Substrate Transport Device

Abstract

To provide a substrate transport device which can accurately suppress flexure of a substrate.SOLUTION: If a substrate 10 is clamped by a clamp mechanism 59, 60 using a lower clamp plate 54', an area in which a top face 54'b of the lower clamp plate 54' supports the substrate 10 via a conveyor belt 57 is increased compared to the case in which the substrate 10 is clamped using a lower clamp plate 54'. Whereby the substrate 10 can be supported more stably.SELECTED DRAWING: Figure 9

Description

[Technical field]

[0001] The present disclosure relates to a substrate transport apparatus for transporting a substrate. [Background technology]

[0002] Patent document 1 describes a substrate transport device in which, when transporting a substrate, the substrate guide and support rollers are raised and the support rollers push up the transport belt to prevent sliding on the transport rail, and when holding the substrate, the substrate guide and support rollers are lowered so that the support rollers are recessed into the recesses in the transport rail, and the substrate is clamped between the lowered substrate guide and the upper surface of the transport rail via the transport belt. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2015-35457 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, the substrate transport device described in Patent Document 1 does not mention the pressure used when clamping the substrate, so there is a risk that the substrate may not be clamped sufficiently, in which case the deflection of the substrate cannot be adequately suppressed.

[0005] Therefore, an object of the present disclosure is to provide a substrate transport device that can accurately suppress bending of a substrate. [Means for solving the problem]

[0006] In order to achieve the above object, the substrate transport device of the present disclosure includes a pair of transport belts for placing and transporting both ends of a substrate, a drive unit for driving each of the pair of transport belts in a transport direction, a pair of wall-shaped substrate guides provided on the outer sides of each of the pair of transport belts for guiding the substrate in the transport direction, a first clamp plate extending inward from the upper end surfaces of each of the pair of substrate guides, and a second clamp plate erected below the rear surfaces of each of the pair of transport belts, the first clamp plate having a plurality of grooves formed on its outer side surface and a plurality of grooves formed on its outer side surface. In a direction perpendicular to the transport direction of the substrate The device comprises a second clamp plate having an upper surface composed of an area with a plurality of holes and an area without holes, a plurality of belt guide rollers respectively arranged in the plurality of grooves and fixed to the substrate guide, and a lifting section which clamps the substrate placed on the pair of conveyor belts between the first clamp plate and the second clamp plate by lowering the pair of substrate guides, and the belt guide rollers protrude from the upper surface of the second clamp plate when not clamped by the lifting section. Effect of the Invention

[0007] According to the present disclosure, it is possible to precisely suppress the warping of the substrate. [Brief description of the drawings]

[0008] [Figure 1] 1 is an external view showing a screen printing machine including a substrate transport device according to an embodiment of the present disclosure. [Diagram 2] FIG. 2 is a simplified diagram showing the internal structure of the screen printing machine in FIG. [Diagram 3] FIG. 2 is a block diagram showing a simplified control system of the screen printing machine of FIG. [Figure 4] FIG. 4 is a front view showing an operating state of the substrate transport device. [Diagram 5] FIG. 4 is a diagram illustrating an example of a clamp mechanism of the substrate transport device. [Figure 6] 4 is a flowchart showing the procedure of a clamp mechanism control process executed by a CPU included in FIG. 3. [Figure 7]13 is a diagram showing another example of a clamp mechanism of a substrate transport apparatus. FIG. [Figure 8] 10 is a flowchart showing the procedure of another clamp mechanism control process executed by a CPU included in FIG. 3. [Figure 9] 13A and 13B are diagrams illustrating another example of a lower clamp plate included in the substrate transport device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings.

[0010] 1 shows a screen printing machine 1 including a board transport device according to an embodiment of the present disclosure. The screen printing machine 1 prints cream solder onto a board, and constitutes a circuit board production line together with, for example, a solder inspection machine that inspects the printing state and a component mounting machine that mounts electronic components onto the board.

[0011] The screen printing machine 1 is entirely covered by a machine body cover 2. The machine body cover 2 has transfer openings 201 formed on both side surfaces in the machine body width direction, and substrates are loaded and unloaded through the transfer openings 201.

[0012] 2 is a simplified diagram showing the internal structure of the screen printing machine 1, and is shown from the width direction of the machine body, which is the transport direction of the substrate 10. In this embodiment, the front-rear direction of the machine body of the screen printing machine 1 will be described as the Y-axis direction, the width direction of the machine body as the X-axis direction, and the height direction of the machine body as the Z-axis direction.

