Substrate processing apparatus

Abstract

To provide a technology that enables easy installation of an integrated reaction vessel and vacuum pipe.SOLUTION: A substrate processing apparatus according to one embodiment of the present disclosure comprises: a reaction vessel; a vacuum pipe integrated with the reaction vessel; a housing that internally accommodates the reaction vessel and the vacuum pipe; an exhaust pipe located at the bottom of the housing; and a fastening member for securing the exhaust pipe to the housing, the housing has a bottom that supports the reaction tube, the bottom has an opening with an opening diameter larger than the outer diameter of the vacuum pipe, the vacuum pipe is inserted into the opening at its lower end, and the exhaust pipe is secured to the housing with its interior communicating with the interior of the vacuum pipe.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present disclosure relates to a substrate processing apparatus. [Background technology]

[0002] In a batch-type vacuum processing apparatus, a technique is known in which a flexible and expandable bellows body is provided at the connection between the exhaust port of a reaction tube and a vacuum pipe (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-104755 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique that allows easy installation of an integrated reactor tube and vacuum piping. [Means for solving the problem]

[0005] A substrate processing apparatus according to one aspect of the present disclosure comprises a reaction tube, a vacuum pipe integrally formed with the reaction tube, a housing that houses the reaction tube and the vacuum pipe, an exhaust pipe provided below the housing, and a fixing member that fixes the exhaust pipe to the housing, wherein the housing has a bottom that supports the reaction tube, the bottom having an opening with an opening diameter larger than an outer diameter of the vacuum pipe, the lower end of the vacuum pipe being inserted into the opening, and the exhaust pipe being fixed to the housing with its interior connected to the interior of the vacuum pipe. [Effects of the Invention]

[0006] According to the present disclosure, the reaction tube and vacuum piping that are integrally configured can be easily installed. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a perspective view (1) showing a substrate processing apparatus according to an embodiment. [Figure 2] FIG. 2 is a perspective view (2) showing the substrate processing apparatus according to the embodiment. [Figure 3] 1 is a vertical cross-sectional view showing a substrate processing apparatus according to an embodiment. [Figure 4] 1 is a horizontal cross-sectional view (1) showing a substrate processing apparatus according to an embodiment. [Figure 5] FIG. 2 is a horizontal cross-sectional view (2) showing the substrate processing apparatus according to the embodiment. [Figure 6] FIG. 2 is a cross-sectional view showing a pipe connection structure. [Figure 7] FIG. 7 is an enlarged view of an area A in FIG. [Figure 8] This is a cross-sectional view (1) showing the piping connection method. [Figure 9] This is a cross-sectional view (2) showing the piping connection method. [Figure 10] This is a cross-sectional view (3) showing the piping connection method. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, non-limiting exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings. In all the accompanying drawings, the same or corresponding reference numerals are used to designate the same or corresponding members or components, and redundant descriptions will be omitted.

[0009] (Substrate processing equipment) A substrate processing apparatus 1 according to an embodiment will be described with reference to FIGS. 1 to 5. FIG. 1 is a perspective view showing the substrate processing apparatus 1 according to an embodiment, as viewed obliquely from above. FIG. 2 is a perspective view showing the substrate processing apparatus 1 according to an embodiment, as viewed obliquely from below. FIG. 3 is a vertical cross-sectional view showing the substrate processing apparatus 1 according to an embodiment. FIG. 4 is a horizontal cross-sectional view showing the substrate processing apparatus 1 according to an embodiment, as viewed along the line IV-IV in FIG. 3. FIG. 5 is a horizontal cross-sectional view showing the substrate processing apparatus 1 according to an embodiment, as viewed along the line VV in FIG. 3.

[0010] The substrate processing apparatus 1 is a batch-type apparatus that performs various processes on multiple substrates at once. The various processes include, for example, a film formation process that forms a film on the substrate by atomic layer deposition (ALD) or chemical vapor deposition (CVD). The various processes may also include an etching process that removes a film formed on the substrate.

[0011] The substrate processing apparatus 1 includes a reaction tube 10, a gas introduction unit 20, a vacuum pipe 30, an exhaust duct 40, a housing 50, a heating unit 60, a pressure reduction unit 70, a pressure increase unit 80, and an apparatus housing 90. The housing 50, the heating unit 60, the pressure reduction unit 70, the pressure increase unit 80, and the apparatus housing 90 are not shown in FIGS. 1 and 2. The reaction tube 10, the gas introduction unit 20, and the exhaust duct 40 are joined together by welding or the like, for example, and are integrally configured. The reaction tube 10, the vacuum pipe 30, and the exhaust duct 40 are made of, for example, quartz.

[0012] The reaction tube 10 has a cylindrical shape with a ceiling and an open lower end. An inlet opening 10a and an exhaust opening 10b are provided on the outer wall of the reaction tube 10.

[0013] The inlet openings 10a penetrate the outer wall of the reaction tube 10. The inlet openings 10a are provided at positions in the circumferential direction of the reaction tube 10 where gas inlet ducts 211 to 218, which will be described later, are attached. A plurality of inlet openings 10a are provided at each position in the circumferential direction of the reaction tube 10 along the vertical direction from near the upper end to near the lower end of the reaction tube 10. In this case, it is easy to uniformly supply gas into the reaction tube 10 in a range from the upper end to the lower end.

