Surface-coated abrasive particles for tungsten buff applications

Abstract

The present invention provides a chemical-mechanical polishing composition comprising: (a) an abrasive containing silica particles and alumina particles, the alumina particles being surface-coated with an anionic polymer; and (b) water. The present invention also provides a method for chemical-mechanical polishing a substrate, particularly a substrate containing tungsten, silicon oxide, or nitride, with the polishing composition.

Description

[Background technology]

[0001] Chemical mechanical polishing (CMP) compositions and methods for polishing (or planarizing) the surface of a substrate are well known in the art. Abrasive compositions (also known as polishing slurries, CMP slurries, and CMP compositions) for polishing metal layers (such as tungsten) on semiconductor substrates can include abrasive particles suspended in an aqueous solution and chemical promoters such as oxidizers, chelating agents, and catalysts.

[0002] In a conventional CMP operation, the substrate (wafer) to be polished is mounted on a carrier (polishing head), which in turn is mounted on a carrier assembly and placed in contact with the polishing pad of the CMP apparatus (polishing tool). The carrier assembly provides a controllable pressure to the substrate, pressing it against the polishing pad. The substrate and pad are moved relative to one another by an external driving force. The relative motion of the substrate and pad abrades and removes a portion of material from the surface of the substrate, thereby polishing the substrate. The polishing of the substrate by the relative motion of the pad and substrate may be further assisted by the chemical activity of the polishing composition (e.g., by oxidizers and other compounds present in the CMP composition) and / or by the mechanical activity of an abrasive suspended in the polishing composition.

[0003] In a typical tungsten plug and interconnect process, tungsten is deposited on the dielectric and into openings formed in the dielectric. The excess tungsten on the dielectric layer is then removed during a CMP operation to form tungsten plugs and interconnects in the dielectric. Following removal of the bulk tungsten, the substrate surface is subjected to a buffing step to remove debris and provide a more uniform topology to the surface. Buffing is demanding because erosion within substrate features such as tungsten plugs and interconnects is excessive metal removal from within the feature, leading to non-planarity and must be minimized or even more preferably reversed. The buffing step involves polishing two or more different materials such as tungsten, dielectrics, and barrier materials such as silicon nitride, and thus requires a proper balance of removal rates of the various materials to achieve a suitable surface topography.

[0004] Conventional polishing compositions containing silica-based abrasives typically produce high roughness, poor topography, and edge-over erosion problems when polishing substrates containing tungsten. In contrast, polishing compositions containing treated alumina can provide good topography performance, but typically suffer from inadequate removal rates. Erosion refers to the excessive removal of tungsten within substrate features, resulting in non-flat surface topography. To minimize or further reduce erosion, polishing compositions must exhibit optimized material removal rates, so that the removal of tungsten from substrate surface features is balanced with the removal of silicon oxide and / or SiN to produce optimized surface topography.

[0005] Therefore, there is a continuing need to develop new polishing methods and compositions for tungsten bulk polishing and buffing applications that provide good surface topography and flatness while minimizing or reversing erosion. Summary of the Invention

[0006] The present invention provides a chemical-mechanical polishing composition comprising: (a) an abrasive comprising silica particles and alumina particles, the alumina particles being surface-coated with an anionic polymer; and (b) water.

[0007] The present invention also provides a method for chemically mechanically polishing a substrate, comprising: (i) providing a substrate; (ii) providing a polishing pad; (iii) providing a chemical-mechanical polishing composition comprising: (a) an abrasive comprising silica particles and alumina particles, the alumina particles being surface-coated with an anionic polymer; and (b) water; (iv) contacting the substrate with the polishing pad and chemical-mechanical polishing composition; and (v) moving the polishing pad and chemical-mechanical polishing composition relative to the substrate to grind at least a portion of the substrate and polish the substrate. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] In one embodiment, the invention provides a chemical-mechanical polishing composition comprising, consisting essentially of, or consisting of (a) an abrasive comprising silica particles and alumina particles, the alumina particles being surface-coated with an anionic polymer, and (b) water. The abrasive of the chemical-mechanical polishing composition of the invention is a mixed particle abrasive, such that the abrasive comprises both silica particles and surface-coated alumina particles.

[0009] The silica particles of the polishing composition of the present invention can be any suitable silica particles. In one embodiment, the silica particles include colloidal silica particles, aluminum-doped silica particles, or a combination thereof. Exemplary colloidal silica particles include, for example, PL-3D, PL-2, and PL-5 colloidal silica (primary particle size of about 35 nm, 25 nm, and 60 nm, respectively) commercially available from Fuso Chemical Co. (Tokyo, Japan). Exemplary aluminum-doped silica particles (e.g., aluminate-treated) include SNOWTEX™-O silica commercially available from Nissan Chemical (Santa Clara, CA).

[0010] According to one aspect of the present invention, the alumina particles are net negatively charged. Negatively charged alumina particles can be obtained by any suitable method that provides alumina particles with negative charges. Typically, alumina particles are coated (for example, surface-coated with anionic polymer). The alumina particles of the polishing composition of the present invention can be any suitable alumina particles surface-coated with anionic polymer.

[0011] The alumina particles preferably have a surface that includes (e.g., is coated with) an anionic polymer. The anionic polymer typically interacts electrostatically with the alumina particles, which are suspended in an aqueous carrier or fixed on a polishing pad, to coat at least a portion of the surface of the abrasive particles. In particular, the anionic polymer is associated with the alumina particles that have a suitable zeta potential at the pH of the CMP composition. Zeta potential refers to the potential across a solid-liquid interface, specifically the potential across a diffuse layer of ions surrounding a charged colloidal particle (e.g., an alumina particle). The zeta potential of the alumina particles varies with pH. For example, alumina particles with a positive zeta potential can interact electrostatically with anionic polymers. Also, alumina particles with a slightly negative zeta potential that have sufficient positive sites on the alumina particle surface can interact electrostatically with one or more anionic polymers. The alumina particles preferably have a positive zeta potential at the pH of the CMP composition. The zeta potential of the alumina particles is reduced by the interaction of the anionic polymer with the alumina particles.

[0012] Since α-alumina particles typically have a positively charged surface in the raw / uncoated state, binding of an anionic polymer to the α-alumina particles deprotonates at least a portion of the acidic functional groups of the polymer or copolymer, thus rendering the polymer negatively charged along with the alumina particles. The resulting polymer-coated particles have a zeta potential of less than -10 mV over the pH range of 2 to 9.

[0013] The alumina particles can be fumed alumina particles or non-fumed alpha-alumina particles. Fumed alumina particles are generally in the form of agglomerates of primary particles, but the agglomerates are not easily broken down into individual primary particles without significant energy input. The primary particles are generally spherical, whereas the agglomerates are chain-like structures of primary particles and are generally not spherical. Non-fumed alpha-alumina particles are a crystalline form of alumina and typically do not form agglomerates. In a preferred embodiment, the alumina particles are non-fumed alpha-alumina particles.

[0014] The abrasive particles of the polishing composition of the present invention can have any suitable average particle size (e.g., average particle diameter). The particle size is the diameter of the smallest sphere that encompasses the particle. The abrasive particles can have an average particle size of about 10 nm or more, for example, about 15 nm or more, about 20 nm or more, about 25 nm or more, about 35 nm or more, about 45 nm or more, about 50 nm or more, about 55 nm or more, about 60 nm or more, about 75 nm or more, or about 100 nm or more. Alternatively, or in addition, the abrasive particles can have an average particle size of about 1,000 nm or less, e.g., about 950 nm or less, about 950 nm or less, about 900 nm or less, about 850 nm or less, about 800 nm or less, about 750 nm or less, about 700 nm or less, about 650 nm or less, about 600 nm or less, about 650 nm or less, about 500 nm or less, about 475 nm or less, about 450 nm or less, about 425 nm or less, about 400 nm or less, about 375 nm or less, about 350 nm or less, about 325 nm or less, about 300 nm or less, about 275 nm or less, about 250 nm or less, about 225 nm or less, about 200 nm or less, about 175 nm or less, about 160 nm or less, about 150 nm or less, about 125 nm or less, about 115 nm or less, about 100 nm or less, about 90) nm or less, or about 80 nm or less. For example, the abrasive particles can have an average particle size of about 25 nm to about 250 nm, e.g., about 35 nm to about 200 nm, about 45 nm to about 150 nm, about 50 nm to about 125 nm, about 55 nm to about 120 nm, or about 60 nm to about 115 nm. Thus, the abrasive particles can have an average particle size bounded by any two of the aforementioned endpoints. For example, the grinding particles can have an average particle size of about 10 nm to about 1000 nm, about 25 nm to about 950 nm, about 30 nm to about 900 nm, about 35 nm to about 850 nm, about 40 nm to about 800 nm, about 45 nm to about 750 nm, about 50 nm to about 700 nm, about 55 nm to about 650 nm, about 60 nm to about 600 nm, about 75 nm to about 550 nm, about 100 nm to about 500 nm, about 25 nm to about 450 nm, about 30 to about 400 nm, about 35 nm to about 350 nm, about 40 nm to about 300 nm, about 45 nm to about 250 nm, or about 50 nm to about 200 nm.

[0015] The particle size of the abrasive particles may be measured using any suitable technique, for example light scattering techniques. Suitable particle size measuring instruments are available, for example, from Malvern Instruments (Malvern, UK).

[0016] The fumed alumina particles can have an average particle size of about 30 nm or more, e.g., about 40 nm or more, about 50 nm or more, about 60 nm or more, about 70 nm or more, about 80 nm or more, about 90 nm or more, or about 100 nm or more. Alternatively, or in addition, the fumed alumina particles can have an average particle size of about 250 nm or less, e.g., about 230 nm or less, about 210 nm or less, about 190 nm or less, about 170 nm or less, or about 150 nm or less. Thus, the fumed alumina particles can have an average particle size within a range bounded by any two of the aforementioned endpoints. For example, the fumed alumina particles can have an average particle size of about 30 nm to about 250 nm, e.g., about 80 nm to about 250 nm, about 80 nm to about 210 nm, or about 100 nm to about 150 nm.

[0017] The polishing composition can include any suitable concentration of abrasive. If the polishing composition of the present invention contains little abrasive, the composition may not exhibit sufficient removal rate. In contrast, if the polishing composition contains too much abrasive, the composition may exhibit undesirable polishing performance, may lead to surface defects such as scratches, may be cost-effective, and / or may lack stability. The polishing composition can include about 10 wt% or less of abrasive, for example, about 9 wt% or less, about 8 wt% or less, about 7 wt% or less, about 6 wt% or less, or about 5 wt% or less. Alternatively, or in addition, the polishing composition can include about 0.1 wt% or more of abrasive, for example, about 0.2 wt% or more, about 0.3 wt% or more, about 0.4 wt% or more, about 0.5 wt% or more, or about 1 wt% or more. Thus, the polishing composition can include an abrasive in an amount bounded by any two of the aforementioned endpoints. For example, the polishing composition may contain about 0.1 wt % to about 10 wt % abrasive, e.g., about 0.1 wt % to about 9 wt % abrasive, about 0.1 wt % to about 8 wt % abrasive, about 0.1 wt % to about 7 wt % abrasive, about 0.1 wt % to about 6 wt % abrasive, about 0.1 wt % to about 5 wt % abrasive, about 0.1 wt % to about 5 wt % abrasive, about 0.2 wt % to about 5 wt % abrasive, The abrasive may comprise about 0.3% to about 5% abrasive, about 0.4% to about 5% abrasive, about 0.5% to about 5% abrasive, about 0.6% to about 5% abrasive, about 0.7% to about 5% abrasive, about 0.8% to about 5% abrasive, about 0.9% to about 5% abrasive, or about 1% to about 5% abrasive.

