Chemical Storage Container Management System for Semiconductor Process Using Short-Range Wireless Communication

Abstract

To perform effective semiconductor process management by grasping a movement path of a chemical storage container in which a chemical to be used in a semiconductor process is stored.SOLUTION: A wafer processing device 1 includes: a chemical supply assembly 100 for supplying a chemical stored in a chemical storage container 10 to a region in which a semiconductor process is performed and generating a plurality of pieces of information associated with the chemical storage container; and a monitoring management section 200 for receiving transfer of the plurality of pieces of information generated by the chemical supply assembly to determine an operation situation of the chemical supply assembly. The chemical supply assembly includes: a nozzle mounting unit including a nozzle identification tag in which nozzle related information on the chemical storage container is stored; a container laying unit for acquiring container related information from container laying information showing whether or not the chemical storage container is laid and a container identification tag previously mounted on the chemical storage container via short-range radio communication; and a nozzle information acquisition unit for acquiring the nozzle related information from the nozzle identification tag via short-range radio communication and transferring the nozzle related information to the side of the container laying unit.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a management system for a storage container for chemicals used in a semiconductor process, and more particularly, to a system for more effectively managing and monitoring a storage container for chemicals used in a semiconductor process by utilizing short-range wireless communication. [Background technology]

[0002] Generally, a photolithography process includes a process of placing a wafer, which has been subjected to a series of semiconductor manufacturing processes, on a spin chuck of a coating device and coating the wafer with a photoresist. Here, the photoresist includes a resin, an inhibitor as a sensitizer that is activated by light, and a liquid state solvent. The photoresist is contained in a container made of a glass bottle and supplied to a photoresist supply line through a photoresist supply pipe (Teflon tube) connected to a container cap, and the photoresist supplied to the photoresist supply line can be supplied to a coating device via a number of valves and an intermediate tank. In addition, in the photolithography process, in order to fill a container with an accurate amount of photoresist, the concentration, contamination, and other quality requirements of the photoresist are checked, and after filling the container with the photoresist, the container containing the photoresist is connected to a chemical liquid supply device installed in the semiconductor manufacturing equipment. However, during the process of installing the containers, there are cases where workers make mistakes, such as mixing up the caps and attaching them to the wrong containers, or the containers are not placed accurately in the correct positions. In this case, not only would the entire process at the facility be interrupted, resulting in huge losses, but it could also mean that already manufactured products would have to be discarded due to the inappropriate supply of chemicals. Therefore, a method is required to solve these problems. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Korean Patent Publication No. 10-2014-0047636 Summary of the Invention [Problem to be solved by the invention]

[0004] The present invention has been devised to solve the problems of the prior art described above, and has an object to enable effective semiconductor process management by determining the movement path of chemical storage containers in which chemicals used in semiconductor processes are stored, preventing the mixing of nozzles, and automatically determining the distribution expiration date and whether or not the chemical storage containers can be disposed of. The object of the present invention is not limited to the above-mentioned objects, and other objects not mentioned herein will be clearly understood by those skilled in the art from the following description. [Means for solving the problem]

