Substrate processing apparatus and ICP antenna module used therein

Abstract

This invention relates to a substrate processing apparatus that forms a plasma using an induced electric field to perform substrate processing, and to an ICP antenna module used therein. [Solution] Disclosed is an ICP antenna module characterized by including: a first antenna coil section 110 with one end 111 connected to a matcher 92; a second antenna coil section 120 with the other end 122 connected to ground; and a phase change circuit section 300 with one end connected to the other end 112 of the first antenna coil section 110 and the other end connected to one end 121 of the second antenna coil section 120, which changes the phase of the first current with a second current having the opposite phase to the first current flowing through the first antenna coil section 110.

Description

Technical Field

[0001] The present invention relates to the technical field of substrate processing apparatuses, and more specifically, to a substrate processing apparatus that forms plasma by an induction electric field to perform substrate processing and an ICP antenna module used therein.

Background Art

[0002] CPUs, memory elements, display panels, etc. are generally manufactured through so-called semiconductor processes such as etching and deposition, and semiconductor processes are implemented in various ways according to the types of processes such as CVD and PVD.

[0003] On the other hand, when performing a semiconductor process, that is, substrate processing, it can be performed using plasma, and a substrate processing apparatus that performs substrate processing according to a plasma formation method can be configured in various ways.

[0004] [[ID=I9]] For example, as in Patent Document 1, a substrate processing apparatus that forms plasma using an induction electric field to perform substrate processing is presented.

[0005] A substrate processing apparatus using an induction electric field as in Patent Document 1 includes a process chamber provided with a substrate support portion on which a substrate is placed, a dielectric window provided above the process chamber, and one or more antennas provided above the dielectric window. By applying an RF power source to one end of the antenna and grounding the other end, plasma is formed below the dielectric window to perform substrate processing.

[0006] On the other hand, the performance of a substrate processing apparatus is that there is uniformity in substrate processing on the substrate surface, and the uniformity of substrate processing is greatly affected by the structure of the antenna.

Prior Art Documents

Patent Documents

[0007]

Patent Document I

Summary of the Invention

[0008] The object of the present invention is to provide a substrate processing apparatus and an ICP antenna module used therein that can perform uniform substrate processing when processing a substrate using an induced electric field, taking into consideration the points mentioned above. [Means for solving the problem]

[0009] The present invention was devised to achieve the above-mentioned objectives of the present invention, and presents an ICP antenna module characterized by including a first antenna coil section, one end of which is connected to a matcher; a second antenna coil section, the other end of which is grounded; and a phase change circuit section, one end of which is connected to the other end of the first antenna coil section and the other end of which is connected to one end of the second antenna coil section, and which changes the phase of the first current with a second current having the opposite phase to the first current flowing through the first antenna coil section.

[0010] The first antenna coil section and the second antenna coil section may be composed of coils in which one end and the other end of the first antenna coil section are arranged opposite each other to one end and the other end of the second antenna coil section, and are wound in the same direction with a vertical gap between them.

[0011] The first antenna coil section and the second antenna coil section may have the same helical shape with the same center and radius.

[0012] The antenna may further include one or more outer antenna sections that have an outer spiral shape and a radius larger than the radius of the first antenna coil section and the second antenna coil section.

[0013] The outer antenna section may include n outer antenna coils arranged so that the positions of the ends of each coil have a phase difference of 360° / n (where n is a natural number of 2 or more) along the circumferential direction.

[0014] The outer antenna coil may include a first antenna coil member having one end connected to a branched power supply application member and having a first inscribed angle; a second antenna coil member having one end connected to the other end of the first antenna coil member, being positioned lower than the first antenna coil member and having a second inscribed angle; and a third antenna coil member having one end connected to the other end of the second antenna coil member, being positioned higher than the second antenna coil member and having a third inscribed angle.

[0015] The phase shift circuit includes a first capacitor connecting the other end of the first antenna coil and one end of the second antenna coil, and a second capacitor and a third capacitor connected in parallel with the first capacitor and in series between the other end of the first antenna coil and one end of the second antenna coil. The connecting conductive member connecting the second capacitor and the third capacitor may be grounded by a grounding conductive member.