[0018] According to one aspect of the present invention, the alumina particles of the polishing composition of the present invention are surface-coated with anionic polymer.Without wishing to be bound by a particular theory, it is believed that the alumina particles are surface-coated with anionic polymer through hydrogen bonding and / or electrostatic interaction between cationic abrasive particles and anionic polymer.The anionic polymer can be any suitable anionic polymer.

[0019] In one embodiment, the anionic polymer comprises repeating monomer units selected from carboxylic acid monomer units, sulfonic acid monomer units, phosphonic acid monomer units, and combinations thereof.

[0020] In some embodiments, the anionic polymer comprises or consists of repeat units of sulfonic acid. In some embodiments, the anionic polymer comprises or consists of a combination of repeat units of sulfonic acid monomer units and carboxylic acid monomer units (i.e., copolymers). In some embodiments, the anionic polymer comprises or consists of a combination of sulfonic acid monomer units and phosphonic acid monomer units (i.e., copolymers). In some embodiments, the anionic polymer consists of repeat units of sulfonic acid monomer units. In other embodiments, the anionic polymer is a copolymer of sulfonic acid monomer units and carboxylic acid or phosphonic acid monomer units. The copolymer can be any suitable copolymer comprising or consisting of a combination of sulfonic acid monomer units and carboxylic acid monomer units or a combination of sulfonic acid monomer units and phosphonic acid monomer units.

[0021] Non-limiting examples of suitable sulfonic acid monomer units include 2-acrylamido-2-methyl-1-propanesulfonic acid (AMPS), 4-vinylbenzenesulfonic acid, vinylsulfonic acid, 2-sulfoethyl acrylate, 2-sulfoethyl methacrylate, 3-sulfopropyl acrylate, 3-sulfopropyl methacrylate, sodium styrenesulfonate, and 2-propene-1-sulfonic acid, as well as salts thereof, combinations thereof, and the like.

[0022] Non-limiting examples of suitable carboxylic acid monomers include acrylic acid, methacrylic acid, itaconic acid, maleic acid, succinic acid, terephthalic acid, aspartic acid, combinations thereof, and the like.

[0023] Non-limiting examples of suitable phosphonic acid monomers include diphosphonic acids or polyphosphonic acids having one or more unsaturated C=C bonds, such as vinylidene-1,1-diphosphonic acid, dimethyl-p-vinylbenzyl phosphonate, vinyl phosphonic acid, ammonium bisdiethylphosphonate (meth)acrylate, acrylamide phosphonate monomers, combinations thereof, and the like.

[0024] The copolymer need not be produced by copolymerization of a combination of sulfonic acid and carboxylic acid monomer units, or a combination of sulfonic acid and phosphonic acid monomer units. It is also contemplated that suitable copolymers may be prepared by a post-polymerization process of a precursor copolymer, followed by conversion of the copolymer to a copolymer having a combination of sulfonic acid and carboxylic acid monomer units, or a combination of sulfonic acid and phosphonic acid monomer units.

[0025] The copolymer may be a random copolymer or a block copolymer, hi one embodiment, the copolymer is a random copolymer.

[0026] In another embodiment, the anionic polymer comprises a combination of sulfonic acid monomer units and carboxylic acid monomer units.

[0027] In yet another embodiment, the anionic polymer comprises a copolymer comprising a combination of sulfonic acid monomer units and phosphonic acid monomer units.

[0028] In one embodiment, the anionic polymer comprises repeating monomer units selected from acrylic acid, methacrylic acid, itaconic acid, maleic acid, succinic acid, terephthalic acid, aspartic acid, maleic anhydride, 4-vinylbenzenesulfonic acid, vinylsulfonic acid, 2-sulfoethyl acrylate, 2-sulfoethyl methacrylate, 3-sulfopropyl acrylate, 3-sulfopropyl methacrylate, 2-propene-1-sulfonic acid, styrenesulfonic acid, 2-acrylamido-2-methyl-1-propanesulfonic acid, vinylidene-1,1-diphosphonic acid, dimethyl-p-vinylbenzyl phosphonate, bisdiethylphosphonate ammonium (meth)acrylate, acrylamidophosphonate monomers, vinylphosphonic acid, 2-(methacryloyloxy)ethyl phosphate, and combinations thereof.

[0029] In a preferred embodiment, the anionic polymer is composed of 2-acrylamido-2-methylpropanesulfonic acid monomer units and acrylic acid monomer units (AA-AMPS). According to this embodiment, the copolymer may have, but is not limited to, 2-acrylamido-2-methylpropanesulfonic acid monomer units and acrylic acid monomer units in a molar ratio range of 10:1 to 1:10.

[0030] In another preferred embodiment, the anionic polymer is composed of 2-acrylamido-2-methylpropanesulfonic acid monomer units (AMPS).

[0031] The anionic polymer (e.g., copolymer) can have any suitable molecular weight. The anionic polymer can have an average molecular weight of about 500 g / mol or more, for example, about 1,000 g / mol or more, about 2,000 g / mol or more, about 3,000 g / mol or more, about 4,000 g / mol or more, about 5,000 g / mol or more, about 6,000 g / mol or more, about 7,000 g / mol or more, about 8,000 g / mol or more, about 9,000 g / mol or more, about 10,000 g / mol or more, about 15,000 g / mol or more, about 20,000 g / mol or more, about 40,000 g / mol or more, or about 50,000 g / mol or more. Alternatively, or in addition, the anionic polymer can have an average molecular weight of about 100,000 g / mol or less, e.g., about 95,000 g / mol or less, about 90,000 g / mol or less, about 85,000 g / mol or less, about 80,000 g / mol or less, about 75,000 g / mol or less, about 70,000 g / mol or less, about 65,000 g / mol or less, about 60,000 g / mol or less, about 55,000 g / mol or less, or about 50,000 g / mol or less. Thus, the anionic polymer can have an average molecular weight bounded by any two of the aforementioned endpoints. For example, the anionic polymer can have an average molecular weight of about 1,000 g / mol to about 100,000 g / mol, about 1,000 g / mol to about 90,000 g / mol, about 1,000 g / mol to about 80,000 g / mol, about 1,000 g / mol to about 70,000 g / mol, about 1,000 g / mol to about 60,000 g / mol, about 1,000 g / mol to about 50,000 g / mol, about 2,000 g / mol to about 50,000 g / mol, about 3,000 g / mol to about 50,000 g / mol, about 4,000 g / mol to about 50,000 g / mol, or about 5,000 g / mol to about 50,000 g / mol.

[0032] The alumina particles can be coated with any suitable amount of the anionic polymer. It is also contemplated that the anionic polymer can be added to the polishing composition to coat the alumina particles in situ.

[0033] The alumina particles can be surface-coated with an anionic polymer (e.g., a copolymer) in any suitable manner. In one embodiment, the alumina particles are treated with the copolymer, optionally in the presence of a solvent, prior to addition to the polishing composition. The alumina particles can be surface-coated in water in a separate step to form a dispersion of surface-coated alumina particles, and the resulting dispersion of surface-coated alumina particles is used to prepare the polishing composition. In some embodiments, the alumina particles can be surface-coated in the absence of a solvent, or in the presence of a solvent other than the water of the polishing composition, or an additional solvent in combination with the water of the polishing composition. The additional solvent may be removed, for example, by azeotropic distillation, to provide a dispersion of surface-coated alumina particles in water that is substantially free of additional solvent. In other embodiments, the surface-coated alumina particles can be isolated as a substantially dry material, i.e., substantially free of any solvent, by filtration, centrifugation, spray drying, or any suitable technique prior to use in preparing the polishing composition. In yet another embodiment, the surface-coated alumina particles are formed in situ when the alumina particles are combined with an anionic polymer (i.e., copolymer) in the polishing composition. In a preferred embodiment, the surface-coated alumina particles are formed by combining the alumina particles with an anionic polymer in an aqueous medium having a pH equal to or less than the isoelectric point of the alumina particles to form an aqueous dispersion of the alumina particles and the anionic polymer, and then subjecting the aqueous dispersion of the alumina particles and the anionic polymer to conditions such that the aqueous dispersion is thoroughly mixed. In one embodiment, the aqueous dispersion is subjected to high shear mixing.

[0034] The alumina particles can include any suitable amount of anionic polymer (e.g., copolymer). The amount of anionic polymer refers to the total amount of anionic polymer present in the polishing composition. The alumina particles can include about 1 ppm or more, for example, about 5 ppm or more, about 10 ppm or more, about 20 ppm or more, about 30 ppm or more, about 40 ppm or more, or about 50 ppm or more of anionic polymer. Alternatively, or in addition, the alumina particles can include about 500 ppm or less, for example, about 450 ppm or less, about 400 ppm or less, about 350 ppm or less, about 300 ppm or less, about 250 ppm or less, about 200 ppm or less, about 150 ppm or less, or about 100 ppm or less of anionic polymer. Thus, the alumina particles can include anionic polymer in an amount bounded by any two of the aforementioned endpoints. For example, the alumina particles may have a concentration of about 1 ppm to about 500 ppm, for example, about 5 ppm to about 450 ppm, about 10 ppm to about 400 ppm, about 10 ppm to about 350 ppm, about 10 ppm to about 300 ppm, about 10 ppm to about 250 ppm, about 10 ppm to about 200 ppm, about 10 ppm to about 100 ppm, about 10 ppm to about 90 ppm, about 10 ppm to about 8 The anionic polymer may be present in an amount of 0 ppm, about 10 ppm to about 70 ppm, about 10 ppm to about 60 ppm, about 10 ppm to about 50 ppm, about 10 ppm to about 40 ppm, about 20 ppm to about 300 ppm, about 20 ppm to about 250 ppm, about 20 ppm to about 200 ppm, about 20 ppm to about 150 ppm, or about 20 ppm to about 100 ppm.