[0013] In the screen printing machine 1, the substrate 10 is conveyed under the mask 20 installed in the machine, and cream solder passes through the printing pattern holes from the upper surface of the mask 20 and is applied to the substrate 10 below to form a printing pattern. A pair of mask holders 3 arranged in the width direction of the machine are provided in the upper part of the machine interior of the screen printing machine 1, and the mask 20 fixed to the mask frame is held. A squeegee device 4 is provided above the mask holder 3 and is attached in a state that it can move in the front-rear direction of the machine body. Meanwhile, below the mask holder 3, a substrate conveying device 5 for conveying the substrate 10 in and out in the width direction of the machine body, a backup device 7 for supporting the back surface of the substrate 10, and the like are attached to a lifting device 8.

[0014] The lifting device 8 includes a lifting platform 12 that slides along a vertical guide rail 11, and the lifting platform 12 is connected to a lifting motor 14 via a ball screw mechanism 13. The substrate transport device 5 and other components are mounted on the lifting platform 12 via a support platform 15. A pair of mask supports 21 are provided on the support platform 15 in the front-rear direction (Y-axis direction) of the machine body, and the substrate transport device 5 is disposed therebetween. A mask support plate 211 that contacts the mask 20 is fixed to the upper surface of each of the pair of mask supports 21. A ball screw mechanism 22 is provided on the mask support 21 on the right side of the drawing, and the distance between the mask support 21 on the left side of the drawing can be adjusted by a mask support motor 24 (see FIG. 3).

[0015] A backup device 7 for supporting a substrate is provided between the pair of substrate guides 51. In the backup device 7, a backup table 31 having a plurality of backup pins 32 is supported via a ball screw mechanism and is raised and lowered by a backup motor 34. The support base 23 of the substrate transport device 5 is supported via a ball screw mechanism and is raised and lowered by a lifting motor 33. The support base 15 supporting the substrate transport device 5 and the backup device 7 is configured so that its position can be adjusted in the X and Y directions and in the θ direction on the XY plane relative to the lifting base 12. In other words, a correction device is configured to adjust the position between the mask 20 and the substrate 10 transported to and held at the working position. It has been done.

[0016] Next, the squeegee device 4 attached above the mask 20 rolls and pushes the cream solder into the printing pattern holes of the mask 20, applying the cream solder to the board 10 located below the mask 20. The squeegee device 4 is mounted on a running platform 41 with a pair of squeegee heads 401, 402 equipped with squeegees being able to move up and down by a cylinder. The running platform 41 is attached so as to be slidable relative to a guide rod 42, and can move linearly in the fore-and-aft direction of the machine body by driving a squeegee motor 44 (see FIG. 3) via a ball screw mechanism consisting of a screw shaft 43 parallel to the guide rod 42.

[0017] A camera 45 is provided between the mask holder 3 and the substrate transport device 5 for capturing images of substrate marks and mask marks affixed to the substrate 10 and the mask 20. The camera 45 is attached to a guide rail 47 in the front-rear direction of the machine body via a Y-axis slider 46, and the guide rail 47 is mounted on two guide rails 48 in the width direction of the machine body via an X-axis slider 49. Therefore, the camera 45 is configured so that the Y-axis slider 46 and the X-axis slider 48 can move on an XY plane by a Y-axis motor 61 and an X-axis motor 62 (see FIG. 3) via a ball screw mechanism (not shown).

[0018] The screen printing machine 1 is equipped with a control device 9 that controls the overall drive, and drive control is performed for the drive units of each device. FIG. 3 is a block diagram showing a simplified control system of the screen printing machine 1. In the control device 9, a microprocessor (CPU) 91, a ROM 92, a RAM 93, and a non-volatile memory 94 are connected via a bus line. The CPU 91 controls the entire control device, and the ROM 92 stores a system program and control parameters executed by the CPU 91, and the RAM 93 stores temporary calculation data, display data, and the like. The non-volatile memory 94 stores information required for the processing performed by the CPU 91, and stores a sequence program for the screen printing machine 1, and the like. In particular, the non-volatile memory 94 in this embodiment also stores a program for a clamp mechanism control process, which will be described later.

