Pedestal and showerhead for substrate processing

Abstract

The assembly for a substrate processing system includes a tilting member having a first plate and a sidewall, and a second plate. The first plate is connected to a shaft of a base. The sidewall is disposed below the first plate and includes a slit. A portion of the sidewall rotates around a tilt axis of the tilting member. The tilt axis is defined by the slit. The second plate includes a body including a first portion attached to the tilting member and beams defining a portion of a relief. Each of the beams extends adjacent to a corresponding pair of reliefs and defines a portion of the relief. The beams are flexible and are arranged to move the first portion of the body and the tilting member in a plane extending parallel to the upper surface of the second plate and relative to the second portion of the body of the second plate.

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS: This application is a PCT international application and claims the benefit of U.S. Provisional Application No. 63 / 446,078, filed February 16, 2023, the entire disclosure of which is incorporated herein by reference.

[0002] The present disclosure relates to pedestal and showerhead alignment in a substrate processing system. [Background technology]

[0003] The background description provided herein is intended to present the contents of the present disclosure generally. Work by the presently named inventors within the scope of what is described in this Background section, as well as aspects of the description that may not otherwise be considered prior art at the time of filing, are not admitted, expressly or impliedly, as prior art against the present disclosure.

[0004] Substrate processing systems are used to perform processes such as film deposition and etching on substrates, such as semiconductor wafers. For example, deposition can be performed using chemical vapor deposition (CVD), plasma-enhanced CVD (PECVD), atomic layer deposition (ALD), plasma-enhanced ALD (PEALD), and / or other deposition processes to deposit conductive, dielectric, or other types of films. During deposition, the substrate is placed on a substrate support (e.g., a pedestal), and one or more precursor gases can be supplied to the processing chamber using a gas distribution device (e.g., a showerhead) during one or more process steps. In a PECVD or PEALD process, a plasma is used to activate chemical reactions in the processing chamber during deposition. Summary of the Invention

[0005] An assembly for a substrate processing system is disclosed. The assembly includes a tilting member having a first plate and a sidewall, and a second plate. The first plate is configured to connect to a shaft of a pedestal of the substrate processing system. The sidewall is disposed below the first plate and includes a slit. A portion of the sidewall rotates around a tilt axis of the tilting member. The tilt axis is defined by the slit. The second plate includes a body including a first portion attached to the tilting member and beams defining a portion of a relief, each of the beams extending adjacent to a corresponding pair of reliefs and defining a portion of the relief. The beams are flexible and are configured to move the first portion of the body and the tilting member in a plane extending parallel to the upper surface of the second plate and relative to the second portion of the body of the second plate. In another feature, the tilting member is a tilting cylinder having a circular cross-section. In another feature, the tilting member has a rectangular cross-section.

[0006] In other features, the slits include a first pair of slits configured to tilt a portion of the sidewall and the first plate about a first tilt axis and a second pair of slits configured to tilt a portion of the sidewall and the first plate about a second tilt axis. In other features, the slits include a first pair of slits and a second pair of slits. The tilting member includes a first ring, a second ring, and a third ring. A joint between ends of the first pair of slits connects the first ring to the second ring. A joint between ends of the second pair of slits connects the second ring to the third ring.

[0007] In other features, each of the slits includes two angled end portions adjacent to two other angled end portions of another slit. In other features, each of the slits includes two curved end portions adjacent to two other curved end portions of another slit. In other features, the slits include a first one or more slits and a second one or more slits disposed above the first one or more slits.

[0008] In other features, the ramp member and the second plate are integrally formed as a single component. In other features, the ramp member is separate from and connected to the second plate. In other features, another portion of the ramp member is press-fit into a central opening in a first portion of the second plate.

[0009] In other features, the first plate is separate from and attached to the side wall. In other features, the first plate is integrally formed with the side wall as a single component. In other features, the second plate is monoblock. In other features, the second plate limits or prevents movement of the portion in a direction perpendicular to the plane and allows limited movement in a direction parallel to the top surface of the second plate.

[0010] In other features, each of the beams defines two respective pairs of cutout extensions in the relief. In other features, the beams are disposed laterally outward of the first portion. In other features, the beams include four beams, each of the four beams extending between adjacent overlapping cutout extensions in the relief, the four beams including a first beam, a second beam, a third beam, and a fourth beam.

[0011] In other features, a first beam extends from the first portion to the second portion and between the first pair of cutout extensions, a second beam extends from the first portion to the second portion and between the second pair of cutout extensions, a third beam extends from the second portion to the third portion of the second plate and between the third pair of cutout extensions, and a fourth beam extends from the second portion to the third portion of the second plate and between the fourth pair of cutout extensions.

[0012] In other features, the first and second beams extend in opposite directions relative to the first and second portions, are on either side of the first portion, and are located laterally inward of the third and fourth beams. The third and fourth beams extend in opposite directions relative to the first and second portions, and are on either side of the second portion.

[0013] In other features, the second portion includes four members connected in series, the four members including a first member, a second member, a third member, and a fourth member, wherein the first member extends parallel to the second member and perpendicular to the third and fourth members.

[0014] In other features, the body of the second plate further includes a third portion laterally outward from the second portion. The third portion includes four members connected in series, the four members including a first member, a second member, a third member, and a fourth member. The first member of the third portion extends parallel to the second member of the third portion and perpendicular to the third member and the fourth member of the third portion. The relief includes a first relief, a second relief, a third relief, and a fourth relief. The first relief is defined by and extends adjacent to the first portion, the first beam, the second beam, the third member of the second portion, and the fourth member of the second portion. The second relief is defined by and extends adjacent to the first portion, the first beam, the second beam, the first member of the second portion, and the second member of the second portion. The third relief is defined by and extends adjacent to the third beam, the fourth beam, the first member of the second portion, the third member of the second portion, the first member of the third portion, and the fourth member of the third portion. The fourth relief is defined by and extends adjacent to the third beam, the fourth beam, the second member of the second portion, the fourth member of the second portion, the second member of the third portion, and the third member of the third portion.

[0015] In other features, each of the reliefs includes a central portion and a pair of cutout extensions extending parallel to each other and perpendicular to the central portion. In other features, the reliefs include a first pair of reliefs having respective central portions on either side of a central opening in the first portion of the second plate, and a second pair of reliefs having respective central portions on either side of the central opening in the first portion of the second plate. The respective central portions of the first pair of reliefs extend parallel to the respective central portions of the second pair of reliefs.

[0016] In other features, the assembly further includes a lateral adjustment screw disposed in the same plane and configured to move the ramp member along the plane and relative to the second portion of the second plate.

[0017] In other features, the assembly further includes a ground fixture plate, the first plate attached to the ground fixture plate, and an adjustment screw holder attached to the ground fixture plate, the lateral adjustment screw extending through the adjustment screw holder and pressing against a side of the tilt member.

[0018] In other features, the assembly further includes a tilt adjustment screw configured to adjust the tilt of the first plate of the tilt member relative to at least one of the bottom portion of the tilt member and the second plate. In other features, the tilt adjustment screw is configured to press against the bottom surface of the first plate of the tilt member and to thread into the threaded hole in the first portion of the second plate. In other features, the head of the tilt adjustment screw is rounded so that a central tip of the tilt adjustment screw contacts the bottom surface of the first plate of the tilt member.

[0019] In other features, the tilt adjustment screws are centered about a pivot point on the upper portion of the tilt member. In other features, each of the tilt adjustment screws is located radially outward from a respective pivot point on the side wall of the tilt member.

[0020] In another feature, the centerlines of the tilt adjustment screws extend parallel to and are radially outward from respective lines centered between the ends of the pair of slits.

[0021] In another aspect, an assembly for a substrate processing system is disclosed. The assembly includes a tilting member having a first plate and a sidewall, and a second plate. The first plate is configured to be connected to a stem of a showerhead of the substrate processing system. The sidewall is disposed on the first plate and includes a slit. A portion of the sidewall rotates around a tilt axis of the tilting member. The tilt axis is defined by the slit. The second plate includes a body including a first portion attached to the tilting member and beams defining a portion of a relief, each of the beams extending adjacent to a corresponding pair of reliefs and defining a portion of the relief. The beams are flexible and are configured to move the first portion of the body and the tilting member in a plane extending parallel to the bottom surface of the second plate and relative to the second portion of the body of the second plate.

[0022] Further areas of applicability of the present disclosure will become apparent from the detailed description, claims, and drawings. The detailed description and specific examples are for purposes of illustration only and are not intended to limit the scope of the present disclosure. [Brief explanation of the drawings]

[0023] The present disclosure will become more fully understood from the detailed description and the accompanying drawings, wherein:

[0024] [Figure 1] FIG. 1 is a perspective view of an assembly including a tilt cylinder and a plate according to the present disclosure.

[0025] [Figure 2] FIG. 2 is a functional block diagram of a substrate processing system including a pedestal assembly according to the present disclosure.

[0026] [Figure 3] FIG. 3 is a side view of a substrate processing chamber including a pedestal supported by a pedestal assembly, illustrating tilting movement of the pedestal, in accordance with the present disclosure.

