetic field detection device according to Technical Proposal 8.

[0053] (Technical Proposal 10) The detection target includes a conductive member included in an electric device. The magnetic field detection device according to any one of Technical Proposals 1 to 9.

[0054] (Technical Proposal 11) Obtain two-dimensional data regarding the magnetic field from the detection target. Perform a first operation of processing the data. The data includes a first magnetic field distribution along a first plane, a second magnetic field distribution along a second plane parallel to the first plane, and a third magnetic field distribution along a third plane parallel to the first plane. A first distance between the detection target and the first plane in a first direction perpendicular to the first plane is shorter than a second distance between the detection target and the second plane in the first direction. The second distance is shorter than a third distance between the detection target and the third plane in the first direction. In the first operation, based on the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution, derive a first derived magnetic field distribution in a first derived plane parallel to the first plane. The magnetic field detection method is such that a first derived distance between the detection target and a first derived plane in the first direction is different from the first distance, different from the second distance, and different from the third distance.

[0055] (Technical solution 12) The magnetic field detection method according to Technical solution 11, wherein the first derived distance is shorter than the first distance.

[0056] (Technical solution 13) The magnetic field detection method according to Technical solution 11 or 12, wherein an absolute value of a first difference between the first distance and the second distance is longer than a first length along the first direction corresponding to a first amplitude of a first noise included in the first magnetic field distribution.

[0057] (Technical solution 14) The magnetic field detection method according to any one of Technical solutions 11 to 13, wherein an absolute value of a second difference between the second distance and the third distance is longer than a second length along the first direction corresponding to a second amplitude of a second noise included in the second magnetic field distribution.

[0058] (Technical solution 15) In the first operation, using a first function related to a magnetic field distribution in a plane parallel to the first plane and a distance between the detection target in the first direction and the plane parallel to the first plane, the first derived magnetic field distribution is derived based on the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution. The magnetic field detection method according to any one of Technical solutions 11 to 14.

[0059] (Technical solution 16) The first function includes a first coefficient and a second coefficient. The magnetic field detection method according to Technical solution 15, wherein the first coefficient and the second coefficient are determined based on the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution.

[0060] (Technical solution 17) When a resolution in the derived first derived magnetic field distribution is lower than a first value, a second operation is performed. Derive the first derived magnetic field distribution based further on the fourth magnetic field distribution in the second operation. The fourth magnetic field distribution is along a fourth plane parallel to the first plane. The fourth distance between the detection target and the fourth plane in the first direction is different from the first distance, different from the second distance, different from the third distance, and different from the first derived distance, the magnetic field detection method according to any one of Technical Solutions 11 to 16.

[0061] (Technical Solution 18) Detect the data by a detection unit. After the detection unit detects the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution, perform the first operation. When the resolution in the first derived magnetic field distribution derived in the first operation is lower than the first value, detect the fourth magnetic field distribution by the detection unit, the magnetic field detection method according to Technical Solution 17.

[0062] (Technical Solution 19) After the detection unit detects the first magnetic field distribution, detect one of the second magnetic field distribution and the third magnetic field distribution. After the detection unit detects one of the second magnetic field distribution and the third magnetic field distribution. Detect the other of the second magnetic field distribution and the third magnetic field distribution, the magnetic field detection method according to Technical Solution 18.

[0063] (Technical Solution 20) The detection target includes a conductive member included in an electrical device, the magnetic field detection method according to any one of Technical Solutions 11 to 19.

[0064] According to the embodiment, a magnetic field detection device and a magnetic field detection method capable of high-precision detection can be provided.

[0065] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, regarding the specific configurations of each element such as the acquisition unit and the processing unit included in the magnetic field detection device, those skilled in the art can appropriately select from the known range to similarly implement the present invention and obtain the same effects as long as it is included in the scope of the present invention.

[0066] Also, combinations of any two or more elements of each specific example within the technically possible range are included in the scope of the present invention as long as they encompass the gist of the present invention.

[0067] In addition, based on the magnetic field detection device and the magnetic field detection method described above as embodiments of the present invention, all magnetic field detection devices and magnetic field detection methods that those skilled in the art can appropriately design and modify and implement also belong to the scope of the present invention as long as they encompass the gist of the present invention.

[0068] In addition, within the scope of the idea of the present invention, those skilled in the art can conceive of various modification examples and correction examples, and it is understood that those modification examples and correction examples also belong to the scope of the present invention.

[0069] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and their modifications are included in the scope and gist of the invention, and are also included in the invention described in the claims and its equivalent scope.

