Optical scanning device

Abstract

One example is suppressing unwanted vibrations in the frame. [Solution] The first resin body (310) is provided on at least a portion of the first frame (210). The first resin body (310) covers at least a portion of the surface of the first frame (210) on the positive side in the third direction (Z), at least a portion of the surface of the first frame (210) on the negative side in the third direction (Z), at least a portion of the inner edge of the first frame (210) on the side perpendicular to the third direction (Z), and at least a portion of the outer edge of the first frame (210) on the side perpendicular to the third direction (Z).

Description

Technical Field

[0001] The present invention relates to an optical scanning device and a sensor device.

Background Art

[0002] In recent years, various optical scanning devices have been developed. The optical scanning device includes a movable reflector that reflects light emitted from a light-emitting element such as a laser diode (LD). The movable reflector may be formed by processing a semiconductor substrate such as a silicon-on-insulator (SOI) substrate using semiconductor manufacturing technology. On the other hand, for example, as described in Patent Document 1, a metal may be processed to form a movable reflector. Further, as described in Patent Document 1, a metal may be processed to form a frame and a torsion bar. The frame is provided in at least a part of the region surrounding the movable reflector. The torsion bar is connected to the movable reflector and the frame.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] For example, as described in Patent Document 1, a metal may be processed to form a movable reflector, a frame, and a torsion bar. However, in this case, due to various conditions such as the rotational movement of the movable reflector, the single vibration of the movable reflector, the load of the movable reflector, and the thermal stress of at least a part of the movable reflector, the frame, and the torsion bar, distortion such as plastic distortion and elastic distortion may occur in the frame. When distortion occurs in the frame, unnecessary vibration may occur in the frame.

[0005] As an example of the problems to be solved by the present invention, suppressing unnecessary vibration of the frame can be cited. [Means for solving the problem]

[0006] The first invention is, A movable reflector, A first metal frame located in at least a portion of the area surrounding the movable reflector, A first torsion bar made of metal is connected to the movable reflector and the first frame, A first resin body provided on at least a portion of the first frame, An optical scanning device equipped with [a specific feature].

[0007] The second invention is, The optical scanning device and, Light-emitting element and A photodetector that detects light emitted from the light-emitting element, reflected by the movable reflector, and reflected or scattered by an object located outside the optical scanning device, A sensor device equipped with [a certain feature]. [Brief explanation of the drawing]

[0008] [Figure 1] This is a perspective view of the optical scanning device according to the embodiment, as seen from the side where the movable reflector is located. [Figure 2] This is a perspective view of the optical scanning device according to the embodiment, seen from the opposite side of the side where the movable reflector is located. [Figure 3] This is a side view of the optical scanning device according to the embodiment, viewed from a direction parallel to the rotation axis of the movable reflector. [Figure 4] This is a side view of the optical scanning device according to the embodiment, viewed from a direction parallel to the rotation axis of the first frame. [Figure 5] This is a cross-sectional view AA in Figure 3. [Figure 6] This figure illustrates an example of a method for manufacturing an optical scanning device according to an embodiment. [Figure 7] This figure illustrates an example of a method for manufacturing an optical scanning device according to an embodiment. [Figure 8] This is a perspective view of a modified optical scanning device. [Figure 9] This diagram shows the configuration of the sensor device according to the embodiment. [Modes for carrying out the invention]

[0009] Embodiments, modifications, and examples of the present invention will be described below with reference to the drawings. In all drawings, similar components are denoted by the same reference numerals, and their descriptions are omitted where appropriate.

[0010] Figure 1 is a perspective view of the optical scanning device 10 according to the embodiment, viewed from the side where the movable reflector 100 is located. Figure 2 is a perspective view of the optical scanning device 10 according to the embodiment, viewed from the opposite side of where the movable reflector 100 is located. Figure 3 is a side view of the optical scanning device 10 according to the embodiment, viewed from a direction parallel to the rotation axis of the movable reflector 100. Figure 4 is a side view of the optical scanning device 10 according to the embodiment, viewed from a direction parallel to the rotation axis of the first frame 210. Figure 5 is a cross-sectional view of AA in Figure 3.

[0011] In Figures 1 to 5, the arrows indicating the first direction X, the second direction Y, or the third direction Z indicate that the direction from the base to the tip of the arrow is the positive direction of the direction indicated by the arrow, and the direction from the tip to the base of the arrow is the negative direction of the direction indicated by the arrow. In Figures 3 and 4, the white circles with black dots indicating the first direction X or the second direction Y indicate that the direction from the back of the page to the front of the page is the positive direction of the direction indicated by the white circle, and the direction from the front of the page to the back of the page is the negative direction of the direction indicated by the white circle. In Figure 5, the white circle with an X indicating the third direction Z indicates that the direction from the front of the page to the back of the page is the positive direction of the direction indicated by the white circle, and the direction from the back of the page to the front of the page is the negative direction of the direction indicated by the white circle.

[0012] The first direction X indicates a direction parallel to the rotation axis of the movable reflector 100 when the movable reflector 100 rotates with respect to the first frame body 210 using the first torsion bar 220 as the rotation axis. The positive direction of the first direction X is parallel to the direction from the second bar 224 to the first bar 222, which will be described later. The negative direction of the first direction X is parallel to the direction from the first bar 222 to the second bar 224. The second direction Y is orthogonal to the first direction X. The second direction Y indicates a direction parallel to the rotation axis of the first frame body 210 when the first frame body 210 rotates with respect to the second frame body 230 using the second torsion bar 240 as the rotation axis. The positive direction of the second direction Y is parallel to the direction from the fourth bar 244 to the third bar 242, which will be described later. The negative direction of the second direction Y is parallel to the direction from the third bar 242 to the fourth bar 244. The third direction Z is orthogonal to both the first direction X and the second direction Y. The positive direction of the third direction Z is the direction from the side where the reflecting surface 112 of the movable reflector 100 is located to the opposite side of the side where the reflecting surface 112 of the movable reflector 100 is located. The negative direction of the third direction Z is the direction from the direction of the side where the reflecting surface 112 of the movable reflector 100 is located to the side where the reflecting surface 112 of the movable reflector 100 is located.

[0013] The optical scanning device 10 includes a movable reflector 100, a first frame body 210, a pair of first torsion bars 220, a second frame body 230, a pair of second torsion bars 240, a first resin body 310, a second resin body 320, a first magnet 410, two second magnets 420, a first light emitting element 500, and a first light detection element 600. The pair of first torsion bars 220 has a first bar 222 and a second bar 224. The pair of second torsion bars 240 has a third bar 242 and a fourth bar 244.

[0014] As shown in FIG. 5, the movable reflector 100 has a reflector 110, a first support portion 252, a second support portion 254, and a resin stage 350.

[0015] In this embodiment, the reflector 110 has a disk shape with a thickness in the third direction Z. The reflector 110 has a reflecting surface 112. The reflecting surface 112 is a flat surface directed in the positive direction of the third direction Z. The shape of the movable reflector 100 is not limited to the shape according to this embodiment.

[0016] The first support portion 252 is made of metal. The first support portion 252 is connected to the end portion in the negative direction of the first direction X of the first bar 222. The first support portion 252 is located on the positive direction side of the first direction X with respect to the center of the movable reflector 100 in the first direction X.

[0017] The second support portion 254 is made of metal. The second support portion 254 is connected to the end portion in the positive direction of the first direction X of the second bar 224. The second support portion 254 is located on the negative direction side of the first direction X with respect to the center of the movable reflector 100 in the first direction X. In this embodiment, the second support portion 254 is arranged symmetrically with the first support portion 252 with respect to the central axis passing through the center of the movable reflector 100 in the third direction Z.