[0035] In another embodiment, the polishing composition comprises an anionic polymer in an amount based on the weight of the abrasive in the polishing composition.For example, the polishing composition can comprise about 0.01 wt% or more, for example, about 0.05 wt% or more, about 0.1 wt% or more, for example, about 0.2 wt% or more, about 0.3 wt% or more, about 0.4 wt% or more, about 0.5 wt% or more, about 0.6 wt% or more, about 0.7 wt% or more, about 0.8 wt% or more, about 0.9 wt% or more, or about 1 wt% or more of anionic polymer based on the weight of the abrasive in the polishing composition.Alternatively or in addition, the polishing composition can comprise about 5 wt% or less, for example, about 4.5 wt% or less, about 4 wt% or less, about 3.5 wt% or less, about 3 wt% or less, about 2.5 wt% or less, or about 2 wt% or less of anionic polymer based on the weight of the abrasive in the polishing composition. Thus, the polishing composition can comprise an anionic polymer to abrasive weight ratio bounded by any two of the aforementioned endpoints. For example, the polishing composition may contain about 0.01% by weight to about 5% by weight, e.g., about 0.05% by weight to about 5% by weight, about 0.1% by weight to about 5% by weight, about 0.2% by weight to about 5% by weight, about 0.3% by weight to about 5% by weight, about 0.4% by weight to about 5% by weight, about 0.5% by weight to about 5% by weight, about 0.5% by weight to about 4.5% by weight, about 0.5% by weight to about 4% by weight, about 0.5% by weight to about 3.5% by weight, about 0.5% by weight to about 3% by weight, about 0.6% by weight to about 3% by weight, about 0.7% by weight to about 3% by weight, about 0.8% by weight to about 3% by weight, about 0.9% by weight to about 3% by weight, or about 1% by weight to about 3% by weight of the anionic polymer, based on the weight of the abrasive in the polishing composition.

[0036] The abrasive comprising silica particles and surface-coated alumina particles is desirably colloidally stable in the polishing composition of the present invention. The term colloid refers to the suspension of the abrasive particles in a liquid carrier (e.g., water). Colloidal stability refers to the maintenance of that suspension for a period of time. In the context of the present invention, the abrasive comprising silica particles and surface-coated alumina particles is considered colloidally stable if, when the abrasive comprising silica particles and surface-coated alumina particles is placed in a 100 mL graduated cylinder and left to stand for 2 hours without stirring, the difference between the concentration of the particles in the bottom 50 mL of the graduated cylinder ([B], in g / mL) and the concentration of the particles in the top 50 mL of the graduated cylinder ([T], in g / mL) divided by the initial concentration of the particles in the grinding composition ([C], in g / mL) is 0.5 or less (i.e. {[B]-[T]} / [C]≦0.5). More preferably, the value of [B]-[T] / [C] is 0.3 or less, and most preferably 0.1 or less.

[0037] In some embodiments, the chemical mechanical polishing composition further comprises an oxidizing agent. Without wishing to be bound by a particular theory, it is believed that the oxidizing agent helps to increase the polishing rate, i.e., functions as a rate enhancer. The oxidizing agent can be any suitable oxidizing agent. In certain embodiments, the oxidizing agent comprises ferric ions. The ferric ions can be provided by any suitable source of ferric ions. In some embodiments, the oxidizing agent can comprise a salt of a metal. For example, the ferric ions can be provided by a ferric salt comprising an inorganic anion such as nitrate ions (e.g., ferric nitrate), cyanide ions (e.g., ferric anion), and the like. The oxidizing agent can also comprise, but is not limited to, an organic iron (III) compound such as acetate, acetylacetonate, citrate, gluconate, oxalate, phthalate, and succinate, and mixtures thereof.

[0038] In some embodiments, the oxidizing agent comprises an oxy-containing oxidizing agent. Non-limiting examples of suitable oxy-containing oxidizing agents include persulfates, bromates, iodates, persulfates, perbromates, persulfates, periodates, persulfates, hydrogen peroxide, organic peroxide compounds such as peracetic acid, oxone, etc.

[0039] The chemical mechanical polishing composition can include any suitable amount of oxidizing agent. The chemical mechanical polishing composition can include about 1 ppm or more, for example, about 5 ppm or more, about 25 ppm or more, about 50 ppm or more, about 75 ppm or more, or about 100 ppm or more of oxidizing agent. Alternatively, or in addition, the polishing composition can include about 2,000 ppm or less of oxidizing agent, for example, about 1,500 ppm or less, about 1,000 ppm or less, about 500 ppm or less, or about 250 ppm or less of oxidizing agent. Thus, the polishing composition can include an oxidizing agent in an amount bounded by any two of the aforementioned endpoints. For example, the chemical mechanical polishing composition can include about 1 ppm to about 2,000 ppm of oxidizing agent, about 5 ppm to about 1,500 ppm, about 25 ppm to about 1,000 ppm, about 50 ppm to about 500 ppm, or about 75 ppm to about 250 ppm of oxidizing agent.

[0040] In some embodiments, the oxidizing agent of the chemical mechanical polishing composition further comprises hydrogen peroxide. When present, hydrogen peroxide can be present in the polishing composition in any suitable amount. For example, the polishing composition can comprise from about 0.1 wt.% to about 10 wt.%, such as from about 0.5 wt.% to about 10 wt.%, or from about 0.5 wt.% to about 5 wt.% hydrogen peroxide.

[0041] In some embodiments, the chemical mechanical polishing composition further comprises a corrosion inhibitor. Without wishing to be bound by a particular theory, the corrosion inhibitor helps to inhibit the etching of metal (e.g., tungsten), and thus functions as a corrosion inhibitor. As will be understood by those skilled in the art, the corrosion inhibitor compound inhibits the conversion of solid metal into soluble metal compounds while allowing effective removal of solid metal by CMP operations. Non-limiting examples of suitable corrosion inhibitors include, for example, glycine, lysine, arginine, alanine, or combinations thereof.

[0042] In a preferred embodiment, the chemical-mechanical polishing composition comprises glycine.

[0043] Other exemplary corrosion inhibitors include compounds having nitrogen-containing functional groups, such as nitrogen-containing heterocycles, alkylammonium ions, aminoalkyls, and corrosion inhibitors (i.e., naturally occurring and synthetically occurring), as described herein. In a preferred embodiment, the polishing composition comprises a corrosion inhibitor selected from hexylamine, tetramethyl-p-phenylenediamine, octylamine, diethylenetriamine, dibutylbenzylamine, aminopropylsilanol, aminopropylsiloxane, dodecylamine, tyrosine, arginine, glutamine, glutamic acid, cystine, lysine, glycine (aminoacetic acid), and combinations thereof.

[0044] The polishing composition can include any suitable amount of corrosion inhibitor. If the composition contains too little corrosion inhibitor, the composition may not exhibit sufficient polishing performance. In contrast, if the polishing composition contains too much corrosion inhibitor, the composition may exhibit undesirable polishing performance, may not be cost-effective, and / or may lack stability. Thus, the polishing composition can include about 10 wt% or less, for example, about 9 wt% or less, about 8 wt% or less, about 7 wt% or less, about 6 wt%, about 5 wt% or less, about 4 wt% or less, about 3 wt% or less, or about 2 wt% or less of corrosion inhibitor. Alternatively, or in addition, the polishing composition can include about 0.01 wt% or more, for example, about 0.05 wt% or more, about 0.1 wt% or more, about 0.5 wt% or more, about 1 wt% or more, or about 1.5 wt% or more of corrosion inhibitor. Thus, the polishing composition can include a corrosion inhibitor in an amount bounded by any two of the aforementioned endpoints. For example, the polishing composition can include the corrosion inhibitor in an amount of about 0.01 wt % to about 10 wt %, e.g., about 0.05 wt % to about 9 wt %, about 0.1 wt % to about 8 wt %, about 0.5 wt % to about 7 wt %, about 1 wt % to about 6 wt %, about 1.5 wt % to about 5 wt %, or about 2 wt % to about 4 wt %.

[0045] In one embodiment, the polishing composition comprises a corrosion inhibitor in an amount of about 0.02 wt % to about 0.2 wt %, for example, about 0.05 wt %, about 0.1 wt %, or about 0.15%.

[0046] In some embodiments, the chemical mechanical polishing composition further comprises a stabilizer. Typically, the stabilizer comprises an organic carboxylic acid. The stabilizer, when present, serves to stabilize the ferric ion of the oxidizer. Without wishing to be bound by a particular theory, it is believed that the stabilizer (e.g., organic carboxylic acid) serves to prevent the ferric ion from decomposing other components in the composition over time, i.e., to weaken the reactivity of the ferric ion. Furthermore, the addition of the stabilizer reduces the effectiveness of the ferric-containing accelerator, and as a result, the selection of the type and amount of stabilizer added to the polishing composition can have a significant impact on the CMP performance. Without wishing to be bound by a particular theory, it is believed that the addition of the stabilizer leads to the formation of a stabilizer / oxidizer complex, which suppresses the reactivity of the oxidizer while allowing the oxidizer to maintain sufficient activity to promote rapid tungsten polishing rates.

[0047] Preferred stabilizers include organic carboxylic acids, such as, for example, acetic acid, phthalic acid, citric acid, adipic acid, oxalic acid, malonic acid, aspartic acid, succinic acid, glutaric acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, maleic acid, glutaconic acid, muconic acid, ethylenediaminetetraacetic acid (EDTA), propylenediaminetetraacetic acid (PDTA), and mixtures thereof. In one embodiment, the stabilizer is malonic acid. The stabilizer may be used in its conjugated form, for example, a carboxylate may be used in place of the carboxylic acid. The term "acid" also includes the conjugate base (or bases) of the acid. For example, the term "adipic acid" includes adipic acid and its conjugate base. The organic carboxylic acids may be used alone or in combination and significantly reduce the rate at which an oxidizing agent, such as hydrogen peroxide, decomposes.

[0048] The polishing composition can include any suitable amount of stabilizer. If the composition includes too little stabilizer, the composition may not exhibit sufficient polishing performance or may be unstable. In contrast, if the polishing composition includes too much organic carboxylic acid, the composition may not be cost-effective and / or may lack stability. Thus, the polishing composition can include about 10 wt% or less, e.g., about 9 wt% or less, about 8 wt% or less, about 7 wt% or less, about 6 wt% or less, about 5 wt% or less, about 4 wt% or less, about 3 wt% or less, or about 2 wt% or less of stabilizer. Alternatively, or in addition, the polishing composition can include about 0.01 wt% or more, e.g., about 0.05 wt% or more, about 0.1 wt% or more, about 0.5 wt% or more, about 1 wt% or more, or about 1.5 wt% or more of stabilizer. Thus, the polishing composition can include a stabilizer in an amount bounded by any two of the aforementioned endpoints. For example, the polishing composition can contain the stabilizer in an amount of about 0.001 wt % to about 10 wt %, e.g., about 0.005 wt % to about 9 wt %, about 0.01 wt % to about 8 wt %, about 0.05 wt % to about 7 wt %, about 0.1 wt % to about 6 wt %, about 0.5 wt % to about 5 wt %, about 1 wt % to about 4 wt %, or about 1.5 wt % to about 3 wt %.

[0049] In one embodiment, the polishing composition comprises the stabilizer in an amount of about 0.01 wt % to about 1 wt % (e.g., about 0.05 wt %). In another embodiment, the polishing composition comprises the stabilizer in an amount of about 0.1 wt %.