[0019] 1, the screen printing machine 1 is provided with a touch panel type operation display device 98 attached to the front of the machine body, allowing an operator to perform input operations and display the production status on a screen. The control device 9 is provided with an I / O port 95, and the operation display device 98 is connected via the I / O port 95. Various other motors such as the lifting motor 14 are also connected to the I / O port 95 via their respective drivers 71-78.

[0020] Fig. 4 is a front view of the substrate transport device 5 on the right side of Fig. 2 when viewed from the Y direction. Fig. 4(a) shows a state in which the substrate transport device 5 is transporting the substrate 10, and Fig. 4(b) shows a state in which the substrate transport device 5 is clamping the substrate 10.

[0021] As shown in FIG. 4, the board transfer device 5 includes a board guide 51 and a conveyor device 52.

[0022] The board guide 51 is for restricting the board 10 from shifting in the Y direction perpendicular to the transport direction, i.e., in the front-rear direction of the machine body, while the board 10 is being transported. An upper clamp plate 53 is provided on the upper surface of the board guide 51, and a plurality of belt guide rollers 55 (seven in the illustrated example) are provided on a side plate 51a of the board guide 51. The belt guide rollers 55 support and tension a conveyor belt 57.

[0023] The conveyor device 52 transports the substrate 10. A plurality of (four in the illustrated example) conveyor pulleys 56 are provided on a side plate 52a of the conveyor device 52. The conveyor pulley 56 tensions and supports the conveyor belt 57. The belt conveying motor 29 (see FIG. 3) rotates and drives the conveyor pulley 56 to apply a conveying motion to the conveyor belt 57 in the substrate conveying direction. Further, a lower clamp plate 54 is fixed to the side plate 52a of the conveyor device 52.

[0024] The lower clamp plate 54 has a plurality of (seven in the illustrated example) U-shaped notches 54a, and each of the belt guide rollers 55 is disposed in each of the notches 54a.

[0025] The board guide 51 is configured to be capable of ascending and descending within a predetermined range. When the board 10 is to be transported, the board guide 51 is raised, and then the conveyor pulley 56 is driven. As described above, since the belt guide roller 55 is provided on the side plate 51a of the board guide 51, the belt guide roller 55 also ascends as the board guide 51 ascends. As a result, as shown in FIG. 4(a), the conveyor belt 57 contacts the belt guide roller 55 and separates from the upper surface of the lower clamp plate 54, so that the conveyor belt 57 can transport the board 10 without receiving frictional resistance from the lower clamp plate 54. In addition, since the conveyor belt 57 is supported by the multiple belt guide rollers 55 in a tensioned manner, even if the board 10 to be transported is large and heavy, the board 10 can be transported without increasing frictional resistance.

[0026] On the other hand, when the substrate 10 is to be clamped, the driving of the conveyor pulley 56 is stopped and then the substrate guide 51 is lowered. As a result, one end of the substrate 10 in the front-rear direction of the machine body is clamped between the lower surface of the upper clamp plate 53 and the upper surfaces of the conveyor belt 57 and lower clamp plate 54, as shown in FIG. 4(b). At this time, the belt guide roller 55 also descends, so that the belt guide roller 55 is separated from the rear surface of the conveyor belt 57.

[0027] Fig. 5 shows an example of a clamping mechanism 59 included in the substrate transport device 5. Fig. 5(a) shows a non-clamped state, and Fig. 5(b) shows a clamped state. As shown in Fig. 5, the clamping mechanism 59 is composed of a rod 59a, a hydraulic up and down cylinder 59b, and a pressure control valve 59c.

[0028] One end of the rod 59a is connected to the lower surface of the board guide 51, and the other end of the rod 59a is inserted into a hydraulic vertical cylinder 59b. In addition, hydraulic pressure is applied to the hydraulic vertical cylinder 59b via a pressure control valve 59c.

[0029] A distance sensor 58 is provided at a predetermined position on the upper surface of the conveyor device 52 to detect the distance from the lower surface of the board guide 51. In this embodiment, the distance sensor 58 is a sensor that detects the distance from the board guide 51 using, for example, infrared rays, but the detection method is not limited thereto and any detection method can be used as long as it can detect the distance. Note that, in this embodiment, the distance sensor 58 is provided only on the conveyor device 52 on the right side of the drawing in Fig. 2, but the present invention is not limited thereto and the distance sensor 58 may be provided on each of the pair of conveyor devices 52.