[0027] [Figure 4]FIG. 4 is a side view of a base and base assembly according to the present disclosure.

[0028] [Figure 5] FIG. 5 is a perspective view of the base assembly of FIG.

[0029] [Figure 6] FIG. 6 is a top view of the base assembly of FIG.

[0030] [Figure 7] 7 is a perspective view of the plate and tilt cylinder of the base assembly of FIG. 5. FIG.

[0031] [Figure 8] FIG. 8 is a top view of the plate of FIG.

[0032] [Figure 9] FIG. 9 is a side view of the tilt cylinder of FIG.

[0033] [Figure 10] FIG. 10 is a perspective view of the tilt cylinder of FIG.

[0034] [Figure 11] 11 is a cross-sectional view of a portion of the assembly of FIG. 4 showing a tilt adjustment screw and helicoil according to the present disclosure.

[0035] [Figure 12] 12 is a cross-sectional view of a portion of the base assembly of FIG. 4 showing a lateral position adjustment screw and a helicoil according to the present disclosure.

[0036] [Figure 13] FIG. 13 is a functional block diagram of a system according to the present disclosure.

[0037] [Figure 14]FIG. 14 is a perspective view of another exemplary assembly including a tilt cylinder with a separate top plate according to the present disclosure.

[0038] [Figure 15] FIG. 15 is a cross-sectional view of the assembly of FIG.

[0039] [Figure 16] FIG. 16 is another perspective, partially exploded view of the assembly of FIG.

[0040] [Figure 17] 17 is a side view of the tilt cylinder of FIG. 14 showing a tilted configuration in accordance with the present disclosure.

[0041] [Figure 18] FIG. 18 is a side view of an example showerhead and an example showerhead assembly according to the present disclosure.

[0042] [Figure 19] FIG. 19 is a side view of an exemplary assembly showing the thickness of the plates according to the present disclosure.

[0043] [Figure 20] FIG. 20 is an exemplary plot of vertical displacement versus plate thickness according to the present disclosure.

[0044] [Figure 21] FIG. 21 is a top view of an exemplary plate showing beam width and length in accordance with the present disclosure.

[0045] [Figure 22] FIG. 22 is an exemplary plot of stress versus beam width according to the present disclosure.

[0046] [Figure 23] FIG. 23 is an exemplary plot of stress versus beam length according to the present disclosure.

[0047] [Figure 24] FIG. 24 is a side view of an exemplary tilted cylinder illustrating the height of the gap between the slits according to the present disclosure.

[0048] [Figure 25] 25 is an exemplary plot of stress versus gap height between the slits of the tilted cylinder of FIG. 24 in accordance with the present disclosure.

[0049] [Figure 26] 26 is a side view of the tilted cylinder of FIG. 24 illustrating the width of the gap between the slits according to the present disclosure.

[0050] [Figure 27] 27 is an exemplary plot of stress versus width of the gap between the slits of the tilted cylinder of FIG. 26 in accordance with the present disclosure.

[0051] [Figure 28] FIG. 28 is a top view of an exemplary assembly showing the thickness of the tilted cylinder.

[0052] [Figure 29] FIG. 29 is an exemplary plot of stress versus thickness for the tilted cylinder of FIG.

[0053] In the drawings, reference numbers may be reused to refer to similar and / or identical elements. DETAILED DESCRIPTION OF THE INVENTION

[0054] A pedestal for supporting a substrate in a processing chamber can be aligned with a reference position of a showerhead located above the pedestal, or vice versa. The pedestal is aligned in coordinate space to receive the appropriate gas deposition from the showerhead. One option for pedestal alignment is to move the pedestal relative to the showerhead to orient the substrate relative to the showerhead. As another example, the pedestal is aligned with a spindle that moves the wafer to and from the pedestal.

[0055] Pedestal alignment typically involves adjusting the lateral (X and Y) positioning and tilt around the pedestal's tilt axis using a pedestal assembly. The pedestal can be fixed in the Z (or vertical) direction or moved using a servo motor. The pedestal assembly can include a plate parallel to the XY plane, attached to a shaft supporting the pedestal and fastened to a grounding fixture. The pedestal shaft extends into a bellows and is attached to the bellows via a screw. The shaft and bellows are fastened to the plate. Lateral adjustment screws are used to move the plate laterally in the X and Y directions relative to the grounding fixture. Tilt adjustment screws are used to adjust the tilt of the pedestal relative to the plate. The tilt adjustment screws are in a different lateral plane than the lateral adjustment screws. The lateral adjustment screws press against the sides of the plate. The bottom surface of the bellows is curved, matching the curvature of the top surface of the plate. The tilt adjustment screw presses against the bottom surface of the bellows, tilting the pedestal relative to the plate. The lateral and tilt positions of the pedestal can be adjusted independently. The tilt of the pedestal is based on a tilt axis near the top of the pedestal.

[0056] The pedestal may become misaligned over multiple substrate processing cycles. Adjusting the lateral and / or tilt position of the pedestal can correct the misalignment. Adjusting the lateral and / or tilt position of the pedestal requires loosening and / or removing locking fasteners and adjusting the lateral and tilt position adjustment screws. The locking fasteners hold the plate, bellows, and shaft in a fixed position relative to each other and to the grounding fixture. In one example, six locking fasteners must be loosened: three to lock the bellows to the plate and three to lock the plate to the grounding fixture. Loosening the locking fasteners removes the pedestal and bellows from the grounding fixture.

[0057] The processing chamber cannot be evacuated to loosen the locking fasteners. This is because the pedestal would move upward (or lift) if the locking fasteners were loosened and the processing chamber was under vacuum. Therefore, by stopping the suction of fluid (e.g., gas) from the processing chamber, the pressure in the processing chamber can be increased to atmospheric pressure, preventing the pedestal from lifting. Under vacuum, the pedestal is subjected to upward pressure. By increasing the pressure in the processing chamber, the upward pressure on the pedestal drops to zero, allowing the locking fasteners to be loosened. Once the locking fasteners are loosened, the lateral and tilt positioning screws can be adjusted to adjust the lateral position and tilt of the pedestal. Because the pedestal cannot move while under vacuum, the lateral positioning and tilt of the pedestal cannot be adjusted during substrate processing.

[0058] Because the locking fasteners are only accessible from the underside of the pedestal and grounding fixture and are located in a confined area, they can be difficult and time-consuming to access, loosen, remove, reinstall, and / or tighten. Additionally, components within the shaft of the pedestal can be damaged when loosening the locking fasteners. For example, the vertical channel running through the center of the shaft of the pedestal can be damaged when accessing the locking fasteners due to their close proximity. The vertical channel can be used to carry electrical wires that provide power to heaters located within the pedestal. These issues result in increased downtime associated with pedestal alignment.

[0059] Examples described herein include a pedestal assembly including a plate and a tilting member (e.g., a tilting cylinder) that attaches a bellows and either a pedestal shaft or a showerhead stem to the plate. The plate includes i) a central portion of the plate and ii) a beam and relief configured for linear movement of the tilting member in the X and Y directions. Movement of the central portion and the tilting member translates the corresponding pedestal shaft or showerhead stem. The tilting member includes slits with angled ends, and each tilting member includes two pairs of slits. Each pair of slits allows the pedestal or showerhead to tilt about tilt axes α and β. The α and β axes lie in respective planes that extend parallel to each other. The α and β axes are 90° apart from each other. The α and β axes extend parallel to the plane of the X and Y axes and are 45° apart from the X and Y axes, as further described below. These examples enable lateral and tilt position adjustments without having to loosen locking fasteners or stop the suction of fluid from the corresponding processing chamber. Lateral and tilt adjustments can be made while the processing chamber is under vacuum and / or subatmospheric pressure. Locking fasteners to secure the pedestal vertically and prevent movement in the X and Y directions are not included.

[0060] Movements in the X and Y directions are independent of each other; therefore, movement in the X direction does not cause movement in the Y direction, and movement in the Y direction does not cause movement in the X direction. Movements in the α and β axes are independent of each other; therefore, tilting around the α axis does not cause tilting around the β axis, and tilting around the β axis does not cause tilting around the α axis. Movements around the tilt axes α and β are not independent of movement in the X and Y directions. For example, tilting around either tilt axis α or β can cause movement in the X and / or Y directions. Movements in the X and / or Y directions can be compensated for by adjusting the position of the center portion of the plate in the X and / or Y directions using the lateral adjustment screws.

[0061] Examples disclosed herein provide a flexible connection between a support structure, such as a pedestal or showerhead, and a grounding fixture while limiting Z-motion due to vacuum loads. The flexible connection allows X- and Y-tilt adjustments without removing the support structure from the grounding fixture. This reduces the time and labor associated with aligning the support structure. These examples eliminate the need for technicians to locate and loosen locking screws under the pedestal or on top of the showerhead. Service time is also reduced because the vacuum in the processing chamber does not need to be released each time the pedestal or showerhead needs to be aligned. Additionally, conventional alignment processes require loosening and / or removing locking fasteners, making lateral and / or tilt adjustments, starting a vacuum pump to draw fluids from the processing chamber, verifying alignment while the support structure is under vacuum, and then stopping the vacuum pump and repeating the process if the support structure is not aligned. Alignment under vacuum differs from alignment without vacuum. Under vacuum, an upward pressure is applied to the support structure. The examples disclosed herein allow alignment of the support structures while still under vacuum, thereby reducing the time of the alignment process.

