Exposure apparatus, exposure method, device manufacturing method, and device

Abstract

To provide an exposure device capable of manufacturing a device with high throughput while coping with the positional deviation of a chip.SOLUTION: An exposure device includes: a substrate stage having a plurality of semiconductor chips arranged in one axial direction and for mounting a substrate; an exposure part emitting exposure light toward extraction electrodes provided in an electrode formation region extended in the one axial direction on the semiconductor chip; a pattern determination part for determining an exposure pattern exposed on a photosensitive layer by the exposure part; and a control part for controlling at least the substrate stage and the exposure part. The pattern determination part determines a relay wiring pattern connecting the extraction electrodes and a predetermined position on the substrate as the exposure pattern using an output from a measurement part for measuring positions of the plurality of semiconductor chips provided on the substrate to calculate the positional deviations of the plurality of semiconductor chips, and the control part exposes the relay wiring pattern to an exposure region extended in the one axial direction on the photosensitive layer.SELECTED DRAWING: Figure 10

Description

[Technical field]

[0001] The present invention relates to an exposure apparatus, an exposure method, a device manufacturing method, and a device. [Background technology]

[0002] In the manufacture of semiconductor devices, a wafer level packaging technique is used for packaging semiconductor chips on a wafer, and it is known that in the wafer level packaging technique, it is necessary to deal with misalignment of the semiconductor chips with respect to the wafer (Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] U.S. Patent No. 8,799,845 Summary of the Invention

[0004] According to a first aspect, An exposure apparatus for exposing a photosensitive layer formed on an upper layer of extraction electrodes provided on a plurality of semiconductor chips arranged on a substrate, comprising: a substrate stage on which the substrate on which the plurality of semiconductor chips are arranged along one axial direction is placed; an exposure unit that irradiates exposure light toward the extraction electrodes provided in an electrode formation region extending along the one axis direction on the semiconductor chip; a pattern determination unit that determines an exposure pattern to be exposed onto the photosensitive layer by the exposure unit; a control unit that controls at least the substrate stage and the exposure unit, the pattern determination unit determines, as the exposure pattern, a pattern of relay wiring connecting the extraction electrodes and a predetermined position on the substrate, using an output from a measurement unit that measures positions of a plurality of semiconductor chips provided on the substrate and determines a positional deviation of the plurality of semiconductor chips; The control unit is provided with an exposure device that uses the substrate stage to move the substrate from one side to the other in the uniaxial direction, while the exposure unit exposes a pattern of the relay wiring onto an exposure area extending in the uniaxial direction on the photosensitive layer.

[0005] According to a second aspect, 1. An exposure method for exposing a photosensitive layer formed on an upper layer of extraction electrodes provided on a plurality of semiconductor chips arranged along one axial direction on a substrate, the method comprising the steps of: measuring positions of a plurality of semiconductor chips provided on the substrate to obtain positional deviations of the plurality of semiconductor chips; Irradiating the exposure light toward the extraction electrodes provided in electrode formation regions extending along the one axis direction on the plurality of semiconductor chips; determining, as the exposure pattern, a pattern of relay wiring connecting the extraction electrodes and a predetermined position on the substrate using the determined positional deviations of the plurality of semiconductor chips; and exposing the pattern of the relay wiring to an exposure area extending in the uniaxial direction on the photosensitive layer while moving the substrate from one side to the other in the uniaxial direction.

[0006] According to a third aspect, 1. A device manufacturing method for manufacturing a device including a plurality of semiconductor chips each having an extraction electrode, relay wiring having one end electrically connected to the extraction electrode, and output wiring having the other end electrically connected to the relay wiring, comprising the steps of: forming a photosensitive layer on the plurality of semiconductor chips; exposing the pattern of the relay wiring on the photosensitive layer by using the exposure method of the second aspect; developing the exposed photoreceptor layer to form a pattern in the photoreceptor layer; and forming the relay wiring using the formed pattern of the photosensitive layer.