[0030] 6 shows the procedure of the clamp mechanism control process executed by the CPU 91. In the following description of each process procedure, steps will be represented as "S".

[0031] 6, first, the CPU 91 judges whether or not a clamping instruction has been issued (S10). The clamping instruction is issued by the CPU 91 itself, for example, in response to the substrate 10 being transported to a predetermined position. Of course, this is not limiting, and the operator may issue the instruction via the operation display device 98.

[0032] In the judgment of S10, if it is judged that clamping is not instructed (S10: NO), The CPU 91 waits until a clamping instruction is issued.

[0033] On the other hand, when it is determined in step S10 that a clamp command has been issued (S10: YES), the CPU 91 opens the pressure control valve 59c (S12). When the pressure control valve 59c is opened, the hydraulic pressure in the hydraulic vertical cylinder 59b increases. In response to this, the rod 59a starts to descend, so the board guide 51 also starts to descend, and the upper clamp plate 53 approaches the board 10.

[0034] Next, the CPU 91 acquires an output value from the distance sensor 58 (S14) and calculates the distance between the distance sensor 58 and the lower surface of the board guide 51 from the acquired output value, i.e., the position to which the board guide 51 has descended (S16).

[0035] Then, the CPU 91 judges whether the board guide 51 has reached the target position (S18). The target position is specifically a lowered position of the board guide 51 such that the distance between the lower surface of the upper clamp plate 53 and the upper surface of the conveyor belt 57 is equal to the thickness of the board 10.

[0036] If it is determined in S18 that the board guide 51 has not reached the target position (S18: NO), the CPU 91 returns the process to S12 and repeats the processes of S12 to S18.

[0037] On the other hand, when it is determined in S18 that the board guide 51 has reached the target position (S18: YES), the CPU 91 ends the clamp mechanism control process, whereby the board 10 is clamped between the lower surface of the upper clamp plate 53 and the upper surface of the conveyor belt 57 and the lower clamp plate 54, as shown in FIG.

[0038] In this manner, in this embodiment, when it is determined that the board guide 51 has reached the target position, it is determined that the clamping of the board 10 by the clamp mechanism 59 has been completed. In other words, the pressure applied to the board 10 during clamping is not directly controlled, but the board guide 51 having reached the target position means that a predetermined pressure is being applied to the board 10. For this reason, it can be said that the board transport device 5 of this embodiment indirectly controls the pressure applied to the board 10 during clamping by controlling the board guide 51 to reach the target position.

[0039] Fig. 7 shows an example of another clamp mechanism 60 different from the clamp mechanism 59 of Fig. 5. Fig. 7(a) shows the non-clamped state, and Fig. 7(b) shows the clamped state. As shown in Fig. 7, the clamp mechanism 60 is composed of a ball screw mechanism 60a, a lifting motor 60b, and an encoder 60c.

[0040] The board guide 51 is supported via a ball screw mechanism 60a and configured to be raised and lowered by a lifting motor 60b. An encoder 60c detects the rotation direction and the number of rotations of the lifting motor 60b.

[0041] FIG. 8 shows the procedure of another clamp mechanism control process executed by the CPU 91.

[0042] 8, first, the CPU 91 judges whether or not a clamp command has been issued (S20). This judgment process is similar to the judgment process of S10 in FIG. 6, and therefore further explanation will be omitted.

[0043] When it is determined in step S20 that a clamp command has been issued (S20: YES), the CPU 91 increases the torque of the lift motor 60b (S22). When the torque of the lift motor 60b is increased, the board guide 51 starts to move down via the ball screw mechanism 60a. As a result, the upper clamp plate 53 moves closer to the substrate 10.

[0044] Next, the CPU 91 acquires an output value from the encoder 60c (S24), and calculates the distance between the lower surface of the upper clamp plate 53 and the upper surface of the conveyor belt 57 from the acquired output value (S26).

[0045] Then, the CPU 91 judges whether the calculated interval has reached the target interval (S28). The target interval is specifically the thickness of the substrate 10. Note that, in this embodiment, the thickness of the substrate 10 is acquired in advance by the control device 9, but this is not limiting, and for example, the operator may input the thickness via the operation display device 98.

[0046] If it is determined in S28 that the calculated interval does not reach the target interval (S28: NO), the CPU 91 returns the process to S22 and repeats the processes of S22 to S28.

