Liquid application apparatus, maintenance method, and article manufacturing method

Abstract

To provide a technique advantageous for maintaining a function of a discharge head.SOLUTION: A liquid application device includes an ejection head having a head surface on which an ejection port for ejecting a liquid is disposed, a maintenance component that can be disposed so as to face the head surface in order to maintain a function of the ejection head, and a cleaning mechanism that cleans the maintenance component by pressing a cleaning member against the maintenance component at a position away from the ejection head.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a liquid application device, a maintenance method, and an article manufacturing method. [Background technology]

[0002] For example, in liquid ejection devices equipped with ejection heads for ejecting ink from ejection ports, such as inkjet printers, problems can occur when the ejection ports dry out or become clogged due to the inclusion of foreign matter. Various countermeasures have been proposed to resolve these problems. In particular, liquid ejection devices that use inks that are a mixture of pigments or functional materials and volatile liquids, or highly viscous inks such as QD inks used in the manufacture of liquid crystal displays, are prone to the accumulation of residues, which can seriously impede ejection performance. Therefore, efficient cleaning of the area around the ejection ports is necessary, and recovery devices have been proposed to restore ejection function by efficiently removing ejected material adhering to the area around the ejection ports and the cleaning liquid used during cleaning.

[0003] An example of a recovery device is a capping device that seals the area where the ejection ports are arranged with a cap and then creates a negative pressure inside the cap to forcibly suck out ink or other debris that has clogged the ejection ports. In addition to the suction function, the capping device also has the function of filling the sealed space with a cleaning liquid to clean the area around the ejection ports and the function of preventing the surface of the ejection tip from drying out when it is not in operation. Patent Document 1 describes a configuration in which a suction nozzle is positioned at a predetermined distance from the ejection port surface and this suction nozzle is used to suck out liquid from the ejection port surface. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6905118 Summary of the Invention [Problem to be solved by the invention]

[0005] Conventionally, little attention has been paid to the contamination of maintenance parts used to maintain the functionality of ejection heads, such as recovery devices and caps. However, for example, the gap between the head surface and the suction nozzle of a recovery device must be strictly controlled to a very narrow distance, typically between 50 μm and 500 μm, to ensure that any liquid remaining on the head surface is reliably sucked up. Therefore, if residue accumulates on the surface of the suction nozzle and the gap between the head surface and the residue becomes smaller than the specified value, suction performance may be impaired. Of course, if the accumulation progresses to the point where the gap is eliminated, the residue accumulated on the suction nozzle may come into contact with the head surface and contaminate it. Furthermore, if the residue accumulated on the suction nozzle is solidified ink deposits, scanning the suction nozzle while in contact with the head surface may damage the head surface.

[0006] The cap can also cause problems. The cap forms a sealed space between the cap and the head surface when its outer periphery is pressed against the head surface. Therefore, if residue adheres to the surface of the cap, the residue can contaminate the head surface. Furthermore, if the residue accumulated on the cap is solidified ink deposits, it can damage the head surface when the cap is pressed against it. Furthermore, to improve the sealing of the internal space of the cap, the outer periphery of the cap can be made of a material that is flexible and resistant to the ejected liquid (e.g., fluororubber). If deposits adhere to such an outer periphery, flexibility is lost, adhesion is reduced, and the desired sealing may not be achieved.

[0007] Of course, it is possible to avoid the above-mentioned problems by frequently replacing maintenance parts such as suction nozzles and caps, or by having workers perform cleaning work, but these tasks require a great deal of time.In particular, in liquid ejection devices that use anaerobic ink or photocurable ink, the area around the ejection head is an enclosed or light-shielded space, making it difficult for workers to access the area around the ejection head.

[0008] An object of the present invention is to provide an advantageous technique for maintaining the function of a discharge head. [Means for solving the problem]

[0009] One aspect of the present invention relates to a liquid application device, which includes an ejection head having a head surface on which ejection ports for ejecting liquid are arranged, a maintenance part that can be arranged opposite the head surface to maintain the function of the ejection head, and a cleaning mechanism that cleans the maintenance part by pressing a cleaning member against the maintenance part at a position away from the ejection head. [Effects of the Invention]

