Fluid Supply Module

Abstract

Fluid flow control devices are important components for delivering process fluids to semiconductor manufacturing. Such fluid flow control devices are formed using a variety of fluid flow components, including fluid flow components that mix fluid flows. Fluid flow components that mix flows utilize a mixing element configured to receive two or more process fluid streams via a fluid inlet, mix the fluid flows within the mixing element, and deliver the mixed fluid to an outlet of a downstream fluid flow component or device for controlling fluid flow rate.

Description

[Technical field]

[0001] [CROSS-REFERENCE TO RELATED APPLICATIONS] This application claims the benefit of U.S. Provisional Patent Application No. 63 / 304,171, filed January 28, 2022, the entirety of which is incorporated herein by reference. [Background technology]

[0002] Fluid control is a key technology in semiconductor chip manufacturing. Devices that control fluid flow are important to provide the flow of process fluids for semiconductor manufacturing and other industrial processes. Such devices are used to measure and precisely control the flow of fluids for a variety of applications. This control is dependent on devices designed to increase packaging density and improve functional performance.

[0003] As chip manufacturing technology improves, component sizes decrease and packaging requirements for flow control devices become more stringent. Increased functional performance and reduced space requirements are driving improvements in all aspects of flow control devices. There is a demand for improved methods and apparatus to improve the functional performance of flow control devices. Summary of the Invention

[0004] The present technology is directed to a fluid delivery module that includes a flow control device. The flow control device includes flow components that include a mixing element that mixes two or more fluids and delivers the resulting mixed fluid to a process chamber. The flow control device can incorporate multiple fluid flow components to perform a wide range of control functions other than mixing. When mixing is required, it is desirable to achieve as complete mixing as possible to ensure that the delivered fluid mixture is homogenous and behaves in a predictable manner. Such devices are used in a wide range of processes, such as semiconductor chip manufacturing, solar panel manufacturing, etc.

[0005] In one embodiment, the invention is an article processing system. The system includes a first fluid supply configured to supply a first process fluid, a second fluid supply configured to supply a second process fluid, a process chamber configured to process an article, and a fluid supply module. The fluid supply module includes a first fluid inlet fluidly coupled to the first fluid supply, a second fluid inlet fluidly coupled to the second fluid supply, an outlet fluidly coupled to the process chamber, a fluid path extending from the first and second fluid inlets to the outlet, and a first flow component. The first flow component includes a component body, a first port, a second port, and a third port. The first, second, and third ports are formed in the component body, the first flow path extending from the first port to a junction, the second flow path extending from the second port to a junction, and the third flow path extending from the junction to the third port. Each of the first, second, and third flow paths forms a portion of the fluid path. The first flow component further includes a mixing element located at a junction of the first flow component, the mixing element having a first fluid inlet, a second fluid inlet, and a fluid outlet, the first fluid inlet fluidly coupled to the first port, the second fluid inlet fluidly coupled to the second port, and the fluid outlet fluidly coupled to the third port.

[0006] In another embodiment, the invention is a fluid flow component. The fluid flow component has a component body, a first port, a second port, and a third port. Each of the first, second, and third ports are formed in the component body. A first flow path extends from the first port to a junction. A second flow path extends from the second port to the junction. A third flow path extends from the junction to a third port. A mixing element is disposed at the junction. The mixing element has a first fluid inlet fluidly coupled to the first port, a second fluid inlet fluidly coupled to the second port, and a fluid outlet fluidly coupled to the third port.

[0007] In yet another embodiment, the invention is a mixing element. The mixing element has a tubular body extending along a longitudinal axis of the mixing element from an open end to a closed end. The tubular body has an exterior surface and an interior surface. The mixing element further includes a first fluid inlet formed through the tubular body from the exterior surface to the interior surface and a second fluid inlet formed through the tubular body from the exterior surface to the interior surface. The fluid outlet is formed by the open end of the tubular body.

[0008] In another embodiment, the invention is a method of mixing process fluids. A first fluid supply is configured to supply a first process fluid and a second fluid supply is configured to supply a second process fluid. The first and second process fluids are flowed to a mixing element of a first flow component. The first and second process fluids are flowed through first and second fluid inlets formed in a tubular body of the mixing element. The first and second fluid inlets extend along first and second inlet axes perpendicular to a longitudinal axis of the mixing element. The first and second process fluids are mixed within the tubular body of the mixing element to form a fluid mixture. The fluid mixture flows through an open end of the tubular body, the open end forming an outlet of the mixing element.

[0009] Further areas of applicability of the present technology will become apparent from the detailed description provided hereinafter. It should be understood that the detailed description and specific examples, while indicating preferred implementations, are for purposes of illustration only and are not intended to limit the scope of the present technology. [Brief description of the drawings]

[0010] The invention of the present disclosure will become more fully understood from the detailed description and the accompanying drawings.

[0011] [Figure 1] FIG. 1 is a schematic diagram of a system for manufacturing semiconductor devices using one or more flow control devices.

[0012] [Diagram 2]FIG. 2 is a perspective view of a fluid delivery module with multiple flow control devices, such as may be utilized in the process of FIG.

[0013] [Diagram 3] FIG. 3 is a perspective view of a flow component that may be utilized in the fluid delivery module of FIG.

[0014] [Figure 4] FIG. 4 is an exploded perspective view of the flow components of FIG.

[0015] [Diagram 5] FIG. 5 is a cross-sectional view of the flow component of FIG. 3 taken along line 5-5.

[0016] [Figure 6] FIG. 6 is a perspective view of a mixing element that can be utilized in the flow component of FIG.

[0017] [Figure 7] FIG. 7 is a rear perspective view of the mixing element of FIG.

[0018] [Figure 8] FIG. 8 is a left side view of the mixing element of FIG.

[0019] [Figure 9] FIG. 9 is a cross-sectional view of the mixing element taken along line 9-9 of FIG.

[0020] [Figure 10] FIG. 10 is a perspective view of another embodiment of a mixing element that can be utilized in the flow component of FIG.

[0021] [Figure 11] FIG. 11 is a rear perspective view of the mixing element of FIG.

[0022] [Figure 12]FIG. 12 is a left side view of the mixing element of FIG.

[0023] [Figure 13] FIG. 13 is a cross-sectional view of the mixing element taken along line 13-13 of FIG.

[0024] [Figure 14] FIG. 14 is a perspective view of another embodiment of a mixing element that can be utilized in the flow component of FIG.

[0025] [Figure 15] FIG. 15 is a rear perspective view of the mixing element of FIG.

[0026] [Figure 16] FIG. 16 is a left side view of the mixing element of FIG.

[0027] [Figure 17] FIG. 17 is a cross-sectional view of the mixing element taken along line 17-17 of FIG.

[0028] [Figure 18] FIG. 18 is a perspective view of another embodiment of a mixing element that can be utilized in the flow component of FIG.

[0029] [Figure 19] FIG. 19 is a rear perspective view of the mixing element of FIG.

[0030] [Figure 20] FIG. 20 is a left side view of the mixing element of FIG.

[0031] [Figure 21] FIG. 21 is a cross-sectional view of the mixing element taken along line 21-21 of FIG.

[0032] [Figure 22]FIG. 22 is a perspective view of another embodiment of a mixing element that can be utilized in the flow component of FIG.

[0033] [Figure 23] FIG. 23 is a rear perspective view of the mixing element of FIG.

[0034] [Figure 24] FIG. 24 is a left side view of the mixing element of FIG.

[0035] [Diagram 25] FIG. 25 is a cross-sectional view of the mixing element taken along line 25-25 of FIG.

[0036] [Figure 26] FIG. 26 is a perspective view of another embodiment of a mixing element that can be utilized in the flow component of FIG.

[0037] [Figure 27] FIG. 27 is a rear perspective view of the mixing element of FIG.

[0038] [Figure 28] FIG. 28 is a left side view of the mixing element of FIG.

[0039] [Figure 29] FIG. 29 is a cross-sectional view of the mixing element taken along line 29-29 of FIG.

[0040] [Diagram 30] FIG. 30 is a perspective view of another embodiment of a mixing element that can be utilized in the flow component of FIG.

[0041] [Diagram 31] FIG. 31 is a rear perspective view of the mixing element of FIG.

[0042] [Diagram 32]FIG. 32 is a left side view of the mixing element of FIG.

[0043] [Diagram 33] FIG. 33 is a cross-sectional view of the mixing element taken along line 33-33 of FIG.

[0044] [Diagram 34] 34 is an exploded perspective view of another embodiment of a flow component that may be utilized in the fluid delivery module of FIG.

[0045] [Diagram 35] FIG. 35 is a cross-sectional view of the flow component of FIG. 34 in a first state.

[0046] [Diagram 36] FIG. 36 is a cross-sectional view of the flow component of FIG. 34 in a second condition.

[0047] [Figure 37] 37 is an exploded perspective view of another embodiment of a flow component that may be utilized in the fluid delivery module of FIG.

[0048] [Figure 38] FIG. 38 is a cross-sectional view of the flow component of FIG.

[0049] [Figure 39A] FIG. 39A is a detailed view of the area 39A shown in FIG. 38, with the flow component in a first state.

[0050] [Figure 39B] FIG. 39B is a detailed view of area 39A shown in FIG. 38, with the flow component in a second state.

[0051] All drawings are schematic and not necessarily to scale. Features that are numbered in one drawing and not numbered in another drawing are the same features unless otherwise noted herein. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0052] The description of the exemplary embodiments according to the principles of the invention is intended to be read in connection with the accompanying drawings, which should be considered as part of the entire written description. In describing the embodiments of the invention disclosed herein, references to orientations and directions are intended merely for convenience of description and are in no way intended to limit the invention. Relative terms such as "lower," "upper," "horizontal," "vertical," "above," "under," "up," "down," "left," "right," "top," and "bottom," along with their derivatives (e.g., "horizontally," "downward," "upward," etc.), should be understood to refer to the orientation as described or as shown in the drawings described. These relative terms are for convenience of description only and do not require that the device be made or operated in a particular orientation unless expressly indicated as such. "Mounted," "fixed," "connected," "coupled," "interconnected," and similar terms refer to a relationship in which structures are fixed or attached to one another, whether directly or indirectly through an intervening structure, including movable or rigid attachments or relationships, unless expressly indicated otherwise. Furthermore, features and advantages of the present invention are described with reference to preferred embodiments. It is therefore evident that the present invention should not be limited to such preferred embodiments which describe possible non-limiting combinations of features present alone or in combination with other features, the scope of the present invention being defined in the claims appended hereto.