[0016] The first capacitor and the second capacitor are connected to a first conductive member connected to the other end of the first antenna coil section. The other end of a third capacitor, one end of which is connected to the connecting conductive member, and the other end of a third conductive member, one end of which is connected to the other end of the first capacitor, may be connected by a second conductive member connected to one end of the second antenna coil section.

[0017] The connecting conductive member, the first conductive member, the second conductive member, and the third conductive member may be formed from a metal plate.

[0018] One end of the first antenna coil portion may be connected to a power supply member that extends in the direction of the spiral center forming the first antenna coil portion. [Effects of the Invention]

[0019] The substrate processing apparatus and the ICP antenna module used therein, by comprising a pair of coils wound in opposite directions, have the advantage of improving plasma uniformity and ultimately significantly improving the uniformity of substrate processing.

Brief Description of the Drawings

[0020] [Figure 1] It is a cross-sectional view showing a substrate processing apparatus according to the present invention. [Figure 2] It is a cross-sectional view showing an ICP antenna module in the substrate processing apparatus of FIG. 1. [Figure 3] It is a perspective view showing a part of the ICP antenna module shown in FIG. 2. [Figure 4A] It is a partially exploded perspective view showing the configuration of an antenna coil in the ICP antenna module shown in FIG. 3. [Figure 4B] It is a partially exploded perspective view showing the configuration of a phase change circuit section in the ICP antenna module shown in FIG. 3. [Figure 4C] It is an exploded perspective view of the phase change circuit section shown in FIG. 4B. [[ID=2M]] [Figure 5] It is a plan view of the ICP antenna module shown in FIG. 2. [Figure 6] It is a circuit diagram of an ICP antenna module according to the present invention.

Embodiments for Carrying Out the Invention

[0021] <00C0100>Hereinafter, a substrate processing apparatus according to the present invention and an ICP antenna module used therein will be described with reference to the accompanying drawings.

[0022] As shown in FIGS. 1 to 6, the antenna module according to the present invention is provided in a substrate processing apparatus that performs substrate processing using plasma, and has a configuration for forming an induction electric field. A first antenna coil section 110 having one end 111 connected to a matcher 92, a second antenna coil section 120 having the other end 122 grounded, one end connected to the other end 112 of the first antenna coil section 110, and the other end connected to one end 121 of the second antenna coil section 120, and a phase change circuit section 300 that changes the phase of the first current with a second current having a phase opposite to that of the first current flowing through the first antenna coil section 110. It is characterized by including.

[0023] The first antenna coil section 110 has one end 111 connected to the matcher 92 and the other end connected to one end of the phase change circuit section 300, and various configurations are possible.

[0024] The second antenna coil section 120 has its other end 122 grounded and one end connected to the other end of the phase change circuit section 300, and various configurations are possible.

[0025] In particular, rather than the first antenna coil section 110 and the second antenna coil section 120 being provided independently of each other, as shown in Figures 2 to 6, one end 111 and the other end 112 of the first antenna coil section 110 are arranged opposite each other to one end 121 and the other end 122 of the second antenna coil section 120, and the coils 113 and 123 are wound in the same direction with a vertical gap between them.

[0026] In particular, the first antenna coil section 110 and the second antenna coil section 120 may have the same helical shape with the same center and radius.

[0027] Specifically, the first antenna coil section 110 and the second antenna coil section 120 may have a helical structure with the same center and radius, and may be formed as coils with the same pitch both vertically and horizontally.

[0028] Furthermore, both ends of the coils 113 and 123 may be provided with coupling structures for coupling with the power supply application member 821, the phase change circuit section 300, and the grounding member, as described later.

[0029] On the other hand, the first antenna coil section 110 may be connected to a power supply member 821 connected to a matcher 92 connected to an RF generator 91 in a variety of configurations.