[0007] According to a fourth aspect, A device comprising a substrate and a plurality of semiconductor chips provided on the substrate, the relay wiring layer formed on the semiconductor chips by using the device manufacturing method of the third aspect; and the output wiring pattern formed on the relay wiring layer. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a block diagram showing the configuration of an exposure system according to an embodiment of the present invention. [Diagram 2] FIG. 2 is a perspective view of the measurement unit. [Diagram 3] Fig. 3(a) is a cross-sectional view of the main part of the measurement unit taken along a plane that includes the optical axis of the mark detection system and is perpendicular to the Y1 direction. Fig. 3(b) is a cross-sectional view of the main part of the measurement unit taken along a plane that includes the optical axis of the mark detection system and is perpendicular to the X1 direction. [Figure 4] FIG. 4 is a block diagram showing the configuration of the pattern determination unit. [Diagram 5] FIG. 5 is a schematic diagram showing the overall configuration of the pattern exposure unit. [Figure 6] FIG. 6 is a plan view of a variable shaped mask of the pattern generating device. [Figure 7] FIG. 7 is an explanatory diagram showing the movement of a projection area relative to a wafer in step-and-scan exposure performed by a pattern exposure unit. [Figure 8] FIG. 8 is a schematic diagram showing the overall configuration of the mask exposure unit. [Figure 9] Fig. 9(a) is a plan view of a semiconductor device according to an embodiment of the present invention, and Fig. 9(b) is a cross-sectional view taken along line BB in Fig. 9(a). [Figure 10]FIG. 10(a) is a top view of the fixing layer of the device of FIG. 9(a). FIG. 10(b) is a top view of the first insulating layer of the device of FIG. 9(a). FIG. 10(c) is a top view of the second insulating layer and relay wiring layer of the device of FIG. 9(a). FIG. 10(d) is a top view of the third insulating layer of the device of FIG. 9(a). FIG. 10(e) is a top view of the fourth insulating layer and redistribution layer of the device of FIG. 9(a). FIG. 10(f) is a top view of the fifth insulating layer and electrode layer of the device of FIG. 9(a). [Figure 11] FIG. 11 is a top view of a semiconductor chip included in a semiconductor device according to an embodiment of the present invention. [Figure 12] FIG. 12 is a flowchart illustrating a device manufacturing method according to an embodiment of the present invention. [Figure 13] Fig. 13(a) is a plan view of a wafer used in the device manufacturing method. Fig. 13(b) is a plan view showing one of the sections of the wafer. In Fig. 13(b), three semiconductor chips are arranged in their designed positions in one section of the wafer. Fig. 13(c) is a cross-sectional view taken along line CC in Fig. 13(b). [Figure 14] FIG. 14 is a plan view of a section of a wafer, showing the designed position of a semiconductor chip and a semiconductor chip that is shifted from the designed position. [Figure 15] FIG. 15 is an explanatory diagram showing an outline of the table. [Figure 16] FIG. 16 is a schematic diagram showing an example of pattern information stored in a table. [Figure 17] 17(a) to 17(g) are cross-sectional views for explaining a step of forming a relay wiring layer on a semiconductor chip in a relay wiring forming step, the position of the cross section being taken along line CC in FIG. [Figure 18] 18(a) to 18(h) are cross-sectional views for explaining a step of forming a rewiring layer on a semiconductor chip in a rewiring forming step, the position of the cross section being taken along line CC in FIG. [Figure 19]FIG. 19 is a plan view of one section of a wafer, showing the movement of a projection area relative to a semiconductor chip when a relay wiring pattern is exposed by a pattern exposure unit in a relay wiring forming step of the embodiment. [Figure 20] Fig. 20(a) is a schematic diagram showing an example of a coarse adjustment pattern stored in a coarse adjustment table according to a modified example, and Fig. 20(b) is a schematic diagram showing an example of a fine adjustment pattern stored in a fine adjustment table according to a modified example. [Figure 21] FIG. 21 is a plan view of a portion of one section of a wafer, showing a semiconductor chip that is positioned linearly displaced in the electrode arrangement direction from the designed position, and a modified relay wiring pattern that corresponds to the semiconductor chip. [Figure 22] FIG. 22 is a plan view of one section of a wafer, showing the movement of a projection area relative to a semiconductor chip when a relay wiring pattern is exposed by a pattern exposure unit in a relay wiring forming step of a modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] <Embodiment> An exposure system ES according to an embodiment of the present invention and a device manufacturing method using the exposure system ES will be described with reference to FIGS.