[0062] Examples disclosed herein further include both a pedestal assembly and a showerhead assembly. The pedestal can be positioned relative to the showerhead, or the showerhead can be positioned relative to the pedestal. The pedestal assembly allows for alignment of the pedestal relative to the showerhead. The showerhead assembly allows for positioning of the showerhead relative to the pedestal. In one embodiment, a first assembly is provided, connected to the pedestal, and used to adjust the X, Y, Z positions and α and β tilt positions of the pedestal, and / or a second assembly is provided, connected to the showerhead, and used to adjust the X, Y, Z positions and α and β tilt positions of the showerhead.

[0063] The assemblies disclosed herein are applicable to pedestals and showerheads. When used to align a pedestal, the assembly is referred to as a pedestal assembly. When used to align a showerhead, the assembly is referred to as a showerhead assembly.

[0064] FIG. 1 shows an assembly 110 including a tilting member 112 and a plate 114. The tilting member 112 includes a plate 116 and a sidewall 118. In the exemplary assembly 110 illustrated in FIG. 1, the tilting member 112 is a tilted cylinder having a circular cross-section. The plate 116 is configured to connect to and / or support the shaft of a pedestal or the stem of a showerhead. The sidewall 118 extends from the first plate and is attached to the plate 114. For example, the sidewall 118 may be positioned below the plate 116 as shown in FIG. 1 when used to support the shaft of a pedestal, or above the plate 116 when used to support the stem of a showerhead. The sidewall 118 includes a slit 120. An upper portion 122 of the sidewall 118 rotates around a tilt axis α, β defined by the slit 120. As further described below with respect to other exemplary embodiments, slit 120 extends through side wall 118 from inner surface 121 to outer surface 123 and defines a pivot point (e.g., pivot point 124) through which tilt axes α, β extend and about which top portion 122 rotates relative to bottom portion 126 of side wall 118.

[0065] The tilting member 112 includes slits 120 and is compliant by its configuration such that when the upper portion 122, and therefore the plate 116, is tilted, a first portion of the tilting member 112 is compressed by narrowing the spacing between the portions 122, 126 at the location of the first portion, while a second portion, 180° away from the first portion, expands by widening the spacing between the portions 122, 126 at the location of the second portion. The first and second portions are 90° apart from the axis about which the upper portion 122 is tilted.

[0066] Plate 116 includes a body 130 and a beam 132. Beam 132 defines a relief 134 extending from an upper surface 136 to a lower surface 138 of plate 116. Relief 134 may be an open cutout free of material, or may be at least partially filled with a material that has a lower density and stiffness compared to beam 132. The material of relief 134 may be more flexible than beam 132. Because beam 132 is flexible and can bend and move along the XY plane, it is sometimes referred to as a flexural beam.

[0067] The XY plane includes the X and Y axes. The X and Y axes extend laterally through the plate 114. Each of the X and Y axes extends perpendicular to the parallel outer surfaces of the plate 114. For example, the X axis extends perpendicular to the outer surfaces 140 and 142, and the Y axis extends perpendicular to the outer surfaces 144 and 146. The axes α and β are 90° and 45° apart from the X and Y axes, respectively. The axes α and β extend parallel to the XY plane.

[0068] Plate 116 is compliant due to its configuration including beams 132 and reliefs 134. Because beams 132 are movable in the X and Y directions, a portion (e.g., a central portion) 150 of plate 114 and ramp member 112 can move in the X and Y directions relative to a peripheral portion 152 of plate 114.

[0069] Plate 116 may include holes for attaching the plate to, for example, the shaft of a pedestal and / or the stem of a showerhead, as described further below with respect to other examples. Plate 114 may have holes for tilt adjustment screws and / or holes for fasteners and / or screws for attaching plate 114 to another object. The tilt adjustment screws described below may be used to tilt plate 16.

[0070] Other exemplary versions of assembly 110 are described below with reference to Figures 2-29. Although each assembly is described and / or shown as having certain features and not others, any of the assemblies can be modified to include any of the features of the other assemblies.

[0071] FIG. 2 illustrates a substrate processing system 200 including a pedestal assembly 202 for laterally aligning the pedestal 203 in the X and Y directions and adjusting the tilt angle of the pedestal 203. The example of FIG. 2 is applicable to PECVD chambers and other substrate processing chambers. The substrate processing system 200 includes a processing chamber 204 that encloses the components of the substrate processing system 200. The substrate processing system 200 includes a first electrode 208 and a substrate support, such as the pedestal 203. The pedestal 203 may include a second electrode 216. As an example, the first electrode 208 may be an upper electrode, and the second electrode 216 may be a lower electrode. A substrate 218 is positioned on the pedestal 203 between the first electrode 208 and the second electrode 216 during processing.

[0072] By way of example only, the first electrode 208 can include a showerhead 224 for introducing and distributing process gases. Although not shown in Figure 2, the showerhead 224 can be connected to an assembly, as shown in Figure 18. One assembly can be connected to the pedestal 203 and the showerhead 224, or two assemblies can be included and connected to the pedestal 203 and the showerhead 224, respectively.

[0073] The showerhead 224 includes a stem 221 that receives and directs the processing fluid through the showerhead 224. The fluid is directed to the substrate 218 through holes in a faceplate 229 of the showerhead 224. The second electrode 216 may correspond to a conductive electrode embedded in a non-conductive portion of the pedestal 203. Alternatively, the pedestal 203 may include a conductive plate that acts as the second electrode 216.

[0074] A radio frequency (RF) generation system 226 generates and outputs an RF voltage to the first electrode 208 and / or the second electrode 216 when a plasma is used. In some examples, one of the first electrode 208 and the second electrode 216 may be DC grounded, AC grounded, or at a floating potential. By way of example only, the RF generation system 226 may include one or more RF voltage generators 228 (e.g., a capacitively coupled plasma RF power generator, a bias RF power generator, and / or other RF power generators), such as an RF voltage generator 228, that generate an RF voltage. The RF voltage is supplied to the second electrode 216 and / or the first electrode 208 by one or more matching and distribution networks 230. For example, as shown, the RF voltage generator 228 provides an RF and / or bias voltage to the second electrode 216. The second electrode 216 may alternatively or additionally receive power from another power source, such as a power source 232. In another example, an RF voltage may be supplied to the first electrode 208, and the first electrode 208 may be connected to a ground reference.

[0075] The exemplary gas delivery system 240 includes one or more gas sources 244-1, 244-2, ..., and 244-N (collectively, gas sources 244), where N is an integer greater than 0. The gas sources 244 supply one or more gases (e.g., precursors, inert gases, etc.) and mixtures thereof. Vaporized precursors can also be used. At least one of the gas sources 244 may contain a gas (e.g., NH3, N2, etc.) used in the pretreatment process of the present disclosure. The gas sources 244 are connected to a manifold 254 by valves 248-1, 248-2, ..., and 248-N (collectively, valves 248) and mass flow controllers 252-1, 252-2, ..., and 252-N (collectively, mass flow controllers 252). The output of the manifold 254 is supplied to the processing chamber 204. By way of example only, the output of the manifold 254 is supplied to the showerhead 224.

[0076] In some examples, an optional ozone generator 256 may be provided between the mass flow controller 252 and the manifold 254. In some examples, the substrate processing system 200 may include a liquid precursor delivery system 258. The liquid precursor delivery system 258 may be integrated within the gas delivery system 240 as shown, or may be external to the gas delivery system 240. The liquid precursor delivery system 258 is configured to provide liquid and / or solid precursors at room temperature via a bubbler, direct liquid injection, vapor aspiration, etc.

[0077] A heater 260 is connected to a heater coil 262 disposed on the pedestal 203 and can heat the pedestal 203. The heater 260 can be used to control the temperature of the pedestal 203 and the substrate.

[0078] A valve 264 and a pump 268 may be used to evacuate reactants from the processing chamber 204. A controller 272 may be used to control various components of the substrate processing system 200. By way of example only, the controller 272 may be used to control the flow of process gases, carrier gases, and precursor gases, plasma generation and extinguishing, reactant removal, monitoring chamber parameters, etc. The controller 272 may receive measurement signals indicative of process parameters, conditions within the processing chamber 204, etc. via one or more sensors 274 located throughout the substrate processing system 200.