[0050] In some embodiments, the chemical mechanical polishing composition further comprises an organic phosphonic acid. Without wishing to be bound by a particular theory, it is believed that the organic phosphonic acid increases the polishing rate of silicon oxide, thereby acting as an oxide removal rate enhancer. It is believed that the inclusion of the organic phosphonic acid improves the removal rate and reduces defects on the polished oxide surface. When present, the organic phosphonic acid can be any suitable organic phosphonic acid. Non-limiting examples of suitable organic phosphonic acids include 2-aminoethylphosphonic acid, 1-hydroxyethylidene-1,1-diphosphonic acid, aminotri(methylenephosphonic acid), ethylenediaminetetra(methylenephosphonic acid), diethylenetriaminepenta(methylenephosphonic acid), ethane-1,1-diphosphonic acid, ethane-1,1,2-triphosphonic acid, ethane-1-hydroxy-1,1-diphosphonic acid, ethane-1-hydroxy-1,1,2-triphosphonic acid, ethane-1,2-dicarboxy-1,2-diphosphonic acid, methanehydroxyphosphonic acid, 2-phosphonobutane-1,2-dicarboxylic acid, 1-phosphonobutane-2,3,4-tricarboxylic acid, α-methylphosphonosuccinic acid, and combinations thereof.

[0051] The polishing composition can include any suitable amount of organic phosphonic acid. The polishing composition can include about 0.01 wt% or more of organic phosphonic acid, for example, about 0.02 wt% or more, about 0.03 wt% or more, about 0.04 wt% or more, about 0.05 wt% or more, about 0.06 wt% or more, about 0.07 wt% or more, about 0.08 wt% or more, about 0.09 wt% or more, or about 0.1 wt% or more of organic phosphonic acid. Alternatively, or in addition, the polishing composition can include about 2 wt% or less, for example, about 1.9 wt% or less, about 1.8 wt% or less, about 1.7 wt% or less, about 1.6 wt% or less, about 1.5 wt% or less, about 1.4 wt% or less, about 1.3 wt% or less, about 1.2 wt% or less, about 1.1 wt% or less, or about 1 wt% or less of organic phosphonic acid. Thus, the polishing composition can include organic phosphonic acid in an amount bounded by any two of the aforementioned endpoints. For example, the polishing composition can contain about 0.01 wt % to about 2 wt %, about 0.01 wt % to about 1 wt %, about 0.02 wt % to about 1 wt %, about 0.03 wt % to about 1 wt %, about 0.04 wt % to about 1 wt %, about 0.05 wt % to about 0.5 wt %, or about 0.1 wt % to about 0.5 wt % of the organic phosphonic acid.

[0052] The polishing composition has a pH of about 2 to about 5. Thus, the polishing composition can have a pH of about 2 or more, for example, about 2.1 or more, about 2.2 or more, about 2.3 or more, about 2.4 or more, about 2.5 or more, about 2.6 or more, about 2.7 or more, about 2.8 or more, about 2.9 or more, about 3.0 or more, about 3.1 or more, about 3.2 or more, about 3.3 or more, or about 3.4 or more. Alternatively, or in addition, the polishing composition can have a pH of about 5 or less, for example, about 4.9 or less, about 4.8 or less, about 4.7 or less, about 4.6 or less, about 4.5 or less, about 4.4 or less, about 4.3 or less, about 4.2 or less, about 4.1 or less, about 4 or less, about 3.9 or less, about 3.8 or less, about 3.7 or less, about 3.6 or less, or about 3.5 or less. Thus, the polishing composition can have a pH bounded by any two of the aforementioned endpoints. For example, the polishing composition can have a pH of about 2 to about 5, e.g., about 2.1 to about 5, about 2.2 to about 4.9, about 2.3 to about 4.8, about 2.4 to about 4.7, about 2.5 to about 4.6, about 2.6 to about 4.5, about 2.7 to about 4.4, about 2.8 to about 4.3, about 2.9 to about 4.2, about 3.0 to about 4.1, about 3.1 to about 4.0, about 3.0 to about 3.5, or about 3.2 to about 3.9.

[0053] The pH of the polishing composition can be adjusted as necessary using any suitable acid or base.Non-limiting examples of suitable acids include nitric acid, sulfuric acid, phosphoric acid, and organic acids such as formic acid and acetic acid.Non-limiting examples of suitable bases include sodium hydroxide, potassium hydroxide, and ammonium hydroxide.

[0054] The polishing composition may optionally further comprise one or more additives.Exemplary additives include biocides, buffers, surfactants, catalysts, and combinations thereof.When additives are present, they should not adversely affect the stability of the polishing composition.

[0055] When present, the biocide can be any suitable biocide and can be present in the polishing composition in any suitable amount.Suitable biocides are isothiazolinone biocides.The amount of biocide in the polishing composition is typically about 1 ppm to about 500 ppm, preferably about 10 ppm to about 125 ppm.An exemplary biocide is KATHON (trademark), available from Dow Chemical (Midland, MI).

[0056] The polishing composition can be prepared by any suitable technique, many of which are known to those skilled in the art. The polishing composition can be prepared by a batch process or a continuous process. In general, the polishing composition can be prepared by combining its components in any order. As used herein, the term "component" includes individual components (e.g., silica particles, alumina particles surface-coated with anionic polymer, any oxidizing agent, any hydrogen peroxide, any organic phosphonic acid, any corrosion inhibitor, any buffer, any pH adjuster, etc.), as well as any combination of components (e.g., silica particles, alumina particles surface-coated with anionic polymer, any oxidizing agent, any hydrogen peroxide, any organic phosphonic acid, any corrosion inhibitor, any buffer, any pH adjuster, etc.).

[0057] For example, silica particles and alumina particles surface-coated with an anionic polymer can be dispersed in water. Then, any oxidizing agent, any hydrogen peroxide, any organic phosphonic acid, any corrosion inhibitor, any buffer, and any pH adjuster can be added and mixed by any method that can incorporate the components into the polishing composition. Any oxidizing agent and / or any hydrogen peroxide can be added at any time during the preparation of the polishing composition. Alternatively, alumina particles can be separately surface-coated with an anionic polymer, and the silica particles and surface-coated alumina are placed in water or dispersed in water, followed by adding any oxidizing agent, any hydrogen peroxide, any organic phosphonic acid, any corrosion inhibitor, any buffer, any pH adjuster, and mixing by any method that can incorporate the components into the polishing composition. The polishing composition can be prepared before use by adding one or more components, such as any oxidizing agent and / or any hydrogen peroxide, to the polishing composition immediately before use (e.g., within about 1 minute before use, or within about 1 hour before use, or within about 7 days before use). The polishing composition can also be prepared by mixing the components at the surface of the substrate during the polishing operation.

[0058] The polishing composition can be provided as a one-package system that includes silica particles and alumina particles surface-coated with anionic polymer, any oxidizing agent, any hydrogen peroxide, any organic phosphonic acid, any corrosion inhibitor, any buffer, any pH adjuster, and water.In another embodiment, the polishing composition can be provided as a one-package system that includes abrasive, anionic polymer, oxidizing agent, any hydrogen peroxide, any organic phosphonic acid, any corrosion inhibitor, any buffer, any pH adjuster, and water.Alternatively, the abrasive that includes silica particles and alumina particles surface-coated with anionic polymer can be provided as a dispersion in water in a first container, and the oxidizing agent, any hydrogen peroxide, any organic phosphonic acid, any corrosion inhibitor, any buffer, any pH adjuster, and water can be provided in a second container either in dry form or as an aqueous solution or dispersion in water. In an alternative embodiment, the abrasive can be provided as a dispersion in water in a first container, and the anionic polymer, the oxidizer, any hydrogen peroxide, any organic phosphonic acid, any corrosion inhibitor, any buffer, and any pH adjuster, and water can be provided in a second container either in dry form or as an aqueous solution or dispersion in water. The oxidizer and / or any hydrogen peroxide are desirably provided separately from the other components of the polishing composition, and are combined with the other components of the polishing composition immediately prior to use, for example, by the end user (e.g., within one week before use, within one day before use, within one hour before use, within ten minutes before use, or within one minute before use). The components in the first or second container can be in dry form, and the components in the other container can be in the form of an aqueous dispersion. Furthermore, it is also suitable that the components in the first and second containers have different pH values, or have substantially similar or equal pH values. Combinations of two separate containers, or three or more containers, of the components of the polishing composition are within the knowledge of those skilled in the art.

[0059] The polishing composition of the present invention can also be provided as a concentrate intended to be diluted with an appropriate amount of water before use.In such an embodiment, the polishing composition concentrate can include an abrasive, with or without an oxidizing agent and / or any hydrogen peroxide, comprising silica particles and alumina particles surface-coated with an anionic polymer, any organic phosphonic acid, any corrosion inhibitor, any buffer, and any pH adjuster, and water, in such an amount that when the concentrate is diluted with an appropriate amount of water, if hydrogen peroxide is not already present in an appropriate amount, each component of the polishing composition will be present in the polishing composition in an amount within the appropriate range listed above for each component.In another embodiment, the polishing composition concentrate can include an abrasive, with or without an oxidizing agent and / or any hydrogen peroxide, an anionic polymer, any organic phosphonic acid, any corrosion inhibitor, any buffer, and any pH adjuster, and water, in such an amount that when the concentrate is diluted with an appropriate amount of water, if hydrogen peroxide is not already present in an appropriate amount, each component of the polishing composition will be present in the polishing composition in an amount within the appropriate range listed above for each component. For example, the abrasive, anionic polymer, oxidizer, optional organic phosphonic acid, optional corrosion inhibitor, optional buffer, and optional pH adjuster, or the abrasive including silica particles and alumina particles surface-coated with anionic polymer, oxidizer, optional hydrogen peroxide, optional organic phosphonic acid, optional corrosion inhibitor, optional buffer, and optional pH adjuster, can each be present in an amount that is about twice (e.g., about three times, about four times, or about five times) the concentration listed above for each component, so that when the concentrate is diluted with an equal amount of water (e.g., 2 equivalents of water, 3 equivalents of water, or 4 equivalents of water, respectively) along with a suitable amount of optional hydrogen peroxide, each component is present in the polishing composition in an amount within the ranges listed above for each component. Moreover, as will be understood by those skilled in the art, the concentrate can contain a suitable ratio of water present in the final polishing composition to ensure that the other components are at least partially or completely dissolved in the concentrate.

[0060] The present invention also provides a method for chemically mechanically polishing a substrate, comprising: (i) providing a substrate; (ii) providing a polishing pad; (iii) providing a chemical mechanical polishing composition comprising: (a) an abrasive comprising silica particles and alumina particles, the alumina particles being surface-coated with an anionic polymer; and (b) water; (iv) contacting the substrate with the polishing pad and the chemical mechanical polishing composition; and (v) moving the polishing pad and the chemical mechanical polishing composition relative to the substrate to abrade at least a portion of the substrate to polish the substrate. The chemical mechanical polishing composition can be used to polish any suitable substrate, and is particularly useful for polishing a substrate comprising at least one layer (typically a surface layer) of tungsten and at least one layer of silicon oxide and silicon nitride. Preferably, the substrate comprises at least one layer of tungsten on a surface of the substrate, at least one layer of silicon oxide on the surface of the substrate, and at least one layer of silicon nitride on the surface of the substrate, and at least a portion of the tungsten, silicon oxide, and / or silicon nitride on the surface of the substrate is ground away, thereby polishing the substrate.