[0010] The present invention provides an advantageous technique for maintaining the functionality of a dispensing head. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a perspective view illustrating an example of the overall configuration of a liquid ejection device according to a first embodiment. [Figure 2] FIG. 2 is a perspective view illustrating the configuration of a discharge head. [Figure 3] FIG. 2 is a perspective view illustrating a maintenance unit (cap, cleaner). [Figure 4] FIG. 2 is a perspective view illustrating the configuration of a cleaning mechanism according to the first embodiment. [Figure 5] FIG. 2 is a side view illustrating the configuration of a cleaning mechanism according to the first embodiment. [Figure 6] FIG. 2 is a perspective view illustrating the configuration of a cleaning mechanism according to the first embodiment. [Figure 7] FIG. 10 is a side view illustrating the configuration of a modified example of the cleaning mechanism of the first embodiment. [Figure 8] FIG. 10 is a side view illustrating the configuration of another modified example of the cleaning mechanism of the first embodiment. [Figure 9] FIG. 10 is a perspective view illustrating the configuration of a cleaning mechanism of a liquid ejection device according to a second embodiment. [Figure 10] FIG. 10 is a perspective view illustrating the configuration of a cleaning mechanism of a liquid ejection device according to a second embodiment. [Figure 11] FIG. 10 is a perspective view illustrating the configuration of a cleaning mechanism of a liquid ejection device according to a second embodiment. [Figure 12] 5A to 5C are diagrams for explaining the operation of the liquid ejection device according to the first embodiment. [Figure 13] FIG. 2 is a perspective view showing an example of the configuration of a cleaner. [Figure 14] FIG. 10 is a perspective view showing an example of the configuration of a cap. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of the invention claimed. Although multiple features are described in the embodiments, not all of these multiple features are necessarily essential to the invention, and multiple features may be combined arbitrarily. Furthermore, in the accompanying drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0013] 1 and 2 are diagrams showing an example of the configuration of a liquid application device 13 according to the first embodiment. FIG. 1 is a perspective view illustrating the overall configuration of the liquid application device 13. FIG. 2 is a perspective view of a discharge block 6 viewed from below. The liquid application device 13 may be configured to apply ink (liquid) to a substrate 3. The substrate 3 is fixed on a substrate stage 4, and the substrate stage 4 moves on a surface plate 5, causing the substrate 3 to move relative to the surface plate 5. One or more discharge heads 16 may be arranged on the discharge block 6. Each discharge head 16 may have a head surface HS on which discharge ports 18 for discharging ink (liquid) are arranged. The discharge block 6 is supported by a carriage 11 so as to face the upper surface of the substrate 3. The carriage 11 moves up and down, allowing the distance between the substrate 3 and the discharge block 6 (the head surface HS of the discharge head 16) to be adjusted to a desired value. An ink collector 7 may be provided on the substrate stage 4, outside the area where the substrate 3 is sucked by vacuum suction or the like.

[0014] In the example shown in Fig. 2, a plurality of ejection heads 16 are arranged in two rows in the ejection block 6. Each ejection head 16 has a head surface HS in which one or more ejection ports 18 are arranged, and each ejection head 16 is arranged so that the head surface HS (or, from another perspective, the ejection ports 18) faces downward. In the example shown in Figs. 1 and 2, the longitudinal direction of the ejection head 16 is parallel to the X direction (first direction 9), and the lateral direction of the ejection head 16 is parallel to the Y direction. The two rows of the plurality of ejection heads 16 may be arranged in a staggered pattern.

[0015] During the application operation (printing operation) of applying ink to the substrate 3, the carriage 11 is first driven up and down to set the desired distance between the substrate 3 and the ejection block 6 (head surface HS). The substrate stage 4 is then driven in the Y direction to drive the substrate 3 and the ink collector 7 relative to the ejection block 6. When the ink collector 7 reaches the area under the ejection block 6, ink is ejected from the ejection ports 18 of all the ejection heads 16 arranged in the ejection block 6. A negative pressure suction device (not shown) is connected to the ink collector 7, and all of the ejected ink is collected by the ink collector 7. Because the ejection of ink from each ejection port 18 is determined based on the ink pattern to be applied to the substrate 3, some of the multiple ejection ports 18 may not eject ink for a long period of time. When an ejection port 18 does not eject ink for a long period of time, the volatile components of the ink evaporate, causing the ejection port 18 to become clogged. Therefore, ejecting ink from all the ejection ports 18 to the ink collector 7 prevents the ejection ports 18 from becoming clogged. Furthermore, by detecting the vibration waveform of each of the ejection ports 18 during ejection operation, it is possible to determine whether each of the ejection ports 18 is in a normal state.

[0016] Subsequently, ink can be ejected from ejection ports 18 selected according to the ink pattern to be arranged on substrate 3, in synchronization with the timing at which substrate 3 passes under ejection block 6 at a constant speed. A liquid application device 13 that uses ink containing a volatile solvent can be provided with a drying unit that dries the ink after the ink is applied to substrate 3 by ejection block 6. A liquid application device 13 that uses ultraviolet-curable ink can be provided with an ultraviolet irradiation unit that irradiates the ink with ultraviolet rays after the ink is applied to substrate 3 by ejection block 6.

[0017] In one example, the diameter of the ejection orifice 18 is within a range of 10 μm to 50 μm, and the distance between the ejection head 16 (head surface HS) and the substrate 3 during the application operation (printing operation) may be within a range of 50 μm to 500 μm. If the ejection orifice 18 becomes clogged due to drying of the ink, or if ink residue accumulates around the ejection orifice 18, or if foreign matter adheres to the ejection orifice 18, changes may occur in either the ejection angle or the ejection speed of the ink ejected from the ejection orifice 18. In such cases, the ink application position on the substrate 3 may shift from the target position. Maintenance parts may be used to resolve such problems, i.e., to maintain the functionality of the ejection head 16.

[0018] FIG. 3 is a perspective view showing an example configuration of the maintenance unit 2. FIGS. 13 and 14 are perspective views showing detailed configuration examples of the components of the maintenance parts. The maintenance unit 2 may include one or more maintenance parts. Alternatively, the maintenance unit 2 may include one or more types of maintenance parts. In the example shown in FIG. 3, the maintenance unit 2 includes a cap 41 as an example of a maintenance part and a cleaner 46 as another example of a maintenance part. FIG. 3 illustrates the cleaners 46 arranged in two rows and the caps 41 arranged in two rows. The center-to-center distance between the two rows of the cleaners 46 arranged in two rows is equal to the center-to-center distance between the two rows of the ejection heads 16 arranged in two rows. Furthermore, the center-to-center distance between the two rows of the caps 41 arranged in two rows is equal to the center-to-center distance between the two rows of the ejection heads 16 arranged in two rows.