[0053] The present invention is directed to mixing elements and related flow components for use in fluid delivery modules and systems. Semiconductor manufacturing is one of the industries that demands high performance in controlling fluid flow. As semiconductor manufacturing technology advances, customers have recognized the need for flow control devices with improved performance. Thus, fluid mixing must be performed efficiently over a wide range of flows and with high homogeneity in the resulting fluid mixture. The present invention enables superior fluid mixing in semiconductor and similar processes.

[0054] FIG. 1 is a schematic diagram of an exemplary processing system 1000. The processing system 1000 may utilize multiple flow control devices 100 fluidly coupled to a processing chamber 1300. The multiple flow control devices 100 are used to supply one or more different process fluids to the processing chamber 1300. The fluids are supplied by multiple fluid supply devices 1010. As shown, two or more fluid supply devices 1010 may be connected to one flow control device 100. Collectively, the flow control devices 100 belong to a fluid supply module 1400. Optionally, one or more fluid supply modules 1400 may be utilized in the processing system 1000. The multiple flow control devices 100 are connected to the processing chamber 1300 by an outlet manifold 400. Articles such as semiconductors and integrated circuits may be processed in the processing chamber 1300.

[0055] The valves 1100 isolate each of the flow control devices 100 from the processing chambers 1300 and allow each of the flow control devices 100 to be selectively connected or isolated from the processing chambers 1300 to facilitate a wide variety of different processing steps. The processing chambers 1300 may include applicators for applying process fluids provided by the multiple flow control devices 100, allowing selective or diffusive distribution of the fluids provided by the multiple flow control devices 100. Optionally, the processing chambers 1300 may be vacuum chambers or tanks or baths for immersing articles in the fluids provided by the multiple flow control devices 100. Fluid supply lines are formed by flow paths from the respective fluid supply devices to the processing chambers 1300.

[0056] Additionally, the processing system 1000 may further include a vacuum source or drain 1200 isolated from the processing chamber 1300 by the valve 1100 to allow drainage of process fluids or to facilitate purging one or more of the flow control devices 100. This allows for maintenance, switching of process fluids within the same flow control device 100, or other operations. Optionally, the drain 1200 may be a liquid drain configured to remove liquid from the processing chamber 1300. Alternatively, the drain 1200 may be a vacuum source for removing gases. Optionally, the flow control device 100 may be a mass flow controller, a flow splitter, a flow combiner, or any other device that controls the flow rate of process fluids in a processing system. Additionally, the valve 1100 may be incorporated into the flow control device 100, if desired. The processing chamber 1300 may house, among other items, semiconductor wafers for processing.

[0057] Processes that may be performed in the processing system 1000 may include wet cleaning, photolithography, ion implantation, dry etching, atomic layer etching, wet etching, plasma ashing, rapid thermal annealing, furnace annealing, thermal oxidation, chemical vapor deposition, atomic layer deposition, physical vapor deposition, molecular beam epitaxy, laser lift-off, electrochemical deposition, chemical mechanical polishing, wafer testing, electroplating, or other processes that utilize gases or liquids.

[0058] 2 illustrates an exemplary fluid supply module 1400 comprising a plurality of flow control devices 100. The fluid supply module 1400 comprises a support structure 1402. The support structure 1402 may be referred to as a base substrate or base plate and is generally a flat plate or sheet on which one or more flow control devices 100 are mounted. In this embodiment, the plurality of flow control devices 100 are mounted to the support structure. Each of the plurality of flow control devices 100 is modular in design and comprises a number of individual fluid flow components 110, 120 that are each directly or indirectly mounted to the support structure 1402. The support structure 1402 has an upper surface 1403 on which the flow control devices 100 are mounted.

[0059] The fluid flow components 110, 120 include active flow components 120 and passive flow components 110. Passive flow components 110 do not change the flow rate of a fluid, but merely connect one active component to another active component, or connect an active component to an inlet or outlet. Active flow components 120 change the flow rate of a fluid, monitor the condition of a fluid, or perform functions beyond simply transporting a fluid. Active flow components 120 may include temperature sensors, pressure transducers, mass flow controllers, valves, and the like. Still other components may be both active and passive depending on the current application in the flow control device 100. For example, a temperature sensor may function as a passive fluid flow component that transfers fluid from one active fluid flow component 120 to another active fluid flow component 120, and may not actually be utilized to measure the temperature. Thus, a vast number of variations of the fluid flow components 110, 120 are possible, and these fluid flow components 110, 120 may be used to assemble a wide range of flow control devices 100.

[0060] The fluid supply module 1400 includes multiple inlets 102 that receive fluids from the fluid supply devices 1010 described above. The fluid supply module also includes at least one outlet 104 that supplies fluids to the processing chamber 1300. Each flow control device 100 may have one inlet 102 and one outlet 104, or may have multiple inlets 102 or multiple outlets 104. Thus, a fluid may flow through multiple inlets 102 and be supplied via a single outlet 104, or may flow through a single inlet 102 and be supplied via multiple outlets 104. The same fluid may be supplied to the multiple inlets 102, or different fluids may be supplied to each inlet 102. The same inlet 102 or outlet 104 may be shared by multiple flow control devices 100, or each flow control device 100 may have one or more dedicated inlets 102 and outlets 104.

[0061] Turning to Figures 3-5, a fluid flow component 130 is illustrated. In this embodiment, the fluid flow component 130 is a fluid mixer intended to mix two or more fluids and output a fluid mixture. As illustrated, the fluid flow component 130 is a passive component, although in other configurations it may be configured as an active component capable of actively varying the flow rate of the fluids. The fluid flow component 130 has a component body 132 having a top surface 133, a bottom surface 134, a front surface 135, a rear surface 136, a left surface 137, and a right surface 138. As illustrated, the rear surface 136 is not planar, but rather includes a protrusion extending from an adjacent portion of the rear surface 136.

[0062] The top surface 133 of the component body 132 comprises a first port 141, a second port 142, and a third port 143. The first and second ports 141, 142 are configured to receive a fluid, while the third port 143 is configured to output a fluid. However, in some embodiments, different ones of the first, second, and third ports 141, 142, 143 may function as inlets and outlets. It is further contemplated that there may be more than two ports to facilitate combining two or more fluids or splitting into one or more fluids. Each of the ports 141, 142, 143 has a seal cavity configured to receive a seal to facilitate connection with other components. The component body 132 further comprises a plurality of fastener passages 145 that facilitate attachment of the component body 132 to the support structure 1402. Additionally, the fastener passages 145 can facilitate attachment of other flow components 110, 120 to the component body 132. The fastener passages 145 may be through holes, threaded holes, or formed in any manner that allows for attachment.

[0063] The bottom surface 134 of the component body 132 is configured to be in physical contact with the top surface 1403 of the support structure 1402 when the fluid flow component 130 is attached to the support structure 1402. However, in other embodiments, the top surface 1403 may face the top surface 133 when the fluid flow component 130 is attached to another fluid flow component 110, 120 that is directly coupled to the support structure 1402.

[0064] The front side 135 and the left side 137 collectively include a number of assembly ports 147. Each of the assembly ports 147 includes a retaining piece 148 that provides a fluid-tight seal for the assembly port 147 and retains any components attached to the assembly port 147. For example, Figure 4 shows an exploded view of the retaining piece 148 removed from the component body 132. Also shown is a mixing element 200 retained by the retaining piece 148.

[0065] 5 shows a cross section of the fluid flow component 130 in an assembled state. The fluid flow component 130 has first, second and third flow paths 151, 152, 153 extending from the first, second and third ports 141, 142, 143 to a junction 155. The mixing element 200 is disposed at the junction 155. Thus, fluid can flow from the first port 141 through the first flow path 151 to the junction 155. Fluid can also flow from the second port 142 through the second flow path 152 to the junction 155. Fluid can flow from the junction 155 through the third flow path 153 to the third port 143. The first, second and third flow paths 151, 152, 153 join at the junction 155 to form a T-shape.

[0066] More specifically, the first flow path 151 has a first conduit 156 that is immediately adjacent to the junction 155. The second flow path 152 has a second conduit 157 that is immediately adjacent to the junction 155. The third flow path 153 has a third conduit 158 ​​that is immediately adjacent to the junction 155. The first and second conduits 156, 157 of the first and second flow paths 151, 152 are collinear, while the third conduit 158 ​​of the third flow path 153 is perpendicular to the first and second conduits 156, 157 of the first and second flow paths 151, 152. Thus, fluid flows along the first and second flow paths 151, 152 and joins at the junction 155. The fluid then travels perpendicularly from the junction 155 through the third conduit 158 ​​of the third flow path 153 and out of both the first and second conduits 156 , 157 of the first and second flow paths 151 , 152 .

[0067] The check valves 157 are disposed in the first and second flow paths 151, 152 to prevent backflow of fluid supplied to the first and second ports 141, 142. However, the check valves 157 may be omitted or different components may be used in place of the check valves 157 depending on the particular application of the fluid flow component 130. Each of the check valves 157 is attached via an assembly port 147 and retained by a retaining piece 148. The retaining piece 148 may be threaded and the assembly port 147 may have corresponding threads to allow for retention of the check valves 157 and the mixing element 200. Alternatively, other known retention means may be utilized as desired.

