Cutting blade jig

Abstract

To provide a cutting blade jig that can solve the problem that a cutting blade is dropped and broken.SOLUTION: A cutting blade jig handles a cutting blade 83A that is attached to a tip of a rotary shaft constituting cutting means. The cutting blade comprises an annular cutting edge 83Ab at an outside thereof and comprises an attachment port 83Ac that is attached to the tip of the rotary shaft, which is configured to include inside support parts 20Ad and 20Ae that are inserted into the attachment port 83A to support the inside thereof and gripping parts 20Aa and 20Ab extending from the inside supporting parts 20Ad and 20Ae.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a cutting blade jig for handling a cutting blade attached to the tip of a rotating shaft constituting a cutting device comprising a holding means for holding a workpiece and a cutting means for cutting the workpiece held by the holding means. [Background technology]

[0002] Wafers, on the surface of which multiple devices such as ICs and LSIs are formed along division lines, are separated into individual device chips by a cutting machine and used in electrical equipment such as mobile phones and personal computers.

[0003] The cutting device is configured to include holding means for holding a wafer, cutting means having a rotatable cutting blade for cutting the wafer held by the holding means, X-axis feed means for relatively feeding the holding means and the cutting means in the X-axis direction for processing, Y-axis feed means for relatively feeding the holding means and the cutting means in the Y-axis direction perpendicular to the X-axis direction for processing, and Z-axis feed means for relatively feeding the holding means and the cutting means in the Z-axis direction perpendicular to the X-axis and Y-axis directions, and can divide the wafer into individual device chips with high precision.

[0004] The present applicant has also proposed a cutting blade changing device that can automatically change cutting blades attached to cutting means of a cutting device (see Patent Document 1). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2022-187143 Summary of the Invention [Problem to be solved by the invention]

[0006] However, if an error occurs in the cutting blade changing device while the cutting blade is being changed, it may be necessary to manually remove the cutting blade from the holding means that holds the cutting blade, which may cause the cutting blade to fall and be damaged during the removal process, resulting in significant damage, particularly if the removed cutting blade is new.

[0007] The present invention has been made in consideration of the above facts, and its main technical objective is to provide a cutting blade jig that can solve the problem of the cutting blade being dropped and damaged when being removed from a holding means that holds the cutting blade. [Means for solving the problem]

[0008] In order to solve the above-mentioned main technical problem, according to the present invention, in a cutting device comprising a holding means for holding a workpiece and a cutting means for cutting the workpiece held by the holding means, there is provided a cutting blade jig for handling a cutting blade attached to the tip of a rotating shaft constituting the cutting means, wherein the cutting blade has an annular cutting edge on the outside and an attachment opening on the inside for attachment to the tip of the rotating shaft, and the cutting blade jig is composed of an inner support part that is inserted into the attachment opening and supports the inside, and a gripping part extending from the inner support part.

[0009] The cutting blade preferably has a circular base, an annular cutting edge on the outside of the circular base, and an attachment opening on the inside of the circular base for attachment to the tip of the rotating shaft. Furthermore, the gripping portion is configured to generate an elastic force that causes the inner support portion to expand outward or to narrow inward, and the inner support portion preferably has an engagement groove that engages with the inside of the cutting blade. [Effects of the Invention]