[0019] Each cleaner 46 has a nozzle guide 49 and a suction nozzle 47 that moves in the X direction while being guided by the nozzle guide 49. Each cap 41 is arranged to face a corresponding one of the multiple discharge heads 16, and covers the head surface HS of the discharge head 16 when the liquid application device 13 is not in operation or on standby. The cleaner 46 is an example of a recovery unit that recovers the function of the discharge head 16. The cleaner 46 can be configured as a non-contact cleaner that cleans the head surface HS of the discharge head 16 without coming into contact with the head surface HS.

[0020] FIG. 12 is a side view (facing the −X direction) of the liquid application device 13 illustrated in FIG. 1. The maintenance unit 2 can be supported by a support mechanism 14. The discharge block 6 can be raised from the application operation position shown in FIG. 12(a) and moved to the retracted position shown in FIG. 12(b). The maintenance unit 2 can then move in the −Y direction on the maintenance table 15 and be positioned below the discharge block 6 as shown in FIG. 12(c). Here, by finely adjusting the amount of movement of the maintenance unit 2 on the maintenance table 15, either the caps 41 arranged in two rows or the cleaners 46 arranged in two rows can be positioned above the discharge heads 16 arranged in two rows.

[0021] FIG. 14 is a perspective view showing the discharge head 16 and cap 41 facing each other. The discharge head 16 may include, for example, a ceramic discharge tip 17 with a head surface HS (not shown) having a discharge port 18 (not shown) facing downward, and a metal tip guard 19 surrounding the head surface HS of the discharge tip 17. In one example, the lower surface of the tip guard 19 may be positioned several μm below the head surface HS (lower surface) of the discharge tip 17. This may function to prevent damage to the discharge tip 17 due to contact of the head surface (HS) of the discharge tip 17 with another object. The cap body 43 constituting the cap 41 may be, for example, a ceramic structure, and may have a tank-shaped recess formed on its upper surface. The cap body 43 may have, for example, a supply port 45 and a discharge port 53 communicating with the recess, and a connection port 51 communicating with the supply port 45 and a discharge port 53 for connection to the outside. A fluororubber cap seal 42 may be attached to the upper surface of the cap body 43. The cap lift 44 raises the cap body 43, causing the cap seal 42 to come into close contact with the underside of the ejection head 16, thereby forming an airtight space below the ejection head 16. The cap 41 can be used to achieve, for example, the following five functions.

[0022] The first function is to prevent deterioration of the ink. The ink to be ejected may be, for example, ink in which a pigment is dispersed in a highly volatile organic solvent, ultraviolet-curable ink, or ink containing an anaerobic solvent. The liquid application device 13 may be configured to control the environment around the ejection ports 18 to prevent deterioration of such ink. However, there are cases where the liquid application device 13 is stopped from operating for an extended period of time, or where environmental control around the ejection ports 18 is stopped for maintenance. In such cases, covering the head surface HS of the ejection head 16 with the cap 41 can prevent deterioration of the ink. Furthermore, adhesion of foreign matter to the ejection head 16 is also prevented.

[0023] The second function is to unclog the ejection orifices 18. For example, if the ejection orifices 18 become clogged due to an increase in ink viscosity caused by evaporation of volatile components of the ink or due to the adhesion of foreign matter to the ejection orifices 18, the clog can be unclogged by forcibly ejecting the ink at a higher pressure than normal. In this case, the ink must be collected to prevent the forcibly ejected ink from scattering around. In the liquid application device 13, the cap lift 44 can raise the cap body 43 and stop it at a position just before the cap seal 42 contacts the head surface HS of the ejection head 16. Then, by activating a negative pressure source (not shown) connected to the discharge port 53, the ink ejected into the internal space of the cap 41 can be collected and discarded without scattering around.

[0024] The third function is a function for performing forced ejection more strongly. In the second function, the ink is forced out from the inside of the ejection tip 17 by increasing the pressure on the ejection side, but there are cases where even stronger pressure is required. In this case, the cap body 43 is raised until the cap seal 42 is in close contact with the head surface HS of the ejection head 16, sealing the internal space of the cap 41. Then, the supply port 45 is closed, and a negative pressure source (not shown) connected to the outlet 53 is activated, creating a negative pressure state in the internal space of the cap 41. When forced ejection is performed using the second function in this state, the differential pressure applied to the ejection port 18 increases, enabling stronger forced ejection.

[0025] The fourth function is to clean the head surface HS of the ejection head 16. If ink residue or foreign matter adheres near the ejection orifices 18 on the head surface HS of the ejection head 16, the ink application position on the substrate 3 may shift from the target position. Therefore, a process to remove this residue and foreign matter should be performed periodically or at any desired timing. An example of this process is as follows. In the liquid application device 13, first, the cap body 43 is raised to bring the cap seal 42 into close contact with the head surface HS of the ejection head 16. Next, cleaning liquid is supplied into the internal space of the cap 41 through the supply port 45, and the head surface HS of the ejection head 16 is allowed to come into contact with the cleaning liquid for a certain period of time. Thereafter, cleaning is performed by continuously supplying cleaning liquid with the discharge port 53 open. The supply of cleaning liquid is then stopped, and the cleaning liquid in the internal space of the cap 41 is discharged by activating a negative pressure source (not shown) connected to the discharge port 53. Finally, chemically clean nitrogen is supplied through the supply port 45 to remove the cleaning liquid adhering to the head surface HS of the discharge head 16 .