[0068] The assembly port 147, located on the left side 137 of the component body 132, does not have any parts inserted therein, but instead includes a seal 159 to prevent leakage. The seal 159 has no purpose other than to seal the assembly port 147. However, it is possible to utilize one or more assembly ports 147 to allow for additional fluid connections. As shown, each of the mixing element 200, check valve 157, and seal 159 engages an annular rib 149 within the assembly port 147. This annular rib 149 ensures that a seal is achieved and provides axial restraint for the mixing element 200, check valve 157, and seal 159. Thus, the annular rib 149 and corresponding annular groove 150 ensure that the parts are properly retained within the assembly port 147 and sealed to prevent fluid leakage.

[0069] 6-9, the mixing element 200 is shown in greater detail. The mixing element 200 includes a flange 202 and a tubular body 204. The tubular body 204 extends along a longitudinal axis AA from a closed end 206 to an open end 208. The tubular body 204 further includes an outer surface 210 and an inner surface 212. The outer surface 210 and the inner surface 212 each extend from the closed end 206 to the open end 208. The inner surface 212 has a constant diameter along the longitudinal axis AA. In some embodiments, the inner surface 212 may vary in diameter. The outer surface 210 of the tubular body 204 includes a first sealing surface 214 adjacent the closed end 206 and a second sealing surface 218 adjacent the open end 208. The first and second sealing surfaces 214, 218 may have different diameters or the same diameter.

[0070] A groove surface 216 extends between the first and second sealing surfaces 214, 218. The groove surface 216 may have a diameter that is smaller than the diameter of the first and second sealing surfaces 214, 218. The groove surface 216 need not have a constant diameter, but may vary in diameter relative to the longitudinal axis. In some embodiments, the groove surface 216 may have a portion that is the same diameter as one of the first or second sealing surfaces 214, 218. In still other embodiments, the groove surface 216 may be omitted entirely.

[0071] The mixing element 200 includes a first fluid inlet 220, a second fluid inlet 230, and a fluid outlet 240. The first and second fluid inlets 220, 230 are formed through the tubular body 204 from the exterior surface 210 to the interior surface 212. More specifically, the first and second fluid inlets 220, 230 are formed in the groove surface 216 of the exterior surface 210. The fluid outlet 240 is defined by the open end 208. Thus, fluid flows through the first and second fluid inlets 220, 230, along the inside of the tubular body 204, and out the fluid outlet 240.

[0072] The first and second fluid inlets 220, 230 are formed as slots extending along the first and second inlet axes BB, CC. The slots are elongated in a direction parallel to the longitudinal axis AA, with a length parallel to the longitudinal axis AA greater than a height perpendicular to the longitudinal axis AA. The slots are formed to have first and second inlet faces 221, 231. The first and second inlet faces 221, 231 have a constant profile extending through the tubular body 204 along the first and second inlet axes BB, CC. Thus, the profile of the first and second inlet faces 221, 231 is constant while extending along the first and second inlet axes BB, CC. The first and second fluid inlets 220, 230 have the same profile. In other embodiments, the profiles of the first and second fluid inlets 220, 230 may not be the same. Alternatively, the first and second fluid inlets 220, 230 may have different profiles to optimize mixing for factors such as different flow rates of different fluids or other factors.

[0073] The first and second inlet axes BB, CC are spaced apart from the longitudinal axis AA so as not to intersect with the longitudinal axis AA. The first and second inlet axes BB, CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB, CC are located on opposite sides of the longitudinal axis AA. Thus, the first and second inlet axes BB, CC are perpendicular to the longitudinal axis AA but do not intersect. In other embodiments, the first and second inlet axes BB, CC are not parallel to each other. In still other embodiments, the first and second inlet axes BB, CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB, CC may be perpendicular to the longitudinal axis AA and not parallel to each other. In these embodiments, it is also possible that the first and second inlet axes BB, CC are not perpendicular to the longitudinal axis AA but parallel to each other.

[0074] The first and second fluid inlets 220, 230 have first and second inlet faces 221, 231, as described above. In this embodiment, the first and second fluid inlets 220, 230 are identical and rotationally symmetric about the longitudinal axis AA. The first and second fluid inlets 220, 230 extend less than half the length of the groove surface 216 along the longitudinal axis AA and have a height that is less than their width along the longitudinal axis. As best seen in FIG. 9, the upper surface 222 of the first inlet face 221 joins the inner surface 212. More specifically, the upper surface 222 of the first inlet face 221 meets the inner surface 212 at a tangent point 223. The upper surface 222 of the first inlet face 221 is tangent to the inner surface 212, and the two surfaces meet at the tangent point 223. In other words, when the upper surface 222 of the first inlet face 221 joins the inner surface 212 , there is no discontinuity between the upper surface 222 and the inner surface 212 of the first inlet face 221 .

[0075] The second inlet face 231 also has a top surface 232 that joins tangentially with the inner face 212 and has corresponding tangent points. The first inlet face 221 also has a bottom surface 224, an open end surface 225, and a closed end surface 226. Similarly, the second inlet face 231 has a top surface 232, a bottom surface 234, an open end surface 235, and a closed end surface 236. The flange 202 of the mixing element 200 further comprises a flange groove 252 and a flange face 254. The flange groove 252 is formed in the flange face 254 to enable assembly of the mixing element 200 with the assembly ports 147 and to provide an effective seal of the assembly ports 147. More specifically, the flange groove 252 is configured to receive the annular rib 149 within each assembly port 147.

[0076] 10-13, another embodiment of a mixing element 300 is described. The mixing element 300 is similar to the mixing element 200, except for the features described below. The mixing element 300 includes a flange 302 and a tubular body 304. The tubular body 304 extends along a longitudinal axis AA from a closed end 306 to an open end 308. The tubular body 304 further includes an outer surface 310 and an inner surface 312. Each of the outer surface 310 and the inner surface 312 extends from the closed end 306 to the open end 308. The inner surface 312 has a constant diameter along the longitudinal axis AA. In some embodiments, the inner surface 312 may vary in diameter. The outer surface 310 of the tubular body 304 includes a first sealing surface 314 adjacent the closed end 306 and a second sealing surface 318 adjacent the open end 308. The first and second sealing surfaces 314, 318 may have different diameters or the same diameter.

[0077] The groove surface 316 extends between the first and second sealing surfaces 314, 318. The groove surface 316 may have a diameter smaller than the diameter of the first and second sealing surfaces 318. The groove surface 316 need not have a constant diameter, but may vary in diameter relative to the longitudinal axis. In some embodiments, the groove surface 316 may have a portion that is the same diameter as one of the first or second sealing surfaces 314, 318. In still other embodiments, the groove surface 316 may be omitted entirely.

[0078] The mixing element 300 includes a first fluid inlet 320, a second fluid inlet 330, and a fluid outlet 340. The first and second fluid inlets 320, 330 are formed through the tubular body 304 from the exterior surface 310 to the interior surface 312. More specifically, the first and second fluid inlets 320, 330 are formed in the groove surface 316 of the exterior surface 310. The fluid outlet 340 is defined by the open end 308. Thus, fluid flows through the first and second fluid inlets 320, 330, along the inside of the tubular body 304, and out the fluid outlet 340.

[0079] The first and second fluid inlets 320, 330 are formed as slots extending along the first and second inlet axes BB, CC. The slots are elongated in a direction parallel to the longitudinal axis AA and have a length in a direction parallel to the longitudinal axis AA that is greater than a height perpendicular to the longitudinal axis AA. The slots are formed to have first and second inlet faces 321, 331. The first and second inlet faces 321, 331 have a constant profile extending through the tubular body 304 along the first and second inlet axes BB, CC. Thus, the profile of the first and second inlet faces 321, 331 is constant extending along the first and second inlet axes BB, CC. The first and second fluid inlets 320, 330 have the same profile. In other embodiments, the profiles of the first and second fluid inlets 320, 330 may not be the same. Alternatively, the first and second fluid inlets 320, 330 may have different profiles to optimize mixing for factors such as different flow rates of different fluids or other factors.

[0080] The first and second inlet axes BB, CC are spaced apart from the longitudinal axis AA so as not to intersect with the longitudinal axis AA. The first and second inlet axes BB, CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB, CC are located on opposite sides of the longitudinal axis AA. Thus, the first and second inlet axes BB, CC are perpendicular to the longitudinal axis AA but non-intersecting. In other embodiments, the first and second inlet axes BB, CC are not parallel to each other. In still other embodiments, the first and second inlet axes BB, CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB, CC may be perpendicular to the longitudinal axis AA and not parallel to each other. In these embodiments, it is also possible that the first and second inlet axes BB, CC are not perpendicular to the longitudinal axis AA and are parallel to each other.

[0081] The first and second fluid inlets 320, 330 have first and second inlet faces 321, 331, as described above. In this embodiment, the first and second fluid inlets 320, 330 are identical and rotationally symmetric about the longitudinal axis AA. The first and second fluid inlets 320, 330 extend more than half the length of the groove face 316 along the longitudinal axis AA and have a height less than their width along the longitudinal axis. The top surface 322 of the first inlet face 321 joins the inner face 312. More specifically, the top surface 322 of the first inlet face 321 joins the inner face 312 at a tangent point 323. The top surface 322 of the first inlet face 321 joins the inner face 312, and the two surfaces meet at the tangent point 323. In other words, there is no discontinuity between the upper surface 322 of the first inlet face 321 and the inner surface 312 as the upper surface 322 joins the inner surface 312 .

[0082] The second inlet face 331 also has a top surface 332 that joins tangentially with the inner face 312 and has corresponding tangent points. The first inlet face 321 also has a bottom surface 324, an open end surface 325, and a closed end surface 326. Similarly, the second inlet face 331 has a top surface 332, a bottom surface 334, an open end surface 335, and a closed end surface 336. The flange 302 of the mixing element 300 further comprises a flange groove 352 and a flange face 354. The flange groove 352 is formed in the flange face 354 to enable assembly of the mixing element 300 with the assembly port 147 and to provide an effective seal of the assembly port 147. More specifically, the flange groove 352 is configured to receive the annular rib 149 within each assembly port 147.