[0061] The chemical mechanical polishing composition is particularly suitable for use in both bulk polishing and post-polishing buffing of substrates including tungsten, silicon oxide, and silicon nitride. Applicant has surprisingly found that the polishing composition of the present invention containing mixed particles advantageously provides suitable substrate removal rates and substrate selectivity in both bulk polishing and buffing applications that have not previously been observed with a single polishing composition. In conventional polishing systems, two or more polishing compositions are typically required to achieve suitable removal rates, selectivity, and topography performance. The polishing composition of the present invention exhibits removal rates of tungsten and silicon oxide and / or SiN such that erosion is minimized in both bulk tungsten polishing and buffing processes. For example, when using the polishing composition of the present invention, the removal rate of tungsten is lower than the removal rate of silicon oxide or silicon nitride. The removal rate of tungsten to silicon oxide is 1:2 or more (e.g., W:TEOS is 1:2.5 or more, 1:5 or more, 1:10 or more). Similarly, the removal rate of tungsten to silicon nitride is 1:2 or greater (eg, W:SiN is 1:2.5 or greater, 1:5 or greater, 1:10 or greater).

[0062] In one embodiment, the substrate includes a silicon oxide layer on a surface of the substrate and / or a nitride layer (e.g., silicon nitride or titanium nitride) on a surface of the substrate, and at least a portion of the silicon oxide layer and / or at least a portion of the nitride layer is ground away to polish the substrate.

[0063] The silicon oxide can be any suitable silicon oxide, many forms of which are known in the art.Suitable types of silicon oxide include, but are not limited to, tetraethyl orthosilicate (TEOS), borophosphosilicate glass (BPSG), plasma enhanced TEOS (PETEOS), thermal oxide, undoped silicate glass, and HDP oxide.

[0064] In one embodiment, the silicon oxide is tetraethylorthosilica (TEOS).

[0065] In one embodiment, the nitride is silicon nitride (SiN).

[0066] In a particular embodiment, a substrate is prepared by forming surface features on a substrate, for example comprising a silicon oxide layer on the surface of a silicon wafer. The substrate surface is then coated with a layer of circuit-forming material, such as tungsten, leaving a surplus of tungsten to fill the surface features. Initial polishing of the tungsten surplus exposes the silicon oxide on the surface, thereby forming substrate circuit features comprised of tungsten and / or cobalt filled traces separated by regions of silicon oxide, and a buffing step can then be performed to reduce surface defects resulting from the initial polishing step and to remove or reduce scratches and residues on the substrate surface.

[0067] In one embodiment, the substrate includes a tungsten layer on a surface of the substrate, and at least a portion of the tungsten layer is ground away to polish the substrate.

[0068] In one embodiment, the substrate further comprises a tungsten layer on a surface of the substrate, at least a portion of the tungsten layer in addition to at least a portion of the oxide and / or nitride layer for polishing the substrate.

[0069] The chemical mechanical polishing composition and method of the present invention are particularly suitable for use with a chemical mechanical polishing apparatus.Typically, the apparatus includes a platen that moves during use and has a speed resulting from an orbital, linear, or circular motion, a polishing pad that contacts the platen and moves with the platen during the motion, and a carrier that holds a substrate that is polished by contacting the substrate and moving the substrate against the surface of the polishing pad.The substrate is polished by placing the substrate in contact with the polishing pad and the polishing composition of the present invention, and then moving the polishing pad against the substrate to grind at least a portion of the surface of the substrate to polish the substrate.

[0070] The substrate can be polished by the chemical mechanical polishing composition using any suitable polishing pad (e.g., polishing surface). Suitable polishing pads include, for example, woven and nonwoven polishing pads. In addition, suitable polishing pads can include any suitable polymer of various density, hardness, thickness, compressibility, ability to rebound when compressed, and compression modulus. Suitable polymers include, for example, polyvinyl chloride, polyvinyl fluoride, nylon, fluorocarbon, polycarbonate, polyester, polyacrylate, polyether, polyethylene, polyamide, polyurethane, polystyrene, polypropylene, co-formed products thereof, and mixtures thereof. Soft polyurethane polishing pads are particularly useful in combination with the polishing method of the present invention. Exemplary pads include, but are not limited to, SURFIN™ 000, SURFIN™ SSW1, SPM3100 (e.g., commercially available from Eminess Technologies), POLITEX™, Fujibo POLYPAS™ 27, and NexPlanar® E6088 series pads (commercially available from Cabot Microelectronics).

[0071] Preferably, the chemical mechanical polishing apparatus further comprises a system for detecting the end point of polishing in situ, many of which are known in the art. Techniques for inspecting and monitoring the polishing process by analyzing light or other radiation reflected from the surface of the substrate being polished are known in the art. Such methods are disclosed, for example, in U.S. Pat. No. 5,196,353, U.S. Pat. No. 5,433,651, U.S. Pat. No. 5,609,511, U.S. Pat. No. 5,643,046, U.S. Pat. No. 5,658,183, U.S. Pat. No. 5,730,642, U.S. Pat. No. 5,838,447, U.S. Pat. No. 5,872,633, U.S. Pat. No. 5,893,796, U.S. Pat. No. 5,949,927, and U.S. Pat. No. 5,964,643. Preferably, inspecting or monitoring the progress of the polishing process with respect to the substrate being polished allows for the determination of the end point of polishing, i.e., when to terminate the polishing process with respect to a particular substrate.

[0072] Embodiment (1) In embodiment (1), a chemical mechanical polishing composition is provided that includes: (a) an abrasive containing silica particles and alumina particles, the alumina particles being surface-coated with an anionic polymer; and (b) water.

[0073] (2) In embodiment (2), there is provided the polishing composition according to embodiment (1), wherein the silica particles comprise colloidal silica particles, aluminum-doped silica particles, sulfonate-modified colloidal silica, or a combination thereof.

[0074] (3) In embodiment (3), a polishing composition according to embodiment (1) or (2) is provided, wherein the anionic polymer contains repeating monomer units selected from carboxylic acid monomer units, sulfonic acid monomer units, phosphonic acid monomer units, and combinations thereof.

[0075] (4) In embodiment (4), the polishing composition according to any one of embodiments (1) to (3) is provided, wherein the anionic polymer comprises a repeating monomer unit selected from acrylic acid, methacrylic acid, itaconic acid, maleic acid, succinic acid, terephthalic acid, aspartic acid, maleic anhydride, 4-vinylbenzenesulfonic acid, vinylsulfonic acid, 2-sulfoethyl acrylate, 2-sulfoethyl methacrylate, 3-sulfopropyl acrylate, 3-sulfopropyl methacrylate, 2-propene-1-sulfonic acid, styrenesulfonic acid, 2-acrylamido-2-methyl-1-propanesulfonic acid, vinylidene-1,1-diphosphonic acid, dimethyl-p-vinylbenzyl phosphonate, bisdiethylphosphonate (meth) ammonium acrylate, acrylamidophosphonate monomer, vinylphosphonic acid, 2-(methacryloyloxy)ethyl phosphate, and combinations thereof.

[0076] (5) In embodiment (5), a polishing composition according to any one of embodiments (1) to (4) is provided, in which the anionic polymer comprises a copolymer comprising a combination of sulfonic acid monomer units and carboxylic acid monomer units, or a copolymer comprising a combination of sulfonic acid monomer units and phosphonic acid monomer units.

[0077] (6) In embodiment (6), there is provided the polishing composition according to any one of embodiments (1) to (5), wherein the anionic polymer consists of 2-acrylamido-2-methylpropanesulfonic acid monomer units and acrylic acid monomer units.

[0078] (7) In embodiment (7), there is provided the polishing composition according to any one of embodiments (1) to (4), wherein the anionic polymer comprises 2-acrylamido-2-methylpropanesulfonic acid monomer units.

[0079] (8) In embodiment (8), there is provided the polishing composition according to any one of embodiments (1) to (7), wherein the polishing composition further comprises an oxidizing agent.

[0080] (9) In embodiment (9), the polishing composition of embodiment (8) is provided, wherein the oxidizing agent comprises ferric ions.

[0081] (10) In embodiment (10), there is provided the polishing composition of embodiment (9), wherein the oxidizing agent further comprises hydrogen peroxide.

[0082] (11) In embodiment (11), there is provided the polishing composition according to any one of embodiments (1) to (10), wherein the polishing composition further comprises a corrosion inhibitor.

[0083] (12) In embodiment (12), there is provided the polishing composition of embodiment (11), wherein the corrosion inhibitor is glycine, lysine, arginine, alanine, or a combination thereof.

[0084] (13) In embodiment (13), the polishing composition of embodiment (12) is provided, wherein the corrosion inhibitor comprises glycine.

[0085] (14) In embodiment (14), there is provided the polishing composition according to any one of embodiments (1) to (13), wherein the polishing composition further comprises a stabilizer.

[0086] (15) In embodiment (15), the polishing composition of embodiment (14) is provided, wherein the stabilizer is selected from acetic acid, phthalic acid, citric acid, adipic acid, oxalic acid, malonic acid, aspartic acid, succinic acid, glutaric acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, maleic acid, glutaconic acid, muconic acid, ethylenediaminetetraacetic acid (EDTA), propylenediaminetetraacetic acid (PDTA), and combinations thereof.

[0087] (16) In embodiment (16), there is provided the polishing composition of embodiment (15), wherein the stabilizer is malonic acid.

[0088] (17) In embodiment (17), there is provided the polishing composition of any one of embodiments (1) to (16), wherein the polishing composition further comprises an organic phosphonic acid.

[0089] (18) In embodiment (18), the polishing composition of embodiment (17) is provided, wherein the organic phosphonic acid is selected from 2-aminoethylphosphonic acid, 1-hydroxyethylidene-1,1-diphosphonic acid, aminotri(methylenephosphonic acid), ethylenediaminetetra(methylenephosphonic acid), diethylenetriaminepenta(methylenephosphonic acid), ethane-1,1-diphosphonic acid, ethane-1,1,2-triphosphonic acid, ethane-1-hydroxy-1,1-diphosphonic acid, ethane-1-hydroxy-1,1,2-triphosphonic acid, ethane-1,2-dicarboxy-1,2-diphosphonic acid, methanehydroxyphosphonic acid, 2-phosphonobutane-1,2-dicarboxylic acid, 1-phosphonobutane-2,3,4-tricarboxylic acid, α-methylphosphonosuccinic acid, and combinations thereof.

[0090] (19) In embodiment (19), the polishing composition of any one of embodiments (1) to (18) is provided, wherein the polishing composition has a pH of about 2 to about 5.

[0091] (20) In embodiment (20), there is provided a polishing composition according to any one of embodiments (1) to (19), wherein the polishing composition further comprises an additive selected from a biocide, a buffer, a surfactant, a catalyst, a stabilizer, a corrosion inhibitor, and combinations thereof.

[0092] (21) In embodiment (21), a method for chemically mechanically polishing a substrate is provided, comprising: (i) providing a substrate; (ii) providing a polishing pad; (iii) providing a chemical-mechanical polishing composition comprising: (a) an abrasive comprising silica particles and alumina particles, the alumina particles being surface-coated with an anionic polymer; and (b) water; (iv) contacting the substrate with the polishing pad and the chemical-mechanical polishing composition; and (v) moving the polishing pad and the chemical-mechanical polishing composition relative to the substrate to grind at least a portion of the substrate and polish the substrate.