[0030] As an example, considering that the first antenna coil portion 110 has a helical structure, one end 111 of the first antenna coil portion 110 can be connected to a power supply application member 821 that extends in the direction of the helical center forming the antenna coil portion 110.

[0031] In this case, the power supply application member 821 may be provided penetrating the shielding housing 710, and is electrically insulated from the shielding housing 710 by the insulating member 831.

[0032] Furthermore, if the ICP antenna module 30 according to the present invention further includes an outer antenna section 200 as described below, a branching member 822 is connected for electrical connection with the outer antenna section 200.

[0033] The branching member 822 is a member that is coupled to the power supply application member 821 for electrical connection with the outer antenna section 200, and can be configured in various ways, such as being configured in a "-" shape that crosses the center of the first antenna coil section 110, depending on the number and structure of the outer antenna sections 200.

[0034] On the other hand, the other end of the second antenna coil section 120 is grounded according to various structures.

[0035] As an example, the other end of the second antenna coil section 120 extends upward at a distance from the outer circumference of the spiral structure at the lowest end of the spiral structure, and is then connected to the shielding housing 710 described later and grounded.

[0036] At this time, the other end of the second antenna coil section 120 is connected to the shielding housing 710 by a separate connecting wire rod.

[0037] On the other hand, it is necessary to enlarge the planar size of the region where the induced electric field is formed by the first antenna coil section 110 and the second antenna coil section 120.

[0038] Therefore, the ICP antenna module 3- according to the present invention further includes one or more outer antenna sections 200 that have an outer spiral shape and a radius larger than the radius of the first antenna coil section 110 and the second antenna coil section 120.

[0039] The one or more outer antenna sections 200 have an outer spiral shape with a radius larger than the radius of the first antenna coil section 110 and the second antenna coil section 120, and various configurations are possible.

[0040] As an example, the outer antenna section 200 includes n outer antenna coils 210, 220 arranged such that the positions of one end of each coil have a phase difference of 360° / n (where n is a natural number of 2 or more) along the circumferential direction.

[0041] More specifically, the outer antenna coils 210 and 220 may include first antenna coil members 211 and 221, one end of which is connected to a branch power supply application member 823 and having a first inscribed angle θ1; second antenna coil members 212 and 222, one end of which is connected to the other end of the first antenna coil members 211 and 221, which are positioned lower than the first antenna coil members 211 and 221 and having a second inscribed angle θ2; and third antenna coil members 213 and 223, one end of which is connected to the other end of the second antenna coil members 212 and 222, which are positioned higher than the second antenna coil members 212 and 222 and having a third inscribed angle θ3.

[0042] The first antenna coil members 211, 221, the second antenna coil members 212, 222, and the third antenna coil members 213, 223 are antenna members that have an outer spiral shape with a radius larger than the radius of the first antenna coil section 110 and the second antenna coil section 120, and may be coil-shaped or, as shown in Figures 2 to 5, composed of plate-shaped members.

[0043] Furthermore, the first inscribed angle θ1, the second inscribed angle θ2, and the third inscribed angle θ3 can be set in various ways depending on the number of outer antenna coils 210 and 220 installed.

[0044] As an example, the outer antenna coils 210 and 220 may be arranged in pairs, similar to the first antenna coil section 110 and the second antenna coil section 120.

[0045] Furthermore, the sum of the first inscribed angle θ1, the second inscribed angle θ2, and the third inscribed angle θ3 can be 360° / m (where m is a natural number greater than or equal to 1).

[0046] On the other hand, in one embodiment, the first inscribed angle θ1, the second inscribed angle θ2, and the third inscribed angle θ3 may have inscribed angles of 90°, 90°, and 180°, respectively.

[0047] Furthermore, the first antenna coil members 211, 221 and the third antenna coil members 213, 223 are provided at the same height from the upper surface of the dielectric window 20, which will be described later, and the second antenna coil members 212, 222 may be positioned lower than the first antenna coil members 211, 221 and the third antenna coil members 213, 223.