[0005] In order to achieve the above object, the present invention provides a management system for a chemical storage container for a semiconductor process using short-range wireless communication, the management system including: a chemical supplying assembly that supplies a chemical stored in a chemical storage container for storing a chemical used in a semiconductor process to an area where a semiconductor process is performed, the chemical supplying assembly generating a plurality of pieces of information related to the chemical storage container; and a monitoring management unit that receives the plurality of pieces of information generated by the chemical supplying assembly and determines an operation status of the chemical supplying assembly. The chemical supplying assembly includes a nozzle mounting unit that is detachably mounted to the chemical storage container and includes a nozzle identification tag storing nozzle-related information of the corresponding chemical storage container; a container placement unit that is mounted so that the chemical storage container can be placed therein and that acquires container placement information indicating whether the chemical storage container is placed and container-related information from a container identification tag previously attached to the chemical storage container via short-range wireless communication; and a nozzle information acquisition unit that acquires the nozzle-related information from the nozzle identification tag via short-range wireless communication and transfers the nozzle-related information to the container placement unit. In this case, the nozzle mounting unit includes a first nozzle mounting part that surrounds at least a portion of the chemical liquid storage container and is equipped with the nozzle identification tag, and a second nozzle mounting part that is coupled to the first nozzle mounting part in a manner that surrounds the remaining portion of the chemical liquid storage container. The container placement unit may include a container holder having a placement space formed therein in which the liquid medicine storage container is placed, and a communication board provided in the container holder for generating container placement information by recognizing whether the liquid medicine storage container is located within the placement space, and for acquiring the container-related information and the nozzle-related information and transmitting them to the monitoring management unit. The nozzle information acquisition unit may also include an identification antenna that identifies the nozzle identification tag to acquire the nozzle-related information and transfers the nozzle-related information to the container placement unit, and a fixing bracket that fixes the identification antenna. Meanwhile, the chemical supply assembly may further include a mount frame, in which a plurality of the nozzle information acquisition units and the container placement units are provided so as to be matched with each other in a 1:1 relationship, and the chemical supply assembly may be formed so as to be capable of introducing a plurality of chemical storage containers. Furthermore, the present invention may further include a gateway that divides the container placement information, the container-related information, and the nozzle-related information acquired from the multiple nozzle information acquisition units and the multiple container placement units and transfers them individually to the monitoring management unit, and divides the wireless communication host protocol information generated by the monitoring management unit and transfers it individually to the multiple nozzle information acquisition units and the multiple container placement units. In addition, the present invention may further include a pre-checker terminal that receives the container placement information and monitors the current status and error occurrence status of the process in which the medical solution storage container is loaded / unloaded from the container placement unit. In this case, the pre-checker terminal may include an alarm unit that receives the container placement information and generates an alarm during the process of loading / unloading the drug solution storage container into / from the container placement unit.

[0006] Furthermore, the present invention may further include a sound generating device that plays a sound to issue an alarm according to a control command of the monitoring management unit when the monitoring management unit determines that a previously set error condition has occurred in the chemical solution supply assembly. Effect of the Invention

[0007] To solve the above problems, the management system for a chemical storage container for a semiconductor process using short-range wireless communication of the present invention has the advantage that it is possible to effectively manage a semiconductor process by a monitoring management unit receiving and utilizing nozzle-related information, container placement information, and container-related information that are generated respectively from a nozzle mounting unit mounted on the chemical storage container and a container placement unit in which the chemical storage container is placed and collected via short-range wireless communication. In particular, the present invention enables the monitoring and management unit to grasp the movement path of the liquid chemical storage container and prevent the mixing of nozzle caps, while automatically determining the distribution period and disposal eligibility of the liquid chemical storage container, thereby fundamentally eliminating the causes of process failure, thereby significantly reducing the overall cost of the process operation and improving productivity. The effects of the present invention are not limited to those mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the description of the claims. [Brief description of the drawings]