[0047] On the other hand, when it is determined in S28 that the calculated interval has reached the target interval (S28: YES), the CPU 91 ends other clamp mechanism control processing. As a result, the substrate 10 is clamped between the lower surface of the upper clamp plate 53 and the upper surface of the conveyor belt 57 and the lower clamp plate 54, as shown in FIG. 7(b).

[0048] Figure 9 shows an example of another lower clamp plate 54' that is different from the lower clamp plate 54 (see Figure 4). Figure 9(a) is a front view of a substrate transport device in which a lower clamp plate 54' is attached instead of the lower clamp plate 54 in Figure 4(a), Figure 9(b) is a rear view of the lower clamp plate 54', and Figure 9(c) is a plan view of the lower clamp plate 54'.

[0049] The lower clamp plate 54 and the lower clamp plate 54' are different in that the lower clamp plate 54 has a plurality of U-shaped notches 54a, whereas the lower clamp plate 54' has a plurality of U-shaped grooves 54'a. The shape of each groove 54'a is the same as the shape of each notch 54a, and each belt guide roller 55 is disposed in each groove 54'a. In other words, the upper surface 54'b of the lower clamp plate 54' is composed of an area 54'b1 where the grooves 54'a are formed and holes are provided, and an area 54'b2 where no holes are provided, as shown in Fig. 9(c).

[0050] Therefore, when lower clamp plate 54' is used to clamp substrate 10 with clamp mechanisms 59, 60 (see Figures 5 and 7), the area of ​​upper surface 54'b of lower clamp plate 54' that supports substrate 10 via conveyor belt 57 is increased compared to when lower clamp plate 54 is used to clamp substrate 10, so that substrate 10 can be supported more stably.

[0051] As described above, the substrate transport device 5 of this embodiment includes a pair of conveyor belts 57 on which both ends of the substrate 10 are placed and transported, a drive unit that drives each of the pair of conveyor belts 57 in the transport direction, a pair of wall-shaped substrate guides 51 provided on the outer sides of each of the pair of conveyor belts 57 and guiding the substrate 10 in the transport direction, an upper clamp plate 53 extending inward from the upper end surface of each of the pair of substrate guides 51, a lower clamp plate 54 erected below the rear surface of each of the pair of conveyor belts 57, a plurality of belt guide rollers 55 disposed in a plurality of U-shaped notches 54a formed in the upper end portion of the lower clamp plate 54 and fixed to the substrate guide 51, clamp mechanisms 59, 60 that clamp the substrate placed on the pair of conveyor belts 57 with the upper clamp plate 53 and the lower clamp plate 54 by lowering the pair of substrate guides 51, and a control device 9 that controls the pressure during clamping by the clamp mechanisms 59, 60. The belt guide rollers 55 are When not clamped by the clamp mechanisms 59 and 60 , it protrudes from the upper end of the lower clamp plate 54 .

[0052] In this way, in the substrate conveying device 5 of this embodiment, when the substrate placed on the pair of conveyor belts 57 is clamped by the upper clamp plate 53 and the lower clamp plate 54, the pressure is controlled, making it possible to accurately suppress deflection of the substrate.

[0053] Incidentally, in this embodiment, the conveyor belt 57 is an example of a "conveyor belt". The conveyor pulley 56 and the belt conveying motor 29 are an example of a "drive unit". The upper clamp plate 53 is an example of a "first clamp plate". The lower clamp plate 54 is an example of a "second clamp plate". The notch 54a is an example of a "notch portion". The clamp mechanisms 59 and 60 are an example of a "lifting unit". The control device 9 is an example of a "control unit".

[0054] In addition, the substrate transport device 5 further includes a backup device 7 that supports the back surface of the substrate placed on the pair of conveyor belts 57, and when clamping by the clamping mechanisms 59, 60, the back surface of the substrate placed on the pair of conveyor belts 57 is pressed by the backup device 7.

[0055] This makes it possible to suppress the bending of the substrate 10 not only at both ends but also over the entire back surface.

[0056] Incidentally, the backup device 7 is an example of the "support member."

[0057] In addition, the substrate transport device 5 further includes a distance sensor 58 that detects the position of at least one of the pair of substrate guides 51 , and the control device 9 controls the pressure based on the position of the substrate guides 51 detected by the distance sensor 58 .