[0093] (22) In embodiment (22), the method of embodiment (21) is provided, wherein the silica particles comprise colloidal silica particles, aluminum-doped silica particles, sulfonate-modified colloidal silica, or a combination thereof.

[0094] (23) In embodiment (23), the method of embodiment (21) or (22) is provided, wherein the anionic polymer comprises repeating monomer units selected from carboxylic acid monomer units, sulfonic acid monomer units, phosphonic acid monomer units, and combinations thereof.

[0095] (24) In embodiment (24), the method of any one of embodiments (21)-(23) is provided, wherein the anionic polymer comprises repeating monomer units selected from acrylic acid, methacrylic acid, itaconic acid, maleic acid, succinic acid, terephthalic acid, aspartic acid, maleic anhydride, 4-vinylbenzenesulfonic acid, vinylsulfonic acid, 2-sulfoethyl acrylate, 2-sulfoethyl methacrylate, 3-sulfopropyl acrylate, 3-sulfopropyl methacrylate, 2-propene-1-sulfonic acid, styrenesulfonic acid, 2-acrylamido-2-methyl-1-propanesulfonic acid, vinylidene-1,1-diphosphonic acid, dimethyl-p-vinylbenzyl phosphonate, bisdiethylphosphonate ammonium (meth)acrylate, acrylamidophosphonate monomer, vinylphosphonic acid, 2-(methacryloyloxy)ethyl phosphate, and combinations thereof.

[0096] (25) In embodiment (25), the method of any one of embodiments (21) to (24) is provided, wherein the anionic polymer comprises a copolymer comprising a combination of sulfonic acid monomer units and carboxylic acid monomer units, or a copolymer comprising a combination of sulfonic acid monomer units and phosphonic acid monomer units.

[0097] (26) In embodiment (26), the method of embodiment (25) is provided, wherein the anionic polymer consists of 2-acrylamido-2-methylpropanesulfonic acid monomer units and acrylic acid monomer units.

[0098] (27) In embodiment (27), the method of any one of embodiments (21) to (24) is provided, wherein the anionic polymer comprises 2-acrylamido-2-methylpropanesulfonic acid monomer units.

[0099] (28) In embodiment (28), a method according to any one of embodiments (21) to (27) is provided, wherein the polishing composition further comprises an oxidizing agent, a corrosion inhibitor, a stabilizer, an organic phosphonic acid, or any combination thereof.

[0100] (29) In embodiment (29), the method of any one of embodiments (21) to (28) is provided, wherein the polishing composition has a pH of about 2 to about 5.

[0101] (30) In embodiment (30), the method according to any one of embodiments (21) to (29) is provided, wherein the substrate comprises a silicon oxide layer on a surface of the substrate, and at least a portion of the silicon oxide layer is ground to polish the substrate.

[0102] (31) In embodiment (31), a method according to any one of embodiments (21) to (30) is provided, in which the substrate includes a nitride layer on a surface of the substrate, and at least a portion of the nitride layer is ground to polish the substrate.

[0103] (32) In embodiment (32), a method according to any one of embodiments (21) to (31) is provided, in which the substrate includes a tungsten layer on a surface of the substrate, and at least a portion of the tungsten layer is ground to polish the substrate.

[0104] (33) In embodiment (33), the method of any one of embodiments (30) to (32) is provided, wherein the silicon oxide is TEOS.

[0105] (34) In embodiment (34), the method of any one of embodiments (31) to (33) is provided, wherein the nitride is silicon nitride.

[0106] The following examples further illustrate the invention but, of course, should not be construed as in any way limiting its scope. EXAMPLES

[0107] The polishing compositions contained one or more of the eleven abrasive particles (particle numbers 1 to 11) listed in Table 1. The pre-coated abrasive particles were obtained from commercial sources, such as Fuso Chemical Co. (Tokyo, Japan), Nissan Chemical Corp. (Santa Clara, Calif.), and Cabot Microelectronics Corp. (Aurora, Ill.).

[0108] The following abbreviations are used herein: AMPS refers to 2-acrylamido-2-methyl-1-propanesulfonic acid, AA-AMPS refers to acrylic acid-2-acrylamido-2-methyl-1-propanesulfonic acid, W refers to tungsten, TEOS refers to tetraethyl orthosilicate, SiN refers to silicon nitride, CON refers to the control polishing composition, and RR refers to removal rate. [Table 1]

[0109] Unless otherwise noted, all polishing compositions contained the following ingredients in addition to those described in the examples: 0.1 wt. % glycine as a corrosion inhibitor, 0.03 wt. % ferric nitrate as an oxidizer, 0.0608 wt. % malonic acid as a stabilizer, 15 ppm KATHON™ biocide, and 0.5 wt. % DEQUEST™ 2010 containing 1-hydroxyethylidene-1,1-diphosphonic acid (i.e., an organic phosphonic acid) as a silicon oxide removal rate enhancer. The pH of the polishing compositions was adjusted as necessary using nitric acid or potassium hydroxide.

[0110] The experimental control polishing composition ("CON") for Examples 1-4 had a pH of 3 and contained 0.5 wt. % α-alumina (Particle No. 1) coated with (AA-AMPS) copolymer having an average particle size of 90 nm as the only abrasive particle.

[0111] In the polishing experiments described in Examples 1-4, substrates including tungsten, TEOS, and SiN were polished using the following parameters: a MIRRA™ polisher (Applied Materials, Santa Clara, CA), a Fujibo H7000 pad (Tokyo, Japan), a downforce of 1.5 psi, and a flow rate of 150 mL / min.

[0112] Example 1 This example demonstrates the effect of pH on the tungsten, TEOS, and SiN removal rates of polishing compositions in accordance with the invention.

[0113] Substrates were polished with four polishing compositions (i.e., Polishing Compositions 1A-1C and CON of the present invention). Each of Polishing Compositions 1A-1C contained 0.5 wt. % colloidal silica (particle number 6) having an average particle size of 120 nm and 0.5 wt. % α-alumina coated with (AA-AMPS) copolymer (particle number 1) having an average particle size of 90 nm.

[0114] The pH of the polishing composition and the polishing results are listed in Table 2. [Table 2]

[0115] As is evident from the results set forth in Table 2, polishing compositions 1A to 1C of the present invention each exhibited favorable W, TEOS, and SiN removal rates, as well as favorable TEOS:W and SiN:W selectivities over the pH range of 2 to 4. In addition, polishing compositions 1A to 1C of the present invention, which contain silica particles and alumina particles surface-coated with an anionic polymer, exhibited improved TEOS and SiN selectivities compared to the polishing composition (CON) containing only surface-coated alumina particles as an abrasive.

[0116] Example 2 This example demonstrates the effect of colloidal silica particle size and concentration on the tungsten, TEOS, and SiN removal rates of polishing compositions according to the invention.

[0117] Substrates were polished with five polishing compositions (i.e., Polishing Compositions 2A-2D and CON of the present invention). Each of Polishing Compositions 2A-2D and CON had a pH of 3 and contained 0.5 wt. % α-alumina (Particle No. 1) coated with (AA-AMPS) copolymer having an average particle size of 90 nm.

[0118] Polishing composition 2A contained 0.5 wt% colloidal silica (particle number 5) having a primary particle size of 100 nm. Polishing composition 2B contained 1 wt% colloidal silica (particle number 5) having an average particle size of 100 nm. Polishing composition 2C contained 0.5 wt% colloidal silica (particle number 4) having an average particle size of 50 nm. Polishing composition 2D contained 1 wt% colloidal silica (particle number 4) having an average particle size of 50 nm.

[0119] The substrate polishing results are shown in Table 3. [Table 3]

[0120] As can be seen from the results listed in Table 3, the polishing compositions 2A-2D of the present invention exhibited favorable W, TEOS, and SiN removal rates, as well as favorable TEOS:W and SiN:W selectivities. Each of the polishing compositions of the present invention containing mixed abrasives exhibited improved performance compared to the control. In addition, the polishing compositions 2B and 2D containing 1 wt.% silica exhibited higher TEOS and SiN removal rates when compared to the polishing compositions 2A and 2C containing 0.5 wt.% silica. Thus, these results demonstrate the beneficial effect of silica particles on the polishing compositions according to the present invention.

[0121] Example 3 This example demonstrates the effect of silica particle charge on the tungsten, TEOS, and SiN removal rates of polishing compositions according to the invention.

[0122] Substrates were polished with eleven polishing compositions (i.e., Polishing Compositions 3A-3J and CON of the present invention). Each of Polishing Compositions 3A-3J had a pH of 3, and each contained 0.5 wt. % α-alumina (Particle No. 1) coated with (AA-AMPS) copolymer having an average particle size of 90 nm. Each composition also contained particles as set forth in Table 4 below.

[0123] More specifically, polishing compositions 3A and 3B contained 0.5% and 1% by weight, respectively, of sulfonate-modified colloidal silica (particle number 7) having an average particle size of 70 nm. Polishing compositions 3C and 3D contained 0.5% and 1% by weight, respectively, of sulfonate-modified colloidal silica (particle number 10) having an average particle size of 120 nm. Polishing compositions 3E and 3F contained 0.5% and 1% by weight, respectively, of amino-modified colloidal silica (particle number 8) having an average particle size of 100 nm. Polishing compositions 3G and 3H contained 0.5% and 1% by weight, respectively, of fumed silica (particle number 11) having an average particle size of 160 nm. Polishing compositions 3I and 3J contained 0.5% and 1% by weight, respectively, of aluminum-doped colloidal silica (particle number 9) having an average particle size of 20 nm.

[0124] The polishing results are listed in Table 4. [Table 4]

[0125] As is evident from the results set forth in Table 4, the polishing compositions containing negatively charged colloidal silica particles (i.e., Polishing Compositions 3A-3D, 3I, and 3J) exhibited favorable W, TEOS, and SiN removal rates, and TEOS:W and SiN:W selectivities. Polishing Compositions 3A-3D, 3I, and 3J exhibited improved polishing performance compared to the control.

[0126] The polishing compositions containing positively charged silica particles (Polishing Compositions 3E and 3F), especially those containing negatively charged fumed silica (Polishing Compositions 3G and 3H), did not show suitable polishing performance. The polishing compositions 3E and 3F containing amino-modified silica particles were not stable. The polishing compositions 3G and 3H containing fumed silica as the only silica particles did not show an increase in TEOS:W selectivity or an increase in SiN:W selectivity.

[0127] Example 4 This example demonstrates the effect of various amounts of silica particles and surface-coated alumina particles on the tungsten, TEOS, and SiN removal rates of a polishing composition according to the invention.

[0128] Substrates were polished with seven polishing compositions (i.e., Polishing Compositions 4A-4F and CON of the present invention). Each of Polishing Compositions 4A-4F had a pH of 3 and contained various amounts of colloidal silica (Particle No. 6) having an average particle size of 120 nm, as shown in Table 5.