[0008] [Figure 1] 1 is a view showing a configuration of a wafer processing apparatus to which a management system for a chemical storage container for semiconductor processing according to a first embodiment of the present invention is applied; [Diagram 2] 1 is a diagram showing a form of a chemical supply assembly in a management system for a chemical storage container for semiconductor processing according to a first embodiment of the present invention; [Diagram 3] 1 is a view showing a manner in which a chemical storage container is placed in a chemical supply assembly in a management system for a chemical storage container for semiconductor processing according to a first embodiment of the present invention; [Figure 4] 1 is a diagram showing a structure of a nozzle mounting unit in a management system for a storage container of chemicals for semiconductor processing according to a first embodiment of the present invention; [Diagram 5] 3 is a diagram showing a structure of a nozzle information acquisition unit in a management system for a storage container for chemicals used in a semiconductor process according to a first embodiment of the present invention; FIG. [Figure 6] 1 is a diagram showing a structure of a container placement unit in a management system for a storage container of chemicals for semiconductor processing according to a first embodiment of the present invention; [Figure 7] 1 is a diagram illustrating an overall configuration of a management system for a chemical storage container for semiconductor processing according to a first embodiment of the present invention, and a data flow between the configurations. [Figure 8] 13 is a diagram showing a structure of a nozzle information acquisition unit in a management system for a storage container for chemicals used in semiconductor processing according to a second embodiment of the present invention. FIG. [Figure 9] 13 is a diagram showing a structure of a nozzle information acquisition unit in a management system for a storage container of chemicals for semiconductor processing according to a second embodiment of the present invention. FIG. [Figure 10] 11 is a view illustrating a process of placing a chemical storage container in a chemical supplying assembly in a management system for a chemical storage container for semiconductor processing according to a second embodiment of the present invention. FIG. [Figure 11] 11 is a view illustrating a process of placing a chemical storage container in a chemical supplying assembly in a management system for a chemical storage container for semiconductor processing according to a second embodiment of the present invention. FIG. [Figure 12] 13 is a diagram showing the structure of a container rotating unit in a management system for a chemical storage container for semiconductor processing according to a third embodiment of the present invention. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] As used herein, when a component (or region, layer, portion, etc.) is referred to as being "on," "connected," or "bonded" to another component, it means that it can be directly disposed / connected / bonded onto the other component, or that a third component can be disposed therebetween. The same reference numerals refer to the same components. Also, in the drawings, thicknesses, ratios, and dimensions of components are exaggerated for the purpose of effectively explaining technical contents. "And / or" includes all possible combinations of one or more of the associated construct. Terms such as first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only to distinguish one component from another. For example, the first component may be named the second component, and similarly the second component may be named the first component, without departing from the scope of the present invention. A singular expression includes a plural expression unless otherwise clearly intended in the context. In addition, terms such as "under", "below", "up" and "above" are used to describe the relative relationship of the components shown in the drawings. The above terms are relative concepts and are described based on the directions shown in the drawings. Unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by those skilled in the art to which the present invention belongs. Furthermore, terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the relevant art, and unless interpreted in an ideal or overly formal sense, are expressly defined herein. Terms such as "comprise" or "have" are intended to specify the presence of features, numbers, steps, operations, components, parts, or combinations thereof set forth in the specification, but should be understood as not precluding the possibility of the presence or addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a diagram showing the configuration of a wafer processing apparatus 1 to which a management system for a chemical storage container for semiconductor processing according to a first embodiment of the present invention is applied. A wafer processing apparatus 100 such as that shown in FIG. 1 may include various components for processing wafers.

[0010] For example, the wafer processing apparatus 1 may include multiple process areas in which various processing steps including wafer cutting, polishing, etching, coating, etc. are performed. Among others, the wafer processing apparatus 1 in this embodiment may include a process area for coating a photoresist on a wafer, and thus, one or more chemical supply assemblies 100 for supplying a chemical such as photoresist to the wafer may be provided within the wafer processing apparatus 1. The wafer processing apparatus 1 may be provided with a chemical supply assembly 100 as well as a monitoring management unit 200 that determines the operational status of the chemical supply assembly 100, and the chemical supply assembly 100 and the monitoring management unit 200 together constitute a management system for a chemical storage container for semiconductor processing. Hereinafter, a management system for a storage container for chemicals used in semiconductor processing according to the present invention will be described in detail. FIG. 2 is a diagram showing the shape of a chemical supply assembly 100 in a management system for a chemical storage container for a semiconductor process according to the first embodiment of the present invention, and FIG. 3 is a diagram showing the shape of a chemical storage container 10 placed in the chemical supply assembly 100 in the management system for a chemical storage container for a semiconductor process according to the first embodiment of the present invention. As shown in Figures 2 and 3, in this embodiment, the chemical supply assembly 100 serves to supply the chemical contained in the chemical storage container 10 to an area where a semiconductor process is performed, and specifically includes a nozzle mounting unit 120, a container placement unit 130, a nozzle information acquisition unit 140, and a mount frame 110.