[0048] Furthermore, for ease of assembly, the first antenna coil members 211, 221, the second antenna coil members 212, 222, and the third antenna coil members 213, 223 are each made of metal plate-shaped members and can be assembled with bolts using conductive members interposed between them.

[0049] Furthermore, the first antenna coil members 211 and 221 are connected by the branching member 822 and the branching power supply application member 823 described above.

[0050] The branch power supply application member 823 is a metal member with one end connected to the branch member 822 and the other end connected to the first antenna coil members 211 and 221, and may have various structures such as a rod.

[0051] On the other hand, the third antenna coil members 213 and 223 may be grounded in various structures by separate conductive members.

[0052] As an example, the third antenna coil members 213 and 223 can be connected to and grounded by a grounding member 824 that connects to the shielding housing 710.

[0053] The grounding member 824 has one end connected to the other end of the third antenna coil members 213 and 223, and the other end connected to the shielding housing 710, and can be configured in various ways, such as a rod shape.

[0054] In this case, the grounding member 824 may be a rod structure and may be provided parallel to the branch power supply application member 823.

[0055] The phase change circuit section 300 has one end connected to the other end 112 of the first antenna coil section 110 and the other end connected to one end 121 of the second antenna coil section 120, and is configured to change the phase of the first current with a second current having the opposite phase to the first current flowing through the first antenna coil section 110, and various configurations are possible.

[0056] The phase shift circuit section 300 can be configured in various ways, such as by combining capacitors, reactances, etc., based on power distribution and phase difference between the first antenna coil section 110 and the second antenna coil section 120.

[0057] As an example, the antenna includes a first capacitor 310 connecting the other end 112 of the first antenna coil section 110 and one end 121 of the second antenna coil section 120, and a second capacitor 320 and a third capacitor 330 connected in parallel with the first capacitor 310 and connected in series between the other end 112 of the first antenna coil section 110 and one end 121 of the second antenna coil section 120, wherein the connecting conductive member 891 connecting the second capacitor 320 and the third capacitor 330 is grounded by a grounding conductive member 824.

[0058] The first capacitor 310, the second capacitor 320, and the third capacitor 330 are characterized by changing the phase of the first current with a second current having the opposite phase to the first current flowing through the first antenna coil section 110, and may have appropriate capacitance values ​​such that the first current and the second current have a preset phase difference, for example, a phase difference of 180°.

[0059] Furthermore, the first capacitor 310, the second capacitor 320, and the third capacitor 330 can be variable elements with variable capacitance values.

[0060] On the other hand, the first capacitor 310 and the second capacitor 320 are connected to a first conductive member 893 connected to the other end 112 of the first antenna coil section 110, and the other end of the third capacitor 330, one end of which is connected to the connecting conductive member 891, and the other end of the third conductive member 895, one end of which is connected to the other end of the first capacitor 310, are connected by a second conductive member 894 connected to one end 121 of the second antenna coil section 120.

[0061] The first conductive member 893, the second conductive member 894, the third conductive member 895, and the connecting conductive member 891 are configured to electrically connect the first antenna coil section 110, the second antenna coil section 120, the first capacitor 310, the second capacitor 320, and the third capacitor 330 according to the circuit configuration, and can be made of a rigid metal plate material so as to simultaneously support the first capacitor 310, the second capacitor 320, and the third capacitor 330.

[0062] In particular, the first conductive member 893, the second conductive member 894, the third conductive member 895, and the connecting conductive member 891 can be formed by bending a portion of them so that the parts connected to the first capacitor 310, the second capacitor 320, and the third capacitor 330 are flat plate materials and are connected and arranged vertically overall.

[0063] Specifically, the first conductive member 893 is not only connected to the other end 112 of the first antenna coil portion 110, but also to one end of the first capacitor 310 and the second capacitor 320, and can be made of a flat plate material.

[0064] Furthermore, one end is provided with a coil connection portion 893a for connecting to the other end 112 of the first antenna coil portion 110.