[0129] Polishing composition 4A contained 0.5 wt.% of α-alumina (particle number 2) coated with (AA-AMPS) copolymer having an average particle size of 130 nm. Polishing composition 4B contained 0.5 wt.% of α-alumina (particle number 3) coated with (AMPS) polymer having an average particle size of 130 nm. Polishing compositions 4C-4F contained various amounts of α-alumina (particle number 1) coated with (AA-AMPS) copolymer having an average particle size of 90 nm, as shown in Table 5.

[0130] The polishing results are listed in Table 5. [Table 5]

[0131] As is evident from the results set forth in Table 5, inventive polishing compositions 4A-4F exhibited favorable W, TEOS, and SiN removal rates, as well as favorable TEOS:W and SiN:W selectivities. Each of the inventive polishing compositions containing mixed abrasives exhibited improved performance compared to the control.

[0132] Example 5 This example demonstrates the effect of various amounts of silica particles and surface-coated alumina particles on the topographical performance of a polishing composition according to the invention.

[0133] Substrates containing TEOS (100 Å features) were polished separately with eight polishing compositions (i.e., Polishing Compositions 5A-5J) using a soft pad (Fujibo H600) and a medium hard pad (U5050, manufactured by Cabot Microelectronics Corp.) on a MIRRA™ polisher with a down force of 1.5 psi and using ammonium hydroxide (soft pad experiments) or ammonium hydroxide diluted with hydrofluoric acid (medium hard pad experiments) for post-CMP cleaning. Each of Polishing Compositions 5A-5H had a pH of 3 and contained the abrasive particles identified in Table 6.

[0134] Polishing compositions 5A, 5G, and 5H were control compositions. Polishing composition 5A contained only 0.5 wt% of α-alumina coated with (AA-AMPS) copolymer (particle number 1) having an average particle size of 90 nm. Polishing composition 5G contained only 1 wt% of colloidal silica (particle number 6) having an average particle size of 120 nm. Polishing composition 5H contained only 1 wt% of colloidal silica (particle number 4) having an average particle size of 50 nm.

[0135] Polishing Compositions 5G and 5H contained 0.1 wt. % glycine as a corrosion inhibitor, 0.005 wt. % ferric nitrate as a corrosion inhibitor, 0.108 wt. % malonic acid as a stabilizer, and 15 ppm KATHON™ biocide. The total defects on the substrate polished with the polishing composition of the present invention can be determined by any suitable technique.For example, laser light scattering techniques such as dark field normal beam composite (DCN) and dark field oblique beam composite (DCO) can be used to determine the particle defects on the polished substrate.Suitable instruments for evaluating particle defects include SURFSCAN (trademark) SP2 instruments, which operate at a threshold of 110 nm (available from KLA-Tencor).

[0136] The polishing results are listed in Table 6. [Table 6]

[0137] As can be seen from the results shown in Table 6, the mixed particle polishing composition exhibits a lower number of defects compared to the control composition containing only surface-coated alumina particles. In addition, polishing compositions 5B to 5F of the present invention exhibited suitable polishing performance with both medium-hard and soft polishing pads.

[0138] Example 6 This example demonstrates the effect of the relative amounts of silica particles and surface-coated alumina particles on the topographical performance of a polishing composition according to the invention.

[0139] Substrates including tungsten-overcoated patterned silicon oxide coated wafers with 3×1 μm features and 1×1 μm features were polished with five polishing compositions (i.e., Polishing Compositions 6A-6E), each having a pH of 3. The wafers were first polished using a MIRRA™ tool with an M2000 pad (Cabot Microelectronics Corp.) at 2.5 psi downforce and 150 mL / min slurry flow rate. The patterned wafers were polished with 10% overpolish after removing tungsten excess. The patterned wafers were then buffed with approximately 200 Å of oxide loss of the same pattern using a Fujibo H7000 pad.

[0140] Polishing compositions 6A, 6D, and 6E were control compositions. Polishing composition 6A contained 0.5 wt. % of α-alumina coated with (AA-AMPS) copolymer (particle number 1) with an average particle size of 90 nm as the only abrasive particle. Polishing composition 6D contained 1 wt. % of colloidal silica (particle number 6) with an average particle size of 120 nm as the only abrasive particle. Polishing composition 6E contained 1 wt. % of colloidal silica (particle number 4) with an average particle size of 50 nm as the only abrasive particle.

[0141] Polishing Compositions 6B-6C were inventive compositions, each containing 0.5 wt.% α-alumina (particle number 1) coated with (AA-AMPS) copolymer having an average particle size of 90 nm. Polishing Composition 6B further contained 0.5 wt.% colloidal silica (particle number 6) having an average particle size of 120 nm, and Polishing Composition 6C further contained 1 wt.% colloidal silica (particle number 6) having an average particle size of 120 nm.

[0142] The polishing compositions and polishing results are set forth in Tables 7a and 7b. [Table 7] [Table 8]

[0143] As is evident from the results reported in Table 7, certain silica abrasives mixed with treated alumina abrasives can improve range in die non-uniformity (WIDNU), i.e., non-uniform material removal in areas of differing pattern density. Furthermore, polishing compositions containing mixed abrasives do not result in worse roughness performance.

[0144] The roughness of tungsten films polished with the polishing composition of the present invention containing the mixed abrasive slurry is comparable to the roughness of tungsten films polished with treated alumina abrasive slurries and is much better than the roughness of tungsten films polished with slurries based solely on silica.

[0145] Polishing Compositions 6B and 6C, containing 0.5 wt. % α-alumina coated with (AA-AMPS) copolymer having an average particle size of 90 nm and 0.5 wt. % colloidal silica having an average particle size of 120 nm (Polishing Composition 6B), or 1 wt. % colloidal silica having an average particle size of 120 nm (Polishing Composition 6C), exhibited dramatically lower WIDNU (i.e., the lowest delta erosion correction).

[0146] All references cited in this specification, including publications, patent applications, and patents, are herein incorporated by reference to the same extent as if each reference was individually and specifically indicated to be incorporated by reference and was set forth in its entirety herein.

[0147] The use of the terms "a" and "an" and "the" and "at least one" and similar referents in the context of describing the invention (particularly in the context of the claims below) should be construed to encompass both the singular and the plural, unless otherwise indicated herein or clearly contradicted by context. The use of the term "at least one" following a list of one or more items (e.g., "at least one of A and B") should be construed to mean one item selected from the listed items (A or B), or any combination of two or more of the listed items (A and B), unless otherwise indicated herein or clearly contradicted by context. The terms "comprising," "having," "including," and "containing" should be construed as open-ended terms (i.e., meaning "including, but not limited to"), unless otherwise indicated. The recitation of ranges of values ​​herein is merely intended to serve as a shorthand method of individually referring to each separate value within the range, unless otherwise indicated herein, and each separate value is incorporated herein as if it were individually recited herein. All methods described herein can be carried out in any suitable order, unless otherwise indicated herein or clearly contradicted by context. Any and all examples provided herein, or the use of exemplary words (e.g., "etc.") are intended merely to make the invention clearer, and do not limit the scope of the invention unless otherwise asserted. No language in this specification should be construed as indicating any non-claimed element as essential to the practice of the invention.