[0026] Alternatively, if it is permissible for the cap 41 to come into contact with the area of ​​the head surface HS of the ejection head 16 that includes the ejection ports 18, the cap 41 may be used to scrape off ink residue or foreign matter adhering to the head surface HS. For example, the cap body 43 is raised until the cap seal 42 is in close contact with the head surface HS of the ejection head 16, and the cap seal 42 is lightly pressed against the head surface HS. In this state, the cap 41 is moved relatively in parallel with the head surface HS of the ejection head 16. In this case, the cap seal 42 is preferably made of a flexible material such as fluororubber.

[0027] While the above-described methods can maintain the discharge performance of the liquid application device 13, they may not be sufficient in some cases. For example, when the first function is used, the cap seal 42 comes into contact with the head surface HS of the discharge head 16. Therefore, ink residue adhering to the contact area between the cap seal 42 and the head surface HS may remain on the head surface HS of the discharge head 16 even after the cap seal 42 is separated from the head surface HS. When the second function is used, the discharged ink is also collected by the cap 41, but mist of ink generated during discharge may re-adhere to the head surface HS of the discharge head 16. When the third and fourth functions are used, the cap seal 42 also comes into contact with the head surface HS of the discharge head 16. Therefore, ink residue adhering to the contact area between the cap seal 42 and the head surface HS may remain on the head surface HS of the discharge head 16 even after the cap seal 42 is separated from the head surface HS.

[0028] FIG. 13 illustrates a state in which the cleaner 46 faces the head surface HS of the discharge head 16. The suction nozzle 47 is driven in the Z direction by a nozzle lifter 48 and can be positioned so that a predetermined gap (e.g., a gap between 5 μm and 30 μm) is maintained between the upper end of the suction nozzle 47 and the head surface HS of the discharge head 16. That is, the suction nozzle 47 can be positioned facing the head surface HS of the discharge head 16 without contacting the head surface HS. While maintaining this gap, the suction nozzle 47 can be moved in the X direction (the longitudinal direction of the discharge head 16) while being guided by a nozzle guide 49. This allows the entire head surface HS to be cleaned. In one example, the suction nozzle 47 can be provided with a suction port 50 whose width in the X direction is within a range of 50 μm to 200 μm and whose width in the Y direction is slightly wider than the width of the head surface HS. The suction port 50 is connected to a connection port 51. A negative pressure source (not shown) is connected to the connection port 51, and suction can be performed through the suction port 50. With the above configuration, it is possible to effectively remove ink residue, cleaning liquid, foreign matter, and other deposits from the head surface HS of the ejection head 16 through the suction nozzle 47. To efficiently remove deposits from the head surface HS, it is preferable that the head surface HS of the ejection head 16 has been subjected to a liquid-repellent treatment.

[0029] As described above, by operating the maintenance parts (cap 41 and / or cleaner 46), the function of the ejection head 16 can be maintained. However, this is premised on the performance of the maintenance parts (cap 41 and / or cleaner 46) being maintained.

[0030] Specifically, in the example shown in Figure 13, the suction port 50 of the suction nozzle 47 has a narrow slit shape, and thus, like the ejection port 18 of the ejection head 16, there is a possibility that it may become clogged with viscous ink or foreign matter. There is also a possibility that deposits consisting of ink residue or foreign matter may accumulate on the suction surface 52. As explained above, the gap between the suction surface 52 and the head surface HS of the ejection head 16 is controlled to a very small value. Therefore, there is a possibility that the amount of the gap may change due to deposits, resulting in a decrease in suction performance, and that the head surface HS of the ejection head 16 may be damaged if the deposits are dragged along while in contact with it.

[0031] The same is true for the cap 41 illustrated in FIG. 14. For example, ink and cleaning fluid tend to accumulate at the boundary between the cap body 43 and the cap seal 42. The outer surface of the cap seal, in particular, is prone to solidification because negative pressure suction is not possible, making the accumulated ink particularly prone to solidification. Residues such as ink and cleaning fluid tend to remain at the contact area between the cap seal 42 and the ejection head 16 after the cap seal 42 separates from the ejection head 16. As explained above, the residues at the contact area on the ejection head 16 side can be removed by suction using the cleaner 46. On the other hand, if there is no means to remove the residues at the contact area on the cap seal 42 side, the residues will continue to accumulate. If the ink accumulated on the surface of the cap seal 42, which requires flexibility, solidifies, the sealability of the contact surface cannot be maintained. Furthermore, the solidified residues may damage the contact surface on the ejection head 16 side.

[0032] Therefore, the liquid application device 13 of the first embodiment may include a cleaning mechanism 1 that cleans the maintenance parts (cap 41, cleaner 46). The cleaning mechanism 1 may be configured to clean the maintenance parts at a position away from the ejection head 16 (ejection block 6). By using the cleaning mechanism 1 to clean the maintenance parts at a position away from the ejection head 16 (ejection block 6), interference between the cleaning mechanism 1 and the ejection head 16 (ejection block 6) can be prevented. This is advantageous for protecting the ejection head 16 (ejection block 6) and for preventing the ejection head 16 (ejection block 6) from being recontaminated by the cleaning mechanism 1. The cleaning mechanism 1 may be configured to clean the maintenance parts, for example, by pressing a cleaning member against the maintenance parts. The liquid application device 13 may include a drive mechanism that moves at least one of the maintenance parts and the cleaning member so that the cleaning member moves relative to the maintenance parts.

[0033] As described above, as shown in FIG. 12(c), maintenance parts are arranged below the discharge block 6, and operations can be performed to maintain the function of the discharge block 6. Thereafter, as shown in FIG. 12(b), the maintenance parts are retracted from below the discharge block 6 by moving in the +Y direction on the maintenance table 15 so as to move away from the discharge block 6. Thereafter, the carriage 11 carrying the discharge block 6 moves in the -Z direction, and as shown in FIG. 12(a), it becomes possible to apply ink to the substrate 3. Meanwhile, the maintenance parts are positioned below the cleaning mechanism 1.