[0010] The cutting blade jig of the present invention is a cutting blade jig for handling a cutting blade attached to the tip of a rotating shaft constituting a cutting device comprising a holding means for holding a workpiece and cutting means for cutting the workpiece held by the holding means, wherein the cutting blade has an annular cutting edge on the outside and an attachment opening on the inside for attachment to the tip of the rotating shaft, and includes an inner support part that is inserted into the attachment opening to support the inside, and a gripping part extending from the inner support part.Since the attachment opening of the cutting blade is supported by the cutting blade jig, the cutting blade can be handled without dropping.Furthermore, if the cutting blade is new, there is no need to drop and damage an expensive new cutting blade, which eliminates the problem of waste. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 2 is an overall perspective view of the cutting device. [Figure 2] 2A and 2B are an enlarged perspective view and an exploded view showing a part of a cutting means disposed in the cutting device shown in FIG. 1. [Figure 3] 1. FIG. 4 is an enlarged perspective view and an exploded view showing a part of cutting means of another type disposed in the cutting device shown in FIG. [Figure 4] 1(a) and 1(b) are perspective views showing the configuration of a first cutting blade jig. [Figure 5] 10(a) and 10(b) are perspective views showing the configuration of a second cutting blade jig. [Figure 6] (a) An oblique view showing how the inner support part of the first cutting blade jig is inserted into the attachment port of the cutting blade adsorbed to the holding means of the cutting blade replacement device; (b) An oblique view showing how the cutting blade is held and removed by the first cutting blade jig from the state shown in (a). [Figure 7] 10(a) and 10(b) are perspective views showing the configuration of a third cutting blade jig. [Figure 8] 10(a) and 10(b) are perspective views showing the configuration of a fourth cutting blade jig. DETAILED DESCRIPTION OF THE INVENTION

[0012] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a cutting blade jig configured based on the present invention will be described in detail with reference to the accompanying drawings.

[0013] 1 shows an overall perspective view of a cutting device 1 to which a cutting blade 83A handled by the cutting blade jig of this embodiment is attached. The illustrated cutting device 1 includes a holding means 7 for holding a workpiece, and a cutting means 8 for cutting the workpiece held by the holding means 7. The workpiece to be processed by the illustrated cutting device 1 is, for example, a semiconductor wafer 10, which is held integrally with an annular frame F by adhesive tape T.

[0014] As shown in FIG. 1, the cutting device 1 has a housing 2 having an approximately rectangular parallelepiped shape, a cassette 4 placed on a cassette table 4a that can be raised and lowered, a transfer means 3 that transfers the wafer 10 held in a frame F from the cassette 4 to a temporary storage table 5, a transfer means 6 having a swivel arm that transfers the wafer 10 transferred to the temporary storage table 5 to a holding means 7 having a holding surface 7a, a cutting means 8 including a cutting blade 83A arranged as a processing means for processing the wafer 10 held on the holding means 7, an alignment means 9 that takes an image of the wafer 10 held on the holding means 7 and detects the planned division line to be cut by the cutting blade 83A of the cutting means 8, a cleaning device 11 (details omitted) that cleans the processed wafer 10 that is transferred from the transfer position where the holding means 7 is positioned in FIG. 1, a cleaning and transfer means 12 that transfers the wafer 10 from the holding means 7 to the cleaning device 11, and a control means not shown.

[0015] The holding surface 7a of the holding means 7 is a substantially horizontal XY plane defined by the X-axis direction and the Y-axis direction perpendicular to the X-axis direction. The holding surface 7a is made of a breathable material, and is connected to a suction means (not shown). Activating the suction means generates negative pressure on the holding surface 7a. A plurality of clamps 7b (four in the illustrated embodiment) are disposed at equal intervals around the outer periphery of the holding means 7 to grip a frame F that supports the wafer 10. Inside the housing 2, there are disposed an X-axis feed means for moving the holding means 7 in the X-axis direction, a Y-axis feed means for moving the cutting means 8 in the Y-axis direction, a Z-axis feed means for moving the cutting means 8 in the Z-axis direction (up and down), a rotary drive means for rotating the holding means 7, and other components (none of which are shown).

[0016] The control means is composed of a computer and includes a central processing unit (CPU) that performs calculations according to a control program, a read-only memory (ROM) that stores the control program, etc., a readable and writable random access memory (RAM) that temporarily stores detected values, calculation results, etc., an input interface, and an output interface (details are not shown in the figure), and each operating part of the cutting device 1 is controlled by the control means.