[0065] On the other hand, the third capacitor 330 is connected in series by the aforementioned connecting conductive member 891, and the connecting conductive member 891 is made of a "U" shaped metal plate so that one end is connected to the other end of the second capacitor 320 and one end of the third capacitor 330.

[0066] On the other hand, the connecting conductive member 891 is grounded by the grounding conductive member 824, similar to the equivalent circuit shown in Figure 6.

[0067] The grounding conductive member 824 has one end connected to the connecting conductive member 891 and the other end grounded, thereby enabling the connecting conductive member 891 to be grounded. In particular, the grounding conductive member 824 can be grounded by connecting it to the grounded shielding housing 710.

[0068] Specifically, it can be made of a metal plate that has been bent multiple times such that one end is in contact with and bonded to the surface of the metal plate that forms the connecting conductive member 891, and the other end is in contact with and bonded to the shielding housing 710.

[0069] The second conductive member 894 is connected to the other end of the third conductive member 895 and the other end of the third capacitor 330, and is also connected to one end 121 of the second antenna coil section 120, allowing for various configurations.

[0070] As an example, the second conductive member 894 may have a shape similar to or the same as the first conductive member 893, and can be made of a flat plate material to which the other end of the third conductive member 895 and the other end of the third capacitor 330 are connected.

[0071] Furthermore, one end is provided with a coil connection portion 894a for connecting to one end 121 of the second antenna coil portion 120.

[0072] The third conductive member 895 has one end connected to the other end of the first capacitor 310 and the other end connected to the second conductive member 894, and can be made of a metal plate that has been folded multiple times.

[0073] In summary, the connecting conductive member 891, the first conductive member 893, the second conductive member 894, and the third conductive member 895 can be formed from a metal plate that has been bent once or more to match the installation position.

[0074] Figure 6 is a conceptual diagram showing the equivalent circuit of the ICP antenna module according to the present invention.

[0075] On the other hand, the ICP antenna module according to the present invention having the above-described configuration may be covered by a shielding housing 710 for shielding against induced electric fields.

[0076] The shielding housing 710 is configured to cover the first antenna coil section 110, the second antenna coil section 120, and the phase change circuit section 300 in order to shield the induced electric field. In particular, any configuration and structure that can block the leakage of the induced electric field formed by the first antenna coil section 110 and the second antenna coil section 120 to the surroundings is acceptable.

[0077] With the above-described configuration, the substrate processing apparatus and the ICP antenna module used therein, by comprising a pair of coils wound in opposite directions, can improve the uniformity of the plasma and ultimately significantly improve the uniformity of the substrate processing.

[0078] On the other hand, the ICP antenna module 30 according to the present invention is capable of forming a uniform induced electric field and can be applied to any structure that uses an induced electric field.

[0079] As an example, the ICP antenna module 30 according to the present invention can be applied as an antenna module in a substrate processing apparatus that includes a chamber body 10 with an opening at the top, a substrate support base 12 provided on the chamber body 10 on which a substrate 1 is placed, a dielectric window 20 coupled to the upper opening of the chamber body 10 and forming a sealed processing space S, and an ICP antenna module 30 provided above the dielectric window 20 and forming an induced electric field.

[0080] The above describes only some preferred embodiments that can be implemented by the present invention. As is well known, the scope of the present invention should not be interpreted as being limited to the embodiments described above. The technical ideas and fundamental technical concepts of the present invention described above are all included within the scope of the present invention. [Explanation of Symbols]

[0081] 10 Chamber body 20 Dielectric window 30 ICP Antenna Modules 110 First antenna coil section 120 Second antenna coil section 300 Phase shift circuit section

Claims

1. A first antenna coil section, one end of which is connected to a matcher, The second antenna coil section, whose other end is grounded, An ICP antenna module characterized by including a phase change circuit section, one end of which is connected to the other end of the first antenna coil section and the other end of which is connected to one end of the second antenna coil section, and which changes the phase of the first current with a second current having the opposite phase to the first current flowing through the first antenna coil section.