[0083] 14-17, another embodiment of a mixing element 400 is described. The mixing element 400 is similar to the mixing element 200, except for the features described below. The mixing element 400 has a flange 402 and a tubular body 404. The tubular body 404 extends along a longitudinal axis AA from a closed end 406 to an open end 408. The tubular body 404 further comprises an outer surface 410 and an inner surface 412. Each of the outer surface 410 and the inner surface 412 extends from the closed end 406 to the open end 408. The inner surface 412 has a constant diameter along the longitudinal axis AA. In some embodiments, the inner surface 412 may vary in diameter. The outer surface 410 of the tubular body 404 has a first sealing surface 414 proximate the closed end 406 and a second sealing surface 418 proximate the open end 408. The first and second sealing surfaces 414, 418 may have different diameters or the same diameter.

[0084] A groove surface 416 extends between the first and second sealing surfaces 414, 418. The groove surface 416 may have a diameter smaller than the diameter of the first and second sealing surfaces 414, 418. The groove surface 416 need not have a constant diameter, but may vary in diameter about the longitudinal axis. In some embodiments, the groove surface 416 may have a portion that is the same diameter as one of the first or second sealing surfaces 414, 418. In still other embodiments, the groove surface 416 may be omitted entirely.

[0085] The mixing element 400 includes a first fluid inlet 420, a second fluid inlet 430, and a fluid outlet 440. The first and second fluid inlets 420, 430 are formed through the tubular body 404 from the exterior surface 410 to the interior surface 412. More specifically, the first and second fluid inlets 420, 430 are formed in the groove surface 416 of the exterior surface 410. The fluid outlet 440 is defined by the open end 408. Thus, fluid flows through the first and second fluid inlets 420, 430, along the inside of the tubular body 404, and out the fluid outlet 440.

[0086] The first and second fluid inlets 420, 430 are formed as slots extending along the first and second inlet axes BB, CC. The slots are elongated in a direction parallel to the longitudinal axis AA and have a length in a direction parallel to the longitudinal axis AA that is greater than a height perpendicular to the longitudinal axis AA. The slots are formed to have first and second inlet faces 421, 431. The first and second inlet faces 421, 431 have a constant profile extending through the tubular body 404 along the first and second inlet axes BB, CC. Thus, the profile of the first and second inlet faces 421, 431 is constant extending along the first and second inlet axes BB, CC. The first and second fluid inlets 420, 430 have the same profile. In other embodiments, the profiles of the first and second fluid inlets 420, 430 may not be the same. Alternatively, the first and second fluid inlets 420, 430 may have different profiles to optimize mixing for factors such as different flow rates of different fluids or other factors.

[0087] The first and second inlet axes BB, CC are spaced apart from the longitudinal axis AA so as not to intersect with the longitudinal axis AA. The first and second inlet axes BB, CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB, CC are located on opposite sides of the longitudinal axis AA. Thus, the first and second inlet axes BB, CC are perpendicular to the longitudinal axis AA but non-intersecting. In other embodiments, the first and second inlet axes BB, CC are not parallel to each other. In still other embodiments, the first and second inlet axes BB, CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB, CC may be perpendicular to the longitudinal axis AA and not parallel to each other. In these embodiments, it is also possible that the first and second inlet axes BB, CC are not perpendicular to the longitudinal axis AA and are parallel to each other.

[0088] The first and second fluid inlets 420, 430 have first and second inlet faces 421, 431, as described above. In this embodiment, the first and second fluid inlets 420, 430 are identical and rotationally symmetric about the longitudinal axis AA. The first and second fluid inlets 420, 430 extend the entire length of the groove surface 416 along the longitudinal axis AA and have a height that is less than their width along the longitudinal axis. The top surface 422 of the first inlet face 421 joins the inner surface 412. More specifically, the top surface 422 of the first inlet face 421 joins the inner surface 412 at a tangent point 423. The top surface 422 of the first inlet face 421 joins the inner surface 412, and the two faces join at the tangent point 423. In other words, there is no discontinuity between the upper surface 422 of the first inlet face 421 and the inner surface 412 where the upper surface 422 joins the inner surface 412 .

[0089] The second inlet face 431 also has a top surface 432 that joins tangentially with the inner face 412 and has corresponding tangent points. The first inlet face 421 also has a bottom surface 424, an open end surface 425, and a closed end surface 426. Similarly, the second inlet face 431 has a top surface 432, a bottom surface 434, an open end surface 435, and a closed end surface 436. The flange 402 of the mixing element 400 further comprises a flange groove 452 and a flange face 454. The flange groove 452 is formed in the flange face 454 to enable assembly of the mixing element 400 with the assembly ports 147 and to provide an effective seal of the assembly ports 147. More specifically, the flange groove 452 is configured to receive the annular rib 149 within each assembly port 147.

[0090] 18-21, another embodiment of a mixing element 500 is described. The mixing element 500 is similar to the mixing element 200, except for the features described below. The mixing element 500 has a flange 502 and a tubular body 504. The tubular body 504 extends along a longitudinal axis AA from a closed end 506 to an open end 508. The tubular body 504 further comprises an outer surface 510 and an inner surface 512. Each of the outer surface 510 and the inner surface 512 extends from the closed end 506 to the open end 508. The inner surface 512 has a constant diameter along the longitudinal axis AA. In some embodiments, the inner surface 512 may vary in diameter. The outer surface 510 of the tubular body 504 has a first sealing surface 514 proximate the closed end 506 and a second sealing surface 518 proximate the open end 508. The first and second sealing surfaces 514, 518 may have different diameters or the same diameter.

[0091] The groove surface 516 extends between the first and second sealing surfaces 514, 518. The groove surface 516 may have a diameter smaller than the diameter of the first and second sealing surfaces 514, 518. The groove surface 516 need not have a constant diameter, but may vary in diameter about the longitudinal axis. In some embodiments, the groove surface 516 may have a portion having the same diameter as one of the first or second sealing surfaces 514, 518. In still other embodiments, the groove surface 516 may be omitted entirely.

[0092] The mixing element 500 includes a first fluid inlet 520, a second fluid inlet 530, and a fluid outlet 540. The first and second fluid inlets 520, 530 are formed through the tubular body 504 from the exterior surface 510 to the interior surface 512. More specifically, the first and second fluid inlets 520, 530 are formed in the groove surface 516 of the exterior surface 510. The fluid outlet 540 is defined by the open end 508. Thus, fluid flows through the first and second fluid inlets 520, 530, along the inside of the tubular body 504, and out the fluid outlet 540.

[0093] The first and second fluid inlets 520, 530 are formed as rows of holes 522, 532 extending along first and second inlet axes BB, CC, respectively. The rows of holes 522, 532 are aligned in a direction parallel to the longitudinal axis AA. Each of the holes 522 of the first fluid inlet 520 have different diameters and are circumferentially offset from one another such that a circumference 523 of each of the holes 522 is tangent to the axis DD, which is parallel to the longitudinal axis AA. Each of the holes 532 of the second fluid inlet 530 have different diameters and are circumferentially offset from one another such that a circumference 533 of each of the holes 532 is tangent to the axis EE.

[0094] The holes 522, 532 have first and second inlet faces 521, 531 that extend from the inner surface 512 to the outer surface 510 of the tubular body 504. The first and second inlet faces 521, 531 have a constant profile extending through the tubular body 504 along the first and second inlet axes BB, CC. Thus, the profile of the first and second inlet faces 521, 531 is constant extending along the first and second inlet axes BB, CC. The first and second fluid inlets 520, 530 have the same profile, including the diameter and arrangement of the holes 522, 532. In other embodiments, the profiles of the first and second fluid inlets 520, 530 may not be the same. Instead, the first and second fluid inlets 520, 530 may have different profiles to optimize mixing for factors such as different flow rates of different fluids or other factors.

[0095] The first and second inlet axes BB, CC are spaced apart from the longitudinal axis AA so as not to intersect with the longitudinal axis AA. The first and second inlet axes BB, CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB, CC are located on opposite sides of the longitudinal axis AA. Thus, the first and second inlet axes BB, CC are perpendicular to the longitudinal axis AA but non-intersecting. In other embodiments, the first and second inlet axes BB, CC are not parallel to each other. In still other embodiments, the first and second inlet axes BB, CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB, CC may be perpendicular to the longitudinal axis AA and not parallel to each other. In these embodiments, it is also possible that the first and second inlet axes BB, CC are not perpendicular to the longitudinal axis AA and are parallel to each other.

[0096] The first and second fluid inlets 520, 530 have first and second inlet faces 521, 531, as described above. In this embodiment, the first and second fluid inlets 520, 530 are identical and rotationally symmetric about the longitudinal axis AA. The first and second fluid inlets 520, 530 extend along the longitudinal axis AA for the majority of the length of the groove surface 516. A portion of the first inlet face 521 of each hole 522 joins the inner surface 512. More specifically, a portion of the first inlet face 521 joins the inner surface 512 at a tangent point 523. Thus, a portion of the first inlet face 521 is tangent to the inner surface 512, and the two surfaces meet at the tangent point 523. In other words, there is no discontinuity between the portion of the first inlet face 521 and the inner surface 512, as a portion of the first inlet face joins the inner surface 512.

[0097] The second inlet face 531 also has a portion that joins tangentially with the inner face 512 and has a corresponding junction. The flange 502 of the mixing element 500 further comprises a flange groove 552 and a flange face 554. The flange groove 552 is formed in the flange face 554 to enable assembly of the mixing element 500 with the assembly ports 147 and to provide an effective seal of the assembly ports 147. More specifically, the flange groove 552 is configured to receive the annular rib 149 within each assembly port 147.

[0098] 22-25, another embodiment of a mixing element 600 is described. The mixing element 600 is similar to the mixing element 200, except for the features described below. The mixing element 600 has a flange 602 and a tubular body 604. The tubular body 604 extends along a longitudinal axis AA from a closed end 606 to an open end 608. The tubular body 604 further comprises an outer surface 610 and an inner surface 612. The outer surface 610 and the inner surface 612 each extend from the closed end 606 to the open end 608. The inner surface 612 has a constant diameter along the longitudinal axis AA. In some embodiments, the inner surface 612 may vary in diameter. The outer surface 610 of the tubular body 604 has a first sealing surface 614 proximate the closed end 606 and a second sealing surface 618 proximate the open end 608. The first and second sealing surfaces 614, 618 may have different diameters or the same diameter.