[0017] When cutting is performed by the cutting device 1, first, the wafer 10 stored in the cassette 4 is carried out to the temporary placement table 5 by the carry-in / out means 3, and alignment is performed. Next, the frame F supporting the wafer 10 is sucked by the transport means 6, and the wafer 10 is transported to the carry-in / out position where the holding means 7 is positioned in FIG. 1 , and placed on the holding surface 7a of the holding means 7. The wafer 10 is sucked onto the holding surface 7a, and the frame F is gripped by the clamps 7b. Next, the X-axis feed means is operated to position the holding means 7 directly below the alignment means 9. Then, the alignment means 9 takes an image of the wafer 10 held by the holding means 7, and detects the planned dividing line to be processed. Based on the position information of the predetermined dividing line detected by the alignment means 9, the rotation drive means is operated to align the predetermined dividing line in the X-axis direction and align the cutting blade 83A with the predetermined dividing line.

[0018] Next, the holding means 7 is moved in the X-axis direction to be positioned directly below the cutting means 8, and the Z-axis feeding means is operated to cause the cutting blade 83A, which is rotated at high speed, to cut to a predetermined depth along the predetermined dividing lines aligned in the X-axis direction, and the X-axis feeding means is operated to feed the wafer 10 in the X-axis direction to perform cutting along the predetermined dividing lines.Then, the X-axis feeding means, Y-axis feeding means, Z-axis feeding means, and rotation drive means are operated as appropriate to perform cutting along all of the dividing lines on the wafer 10, thereby dividing the wafer 10 into individual device chips.

[0019] As described above, once the wafer 10 has been divided into individual device chips by the cutting means 8, the wafer 10 is carried out by the cleaning and carrying-out means 12 from the holding means 7 positioned at the carry-in / out position and transported to the cleaning device 11, where it is cleaned and dried. Next, the transport means 6 transports the wafer 10 from the cleaning device 11 to the temporary placement table 5, and the carry-in / out means 3 is operated to store the wafer 10 at a predetermined position in the cassette 4, thereby completing the cutting process on the wafer 10.

[0020] The cutting means 8 equipped with a cutting blade 83A handled by the cutting blade jig of the present invention, which will be described later, will be described in more detail with reference to Figure 2. For convenience of explanation, the lower part of Figure 2 shows a perspective view in which the blade cover that covers the cutting blade 83A has been removed, and the upper part of Figure 2 shows an exploded view of the cutting means 8 shown below.

[0021] 2, the cutting means 8 includes a rotating shaft 84 rotatably supported in a housing 81, a motor (not shown) that rotates the rotating shaft 84, a cutting blade 83A that is detachably fixed to the tip of the rotating shaft 84, and a nut 85 for detachably fixing the cutting blade 83A to the tip of the rotating shaft 84. An annular flange 84a that protrudes radially outward is provided on the outer peripheral surface of the tip side of the rotating shaft 84, and a male thread 84b is formed on the outer peripheral surface of the rotating shaft 84 further tip side than the flange 84a.

[0022] The cutting blade 83A has an annular circular base 83Aa, which may be formed from an appropriate metal material such as an aluminum alloy, and an annular cutting blade 83Ab, which protrudes radially outward from one end of the outer periphery of the circular base 83Aa. A mounting opening 83Ac, which is an opening into which the tip of a rotating shaft 84 is inserted and into which a cutting blade jig (described later) is attached, is formed at the center of the circular base 83Aa. The tip of the illustrated rotating shaft 84 is inserted into the mounting opening 83Ac of the circular base 83Aa, and the cutting blade 83A is brought into contact with the flange 84a. The nut 85 is then tightened onto the male thread 84b of the rotating shaft 84. As a result, the cutting blade 83A is sandwiched between the flange 84a and the nut 85 and fixed to the tip of the rotating shaft 84.