[0018] The resin stage 350 is provided on at least a part of the first support portion 252 and at least a part of the second support portion 254. Specifically, the portion of the resin stage 350 located on the negative direction side of the third direction Z of the first support portion 252 and the second support portion 254 covers at least a part of the surface on the negative direction side of the third direction Z of the first support portion 252 and the second support portion 254. Also, the portion of the resin stage 350 located on the positive direction side of the third direction Z of the first support portion 252 and the second support portion 254 covers at least a part of the surface on the positive direction side of the third direction Z of the first support portion 252 and the second support portion 254. Further, the portion of the resin stage 350 surrounding the first support portion 252 and the second support portion 254 in the direction perpendicular to the third direction Z covers at least a part of the outer edge directed in the direction perpendicular to the third direction Z of the first support portion 252 and the second support portion 254. <00001​As shown in Figure 7, which will be described later, three support protrusions 352 are provided on the positive side of the third direction Z of the resin stage 350. The reflector 110 is placed on the three support protrusions 352.

[0020] According to this embodiment, the accuracy of mounting the reflector 110 can be improved compared to the case where the resin stage 350 is not provided on the first support portion 252 and the second support portion 254. Specifically, when the resin stage 350 is not provided, warping may occur in the first support portion 252 and the second support portion 254. In contrast, when the resin stage 350 is provided, warping of the first support portion 252 and the second support portion 254 can be suppressed. Also, burrs may be present on the first support portion 252 and the second support portion 254. In contrast, when the resin stage 350 is provided, the burrs on the first support portion 252 and the second support portion 254 can be covered by the resin stage 350.

[0021] Furthermore, in this embodiment, the resin stage 350 can function as a guide member for determining the mounting positions of the first magnet 410 and the first photodetector 600. Therefore, compared to the case where the resin stage 350 is not provided on the first support portion 252 and the second support portion 254, the first magnet 410 and the first photodetector 600 can be installed more easily and with greater precision.

[0022] Furthermore, according to this embodiment, the first support portion 252 and the second support portion 254 can be physically connected by the resin stage 350 while being electrically insulated from each other. If the first support portion 252 and the second support portion 254 are in communication and electrically connected, then, as will be described later, even if the anode and cathode of the first photodetector 600 are electrically connected to the first support portion 252 and the second support portion 254, current cannot be passed through the first photodetector 600. In contrast, in this embodiment, the anode and cathode of the first photodetector 600 can be electrically connected to the first support portion 252 and the second support portion 254, allowing current to pass through the first photodetector 600.

[0023] The first frame 210 is made of metal. The first frame 210 is located in at least a portion of the region surrounding the movable reflector 100 in a direction perpendicular to the third direction Z.

[0024] The first bar 222 is made of metal. As shown in Figure 5, the first bar 222 extends in the first direction X between the outer edge of the positive end of the first support portion 252 in the first direction X and the inner edge of the positive end of the first frame 210 in the first direction X. One end of the first bar 222 in the negative direction of the first direction X is connected to the outer edge of the positive end of the first support portion 252 in the first direction X. The other end of the first bar 222 in the positive direction of the first direction X is connected to the inner edge of the positive end of the first frame 210 in the first direction X.

[0025] The second bar 224 is made of metal. As shown in Figure 5, the second bar 224 extends in the first direction X between the outer edge of the negative end of the second support portion 254 in the first direction X and the inner edge of the negative end of the first frame 210 in the first direction X. One end of the second bar 224 in the positive direction X is connected to the outer edge of the negative end of the second support portion 254 in the first direction X. The other end of the second bar 224 in the negative direction X is connected to the inner edge of the negative end of the first frame 210 in the first direction X.

[0026] As shown in Figure 2, a first magnet 410 is attached to the negative side of the third direction Z of the movable reflector 100. The first magnet 410 is located on the negative side of the first direction X with respect to the center of the first direction X and second direction Y of the movable reflector 100. The first magnet 410 receives magnetic flux emitted from a magnetic circuit (not shown), causing the movable reflector 100 to oscillate with respect to the first frame 210 using the first torsion bar 220 as the axis of rotation. In this embodiment, the first torsion bar 220 serves as the high-speed drive shaft.

[0027] The second frame 230 is made of metal. The second frame 230 is located in at least a portion of the region that surrounds the first frame 210 in a direction perpendicular to the third direction Z.

[0028] In this embodiment, the shape of the second frame 230 is substantially rectangular, having a pair of long sides extending in the first direction X and a pair of short sides extending in the second direction Y. The shape of the second frame 230 is not limited to the shape in this embodiment.

[0029] The third bar 242 is made of metal. As shown in Figure 5, the third bar 242 extends in the second direction Y between the outer edge of the center of the first direction X in the positive second direction Y portion of the first frame 210 and the inner edge of the center of the first direction X in the positive second direction Y portion of the second frame 230. One end of the third bar 242 in the negative second direction Y is connected to the outer edge of the center of the first direction X in the positive second direction Y portion of the first frame 210. The other end of the third bar 242 in the positive second direction Y is connected to the inner edge of the center of the first direction X in the positive second direction Y portion of the second frame 230.

[0030] The fourth bar 244 is made of metal. As shown in Figure 5, the fourth bar 244 extends in the second direction Y between the outer edge of the center of the negative portion of the second direction Y of the first frame 210 and the inner edge of the center of the negative portion of the second direction Y of the second frame 230. One end of the third bar 242 in the positive direction Y is connected to the outer edge of the center of the negative portion of the second direction Y of the first frame 210. The other end of the third bar 242 in the negative direction Y is connected to the inner edge of the center of the negative portion of the second direction Y of the second frame 230.

[0031] Two second magnets 420 are attached to the negative side of the first frame 210 in the third direction Z. One of the two second magnets 420 is located at the positive end of the first frame 210 in the first direction X. The other of the two second magnets 420 is located at the negative end of the first frame 210 in the first direction X. The two second magnets 420 receive magnetic flux emitted from a magnetic circuit (not shown), causing the first frame 210 to oscillate relative to the second frame 230 with the second torsion bar 240 as the axis of rotation. In this embodiment, the second torsion bar 240 is a low-speed drive shaft.

[0032] In this embodiment, the width in the second direction Y of the second magnet 420 located at the positive end of the first direction X of the first frame 210 is substantially equal to the width in the second direction Y of the positive end of the first frame 210. For example, the width in the second direction Y of the second magnet 420 located at the positive end of the first direction X of the first frame 210 is 95% to 105% of the width in the second direction Y of the positive end of the first frame 210. Magnetic circuits, such as drive coils (not shown), are arranged on both sides of the second direction Y of the positive end of the first direction X of the first frame 210. Therefore, according to this embodiment, the magnetic circuits and the second magnet 420 can be brought closer together compared to the case where the width in the second direction Y of the second magnet 420 is shorter than the width in the second direction Y of the positive end of the first frame 210. Furthermore, according to this embodiment, the weight of the second magnet 420 can be reduced compared to the case where the width of the second magnet 420 in the second direction Y is longer than the width of the end of the first frame 210 in the positive direction of the first direction X in the second direction Y. The width of the second magnet 420 in the second direction Y is not limited to the example described above. For example, the width of the second magnet 420 in the second direction Y may be longer than the width of the end of the first frame 210 in the positive direction of the first direction X in the second direction Y. In this case, it is possible to bring the magnetic circuit and the second magnet 420 closer together compared to the case where the width of the second magnet 420 in the second direction Y is less than or equal to the width of the end of the first frame 210 in the positive direction of the first direction X in the second direction Y.

[0033] The width in the second direction Y of the second magnet 420 located at the negative end of the first direction X of the first frame 210 is substantially equal to the width in the second direction Y of the negative end of the first frame 210, similar to the width in the second direction Y of the second magnet 420 located at the positive end of the first direction X of the first frame 210.