[0079] The pedestal 203 further includes one or more plates 280 and a shaft 282. The shaft 282 extends downward from the one or more plates 280 to a bellows 284, which is sealed to the bottom of the processing chamber 204. The bellows 284 is supported by a tilted cylinder 286, which is supported by a plate 288. The plate 288 may be held by a ground fixture 290. In one embodiment, the cylinder 286 and the plate 288, or portions thereof, are fixed in the Z direction. In another embodiment, the ground fixture 290 includes two components: a fixed (or first) component and a movable (or second) component. The plate 288 may be attached to a movable component such that the plate and the tilted cylinder 286 move vertically relative to the fixed component. Examples of the tilted cylinder 286 and the plate 288 are shown in FIGS. 4-10.

[0080] FIG. 3 illustrates a substrate processing chamber 300 including a pedestal 302 supported by a pedestal assembly 304, showing tilting movement of the pedestal 302. A showerhead 306 is disposed above the pedestal 302. During operation, fluid is drawn from within the substrate processing chamber 300, creating a vacuum on the pedestal 302. This exerts an upward force on the pedestal 302, as represented by arrow 310. In the illustrated example, the interior of the pedestal 302 is open to the atmosphere, and thus the interior of the pedestal 302 is at atmospheric pressure. The pressure within the substrate processing chamber 300 is less than atmospheric pressure. The pedestal 302 may be configured similarly to other pedestals disclosed herein and may include tilting cylinders and plates, represented by compliant elements 320. The compliant elements 320, like at least some of the tilting cylinders and plates of the other assemblies disclosed herein, are included to tilt and / or shift the pedestal 302 in the X and Y directions. The pedestal shaft 322 is connected to a compliant element 320. The compliant element 320 is also connected to a ground fixture 324. The pedestal 302 and pedestal shaft 322 are shown in two positions: a non-tilted position (indicated by the solid line) and a tilted position (indicated by the dashed line 326). The tilting cylinder and plate are stiff (or limit movement) in the vertical (or Z) direction.

[0081] FIG. 4 shows a pedestal 400 and a pedestal assembly 402. The pedestal assembly 402 adjusts the X and Y position of the pedestal 400 as well as the tilt of the pedestal 400. The pedestal assembly 402 includes a plate 404 and a tilt member (or tilt cylinder, as shown) 406. The plate 404 is attached to a grounded fixed plate 408 in a fixed position. The tilt cylinder 406 supports a bellows 410 and a pedestal shaft 412. The pedestal shaft 412 extends through a processing chamber wall 414 and the bellows 410. The bellows 410 is sealed to the wall 414 via a seal (e.g., an O-ring) 416. The pedestal assembly 402 can move vertically. When moved vertically, the outer wall 418 of the bellows 410 compresses and decompresses (or expands) depending on the direction of movement of the pedestal assembly 402. The pedestal shaft 412 may include an internal channel (or tube) 420 through which electrical conductors extend to supply power, for example, to heating elements located on one or more plates of the pedestal 400 .

[0082] Tilt cylinder 406 is attached to plate 404 and includes a top plate 430. Top plate 430 may be attached to bellows 410 and / or base shaft 412. More detailed examples of base assembly 402, and portions thereof, are described below and shown in Figures 5-12 and 14-17. Similar base assemblies, and portions thereof, are described with reference to Figures 18-29.

[0083] 5-6 show a base assembly 402 including a plate 404, a tilt cylinder 406, and a ground fixture plate 408. The plate 404 includes a beam 508 that allows X and Y movement of the tilt cylinder 406 relative to the plate 404. Lateral adjustment screws 510 are coplanar and pivot to move the tilt cylinder 406 in the X and Y directions. In the illustrated example, two pairs of opposing lateral adjustment screws are shown. The lateral adjustment screws 510 are threaded into screw holders 512 and pressed against the sides of the tilt cylinder 406. The screw holders 512 are fastened to the ground fixture plate 408 via screws 516. The plate 404 is fastened to the ground fixture plate 408 via screws 518. The ground fixture plate 408 may be attached to the ground fixture and / or other parts of the ground fixture assembly via holes 519.

[0084] The tilt cylinder 406 may have a top plate 430 that can be tilted about tilt axes α and β via a pair of slits 522 in a sidewall 523 of the tilt cylinder 406. The slits 522 are described further below. Rotating a tilt adjustment screw 530 tilts the top plate 430. The tilt adjustment screw 530 threads into a threaded hole 624 in the plate 404 and can be used to tilt the top plate 430. The head of the tilt adjustment screw 530 presses up against the bottom surface of the top plate 430. The top plate 430 supports a bellows and a base shaft. The bellows can be fastened to the top plate 430 through holes 532. While the tilt adjustment screw 530 is shown as being 45° apart from the lateral adjustment screw 510, the base assembly 402 can be modified so that the tilt adjustment screw 530 is at a different angle relative to the lateral adjustment screw 510.

[0085] FIG. 7 shows plate 404 and tilt cylinder 406. In one embodiment, plate 404, tilt cylinder 406, and / or top plate 430 are integrally formed as a single component. The tilt cylinder 406 and top plate 430 can be formed as a single component or as separate components, examples of which are shown in FIGS. 5 and 16 and described herein. In another embodiment, plate 404 and tilt cylinder 406 are separate components, with tilt cylinder 406 shrink-fitted to a portion of plate 404. In yet another embodiment, tilt cylinder 406 is attached (e.g., welded) to plate 404. Plate 404 and tilt cylinder 406 may be machined from a single block of material. As another example, plate 404, tilt cylinder 406, and plate 430 are formed using wire electrical discharge machining (EDM), three-dimensional (3D) printing, and / or other processes. Plate 404, tilt cylinder 406, and plate 430 may be formed from aluminum, stainless steel, titanium, and / or other suitable materials.

[0086] In one embodiment, the plate 404 is formed as a monoblock, i.e., the plate 404 is a single component. The plate 404 may be formed from a single block of material. The plate 404 includes sidewalls 710 and reliefs (or cutouts) 712 that form beams 508. The reliefs 712 are cut-out channels that penetrate the body of the plate 404 from the top of the plate 404 to the bottom of the plate 404. The reliefs 712 are "U" shaped, as best shown in FIG. 8 , and provide the beams 508 that move a central region 720 of the plate 404 in the X and Y directions. The reliefs 712 include three sections (or, if unfilled, may also be referred to as three cutouts) including two extension sections and one central section, where the two extension sections extend parallel to each other and perpendicular to the central section. The central section extends between and connects the extension sections. The three portions (or cutouts) of each relief are contiguous, providing a single "U" shaped cutout. The central region 720 includes the screw holes 624 and may also include a central hole (best seen in FIG. 8) into which the bottom portion of the tilt cylinder 406 can mate. The plate 404 may include corner protrusions 730 extending from the sidewalls 710. The corner protrusions 730 may include holes 732 through which a fastener (e.g., screw 518 in FIG. 5) extends.

[0087] The tilt cylinder 406 can include a top plate 430, a cylindrical body 740 including slits 522, and a central channel 741. The top plate 430 can be octagonal as shown, or can have a different shape and include holes 532. The slits 522 can include angled end portions 742 (called triangular pivots) that can be angled downward or upward and toward each other. The slits 522 are openings that extend through the sidewalls of the cylindrical body 740. The bottom portion of the cylindrical body 740 can include flat surfaces 744 (e.g., four flat surfaces) against which the lateral adjustment screws 510 of FIG. 5 press. The flat surfaces 744 distribute the force applied by the lateral adjustment screws 510.

[0088] 8 shows a plate 404 having a body 800 including reliefs 712 and beams 508. X and Y axes 802, 804 are indicated. In the illustrated example, four "U"-shaped reliefs 712 are included in the body 800. The four "U"-shaped reliefs include two pairs of two "U"-shaped reliefs that provide four beams 508, two beams perpendicular to the X direction and two beams perpendicular to the Y direction. Each "U"-shaped relief has i) a central portion (e.g., central portions 805, 806, 807, 808) laterally outer than the central opening 810, and ii) two cutout extensions (e.g., cutout extensions 811A, 811B, 812A, 812B, 813A, 813B, 814A, 814B) extending from the central portion. The notch extensions 812A and 812B overlap with the notch extensions 811A and 811B. The notch extensions 813A and 813B overlap with the notch extensions 814A and 814B. The notch extensions 813A, 813B, 814A, and 814B are located laterally outside the notch extensions 811A, 811B, 812A, and 812B. The notch extensions 813A, 813B, 814A, and 814B extend perpendicular to the extension direction of the notch extensions 811A, 811B, 812A, and 812B. Each of the beams 508 extends parallel to two adjacent notches, each notch being one of the central portions 805, 806, 807, 808 or one of the notch extensions 811A, 811B, 812A, 812B, 813A, 813B, 814A, 814B.

[0089] One end of each of the cutout extensions 811A, 811B extends from a respective end of the central portion 805. One end of each of the cutout extensions 812A, 812B extends from a respective end of the central portion 806. One end of each of the cutout extensions 813A, 813B extends from a respective end of the central portion 807. One end of each of the cutout extensions 814A, 814B extends from a respective end of the central portion 808. The central portions 805, 806 of the first pair of reliefs 712A, 712B extend parallel to the central portions 807, 808 of the second pair of reliefs 712C, 712D.