[0023] The cutting blade that can be handled by the cutting blade jig configured according to the present invention is not limited to the cutting blade 83A shown in FIG. 2. For example, it may be the cutting blade 83B attached to the cutting means 8 shown in FIG. 3. The illustrated cutting blade 83B is a so-called washer blade that does not have the circular base 83Aa described above and is composed only of a cutting blade. The center of the cutting blade 83B is formed with an attachment opening 83Ba through which the tip of the rotating shaft 84 is inserted and into which the cutting blade jig (described later) is attached. When attaching the cutting blade 83B to the tip of the rotating shaft 84, as shown in the figure, the tip of the rotating shaft 84 is inserted into the attachment opening 83Ba of the cutting blade 83B, and the cutting blade 83B is sandwiched between the annular detachable flange 86 and the flange 84a of the rotating shaft 84. The cutting blade 83B is then fixed by tightening the nut 85 onto the male thread 84b formed on the tip side of the rotating shaft 84.

[0024] In the following description, it is assumed that the cutting means 8 is equipped with the cutting blade 83A.

[0025] As described above, when the cutting blade 83A wears due to repeated cutting operations using the cutting device 1, or when the processing conditions for the workpiece change, the cutting blade 83A is replaced. The cutting blade 83A is replaced using the cutting blade replacement device described in Patent Document 2. However, if an error occurs in the cutting blade replacement device while the cutting blade 83A is held by a holding means that adsorbs the cutting blade and transports and attaches the cutting blade 83A to the rotation shaft 84 of the cutting means 8, an operator must remove the cutting blade 83A from the holding means. Here, with reference to FIGS. 4 and 5, first and second cutting blade jigs suitable for removing the cutting blade 83A from the holding means will be described.

[0026] (First cutting blade jig) 4(a) and (b) show a first cutting blade jig 20A constructed according to the present invention. As shown in FIG. 4(a), the first cutting blade jig 20A includes inner support portions 20Ad, 20Ae that are inserted into the mounting opening 83Ac of the cutting blade 83A and engage with the inside of the mounting opening 83Ac, gripping portions 20Aa, 20Ab that extend from one end where the inner support portions 20Ad, 20Ae are formed to the other end, and a connecting portion 20Ac that connects the gripping portions 20Aa, 20Ab to each other at the other end of the gripping portions 20Aa, 20Ab. The side surfaces of the gripping portions 20Aa, 20Ab are configured with a curved shape that forms part of a substantially cylindrical shape extending in the longitudinal direction. The inner support portions 20Ad, 20Ae are formed along the edge of one end of the gripping portions 20Aa, 20Ab to form part of a substantially circular shape, and are composed of two rail-shaped members extending circumferentially. The distance between the two rail-shaped members constituting the inner support portions 20Ad, 20Ae is set to a width that can accommodate at least the thickness of the mounting opening 83Ac of the cutting blade 83A described above, and engagement grooves 20Af, 20Ag are formed to engage with the inside of the mounting opening 83Ac of the cutting blade 83A. The cutting blade jig 20A of this embodiment is made of, for example, synthetic resin (plastic).

[0027] As shown in FIG. 4(a), the first cutting blade jig 20A is configured so that when no force is applied to the gripping portions 20Aa and 20Ab, the distance between the inner support portions 20Ad and 20Ae is widened and becomes larger than the diameter of the mounting opening 83Ac of the cutting blade 83A. Then, as shown in FIG. 4(b), an operator can apply force to the gripping portions 20Aa and 20Ab in the directions of arrows R1 and R2 to bring the inner support portions 20Ad and 20Ae closer together and make the diameter smaller than the diameter of the mounting opening 83Ac of the cutting blade 83A. In this case, the gripping portions 20Aa and 20Ab and the connecting portion 20Ac generate an elastic force that tends to spread the inner support portions 20Ad and 20Ae outward.