[0034] The positions in which the two second magnets 420 are provided are not limited to the positions in this embodiment. For example, the second magnet 420 located on the positive side of the first direction X may be located on the negative side of the first direction X from the positive end of the first frame 210 in the first direction X. In this case, the width of the second magnet 420 in the second direction Y may be substantially equal to the width of the portion of the first frame 210 to which the second magnet 420 is attached in the second direction Y.

[0035] The first resin body 310 is provided on at least a portion of the first frame 210. The first resin body 310 covers at least a portion of the surface of the first frame 210 on the positive side in the third direction Z, at least a portion of the surface of the first frame 210 on the negative side in the third direction Z, at least a portion of the inner edge of the first frame 210 on the side perpendicular to the third direction Z, and at least a portion of the outer edge of the first frame 210 on the side perpendicular to the third direction Z. In this embodiment, distortion of the first frame 210 can be suppressed compared to the case in which the first resin body 310 is not provided on the first frame 210.

[0036] In this embodiment, compared to the case where the first resin body 310 is not provided on the first frame 210, unwanted vibrations of the first frame 210 can be suppressed. Specifically, the material of the first frame 210 and the material of the first resin body 310 are different. Therefore, the resonant frequency of the first frame 210 and the resonant frequency of the first resin body 310 are different. As a result, compared to the case where the first resin body 310 is not provided, the resonant mode of the first frame 210, i.e., unwanted vibrations, can be damped.

[0037] Furthermore, in this embodiment, the first resin body 310 can function as a guide member for determining the mounting positions of the two second magnets 420. Therefore, compared to the case where the first resin body 310 is not provided on the first frame 210, the two second magnets 420 can be installed more easily and with greater precision.

[0038] The second resin body 320 is provided on at least a portion of the second frame 230. The second resin body 320 covers at least a portion of the positive side of the second frame 230 in the third direction Z, at least a portion of the negative side of the second frame 230 in the third direction Z, at least a portion of the inner edge of the second frame 230 in the direction perpendicular to the third direction Z, and at least a portion of the outer edge of the second frame 230 in the direction perpendicular to the third direction Z. In this embodiment, distortion of the second frame 230 can be suppressed compared to the case in which the second resin body 320 is not provided on the second frame 230. Therefore, in this embodiment, unwanted vibrations of the second frame 230 can be suppressed compared to the case in which the second resin body 320 is not provided on the second frame 230.

[0039] Next, with reference to Figure 5, the shape of the first frame 210 will be described in detail.

[0040] In this embodiment, the distance in the second direction Y between two parts of the first frame 210 that face each other in a direction parallel to the rotation axis of the first frame 210 decreases in at least one part of the first frame 210 as it moves away from the rotation axis in the positive and negative directions of the first direction X.

[0041] Specifically, the distance between the portions of the first frame 210 located on both sides of the reflector 110 in the second direction Y decreases along the width of the movable reflector 100 in the second direction Y as you move from the center of the reflector 110 in the first direction X toward the positive end of the movable reflector 100 in the first direction X and toward the negative end of the movable reflector 100 in the first direction X. The distance between the portions of the first frame 210 located on both sides of the first bar 222 in the second direction Y is constant from one end of the first bar 222 in the negative direction of the first direction X toward the other end of the first bar 222 in the positive direction of the first direction X. The distance between the portions of the first frame 210 located on both sides of the second bar 224 in the second direction Y is constant from one end of the second bar 224 in the positive direction of the first direction X toward the other end of the second bar 224 in the negative direction of the first direction X.

[0042] This embodiment is compared with the case where the distance between the two opposing parts of the first frame 210 in a direction parallel to the axis of rotation of the first frame 210 in the second direction Y is constant from the axis of rotation to the positive or negative end of the first direction X of the first frame 210. In this embodiment, compared to the case described above, it is permissible to increase the length of the first torsion bar 220 in the first direction X. Specifically, this is as follows: That is, it may be necessary to make the length of the first torsion bar 220 in the first direction X relatively long. On the other hand, the longer the length of the first torsion bar 220 in the first direction X, the longer the length of the first frame 210 in the first direction X. The longer the length of the first torsion bar 220 in the first direction X, the larger the moment of inertia of the first frame 210 rotating around the second torsion bar 240 as the axis of rotation. Furthermore, the moment of inertia increases as the mass of the positive end of the first frame 210 in the first direction X and the mass of the negative end of the first frame 210 in the first direction X increase. In this embodiment, compared to the case described above, the mass of the positive end of the first frame 210 in the first direction X and the mass of the negative end of the first frame 210 in the first direction X can be reduced. Therefore, in this embodiment, compared to the case described above, the length of the first torsion bar 220 in the first direction X to keep the moment of inertia below a certain value can be increased.

[0043] The shape of the first frame 210 is not limited to the shape according to this embodiment. For example, the distance in the second direction Y between the two parts of the first frame 210 that face each other in a direction parallel to the rotation axis of the first frame 210 may be constant from the rotation axis of the first frame 210 to the positive or negative end of the first direction X of the first frame 210.

[0044] Next, with reference to Figure 5, we will describe the four sets of first projections 210a, the four sets of second projections 230a, the two third projections 210b, the two fourth projections 230b, the two fifth projections 250c, and the two sixth projections 210c.

[0045] In this embodiment, each pair of first projections 210a includes two projections. Two pairs of first projections 210a are provided on the outer edge of the portion of the first frame 210 that surrounds the positive portion of the movable reflector 100 in the second direction Y in a direction perpendicular to the third direction Z. These two pairs of first projections 210a are located on both sides of the first direction X with respect to the center of the portion of the first frame 210 in that direction. The tip of each first projection 210a is exposed from the outer edge of the portion of the first resin body 310 that surrounds the positive portion of the movable reflector 100 in the second direction Y in a direction perpendicular to the third direction Z. Two other pairs of first projections 210a are provided on the outer edge of the portion of the first frame 210 that surrounds the negative portion of the movable reflector 100 in the second direction Y in a direction perpendicular to the third direction Z. These two pairs of first projections 210a are located on both sides of the first direction X with respect to the center of the portion of the first frame 210 in that direction X. The tip of each first projection 210a is exposed from the outer edge of the portion of the first resin body 310 that surrounds the portion of the movable reflector 100 in the negative direction of the second direction Y in a direction perpendicular to the third direction Z.

[0046] In this embodiment, each pair of second projections 230a includes two projections. Two pairs of second projections 230a are provided on the inner edge of the portion of the second frame 230 located on the positive side of the second direction Y relative to the first frame 210. These two pairs of second projections 230a are located on both sides of the first direction X with respect to the center of the portion of the second frame 230 in that direction. The tip of each second projection 230a is exposed from the inner edge of the portion of the second resin body 320 located on the positive side of the second direction Y relative to the first frame 210. Two pairs of second projections 230a are provided on the inner edge of the portion of the second frame 230 located on the negative side of the second direction Y relative to the first frame 210. These two pairs of second projections 230a are located on both sides of the first direction X with respect to the center of the portion of the second frame 230 in that direction. The tip of each second projection 230a is exposed from the inner edge of the portion of the second resin body 320 that is located on the negative side of the second direction Y relative to the first frame body 210.

[0047] A third projection 210b is provided on the outer edge of the positive end of the first frame 210 in the first direction X. This third projection 210b is exposed from the outer edge of the positive end of the first resin body 310 in the first direction X. Another third projection 210b is provided on the outer edge of the negative end of the first frame 210 in the first direction X. This third projection 210b is exposed from the outer edge of the negative end of the first resin body 310 in the first direction X.