[0014] The exhaust opening 10b penetrates the outer wall of the reaction tube 10. The exhaust opening 10b is provided at a position different from the inlet opening 10a in the circumferential direction of the reaction tube 10. The exhaust opening 10b is provided at a position in the circumferential direction of the reaction tube 10 where the exhaust duct 40 is attached. The exhaust opening 10b is a rectangular opening extending vertically from near the upper end to near the lower end of the reaction tube 10. In this case, it is easy to uniformly exhaust air from the upper end to the lower end of the reaction tube 10.

[0015] The opening at the bottom of the reaction tube 10 is airtightly closed by a lid (not shown). The lid is made of a metal such as stainless steel. A substrate holder 11 (FIG. 3) is housed inside the reaction tube 10. The substrate holder 11 holds a plurality of substrates in a horizontal position, arranged in multiple stages in the vertical direction. The number of substrates is not limited, but may be, for example, 25 to 200. The substrate holder 11 is made of, for example, quartz.

[0016] The gas introduction section 20 has gas introduction ducts 211 to 218, nozzles 221 to 228, gas introduction pipes 231 to 238, and on-off valves 241 to 248. In Fig. 3, gas introduction pipes 231 to 235 and on-off valves 241 to 245 are shown.

[0017] The gas introduction ducts 211-218 are provided along the circumferential direction of the reaction tube 10. The gas introduction ducts 211-218 are provided at intervals from each other in the circumferential direction of the reaction tube 10. In this case, the thermal influence from adjacent gas introduction ducts 211-218 can be reduced. This suppresses a temperature drop in the gas introduction ducts 211-218 and the generation of particles. The gas introduction ducts 211-218 are provided radially at intervals from each other in the circumferential direction of the reaction tube 10. In this case, as shown by the arrows in FIG. 5, gases such as source gas, reactive gas, etching gas, and purge gas can be supplied into the reaction tube 10 from multiple positions (multiple directions) in the circumferential direction of the reaction tube 10. This makes it easy to adjust the in-plane shape of the film formation and etching. For example, by adjusting the gas supply position and the gas supply amount, the residence time and gas concentration distribution of the gas supplied to the surface of the substrate can be adjusted. Therefore, it is easier to control the in-plane shape of film formation and etching than with a unidirectional gas flow. Gas introduction ducts 211 to 218 are provided in this order, for example, counterclockwise from exhaust opening 10b.

[0018] The gas introduction ducts 211-218 are attached to the outer wall of the reaction tube 10. In this case, the distance from the gas introduction ducts 211-218 to the substrate is shortened. This reduces unnecessary thermal decomposition of gas. Furthermore, when the gas introduction ducts 211-218 are attached to the outer wall of the reaction tube 10, it is not necessary to dispose the nozzles 221-228 inside the reaction tube 10. This reduces the space between the outer peripheral edge of the substrate and the inner wall of the reaction tube 10, thereby reducing the gas flow into this space. As a result, the efficiency of gas supply between vertically adjacent substrates is improved. Furthermore, when the gas introduction ducts 211-218 are attached to the outer wall of the reaction tube 10, it is not necessary to protrude the side wall of the reaction tube 10 radially outward to form a nozzle chamber for accommodating the nozzles 221-228. The gas introduction ducts 211-218 are, for example, integrally formed with the reaction tube 10. The gas introduction ducts 211 to 218 are made of, for example, quartz.

[0019] The gas introduction ducts 211-218 have a tubular shape with a closed lower end and an open upper end. The upper ends of the gas introduction ducts 211-218 extend above the upper surface of the reaction tube 10 and penetrate the casing 50. In this case, the upper space of the casing 50 can be used as a space for installing the gas introduction pipes 231-238 and the on-off valves 241-248. Therefore, the piping distance from the on-off valves 241-248 to the reaction tube 10 can be shortened. In addition, the shape of the gas introduction pipes 231-238 can be simplified. Gas holes 211a-218a (FIG. 5) are provided in the gas introduction ducts 211-218 at positions facing the reaction tube 10.

[0020] Each of the gas holes 211a-218a has a rectangular shape extending vertically from near the upper end to near the lower end of the reaction tube 10. Each of the gas holes 211a-218a extends, for example, from above the uppermost inlet opening 10a to below the lowermost inlet opening 10a. The gas flowing inside the gas inlet ducts 211-218 is discharged into the reaction tube 10 from the gas holes 211a-218a.