[0090] Central (or first) portion 820 of plate 404 includes central opening 810 and is located between central portions 805, 806 and between notch extensions 811A, 812B. Central portion 820 defines portions of central portions 805, 806 and notch extensions 811A, 812B. Intermediate (or second) portion 822 of plate 404 is square and / or rectangular and is located laterally outward of central portion 820 and is located i) between notch extension 812A and central portion 807, ii) between notch extension 811B and central portion 808, iii) between notch extension 813A and central portion 805, and iv) between notch extension 814B and central portion 806. Intermediate portion 822 defines portions of central portions 805, 806, 807, 808 and notch extensions 811B, 812A, 813A, 814B. Peripheral (or third) portion 824 of plate 404 is square and / or rectangular and is located laterally outward from intermediate portion 822 and laterally outward from central portions 807, 808 and notch extensions 813B, 814A. Peripheral portion 824 defines portions of central portions 807, 808 and notch extensions 813B, 814A.

[0091] Beams 508 include four beams 508A, 508B, 508C, and 508D, collectively referred to as 508. Each of beams 508 extends between adjacent overlapping cutout extensions of relief 712. Beam 508A extends from central portion 820 to intermediate portion 822 and between cutout extensions 811A and 812A. Beam 508B extends from central portion 820 to intermediate portion 822 and between cutout extensions 811B and 812B. Beam 508C extends from intermediate portion 822 to peripheral portion 824 and between cutout extensions 813A and 814A. Beam 508D extends from intermediate portion 822 to peripheral portion 824 and between cutout extensions 813B and 814B. Beams 508A, 508B extend in opposite directions and are on either side of central portion 820 and are located laterally inward of beams 508C, 508D. Beams 508C, 508D extend in opposite directions and are on either side of intermediate portion 822.

[0092] Intermediate portion 822 includes four members 830, 832, 834, and 836, which are connected in series and surround central portion 820. Member 830 extends parallel to member 832 and perpendicular to members 834 and 836. Member 834 extends parallel to member 836. Peripheral portion 824 includes four members 840, 842, 844, and 846, which are connected in series and surround intermediate portion 822. Member 840 extends parallel to member 842 and perpendicular to members 844 and 846. Member 834 extends parallel to member 846.

[0093] Relief 712 includes reliefs 712A, 712B, 712C, and 712D. Relief 712A is defined by and extends adjacent to central portion 820, beams 508A and 508B, and members 834 and 836. Relief 712B is defined by and extends adjacent to central portion 820, beams 508A and 508B, and members 830 and 832. Relief 712C is defined by and extends adjacent to beams 508C and 508D, and members 830, 834, 840, and 846. Relief 712D is defined by and extends adjacent to beams 508C and 508D, and members 832, 836, 842, and 844.

[0094] Relief 712 and beams 508 allow central portion 820 to move a predetermined amount in the X and Y directions relative to peripheral portion 824. By way of example, central portion 820 can move up to ±1500 microns (μm). Plate 404 allows X and Y movement, while limiting movement in the Z direction. In one embodiment, plate 404 prevents movement of central portion 820 in the Z direction. Thus, it is not necessary to loosen the fasteners (e.g., screws) holding the pedestal shaft to plate 404 to adjust the X and Y position of central portion 820.

[0095] 7 have inner diameters sized to allow heater coils, cooling lines, etc. to pass through. In one embodiment, the central opening 810 is sized to receive a portion of the tilt cylinder 406 and extends from the top of the plate 404 to the bottom of the plate 404. The inner diameter of the central opening 810 may be equal to or greater than the outer diameter of the side wall 523 so as to receive the bottom portion of the tilt cylinder 406.

[0096] 9-10 show diagrams of the tilted cylinder 406. The tilted cylinder 406 can include a top plate 430 and a cylindrical body 740 having a sidewall 523 with slits 522. The top plate 430 can be octagonal as shown, or can have a different shape and can include holes 532. The slits 522 can include angled end portions 742. Two pairs of slits are included, with each pair of slits including four angled end portions. Adjacent angled end portions are angled downward or upward and toward each other. A portion of the cylindrical body 740 resides between adjacent angled end portions 742. The bottom portion of the cylindrical body 740 can include a flat surface 744.

[0097] The cylindrical body 740 includes a top (or first) ring 900, a center (or second) ring 902, and a bottom (or third) ring 904. The top pair of slits 522 are located between the top ring 900 and the center ring 902. The bottom pair of slits 522 are located between the center ring 902 and the bottom ring 904. The top pair of angled end portions 742 are angled downward, and the bottom pair of angled end portions 742 are angled upward. A junction (one designated 905) between the top pair of angled end portions 742 connects the top ring 900 to the center ring 902. A junction (one designated 907) between the bottom pair of angled end portions 742 connects the center ring 902 to the bottom ring 904. Although the angled end portions 742 are shown as straight, the angled end portions 742 may be curved, e.g., concave. The top pair of angled end portions 742 may be curved downward, and the bottom pair of angled end portions 742 may be curved upward. Slope axes α and β are shown and are centrally located and extend between laterally opposed pairs of angled end portions 742.

[0098] Four degrees of freedom of movement are provided for the tilt cylinder 406, including lateral movement in the X and Y axes via plate 404 in FIG. 8 and tilt movement in the X and Y axes about the α and β axes via slits 522. Slits 522 and rings 900, 902, 904 (referred to as flexure rings) allow portions of the tilt cylinder 406 to act as hinges. This allows, for example, 0.1° of tilt movement of the top plate 430 about each of the α and β axes relative to the bottom ring 904 and / or plate 404 in FIG. 8. However, the tilt cylinder 406 restricts the entire top plate 430 from moving in the Z direction. The top plate 430 may tilt to move portions of the top plate 430 in the Z direction, but the entire top plate 430 is restricted from moving vertically in the same direction.

[0099] FIG. 11 shows a portion 1100 of the base assembly 402 of FIG. 4 , showing one of the tilt adjustment screws 530 and a helicoil 1102. Portion 1100 shows a portion of plate 404 and tilt cylinder 406. Plate 404 includes relief 712. Tilt cylinder 406 includes slit 522. Tilt adjustment screw 530 presses up against the bottom surface of top plate 430 of tilt cylinder 406 and threads onto helicoil 1102, which threads onto plate 404. Helicoil 1102 can be used, for example, to prevent damage to plate 404. A helicoil can be used for each of the tilt adjustment screws 530, although only one is shown in FIG. 11 . The head of the tilt adjustment screw is rounded and may have a square section for turning via a wrench, as indicated by rounded head 1110 and square section 1112.

[0100] The head 1110 of the tilt adjustment screw 530 has a rounded upper surface so that the central tip 1120 of the head 1110 contacts the upper plate 520. The central tip 1120 is centered between the two angled ends of the pair of slits in the tilt cylinder 406.

[0101] FIG. 12 shows a portion 1200 of the base assembly 402 of FIG. 4 , showing one of the lateral adjustment screws 510 and a helicoil 1202. Portion 1200 shows a portion of plate 404 and one of the flat surfaces 744 of the tilt cylinder 406. Plate 404 includes a relief 712 and a bent beam 508. The lateral adjustment screw 510 includes a retaining nut 1204 and presses against flat surface 744. The retaining nuts of the lateral adjustment screws of the base assembly, when tightened against adjustment screw holders (one of which is shown in FIG. 12 and designated 512), prevent X and Y movement of the tilt cylinder 406. The retaining nuts can be used to prevent over-actuation of the lateral adjustment screws by contacting the adjustment screw holder and preventing further tightening of the lateral adjustment screws.

[0102] While the above examples include tilted cylinders, other tilted members that are tubular may be included. For example, instead of including a cylindrical tilted member with a circular cross section, a tubular structure with a rectangular or square cross section may be included. The tubular structure may include four side walls with slits similar to slit 522 in FIG. 5. The tubular structure may also include a top plate similar to top plate 430 in FIG. 5 or a top plate of another shape.

[0103] The lateral and tilt adjustment screws of the examples disclosed herein can be adjusted manually and autonomously via a motor and controller. The motor can include a linear motor and / or a rotary motor. The motor can be directly or indirectly coupled to the lateral and tilt adjustment screws. For example, the motor can be connected to the lateral and tilt adjustment screws by a linkage, coupler, or the like. Figure 13 shows an example including a motor for adjusting the position of the lateral and tilt adjustment screws.

[0104] FIG. 13 shows an alignment system 1300 including assembly 202, controller 272, and motors such as a vertical adjustment (or Z-axis) motor 1304, lateral adjustment motors (X1, X2, and Y1 motors 1306 are shown), and tilt adjustment motors (α and β tilt motors 1308 are shown). The alignment system 1300 can be applied to a pedestal or showerhead. While three lateral adjustment motors are shown, a fourth lateral adjustment motor, Y2, is also included. Also, while two tilt adjustment motors are shown, two more tilt adjustment motors may be included for two other tilt adjustment screws. The tilt adjustment motors 1308 may each be connected to a respective bevel gear set 1320 via a shaft 1321 used to rotate one of the tilt adjustment screws. The vertical adjustment motor 1304 can be used to adjust the height (or vertical position) of the pedestal or showerhead by adjusting the vertical position of a shaft 1309 connecting the Z-axis motor 1304 to the assembly. A lateral adjustment motor 1306 can drive lateral adjustment screws (two lateral adjustment screws 1310 are shown). A tilt adjustment motor 1308 can drive tilt adjustment screws (two tilt adjustment screws 1312 are shown). The controller 272 can adjust the X and Y positioning, Z positioning, and tilt of the pedestal or showerhead by adjusting the position of the vertical shaft 1309, the lateral adjustment screws 1310, and the tilt adjustment screws 1312.