[0099] The groove surface 616 extends between the first and second sealing faces 614, 618. The groove surface 616 may have a diameter smaller than the diameter of the first and second sealing faces 614, 618. The groove surface 616 need not have a constant diameter, but may vary in diameter about the longitudinal axis. In this embodiment, the groove surface 616 includes a plurality of grooves 617 disposed along the groove surface 616 between the first and second sealing faces 614, 618. As can be seen, the grooves 617 have a semicircular shape, with the spaces between the grooves 617 being of a constant diameter. The spaces between the grooves 617 are of the same diameter as the first sealing face 614, but may be of any desired diameter.

[0100] The mixing element 600 comprises a first fluid inlet 620, a second fluid inlet 630, and a fluid outlet 640. The first and second fluid inlets 620, 630 are formed through the tubular body 604 from the exterior surface 610 to the interior surface 612. More specifically, the first and second fluid inlets 620, 630 are formed as a plurality of holes located in the grooves 617 of the groove surface 616. The fluid outlet 640 is defined by the open end 608. Thus, fluid flows through the first and second fluid inlets 620, 630, along the inside of the tubular body 604, and out the fluid outlet 640.

[0101] The first and second fluid inlets 620, 630 are formed as a plurality of rows of holes 622, 632, respectively. One of the rows of holes 622 of the first fluid inlet 620 extends along the first inlet axis BB, and the other row of holes 622 of the first fluid inlet 620 extends along an axis rotationally symmetrical with the first inlet axis BB. Similarly, one of the rows of holes 632 of the second fluid inlet 630 extends along the second inlet axis CC, and the other row of holes 632 of the second fluid inlet 630 extends along an axis rotationally symmetrical with the second inlet axis CC. The rows of holes 622, 632 are arranged in rows in a direction parallel to the longitudinal axis AA. Each of the holes 622, 632 of the first and second fluid inlets 620, 630 has an equal diameter. In other embodiments, the holes 622, 632 may be of different diameters, or the rows may be unequally spaced about the longitudinal axis AA. In yet other embodiments, the holes 622 of the first fluid inlet 620 may be different from the holes 632 of the second fluid inlet 630 .

[0102] The holes 622, 632 have first and second inlet faces 621, 631 that extend from the inner surface 612 to the outer surface 610 of the tubular body 604. The first and second inlet faces 621, 631 have a constant profile extending through the tubular body 604 from the outer surface 610 to the inner surface 612. Thus, the profile of the first and second inlet faces 621, 631 is constant extending through the tubular body 604. The first and second fluid inlets 620, 630 have the same profile, including the diameter and arrangement of the holes 622, 632. In other embodiments, the profiles of the first and second fluid inlets 620, 630 may not be the same. Instead, the first and second fluid inlets 620, 630 may have different profiles to optimize mixing for factors such as different flow rates of different fluids or other factors. In yet other embodiments, the holes 622, 632 may not be disposed within the groove 617, but may overlap the groove 617. The holes 622, 632 are equally spaced along the longitudinal axis AA, but in other embodiments may be unequally spaced.

[0103] The first and second inlet axes BB, CC are spaced apart from the longitudinal axis AA so as not to intersect with the longitudinal axis AA. The first and second inlet axes BB, CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB, CC are located on opposite sides of the longitudinal axis AA. Thus, the first and second inlet axes BB, CC are perpendicular to the longitudinal axis AA but non-intersecting. In other embodiments, the first and second inlet axes BB, CC are not parallel to each other. In still other embodiments, the first and second inlet axes BB, CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB, CC may be perpendicular to the longitudinal axis AA and not parallel to each other. In these embodiments, it is also possible that the first and second inlet axes BB, CC are not perpendicular to the longitudinal axis AA but are parallel to each other.

[0104] The first and second fluid inlets 620, 630 have first and second inlet faces 621, 631 as described above. In this embodiment, the first and second fluid inlets 620, 630 are identical and rotationally symmetric about the longitudinal axis AA. The first and second fluid inlets 620, 630 extend substantially the entire length of the groove face 616 along the longitudinal axis AA. The flange 602 of the mixing element 600 further comprises a flange groove 652 and a flange face 654. The flange groove 652 is formed in the flange face 654 to enable assembly of the mixing element 600 with the assembly port 147 and to provide an effective seal of the assembly port 147. More specifically, the flange groove 652 is configured to receive the annular rib 149 within each assembly port 147.

[0105] 26-29, another embodiment of a mixing element 700 is described. The mixing element 700 is similar to the mixing element 200, except for the features described below. The mixing element 700 has a flange 702 and a tubular body 704. The tubular body 704 extends along a longitudinal axis AA from a closed end 706 to an open end 708. The tubular body 704 further comprises an outer surface 710 and an inner surface 712. Each of the outer surface 710 and the inner surface 712 extends from the closed end 706 to the open end 708. The inner surface 712 has a non-constant diameter along the longitudinal axis AA. In other words, the inner surface 712 varies in diameter. The inner surface 712 has a first diameter D1 and a second diameter D2, the first diameter D1 being greater than the second diameter D2. In other embodiments, the inner surface 712 may have two or more different diameters, may vary continuously at least in part, or may have other internal shapes as desired. The outer surface 710 of the tubular body 704 has a first sealing surface 714 proximate the closed end 706 and a second sealing surface 718 proximate the open end 708. The first and second sealing surfaces 714, 718 may have different diameters or the same diameter.

[0106] The groove surface 716 extends between the first and second sealing surfaces 714, 718. The groove surface 716 may have a diameter smaller than the diameter of the first and second sealing surfaces 714, 718. The groove surface 716 need not have a constant diameter, but may vary in diameter about the longitudinal axis. In some embodiments, the groove surface 716 may have a portion that is the same diameter as one of the first or second sealing surfaces 714, 718. In still other embodiments, the groove surface 716 may be omitted entirely.

[0107] The mixing element 700 includes a first fluid inlet 720, a second fluid inlet 730, and a fluid outlet 740. The first and second fluid inlets 720, 730 are formed through the tubular body 704 from the exterior surface 710 to the interior surface 712. More specifically, the first and second fluid inlets 720, 730 are formed in the groove surface 716 of the exterior surface 710. The fluid outlet 740 is defined by the open end 708. Thus, fluid flows through the first and second fluid inlets 720, 730, along the inside of the tubular body 704, and out the fluid outlet 740.

[0108] The first and second fluid inlets 720, 730 are formed as rows of holes 722, 732 extending along first and second inlet axes BB, CC, respectively. The rows of holes 722, 732 are aligned in a direction parallel to the longitudinal axis AA. Each of the holes 722 of the first fluid inlet 720 have a different diameter and are circumferentially offset from one another such that a periphery 723 of each hole 722 is tangent to the axis DD, which is parallel to the longitudinal axis AA. Each of the holes 732 of the second fluid inlet 730 have a different diameter and are circumferentially offset from one another such that a periphery 733 of each hole 732 is tangent to the axis EE.

[0109] The holes 722, 732 have first and second inlet faces 721, 731 that extend from the inner surface 712 to the outer surface 710 of the tubular body 704. The first and second inlet faces 721, 731 have a constant profile extending through the tubular body 704 along the first and second inlet axes BB, CC. Thus, the profile of the first and second inlet faces 721, 731 is constant extending along the first and second inlet axes BB, CC. The first and second fluid inlets 720, 730 have the same profile, including the diameter and arrangement of the holes 722, 732. In other embodiments, the profiles of the first and second fluid inlets 720, 730 may not be the same. Instead, the first and second fluid inlets 720, 730 can have different profiles to optimize mixing for factors such as different flow rates of different fluids or other factors.

[0110] The first and second inlet axes BB, CC are spaced apart from the longitudinal axis AA so as not to intersect with the longitudinal axis AA. The first and second inlet axes BB, CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB, CC are located on opposite sides of the longitudinal axis AA. Thus, the first and second inlet axes BB, CC are perpendicular to the longitudinal axis AA but non-intersecting. In other embodiments, the first and second inlet axes BB, CC are not parallel to each other. In still other embodiments, the first and second inlet axes BB, CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB, CC may be perpendicular to the longitudinal axis AA and not parallel to each other. In these embodiments, it is also possible that the first and second inlet axes BB, CC are not perpendicular to the longitudinal axis AA and are parallel to each other.

[0111] The first and second fluid inlets 720, 730 have first and second inlet faces 721, 731, as described above. In this embodiment, the first and second fluid inlets 720, 730 are identical and rotationally symmetric about the longitudinal axis AA. The first and second fluid inlets 720, 730 extend substantially the entire length of the groove surface 716 along the longitudinal axis AA. A portion of the first inlet face 721 of each hole 722 joins the inner surface 712. More specifically, a portion of the first inlet face 721 joins the inner surface 712 at a tangent point 723. Thus, a portion of the first inlet face 721 is tangent to the inner surface 712, and the two surfaces join at the tangent point 723. Stated another way, there is no discontinuity between a portion of the first inlet face 721 and the inner surface 712, as a portion of the first inlet face joins the inner surface 712.

[0112] The second inlet surface 731 also has a portion that tangentially joins with the inner surface 712 and has a corresponding contact point. The flange 702 of the mixing element 700 further comprises a flange groove 752 and a flange face 754. The flange groove 752 is formed in the flange face 754 to enable assembly of the mixing element 700 with the assembly ports 147 and to provide an effective seal of the assembly ports 147. More specifically, the flange groove 752 is configured to receive the annular rib 149 within each assembly port 147.