[0021] The gas inlet duct 211 is provided at an angle less than 90° counterclockwise from the exhaust duct 40 in the circumferential direction of the reaction tube 10. The gas inlet duct 212 is provided at an angle position 90° counterclockwise from the exhaust duct 40 in the circumferential direction of the reaction tube 10. The gas inlet ducts 213 and 214 are provided at an angle greater than 90° and less than 180° counterclockwise from the exhaust duct 40. The gas inlet duct 215 is provided at an angle position 180° counterclockwise from the exhaust duct 40 in the circumferential direction of the reaction tube 10. That is, the gas inlet duct 215 is provided at a position opposite to the exhaust duct 40. The gas inlet ducts 216 and 217 are provided at an angle greater than 180° and less than 270° counterclockwise from the exhaust duct 40. The gas introduction duct 218 is provided at an angular position of 270° counterclockwise from the exhaust duct 40. In other words, the gas introduction duct 218 is provided at a position opposite the gas introduction duct 212.

[0022] The nozzles 221-228 are detachably inserted into the gas introduction ducts 211-218. In this case, the shape of the nozzles 221-228 can be changed depending on the type of processing, allowing the optimal nozzles 221-228 to be used depending on the type of processing. The inner surfaces of the gas introduction ducts 211-218 are shaped to fit the outer surfaces of the nozzles 221-228, for example, and gaps are provided between the inner surfaces of the gas introduction ducts 211-218 and the outer surfaces of the nozzles 221-228. In this case, the volume of the space between the gas introduction ducts 211-218 and the nozzles 221-228 can be reduced. This prevents gas from accumulating in the space, improving the efficiency of gas supply to the substrate. Furthermore, the surface area in contact with the gas is reduced, preventing particle generation in the space. This makes cleaning the space easier. In a cross section perpendicular to the longitudinal direction of the nozzles 221 to 228, the inner surfaces of the gas introduction ducts 211 to 218 are, for example, circular, and the outer surfaces of the nozzles 221 to 228 are, for example, circular. In a cross section perpendicular to the longitudinal direction of the nozzles 221 to 228, the inner surfaces of the gas introduction ducts 211 to 218 may be elliptical, and the outer surfaces of the nozzles 221 to 228 may be elliptical.

[0023] The nozzles 221 to 228 are provided with gas discharge holes (not shown). The gas discharge holes are provided, for example, in the portions of the pipe walls of the nozzles 221 to 228 that are inserted into the gas introduction ducts 211 to 218. The upper ends of the nozzles 221 to 228 are connected to gas sources (not shown) via corresponding gas introduction pipes 231 to 238. Gas from the gas sources is introduced into the nozzles 221 to 228 from the upper ends thereof, and is discharged into the reaction tube 10 through the gas discharge holes, gas holes 211a to 218a, and introduction opening 10a. The nozzles 221 to 228 are not shown in FIGS. 2 to 5.

[0024] The nozzles 221-228 do not necessarily have to be provided. In this case, the upper ends of the gas introduction ducts 211-218 are connected to the gas sources via the corresponding gas introduction pipes 231-238. Gas from the gas sources is introduced into the gas introduction ducts 211-218 from the upper ends thereof and discharged into the reaction tube 10 via the gas holes 211a-218a. For example, when a gas that is easily thermally decomposed, such as hexachlorodisilane (HCD) gas or dichlorosilane (DCS) gas, is used, the nozzles 221-228 do not necessarily have to be provided.

[0025] The gas introduction pipes 231-238 are provided in the upper space of the housing 50. One end of the gas introduction pipes 231-238 is connected to the corresponding gas introduction ducts 211-218 or the corresponding nozzles 221-228, and the other end passes through the apparatus housing 90 and extends to the outside of the apparatus housing 90. The gas introduction pipes 231-238 are provided with on-off valves 241-248. The gas introduction pipes 231-238 may be provided with a flow rate controller such as a mass flow controller.

[0026] The on-off valves 241 to 248 are provided in the upper space of the casing 50. The on-off valves 241 to 248 are provided midway along the corresponding gas introduction pipes 231 to 238. The on-off valves 241 to 248 are attached to, for example, the inner wall of the apparatus casing 90. The on-off valves 241 to 248 are valves that switch the flow of gas on and off.

[0027] The vacuum pipe 30 has a cylindrical shape with a ceiling and an open lower end. The vacuum pipe 30 is installed at a distance from the reaction tube 10. An opening 30a (FIG. 5) is provided on the outer wall of the vacuum pipe 30 at the same position as the exhaust duct 40 in the circumferential direction of the vacuum pipe 30. The opening 30a is a rectangular opening extending vertically from near the upper end of the vacuum pipe 30 to near the lower end. The vertical length of the opening 30a may be the same as the vertical length of the exhaust opening 10b. The axis of the vacuum pipe 30 may be parallel to the axis of the reaction tube 10. The lower end of the vacuum pipe 30 is connected to an exhaust device (not shown) such as a vacuum pump via a piping (not shown). The flow path cross-sectional area of ​​the vacuum pipe 30 may be equal to or greater than the flow path cross-sectional area of ​​the exhaust duct 40. In this case, the exhaust flow velocity in the vertical direction becomes uniform, and a uniform laminar flow is formed in the vertical direction. This improves the inter-surface uniformity of film formation and etching.