[0028] (Second cutting blade jig) 5(a) and (b) show a second cutting blade jig 30A constructed according to the present invention. As shown in FIG. 5(a), the second cutting blade jig 30A includes inner support portions 30Ad and 30Ae that are inserted into the mounting opening 83Ac of the cutting blade 83A and engage with the inside of the mounting opening 83Ac, gripping portions 30Aa and 30Ab that extend from one end where the inner support portions 30Ad and 30Ae are formed to the other end, a connecting portion 30Ac that is formed in an intermediate region of the gripping portions 30Aa and 30Ab and connects the gripping portions 30Aa and 30Ab, and a spring 30Ah that generates an elastic force in a direction that widens the gap between the gripping portions 30Aa and 30Ab at the other end of the gripping portions 30Aa and 30Ab. The side surfaces of the gripping portions 30Aa, 30Ab are curved surfaces that form part of a generally cylindrical shape extending in the longitudinal direction, and the inner support portions 30Ad, 30Ae are formed to form part of a generally circular shape along the edge of one end of the gripping portions 30Aa, 30Ab, and are composed of two rail-shaped members extending in the circumferential direction, similar to the first cutting blade jig 20A. The spacing between the two rail-shaped members that form the inner support portions 30Ad, 30Ae is set to a width that can accommodate at least the thickness of the mounting opening 83Ac of the cutting blade 83A described above, and the two rail-shaped members form engagement grooves 30Af, 30Ag in the inner support portions 30Ad, 30Ae that engage with the inside of the mounting opening 83Ac of the cutting blade 83A.

[0029] As shown in Fig. 5(a), when no force is applied to the gripping portions 30Aa and 30Ab of the second cutting blade jig 30A, the elastic force generated by the spring 30Ah acts to narrow the gap between the inner support portions 30Ad and 30Ae, making the gap smaller than the diameter of the attachment opening 83Ac of the cutting blade 83A. Then, as shown in Fig. 5(b), by applying force in the directions of arrows R3 and R4 to the other ends of the gripping portions 30Aa and 30Ab by an operator, the gap between the inner support portions 30Ad and 30Ae widens, and the attachment opening 83Ac of the cutting blade 83A can be engaged with the engagement grooves 30Af and 30Ag formed by the two rail-shaped members of the inner support portions 30Ad and 30Ae.

[0030] A method for handling the cutting blade 83A using the above-described cutting blade jig configured according to the present invention will be described below with reference to Fig. 6. In the following description, the first cutting blade jig 20A will be used.

[0031] 6(a) and 6(b) show a holding means 40 that temporarily holds a cutting blade 83A by suction when replacing the cutting blade 83A using the cutting blade changing device described in Patent Document 2. The holding means 40 is generally cylindrical as shown, and as shown in FIG. 6(b), has multiple suction holes 42 on one end surface 41, which are connected to a suction means (not shown). By operating the suction means to generate negative pressure in the suction holes 42, the cutting blade 83A can be sucked toward the end surface 41, as shown in FIG. 6(a). Note that FIG. 6(a) shows the back side of the cutting blade 83A described with reference to FIG. 2. In the cutting blade changing device, the holding means 40 suctions and holds the cutting blade 83A. This allows the cutting blade 83A to be removed from the rotating shaft 84 of the cutting means 8 or the next cutting blade 83A to be installed to be transported to the cutting means 8, thereby replacing the cutting blade 83A attached to the tip of the rotating shaft 84 of the cutting means 8.

[0032] If an error occurs in the cutting blade replacement device while replacing the cutting blade 83A, the cutting blade 83A remains attached to the holding means 40, as shown in FIG. 6(a), and the operator must manually remove the cutting blade 83A. The operator then prepares the first cutting blade jig 20A, grasps the gripping portions 20Aa and 20Ab, and applies force in the directions indicated by arrows R1 and R2 to narrow the gap between the inner support portions 20Ad and 20Ae of the first cutting blade jig 20A. Next, as shown in the figure, the inner support portions 20Ad and 20Ae are moved in the direction indicated by arrow R5 and inserted into the mounting opening 83Ac formed in the circular base 83Aa of the cutting blade 83A.