[0011] In this embodiment, the chemical storage container 10 includes a chemical storage body 11 in which the chemical is stored, and a nozzle cap 12 that is detachably provided on the upper portion of the chemical storage body 11 and serves to supply the chemical stored in the chemical storage body 11 to a process area. The nozzle mounting unit 120 is detachably installed on the liquid storage container 10 and includes a nozzle identification tag in which nozzle-related information of the corresponding liquid storage container 10 is stored. In this embodiment, the nozzle mounting unit 120 is mounted adjacent to the nozzle cap 12 of the liquid medicine storage container 10, but this is not a limitation of this embodiment. The container placement unit 130 is provided so that the liquid medicine storage container 10 can be placed inside, and acquires container placement information indicating whether the liquid medicine storage container 10 is placed or not, and container-related information from a container identification tag 13 pre-attached to the liquid medicine storage container 10 via short-range wireless communication. In this embodiment, the container identification tag 13 is provided on the liquid medicine storage body 11 of the liquid medicine storage container 10, and the container placement unit 130 identifies the container identification tag 13 of the liquid medicine storage container 10 placed inside. At this time, the wireless communication method applied between the container placement unit 130 and the container identification tag 13 may be RFID (Radio Frequency Identification), but is not limited thereto, and of course various wireless communication methods such as Bluetooth, Zigbee, WiFi, UWB (Ultra-Wideband), etc. may be applied. The nozzle information acquisition unit 140 acquires nozzle-related information from the nozzle identification tag of the nozzle mounting unit 120 via short-distance wireless communication, and transmits the information to the container placement unit 130. In this embodiment, the wireless communication method applied between the nozzle information acquisition unit 140 and the nozzle identification tag may be RFID, and of course, the various wireless communication methods listed above may also be applied. Also, the data transfer process between the nozzle information acquisition unit 140 and the container placement unit 130 may be performed using any one of the wireless communication methods listed above, or may be performed using a wired communication method. The mount frame 110 provides a basic framework for installing the container placement unit 130 and the nozzle information acquisition unit 140 . In this embodiment, the mount frame 110 is provided with a plurality of nozzle information acquisition units 140 and container placement units 130 that are matched with each other in a 1:1 relationship, and the chemical supply assembly 100 can be formed so that a plurality of chemical storage containers 10 can be introduced therein.

[0012] The mounting frame 110 is formed to include a lower frame 114 having a plurality of container installation areas partitioned from one another so that a plurality of container placement units 130 can be installed, and an upper frame 111 connected to the lower frame 114 and configured to allow a plurality of nozzle information acquisition units 140 to be installed. In particular, in this embodiment, the lower frame 114 has a plurality of container installation areas arranged symmetrically around the upper frame 111, and a plurality of nozzle information acquisition units 140 are arranged symmetrically on the upper frame 111. However, it is needless to say that the shape of the mount frame 110 can also be variously modified and changed to a shape other than that of this embodiment. The detailed structures of the nozzle mounting unit 120, the container placement unit 130, and the nozzle information acquisition unit 140 will be described in more detail below. FIG. 4 is a diagram showing a structure of a nozzle mounting unit 120 in a management system for a chemical storage container for semiconductor processing according to a first embodiment of the present invention. As shown in FIG. 4, in this embodiment, the nozzle mounting unit 120 includes a first nozzle mounting part 120a and a second nozzle mounting part 120b. The first nozzle mounting part 120a surrounds at least a part of the liquid storage container 10 and is provided with a nozzle identification tag 122. At this time, the nozzle identification tag 122 stores nozzle-related information, which is information related to the nozzle cap 12 of the corresponding liquid storage container 10. The second nozzle mounting part 120b is coupled to the first nozzle mounting part 120a in a manner surrounding the remaining periphery of the liquid medicine storage container 10. That is, the nozzle mounting unit 120 may have a first nozzle mounting part 120a and a second nozzle mounting part 120b that are detachably coupled to the liquid medicine storage container 10. In this embodiment, the first nozzle mounting part 120a and the second nozzle mounting part 120b are attached adjacent to the nozzle cap 12 of the liquid medicine storage container 10. In this embodiment, the first nozzle mounting part 120a specifically includes a tag mounting portion 121 on which a nozzle identification tag 122 is provided, and a first coupling portion 123 branched off on both sides of the tag mounting portion 121 and formed to be capable of being coupled to the second nozzle mounting part 120b. At this time, a recessed mounting groove 12a may be formed on the nozzle cap 12 side of the liquid medicine storage container 10, and a mounting step 124 may be formed on the first coupling portion 123 of the first nozzle mounting part 120a to be inserted into the mounting groove 12a to enhance the fixing force. In detail, the second nozzle mounting part 120b includes a container contact portion 125 that surrounds the remaining periphery of the drug solution storage container 10 on the opposite side to the first nozzle mounting part 120a, and second coupling portions 126 that are provided on both sides of such container contact portion 125 and are formed so as to be able to be coupled to the first nozzle mounting part 120a.