[0048] A fourth projection 230b is provided on the inner edge of the center of the second direction Y of the portion of the second frame 230 located on the positive side of the first direction X relative to the first frame 210. This fourth projection 230b is exposed from the inner edge of the center of the second direction Y of the portion of the second resin body 320 located on the positive side of the first direction X relative to the first frame 210. Another fourth projection 230b is provided on the inner edge of the center of the second direction Y of the portion of the second frame 230 located on the negative side of the first direction X relative to the first frame 210. This fourth projection 230b is exposed from the inner edge of the center of the second direction Y of the portion of the second resin body 320 located on the negative side of the first direction X relative to the first frame 210.

[0049] A fifth projection 250c is provided at the negative end of the first support portion 252 in the first direction X. The tip of this fifth projection 250c is exposed from the outer edge of the resin stage 350 in the negative direction Y. Another fifth projection 250c is provided on the positive side of the first direction X of the second support portion 254. The tip of this fifth projection 250c is exposed from the outer edge of the resin stage 350 in the positive direction Y.

[0050] A sixth projection 210c is provided on the inner edge of the center of the first direction X of the portion of the first frame 210 that encloses the positive portion of the movable reflector 100 in the second direction Y in a direction perpendicular to the third direction Z. This sixth projection 210c is exposed from the inner edge of the center of the first direction X of the portion of the first resin body 310 that encloses the positive portion of the movable reflector 100 in the second direction Y in a direction perpendicular to the third direction Z. Another sixth projection 210c is provided on the inner edge of the center of the first direction X of the portion of the first frame 210 that encloses the negative portion of the movable reflector 100 in the second direction Y in a direction perpendicular to the third direction Z. This sixth projection 210c is exposed from the inner edge of the center of the first direction X of the portion of the first resin body 310 that encloses the negative portion of the movable reflector 100 in the second direction Y in a direction perpendicular to the third direction Z.

[0051] Some of these protrusions may be omitted. For example, the two third protrusions 210b and the two fourth protrusions 230b may be omitted. Also, the two fifth protrusions 250c and the two sixth protrusions 210c may be omitted.

[0052] Next, with reference to Figure 5, the first terminal 230d, the seventh projection 230e, the second terminal 230f, and the eighth projection 230g will be described.

[0053] A first terminal 230d is provided on the outer edge of the center of the first direction X of the portion of the second frame 230 that is located on the positive side of the second direction Y relative to the first frame 210. The tip of the first terminal 230d is exposed from the outer edge of the center of the first direction X of the portion of the second resin body 320 that is located on the positive side of the second direction Y relative to the first frame 210.

[0054] A seventh projection 230e is provided on the outer edge of the portion of the second frame 230 that is located on the positive side of the second direction Y relative to the first frame 210 and is located on the negative side of the first direction X from the center of the first direction X. The tip of the seventh projection 230e is exposed from the outer edge of the portion of the second resin body 320 that is located on the positive side of the second direction Y relative to the first frame 210 and is located on the negative side of the first direction X from the center of the first direction X.

[0055] A second terminal 230f is provided at the outer edge of the center in the first direction X of the portion of the second frame 230 located on the negative side of the second direction Y relative to the first frame 210. The tip of the second terminal 230f is exposed from the outer edge of the center in the first direction X of the portion of the second resin body 320 located on the negative side of the second direction Y relative to the first frame 210.

[0056] An eighth projection 230g is provided on the outer edge of the portion of the second frame 230 that is located on the negative side of the second direction Y relative to the first frame 210 and on the positive side of the first direction X from the center of the first direction X. The tip of the eighth projection 230g is exposed from the outer edge of the portion of the second resin body 320 that is located on the negative side of the second direction Y relative to the first frame 210 and on the positive side of the first direction X from the center of the first direction X.

[0057] Next, the two first division sections 212 and the two second division sections 232 will be described.

[0058] A first dividing portion 212 is provided on the positive side of the second direction Y of the rotation axis of the movable reflector 100 within the first frame 210. In this embodiment, this first dividing portion 212 is provided in the portion of the first frame 210 that surrounds the portion of the movable reflector 100 that is in the negative direction of the first direction X and in the positive direction of the second direction Y in a direction perpendicular to the third direction Z. Another first dividing portion 212 is provided on the negative side of the second direction Y of the rotation axis of the movable reflector 100 within the first frame 210. In this embodiment, this first dividing portion 212 is provided in the portion of the first frame 210 that surrounds the portion of the movable reflector 100 that is in the positive direction of the first direction X and in the negative direction of the second direction Y in a direction perpendicular to the third direction Z.

[0059] The provision of these two first dividing sections 212 prevents the first bar 222 and the second bar 224 from being electrically connected via the first frame 210.

[0060] A second dividing portion 232 is provided on the positive side of the first direction X of the rotation axis of the first frame 210 within the second frame 230. In this embodiment, this second dividing portion 232 is provided between the second terminal 230f and the eighth projection 230g. Another second dividing portion 232 is provided on the negative side of the first direction X of the rotation axis of the first frame 210 within the second frame 230. In this embodiment, this second dividing portion 232 is provided between the first terminal 230d and the seventh projection 230e.

[0061] The provision of these two second dividing sections 232 prevents the third bar 242 and the fourth bar 244 from being electrically connected via the second frame 230.

[0062] Next, with reference to Figure 5, the four first wide sections 310a, the two second wide sections 310b, and the two third wide sections 310c will be described.

[0063] A first wide portion 310a is provided in the portion of the first resin body 310 where the curvature of the first frame 210 changes. In this embodiment, the first wide portion 310a is provided on the outside of the outer edge of the first frame 210. As a result, the amount of resin in the portion of the first resin body 310 where the curvature of the first frame 210 changes is greater than the amount of resin in the portion of the first resin body 310 surrounding that portion. The portion of the first frame 210 where the curvature changes is more susceptible to greater stress on the first resin body 310 compared to the portion of the first frame 210 surrounding that portion. Therefore, according to this embodiment, the strength of the first resin body 310 can be improved compared to the case where the first wide portion 310a is not provided in the portion of the first resin body 310 where the curvature of the first frame 210 changes.

[0064] In this embodiment, one of the four first wide portions 310a is located between the portion of the first frame 210 that curves along the outer edge of the movable reflector 100 on the positive side of the first direction X and the positive side of the second direction Y, and the portion of the first bar 222 that extends linearly parallel to the first direction X on the positive side of the second direction Y. Another of the four first wide portions 310a is located between the portion of the first frame 210 that curves along the outer edge of the movable reflector 100 on the negative side of the first direction X and the positive side of the second direction Y, and the portion of the second bar 224 that extends linearly parallel to the first direction X on the positive side of the second direction Y. One of the four first wide sections 310a is located between the portion of the first frame 210 that curves along the outer edges of the movable reflector 100 on the negative side of the first direction X and the negative side of the second direction Y, and the portion of the second bar 224 that extends linearly parallel to the first direction X on the negative side of the second direction Y. One of the four first wide sections 310a is located between the portion of the first frame 210 that curves along the outer edges of the movable reflector 100 on the positive side of the first direction X and the negative side of the second direction Y, and the portion of the first bar 222 that extends linearly parallel to the first direction X on the negative side of the second direction Y.

[0065] The structure for which the amount of resin in the portion of the first resin body 310 where the curvature of the first frame 210 changes is greater than the amount of resin in the portion of the first resin body 310 surrounding that portion of the first frame 210 is not limited to this embodiment. For example, the thickness in the third direction Z of the portion of the first resin body 310 where the curvature of the first frame 210 changes may be made thicker than the thickness in the third direction Z of the portion of the first resin body 310 surrounding that portion of the first frame 210 is greater.