[0034] FIG. 1 is a perspective view of the liquid application device 13 in the state shown in FIG. 12(c). The cleaning mechanism 1 is positioned above the maintenance components, supported by a guide shaft 8, and configured to be movable in the +X direction. FIG. 4 shows a state in which the cleaning module 21 of the cleaning mechanism 1 is positioned relative to the cleaner 46. In one example, when the maintenance components transition from the state shown in FIG. 12(c) to the state shown in FIG. 12(b), the relative positions of the cleaning module 21 and the cleaner 46 can be adjusted. FIG. 5 is a diagram showing the internal configuration of the cleaning module 21 and its relative position with the cleaner 46. Hereinafter, with reference to FIGS. 4 and 5, an operation of maintaining the function of the cleaner 46 (recovery unit) by cleaning the cleaner 46 will be described.

[0035] The cleaning module 21 may have a feed roller 23 and a take-up roller 24 arranged within the outer cover 27. The feed roller 23 is a roller that feeds out the roll-shaped cleaning medium 22, and the take-up roller 24 is a roller that winds up the fed cleaning medium 22. The cleaning medium 22 has a width greater than the width of the suction nozzle 47 in the Y direction. The cleaning medium 22 may be, for example, a nonwoven fabric. The cleaning mechanism 1 may include a pressing member 25 that presses the cleaning medium 22 as a cleaning member against a cleaner 46 as an example of a maintenance part. The pressing member 25 is supported by a guide 29 and receives a pressing force in the -Z direction from a compression spring 26. The direction and amount of movement of the pressing member 25 may be limited by a guide window 28 opened in the outer cover 27. The cleaning mechanism 1 may include a cleaning nozzle 20 (supply unit) arranged between the pressing member 25 and the feed roller 23 so as to be able to drip cleaning liquid onto the cleaning medium 22. The liquid application device 13 may include a drive mechanism DRV that moves at least one of the cleaner 46 (maintenance part) and the cleaning medium 22 (cleaning member) so that the cleaning medium 22 moves relative to the cleaner 46 (maintenance part).

[0036] In one example, ink using an organic solvent as a solvent is used, nonwoven fabric resistant to organic solvents is used as cleaning medium 22, and pressing member 25 can be made of PTFE. Of course, if resistance to organic solvents is not required, pressing member 25 can be made of a material such as polyurethane foam sponge to provide elasticity, and compression spring 26 can be omitted.

[0037] As shown in FIG. 12(b), when the cleaner 46 (maintenance part) and the cleaning mechanism 1 face each other, the pressing member 25 of the cleaning module 21 is spaced apart from the cleaner 46 in the +Z direction. Therefore, even if the cleaning module 21 moves in the X direction, the two do not come into contact. When the cleaner 46 begins its cleaning operation, the cleaner 46 uses the nozzle lifter 48 to push the suction nozzle 47 in the +Z direction to a position Δh higher than the bottom end of the cleaning module 21. Then, the cleaning nozzle 20 drips cleaning liquid onto the cleaning medium 22. The payout roller 23 and take-up roller 24 are then controlled to pay out the cleaning medium 22 so that the portion of the cleaning medium 22 onto which the cleaning liquid has been dripped is positioned below the pressing member 25. In this state, when the cleaning module 21 is moved in the +X direction by the drive mechanism DRV, the cleaning medium 22 comes into contact with the suction nozzle 47, as shown in FIG. 5(a). The drive mechanism DRV then further moves the cleaning module 21 in the +X direction. 5(b), the pressing member 25 is pushed upward, and then passes over the suction nozzle 47 while pressing the cleaning medium 22 against the suction nozzle 47. After the pressing member 25 has passed over the suction nozzle 47, the payout roller 23 and the take-up roller 24 are controlled to pay out the cleaning medium 22 so that the portion of the cleaning medium 22 on which no cleaning liquid has been dripped is positioned under the pressing member 25. Then, by moving the cleaning module 21 in the -X direction, the cleaning liquid remaining on the surface of the suction nozzle 47 can be wiped off.

[0038] In the above description, the relative movement between the cleaning module 21 (cleaning media 22) and the cleaner 46 is achieved by moving the cleaning module 21 using the drive mechanism DRV. However, this is merely an example. The relative movement between the cleaning module 21 (cleaning media 22) and the cleaner 46 may also be achieved by moving the cleaner 46 along the X direction. The cleaning effect may be improved by changing the payout amount of the cleaning media 22 (for example, by applying slight vibrations) while the cleaning media 22 and the suction nozzle 47 are in contact with each other.

[0039] Although only one cleaner 46 and one cleaning module 21 are shown in FIGS. 4 and 5, a plurality of cleaners 46 and a plurality of cleaning modules 21 corresponding to the cleaners 46 may be provided.

[0040] 6 is a diagram showing the operation of cleaning the cap 41 by the cleaning module 21. First, in the state shown in FIG. 12(b), the maintenance part is moved in the Y direction to position the cleaning module 21 above the cap 41. Then, similar to the cleaning operation of the cleaner 46, the cap 41 can be cleaned by moving the cleaning module 21 in the +X direction while pressing the cleaning media 22 against the cap 41 and bringing the roll paper into pressure contact with it. Thereafter, the cleaning module 21 is moved in the -X direction to wipe off any cleaning liquid remaining on the surface of the cap 41.