[0013] FIG. 5 is a diagram showing a structure of a nozzle information acquisition unit 140 in the management system for a chemical storage container for semiconductor processing according to the first embodiment of the present invention. As shown in FIG. 4, in this embodiment, the nozzle information acquisition unit 140 includes an identification antenna 141 and a fixing bracket 142 . The identification antenna 141 is provided to identify the nozzle identification tag 121 of the nozzle mounting unit 120 described above, acquire nozzle-related information, and transfer the nozzle-related information to the container placement unit 130 side. The fixing bracket 142 serves to fix the identification antenna 141 to the mount frame 110 . In this embodiment, the fixing bracket 142 includes a rear fixing part 143 that surrounds the rear of the identification antenna 141, a pair of guide parts 144 that extend forward from both sides of the rear fixing part 143 and between which the first nozzle mounting part 120a of the nozzle mounting unit 120 is positioned, and a frame fastening part 145 that extends in a bent rearward manner from the lower end of the rear fixing part 143 and is fastened to the mount frame 110 side. At this time, the pair of guide parts 144 serve to guide the nozzle identification tag 121 provided on the first nozzle mounting part 120a of the nozzle mounting unit 120 so that it faces the identification antenna 141 during the process of placing the liquid medicine storage container 10 in the container placement unit 130.

[0014] Furthermore, at least one of the pair of guide parts 144 is bent from the rear fixing part 143 in a manner that surrounds a part of the front surface of the identification antenna 141, thereby enabling the identification antenna 141 to be stably fixed. The identification antenna 141 may be formed in a flat plate shape and may be coupled to the upper side of the fixing bracket 142 or may be detachable. FIG. 6 is a diagram showing a structure of a container placement unit 130 in a management system for a storage container of chemicals for semiconductor processing according to a first embodiment of the present invention. As shown in FIG. 6, in this embodiment, the container placement unit 130 includes a container holder 131 and a communication board 133 . The container holder 131 has a space 132 formed therein in which the liquid medicine storage container 10 is placed. In this embodiment, the container holder 131 is generally formed to surround the liquid medicine storage body 11 at the lower side of the liquid medicine storage container 10. The communication board 133 is provided in the container holder 131 and generates container placement information by recognizing whether the liquid medicine storage container 10 is located within the placement space 132, and also acquires container-related information and nozzle-related information and transmits it to the monitoring management unit 200 (see Figure 7) described later. In this case, the communication board 133 may include a container detection sensor 134 exposed to the side of the placement space 132 in order to detect whether the drug solution storage container 10 is located in the placement space 132. As the container detection sensor 134, any one of known sensors for detecting an object in front may be applied. The communication board 133 may also include an identification probe 135 exposed on the placement space 132 side to acquire container-related information via short-range wireless communication from a container identification tag 13 (see FIG. 3) pre-attached to the liquid medicine storage container 10. At the same time, the communication board 133 can receive the nozzle-related information acquired by the above-mentioned identification antenna 141 .

[0015] That is, the communication board 133 collects container placement information, container-related information, and nozzle-related information, and transfers them to a monitoring management unit 200, which will be described later. FIG. 7 is a diagram illustrating the overall components of a management system for a chemical storage container for semiconductor processing according to a first embodiment of the present invention and data flows between the components. As shown in FIG. 7, the container placement unit 130 of the liquid medicine supply assembly 100 generates container placement information and container-related information from the liquid medicine storage container 10, and the nozzle information acquisition unit 140 collects the nozzle-related information identified from the nozzle mounting unit 120, and each of these pieces of information is transmitted to the monitoring management unit 200. In this embodiment, since the chemical supply assembly 100 is provided with a plurality of chemical storage containers 10, corresponding container placement information, container-related information, and nozzle-related information can be generated for each chemical storage container 10 and transmitted to the monitoring management unit 200. The monitoring management unit 200 receives container placement information, container-related information, and nozzle-related information to determine the operational status of the chemical liquid supply assembly 100, and all data processed by the monitoring management unit 200 can be stored on the operation server 600. Furthermore, the management system for a chemical storage container for semiconductor processing according to the present embodiment may further include a gateway 400, a pre-checker terminal 300, and a sound generating device 500. In the process of transferring data from the container placement unit 130 to the monitoring management unit 200, the gateway 400 separates multiple container placement information, container-related information, and nozzle-related information and transfers them individually to the monitoring management unit 200, and also separates the wireless communication host protocol information generated by the monitoring management unit 200 and transfers them individually to the multiple nozzle information acquisition units 140 and the multiple container placement units 130. The pre-checker terminal 300 is provided to receive container placement information and monitor the current status and error occurrence status of the process in which the medical solution storage container 10 is loaded / unloaded from the container placement unit 130 .