[0058] Incidentally, the distance sensor 58 is an example of a "detection unit."

[0059] In addition, the distance sensor 58 detects the position without contact, the clamping mechanism 59 raises or lowers the pair of board guides 51 using hydraulic up and down cylinders 59b, and the control device 9 controls the pressure by controlling the pressure applied to the hydraulic up and down cylinders 59b.

[0060] Incidentally, the hydraulic up / down cylinder 59b is an example of a "power cylinder."

[0061] The detection unit also includes an encoder 60c, and the clamp mechanisms 59, 60 raise or lower the pair of board guides 51 using a lifting motor 60b and a ball screw mechanism 60a, and the control device 9 controls the pressure by controlling the torque of the lifting motor 60b.

[0062] Incidentally, the lift motor 60b is an example of a "motor".

[0063] The present invention is not limited to the above-described embodiment, and various modifications are possible without departing from the spirit of the present invention.

[0064] (1) In the above embodiment, the hydraulic up and down cylinder 59b was used as an example of a "power cylinder." However, this is not limited to this, and a pneumatic cylinder that uses air pressure or a power cylinder that uses electricity may also be used.

[0065] (2) In the above embodiment, the clamp mechanism 60 calculates the distance between the upper clamp plate 53 and the conveyor belt 57 based on the output value from the encoder 60c. However, a distance sensor 58 may be used instead of the encoder 60c, and the distance between the upper clamp plate 53 and the conveyor belt 57 may be calculated based on the output value from the distance sensor 58.

[0066] (3) In the above embodiment, the backup device 7 is configured to be able to rise and fall, but this is not limiting and the backup device 7 may be fixed at a predetermined height, that is, at the height of the upper surface of the lower clamp plate 54. [Explanation of symbols]

[0067] 5: Substrate conveying device 7: Backup device 9: Control device 29: Belt conveying motor 51: Board guide 52: Conveyor device 53: Upper clamp plate 54, 54': Lower clamp plate 54a: Notch 54'a: Groove 55: Belt guide roller 56: Conveyor pulley 57: Conveyor belt 58: Distance sensor 59, 60: Clamp mechanism 59a: Rod 59b: Hydraulic up and down cylinder 59c: Pressure control valve 60a: Ball screw mechanism 60b: Lifting motor 60c Encoder.

Claims

1. A pair of conveyor belts for carrying the substrate by placing both ends thereon; a driving unit that drives each of the pair of conveyor belts in a conveying direction; a pair of wall-shaped substrate guides provided on the outer sides of the pair of conveyor belts, respectively, for guiding the substrate in a conveying direction; a first clamp plate extending inward from an upper end surface of each of the pair of board guides; a second clamp plate provided upright below the rear surfaces of the pair of conveyor belts, the second clamp plate having a plurality of grooves formed on an outer side surface thereof, and an upper surface configured with an area having a plurality of holes and an area without holes in a direction perpendicular to the conveying direction of the substrate due to the plurality of grooves being formed on the outer side surface; a plurality of belt guide rollers disposed in the plurality of grooves and fixed to the board guide; a lifting section that lowers the pair of substrate guides to clamp the substrate placed on the pair of transport belts with the first clamp plate and the second clamp plate; Equipped with The belt guide roller protrudes from the upper surface of the second clamp plate when the lifting unit is not clamping the belt. Substrate transport device.

2. A support member for supporting the rear surface of the substrate placed on the pair of conveyor belts. Further equipped with When the substrate is clamped by the lifting unit, the rear surface of the substrate placed on the pair of conveyor belts is pressed by the support member. The substrate transport apparatus of claim 1 .

3. A control unit that controls the pressure applied by the lift unit during clamping; a detection unit that detects a position of at least one of the pair of board guides; Further equipped with The control unit controls the pressure based on the position of the substrate guide detected by the detection unit. The substrate transport apparatus according to claim 1 .

4. The detection unit detects the position in a non-contact manner, the lifting unit lifts or lowers the pair of board guides using a power cylinder; The control unit controls the pressure by controlling the pressure applied to the power cylinder. The substrate transport apparatus of claim 3 .

5. The detection unit includes an encoder. the lifting unit lifts or lowers the pair of board guides using a motor and a ball screw; The control unit controls the pressure by controlling the torque of the motor. The substrate transport apparatus of claim 3 .

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