[0033] Next, by releasing the force applied to the gripping portions 20Aa and 20Ab, the elastic force provided by the gripping portions 20Aa and 20Ab and the connecting portion 20Ac widens the gap between the gripping portions 20Aa and 20Ab, and the mounting opening 83Ac of the cutting blade 83A engages with the engagement grooves 20Af and 20Ag formed in the inner support portions 20Ad and 20Ae. The negative pressure generated in the suction hole 42 of the holding means 40 is then released, and the operator pulls the first cutting blade jig 20A in the direction indicated by arrow R6, thereby reliably removing the cutting blade 83A held by the holding means 40. After removing the cutting blade 83A from the holding means 40 in this manner, the cutting blade 83A is removed from the first cutting blade jig 20A and stored in a predetermined storage container (not shown).

[0034] According to the embodiment described above, the attachment opening 83Ac of the cutting blade 83A held by the holding means 40 of the blade changing device is in a free state, and by supporting the attachment opening 83Ac with the first cutting blade jig 20A, the cutting blade 83A can be removed without dropping. Furthermore, if the cutting blade held by the holding means 40 of the blade changing device is new, there is no risk of the expensive new cutting blade 83A being dropped and damaged, which also solves the problem of wastefulness.

[0035] The cutting blade 83A can also be handled by the second cutting blade jig 30A described based on Fig. 5. However, when removing the cutting blade 83A held by the holding means 40 shown in Fig. 6(a) using the second cutting blade jig 30A, the operator inserts the inner support parts 30Ad and 30Ae into the attachment opening 83Ac of the cutting blade 83A without applying force to the gripping parts 30Aa and 30Ab of the second cutting blade jig 30A, and then applies force to the gripping parts 30Aa and 30Ab to widen the gap between the inner support parts 30Ad and 30Ae, thereby engaging the attachment opening 83Ac of the cutting blade 83A with the engagement grooves 30Af and 30Ag formed in the inner support parts 30Ad and 30Ae, and then releases the negative pressure generated in the suction hole 41 of the holding means 40. As a result, the cutting blade 83A held by the holding means 40 can be removed from the holding means 40, and the same effects as those of the first cutting blade jig 20A can be obtained.

[0036] The above-mentioned cutting blade changing device can also change the cutting blade 83B described based on Fig. 3. When removing the cutting blade 83B from the holding means 40 of the cutting blade changing device that has stopped due to an error or the like, the cutting blade 83B can be handled using the above-mentioned first cutting blade jig 20A and second cutting blade jig 30A, but it is preferable to handle it using, for example, the third cutting blade jig 20B (see Fig. 7) and fourth cutting blade jig 30B (see Fig. 8) described below.

[0037] (Third cutting blade jig) 7(a) includes inner support portions 20Bd, 20Be that engage with the inside of the mounting opening 83Ba of the cutting blade 83B described above, gripping portions 20Ba, 20Bb that extend from one end where the inner support portions 20Bd, 20Be are formed to the other end, and a connecting portion 20Bc that connects the gripping portions 20Ba, 20Bb at the other end of the gripping portions 20Ba, 20Bb. The inner support portions 20Bd, 20Be have engagement grooves 20Bf, 20Bg formed by the two rail-shaped members that engage with the inside of the mounting opening 83Ac of the cutting blade 83B, which is composed only of a cutting blade.

[0038] As shown in Figure 7(b), the operator can apply force to the gripping portions 20Ba, 20Bb in the directions of arrows R7, R8 to make the inner support portions 20Bd, 20Be smaller than the diameter of the mounting opening 83Bc of the cutting blade 83B. In this case, the gripping portions 20Ba, 20Bb and the connecting portion 20Bc generate an elastic force that tends to spread the inner support portions 20Bd, 20Be outward.