[0105] While the above examples primarily involve the use of four lateral and four tilt adjustment screws, different numbers of lateral and tilt adjustment screws may be included. For example, a base assembly may include two lateral and two tilt adjustment screws.

[0106] 14 shows another exemplary pedestal assembly 1400 including a plate (or compliant monoblock) 1402 similar to plate 404 of FIG. 4, a tilt cylinder 1404, a top plate 1406, and a tilt adjustment screw 1408. In this example, the top plate 1406 is separate from and slid onto a body 1410 of the tilt cylinder 1404, although it may also be integrally formed as part of the tilt cylinder 1404. The top plate 1406 may be shrink fitted, welded, glued, and / or attached to the body 1410 using another suitable technique.

[0107] Figure 15 shows a cross-sectional view of the base assembly 1400 of Figure 14. Shown are the plate 1402, tilt cylinder 1404, and top plate 1406. The tilt cylinder 1404 includes a slit 1412, which allows the top plate 1406 to tilt relative to the bottom portion 1500 of the tilt cylinder 1404 and the plate 1402.

[0108] FIG. 16 shows a perspective view of the base assembly 1400 of FIG. 14. The plate 1402, tilt cylinder 1404, and top plate 1406 are shown. The tilt cylinder 1404 includes a lower portion 1600 and an upper (or upper) portion 1602. The upper portion 1602 is thinner than the lower portion 1600 and may include a ledge 1604 on which the top plate 1406 rests. The tilt adjustment screw 1608 is shown with a rounded head that presses against the bottom surface of the top plate 1406. A helicoil (represented as cylinder 1610) is included and inserted into a hole in the plate 1402 to receive the tilt adjustment screw 1608.

[0109] FIG. 17 shows the tilt cylinder 1404 and tilt adjustment screw 1700 of FIG. 14. The centerline 1702 of the tilt adjustment screw 1700 extends parallel to and is centered on a line 1704 extending between the angled ends 1706 of the slits 1708 in the tilt cylinder 1404. The slits 1708 allow for a full range of tilting motion for the upper portion 1602. The line 1704 is centered between the angled ends 1706. This arrangement may apply to each tilt adjustment screw of the corresponding base assembly 1400 of FIG. 14. This allows the upper portion 1602 to tilt about tilt axes, each of which extends laterally through a pair of pivot points on opposing tangential walls of the tilt cylinder 1404. One pivot point 1720 is shown, which is on the line 1704 centered between the angled ends 1706. Each pivot point 1720 is centered between a corresponding pair of angled ends 1706 and / or corresponding ends 1707 of slits 1708. Two pairs of pivot points are included, one pair for each pair of slits. Arrows 1729 indicate the tilt of the upper portion 1602 relative to the pivot points 1720. Slits 1722 are shown with angled ends 1724. Tilting about the pivot points 1720 is indicated by tilt angles 1730, 1732 and is achieved by adjusting tilt adjustment screws positioned ±90° from the tilt adjustment screws 1700. The tilt pivots are located at the vertices of a triangle with sides represented by the angled ends 1706. The tilt pivots are also located at the center of a circle 1734 that overlaps the curved top surface of the head of the tilt adjustment screws 1700. The circle 1734 surrounds the head of the tilt adjustment screws. The rotational pivot for the upper portion 1736 of the tilt cylinder 1404 is about the center of the circle 1734. The centerline of the tilt adjustment screw (e.g., centerline 1702) is radially outward from a line (e.g., line 1704) centered between the ends of the corresponding pair of slits.

[0110] The pair of slits in the tilt cylinder 1404 provide respective flexure hinges that tilt the top portion 1602 about a corresponding tilt axis. The flexure hinges provide stiffness in the Z direction while being flexible in the tilt angle direction, thereby minimizing or eliminating deflection of the top portion 1602 in the Z direction. Thus, the tilt cylinder 1404 can withstand vacuum loads in the Z direction without deflecting in the Z direction due to the vacuum load.

[0111] A tilt axis extends through each pair of pivot points, one of which is 1720. Compliance is provided to the tilt cylinder 1404 structure by bending the cross section of the tilt cylinder 1404 that extends perpendicular to the direction of the applied force. Compliance is provided to the structure by bending the ring around the triangular pivot that corresponds to the pivot point and angled end 1706. Each tilt axis extends through the triangular section of the tilt cylinder 1404. Therefore, adjusting the tilt also causes a small XY displacement, and the center portion of the plate 1402 is realigned to account for this shift.

[0112] The parameters that control the vertical load-bearing capacity and required actuation force include i) the thickness of the plate 1402 in Figures 14 and 16, and ii) the thickness of the tilt cylinder 1404 (e.g., the thickness shown in Figure 28), respectively. The stiffer the tilt cylinder 1404 in the vertical direction, the higher the actuation loads and stresses for roll and pitch motions. The stiffer the plate 1402 in the vertical direction, the higher the actuation loads and stresses for X and Y displacements.

[0113] FIG. 18 is a side view of a showerhead 1800 and a showerhead assembly 1802, such as any of the assemblies described above. The showerhead assembly 1802 is positioned on top of the showerhead 1800 and is used to adjust the vertical positioning, lateral positioning, and tilt of the showerhead 1800. The showerhead assembly 1802 can include a tilting member 1804 and a plate 1806. A central channel in the tilting member 1804 (an example is designated 741 in FIG. 7 ) and a central opening in the plate 1806 (an example is designated 810 in FIG. 8 ) can be used as part of a stem 1810 of the showerhead 1800 to provide gas to the showerhead 1800. The stem 1810 is attached to a bottom plate 1812 of the showerhead assembly 1802.

[0114] 19 shows an example assembly 1900 showing the thickness T1 of the plate (or compliant monoblock) 1902. As the thickness (or height) increases, the stiffness of the plate 1902 in the Z (or vertical) direction increases. The beams of the plate 1902 become stiffer as the thickness increases.

[0115] Figure 20 shows a plot 2000 of vertical displacement versus thickness of plate 1902 of Figure 19. As thickness T1 increases, vertical displacement decreases. A vacuum may exist above assembly 1900, which causes the tilted cylinder 1904 and a central portion of plate 1902 to push upward due to atmospheric pressure existing below and acting from assembly 1900.

[0116] The rigidity of the plate 1902 limits movement in the Z direction. Movement in the Z direction due to pressure differences between the top and bottom surfaces of the assembly 1900 can be compensated for by adjusting the vertical position of the entire assembly 1900. This can be achieved, for example, using a Z-axis motor as described above with respect to FIG. 13. Unwanted movement in the Z direction can affect the size of the gap between the showerhead and the pedestal. Increasing the thickness T1 of the plate 1902 and reducing the Z displacement of the tilt cylinder 1904 relative to the periphery of the plate 1902 can result in the plate 1902 not fitting within the limited available space. Additionally, the thicker the plate 1902, the more rigid the corresponding beam. The more rigid the beam, the greater the stress caused by the X and Y actuation of the tilt cylinder 1904 relative to the periphery of the plate 1902.

[0117] FIG. 21 shows a plate (or compliant monoblock) 2100 showing the width W1 and length L of the beam 2102. Increasing the width W1 increases the operating stress. Reducing the width W1 may result in a loss of stiffness in the Z direction. Relief cuts (some designated 2103) adjacent to the beam 2102 are provided, the size of which is based on the predetermined allowable displacement of the central portion 2104 in the X and Y directions relative to the peripheral portion 2106. The central portion 2104 is connected to a tilted cylinder. Reducing the bend radius of the relief cut increases the stress concentration at the base of the beam 2102. The larger the fillets in the beam 2102, the easier and less expensive the plate 2100 will be to manufacture.

[0118] FIG. 22 shows a plot 2200 of stress versus width W1 of the bending beam. FIG. 23 shows a plot 2300 of stress versus beam length L. As width W1 increases, actuation stress increases. The width and length of each beam are set so that each bending beam is flexible to allow X and Y actuation. The smaller the width W1, the more flexible the bending beam and the less stress due to X and Y actuation. The smaller the width W1, the greater the difficulty in manufacturing the plate 2100, the greater the Z displacement of the center portion 2104 and corresponding tilt cylinder, and the more flexible each portion of the plate 2100. The more flexible each portion of the plate is, the greater the likelihood of the plate moving due to an unintended external force. The width W1 of the bending beam is selected to provide some flexibility while minimizing and / or preventing Z displacement, actuation stress, and bending due to an unintended external force by the tool operator. The stress induced in the beam is less than the yield stress of the material, preventing permanent deformation.