[0010] [Exposure System ES] As shown in FIG. 1, an exposure system ES of the embodiment mainly includes a measurement unit (first measurement unit) 100, a pattern determination unit 200, a pattern exposure unit 300, a mask exposure unit 400, and a control unit 500.

[0011] A case where the object to be processed is a wafer W0 will be described as an example regarding the configurations of the measurement unit 100, the pattern determination unit 200, the pattern exposure unit 300, and the mask exposure unit 400. A control unit 500 controls the overall operation of the exposure system ES.

[0012] [Measuring unit 100] The measurement unit 100 performs alignment measurement of the wafer W0.

[0013] 2, 3(a), and 3(b), the measurement section 100 mainly includes a surface plate 110, a slider 120, a drive system 130, a measurement unit 140, a first position measurement system 150 (FIG. 3(a)), a second position measurement system 160, and a measurement control section 170. In the explanation of the measurement section 100, two directions that are perpendicular to each other in a horizontal plane are defined as the X1 direction and the Y1 direction, and the vertical direction is defined as the Z1 direction.

[0014] The surface plate 110 is a rectangular parallelepiped member having a rectangular shape in a plan view. The upper surface of the surface plate 110 is a flat surface with a high degree of flatness, and functions as a guide surface that guides the movement of the slider 120.

[0015] The slider 120 supports the wafer W0 and moves within a horizontal plane. The slider 120 is slidably disposed on the upper surface of the base plate 110. The slider 120 is a rectangular plate in plan view, and a recess 121 that is circular in plan view is provided in the center of the upper surface (FIGS. 3(a) and 3(b)). A wafer holder 122 is provided in the recess 121.

[0016] The driving system 130 moves the slider 120 in the X1 direction and the Y1 direction. The driving system 130 mainly includes a pair of linear guides 131a and 131b and a movable stage 132.

[0017] The pair of linear guides 131a, 131b are each a rectangular base, and are disposed one on each side in the X1 direction of the base plate 110. The pair of linear guides 131a, 131b are each rectangular in plan view, with the long side direction coinciding with the Y1 direction.

[0018] The movable stage 132 has a first plate member 132a and a second plate member 132b arranged on either side of the slider 120 in the X1 direction, and a third plate member 132c and a fourth plate member 132d arranged on either side of the slider 120 in the Y1 direction. The first plate member 132a to the fourth plate member 132d are connected to form a frame that surrounds the slider 120.

[0019] A mover 134a1 is fixed to the lower surface of the first plate member 132a via a connecting member 133a. The mover 134a1 constitutes a Y-axis linear motor 134a together with a stator 134a2 provided near the upper surface of the linear guide 131a. Similarly, a mover 134b1 is fixed to the lower surface of the second plate member 132b via a connecting member 133b. The mover 134b1 constitutes a Y-axis linear motor 134b together with a stator 134b2 provided near the upper surface of the linear guide 131b. The movers 134a1 and 134b1 float slightly above the stators 134a2 and 134b2 by air bearings (not shown).

[0020] A stator 135c2 is provided on the upper surface of the third plate member 132c. The stator 135c2 constitutes an XY linear motor 135c together with a mover 135c1 fixed to the slider 120. Similarly, a stator 135d2 is provided on the upper surface of the fourth plate member 132d. The stator 135d2 constitutes an XY linear motor 135d together with a mover 135d1 fixed to the slider 120. The movers 135c1 and 135d1 float slightly above the stators 135c2 and 135d2 by air bearings (not shown).

[0021] The movable stage 132 is moved in the Y1 direction relative to the pair of linear guides 131a, 131b by Y-axis linear motors 134a, 134b. The slider 120 is moved in the X1 direction relative to the movable stage 132 and slightly moved in the Y1 direction by XY linear motors 135c, 135d.