[0028] The exhaust duct 40 connects the reaction tube 10 and the vacuum pipe 30. The exhaust duct 40 connects the inside of the reaction tube 10 with the inside of the vacuum pipe 30. One end of the exhaust duct 40 is connected to the outer wall of the reaction tube 10 so as to cover the exhaust opening 10b, and the other end is connected to the outer wall of the vacuum pipe 30 so as to cover the opening 30a. In this case, the length X (FIG. 4) occupied by the exhaust duct 40 in the circumferential direction of the reaction tube 10 can be shortened compared to the case where the vacuum pipe 30 is directly connected to the reaction tube 10 without providing the exhaust duct 40. Therefore, the length in the circumferential direction of the reaction tube 10 over which the gas introduction ducts 211-218 can be attached becomes longer. This allows the number of gas introduction ducts 211-218 to be provided on the outer wall of the reaction tube 10 to be increased. The exhaust duct 40 may be divided into multiple parts in the vertical direction. In this case, the gas flow from the inside of the reaction tube 10 toward the vacuum pipe 30 is rectified. Therefore, the uniformity of the gas flow at different positions in the vertical direction inside the reaction tube 10 is improved.

[0029] The housing 50 accommodates the reaction tube 10, the gas inlet 20, the vacuum pipe 30, the exhaust duct 40, and the heating unit 60. The housing 50 is also called a heater shell because it accommodates the heating unit 60 including a heater. The housing 50 has a bottom 51, a top 52, and side sections 53.

[0030] The bottom part 51 supports the reaction tube 10 and the vacuum pipe 30. The top part 52 is provided above the upper surface of the reaction tube 10 and the upper surface of the vacuum pipe 30. The top part 52 covers the upper surface of the reaction tube 10 and the upper surface of the vacuum pipe 30. The side part 53 is provided around the reaction tube 10, the gas inlet part 20, the vacuum pipe 30, and the exhaust duct 40. The side part 53 covers the periphery of the reaction tube 10, the gas inlet part 20, the vacuum pipe 30, and the exhaust duct 40. The lower end of the side part 53 is connected to the bottom part 51, and the upper end of the side part 53 is connected to the top part 52. The bottom part 51, the top part 52, and the side part 53 are formed as separate bodies, for example. The bottom part 51, the top part 52, and the side part 53 may be formed as a single body.

[0031] The heating unit 60 is provided inside the housing 50. The heating unit 60 includes a first side heater 61, a second side heater 62, a third side heater 63, a first ceiling heater 64, a second ceiling heater 65, and a lower heater 66. The first side heater 61, the second side heater 62, the third side heater 63, the first ceiling heater 64, the second ceiling heater 65, and the lower heater 66 are, for example, carbon wire heaters. In this case, the temperature of the substrate accommodated inside the reaction tube 10 can be rapidly increased or decreased.

[0032] A plurality of first side heaters 61 are provided around the reaction tube 10. The plurality of first side heaters 61 are radially arranged at intervals in the circumferential direction of the reaction tube 10. Each first side heater 61 is provided at a position different from the exhaust duct 40 in the circumferential direction of the reaction tube 10. Each first side heater 61 may be divided into a plurality of heaters in the vertical direction. In this case, the temperature in the vertical direction can be independently adjusted by independently controlling the divided first side heaters 61. The first side heater 61 heats the substrates accommodated inside the reaction tube 10 from the outside of the reaction tube 10 by thermal radiation, as indicated by the solid arrows in FIG. 4 .

[0033] The second side heater 62 is provided at a position different from that of the first side heater 61 in the circumferential direction of the reaction tube 10. The second side heater 62 is provided at a position different from that of the plurality of gas inlet ducts 211-218 in the circumferential direction of the reaction tube 10. The second side heater 62 is provided at a position including the same position as that of the exhaust duct 40 in the circumferential direction of the reaction tube 10. Since the exhaust duct 40 is provided around the reaction tube 10 at the same position as the exhaust duct 40 in the circumferential direction of the reaction tube 10, the second side heater 62 cannot be provided there. Therefore, the second side heater 62 is provided around the vacuum pipe 30. That is, the second side heater 62 is provided at a position farther from the center C1 of the reaction tube 10 than the first side heater 61. For example, the second side heater 62 is disposed on a virtual half line L extending from the center C1 of the reaction tube 10 through the center C3 of the vacuum pipe 30 in a plan view. The second side heater 62 may be divided into multiple parts in the vertical direction. In this case, the temperature in the vertical direction can be independently adjusted by independently controlling the multiple divided second side heaters 62. As shown by the dashed arrows in FIG. 4, the second side heater 62 heats the vacuum pipe 30 and the exhaust duct 40 by thermal radiation and also heats the substrates accommodated inside the reaction tube 10. As a result, the substrates accommodated inside the reaction tube 10 are heated from all directions around the reaction tube 10 by the first side heater 61 and the second side heater 62. This improves the temperature uniformity within the substrate surface.

[0034] A plurality of third side heaters 63 are provided around the vacuum pipe 30. The plurality of third side heaters 63 are provided at intervals in the circumferential direction of the vacuum pipe 30. Each third side heater 63 is provided at a different position from the second side heater 62 in the circumferential direction of the vacuum pipe 30. Each third side heater 63 is provided so as not to include on the imaginary half line L in a plan view. Each third side heater 63 may be divided into multiple parts in the vertical direction. In this case, by independently controlling the multiple divided third side heaters 63, the temperature in the vertical direction can be independently adjusted. The third side heater 63 heats the vacuum pipe 30 as indicated by the dashed arrow in FIG. 4.