[0148] Preferred embodiments of the present invention are described herein, including the best mode known to the inventors for carrying out the invention. Variations of these preferred embodiments may become apparent to those skilled in the art upon reading the foregoing description. The inventors expect those skilled in the art to employ such variations as appropriate, and the inventors intend for the invention to be carried out otherwise than as specifically described herein. Accordingly, the present invention includes all modifications and equivalents of the subject matter recited in the claims appended hereto as permitted by applicable law. Moreover, the present invention encompasses any and all combinations of the above in all possible variations thereof, unless otherwise indicated herein or clearly contradicted by context. The present disclosure also includes the following: <Aspect 1> 1. A chemical mechanical polishing composition comprising: (a) a polishing composition comprising a polishing agent comprising negatively charged colloidal silica particles and alumina particles, the alumina particles being surface-coated with an anionic polymer, and the polishing composition having a pH of about 2 to about 5; (b) water. <Aspect 2> 2. The polishing composition of claim 1, wherein the silica particles comprise colloidal silica particles, aluminum-doped silica particles, sulfonate-modified colloidal silica, or a combination thereof. <Aspect 3> The polishing composition of embodiment 1, wherein the anionic polymer comprises repeating monomer units selected from carboxylic acid monomer units, sulfonic acid monomer units, phosphonic acid monomer units, and combinations thereof. <Aspect 4> The polishing composition of embodiment 3, wherein the anionic polymer comprises repeating monomer units selected from acrylic acid, methacrylic acid, itaconic acid, maleic acid, succinic acid, terephthalic acid, aspartic acid, maleic anhydride, 4-vinylbenzenesulfonic acid, vinylsulfonic acid, 2-sulfoethyl acrylate, 2-sulfoethyl methacrylate, 3-sulfopropyl acrylate, 3-sulfopropyl methacrylate, 2-propene-1-sulfonic acid, styrenesulfonic acid, 2-acrylamido-2-methyl-1-propanesulfonic acid, vinylidene-1,1-diphosphonic acid, dimethyl-p-vinylbenzyl phosphonate, bisdiethylphosphonate (meth)acrylate ammonium, acrylamidophosphonate monomer, vinylphosphonic acid, 2-(methacryloyloxy)ethyl phosphate, and combinations thereof. <Aspect 5> The polishing composition of embodiment 1, wherein the anionic polymer comprises a copolymer having a combination of sulfonic acid monomer units and carboxylic acid monomer units or a copolymer having a combination of sulfonic acid monomer units and phosphonic acid monomer units. <Aspect 6> The polishing composition of claim 5, wherein the anionic polymer consists of 2-acrylamido-2-methylpropanesulfonic acid monomer units and acrylic acid monomer units. <Aspect 7> The polishing composition of claim 1, wherein the anionic polymer comprises 2-acrylamido-2-methylpropanesulfonic acid monomer units. <Aspect 8> The polishing composition of claim 1, further comprising an oxidizing agent. <Aspect 9> The polishing composition of claim 8, wherein the oxidizing agent comprises ferric ions. <Aspect 10> The polishing composition of claim 9, wherein the oxidizing agent further comprises hydrogen peroxide. <Aspect 11> The polishing composition of claim 1, further comprising a corrosion inhibitor. <Aspect 12> 12. The polishing composition of claim 11, wherein the corrosion inhibitor is glycine, lysine, arginine, alanine, or a combination thereof. <Aspect 13> 13. The polishing composition of claim 12, wherein the corrosion inhibitor is glycine. <Aspect 14> The polishing composition of claim 1, further comprising a stabilizer. <Aspect 15> 15. The polishing composition of claim 14, wherein the stabilizer is selected from acetic acid, phthalic acid, citric acid, adipic acid, oxalic acid, malonic acid, aspartic acid, succinic acid, glutaric acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, maleic acid, glutaconic acid, muconic acid, ethylenediaminetetraacetic acid (EDTA), propylenediaminetetraacetic acid (PDTA), and combinations thereof. <Aspect 16> 16. The polishing composition of claim 15, wherein the stabilizer is malonic acid. <Aspect 17> The polishing composition of claim 1, further comprising an organic phosphonic acid. <Aspect 18> 18. The polishing composition of claim 17, wherein the organic phosphonic acid is selected from 2-aminoethylphosphonic acid, 1-hydroxyethylidene-1,1-diphosphonic acid, aminotri(methylenephosphonic acid), ethylenediaminetetra(methylenephosphonic acid), diethylenetriaminepenta(methylenephosphonic acid), ethane-1,1-diphosphonic acid, ethane-1,1,2-triphosphonic acid, ethane-1-hydroxy-1,1-diphosphonic acid, ethane-1-hydroxy-1,1,2-triphosphonic acid, ethane-1,2-dicarboxy-1,2-diphosphonic acid, methanehydroxyphosphonic acid, 2-phosphonobutane-1,2-dicarboxylic acid, 1-phosphonobutane-2,3,4-tricarboxylic acid, α-methylphosphonosuccinic acid, and combinations thereof. <Aspect 19> 2. The polishing composition according to embodiment 1, wherein the polishing composition has a pH of about 3 to about 3.5. <Aspect 20> The polishing composition of embodiment 1, further comprising an additive selected from a biocide, a buffer, a surfactant, a catalyst, a stabilizer, a corrosion inhibitor, and combinations thereof. <Aspect 21> 1. A method for chemically mechanically polishing a substrate, comprising: (i) providing a substrate; (ii) providing a polishing pad; (iii) (a) an abrasive comprising silica particles and alumina particles, the alumina particles being surface-coated with an anionic polymer; (b) providing a chemical-mechanical polishing composition comprising: (iv) contacting the substrate with the polishing pad and the chemical-mechanical polishing composition; (v) moving the polishing pad and the chemical-mechanical polishing composition relative to the substrate to abrade at least a portion of the substrate to polish the substrate. <Aspect 22> 22. The method of claim 21, wherein the anionic polymer comprises repeating monomer units selected from carboxylic acid monomer units, sulfonic acid monomer units, phosphonic acid monomer units, and combinations thereof. <Aspect 23> 23. The method of claim 22, wherein the anionic polymer comprises repeating monomer units selected from acrylic acid, methacrylic acid, itaconic acid, maleic acid, succinic acid, terephthalic acid, aspartic acid, maleic anhydride, 4-vinylbenzenesulfonic acid, vinylsulfonic acid, 2-sulfoethyl acrylate, 2-sulfoethyl methacrylate, 3-sulfopropyl acrylate, 3-sulfopropyl methacrylate, 2-propene-1-sulfonic acid, styrenesulfonic acid, 2-acrylamido-2-methyl-1-propanesulfonic acid, vinylidene-1,1-diphosphonic acid, dimethyl-p-vinylbenzyl phosphonate, bisdiethylphosphonate ammonium (meth)acrylate, acrylamidophosphonate monomer, vinylphosphonic acid, 2-(methacryloyloxy)ethyl phosphate, and combinations thereof. <Aspect 24> 22. The method of claim 21, wherein the anionic polymer comprises a copolymer comprising a combination of sulfonic acid and carboxylic acid monomer units, or a copolymer comprising a combination of sulfonic acid and phosphonic acid monomer units. <Aspect 25> 25. The method of claim 24, wherein the anionic polymer consists of 2-acrylamido-2-methylpropanesulfonic acid monomer units and acrylic acid monomer units. <Aspect 26> 22. The method of claim 21, wherein the anionic polymer comprises 2-acrylamido-2-methylpropanesulfonic acid monomer units. <Aspect 27> 22. The method of claim 21, wherein the polishing composition further comprises an oxidizing agent, a corrosion inhibitor, a stabilizer, an organic phosphonic acid, or any combination thereof. <Aspect 28> 22. The method of claim 21, wherein the substrate comprises a silicon oxide layer on a surface of the substrate, and at least a portion of the silicon oxide layer is ground to polish the substrate. <Aspect 29> 22. The method of claim 21, wherein the substrate comprises a nitride layer on a surface of the substrate, and at least a portion of the nitride layer is ground to polish the substrate.

Claims

1. 1. A chemical mechanical polishing composition comprising: (a) abrasive comprising negatively charged colloidal silica particles and alumina particles, the alumina particles being surface-coated with an anionic polymer, and the polishing composition having a pH of 2 to 5; (b) water, The polishing composition of the present invention further comprises an oxidizing agent.

2. 2. The polishing composition of claim 1, wherein the silica particles comprise colloidal silica particles, aluminum-doped silica particles, sulfonate-modified colloidal silica, or a combination thereof.

3. The polishing composition of claim 1 , wherein the anionic polymer comprises repeating monomer units selected from carboxylic acid monomer units, sulfonic acid monomer units, phosphonic acid monomer units, and combinations thereof.

4. 4. The polishing composition of claim 3, wherein the anionic polymer comprises repeating monomer units selected from acrylic acid, methacrylic acid, itaconic acid, maleic acid, succinic acid, terephthalic acid, aspartic acid, maleic anhydride, 4-vinylbenzenesulfonic acid, vinylsulfonic acid, 2-sulfoethyl acrylate, 2-sulfoethyl methacrylate, 3-sulfopropyl acrylate, 3-sulfopropyl methacrylate, 2-propene-1-sulfonic acid, styrenesulfonic acid, 2-acrylamido-2-methyl-1-propanesulfonic acid, vinylidene-1,1-diphosphonic acid, dimethyl-p-vinylbenzyl phosphonate, bisdiethylphosphonate (meth)ammonium acrylate, acrylamidophosphonate monomer, vinylphosphonic acid, 2-(methacryloyloxy)ethyl phosphate, and combinations thereof.

5. The polishing composition of claim 1 , wherein the anionic polymer comprises a copolymer comprising a combination of sulfonic acid monomer units and carboxylic acid monomer units or a copolymer comprising a combination of sulfonic acid monomer units and phosphonic acid monomer units.

6. 6. The polishing composition of claim 5, wherein the anionic polymer consists of 2-acrylamido-2-methylpropanesulfonic acid monomer units and acrylic acid monomer units.

7. 2. The polishing composition of claim 1, wherein the anionic polymer comprises 2-acrylamido-2-methylpropanesulfonic acid monomer units.

8. The polishing composition of claim 1 , wherein the oxidizing agent comprises ferric ions.

9. The polishing composition of claim 8 , wherein the oxidizing agent further comprises hydrogen peroxide.

10. The polishing composition of claim 1 , further comprising a corrosion inhibitor.

11. The polishing composition of claim 10 , wherein the corrosion inhibitor is glycine, lysine, arginine, alanine, or a combination thereof.

12. The polishing composition of claim 11 , wherein the corrosion inhibitor is glycine.

13. The polishing composition of claim 1 , further comprising a stabilizer.

14. 14. The polishing composition of claim 13, wherein the stabilizer is selected from acetic acid, phthalic acid, citric acid, adipic acid, oxalic acid, malonic acid, aspartic acid, succinic acid, glutaric acid, pimelic acid, suberic acid, azelaic acid, sebacic acid, maleic acid, glutaconic acid, muconic acid, ethylenediaminetetraacetic acid (EDTA), propylenediaminetetraacetic acid (PDTA), and combinations thereof.

15. The polishing composition of claim 14 , wherein the stabilizer is malonic acid.

16. The polishing composition of claim 1 , further comprising an organic phosphonic acid.

17. 17. The polishing composition of claim 16, wherein the organic phosphonic acid is selected from 2-aminoethylphosphonic acid, 1-hydroxyethylidene-1,1-diphosphonic acid, aminotri(methylenephosphonic acid), ethylenediaminetetra(methylenephosphonic acid), diethylenetriaminepenta(methylenephosphonic acid), ethane-1,1-diphosphonic acid, ethane-1,1,2-triphosphonic acid, ethane-1-hydroxy-1,1-diphosphonic acid, ethane-1-hydroxy-1,1,2-triphosphonic acid, ethane-1,2-dicarboxy-1,2-diphosphonic acid, methanehydroxyphosphonic acid, 2-phosphonobutane-1,2-dicarboxylic acid, 1-phosphonobutane-2,3,4-tricarboxylic acid, α-methylphosphonosuccinic acid, and combinations thereof.

18. 10. The polishing composition of claim 1, wherein the polishing composition has a pH of 3 to 3.

5.

19. The polishing composition of claim 1 , further comprising an additive selected from a biocide, a buffer, a surfactant, a catalyst, a stabilizer, a corrosion inhibitor, and combinations thereof.

20. 1. A method for chemically mechanically polishing a substrate, comprising: (i) providing a substrate; (ii) providing a polishing pad; (iii) (a) an abrasive comprising silica particles and alumina particles, the alumina particles being surface-coated with an anionic polymer; (b) water; providing a chemical mechanical polishing composition comprising an oxidizing agent; (iv) contacting the substrate with the polishing pad and the chemical-mechanical polishing composition; (v) moving the polishing pad and the chemical-mechanical polishing composition relative to the substrate to abrade at least a portion of the substrate to polish the substrate.

21. 21. The method of claim 20, wherein the anionic polymer comprises repeating monomer units selected from carboxylic acid monomer units, sulfonic acid monomer units, phosphonic acid monomer units, and combinations thereof.

22. 21. The method of claim 20, wherein the anionic polymer comprises repeating monomer units selected from acrylic acid, methacrylic acid, itaconic acid, maleic acid, succinic acid, terephthalic acid, aspartic acid, maleic anhydride, 4-vinylbenzenesulfonic acid, vinylsulfonic acid, 2-sulfoethyl acrylate, 2-sulfoethyl methacrylate, 3-sulfopropyl acrylate, 3-sulfopropyl methacrylate, 2-propene-1-sulfonic acid, styrenesulfonic acid, 2-acrylamido-2-methyl-1-propanesulfonic acid, vinylidene-1,1-diphosphonic acid, dimethyl-p-vinylbenzyl phosphonate, bisdiethylphosphonate ammonium (meth)acrylate, acrylamidophosphonate monomers, vinylphosphonic acid, 2-(methacryloyloxy)ethyl phosphate, and combinations thereof.

23. 21. The method of claim 20, wherein the anionic polymer comprises a copolymer comprising a combination of sulfonic acid and carboxylic acid monomer units, or a copolymer comprising a combination of sulfonic acid and phosphonic acid monomer units.

24. The method of claim 23, wherein the anionic polymer consists of 2-acrylamido-2-methylpropanesulfonic acid and acrylic acid monomer units.

25. The method of claim 20, wherein the anionic polymer is comprised of 2-acrylamido-2-methylpropanesulfonic acid monomer units.

26. 21. The method of claim 20, wherein the polishing composition further comprises a corrosion inhibitor, a stabilizer, an organic phosphonic acid, or any combination thereof.

27. 21. The method of claim 20, wherein the substrate comprises a silicon oxide layer on a surface of the substrate, and at least a portion of the silicon oxide layer is ground away to polish the substrate.

28. The method of claim 20 , wherein the substrate includes a nitride layer on a surface of the substrate, and at least a portion of the nitride layer is ground away to polish the substrate.

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