[0022] The measurement unit 140 optically detects a mark (an alignment mark, for example) of a measurement target on the slider 120. The measurement unit 140 mainly includes a mark detection system 141.

[0023] As an example of the mark detection system 141, a FIA (Field Image Alignment) system, which is a type of imaging type alignment sensor using an image processing method, can be used, which illuminates a mark with broadband light such as a halogen lamp and measures the mark position by image processing the image of the mark. In addition, any alignment detection system such as a diffracted light interference type or a beam scan type can be used as the mark detection system 141. The mark detection system 141 has a lens barrel 141s and an optical system (not shown) having an optical axis AX1 inside the lens barrel 141s, and emits detection light to a measurement target on the slider 120. The mark detection system 141 may have an alignment autofocus function that adjusts the focal position of the optical system.

[0024] The first position measurement system 150 is mainly composed of a head HD1, a lower surface 120e of the slider 120, and a grating G1 provided on the lower surface 120e.

[0025] The head HD1 is disposed inside a recess 110a provided in the center of the upper surface of the base 110.

[0026] The grating G1 includes a reflective diffraction grating (X diffraction grating) whose periodic direction is the X1 direction, and a reflective diffraction grating (Y diffraction grating) whose periodic direction is the Y1 direction. The pitch of the X diffraction grating and the Y diffraction grating can be, for example, 1 μm.

[0027] Head HD1 irradiates grating G1 with multiple beams and receives diffracted beams from grating G1. Head HD1 and grating G1 constitute encoder system 151. Encoder system 151 measures the position of slider 120 in the X1 direction and the Y1 direction.

[0028] The head HD1 also irradiates four measurement beams onto the lower surface 120e of the slider 120, and receives return beams from the lower surface 120e. The head HD1 and the lower surface 120e of the slider 120 form a laser interferometer system 152. The laser interferometer system 152 measures the position of the slider 120 in the Z1 direction, the θX1 direction, and the θY1 direction.

[0029] The second position measurement system 160 is mainly composed of heads HD2a and HD2b and gratings G2a and G2b.

[0030] Head HD2a is provided at the tip of head mounting member 161a extending from barrel 141s of mark detection system 141 to one side in the X1 direction. Head HD2b is provided at the tip of head mounting member 161b extending from barrel 141s of mark detection system 141 to the other side in the X1 direction.

[0031] The gratings G2a and G2b are provided on the upper surfaces of scale members 163a and 163b fixed to the base 110 via support members 162a and 162b. The gratings G2a and G2b are reflective two-dimensional gratings, and face the heads HD2a and HD2b.

[0032] Head HD2a and grating G2a constitute encoder system 164a, and head HD2b and grating G2b constitute encoder system 164b. Encoder systems 164a and 164b measure the positions of surface plate 110 relative to mark detection system 141 in the X1 direction, Y1 direction, Z1 direction, θX1 direction, θY1 direction, and θZ1 direction.

[0033] The measurement control unit 170 generally controls the drive system 130, the measurement unit 140, the first position measurement system 150, and the second position measurement system 160 to perform alignment measurement for the wafer W0.

[0034] As the measurement section 100 having the above configuration, the measurement devices disclosed in U.S. Patent Application Publication No. 2019 / 257647, U.S. Pat. No. 1,0684,562, U.S. Pat. No. 1,0698,326, U.S. Pat. No. 1,0775,708, and U.S. Pat. No. 1,0777,441 may be used.

[0035] [Pattern determination unit 200] Based on the result of the alignment measurement by the measurement unit 100, the pattern determination unit 200 determines an exposure pattern that the pattern exposure unit 300 will use to expose the photosensitive layer of the wafer W0.

[0036] As shown in FIG. 4, the pattern determination unit 200 mainly includes a storage unit 210, a determination unit 220, and a receiving unit 230.

[0037] The storage unit 210 stores a table used to determine a pattern. The determination unit 220 determines a pattern based on the table and the measurement results of the measurement unit 100. The receiving unit 230 receives the output from the measurement unit 100 and sends it to the determination unit 220.