[0066] As shown in Figure 1, a first hole 312a is provided on the upper surface in the third direction Z of the first wide portion 310a, which is located on the positive side of the first direction X and the negative side of the second direction Y with respect to the center of the first direction X and the second direction Y of the first resin body 310. Another first hole 312a is provided on the upper surface in the third direction Z of the first wide portion 310a, which is located on the negative side of the first direction X and the negative side of the second direction Y with respect to the center of the first direction X and the second direction Y of the first resin body 310. The two first wide portions 310a with first holes 312a are provided as gates for injecting the resin that will form the first resin body 310 into the mold for molding the first resin body 310. Each first hole 312a remains as an injection port for injecting the resin.

[0067] In this embodiment, each first hole 312a does not overlap with the first frame 210 in the third direction Z. The gate into which the resin is injected is subjected to relatively large pressure within the entire first resin body 310. Therefore, if the first hole 312a overlaps with the first frame 210 in the third direction Z, the first frame 210 may deform due to the pressure of the resin. In contrast, according to this embodiment, deformation of the first frame 210 due to the pressure of the resin can be suppressed compared to the case in which the first hole 312a overlaps with the first frame 210 in the third direction Z. The position in which the first hole 312a is provided is not limited to the position in this embodiment. For example, the first hole 312a may overlap with the first frame 210 in the third direction Z.

[0068] In this embodiment, the two first holes 312a are arranged symmetrically with respect to the center of the first resin body 310 in the first direction X and the second direction Y.

[0069] Hereinafter, as necessary, the first hole 312a located on the positive side of the second direction Y of the two first holes 312a will be referred to as one of the first holes 312a. As necessary, the first hole 312a located on the negative side of the second direction Y of the two first holes 312a will be referred to as the other first hole 312a. As necessary, the portion of the first frame 210 located on the positive side of the second direction Y with respect to the center of the second direction Y of the first frame 210 will be referred to as one side portion of the first frame 210. As necessary, the portion of the first frame 210 located on the negative side of the second direction Y with respect to the center of the second direction Y of the first frame 210 will be referred to as the other side portion of the first frame 210. As necessary, the portion of the first frame 210 connected to the positive end of the first bar 222 in the first direction X will be referred to as the connection portion between the first frame 210 and the first bar 222. If necessary, the portion of the first frame 210 connected to the negative end of the second bar 224 in the first direction X is referred to as the connection portion between the first frame 210 and the second bar 224.

[0070] One of the first holes 312a is located offset from a portion of the first frame 210 that is equidistant in the circumferential direction from the connection portion between the first frame 210 and the first bar 222, and from the connection portion between the first frame 210 and the second bar 224. In this embodiment, the portion of the first frame 210 that is equidistant in the circumferential direction from the connection portion between the first frame 210 and the first bar 222, and from the connection portion between the first frame 210 and the second bar 224, is the center of the first direction X of the one side portion of the first frame 210.

[0071] The other first hole 312a is located offset from the portion of the other side of the first frame 210 that is equidistant in the circumferential direction from the connection portion of the first frame 210 and the first bar 222, and the connection portion of the first frame 210 and the second bar 224. In this embodiment, the portion of the other side of the first frame 210 that is equidistant in the circumferential direction from the connection portion of the first frame 210 and the first bar 222, and the connection portion of the first frame 210 and the second bar 224, is the center of the other side of the first frame 210 in the first direction X.

[0072] In this embodiment, when the resin forming the first resin body 310 is injected through the two first holes 312a, the weld of the resin can be formed in a portion different from the connection between the first frame 210 and the first bar 222, and in a portion different from the connection between the first frame 210 and the second bar 224. Therefore, compared to the case where the weld is formed at the connection between the first frame 210 and the first bar 222, and at the connection between the first frame 210 and the second bar 224, damage to the first resin body 310 can be suppressed.

[0073] As shown in Figure 1, the upper surface of the first wide portion 310a located on the negative side of the first direction X and the positive side of the second direction Y with respect to the center of the first direction X and the second direction Y of the first resin body 310 does not have a first hole 312a. The two first wide portions 310a without the first hole 312a are arranged symmetrically with respect to the center of the second direction Y of the first resin body 310 with respect to the two first wide portions 310a with the first hole 312a. Therefore, compared to the case where there are two first wide sections 310a with the first hole 312a instead of two first wide sections 310a without the first hole 312a, it is easier to achieve a level shape for the first resin body 310.

[0074] A second wide portion 310b is provided at the connection point between the positive end of the first frame 210 in the first direction X and the positive end of the first bar 222 in the first direction X. Another second wide portion 310b is provided at the connection point between the negative end of the first frame 210 in the first direction X and the negative end of the second bar 224 in the first direction X. As a result, the amount of resin in the connection point between the first frame 210 and the first torsion bar 220 is greater than the amount of resin in the area surrounding the connection point. The connection point between the first frame 210 and the first torsion bar 220 is more susceptible to greater stress on the first resin body 310 compared to the area surrounding the connection point. Therefore, according to this embodiment, the strength of the first resin body 310 can be improved compared to the case in which the second wide portion 310b is not provided at the connection between the first frame 210 and the first torsion bar 220 of the first resin body 310.

[0075] The structure for which the amount of resin in the connection portion between the first frame 210 and the first torsion bar 220 of the first resin body 310 is greater than the amount of resin in the area surrounding the connection portion of the first resin body 310 is not limited to this embodiment. For example, the thickness in the third direction Z at the connection portion between the first frame 210 and the first torsion bar 220 of the first resin body 310 may be made thicker than the thickness in the third direction Z in the area surrounding the connection portion of the first resin body 310.

[0076] A third wide portion 310c is provided at the connection point between the positive end of the first frame 210 in the second direction Y and the negative end of the third bar 242 in the second direction Y. Another third wide portion 310c is provided at the connection point between the negative end of the first frame 210 in the second direction Y and the positive end of the fourth bar 244 in the first direction X. As a result, the amount of resin at the connection point between the first frame 210 and the second torsion bar 240 is greater than the amount of resin around the connection point in the first resin body 310. The connection point between the first frame 210 and the second torsion bar 240 is more susceptible to greater stress on the first resin body 310 compared to the area around the connection point in the first frame 210. Therefore, according to this embodiment, the strength of the first resin body 310 can be improved compared to the case in which the third wide portion 310c is not provided at the connection between the first frame 210 and the second torsion bar 240 of the first resin body 310.

[0077] The structure for which the amount of resin in the connection portion between the first frame 210 and the second torsion bar 240 of the first resin body 310 is greater than the amount of resin in the area surrounding the connection portion of the first resin body 310 is not limited to this embodiment. For example, the thickness in the third direction Z at the connection portion between the first frame 210 and the second torsion bar 240 of the first resin body 310 may be made thicker than the thickness in the third direction Z in the area surrounding the connection portion of the first resin body 310.

[0078] Next, the two fourth wide sections 320a will be described with reference to Figures 1 and 5.

[0079] A fourth wide portion 320a is provided on the negative side of the first direction X and the positive side of the second direction Y with respect to the center of the first direction X and the second direction Y of the second resin body 320. Another fourth wide portion 320a is provided on the positive side of the first direction X and the negative side of the second direction Y of the second resin body 320. A second hole 322a is provided on the positive side of the third direction Z of each fourth wide portion 320a. In this embodiment, the fourth wide portion 320a is provided on the inner side of the inner edge of the first torsion bar 220. The fourth wide portion 320a is provided as a gate for injecting the resin that forms the second resin body 320 into the mold for molding the second resin body 320. Each second hole 322a remains as an injection port for injecting the resin.

[0080] In this embodiment, each second hole 322a does not overlap with the second frame 230 in the third direction Z. Therefore, for the same reasons as explained for the first hole 312a, deformation of the second frame 230 due to resin pressure can be suppressed compared to the case where the second hole 322a overlaps with the second frame 230 in the third direction Z. The position in which the second hole 322a is provided is not limited to the position in this embodiment. For example, the second hole 322a may overlap with the second frame 230 in the third direction Z.