[0035] The first ceiling heater 64 is provided between the upper surface of the reaction tube 10 and the ceiling part 52 of the housing 50. The first ceiling heater 64 heats the substrate accommodated inside the reaction tube 10 from above the reaction tube 10 by thermal radiation. The number of first ceiling heaters 64 may be one or two or more.

[0036] The second ceiling heater 65 is provided between the upper surface of the vacuum pipe 30 and the top part 52 of the housing 50. The second ceiling heater 65 heats the vacuum pipe 30 from above the vacuum pipe 30 by thermal radiation. The number of second ceiling heaters 65 may be one, or two or more.

[0037] A plurality of lower heaters 66 are provided around the lower part of the reaction tube 10. The plurality of lower heaters 66 are provided radially at intervals in the circumferential direction of the reaction tube 10. The lower heaters 66 are provided below the substrate holder 11. The lower heaters 66 heat the lower part of the reaction tube 10 by thermal radiation and suppress heat radiation from the opening at the lower end of the reaction tube 10.

[0038] The pressure reducing unit 70 reduces the pressure inside the housing 50. The pressure reducing unit 70 includes a pipe 71, a safety valve 72, an on-off valve 73, and a vacuum pump 74.

[0039] The pipe 71 is connected to a port 53a provided on the side portion 53 of the housing 50. The pipe 71 passes through the side portion 53 and the device housing 90 and extends to the outside of the device housing 90. The pipe 71 is provided with a safety valve 72, an on-off valve 73, and a vacuum pump 74, in this order from the housing 50 side. The safety valve 72, the on-off valve 73, and the vacuum pump 74 are provided, for example, outside the device housing 90. The safety valve 72, the on-off valve 73, and the vacuum pump 74 may also be provided outside the housing 50 and inside the device housing 90.

[0040] When the pressure inside the housing 50 exceeds a set pressure, the safety valve 72 changes from a closed state to an open state, thereby maintaining the pressure inside the housing 50 at or below the set pressure.

[0041] The on-off valve 73 is a valve that switches the flow of gas on and off.

[0042] The vacuum pump 74 reduces the pressure inside the housing 50 through the piping 71 .

[0043] When the on-off valve 73 is opened, the vacuum pump 74 depressurizes the interior of the housing 50. When the interior of the housing 50 is depressurized, heat transfer due to convection is suppressed. This suppresses heat transfer to the outside of the housing 50, allowing the space above the housing 50 to be used as a space for installing the on-off valves 241-248. Furthermore, since a heat insulating material is not required, the distance between the reaction tube 10 and the housing 50 can be reduced. This shortens the distance from the on-off valves 241-248 to the substrate, improving gas controllability. Furthermore, when the side heaters (the first side heater 61, the second side heater 62, and the third side heater 63) are divided into multiple heaters in the vertical direction, there is no influence of convection inside the housing 50, and the heaters are less likely to be affected by other heaters in the vertical direction. This improves temperature controllability between the surfaces (vertical direction). This makes it easy to selectively heat only the lower part of the reaction tube 10, selectively heat only the center of the reaction tube 10, or selectively heat only the upper part of the reaction tube 10.

[0044] The pressure increasing unit 80 returns the reduced pressure inside the housing 50 to atmospheric pressure. The pressure increasing unit 80 includes a pipe 81, a gas source 82, a flow rate controller 83, and an on-off valve 84.

[0045] The pipe 81 is connected to a port 53b provided on the side portion 53 of the housing 50. A gas source 82, a flow rate controller 83, and an on-off valve 84 are provided on the pipe 81 in this order from the upstream side to the downstream side in the gas flow direction. The gas source 82, the flow rate controller 83, and the on-off valve 84 are provided, for example, outside the device housing 90. The gas source 82, the flow rate controller 83, and the on-off valve 84 may also be provided outside the housing 50 and inside the device housing 90.

[0046] The gas source 82 is, for example, a source of inert gas. The inert gas is, for example, nitrogen gas. The inert gas may also be argon gas.

[0047] The flow rate controller 83 controls the flow rate of the gas flowing through the pipe 81. The flow rate controller 83 is, for example, a mass flow controller.

[0048] The on-off valve 84 is a valve that switches the flow of gas on and off.

[0049] When the on-off valve 84 is opened, the flow rate of the gas from the gas source 82 is controlled by the flow rate controller 83, and the gas with the controlled flow rate is supplied to the inside of the housing 50. As a result, the pressure inside the housing 50, which has been reduced, returns to atmospheric pressure.

[0050] The device housing 90 surrounds the housing 50. The device housing 90 covers the entire housing 50. The device housing 90 supports the bottom 51 of the housing 50.