[0039] The third cutting blade jig 20B described above differs from the first cutting blade jig 20A only in that the two rail-shaped members constituting the inner support portions 20Bd and 20Be form relatively narrow engagement grooves 20Bf and 20Bg corresponding to the thickness of the cutting blade 83B, which is composed only of a cutting blade. This configuration allows the mounting opening 83Bc of the cutting blade 83B to engage with the engagement grooves 20Bf and 20Bg, which are narrower than those of the first cutting blade jig 20A. This achieves the same effects as the first cutting blade jig 20A described above, and also stably holds the thin cutting blade 83B, which is composed only of a cutting blade. For example, even if an error occurs while the cutting blade 83B is held by the holding means 40 of the cutting blade replacement device, the third cutting blade jig 20B allows the cutting blade 83B to be reliably removed.

[0040] (4th cutting blade jig) In the fourth cutting blade jig 30B shown in Figure 8(a), when no force is applied to the gripping portions 30Ba and 30Bb, the elastic force generated by the spring 30Ah narrows the gap between the inner support portions 30Bd and 30Be, making it smaller than the diameter of the mounting opening 83Ba of the cutting blade 83B. Then, as shown in Figure 8(b), the operator can apply force in the directions of arrows R9 and R10 to the other ends of the gripping portions 30Ba and 30Bb to widen the spacing between the inner support portions 30Bd and 30Be, and engage the engagement grooves 30Bf and 30Bg of the inner support portions 30Bd and 30Be with the mounting opening 83Ba of the cutting blade 83B. This achieves the same effect as the second cutting blade jig 30A, and also stably holds the thin cutting blade 83B, which is composed only of a cutting edge. For example, even if an error occurs while the cutting blade 83B is held by the holding means 40 of the cutting blade replacement device, it can be reliably removed by this fourth cutting blade jig 30B. [Explanation of symbols]

[0041] 1:Cutting device 2: Housing 3: Carrying in / out means 4: Cassette 5: Temporary table 6: Means of transport 7: Holding means 7a: Holding surface 8: Cutting means 81: Housing 83A: Cutting blade 83Aa: Circular base 83Ab:Cutting blade 83Ac: Mounting port 84: Rotation axis 84a: flange 85: Nut 83B: Cutting blade 83Ba: Mounting port 9: Alignment means 10: Wafer 11: Cleaning equipment 12: Cleaning and carrying out means 20A: First cutting blade jig 20Aa, 20Ab: Grip part 20Ac: Connection part 20Ad, 20Ae: Inner support part 20Af, 20Ag: Engagement groove 20B: Third cutting blade jig 20Ba, 20Bb: Grip part 20Bc:Connection part 20Bd, 20Be: Inner support part 20Bf, 20Bg: Engagement groove 30A: Second cutting blade jig 30Aa, 30Ab: Grip part 30Ac: Connection part 30Ad, 30Ae: Inner support part 30Af, 30Ag: Engagement groove 30B: Fourth cutting blade jig 30Ba, 30Bb: Grip part 30Bc:Connection part 30Bd, 30Be: Inner support part 30Bf, 30Bg: Engagement groove

Claims

1. A cutting device including a holding means for holding a workpiece and a cutting means for cutting the workpiece held by the holding means, the cutting blade jig for handling a cutting blade attached to a tip of a rotating shaft constituting the cutting means, The cutting blade has an annular cutting edge on the outside and an attachment opening on the inside to be attached to the tip of the rotary shaft, The cutting blade jig includes an inner support portion that is inserted into the mounting opening to support the inside, and a grip portion that extends from the inner support portion.

2. 2. The cutting blade jig according to claim 1, wherein the cutting blade comprises a circular base, an annular cutting edge on the outside of the circular base, and an attachment opening on the inside of the circular base for attachment to the tip of the rotary shaft.

3. 2. The cutting blade jig of claim 1, wherein the gripping portion is configured to generate an elastic force that causes the inner support portion to expand outward or an elastic force that causes the inner support portion to narrow inward, and the inner support portion has an engagement groove that engages with the inner side of the cutting blade.

Images