[0081] In this embodiment, the two second holes 322a are arranged symmetrically with respect to the center of the second resin body 320 in the first direction X and the second direction Y.

[0082] Hereinafter, as necessary, the second hole 322a located on the positive side of the first direction X of the two second holes 322a will be referred to as one second hole 322a. As necessary, the second hole 322a located on the negative side of the first direction X of the two second holes 322a will be referred to as the other second hole 322a. As necessary, the portion of the second frame 230 located on the positive side of the first direction X with respect to the center of the second frame 230 will be referred to as one side portion of the second frame 230. As necessary, the portion of the second frame 230 located on the negative side of the first direction X with respect to the center of the second frame 230 will be referred to as the other side portion of the second frame 230. As necessary, the portion of the second frame 230 connected to the positive end of the third bar 242 in the second direction Y will be referred to as the connection portion between the second frame 230 and the third bar 242. If necessary, the portion of the second frame 230 connected to the negative end of the fourth bar 244 in the second direction Y is referred to as the connection portion between the second frame 230 and the fourth bar 244.

[0083] One of the second holes 322a is located offset from the portion of one side of the second frame 230 that is equidistant in the circumferential direction from the connection portion between the second frame 230 and the third bar 242, and the connection portion between the second frame 230 and the fourth bar 244. In this embodiment, the portion of one side of the second frame 230 that is equidistant in the circumferential direction from the connection portion between the second frame 230 and the third bar 242, and the connection portion between the second frame 230 and the fourth bar 244, is the center of the second direction Y of one side of the second frame 230.

[0084] The other second hole 322a is located offset from the portion of the other side of the second frame 230 that is equidistant in the circumferential direction from the connection portion between the second frame 230 and the third bar 242 and the connection portion between the second frame 230 and the fourth bar 244. In this embodiment, the portion of the other side of the second frame 230 that is equidistant in the circumferential direction from the connection portion between the second frame 230 and the third bar 242 and the connection portion between the second frame 230 and the fourth bar 244 is the center of the second direction Y of the other side of the second frame 230.

[0085] In this embodiment, when the resin forming the second resin body 320 is injected through the two second holes 322a, the weld of the resin can be formed in a portion different from the connection between the second frame body 230 and the third bar 242, and in a portion different from the connection between the second frame body 230 and the fourth bar 244. Therefore, compared to the case where the weld is formed at the connection between the second frame body 230 and the third bar 242, and at the connection between the second frame body 230 and the fourth bar 244, damage to the second resin body 320 can be suppressed.

[0086] Next, the first light-emitting element 500 will be described.

[0087] The first light-emitting element 500 is attached to the movable reflector 100 on the opposite side from the side where the reflective surface 112 is located. If the first light-emitting element 500 were attached to the reflective surface 112, the portion of the reflective surface 112 to which the first light-emitting element 500 is attached would not be able to reflect light. In contrast, according to this embodiment, the reflective surface 112 can be kept from being covered by the first light-emitting element 500.

[0088] One of the anodes and cathodes of the first light-emitting element 500 is electrically connected to at least a portion of the first bar 222 via the first support portion 252. The other of the anode and cathodes of the first light-emitting element 500 is electrically connected to at least a portion of the second bar 224 via the second support portion 254. We will consider the case where the anode of the first light-emitting element 500 is electrically connected to at least a portion of the first bar 222 via the first support portion 252, and the cathode of the first light-emitting element 500 is electrically connected to at least a portion of the second bar 224 via the second support portion 254. In this case, current can flow from the first terminal 230d to the second terminal 230f via the third bar 242, the portion of the first frame 210 located on the positive side of the first direction X and the positive side of the second direction Y with respect to the center of the first frame 210 in the first direction X and the second direction Y, the first bar 222, the first support portion 252, the first light-emitting element 500, the second support portion 254, the second bar 224, the portion of the first frame 210 located on the negative side of the first direction X and the negative side of the second direction Y with respect to the center of the first frame 210 in the first direction X and the second direction Y, and the fourth bar 244.

[0089] Next, the first photodetector element 600 will be described.

[0090] The first photodetector 600 is located on the negative side of the third direction Z relative to the first light-emitting element 500. The first photodetector 600 includes a first photodetector 612, a second photodetector 614, a third photodetector 616, and a fourth photodetector 618.

[0091] As shown in Figure 3, the first light detection unit 612 and the second light detection unit 614 are located on the positive side of the second direction Y with respect to the first virtual plane IP1. The third light detection unit 616 and the fourth light detection unit 618 are located on the negative side of the second direction Y with respect to the first virtual plane IP1. The first virtual plane IP1 passes through the rotation axis of the movable reflector 100 and is perpendicular to the reflective surface 112.

[0092] As shown in Figure 4, the second photodetector 614 and the third photodetector 616 are located on the negative side of the first direction X with respect to the second virtual plane IP2. The first photodetector 612 and the fourth photodetector 618 are located on the positive side of the first direction X with respect to the second virtual plane IP2. The second virtual plane IP2 passes through the rotation axis of the first frame 210 and is perpendicular to the reflective surface 112.

[0093] When the normal of the reflective surface 112 is parallel to the positive direction of the third direction Z, the center of the spot generated on the first photodetector 600 by the light emitted from the first light-emitting element 500 coincides with the intersection of the first virtual plane IP1 and the second virtual plane IP2 on the first photodetector 600. Also, when the normal of the reflective surface 112 is parallel to the positive direction of the third direction Z, the illumination area of ​​the first photodetector 612, the illumination area of ​​the second photodetector 614, the illumination area of ​​the third photodetector 616, and the illumination area of ​​the fourth photodetector 618 within the spot are equal to each other. The intensity of the signal generated on each photodetector by the spot increases as the illumination area of ​​each photodetector within the spot increases.

[0094] In this embodiment, the oscillation of the movable reflector 100 can be detected according to the ratio of the intensity of the signals generated in the first photodetector 612, second photodetector 614, third photodetector 616, and fourth photodetector 618, respectively, by the light emitted from the first light-emitting element 500. Specifically, when the first frame 210 oscillates relative to the second frame 230 with the second torsion bar 240 as the axis of rotation, the oscillation angle of the movable reflector 100 around the second torsion bar 240 is estimated by X_TiltError shown by the following equation (1). Furthermore, when the movable reflector 100 oscillates relative to the first frame 210 with the first torsion bar 220 as the axis of rotation, the oscillation angle of the movable reflector 100 around the first frame 210 is estimated by Y_TiltError shown by the following equation (2). X_TiltError=(A+DBC) / (A+B+C+D) (1) Y_TiltError=(A+BCD) / (A+B+C+D) (2) However, A, B, C, and D are the signal intensities generated in the first photodetector 612, second photodetector 614, third photodetector 616, and fourth photodetector 618, respectively, by the light emitted from the first light-emitting element 500.

[0095] In equation (1) above, the sum of the signal intensity generated in the first light detection unit 612 and the signal intensity generated in the fourth light detection unit 618 is compared with the sum of the signal intensity generated in the second light detection unit 614 and the signal intensity generated in the third light detection unit 616. From this comparison, it is possible to estimate the oscillation angle of the movable reflector 100 around the second torsion bar 240 when the first frame 210 oscillates relative to the second frame 230 with the second torsion bar 240 as the axis of rotation.

[0096] In equation (2) above, the sum of the signal intensity generated in the first light detection unit 612 and the signal intensity generated in the second light detection unit 614 is compared with the sum of the signal intensity generated in the third light detection unit 616 and the signal intensity generated in the fourth light detection unit 618. From this comparison, it is possible to estimate the oscillation angle of the movable reflector 100 around the first torsion bar 220 when the movable reflector 100 oscillates with respect to the first frame 210 using the first torsion bar 220 as the axis of rotation.