[0113] 30-33, another embodiment of a mixing element 800 is described. The mixing element 800 is similar to the mixing element 200, except for the features described below. The mixing element 800 has a flange 802 and a tubular body 804. The tubular body 804 extends along a longitudinal axis AA from a closed end 806 to an open end 808. The tubular body 804 further comprises an outer surface 810 and an inner surface 812. Each of the outer surface 810 and the inner surface 812 extends from the closed end 806 to the open end 808. The inner surface 812 has a non-constant diameter along the longitudinal axis AA. In other words, the inner surface 812 varies in diameter. The inner surface 812 has a plurality of grooves 817, each groove 817 having a first diameter D1. Between the grooves 817, the inner surface 812 has a second diameter D2, the first diameter D1 being greater than the second diameter D2. In other embodiments, the inner surface 812 may have two or more different diameters, may vary continuously at least in part, or may have other internal shapes as desired. The outer surface 810 of the tubular body 804 has a first sealing surface 814 proximate the closed end 806 and a second sealing surface 818 proximate the open end 808. The first and second sealing surfaces 814, 818 may have different diameters or the same diameter.

[0114] The groove surface 816 extends between the first and second sealing surfaces 814, 818. The groove surface 816 may have a diameter smaller than the diameter of the first and second sealing surfaces 814, 818. The groove surface 816 need not have a constant diameter, but may vary in diameter about the longitudinal axis. In some embodiments, the groove surface 816 may have a portion that is the same diameter as one of the first or second sealing surfaces 814, 818. In still other embodiments, the groove surface 816 may be omitted entirely.

[0115] The mixing element 800 comprises a first fluid inlet 820, a second fluid inlet 830, and a fluid outlet 840. The first and second fluid inlets 820, 830 are formed through the tubular body 804 from the exterior surface 810 to the interior surface 812. More specifically, the first and second fluid inlets 820, 830 are formed in the groove surface 816 of the exterior surface 810. The fluid outlet 840 is defined by the open end 808. Thus, fluid flows through the first and second fluid inlets 820, 830, along the inside of the tubular body 804, and out the fluid outlet 840.

[0116] The first and second fluid inlets 820, 830 are formed as rows of holes 822, 832 extending along first and second inlet axes BB, CC, respectively. The rows of holes 822, 832 are aligned in a direction parallel to the longitudinal axis AA. Each of the holes 822 of the first fluid inlet 820 has the same diameter. Each of the holes 832 of the second fluid inlet 830 has the same diameter. Each of the holes 822, 832 aligns with one of the grooves 817 on the inner surface 812. In other embodiments, the holes 822, 832 may be offset from the groove 817.

[0117] The holes 822, 832 have first and second inlet faces 821, 831 that extend from the inner surface 812 to the outer surface 810 of the tubular body 804. The first and second inlet faces 821, 831 have a constant profile extending through the tubular body 804 along the first and second inlet axes BB, CC. Thus, the profile of the first and second inlet faces 821, 831 is constant extending along the first and second inlet axes BB, CC. The first and second fluid inlets 820, 830 have the same profile, including the diameter and arrangement of the holes 822, 832. In other embodiments, the profiles of the first and second fluid inlets 820, 830 may not be the same. Instead, the first and second fluid inlets 820, 830 may have different profiles to optimize mixing for factors such as different flow rates of different fluids or other factors.

[0118] The first and second inlet axes BB, CC are spaced apart from the longitudinal axis AA so as not to intersect with the longitudinal axis AA. The first and second inlet axes BB, CC are parallel to each other and perpendicular to the longitudinal axis AA. However, the first and second inlet axes BB, CC are located on opposite sides of the longitudinal axis AA. Thus, the first and second inlet axes BB, CC are perpendicular to the longitudinal axis AA but non-intersecting. In other embodiments, the first and second inlet axes BB, CC are not parallel to each other. In still other embodiments, the first and second inlet axes BB, CC may not be perpendicular to the longitudinal axis AA. In these embodiments, the first and second inlet axes BB, CC may be perpendicular to the longitudinal axis AA and not parallel to each other. In these embodiments, it is also possible that the first and second inlet axes BB, CC are not perpendicular to the longitudinal axis AA and are parallel to each other.

[0119] The first and second fluid inlets 820, 830 have first and second inlet faces 821, 831, as described above. In this embodiment, the first and second fluid inlets 820, 830 are identical and rotationally symmetric about the longitudinal axis AA. The first and second fluid inlets 820, 830 extend substantially the entire length of the groove surface 816 along the longitudinal axis AA. A portion of the first inlet face 821 of each hole 822 joins the inner surface 812. More specifically, a portion of the first inlet face 821 joins the inner surface 812 at a tangent point. Thus, a portion of the first inlet face 821 joins the inner surface 812, and the two faces join at a tangent point. In other words, there is no discontinuity between the portion of the first inlet face 821 and the inner surface 812 because the portion joins the inner surface 812.

[0120] The second inlet face 831 also has a portion that tangentially joins with the inner face 812 and has a corresponding contact point. The flange 802 of the mixing element 800 is formed in a flange face 854 to enable assembly of the mixing element 800 with the assembly ports 147 and to provide an effective seal of the assembly ports 147. More specifically, the flange grooves 852 are configured to receive the annular ribs 149 within each assembly port 147.

[0121] 34-36, another embodiment of a fluid flow component 900 is illustrated. The fluid flow component 900 is similar to the fluid flow component 130 described above. The fluid flow component 900 has a component body 932 having a top surface 933, a bottom surface 934, a front surface 935, a rear surface 936, a left surface 937, and a right surface 938. As illustrated, the rear surface 936 is not planar, but instead includes a protrusion extending from an adjacent portion of the rear surface 936.

[0122] The top surface 933 of the component body 932 comprises a first port 941, a second port 942, and a third port 943. The first and second ports 941, 942 are configured to receive a fluid, while the third port 943 is configured to exhaust a fluid. However, in some embodiments, different ones of the first, second, and third ports 941, 942, 943 may function as inlets and outlets. It is further contemplated that there may be more than two ports to facilitate combining two or more fluids or splitting one or more fluids. Each of the ports 941, 942, 943 comprises a seal cavity configured to receive a seal to facilitate connection with other components. The component body 932 further comprises a plurality of fastener passages 945 that facilitate attachment of the component body 932 to the support structure 1402. Additionally, the fastener passages 945 can facilitate attachment of other flow components 110, 120 to the component body 932. The fastener passages 945 may be through holes, threaded holes, or formed in any manner that allows for attachment.

[0123] The bottom surface 934 of the component body 932 is configured to be in physical contact with the top surface 1403 of the support structure 1402 when the fluid flow component 930 is attached to the support structure 1402. However, in other embodiments, the top surface 1403 may face the top surface 933 when the fluid flow component 930 is attached to another fluid flow component 110, 120, which is directly coupled to the support structure 1402.

[0124] The front side 935 and the left side 937 collectively comprise a plurality of assembly ports 947. Each of the assembly ports 947 is secured by a retaining piece, such as retaining piece 148. The retaining piece provides a fluid-tight seal for the assembly ports 947 and retains any components installed in the assembly ports 947. FIG. 34 shows a mixing element 980, a flow control element 990, and a biasing element 970. The mixing element 980 is secured to the assembly port 947 by a retaining piece. The mixing element 980 fits within the flow control element 990 and the biasing element 970 engages the flow control element 990.

[0125] FIG. 35 shows a cross-section of the fluid flow component 900 in an assembled state. The fluid flow component 900 has a third flow passage 953 extending from the third port 143 to a junction 955. The mixing element 980 is disposed at the junction 955. Thus, fluid can flow from the junction 955 through the third flow passage 953 to the third port 143. As shown, the flow control element 990 is in a first state. In the first state, the flow control element 990 partially obstructs the fluid inlet 981 of the mixing element 980. This results in improved mixing at low flow conditions. The biasing element 970 maintains the flow control element 990 in the first state. In the first state, the flow control element 990 is axially biased against the mixing element 980, and the flow control element 990 acts as a slide valve that obscures the fluid inlet 981 of the mixing element 980. The open end 982 of the mixing element 980 contacts the seating surface 992 of the flow control element 990 and limits the volume of fluid that can flow through the fluid inlet 981 .

[0126] 36 shows a cross section of the fluid flow component 900 in a second state. In the second state, the flow control element 990 is moved axially such that the open end 982 of the mixing element 980 is no longer in contact with the seating surface 992 of the flow control element 990. This compresses the biasing element 970, reducing blockage of the fluid inlet 981 and allowing increased flow rate through the fluid inlet 981. This increased flow rate is achieved by the increased flow. The flow control element 990 is forced into the second state by the increased pressure drop resulting from the higher flow rate supplied to the fluid flow component 900. This increased pressure drop through the flow control element 990 and the mixing element 980 forces the flow control element 990 against the biasing element 970, opening the fluid inlet 981.

[0127] 37-39B, yet another embodiment of a fluid flow component 1500 is disclosed. The fluid flow component 1500 is an active component that can actively vary the fluid flow rate via an external control input. The fluid flow component 1500 has a component body 1532 having a top surface 1533, a bottom surface 1534, a front surface 1535, a rear surface 1536, a left surface 1537, and a right surface 1538. As can be seen, the rear surface 1536 is not planar, but instead includes a protrusion extending from an adjacent portion of the rear surface 1536.

[0128] The component body 1532 further comprises a number of fastener passages 1545 that facilitate attachment of the component body 1532 to the support structure 1402. Additionally, the fastener passages 1545 can facilitate attachment of the flow components 110, 120 to the component body 1532. The fastener passages 1545 may be through holes, threaded holes, or formed in any manner that allows for attachment.

[0129] The bottom surface 1534 of the component body 1532 is configured to be in physical contact with the top surface 1403 of the support structure 1402 when the fluid flow component 1530 is attached to the support structure 1402. However, in other embodiments, the top surface 1403 may face the top surface 1533 when the fluid flow component 1530 is attached to another fluid flow component 110, 120, which is directly coupled to the support structure 1402.