[0038] The pattern determination section 200 will be described in detail later.

[0039] [Pattern exposure section 300] The pattern exposure unit 300 exposes the pattern determined by the pattern determination unit 200 onto the photosensitive layer of the wafer W0.

[0040] 5, the pattern exposure unit 300 mainly includes an illumination system 310, a pattern generating device 320, a projection optical system 330, a stage device 340, an alignment detection system (second measurement unit) 350, and a pattern exposure control unit 360. In the explanation of the pattern exposure unit 300, two directions perpendicular to each other in a horizontal plane are defined as the X3 direction and the Y3 direction, and the vertical direction is defined as the Z3 direction.

[0041] The illumination system 310 mainly includes a light source system (not shown), an illumination optical system 311, and a reflecting mirror 312. The light source system includes, as an example, a solid-state laser light source (DFB semiconductor laser, fiber laser, etc.). The illumination optical system 311 includes a shaping optical system for changing the illumination conditions, an optical integrator, a field stop, and a relay lens system (none of which are shown).

[0042] The pattern generating device 320 is an electronic mask system that generates a pattern to be projected onto a photosensitive layer of a wafer W0 placed on a stage 341 (described later) of a stage device 340. The pattern generating device 320 mainly includes a variable shaped mask 321 and a mask driving unit 322.

[0043] 6, the variable shaping mask 321 has a plurality of micromirror mechanisms M arranged in a matrix (two-dimensional, array) on the X3-Y3 plane. Each micromirror mechanism M has a micromirror M1 and a driving mechanism M2 provided on the opposite side of the reflecting surface of the micromirror M1. The driving mechanism M2 rotates the micromirror M1 around an axis extending in the X3 direction.

[0044] The mask driving unit 322 drives the driving mechanism M2 of each of the multiple micromirror mechanisms M in accordance with a control signal from the pattern exposure control unit 360, and switches the micromirror M1 between an on state (on position) and an off state (off position).

[0045] When the illumination light IL from the illumination system 310 is incident on the micromirror M1 in the on state, the zeroth-order diffracted light IL0 of the illumination light IL is incident on the projection optical system 330. On the other hand, when the illumination light IL from the illumination system 310 is incident on the micromirror M1 in the off state, the zeroth-order diffracted light IL0 of the illumination light IL reaches a non-exposure optical path outside the projection optical system 330. The pattern generating device 320 imparts a pattern to the illumination light IL by setting each of the multiple micromirrors M1 to either the on state or the off state.

[0046] The projection optical system 330 reduces and projects the pattern generated by the pattern generating device 320 onto the wafer W0 placed on the stage 341 at a projection magnification β (β=1 / 200, 1 / 400, 1 / 500, etc., as an example). That is, the pattern generated by the pattern generating device 320 is exposed onto the wafer W0 by an energy beam that has passed through the pattern generating device 320. The projection optical system has a lens barrel 330s and multiple optical elements (not shown) that are arranged in a predetermined positional relationship inside the lens barrel 330s.

[0047] The stage device 340 mainly includes a stage (substrate stage) 341, a laser interferometer 342, and a stage control unit 343.

[0048] The stage 341 holds the wafer W0 via a wafer holder (not shown) provided at the center of the upper surface. The stage 341 is movable in the X3 direction, the Y3 direction, and the Z3 direction by a stage drive system (not shown), and is rotatable around an axis extending in the Z3 direction.

[0049] Laser interferometer 342 constantly detects the position of stage 341 in the X3 direction, Y3 direction, and θZ3 direction (direction around an axis extending in the Z3 direction) with a resolution of, for example, approximately 0.5 to 1 nm by irradiating a measurement beam onto a reflecting surface provided on the end face of stage 341.

[0050] The stage control unit 343 controls the movement of the stage 341 in accordance with a control signal from the pattern exposure control unit 360 .