[0097] The method for detecting the oscillation of the movable reflector 100 is not limited to the method according to this embodiment.

[0098] For example, the first photodetector 600 may have a single photodetector. In this example, the single photodetector is provided, for example, on the positive side of the first direction X with respect to the first virtual plane IP1. In this case, when the single photodetector detects light emitted from the first light-emitting element 500, the normal to the reflective surface 112 can be said to be tilted toward the negative direction of the second direction Y with respect to the positive direction of the third direction Z. On the other hand, when the single photodetector does not detect light emitted from the first light-emitting element 500, the normal to the reflective surface 112 can be said to be tilted toward the positive direction of the second direction Y with respect to the positive direction of the third direction Z.

[0099] Furthermore, the first light-emitting element 500 may be attached to the reflective surface 112. In this case, the first photodetector element 600 is provided on the positive side of the third direction Z of the reflective surface 112. In this example as well, the oscillation of the movable reflector 100 can be detected using the first light-emitting element 500 and the first photodetector element 600.

[0100] Figures 6 and 7 illustrate an example of a manufacturing method for the optical scanning device 10 according to the embodiment. In this example, the optical scanning device 10 according to the embodiment is manufactured as follows.

[0101] First, prepare the metal body 200 shown in Figure 6. The metal body 200 has four first connecting parts 260a, two second connecting parts 260b, two third connecting parts 260c, a first folded part 260d, and a second folded part 260f.

[0102] The four first connecting portions 260a are connected to the outer edge of the first frame 210 on the side perpendicular to the third direction Z and to the inner edge of the second frame 230 on the side perpendicular to the third direction Z. In this way, the first frame 210 is supported by the second frame 230 not only by the second torsion bar 240 but also by the four first connecting portions 260a. Specifically, one end of each first connecting portion 260a connected to the outer edge of the first frame 210 is connected to the tip of the first projection 210a. The other end of each first connecting portion 260a connected to the inner edge of the second frame 230 is connected to the tip of the second projection 230a. Each first connecting portion 260a has two first narrow portions 262a. One of the two first narrow portions 262a is provided at one end of the first connecting portion 260a, which is connected to the tip of the first projection 210a. The other of the two first narrow portions 262a is provided at the other end of the first connecting portion 260a, which is connected to the tip of the second projection 230a.

[0103] The two second connecting portions 260b are connected to the outer edge of the first frame 210 on the side perpendicular to the third direction Z and to the inner edge of the second frame 230 on the side perpendicular to the third direction Z. In this way, the first frame 210 is supported by the second frame 230 not only by the second torsion bar 240 but also by the two second connecting portions 260b. Specifically, one end of each second connecting portion 260b connected to the outer edge of the first frame 210 is connected to the tip of the third projection 210b. The other end of each second connecting portion 260b connected to the inner edge of the second frame 230 is connected to the tip of the fourth projection 230b. Each second connecting portion 260b has two second narrow portions 262b. One of the two second narrow sections 262b is provided at one end of the second connecting section 260b, which is connected to the tip of the third projection 210b. The other of the two second narrow sections 262b is provided at the other end of the second connecting section 260b, which is connected to the tip of the fourth projection 230b.

[0104] One of the two third connecting portions 260c is connected to the outer edge of the negative end of the first support portion 252 in the first direction X and to the inner edge of the negative portion of the first frame 210 in the second direction Y. The other of the two third connecting portions 260c is connected to the outer edge of the positive end of the second support portion 254 in the first direction X and to the inner edge of the positive portion of the first frame 210 in the second direction Y. Thus, the first support portion 252 and the second support portion 254 are supported by the first frame 210 not only by the first torsion bar 220 but also by the two third connecting portions 260c. Specifically, one end of each third connecting portion 260c that is connected to the first support portion 252 or the second support portion 254 is connected to the tip of the fifth projection 250c. The other end of each third connecting portion 260c that is connected to the inner edge of the first frame 210 is connected to the tip of the sixth projection 210c. Each third connecting portion 260c has two third narrow portions 262c. One of the two third narrow portions 262c is provided at the end of the third connecting portion 260c that is connected to the tip of the fifth projection 250c. The other of the two third narrow portions 262c is provided at the other end of the third connecting portion 260c that is connected to the tip of the sixth projection 210c.

[0105] The first folded portion 260d is folded back between the first terminal 230d and the seventh projection 230e on the outside of the positive outer edge of the second direction Y of the second frame 230. The first folded portion 260d has two fourth narrow portions 262d. One of the two fourth narrow portions 262d is provided at one end of the first folded portion 260d that is connected to the tip of the first terminal 230d. The other of the two fourth narrow portions 262d is provided at the other end of the first folded portion 260d that is connected to the tip of the seventh projection 230e.

[0106] The second folded portion 260f is folded back between the second terminal 230f and the eighth projection 230g on the outside of the negative outer edge of the second direction Y of the second frame 230. The second folded portion 260f has two fifth narrow portions 262f. One of the two fifth narrow portions 262f is provided at one end of the second folded portion 260f that is connected to the tip of the second terminal 230f. The other of the two fifth narrow portions 262f is provided at the other end of the second folded portion 260f that is connected to the tip of the eighth projection 230g.

[0107] Next, as shown in Figure 7, the first resin body 310 is formed on the first frame 210. Specifically, the first frame 210 is placed in a mold for molding the first resin body 310, and the resin for forming the first resin body 310 is injected into the mold from the positive side of the third direction Z of the first frame 210. The resin is injected from two locations where the first wide portion 310a is formed, located on the positive side of the first direction X and the positive side of the second direction Y with respect to the center of the first direction X and the second direction Y of the first resin body 310, and the first wide portion 310a is formed on the negative side of the first direction X and the negative side of the second direction Y with respect to the center of the first direction X and the second direction Y of the first resin body 310. As the resin is injected from these two locations, a first hole 312a is formed on the positive side of the third direction Z of each first wide portion 310a.

[0108] Furthermore, the second resin body 320 is formed on the second frame 230. Specifically, the second frame 230 is placed in a mold for molding the second resin body 320, and the resin for forming the second resin body 320 is injected into the mold from the positive side of the third direction Z of the second frame 230. The resin is injected from two locations where the two fourth wide portions 320a are formed. As the resin is injected from these two locations, a second hole 322a is formed on the positive side of each fourth wide portion 320a in the third direction Z.

[0109] Furthermore, a resin stage 350 is formed on the first support portion 252 and the second support portion 254. Specifically, the first support portion 252 and the second support portion 254 are placed in a mold for molding the resin stage 350, and the resin for forming the resin stage 350 is injected into the mold. The resin is injected from a point that overlaps with the first support portion 252 in the third direction Z. As the resin is injected from this point, a third hole 352a is formed on the positive side of the resin stage 350 in the third direction Z.

[0110] Next, the first connecting portion 260a is removed by a method such as laser cutting. Specifically, the two first narrow portions 262a are cut by a method such as laser cutting. As a result, the tip of the first projection 210a remains outside the outer edge of the first resin body 310 on the side perpendicular to the third direction Z, and the tip of the second projection 230a remains outside the inner edge of the second resin body 320 on the side perpendicular to the third direction Z. This method suppresses damage to the outer edge of the first resin body 310 on the side perpendicular to the third direction Z due to the heat generated by the laser cutting method, compared to the case where the first connecting portion 260a is removed by a method such as laser cutting so that the tip of the first projection 210a does not remain outside the outer edge of the first resin body 310 on the side perpendicular to the third direction Z. Similarly, compared to the case where the first connecting portion 260a is removed by laser cutting or the like so that the tip of the third projection 210b does not remain outside the outer edge of the second resin body 320 perpendicular to the third direction Z, damage to the inner edge of the second resin body 320 on the side perpendicular to the third direction Z due to heat generated by laser cutting or the like can be suppressed.