[0130] The front side 1535 and the left side 1537 collectively comprise a plurality of assembly ports 1547. The assembly ports 1547 may be blocked by a retaining piece 1548. The retaining piece 1548 helps ensure a fluid-tight seal of the assembly ports 1547 and retain any components installed in the assembly ports 1547. The fluid flow component 1500 also comprises a mixing element 1580, a flow control element 1590, an actuator 1570, and an adapter 1560. The mixing element 1580 is first inserted into the assembly port 1547, and then the flow control element 1590 is inserted into the second end 1583 of the mixing element 1580. The flow control element 1590 caps the second end 1583 of the mixing element 1580, resulting in the second end 1583 of the mixing element 1580 being closed. The first end 1582 is open and forms a fluid outlet for the mixing element 1580. A fluid inlet 1581 is formed through the mixing element 1580 between the first and second ends 1582 , 1583 .

[0131] The flow control element 1590 is secured to the assembly port 1547 by an adapter 1560, and the actuator 1570 is coupled to the adapter 1560. The actuator 1570 may be a solenoid, a linear actuator, or other device that moves in response to a control input. This control input may be applied via pneumatic or fluid pressure, electricity, or other known means. In one example, the actuator 1570 may be a linear actuator, with an actuator rod 1571 configured to engage an actuator receptacle 1591 in the flow control element 1590. The flow control element 1590 is configured to selectively occlude the fluid inlet 1581 as a result of a force applied to the actuator receptacle 1591 by the actuator rod 1571.

[0132] FIG. 38 shows a cross-section of the fluid flow component 1500 in an assembled state. FIG. 39A and FIG. 39B show detailed views of the fluid flow component 1500 in a first and second state. In the first state, the flow control element 1590 does not obstruct the fluid inlet 1581 as shown. The actuator rod 1571 is coupled to an actuator receptacle 1591 to allow movement of a piston 1593 along an inner surface 1584 of the mixing element 1580. The piston 1593 is coupled to an outer ring 1595 via a diaphragm 1592. The diaphragm 1592 allows linear movement of the piston 1593 while the outer ring 1595 is fixed within the assembly port 1547.

[0133] In a first state, the piston 1593 is retracted by the actuator rod 1571. The fluid inlet 1581 is unobstructed. The fluid inlet 1581 allows fluid flow and mixing to occur as described above. When fluid flow demand is reduced, improved mixing can be achieved by partially blocking the fluid inlet 1581. Thus, in the second state, the piston 1593 is translated axially within the inner surface 1584 of the mixing element 1580, thereby blocking the fluid inlet 1581.

[0134] A method of mixing process fluids is disclosed. In the method of mixing, a first fluid supply is configured to supply a first process fluid. A second fluid supply is configured to supply a second process fluid. The first process fluid is flowed through a fluid path to a mixing element located at a junction of a first flow component. The second process fluid is also flowed through a fluid path to the mixing element of the first flow component. The first and second process fluids are flowed through first and second fluid inlets formed in a tubular body of the mixing element. The first and second process fluids flow through first and second inlet axes perpendicular to a longitudinal axis of the mixing element. The first and second process fluids mix as they pass along the tubular body to form a fluid mixture. The fluid mixture then flows through an open end of the tubular body, which forms an outlet of the mixing element.

[0135] Optionally, the fluid inlets may be selectively blocked based on parameters such as fluid flow rates to promote improved mixing. The first and second process fluids may or may not be different.

[0136] While the present invention has been described in terms of specific examples including modes presently preferred for carrying out the invention, those skilled in the art will recognize that there are many modifications and permutations to the above-described systems and techniques. It is to be understood that other embodiments may be utilized and structural and functional modifications may be made without departing from the scope of the present invention. Thus, the spirit and scope of the present invention should be construed broadly as set forth in the appended claims.

Claims

1. a first fluid supply configured to supply a first process fluid; a second fluid supply configured to supply a second process fluid; A process chamber configured to process the article; A fluid supply module; The fluid supply module includes: a first fluid inlet fluidly coupled to the first fluid supply; a second fluid inlet fluidly coupled to the second fluid supply; an outlet fluidly coupled to the process chamber; a fluid path extending from the first and second fluid inlets to the outlet; A first flow component, The first flow component comprises: The component body, a first port, a second port, and a third port, each of the first, second, and third ports formed in the component body, a first flow path extending from the first port to a junction, a second flow path extending from the second port to the junction, and a third flow path extending from the junction to the third port, each of the first, second, and third flow paths forming a portion of the fluid path; a mixing element located at the junction of the first flow component, the mixing element having a first fluid inlet, a second fluid inlet, and a fluid outlet, the first fluid inlet fluidly coupled to the first port, the second fluid inlet fluidly coupled to the second port, and the fluid outlet fluidly coupled to the third port; Goods processing system.

2. The mixing element comprises a tubular body extending along a longitudinal axis of the mixing element from an open end to a closed end. The system of claim 1 .

3. The tubular body has an inner surface and an outer surface. The system of claim 2.

4. the inner surface and the outer surface extend from the open end to the closed end; The system of claim 3.

5. The first and second fluid inlets of the mixing element extend from the outer surface to the inner surface. A system according to claim 3 or claim 4.

6. the open end of the tubular body forms the fluid outlet of the mixing element. A system according to any one of claims 2 to 5.

7. the outer surface includes a first sealing surface proximate the closed end, a second sealing surface proximate the open end, and a groove surface extending from the first sealing surface to the second sealing surface. A system according to any one of claims 3 to 6.

8. the first fluid inlet and the second fluid inlet are formed in a groove surface; The system of claim 7.

9. the first fluid inlet extends along a first inlet axis, the first inlet axis being perpendicular to the longitudinal axis; A system according to any one of claims 3 to 8.

10. the first inlet axis is spaced from the longitudinal axis; The system of claim 9.

11. the first inlet axis does not intersect the longitudinal axis; A system according to claim 9 or claim 10.

12. the second fluid inlet extends along a second inlet axis, the second inlet axis being parallel to the first inlet axis and perpendicular to the longitudinal axis; A system according to any one of claims 9 to 11.

13. the second inlet axis does not intersect the longitudinal axis; The system of claim 12.

14. the first fluid inlet has a first inlet face, the first inlet face extending from the outer surface to the inner surface; A system according to any one of claims 3 to 13.

15. the first fluid inlet joins the inner surface at a tangent point, and the first inlet face abuts the inner surface at the tangent point; The system of claim 14.

16. the first fluid inlet comprises a slot, the slot extending along the longitudinal axis; A system according to any one of claims 3 to 15.

17. the slot has a height and a width, the height being less than the width; 17. The system of claim 16.

18. the first fluid inlet comprises a plurality of holes; A system according to any one of claims 3 to 15.

19. each hole of the plurality of holes has a diameter, and each hole diameter of the plurality of holes is different; 20. The system of claim 18.

20. the diameters of the holes decrease with increasing distance from the closed end of the tubular body along the longitudinal axis; 20. The system of claim 19.

21. the first fluid inlet comprises a plurality of holes arranged in an array; A system according to any one of claims 3 to 15.

22. the first fluid inlet comprises an array of holes; 22. The system of claim 21.

23. Each of the plurality of holes is equally spaced about the longitudinal axis.

22. The system of claim 21.

24. each of the plurality of holes being unequally spaced about the longitudinal axis; 22. The system of claim 21.

25. a plurality of grooves formed in the outer surface of the tubular body; A system according to any one of claims 3 to 13.

26. each groove of the plurality of grooves comprises a plurality of holes; 26. The system of claim 25.

27. The inner surface of the tubular body is cylindrical and has a constant diameter.

27. A system according to any one of claims 3 to 26.

28. the inner surface of the tubular body comprises a plurality of cylindrical surfaces having different diameters; A system according to any one of claims 3 to 15.

29. the inner surface of the tubular body includes a plurality of grooves; 25. A system according to any one of claims 3 to 24.

30. The mixing element includes a flange at the closed end.

30. A system according to any one of claims 2 to 29.

31. the flange includes a flange groove; 31. The system of claim 30.

32. the junction of the first flow component is formed by a first conduit, a second conduit and a third conduit, the first conduit forming a portion of the first flow path, the second conduit forming a portion of the second flow path, the third conduit forming a portion of the third flow path, the first and second conduits being perpendicular to the third conduit; 32. A system according to any one of claims 1 to 31.

33. The first flow component comprises a first assembly port, the mixing element and a retention piece assembled to the first assembly port.

33. A system according to any one of claims 1 to 32.

34. the first assembly port of the first flow component comprises an annular rib, and the mixing element comprises a flange at a closed end, the flange adapted to receive the annular rib of the first flow component; 34. The system of claim 33.

35. each of the first, second, and third ports is formed in a top surface of the component body of the first flow component; 35. A system according to any one of claims 1 to 34.

36. the fluid supply module further comprising a support structure, the first flow component being coupled to the support structure, and the first, second, and third ports facing away from the support structure; 36. A system according to any one of claims 1 to 35.

37. the first flow component comprises a biasing element and a closure element, the closure element blocking at least a portion of one of the first and second fluid inlets; 37. A system according to any one of claims 1 to 36.

38. The mixing element has a longitudinal axis, and the closing element is movable along the longitudinal axis relative to the mixing element.

38. The system of claim 37.

39. the first flow component comprising an actuator and a closure element, the actuator configured to move the closure element to block at least a portion of one of the first and second fluid inlets; 37. A system according to any one of claims 1 to 36.

40. The closure element comprises a diaphragm.

40. The system of claim 39.

41. the first and second process fluids are different; 41. A system according to any one of claims 1 to 40.

42. A component body; a first port, a second port, and a third port, each formed in the component body; a first flow passage extending from the first port to a junction; a second flow passage extending from the second port to the junction; a third flow passage extending from the junction to the third port; a mixing element disposed at the junction; The mixing element comprises: a first fluid inlet fluidly coupled to the first port; a second fluid inlet fluidly coupled to the second port; a fluid outlet fluidly coupled to the third port. Fluid flow components.

43. The mixing element comprises a tubular body extending along a longitudinal axis of the mixing element from an open end to a closed end.