[0016] In this case, the pre-checker terminal 300 may include an alarm unit that receives container placement information and generates an alarm through sound or light during the process of loading / unloading the medical solution storage container 10 into / from the container placement unit. The sound generating device 500 plays an alarm by playing a sound according to a control command from the monitoring management unit 200 when the monitoring management unit 200 determines that a previously set error condition has occurred in the chemical liquid supplying assembly 100. To this end, the sound generating device 500 of this embodiment may include an amplifier 510 for amplifying the sound signal, and a speaker 520 for reproducing the sound. As described above, the management system for a chemical storage container for semiconductor processing according to the present invention can effectively manage a semiconductor process by having the monitoring management unit 200 receive and utilize the nozzle-related information, container placement information, and container-related information generated respectively from the nozzle mounting unit 120 mounted on the chemical storage container 10 and the container placement unit 130 in which the chemical storage container 10 is placed and collected via short-range wireless communication. In particular, the present invention allows the monitoring management unit 200 to grasp the movement path of the liquid chemical storage container 10 and prevent the mixing of nozzle caps 12, while automatically determining the distribution period and disposal eligibility of the liquid chemical storage container 10, thereby fundamentally eliminating the causes of process failure, thereby significantly reducing the overall cost of the process operation and improving productivity.

[0017] In the following, other embodiments of the present invention will be described. In each embodiment described below, the same components as those in the first embodiment will not be described repeatedly. 8 and 9 are diagrams showing the structure of a nozzle information acquisition unit 140 in a management system for a chemical storage container for semiconductor processing according to a second embodiment of the present invention. In the second embodiment of the present invention shown in Figures 8 and 9, the nozzle information acquisition unit 140 includes an identification antenna 141 and a fixing bracket 142, similar to the first embodiment described above, and the fixing bracket 142 includes a rear fixing portion 143, a pair of guide portions 144 and a frame fastening portion 145. The nozzle information acquisition unit 140 of this embodiment additionally includes a slide module 146 for horizontally moving the fixed bracket 142 within a predetermined range. Specifically, in this embodiment, the frame fastening portion 145 of the fixing bracket 142 is fixed to the upper side of the mounting portion 112 provided on the upper frame 111 of the mounting frame 110, and at this time, the mounting portion 112 may have a connecting slit 113 formed therethrough that is long in the horizontal direction. At this time, the slide module 146 is provided on the lower side of the mount portion 112 and is connected to the fixed bracket 142 via a connecting slit 113 . In this embodiment, the slide module 146 may include a slide member 147 , an elastic member 149 and a fixing member 148 . At least a portion of the slide member 147 passes through the connecting slit 113 and is connected to the frame fastening portion 145 of the fixed bracket 142 located on the upper side of the mount portion 112. Therefore, the slide member 147 and the fixed bracket 142 can be formed to be horizontally movable in the lateral direction along the length direction of the connecting slit 113. A pair of elastic members 149 are disposed on both sides of the slide member 147 .