[0119] The longer the length L, the more flexible the bending beam and the less stress it will experience from X and Y actuation. Increasing the length L increases the footprint of the plate 2100, which may result in it not fitting within the limited space below the pedestal. Increasing the flexibility by increasing the length L allows for a larger vertical Z displacement of the central portion 2104. This may occur when a compressive force is applied to the plate 2100 because the top surface of the plate 2100 is in a vacuum and the bottom surface of the plate 2100 is at atmospheric pressure. The longer the beam, the more flexible it is, and the beam may bend due to unintentional external forces applied by the tool operator.

[0120] The length L of the bending beam is selected to provide some flexibility while minimizing Z-displacement, actuation stress, and bending due to unintentional external forces by the tool operator. The stress induced in the beam is less than the yield stress of the material, preventing permanent deformation. The length L of the bending beam is set so that i) the footprint of the plate 2100 is not larger than the available space, for example, below the pedestal, ii) Z-displacement is minimized and / or eliminated, and iii) unintentional external forces by the tool operator do not cause bending in the beam and displacement of the supporting structure (e.g., the corresponding pedestal or showerhead).

[0121] FIG. 24 illustrates an exemplary tilt cylinder 2400 showing the height H of the gap between the slits 2402. The tilt of the upper portion 2404 about the pivot point 2406 is indicated by arrow 2408. In one embodiment, the height H is set so that the portion of the tilt cylinder between the ends of the slits 2402 (called the flexure beam) is flexible, allowing the upper portion of the tilt cylinder 2400 to rotate about the bottom end of the flexure beam 2410 (designated as point 2406). FIG. 25 illustrates a plot 2500 of stress versus the height H of the gap between the slits 2402 of the tilt cylinder of FIG. 24. The higher the flexure beam 2410, the more flexible the tilt cylinder 2400 and the lower the actuation stress, increasing the likelihood that an unintended external force by a tool operator will bend the flexure beam and displace the corresponding support structure. The height H is selected to provide some flexibility to minimize operating stresses while preventing unintentional external forces from the tool operator from bending the bending beam and displacing the tilt cylinder and / or portions thereof. The stress induced in the beam must be below the yield stress of the material so that deformation of the beam does not occur.

[0122] FIG. 26 illustrates a tilted cylinder 2400 showing the width W of the gap between the slits 2402. The width W is selected so that the flexure beam 2410 is flexible and the upper portion 2404 can rotate around the bottom end and / or point 2406 of the flexure beam 2410. The thinner the flexure beam, the more flexible the tilted cylinder 2400 and the lower the actuation stress. The more flexible the flexure beam, the greater the likelihood that an unintended external force by a tool operator will bend the flexure beam and displace the pedestal or showerhead. The width W of the flexure beam is set so that the flexure beam is flexible and the actuation stress is minimized and / or below the yield stress of the material, preventing deformation. FIG. 27 illustrates a plot 2700 of stress versus the width of the gap between the slits of the tilted cylinder of FIG. 26. As the width W increases, the stress also increases.

[0123] FIG. 28 illustrates the assembly 2800 showing the thickness T2 of the tilt cylinder 2802. The thicker the tilt cylinder 2802, the more rigid the tilt cylinder 2802 and the greater the actuation stress when tilting the upper portion of the tilt cylinder 2802. The thinner the tilt cylinder 2802, the easier it is to flex and tilt the upper portion of the tilt cylinder 2802. This makes it easier for the upper portion to tilt due to unintended external loads. The thickness T2 is selected so that the tilt cylinder 2802 is flexible and can rotate (or tilt) the upper portion of the tilt cylinder 2802. The smaller T2, the more flexible the tilt cylinder and the less actuation stress, increasing the likelihood that an unintended external force by the tool operator will bend the bending beam and displace the corresponding pedestal or showerhead. The thickness T2 is also selected so that the tilt cylinder is flexible and the stress is below the yield stress of the material of the tilt cylinder 2802, preventing deformation of the tilt cylinder and bending by the tool operator. Figure 29 shows a plot 2900 of stress versus thickness for the tilted cylinder of Figure 28. As thickness T2 increases, the stress due to tilting in the upper portion of the tilted cylinder 2802 increases.

[0124] The foregoing description is merely exemplary in nature and is not intended to limit the disclosure, its application, or uses. The broad teachings of the present disclosure can be embodied in various forms. Accordingly, while the present disclosure includes specific examples, the true scope of the present disclosure should not be limited to such examples, as other modifications will become apparent upon review of the drawings, the specification, and the following claims. It should be understood that one or more steps in a method may be performed in a different order (or simultaneously) without altering the principles of the present disclosure. Furthermore, although each embodiment is described above as having specific features, any one or more of these features described with respect to any embodiment of the present disclosure may be implemented in other embodiments and / or combined with any features of the other embodiments (even if such combination is not explicitly described). In other words, the described embodiments are not mutually exclusive, and substituting one or more embodiments for one another is within the scope of the present disclosure.

[0125] Terms such as "first," "second," and "third" may be used herein to describe various elements, components, beams, reliefs, and / or devices; however, these elements, components, beams, reliefs, and / or devices should not be limited by these terms unless otherwise specified. These terms may be used only to distinguish one element, component, beam, relief, or device from another element, component, beam, relief, or device. Terms such as "first," "second," and other numerical terms used herein do not imply an order or sequence unless clearly indicated by context. Thus, a first element, component, beam, relief, or device could be referred to as a second element, component, beam, relief, or device without departing from the teachings of the exemplary embodiments.

[0126] Spatial and functional relationships between elements (e.g., modules, circuit elements, semiconductor layers, etc.) are described using various terms such as "connected," "engaged," "coupled," "adjacent," "next to," "on," "above," "below," and "disposed." Also, when a relationship between a first element and a second element is described in the above disclosure, unless expressly described as "direct," the relationship may be a direct relationship where no other intervening elements exist between the first element and the second element, or an indirect relationship where one or more intervening elements (spatial or functional) exist between the first element and the second element. As used herein, the phrase "at least one of A, B, and C" should be interpreted in the sense of a logical (A or B or C) using a non-exclusive logical OR, and not in the sense of "at least one of A, at least one of B, and at least one of C."

[0127] In some embodiments, the controller is part of a system, and such a system may be part of the examples described above. Such systems may include semiconductor processing equipment, including one or more processing tools, one or more chambers, one or more processing platforms, and / or specific processing components (e.g., wafer pedestals, gas flow systems, etc.). These systems may be integrated with electronics for controlling system operation before, during, and after semiconductor wafer or substrate processing. Such electronics may be referred to as a "controller" and may control various components or subcomponents of one or more systems. The controller may be programmed to control any of the processes disclosed herein, depending on the processing requirements and / or type of system. Such processes may include process gas delivery, temperature settings (e.g., heating and / or cooling), pressure settings, vacuum settings, power settings, radio frequency (RF) generator settings, RF matching circuit settings, frequency settings, flow rate settings, fluid delivery settings, position and motion settings, wafer transfer to and from tools and other transfer tools connected or interfaced with a particular system, and / or wafer transfer to and from load locks.

[0128] Broadly, a controller may be defined as an electronic device having various integrated circuits, logic, memory, and / or software that receive instructions, issue instructions, control operations, enable cleaning operations, enable endpoint measurements, etc. Integrated circuits may include chips in the form of firmware that store program instructions, digital signal processors (DSPs), chips defined as application-specific integrated circuits (ASICs), and / or one or more microprocessors, i.e., microcontrollers, that execute program instructions (e.g., software). Program instructions may be instructions communicated to the controller in the form of various individual settings (or program files) that define operational parameters for performing a particular process on or for a semiconductor wafer or for a system. The operational parameters, in some embodiments, may be part of a recipe defined by a process engineer to implement one or more processing steps in the fabrication of one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and / or wafer dies.

[0129] In some embodiments, the controller may be part of, coupled to, or a combination of a computer integrated with, coupled to, or otherwise networked to the system. For example, the controller may be in the “cloud” or all or part of a fab host computer system. This allows for remote access of wafer processing. The computer may provide remote access to the system to monitor the current progress of a fabrication operation, review the history of past fabrication operations, review trends or performance criteria from multiple fabrication operations, modify parameters of a current process, configure processing steps following a current process, or initiate a new process. In some examples, a remote computer (e.g., a server) can provide process recipes to the system over a network. Such a network may include a local network or the Internet. The remote computer may include a user interface that allows entry or programming of parameters and / or settings, which are then communicated from the remote computer to the system. In some examples, the controller receives instructions in the form of data. Such data identifies parameters for each processing step performed during one or more operations. It should be understood that the parameters may be specific to the type of process being performed and the type of tool the controller is configured to interface with or control. Thus, as discussed above, the controller may be distributed, for example, by including one or more individual controllers networked together and working together toward a common purpose (such as the processes and controls described herein). An example of a distributed controller for such purposes would include one or more integrated circuits on the chamber in communication with one or more integrated circuits located remotely (e.g., at the platform level or as part of a remote computer) and coupled to control the process in the chamber.