[0051] As described above, in the substrate processing apparatus 1 according to the embodiment, the reaction tube 10, the gas inlet 20, the vacuum pipe 30, and the exhaust duct 40 are housed inside the housing 50, and the heating unit 60 is provided inside the housing 50. In this case, the substrate housed inside the reaction tube 10 can be heated from all directions around the reaction tube 10. This improves the temperature uniformity within the substrate surface. As a result, the processing uniformity is improved.

[0052] (Piping connection structure) 6 and 7, a pipe connection structure for connecting the vacuum pipe 30 and the exhaust pipe 110 will be described. Fig. 6 is a cross-sectional view showing the pipe connection structure. Fig. 7 is an enlarged view of area A in Fig. 6.

[0053] The piping connection structure is provided so as to penetrate the bottom 51 of the housing 50. The bottom 51 has an opening 51h at a position where the lower end of the vacuum piping 30 is inserted. The opening 51h includes a first opening and a second opening. The first opening is provided at the upper part and has a first opening diameter. The second opening is provided at the lower part and has a second opening diameter larger than the first opening diameter. The bottom 51 includes a small diameter portion 51a that forms the first opening and a large diameter portion 51b that forms the second opening. The piping connection structure includes the vacuum piping 30, an exhaust pipe 110, and a fixing member 120.

[0054] The vacuum pipe 30 is provided inside the housing 50. The lower end of the vacuum pipe 30 is inserted into the opening 51h. Because the opening diameter of the opening 51h is larger than the outer diameter of the vacuum pipe 30, a gap G1 is formed between the opening 51h and the vacuum pipe 30. In this case, the gap G1 prevents contact between the bottom 51 and the vacuum pipe 30, thereby preventing damage to the vacuum pipe 30.

[0055] The exhaust pipe 110 is made of, for example, a nickel alloy. The exhaust pipe 110 is provided below the bottom 51. The exhaust pipe 110 is provided directly below the vacuum pipe 30. The exhaust pipe 110 is provided coaxially or approximately coaxially with the vacuum pipe 30. The interior of the exhaust pipe 110 communicates with the interior of the vacuum pipe 30. The exhaust pipe 110 includes a pipe section 111 and a pipe flange section 112. The pipe flange section 112 is provided on the upper part of the pipe section 111. The pipe flange section 112 protrudes radially outward from the outer surface of the pipe section 111. The pipe flange section 112 has, for example, an annular plate shape. The end of the pipe section 111 on the side where the pipe flange section 112 is not provided is connected to a vacuum pump (not shown). The vacuum pump exhausts gases introduced into the reaction tube 10 via the exhaust pipe 110, the vacuum pipe 30, and the exhaust duct 40.

[0056] The fixing member 120 fixes the exhaust pipe 110 to the bottom portion 51. The fixing member 120 has a first flange 121, a second flange 122, and a clamp 123.

[0057] The first flange 121 is made of, for example, stainless steel. The first flange 121 includes a pipe portion 121a and a flange portion 121b. With the pipe portion 121a fitted inside the large diameter portion 51b, the first flange 121 is fixed to the bottom portion 51 by a screw V1 that passes through the flange portion 121b.

[0058] The outer diameter of the pipe portion 121a is larger than the opening diameter of the small diameter portion 51a. The upper surface of the pipe portion 121a contacts the lower surface of the small diameter portion 51a. An O-ring R1, which is a sealing member, is provided at the contact portion between the upper surface of the pipe portion 121a and the lower surface of the small diameter portion 51a. The O-ring R1 contacts the upper surface of the pipe portion 121a and the lower surface of the small diameter portion 51a, and seals the gap between the upper surface of the pipe portion 121a and the lower surface of the small diameter portion 51a. The O-ring R1 airtightly separates the inside of the housing 50 from the outside of the housing 50.

[0059] The outer diameter of the tube portion 121a is smaller than the diameter of the opening of the large-diameter portion 51b. A gap G2 is provided between the outer surface of the tube portion 121a and the inner surface of the large-diameter portion 51b. In this case, even if the central axis of the vacuum pipe 30 is misaligned with the central axis of the opening 51h due to quartz tolerances or manufacturing errors, the gap G2 can absorb the misalignment between them.

[0060] Pipe portion 121a has inner inclined surface 121c whose inner diameter increases from top to bottom. Pipe portion 121a has inner side surface 121d whose inner diameter is constant from top to bottom. Inner side surface 121d is located below inner inclined surface 121c. The boundary between inner inclined surface 121c and inner side surface 121d is located above the lower end of vacuum pipe 30.

[0061] The inner diameter at the upper end of the pipe section 121a is larger than the outer diameter of the vacuum pipe 30. A gap G3 is provided between the inner surface at the upper end of the pipe section 121a and the outer surface of the vacuum pipe 30. In this case, the gap G3 prevents contact between the first flange 121 and the vacuum pipe 30, thereby preventing damage to the vacuum pipe 30.

[0062] The flange portion 121b is provided at the lower part of the pipe portion 121a. The flange portion 121b protrudes radially outward from the outer surface of the pipe portion 121a. The flange portion 121b has, for example, an annular plate shape. The flange portion 121b is provided with insertion holes 121h through which the screws V1 are inserted. A plurality of the insertion holes 121h are provided at intervals in the circumferential direction of the flange portion 121b. The first flange 121 is fixed to the bottom portion 51 by the screws V1 inserted into the insertion holes 121h.