[0051] The alignment detection system (measurement unit, second measurement unit) 350 is disposed on the side of the projection optical system 330. In this embodiment, an imaging type alignment sensor that detects street lines and position detection marks (substrate alignment marks) formed on the wafer W0 is used as the alignment detection system 350. A detailed configuration of the alignment detection system 350 is disclosed in, for example, Japanese Patent Application Laid-Open No. 9-219354. The detection result of the alignment detection system 350 is supplied to a pattern exposure control unit 360.

[0052] The pattern exposure control unit 360 controls the operation of the illumination system 310, the pattern generating device 320, the stage device 340, etc., and forms an image of the pattern generated sequentially by the variable shaped mask 321 onto the wafer W0 held on the stage 341 via the projection optical system 330.

[0053] When the variable molding mask 321 is illuminated by illumination light IL from the illumination system 310, the illumination light IL reflected by the micromirror M1 of the variable molding mask 321 in the on state, i.e., the illumination light IL that has been given a pattern by the variable molding mask 321, enters the projection optical system 330, and a reduced image (partial inverted image) of the pattern is formed in the projection area IA on the wafer W0 held on the stage 341.

[0054] In this embodiment, the pattern exposure control unit 360 performs exposure by the step-and-scan method as shown by the orbit Rt in FIG. 7. That is, first, the projection area IA is moved to the -Y3 side (i.e., the stage 341 is moved to the +Y3 side) from the start point STA located on the most positive side in the X3 direction in the exposed area (shot area) on the wafer W0, and scanning exposure (scanning exposure) is performed. Next, a stepping operation is performed to move the projection area IA to the -X3 side (i.e., the stage 341 is moved to the +X3 side). Next, the projection area IA is moved to the +Y side (i.e., the stage 341 is moved to the -Y3 side) and scanning exposure is performed. After that, the scanning exposure and the stepping operation are repeated to perform exposure of the entire exposure area. The area extending in the Y3 direction exposed by one scanning exposure is called the "exposure area".

[0055] During the scan exposure, the pattern exposure control unit 360 moves the stage 341 at an appropriate speed and scrolls the pattern generated by the variable shaped mask 321 in synchronization with the movement (i.e., changes the shape of the pattern generated by the variable shaped mask 321). The width of the projection area IA in the X3 direction is about 0.1 to 0.2 mm in this embodiment.

[0056] As the pattern exposure section 300 having the above configuration, the exposure apparatus disclosed in U.S. Pat. No. 8,089,616 and U.S. Patent Publication No. 2020 / 00257205 may be used.

[0057] [Mask exposure section 400] The mask exposure unit 400 exposes a predetermined pattern formed on a reticle (photomask) onto a photosensitive layer of the wafer W0.

[0058] 8, the mask exposure section 400 mainly includes an illumination system 410, a reticle stage device 420, a projection optical system 430, a wafer stage device 440, an alignment detection system 450, and a mask exposure control section 460. In the explanation of the mask exposure section 400, two directions that are perpendicular to each other in a horizontal plane are defined as the X4 direction and the Y4 direction, and the vertical direction is defined as the Z4 direction.

[0059] The illumination system 410 has a light source and an illumination optical system (both not shown) connected to the light source via a light transmitting optical system. The light source is, for example, an ArF excimer laser light source (wavelength 193 nm). The illumination optical system irradiates illumination light from the light source with a substantially uniform illuminance onto an illumination area IAR on a reticle R0 held on a reticle stage 421 of a reticle stage device 420. The illumination area IAR is a slit-shaped area that extends elongatedly in the X4 direction.

[0060] The reticle stage device 420 mainly includes a reticle stage 421 and a reticle laser interferometer 422 .

[0061] The reticle stage 421 holds the reticle R0 via a holder provided in the center. The reticle stage 421 can be minutely driven in the X4 and Y4 directions by a reticle stage drive system (not shown), and can also be driven within a predetermined stroke range in the scanning direction (Y4 direction).

[0062] The reticle laser interferometer 422 constantly detects the position of the reticle stage 421 in the X4, Y4, and θZ4 directions with a resolution of, for example, about 0.25 nm by irradiating a moving mirror MR1 provided on the end face of the reticle stage 421 with a measurement beam.