[0130] Exemplary systems may include, but are not limited to, a plasma etch chamber or module, a deposition chamber or module, a spin rinse chamber or module, a metal plating chamber or module, a cleaning chamber or module, a bevel edge etch chamber or module, a physical vapor deposition (PVD) chamber or module, a chemical vapor deposition (CVD) chamber or module, an atomic layer deposition (ALD) chamber or module, an atomic layer etch (ALE) chamber or module, an ion implantation chamber or module, a tracking chamber or module, and any other semiconductor processing system that may be associated with or used in the fabrication and / or manufacturing of semiconductor wafers.

[0131] As noted above, depending on the process step or steps being performed by the tool, the controller may communicate with one or more other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, nearby tools, tools located throughout the factory, a main computer, another controller, or tools used in material transport to and from tool locations and / or load ports in a semiconductor fabrication factory.

Claims

1. 1. An assembly for a substrate processing system, comprising: A tilting member, a first plate configured to be connected to a shaft of a pedestal of the substrate processing system; and a sidewall disposed below the first plate and including a plurality of slits, a portion of the sidewall rotating about a tilt axis of the tilt member, the tilt axis being defined by the plurality of slits; a tilting member comprising: a body having a first portion attached to the ramp member; and a plurality of beams defining a portion of a plurality of reliefs, each of the plurality of beams extending adjacent to a corresponding pair of the plurality of reliefs; and a second plate comprising: the plurality of beams are flexible and arranged to move the first portion of the body and the ramp member in a plane extending parallel to an upper surface of the second plate and relative to the second portion of the body of the second plate. assembly.

2. 10. The assembly of claim 1, The assembly wherein the tilting member is a tilting cylinder having a circular cross section.

3. 10. The assembly of claim 1, The assembly wherein the ramp member has a rectangular cross section.

4. 10. The assembly of claim 1, The plurality of slits are a first pair of slits configured to tilt the portion of the sidewall and the first plate about a first tilt axis; a second pair of slits configured to tilt the portion of the sidewall and the first plate about a second tilt axis; and An assembly comprising:

5. 10. The assembly of claim 1, the plurality of slits include a first pair of slits and a second pair of slits; the ramp member comprises a first ring, a second ring, and a third ring; a joint between the ends of the first pair of slits connects the first ring to the second ring; a joint between the ends of the second pair of slits connects the second ring to the third ring; assembly.

6. 10. The assembly of claim 1, an assembly wherein each of the plurality of slits includes two angled end portions adjacent to two other angled end portions of another of the plurality of slits.

7. 10. The assembly of claim 1, an assembly wherein each of the plurality of slits includes two curved end portions adjacent to two other curved end portions of another of the plurality of slits.

8. 10. The assembly of claim 1, The plurality of slits are a first one or more slits; a second one or more slits disposed above the first one or more slits; and An assembly comprising:

9. 10. The assembly of claim 1, The assembly, wherein the ramp member and the second plate are integrally formed as a single component.

10. 10. The assembly of claim 1, an assembly wherein the ramp member is separate from and connected to the second plate;

11. 10. The assembly of claim 1, an assembly wherein another portion of the ramp member is press-fit into a central opening of the first portion of the second plate.

12. 10. The assembly of claim 1, The assembly wherein the first plate is separate from and attached to the side wall.

13. 10. The assembly of claim 1, the first plate is integrally formed with the sidewall as a single component.

14. 10. The assembly of claim 1, The assembly, wherein the second plate is a monoblock.

15. 10. The assembly of claim 1, an assembly wherein the second plate limits or prevents movement of the portion in a direction perpendicular to the plane and allows limited movement in the direction parallel to the top surface of the second plate.

16. 10. The assembly of claim 1, an assembly wherein each of the plurality of beams defines a respective pair of notch extensions in two of the plurality of reliefs.

17. 10. The assembly of claim 1, the plurality of beams are disposed laterally outward of the first portion.

18. 10. The assembly of claim 1, the plurality of beams comprises four beams, each of the four beams extending between adjacent overlapping cutout extensions of the plurality of reliefs, the four beams comprising a first beam, a second beam, a third beam, and a fourth beam.

19. 20. The assembly of claim 18, the first beam extends from the first portion to the second portion and between a first pair of the notch extensions; the second beam extends from the first portion to the second portion and between a second pair of the notch extensions; the third beam extends from the second portion to a third portion of the second plate and between a third pair of the notch extensions; the fourth beam extends from the second portion to the third portion and between a fourth pair of the notch extensions; assembly.

20. 20. The assembly of claim 18, the first beam and the second beam extend in opposite directions relative to the first portion and the second portion, are on opposite sides of the first portion, and are laterally inward of the third beam and the fourth beam; the third beam and the fourth beam extend in opposite directions relative to the first portion and the second portion and are on opposite sides of the second portion; assembly.

21. 20. The assembly of claim 18, the second portion includes four members connected in series, the four members comprising a first member, a second member, a third member, and a fourth member; the first member extends parallel to the second member and perpendicular to the third and fourth members; assembly.

22. 22. The assembly of claim 21, the body of the second plate further comprises a third portion laterally outward of the second portion; the third portion includes four members connected in series, the four members including a first member, a second member, a third member, and a fourth member; the first member of the third portion extends parallel to the second member of the third portion and perpendicular to the third member of the third portion and the fourth member of the third portion; the plurality of reliefs include a first relief, a second relief, a third relief, and a fourth relief; the first relief is defined by and extends adjacent to the first portion, the first beam, the second beam, the third member of the second portion, and the fourth member of the second portion; the second relief is defined by and extends adjacent to the first portion, the first beam, the second beam, the first member of the second portion, and the second member of the second portion; the third relief is defined by and extends adjacent to the third beam, the fourth beam, the first member of the second portion, the third member of the second portion, the first member of the third portion, and the fourth member of the third portion; the fourth relief is defined by and extends adjacent to the third beam, the fourth beam, the second member of the second portion, the fourth member of the second portion, the second member of the third portion, and the third member of the third portion; assembly.

23. 10. The assembly of claim 1, Each of the plurality of reliefs is The central part and a pair of notched extensions extending parallel to each other and perpendicularly from the central portion; An assembly comprising:

24. 10. The assembly of claim 1, The plurality of reliefs are a first pair of reliefs having respective central portions on either side of a central opening in the first portion of the second plate; a second pair of reliefs having respective central portions on either side of the central opening in the first portion of the second plate; and Equipped with the central portions of each of the first pair of reliefs extend parallel to the central portions of each of the second pair of reliefs; assembly.

25. 10. The assembly of claim 1, the assembly further comprising a plurality of lateral adjustment screws disposed in the same plane and configured to move the ramp member within the plane and relative to the second portion of the second plate.

26. 26. The assembly of claim 25, A ground fixing plate, The first plate is attached to the ground fixing plate. a ground fixing plate; a plurality of adjustment screw holders attached to the ground fixing plate, The plurality of lateral adjustment screws extend through the plurality of adjustment screw holders and are pressed against the side surfaces of the tilting member. Multiple adjustment screw holders and The assembly further comprises:

27. 10. The assembly of claim 1, The assembly further comprising a plurality of tilt adjustment screws configured to adjust the tilt of the first plate of the tilt member relative to at least one of the bottom portion of the tilt member and the second plate.

28. 28. The assembly of claim 27, an assembly, wherein the plurality of tilt adjustment screws are configured to press against a bottom surface of the first plate of the tilt member and to thread into threaded holes in the first portion of the second plate.

29. 28. The assembly of claim 27, the heads of the plurality of tilt adjustment screws are rounded so that central tips of the plurality of tilt adjustment screws contact a bottom surface of the first plate of the tilt member.

30. 28. The assembly of claim 27, the plurality of tilt adjustment screws are centered about a pivot point on the upper portion of the tilt member.

31. 28. The assembly of claim 27, an assembly wherein each of the plurality of tilt adjustment screws is located radially outward from a respective pivot point of the side wall of the tilt member.

32. 28. The assembly of claim 27, an assembly wherein centerlines of the tilt adjustment screws extend parallel to respective lines centered between ends of pairs of the slits and are positioned radially outward from the respective lines.

33. 1. An assembly for a substrate processing system, comprising: A tilting member, a first plate configured to be connected to a stem of a showerhead of a substrate processing system; and a sidewall disposed on the first plate and including a plurality of slits, a portion of the sidewall rotating about a tilt axis of the tilt member, the tilt axis being defined by the plurality of slits; a tilting member comprising: a body having a first portion attached to the ramp member; and a plurality of beams defining a portion of a plurality of reliefs, each of the plurality of beams extending adjacent to a corresponding pair of the plurality of reliefs; and a second plate comprising: the plurality of beams are flexible and arranged to move the first portion of the body and the ramp member in a plane extending parallel to a bottom surface of the second plate and relative to the second portion of the body of the second plate. assembly.

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