[0041] A more detailed explanation follows. When the cap 41 (maintenance component) and the cleaning mechanism 1 face each other, the pressing member 25 of the cleaning module 21 is spaced apart from the cap 41 in the +Z direction. Therefore, even if the cleaning module 21 moves in the X direction, the two do not come into contact. When the cap 41 begins its cleaning operation, the cap 41 uses the cap lift 44 to push the cap body 43 up in the +Z direction to a position slightly higher than the bottom end of the cleaning module 21. The cleaning nozzle 20 then dispenses cleaning liquid onto the cleaning medium 22. The payout roller 23 and take-up roller 24 are then controlled to pay out the cleaning medium 22 so that the portion of the cleaning medium 22 onto which the cleaning liquid has been dispensed is positioned below the pressing member 25. In this state, when the cleaning module 21 is moved in the +X direction by the drive mechanism DRV, the cleaning medium 22 comes into contact with the cap 41. Then, when the cleaning module 21 is further moved in the +X direction by the drive mechanism DRV, the pressing member 25 is pushed upward, and then the pressing member 25 passes over the cap 41 while pressing the cleaning medium 22 against the cap 41. After the pressing member 25 has passed over the cap 41, the payout roller 23 and the take-up roller 24 are controlled to pay out the cleaning medium 22 so that the portion of the cleaning medium 22 on which no cleaning liquid has been dripped is positioned under the cap 41. Then, by moving the cleaning module 21 in the -X direction, any cleaning liquid remaining on the surface of the cap 41 can be wiped off.

[0042] In the above configuration example, if the pressing member 25 is configured as a cylindrical rigid body, the contact area between the surface of the maintenance part (cleaner 46, cap 41) and the cleaning media 22 may be limited to a narrow linear area.

[0043] FIG. 7 shows a modified example of the cleaning module 21 (cleaning mechanism 1) that is advantageous for increasing the contact area between the surface of the maintenance part (cleaner 46, cap 41) and the cleaning medium 22. In the modified example shown in FIG. 7, the cleaning module 21 includes a pair of cylindrical support columns 30 that guide the cleaning medium 22. The cleaning module 21 presses the cleaning medium 22 against the maintenance part (cleaner 46, cap 41) between the pair of cylindrical support columns 30 by the tension that the pair of cylindrical support columns 30 apply to the cleaning medium 22. In one example, the cleaning medium 22 makes surface contact with the entire upper surface of the suction nozzle 47 and may also partially contact the inclined surface around the upper surface of the suction nozzle 47.

[0044] 7, the pressing member 25, the compression spring 26, and the guide 29 can be eliminated. Also, the cleaning operation can be simplified to just raising and lowering the maintenance parts (cleaner 46, cap 41). This is advantageous in that it reduces the number of components that undergo frictional movement and reduces the generation of particles.

[0045] FIG. 8 illustrates another modified example of the cleaning module 21 (cleaning mechanism 1) that is advantageous for increasing the contact area between the surface of the maintenance part (cleaner 46, cap 41) and the cleaning media 22. In this modified example, a pressing member 25 and a compression spring 26 are added to the modified example shown in FIG. 7. The pressing member 25 may have dimensions corresponding to the contact surface of the cap seal 42, for example, dimensions larger than the contact surface of the cap seal 42. In a cleaning operation using the above configuration, the cap 41 is first raised until the top surface of the cap 41 contacts the portion of the cleaning media 22 between the two cylindrical support columns 30, and cleaning can be performed in this state. If it is subsequently determined that cleaning with a stronger pressing pressure is required, the cap 41 is further raised and the cleaning media 22 is pressed against the pressing member 25, thereby achieving a stronger pressing pressure.

[0046] 9 and 10 are perspective views showing a portion of a liquid application device 13 according to the second embodiment. The liquid application device 13 according to the second embodiment may have a configuration in which a measuring unit 31 is added to the liquid application device 13 according to the first embodiment. This configuration is useful for a liquid ejection device that has a configuration in which the ejection head 16, maintenance parts, and cleaning mechanism 1 are housed in a chamber so as to be shielded from air or light, such as a liquid ejection device that uses anaerobic ink or photocurable ink.

[0047] The measurement unit 31 may be held by a rack (housing) 35 together with the cleaning module 21 (cleaning mechanism 1). A mover 36 of a shaft motor (an example of a drive mechanism DRV) is installed on the outside of the rack 35, and the rack 35 is movable in the X direction along a guide shaft 8 shown in FIG. 1. The measurement unit 31 may include, for example, a camera 32 that captures images of maintenance parts (cleaner 46, cap 41). The measurement unit 31 may also include an illumination unit 33 for illuminating the field of view of the camera 32. The measurement unit 31 may also include an optical system such as a folding mirror 34 for adjusting the field of view of the camera 32.

[0048] As illustrated in FIG. 9, the measurement unit 31 can be configured to be able to be placed above the maintenance parts (cleaner 46, cap 41). The measurement unit 31 can be configured to be able to move together with the cleaning module 21, for example. The relative position between the maintenance part and the measurement unit 31 in the Y direction can be adjusted by moving the maintenance part in the Y direction. The relative position between the maintenance part and the measurement unit 31 in the Z direction (focal direction) can be adjusted by moving the maintenance part in a direction parallel to the Z direction. The illumination light generated by the illumination unit 33 has a wavelength that does not harden ink remaining in the maintenance part.