2. The first antenna coil section and the second antenna coil section are The ICP antenna module according to claim 1, characterized in that one end and the other end of the first antenna coil section are arranged opposite to one end and the other end of the second antenna coil section, and are wound in the same direction with vertical spacing between them.

3. The ICP antenna module according to claim 2, characterized in that the first antenna coil section and the second antenna coil section have the same center and radius in a helical shape.

4. The ICP antenna module according to claim 2, further comprising one or more outer antenna sections having an outer spiral shape with a radius larger than the radius of the first antenna coil section and the second antenna coil section.

5. The aforementioned outer antenna section is The ICP antenna module according to claim 4, characterized in that it includes n outer antenna coils arranged such that the position of one end of each coil has a phase difference of 360° / n (where n is a natural number of 2 or more) along the circumferential direction.

6. The aforementioned outer antenna coil is One end is connected to a branched power supply application member, and a first antenna coil member having a first circular angle, A second antenna coil member is provided, with one end connected to the other end of the first antenna coil member, positioned lower than the first antenna coil member, and having a second inscribed angle. A third antenna coil member is included, one end of which is connected to the other end of the second antenna coil member, is positioned higher than the second antenna coil member, and has a third inscribed angle. The ICP antenna module according to claim 5, characterized in that the sum of the first inscribed angle, the second inscribed angle, and the third inscribed angle is 360°.

7. The aforementioned phase shift circuit section is A first capacitor connecting the other end of the first antenna coil section and one end of the second antenna coil section, It includes a second capacitor and a third capacitor connected in parallel with the first capacitor and connected in series between the other end of the first antenna coil and one end of the second antenna coil, The ICP antenna module according to any one of claims 1 to 6, characterized in that the connecting conductive member connecting the second capacitor and the third capacitor is grounded by a grounding conductive member.

8. The first capacitor and the second capacitor are It is connected to the first conductive member connected to the other end of the first antenna coil section, The ICP antenna module according to claim 7, characterized in that the other end of a third capacitor, one end of which is connected to the connecting conductive member, and the other end of a third conductive member, one end of which is connected to the other end of the first capacitor, are connected by a second conductive member connected to one end of the second antenna coil portion.

9. The ICP antenna module according to claim 8, characterized in that the connecting conductive member, the first conductive member, the second conductive member, and the third conductive member are formed from a metal plate material.

10. The ICP antenna module according to any one of claims 1 to 6, characterized in that one end of the first antenna coil portion is connected to a power supply application member that extends in the direction of the spiral central portion forming the first antenna coil portion.

11. The chamber body has an opening at the top, The chamber body is provided with a substrate support base on which the substrate is placed, A dielectric window is coupled to the upper opening of the chamber body and forms a sealed processing space, A substrate processing apparatus including an ICP antenna module provided above the dielectric window and forming an induced electric field, The substrate processing apparatus is characterized in that the ICP antenna module is the antenna module described in any one of claims 1 to 6.

12. The aforementioned phase shift circuit section is A first capacitor connecting the other end of the first antenna coil section and one end of the second antenna coil section, It includes a second capacitor and a third capacitor that are connected in parallel with the first capacitor and connected in series between the other end of the first antenna coil and one end of the second antenna coil, The substrate processing apparatus according to claim 11, characterized in that the connecting conductive member connecting the second capacitor and the third capacitor is grounded by a grounding conductive member.

13. The first capacitor and the second capacitor are It is connected to the first conductive member connected to the other end of the first antenna coil section, The substrate processing apparatus according to claim 12, characterized in that the other end of a third capacitor, one end of which is connected to the connecting conductive member, and the other end of a third conductive member, one end of which is connected to the other end of the first capacitor, are connected by a second conductive member connected to one end of the second antenna coil portion.

14. The substrate processing apparatus according to claim 13, characterized in that the connecting conductive member, the first conductive member, the second conductive member, and the third conductive member are formed from a metal plate material.

15. The substrate processing apparatus according to claim 11, characterized in that one end of the first antenna coil portion is connected to a power supply application member that extends in the direction of the spiral central portion forming the first antenna coil portion.

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