[0018] A pair of fixing members 148 are also provided at both sides of the frame fastening portion 145 of the fixing bracket 142, respectively. Therefore, the pair of fixing members 148 can fix the outer sides of the elastic members 149 located in the corresponding directions. Meanwhile, as shown in FIG. 9, in this embodiment, a pair of guide portions 144 of a fixing bracket 142 are formed in a shape in which a part of the upper portion is inclined and gradually widens outward from the lower portion to the upper portion. According to the configuration of the nozzle information acquisition unit 140 of this embodiment, the process of placing the chemical storage container 10 in the chemical supply assembly 100 may be performed as follows. 10 and 11 are views showing a process of placing a chemical storage container 10 in a chemical supply assembly 100 in a management system for a chemical storage container for semiconductor processing according to a second embodiment of the present invention. 10 and 11, during the process of placing the liquid storage container 10 in the liquid supply assembly 100, the liquid storage container 10 may be introduced in a slightly rotated state due to operator error or equipment error. In such a case, the nozzle identification tag 122 provided on the nozzle mounting unit 120 may not face the nozzle information acquisition unit 140 directly, but may be provided in a misaligned state, which may reduce the recognition rate or may cause the recognition to be impossible. However, as described above, in the nozzle information acquisition unit 140 of this embodiment, the upper portions of the pair of guide portions 144 are formed in an inclined shape, and are gradually flared outward from the bottom to the top. Therefore, if the chemical solution storage container 10 is introduced in a slightly rotated state, the tag mounting portion 121 may come into contact with the inclined surface of the guide portion 144. As a result, as shown in FIG. 11(a), the fixed bracket 142 of the nozzle information acquisition unit 140 moves horizontally toward the direction in which the guide portion 144 with which the tag mounting portion 121 comes into contact is located.

[0019] During this process, of the pair of elastic members 149 provided on the slide module 146, the elastic member 149 located on the side in the horizontal direction of the fixed bracket 142 is compressed by the movement of the slide member 147, and the elastic member 149 located on the opposite side is stretched. Thereafter, as shown in FIG. 11(b), when the drug storage container 10 is fully inserted into the drug supply assembly 100, the restoring force of the pair of elastic members 149 causes the fixing bracket 142 to move back to its initial position. During this process, the guide portion 144 on one side pushes out the tag mounting portion 121 of the nozzle mounting unit 120, so that the liquid medicine storage container 10 rotates as a whole, and the position of the nozzle identification tag 122 provided on the nozzle mounting unit 120 can be corrected so that it faces the nozzle information acquisition unit 140 head-on. At this time, the pair of elastic members 149 provided on the pair of slide modules 146 may be provided in a state where tension and compression forces are balanced when the slide member 147 is positioned at the center. Therefore, when the slide member 147 moves horizontally in either one direction, the slide member 147 receives a restoring force from both of the pair of elastic members 149 , and can apply a stronger pressure to the nozzle mounting unit 120 . FIG. 12 is a diagram showing the structure of a container rotating unit 150 in a management system for a chemical container for semiconductor processing according to a third embodiment of the present invention. The third embodiment of this embodiment shown in FIG. 12 is assumed to have generally the same components as the second embodiment described above, and is characterized in that the drug solution supply assembly 100 further includes an additional container rotation unit 150. The container rotating unit 150 is located below the container placing unit 130 and serves to support the lower part of the liquid medicine storage container 10 .

[0020] Specifically, in this embodiment, the container rotation unit 150 includes a base part 151 that is provided in a fixed state, and a rotating part 152 that is formed to be rotatable relative to the base part 151 based on a central point and supports the drug solution storage container 10. At this time, the rotation axis R of the rotating part 152 is formed to coincide with the central axis of the liquid medicine storage container 10, thereby minimizing the frictional force applied to the liquid medicine storage container 10 during the position correction process of the nozzle identification tag 122 described above, thereby enabling smooth rotation. In particular, in this embodiment, the liquid medicine storage container 10 may be fixed to the liquid medicine supply assembly 100 with its central axis slightly tilted from the ground in order to smoothly supply the liquid medicine, and therefore the rotation axis R of the rotating part 152 may also be tilted at the same angle θ with respect to the horizontal line H. For this, the lower surface of the base part 151 is formed parallel to the horizontal line H so that it can come into contact with the ground, and the upper surface is formed inclined so as to be perpendicular to the rotation axis R of the rotating part 152 so that the rotating part 152 can rotate smoothly. As described above, the preferred embodiments of the present invention have been described in detail. In addition to the above-described embodiments, it will be apparent to those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or scope of the present invention. Therefore, the above-described embodiments should be considered as illustrative rather than restrictive, and the present invention should not be limited to the above description, but may be modified within the scope of the appended claims and their equivalents. [Explanation of symbols]