[0049] 12(a), the ejection block 6 can be positioned at a position where it can eject ink onto the substrate 3. Meanwhile, the maintenance component can be positioned at a position where it can be cleaned by the cleaning mechanism 1. With this configuration, the cleaning mechanism 1 can maintain the function of the maintenance component while applying ink to the substrate 3.

[0050] As illustrated in FIG. 9, the measurement unit 31 can capture images of each maintenance part (cleaner 46, cap 41). The measurement unit 31 can be configured to determine or analyze the presence or absence of ink or other adhesions based on images of the surfaces of the maintenance parts (cleaner 46, cap 41). The maintenance parts (cleaner 46, cap 41) are preferably colored in a color that makes them easily distinguishable from ink. To facilitate identification of the uneven shape (surface shape) of deposits or adhesions, the illumination unit 33 may provide dark-field illumination of the measurement target area of ​​the maintenance part.

[0051] The measuring unit 31 may include a distance sensor. In this case, the measuring unit 31 can determine or analyze the presence or absence of adhesion by measuring the surface shape (height distribution) of the measurement target area of ​​the maintenance part (cleaner 46, cap 41) using the distance sensor.

[0052] The measurement unit 31 may include a photointerrupter. In this case, the measurement unit 31 can determine that the height of the measurement target area of ​​the photointerrupter and maintenance parts (cleaner 46, cap 41) has exceeded the allowable value, i.e., that the amount of adhesion to the measurement target area has exceeded the allowable value. The optical axis of the photointerrupter can be arranged parallel to the measurement target area.

[0053] If the measuring unit 31 determines that there is adhesion in the measurement target area of ​​the maintenance part (cleaner 46, cap 41), the liquid applying device 13 cleans the maintenance part using the cleaning mechanism 1. Thereafter, the liquid applying device 13 can operate to check the condition of the measurement target area of ​​the maintenance part using the measuring unit 31. Then, if it is determined that there is still adhesion in the measurement target area of ​​the maintenance part, the liquid applying device 13 can perform cleaning again using the cleaning mechanism 1. At this time, as described with reference to FIG. 8 , the first cleaning can be performed while pressing the cleaning media 22 against the maintenance part with a first pressure. Then, the second cleaning can be performed while pressing the cleaning media 22 against the maintenance part with a second pressure that is stronger than the first pressure. Changing the cleaning conditions is not limited to changing the pressing pressure of the cleaning media 22, and the amount of cleaning liquid can also be changed, for example.

[0054] 11 is a perspective view of the cleaning mechanism 1 shown in FIG. 10, viewed from below. The cleaning nozzle 20 is disposed in the +X direction of the cleaning module 21. The cleaning mechanism 1 can clean the maintenance parts (cleaner 46 or cap 41) of the maintenance unit 2 while moving in the +X direction. In this configuration, the cleaning nozzle 20 can be used to apply cleaning liquid to the maintenance parts before the cleaning module 21 comes into contact with the maintenance parts.

[0055] When removing ink adhering to a maintenance part by cleaning, it may be more effective to wipe off the ink after a certain time has passed since the cleaning liquid was applied to the maintenance part. Therefore, when it is determined using the measuring unit 31 that cleaning is necessary, cleaning liquid may be applied to the area to be cleaned by the cleaning nozzle 20, and then the cleaning liquid may be wiped off with the cleaning media 22. In this case, there is no need to apply cleaning liquid with the cleaning media 22, and therefore there is no need to feed out the cleaning media 22 after the cleaning liquid has been applied.

[0056] In one aspect, liquid application device 13 performs a maintenance method for maintaining the function of ejection head 16, which has a head surface HS on which ejection ports for ejecting liquid are arranged. The maintenance method can include a step of maintaining the function of ejection head 16 by arranging a maintenance part so as to face head surface HS, and a cleaning step of cleaning the maintenance part.

[0057] The liquid application device described above can be suitably used in an article manufacturing method for manufacturing an article such as an OLED. In one aspect, the article manufacturing method can include a coating step of applying a liquid to a substrate using the liquid application device 13 and a processing step of processing the substrate that has undergone the coating step to obtain an article. The processing step can include, for example, a drying step of drying the liquid applied in the coating step, followed by a baking step. Multiple organic films can be formed by performing such processing multiple times. The processing step can further include a step of forming electrodes on the multiple organic films that have been stacked. The article manufacturing method can further include the maintenance method described above.