Explanation of Reference Numerals

[0070] 10D: Data, 10a~10d: First to Fourth Magnetic Field Distributions, 10x: First Derived Magnetic Field Distribution, 70: Processing Unit, 70D: Display Unit, 70M: Memory Unit, 71: Acquisition Unit, 80: Detection Target, 81: Conductive Member, 85: Detection Unit, 86: Sensor Element, 87: Control Unit, 110: Magnetic Field Detection Device, D1: First Direction, P1~P4: First to Fourth Planes, Q1: First Derived Plane, d1~d4: First to Fourth Distances, dx: First Derived Distance

Claims

1. An acquisition unit configured to acquire two-dimensional data regarding a magnetic field from a detection target; A processing unit configured to perform a first operation of processing the data acquired by the acquisition unit; Comprising: The data includes a first magnetic field distribution along a first plane, a second magnetic field distribution along a second plane parallel to the first plane, and a third magnetic field distribution along a third plane parallel to the first plane; A first distance between the detection target and the first plane in a first direction perpendicular to the first plane is shorter than a second distance between the detection target and the second plane in the first direction; The second distance is shorter than a third distance between the detection target and the third plane in the first direction; In the first operation, the processing unit derives a first derived magnetic field distribution in a first derived plane parallel to the first plane based on the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution; A magnetic field detection device, wherein a first derived distance between the detection target and the first derived plane in the first direction is different from the first distance, different from the second distance, and different from the third distance.

2. The magnetic field detection device according to claim 1, wherein an absolute value of a first difference between the first distance and the second distance is longer than a first length along the first direction corresponding to a first amplitude of first noise included in the first magnetic field distribution.

3. The magnetic field detection device according to claim 1, wherein in the first operation, the processing unit uses a first function regarding a magnetic field distribution in a plane parallel to the first plane and a distance between the detection target and the plane parallel to the first plane in the first direction, and derives the first derived magnetic field distribution based on the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution.

4. When a resolution in the derived first derived magnetic field distribution is lower than a first value, the processing unit derives the first derived magnetic field distribution based further on a fourth magnetic field distribution in a second operation; The fourth magnetic field distribution is along a fourth plane parallel to the first plane; A magnetic field detection device according to any one of claims 1 to 3, wherein a fourth distance between the detection target and the fourth plane in the first direction is different from the first distance, different from the second distance, different from the third distance, and different from the first derived distance.

5. Further comprising a detection unit configured to detect the data After the detection unit detects the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution, the processing unit performs the first operation. The magnetic field detection device according to claim 4, wherein when the resolution in the first derived magnetic field distribution derived in the first operation is lower than the first value, the detection unit detects the fourth magnetic field distribution.

6. Obtain two-dimensional data regarding the magnetic field from the detection target. Perform a first operation of processing the data. The data includes a first magnetic field distribution along a first plane, a second magnetic field distribution along a second plane parallel to the first plane, and a third magnetic field distribution along a third plane parallel to the first plane. A first distance between the detection target and the first plane in a first direction perpendicular to the first plane is shorter than a second distance between the detection target and the second plane in the first direction. The second distance is shorter than a third distance between the detection target and the third plane in the first direction. In the first operation, based on the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution, derive a first derived magnetic field distribution in a first derived plane parallel to the first plane. A first derived distance between the detection target and the first derived plane in the first direction is different from the first distance, different from the second distance, and different from the third distance. A magnetic field detection method.

7. The first absolute value of a first difference between the first distance and the second distance is longer than a first length along the first direction corresponding to a first amplitude of a first noise included in the first magnetic field distribution. The magnetic field detection method according to claim 6.

8. In the first operation, using a first function regarding a magnetic field distribution in a plane parallel to the first plane and a distance between the detection target in the first direction and the plane parallel to the first plane, based on the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution, derive the first derived magnetic field distribution. The magnetic field detection method according to claim 6.

9. When the resolution in the derived first derived magnetic field distribution is lower than a first value, perform a second operation. In the second operation, derive the first derived magnetic field distribution further based on a fourth magnetic field distribution. The fourth magnetic field distribution is along a fourth plane parallel to the first plane. The fourth distance between the detection target and the fourth plane in the first direction is different from the first distance, different from the second distance, different from the third distance, and different from the first derived distance. The magnetic field detection method according to any one of claims 6 to 8.

10. detecting the data by a detection unit; after the detection unit detects the first magnetic field distribution, the second magnetic field distribution, and the third magnetic field distribution, performing the first operation; when the resolution in the first derived magnetic field distribution derived in the first operation is lower than the first value, detecting the fourth magnetic field distribution by the detection unit. The magnetic field detection method according to claim 9.

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