[0111] Similarly to the first connecting portion 260a, each second connecting portion 260b is removed by cutting the two second narrow portions 262b of each second connecting portion 260b by a method such as laser cutting. Furthermore, each third connecting portion 260c is removed by cutting the two third narrow portions 262c of each third connecting portion 260c by a method such as laser cutting. Also, the first folded portion 260d is removed by cutting the two fourth narrow portions 262d by a method such as laser cutting. Finally, the second folded portion 260f is removed by cutting the two fifth narrow portions 262f by a method such as laser cutting.

[0112] Next, the reflector 110 is placed on the positive side of the third direction Z of the three support protrusions 352 of the resin stage 350. The first magnet 410 and the first light-emitting element 500 are provided on the negative side of the third direction Z of the resin stage 350. Two second magnets 420 are provided on the negative side of the third direction Z of the first resin body 310. The first light-emitting element 600 is provided on the negative side of the third direction Z of the first light-emitting element 500.

[0113] In this way, the optical scanning device 10 is manufactured.

[0114] Figure 8 is a perspective view of a modified optical scanning device 10A. This modified optical scanning device 10A does not include the first light-emitting element 500 and the first photodetector element 600 shown in Figures 1 and 2. [Examples]

[0115] Figure 9 shows the configuration of the sensor device 20 according to the embodiment.

[0116] The sensor device 20 includes the optical scanning device 10 according to the embodiment. The sensor device 20 further includes a second light-emitting element 12, a second photodetector 14, and a beam splitter 16. In this embodiment, the sensor device 20 is a LiDAR (Light Detection And Ranging) device.

[0117] The second light-emitting element 12 is, for example, a laser diode (LD). As shown by the solid arrows extending from the second light-emitting element 12 through the beam splitter 16 and the movable reflector 100, the light emitted from the second light-emitting element 12 passes through the beam splitter 16 and is reflected by the movable reflector 100. The light reflected by the movable reflector 100 is reflected or scattered by an object (not shown) located outside the optical scanning device 10.

[0118] The second photodetector element 14 is, for example, an avalanche photodiode (APD). As shown by the solid arrows extending from the optical scanning device 10 and the beam splitter 16 to the second photodetector element 14, the second photodetector element 14 detects light emitted from the second light-emitting element 12, reflected by the movable reflector 100, and reflected or scattered by an object (not shown) located outside the optical scanning device 10. In this embodiment, the light detected by the second photodetector element 14 is reflected or scattered by the aforementioned object, reflected by the movable reflector 100 and the beam splitter 16, and reaches the second photodetector element 14.

[0119] The structure of the sensor device 20 is not limited to the structure according to this embodiment. For example, in this embodiment, the optical axis of the light reflected by the movable reflector 100 and illuminating an object located outside the optical scanning device 10 coincides with the optical axis of the light reflected or scattered by the object. However, the optical axis of the light reflected by the movable reflector 100 and illuminating an object located outside the optical scanning device 10 and the optical axis of the light reflected or scattered by the object may be misaligned. In this case, the light reflected or scattered by the object reaches the second photodetector 14 without being reflected by the movable reflector 100.

[0120] The embodiments, modifications, and examples of the present invention have been described above with reference to the drawings, but these are merely examples of the present invention, and various other configurations can also be adopted. Examples of reference formats are provided below. 1. A movable reflector, A first metal frame located in at least a portion of the area surrounding the movable reflector, A first torsion bar made of metal is connected to the movable reflector and the first frame, A first resin body provided on at least a portion of the first frame, An optical scanning device equipped with the following features. 2. In the optical scanning apparatus described in 1., A second metal frame located in at least a portion of the area surrounding the first frame, A second metal torsion bar connected to the first frame and the second frame, A second resin body provided on at least a portion of the second frame, An optical scanning device further equipped with the features mentioned above. 3. In the optical scanning apparatus described in 1. or 2., An optical scanning device in which the distance between two parts of the first frame that are opposite to each other in a direction parallel to the rotation axis of the first frame decreases in at least one part of the first frame as it moves away from the rotation axis. 4. In the optical scanning apparatus described in any one of 1. to 3., An optical scanning device further comprising a projection provided on at least one of the outer and inner edges of the first frame, the tip of which is exposed from the first resin body. 5. In the optical scanning apparatus described in any one of items 1 to 4, An optical scanning device in which the resin weld forming the first resin body is formed on a portion of the first frame that is different from the portion connected to the first torsion bar. 6. In an optical scanning device described in any one of items 1 to 5, An optical scanning device in which the amount of resin in the portion of the first resin body in which the curvature of the first frame changes is greater than the amount of resin in the portion of the first resin body in which the curvature of the first frame changes. 7. In an optical scanning apparatus described in any one of items 1 to 6, An optical scanning device in which the amount of resin in the connection portion between the first frame and the first torsion bar of the first resin body is greater than the amount of resin in the area surrounding the connection portion of the first resin body. 8. In the optical scanning apparatus described in any one of items 1 to 7, An optical scanning device wherein at least one hole is provided on the surface of the portion of the first resin body that does not overlap with the first frame. 9. In an optical scanning apparatus described in any one of items 1 to 8, The first frame further comprises a permanent magnet, An optical scanning device in which the width of the permanent magnet in a direction parallel to the rotation axis of the first frame is 95% or more and 105% or less of the width of the portion of the first frame to which the permanent magnet is attached in a direction parallel to the rotation axis of the first frame. 10. An optical scanning device described in any one of items 1 to 9, Light-emitting element and A photodetector that detects light emitted from the light-emitting element, reflected by the movable reflector, and reflected or scattered by an object located outside the optical scanning device, Sensor device equipped with [Explanation of symbols]

[0121] 10 Optical scanning device 10A Optical Scanning Device 12. Second light-emitting element 14. Second photodetector element 16 Beam Splitter 20 Sensor device 100 Movable reflector 110 Reflector 112 Reflective surface 200 Metal objects 210 First Frame 210a 1st protrusion 210b 3rd protrusion 210c 6th protrusion 212 First Division 220 First Torsion Bar 222 First Bar 224 Second Bar 230 Second Frame 230a 2nd protrusion 230b 4th protrusion 230d Terminal 1 230e 7th protrusion 230f 2nd terminal 232 Second Division 240 Second Torsion Bar 242 Third Bar 244 4th Bar 250c 5th protrusion 252 1st support part 254 Second support part 260a First connecting section 260b 2nd connection part 260c 3rd connection part 260d First Folding Section 260f Second turnaround section 262a 1st narrow part 262b 2nd narrow part 262c 3rd narrow part 262d 4th narrow part 262f 5th narrow section 310 First resin body 310a First wide section 310b Second wide section 310c Third wide section 312a 1st hole 320 Second resin body 320a Fourth wide section 322a 2nd hole 350 Resin Stage 352 Support protrusion 352a 3rd hole 410 First Magnet 420 Second Magnet 500 First light-emitting element 600 First photodetector 612 First light detection unit 614 Second light detection unit 616 Third light detection unit 618 Fourth light detection unit IP1 First Virtual Plane IP2 Second Virtual Plane X 1st direction Y Second direction Z 3rd direction

Claims

[Claim 1] A movable reflector, A first metal frame located in at least a portion of the area surrounding the movable reflector, A first torsion bar made of metal is connected to the movable reflector and the first frame, A first resin body provided on at least a portion of the first frame, An optical scanning device equipped with the following features.

Images