[0021] 10: Chemical storage container 11: Chemical solution storage body 12: Nozzle cap 12a: Mortuary ditch 13: Container identification tag 100: Chemical supply assembly 110: Mounting frame 111: Upper frame 112: Mounting section 113: Connecting slit 114: Lower frame 120: Nozzle installation unit 120a: No. 1 nozzle attachment part 120b: Second nozzle attachment part 121: Tag attachment part 122: Nozzle identification tag 123: 1st joint 124: Mortuary stage section 125: Container contact part 126:Second joint 130: Container storage unit 131: Container holder 132: Mortuary space 133: Communication board 134: Container detection sensor 135: Identification probe 140: Nozzle information acquisition unit 141: Identification antenna 142: Fixing bracket 143: Rear fixed part 144: Guide section 145: Frame fastening part 146: Slide module 147: Slide member 148: Fixing member 149: Elastic member 150: Container rotation unit 151: Base section 152: Rotating Department 200: Monitoring Management Department 300: Pre-checker terminal 400:Gateway 500: Sound Generator 510:Amplifier 520: Speaker 600: Management server

Claims

1. A chemical supply assembly that supplies a chemical solution contained in a chemical solution storage container in which a chemical solution used in a semiconductor process is stored to an area where a semiconductor process is performed, and generates a plurality of pieces of information related to the chemical solution storage container; a monitoring management unit for receiving a plurality of pieces of information generated by the chemical supply assembly and determining an operation status of the chemical supply assembly; Including, The chemical supply assembly includes: a nozzle mounting unit detachably provided on the liquid storage container, the nozzle mounting unit including a nozzle identification tag storing nozzle-related information of the liquid storage container; a container placement unit that is provided so that the liquid medicine storage container can be placed therein and that acquires container placement information indicating whether the liquid medicine storage container is placed or not and container-related information from a container identification tag that is attached in advance to the liquid medicine storage container via short-range wireless communication; a nozzle information acquisition unit that acquires the nozzle-related information from the nozzle identification tag via short-distance wireless communication and transfers the nozzle-related information to the container placement unit; Including, The nozzle mounting unit is a first nozzle mounting part surrounding at least a portion of the chemical solution storage container and having the nozzle identification tag; and a second nozzle mounting part coupled to the first nozzle mounting part in a manner surrounding the remaining periphery of the liquid medicine storage container; Including, A management system for chemical storage containers for semiconductor processing.

2. The container placement unit includes: a container holder having a storage space formed therein in which the drug solution storage container is placed; and a communication board provided in the container holder, which generates container placement information by recognizing whether the chemical solution storage container is located within the placement space, and which acquires the container-related information and the nozzle-related information and transmits them to the monitoring management unit; Including, The management system for a storage container for chemicals used in semiconductor processing according to claim 1.

3. The nozzle information acquisition unit includes: an identification antenna that identifies the nozzle identification tag, acquires the nozzle-related information, and transfers the nozzle-related information to the container placement unit; and A fixing bracket for fixing the identification antenna; Including, The management system for a storage container for chemicals used in semiconductor processing according to claim 1.

4. The chemical supply assembly further includes a mounting frame; The mount frame is provided with a plurality of the nozzle information acquisition units and the container placement units so as to be matched with each other in a 1:1 relationship, The drug delivery assembly is configured to accommodate a plurality of drug storage containers. The management system for a storage container for chemicals used in semiconductor processing according to claim 1.

5. The container placement information, the container-related information, and the nozzle-related information acquired from the plurality of nozzle information acquisition units and the plurality of container placement units are divided and individually transferred to the monitoring management unit, a gateway for dividing the wireless communication host protocol information generated by the monitoring management unit and transmitting the divided information to the nozzle information acquisition units and the container placement units, The management system for a storage container for chemicals used in semiconductor processing according to claim 4.

6. a pre-checker terminal for receiving the container placement information and monitoring a current status and an error occurrence status regarding a process in which the drug solution storage container is loaded / unloaded from the container placement unit, The management system for a storage container for chemicals used in semiconductor processing according to claim 1.

7. The above pre-checker terminal is an alarm unit for receiving the container placement information and generating an alarm during the process of loading / unloading the drug solution storage container into / from the container placement unit; The management system for a storage container for chemicals used in semiconductor processing according to claim 6.

8. a sound generating device for generating an alarm by playing a sound according to a control command of the monitoring management unit when the monitoring management unit determines that a preset error condition occurs in the chemical liquid supplying assembly. The management system for a storage container for chemicals used in semiconductor processing according to claim 1.

Images