43. The fluid flow component of claim 42.

44. The tubular body has an inner surface and an outer surface.

44. A fluid flow component according to claim 43.

45. the inner surface and the outer surface extend from the open end to the closed end; 45. A fluid flow component according to claim 44.

46. The first and second fluid inlets of the mixing element extend from the outer surface to the inner surface. A fluid flow component according to claim 44 or claim 45.

47. the open end of the tubular body forms the fluid outlet of the mixing element.

47. A fluid flow component according to any one of claims 43 to 46.

48. the outer surface includes a first sealing surface proximate the closed end, a second sealing surface proximate the open end, and a groove surface extending from the first sealing surface to the second sealing surface.

48. A fluid flow component according to any one of claims 44 to 47.

49. the first fluid inlet and the second fluid inlet are formed in a groove surface; 49. The fluid flow component of claim 48.

50. the first fluid inlet extends along a first inlet axis, the first inlet axis being perpendicular to the longitudinal axis; 50. A fluid flow component according to any one of claims 44 to 49.

51. the first inlet axis is spaced from the longitudinal axis; 51. The fluid flow component of claim 50.

52. the first inlet axis does not intersect the longitudinal axis; 52. A fluid flow component according to claim 50 or claim 51.

53. the second fluid inlet extends along a second inlet axis, the second inlet axis being parallel to the first inlet axis and perpendicular to the longitudinal axis; 53. A fluid flow component according to any one of claims 50 to 52.

54. the second inlet axis does not intersect the longitudinal axis; 54. A fluid flow component according to claim 53.

55. the first fluid inlet has a first inlet face, the first inlet face extending from the outer surface to the inner surface; 55. A fluid flow component according to any one of claims 44 to 54.

56. the first fluid inlet joins the inner surface at a tangent point, and the first inlet face abuts the inner surface at the tangent point; 56. A fluid flow component according to claim 55.

57. the first fluid inlet comprises a slot, the slot extending along the longitudinal axis; 57. A fluid flow component according to any one of claims 44 to 56.

58. the slot has a height and a width, the height being less than the width; 58. A fluid flow component according to claim 57.

59. the first fluid inlet comprises a plurality of holes; 57. A fluid flow component according to any one of claims 44 to 56.

60. each hole of the plurality of holes has a diameter, and each hole diameter of the plurality of holes is different; 60. The fluid flow component of claim 59.

61. The diameters of the holes decrease with increasing distance from the closed end of the annular body along the longitudinal axis.

61. The fluid flow component of claim 60.

62. the first fluid inlet comprises a plurality of holes arranged in an array; 57. A fluid flow component according to any one of claims 44 to 56.

63. the first fluid inlet comprises an array of holes; 63. The fluid flow component of claim 62.

64. Each of the plurality of holes is equally spaced about the longitudinal axis.

63. The fluid flow component of claim 62.

65. each of the plurality of holes being unequally spaced about the longitudinal axis; 63. The fluid flow component of claim 62.

66. a plurality of grooves formed in the outer surface of the tubular body; 55. A fluid flow component according to any one of claims 44 to 54.

67. each groove of the plurality of grooves comprises a plurality of holes; 67. A fluid flow component according to claim 66.

68. The inner surface of the tubular body is cylindrical and has a constant diameter.

68. A fluid flow component according to any one of claims 44 to 67.

69. the inner surface of the tubular body comprises a plurality of cylindrical surfaces having different diameters; 57. A fluid flow component according to any one of claims 44 to 56.

70. the inner surface of the tubular body includes a plurality of grooves; 65. A fluid flow component according to any one of claims 44 to 64.

71. The mixing element includes a flange at the closed end.

71. A fluid flow component according to any one of claims 43 to 70.

72. the flange includes a flange groove; 72. The fluid flow component of claim 71.

73. the junction of the first flow component is formed by a first conduit, a second conduit and a third conduit, the first conduit forming a portion of the first flow path, the second conduit forming a portion of the second flow path, the third conduit forming a portion of the third flow path, the first and second conduits being perpendicular to the third conduit; 73. A fluid flow component according to any one of claims 42 to 72.

74. The first flow component comprises a first assembly port, the mixing element and a retention piece assembled to the first assembly port.

74. A fluid flow component according to any one of claims 42 to 73.

75. a first assembly port of the first flow component comprising an annular rib and the mixing element comprising a flange at a closed end, the flange adapted to receive the annular rib of the first flow component; 75. A fluid flow component according to claim 74.

76. each of the first, second, and third ports is formed in a top surface of the component body of the first flow component; 76. A fluid flow component according to any one of claims 42 to 75.

77. the first flow component comprising a biasing element and a closure element, the closure element blocking at least a portion of one of the first and second fluid inlets; 77. A fluid flow component according to any one of claims 42 to 76.

78. The mixing element has a longitudinal axis, and the closing element is movable along the longitudinal axis relative to the mixing element.

78. A fluid flow component according to claim 77.

79. the first flow component comprising an actuator and a closure element, the actuator configured to move the closure element to block at least a portion of one of the first and second fluid inlets; 79. A fluid flow component according to any one of claims 42 to 78.

80. A mixing element comprising: a tubular body extending along a longitudinal axis of the mixing element from an open end to a closed end, the tubular body having an exterior surface and an interior surface; a first fluid inlet formed through the tubular body from the exterior surface to the interior surface; a second fluid inlet formed through the tubular body from the exterior surface to the interior surface; a fluid outlet defined by the open end of the tubular body; Mixed element.

81. Both the inner surface and the outer surface extend from the open end to the closed end.

81. The mixing element of claim 80.

82. the outer surface includes a first sealing surface proximate the closed end, a second sealing surface proximate the open end, and a groove surface extending from the first sealing surface to the second sealing surface. A mixing element according to claim 80 or claim 81.

83. the first fluid inlet and the second fluid inlet are formed in a groove surface; 83. A mixing element according to claim 82.

84. the first fluid inlet extends along a first inlet axis, the first inlet axis being perpendicular to the longitudinal axis; A mixing element according to any one of claims 80 to 83.

85. the first inlet axis is spaced from the longitudinal axis; 85. The mixing element of claim 84.

86. the first inlet axis does not intersect the longitudinal axis; A mixing element according to claim 84 or claim 85.

87. the second fluid inlet extends along a second inlet axis, the second inlet axis being parallel to the first inlet axis and perpendicular to the longitudinal axis; 87. A mixing element according to any one of claims 84 to 86.

88. the second inlet axis does not intersect the longitudinal axis; 88. A mixing element according to claim 87.

89. the first fluid inlet has a first inlet face, the first inlet face extending from the outer surface to the inner surface; 89. A mixing element according to any one of claims 80 to 88.

90. the first fluid inlet joins the inner surface at a tangent point, and the first inlet face abuts the inner surface at the tangent point; 90. The mixing element of claim 89.

91. the first fluid inlet comprises a slot, the slot extending along the longitudinal axis; A mixing element according to any one of claims 80 to 90.

92. the slot has a height and a width, the height being less than the width; 92. The mixing element of claim 91.

93. the first fluid inlet comprises a plurality of holes; A mixing element according to any one of claims 80 to 90.

94. each hole of the plurality of holes has a diameter, and each hole diameter of the plurality of holes is different; 94. The mixing element of claim 93.

95. The diameters of the holes decrease with increasing distance from the closed end of the tubular body along the longitudinal axis.

95. The mixing element of claim 94.

96. the first fluid inlet comprises a plurality of holes arranged in an array; A mixing element according to any one of claims 80 to 90.

97. the first fluid inlet comprises an array of holes; 97. The mixing element of claim 96.

98. Each of the plurality of holes is equally spaced about the longitudinal axis.

97. The mixing element of claim 96.

99. each of the plurality of holes being unequally spaced about the longitudinal axis; 97. The mixing element of claim 96.

100. a plurality of grooves formed in the outer surface of the tubular body; 100. A mixing element according to any one of claims 80 to 99.

101. each groove of the plurality of grooves comprises a plurality of holes; 101. The mixing element of claim 100.

102. The inner surface of the tubular body is cylindrical and has a constant diameter. A mixing element according to any one of claims 80 to 101.

103. the inner surface of the tubular body comprises a plurality of cylindrical surfaces having different diameters; A mixing element according to any one of claims 80 to 90.

104. the inner surface of the tubular body includes a plurality of grooves; 99. A mixing element according to any one of claims 80 to 98.

105. The mixing element includes a flange at the closed end. A mixing element according to any one of claims 80 to 104.

106. the flange includes a flange groove; A mixing element according to claim 105.

107. a) providing a first fluid supply configured to supply a first process fluid and a second fluid supply configured to supply a second process fluid; b) flowing the first process fluid through a mixing element of a first flow component and the second process fluid through the mixing element of the first flow component; c) passing the first process fluid through a first fluid inlet formed in a tubular body of the mixing element, the first fluid inlet extending along a first inlet axis perpendicular to a longitudinal axis of the mixing element; and d) passing the second process fluid through a second fluid inlet formed in the tubular body of the mixing element, the second fluid inlet extending along a second inlet axis perpendicular to the longitudinal axis; and e) mixing the first and second process fluids within the tubular body of the mixing element to form a fluid mixture; f) flowing a fluid mixture through an open end of the tubular body, the open end forming an outlet of the mixing element; How the process fluids are mixed.

108. The tubular body of the mixing element extends along the longitudinal axis from an open end to a closed end. The method of claim 107.

109. the first inlet axis and the second inlet axis are parallel, and the first and second inlet axes do not intersect the longitudinal axis; The method of claim 107 or claim 108.

110. The first fluid inlet is elongated along the longitudinal axis.

110. A method according to any one of claims 107 to 109.

111. g) further comprising, following step f), blocking a portion of one of the first or second fluid inlets in response to a fluid flow rate of one of the first or second process fluids; 111. A method according to any one of claims 107 to 110.

112. the first and second process fluids are different; 112. A method according to any one of claims 107 to 111.

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