[0058] The disclosure of this specification and the accompanying drawings includes the following. (Item 1) an ejection head having a head surface on which ejection ports for ejecting liquid are arranged; a maintenance part that can be arranged to face the head surface in order to maintain the function of the ejection head; a cleaning mechanism that cleans the maintenance component by pressing a cleaning member against the maintenance component at a position away from the ejection head; A liquid application device comprising: (Item 2) a drive mechanism that moves at least one of the maintenance component and the cleaning member so that the cleaning member moves relative to the maintenance component; 2. The liquid application device according to item 1, (Item 3) Further provided is a measurement unit that measures the state of the maintenance part. 3. The liquid application device according to item 2, (Item 4) The measurement unit includes a camera. 4. The liquid application device according to item 3, (Item 5) The measurement unit includes a distance sensor. 4. The liquid application device according to item 3, (Item 6) the measurement unit includes a photointerrupter; 4. The liquid application device according to item 3, (Item 7) a housing for holding the cleaning mechanism and the measuring unit; The drive mechanism moves the housing. 4. The liquid application device according to item 3, (Item 8) The maintenance part includes a cap that covers the head surface. 8. The liquid application device according to any one of items 1 to 7, characterized in that (Item 9) the maintenance part includes a recovery part that recovers the function of the ejection head; 8. The liquid application device according to any one of items 1 to 7, characterized in that (Item 10) the recovery unit includes a suction nozzle disposed facing the head surface without contacting the head surface, the recovery unit removes foreign matter adhering to the head surface by suction using the suction nozzle. 10. The liquid application device according to item 9, (Item 11) the cleaning member is a roll-shaped cleaning medium, The cleaning mechanism includes a feed roller that feeds out the cleaning medium and a take-up roller that takes up the cleaning medium. 11. The liquid application device according to any one of items 1 to 10, characterized in that (Item 12) the cleaning mechanism includes a pressing member that presses the cleaning medium against the maintenance part. Item 12. The liquid application device according to item 11. (Item 13) the cleaning mechanism includes a pair of cylindrical support columns that guide the cleaning medium, and the pair of cylindrical support columns apply tension to the cleaning medium, thereby pressing the cleaning medium against the maintenance part between the pair of cylindrical support columns. Item 12. The liquid application device according to item 11. (Item 14) the cleaning mechanism includes a supply unit that supplies a cleaning liquid to the cleaning medium; Item 12. The liquid application device according to item 11. (Item 15) the cleaning mechanism includes a supply unit that drips a cleaning liquid onto the maintenance component. Item 12. The liquid application device according to item 11. (Item 16) A maintenance method for maintaining the function of a discharge head having a head surface on which discharge ports for discharging liquid are arranged, comprising: a step of maintaining the function of the ejection head by arranging a maintenance part so as to face the head surface; a cleaning step of cleaning the maintenance component by pressing a cleaning member against the maintenance component at a position away from the ejection head; A maintenance method comprising: (Item 17) A coating process of coating a liquid onto a substrate using the liquid coating apparatus according to any one of items 1 to 15; a processing step of obtaining an article by processing the substrate that has been subjected to the coating step; A method for manufacturing an article, comprising: (Item 18) a maintenance step of maintaining the function of the ejection head by the maintenance method according to item 16; a coating step of coating a liquid onto a substrate by discharging the liquid from the discharge head; a processing step of obtaining an article by processing the substrate that has been subjected to the coating step; A method for manufacturing an article, comprising: (others) The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0059] 13: Liquid ejection device, 1: Cleaning mechanism, 6: Ejection head, HS: Head surface, 41: Cap (maintenance part), 46: Cleaner (maintenance part)

Claims

1. an ejection head having a head surface on which ejection ports for ejecting liquid are arranged; a maintenance part that can be arranged to face the head surface in order to maintain the function of the ejection head; a cleaning mechanism that cleans the maintenance component by pressing a cleaning member against the maintenance component at a position away from the ejection head; A liquid application device comprising:

2. a drive mechanism that moves at least one of the maintenance component and the cleaning member so that the cleaning member moves relative to the maintenance component; 2. The liquid application device according to claim 1.

3. Further provided is a measurement unit that measures the state of the maintenance part.

3. The liquid application device according to claim 2.

4. The measurement unit includes a camera.

4. The liquid application device according to claim 3.

5. The measurement unit includes a distance sensor.

4. The liquid application device according to claim 3.

6. the measurement unit includes a photointerrupter; 4. The liquid application device according to claim 3.

7. a housing for holding the cleaning mechanism and the measuring unit; The drive mechanism moves the housing.

4. The liquid application device according to claim 3.

8. The maintenance part includes a cap that covers the head surface.

2. The liquid application device according to claim 1.

9. the maintenance part includes a recovery part that recovers the function of the ejection head; 2. The liquid application device according to claim 1.

10. the recovery unit includes a suction nozzle disposed facing the head surface without contacting the head surface, the recovery unit removes foreign matter adhering to the head surface by suction using the suction nozzle.

10. The liquid application device according to claim 9.

11. the cleaning member is a roll-shaped cleaning medium, The cleaning mechanism includes a feed roller that feeds out the cleaning medium and a take-up roller that takes up the cleaning medium.

2. The liquid application device according to claim 1.

12. the cleaning mechanism includes a pressing member that presses the cleaning medium against the maintenance part. The liquid application device according to claim 11 .

13. the cleaning mechanism includes a pair of cylindrical support columns that guide the cleaning medium, and the pair of cylindrical support columns apply tension to the cleaning medium, thereby pressing the cleaning medium against the maintenance part between the pair of cylindrical support columns. The liquid application device according to claim 11 .

14. the cleaning mechanism includes a supply unit that supplies a cleaning liquid to the cleaning medium; The liquid application device according to claim 11 .

15. the cleaning mechanism includes a supply unit that drips a cleaning liquid onto the maintenance component. The liquid application device according to claim 11 .

16. A maintenance method for maintaining the function of a discharge head having a head surface on which discharge ports for discharging liquid are arranged, comprising: a step of maintaining the function of the ejection head by arranging a maintenance part so as to face the head surface; a cleaning step of cleaning the maintenance component by pressing a cleaning member against the maintenance component at a position away from the ejection head; A maintenance method comprising:

17. a coating step of coating a substrate with a liquid using the liquid coating apparatus according to any one of claims 1 to 15; a processing step of obtaining an article by processing the substrate that has been subjected to the coating step; A method for manufacturing an article, comprising:

18. a maintenance step of maintaining the function of the ejection head by the maintenance method according to claim 16; a coating step of coating a liquid onto a substrate by discharging the liquid from the discharge head; a processing step of obtaining an article by processing the substrate that has been subjected to the coating step; A method for manufacturing an article, comprising:

Images