[0063] A refrigerant flow path 121f through which a refrigerant flows is provided in the first flange 121. By flowing the refrigerant through the refrigerant flow path 121f, the O-ring R1 can be cooled via the first flange 121. This makes it possible to prevent the O-ring R1 in contact with the bottom portion 51 from becoming too hot even when the bottom portion 51 is heated by thermal radiation.

[0064] The second flange 122 is made of, for example, a nickel alloy. The second flange 122 includes a pipe portion 122a and a flange portion 122b. With the pipe portion 122a fitted inside the pipe portion 121a, the second flange 122 is fixed to the first flange 121 by a screw V2 that passes through the flange portion 122b.

[0065] The upper end of the pipe portion 122a is located higher than the lower end of the vacuum pipe 30. The upper end of the pipe portion 122a is located at approximately the same height as the boundary between the inner inclined surface 121c and the inner side surface 121d.

[0066] The outer diameter of the pipe portion 122a is slightly smaller than the inner diameter of the inner surface 121d of the pipe portion 121a. The outer surface of the pipe portion 122a has a curved surface that follows the inner surface 121d of the pipe portion 121a. In this case, the second flange 122 can be easily fitted into the first flange 121.

[0067] The inner diameter of the pipe portion 122a is constant in the vertical direction. The inner diameter of the pipe portion 122a is larger than the outer diameter of the vacuum pipe 30. A gap G4 is provided between the inner surface of the pipe portion 122a and the outer surface of the vacuum pipe 30. In this case, the gap G4 prevents contact between the pipe portion 122a and the vacuum pipe 30, thereby preventing damage to the vacuum pipe 30.

[0068] An O-ring R2, which is a sealing member, is provided in the area surrounded by the outer surface of the vacuum pipe 30, the inner inclined surface 121c of the first flange 121, and the upper end of the second flange 122. The O-ring R2 contacts the outer surface of the vacuum pipe 30, the inner inclined surface 121c of the first flange 121, and the upper end of the second flange 122, and closes gaps G3 and G4. The O-ring R2 airtightly separates the interior of the vacuum pipe 30 from the interior and exterior of the housing 50. The inner diameter of the pipe portion 122a may be a dimension that prevents the O-ring R2 from protruding from gap G4 when a vacuum is drawn.

[0069] The flange portion 122b is provided at the lower part of the pipe portion 122a. The flange portion 122b protrudes radially outward from the outer surface of the pipe portion 122a. The flange portion 122b has, for example, an annular plate shape. The outer diameter of the flange portion 122b is, for example, the same as the outer diameter of the flange portion 121b. The upper surface of the flange portion 122b is in contact with the lower surface of the flange portion 121b. The flange portion 122b is provided with insertion holes 122h through which the screws V2 are inserted. A plurality of the insertion holes 122h are provided at intervals in the circumferential direction of the flange portion 122b. The second flange 122 is fixed to the first flange 121 by the screws V2 inserted into the insertion holes 122h.

[0070] The clamp 123 is made of, for example, stainless steel. The clamp 123 has a pipe portion 123a and a pressing portion 123b. The clamp 123 is fixed to the flange portion 122b with a screw V3, with the pipe flange portion 112 sandwiched between the pressing portion 123b and the underside of the flange portion 122b.

[0071] The outer diameter of the pipe portion 123a is, for example, the same as the outer diameter of the flange portion 122b. The inner diameter of the pipe portion 123a is larger than the outer diameter of the pipe flange portion 112. A gap G5 is provided between the inner surface of the pipe portion 123a and the outer surface of the pipe flange portion 112. In this case, even if the central axis of the vacuum pipe 30 is misaligned with the central axis of the exhaust pipe 110, the gap G5 can absorb the misalignment between them. Therefore, the exhaust pipe 110 can be easily attached while ensuring airtightness. An insertion hole 123h through which a screw V3 is inserted is provided in the pipe portion 123a. A plurality of insertion holes 123h are provided at intervals around the circumferential direction of the pipe portion 123a. The clamp 123 is fixed to the second flange 122 by the screw V3 inserted into the insertion hole 123h.

[0072] The holding portion 123b is provided at the bottom of the pipe portion 123a. The holding portion 123b protrudes radially inward from the inner surface of the pipe portion 123a. The holding portion 123b has, for example, an annular plate shape. The inner diameter of the holding portion 123b is larger than the outer diameter of the pipe portion 111 of the exhaust pipe 110, for example.

[0073] An O-ring R3, which is a sealing member, is provided at the contact portion where the lower surface of the flange portion 122b and the upper surface of the piping flange portion 112 come into contact. The O-ring R3 comes into contact with the lower surface of the flange portion 122b and the upper surface of the piping flange portion 112, and closes the gap between the lower surface of the flange portion 122b and the upper surface of the piping flange portion 112. The O-ring R3 airtightly separates the inside of the vacuum piping 30 from the outside of the housing 50.

[0074] (Pipe connection method) 8 to 10, a pipe connection method for connecting the vacuum pipe 30 and the exhaust pipe 110 will be described. Figures 8 to 10 are cross-sectional views showing the pipe connection method.

[0075] First, the lower end of the reaction tube 10 is fixed to the bottom 51 (FIG. 3). As a result, as shown in FIG. 8, the lower end of the vacuum pipe 30, which is integral with the reaction tube 10, is inserted into the opening 51h. At this time, since the opening diameter of the opening 51h is larger than the outer diameter of the vacuum pipe 30, a gap G1 is formed between the opening 51h and the vacuum pipe 30. In this case, the gap G1 prevents the bottom 51 and the vacuum pipe 30 from coming into contact with each other, and therefore damage to the vacuum pipe 30 can be prevented.

[0076] 8, an O-ring R1 is attached to the underside of the small-diameter portion 51a, a first flange 121 is attached to the lower end of the vacuum pipe 30, and the first flange 121 is fixed to the bottom 51 with screws V1. At this time, because the outer diameter of the tube portion 121a is smaller than the opening diameter of the large-diameter portion 51b, a gap G2 is formed between the outer surface of the tube portion 121a and the inner surface of the large-diameter portion 51b. In this case, even if the central axis of the vacuum pipe 30 is misaligned with the central axis of the opening 51h due to quartz tolerances or manufacturing errors, the gap G2 can absorb the misalignment between them.

[0077] 9, an O-ring R2 is attached between the outer surface of the vacuum pipe 30 and the inner surface of the first flange 121. Subsequently, the pipe portion 122a of the second flange 122 is fitted inside the first flange 121, and the second flange 122 is fixed to the first flange 121 with the screw V2. At this time, the outer surface of the pipe portion 122a has a curved surface that follows the inner surface 121d of the pipe portion 121a, so that the second flange 122 can be easily fitted into the first flange 121.

[0078] Next, as shown in FIG. 10 , the pipe flange portion 112 of the exhaust pipe 110 is butted against the underside of the second flange 122 via an O-ring R3. The pipe flange portion 112 is then clamped between the holding portion 123b of the clamp 123 and the underside of the flange portion 122b, and the clamp 123 is fixed to the second flange 122 with screws V3. At this time, because the inner diameter of the pipe portion 123a is larger than the outer diameter of the pipe flange portion 112, a gap G5 is provided between the inner surface of the pipe portion 123a and the outer surface of the pipe flange portion 112. In this case, even if the central axis of the vacuum pipe 30 is misaligned with the central axis of the exhaust pipe 110, the gap G5 can absorb the misalignment between them. Therefore, the exhaust pipe 110 can be easily attached while maintaining airtightness.

[0079] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive, and the above-described embodiments may be omitted, substituted, or modified in various ways without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0080] 1. Substrate processing equipment 10 Reaction tube 30 Vacuum piping 50 cabinets 51 Bottom 51h opening 110 Exhaust pipe 120 Fixing member

Claims

1. A reaction tube; a vacuum pipe integrally formed with the reaction tube; a housing that houses the reaction tube and the vacuum piping; an exhaust pipe provided below the housing; a fixing member that fixes the exhaust pipe to the housing; Equipped with the housing has a bottom portion that supports the reaction tube, the bottom portion has an opening with an opening diameter larger than an outer diameter of the vacuum pipe, The vacuum pipe has a lower end inserted into the opening, the exhaust pipe is fixed to the housing with the inside thereof communicating with the inside of the vacuum pipe; Substrate processing equipment.

2. the tube axis of the vacuum pipe is parallel to the tube axis of the reaction tube; The substrate processing apparatus according to claim 1 .

3. A flange portion that protrudes radially outward is provided at an upper portion of the exhaust pipe, The fixing member is a first flange disposed around a periphery of a lower end of the vacuum pipe with a first gap therebetween and fixed to the bottom; a second flange disposed inside the first flange and fixed to the first flange; a clamp fixed to the second flange by sandwiching the flange portion between the clamp and the second flange; having The substrate processing apparatus according to claim 1 .

4. the fixing member has a first seal member that contacts the bottom and the first flange and airtightly separates the inside of the housing from the outside of the housing. The substrate processing apparatus according to claim 3 .

5. the fixing member has a second seal member that contacts an outer surface of the vacuum pipe, an inner surface of the first flange, and an upper end of the second flange, and airtightly separates the inside of the vacuum pipe, the inside of the housing, and the outside of the housing from one another. The substrate processing apparatus according to claim 3 .

6. the fixing member has a third seal member that contacts the second flange and the flange portion and airtightly separates the outside of the housing from the inside of the vacuum pipe. The substrate processing apparatus according to claim 3 .

7. a second gap is provided between an outer surface of the first flange and an inner surface of the opening; The substrate processing apparatus according to claim 3 .

8. a third gap is provided between the outer surface of the flange portion and the inner surface of the clamp; The substrate processing apparatus according to claim 3 .

9. A refrigerant flow path is provided inside the first flange. The substrate processing apparatus according to claim 3 .

10. the reaction tube and the vacuum piping are made of quartz; The substrate processing apparatus according to claim 1 .

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