[0063] The projection optical system 430 reduces and projects a pattern formed on a reticle R0 onto a wafer W0 placed on a wafer stage 441 (described later) at a predetermined projection magnification (for example, 1 / 4, 1 / 5, 1 / 8, etc.) The projection optical system has a lens barrel 430s and multiple optical elements (not shown) arranged in a predetermined positional relationship inside the lens barrel 430s.

[0064] The wafer stage device 440 mainly includes a wafer stage 441 and a laser interferometer 442 .

[0065] The wafer stage 441 holds the wafer W0 via a wafer holder (not shown) provided at the center of the upper surface. The wafer stage 441 is driven by a stage drive system (not shown) at a predetermined stroke in the X4 direction and the Y4 direction, and is also slightly driven in the Z4 direction, the θX4 direction, the θY4 direction, and the θZ4 direction.

[0066] The laser interferometer 442 constantly detects position information of the wafer stage 441 in the X4 direction, Y4 direction, θZ4 direction, θX4 direction, and θY4 direction with a resolution of, for example, about 0.25 nm by irradiating a measurement beam onto a movable mirror MR2 provided on the end face of the wafer stage 441.

[0067] The alignment detection system 450 is provided on the side of the lens barrel 430s of the projection optical system 430. The alignment detection system 450 detects alignment marks and the like formed on the wafer. As the alignment detection system 450, a FIA (Field Image Alignment) system, which is a type of imaging type alignment sensor using an image processing method, can be used. Instead of or in addition to the image processing type alignment system, a diffracted light interference type alignment system may be used.

[0068] The mask exposure control unit 460 comprehensively controls the illumination system 410, reticle stage device 420, projection optical system 430, and wafer stage device 440, and forms an image of a pattern formed on a reticle R0 held by the reticle stage device 420 on a wafer W0 held on a wafer stage 441 via the projection optical system 430. The mask exposure control unit 460 of this embodiment controls each unit so as to perform exposure by the step-and-scan method.

[0069] As the mask exposure section 400 having the above configuration, the exposure apparatus disclosed in US Pat. No. 10,684,562 may be used.

[0070] [Device manufacturing method] A method for manufacturing a semiconductor device using the exposure system ES will be described using an example in which a semiconductor device 10 shown in FIGS. 9 and 10 is manufactured.

[0071] As shown in Figures 9(a) and 9(b), the semiconductor device 10 has a layered structure in which a substrate 11, a fixing layer 12, a first insulating layer 131, a second insulating layer 132, a third insulating layer 133, a fourth insulating layer 134, and a fifth insulating layer 135 are layered in this order from the bottom.

[0072] The substrate 11 is a flat plate made of silicon.

[0073] The fixed layer 12 is formed of an insulating material such as polyimide, for example. As shown in Figures 9(b) and 10(a), the fixed layer 12 includes semiconductor chips CP1, CP2, and CP3 therein.

[0074] The semiconductor chips CP1 to CP3 have the same configuration, and will be simply referred to as the semiconductor chip CP below when there is no need to distinguish between them.

[0075] 11, the semiconductor chip CP has a substrate SB that is substantially square in plan view, a circuit CR, eight lead electrodes T, and four alignment marks (chip alignment marks) AM. For the semiconductor chip CP, the direction in which the four lead electrodes T are arranged in FIG. 11 is called the electrode arrangement direction (uniaxial direction), and the direction that is an in-plane direction of the substrate SB and perpendicular to the electrode arrangement direction is called the perpendicular direction.

[0076] The substrate SB is a flat plate made of resin or the like.

[0077] The circuit CR is provided at the center of the substrate SB in a plan view. The circuit CR is designed to perform a predetermined function, and is provided on the substrate SB.

[0078] Each of the eight lead-out electrodes T is an electrode for connecting the circuit CR to the outside of the semiconductor chip CP. Each of the eight lead-out electrodes T is connected to the circuit CR by a wiring (not shown) provided in the substrate SB.

[0079] The eight extraction electrodes T are provided on the upper surface of the substrate SB in an area where the circuit CR is not provided in a plan view of the substrate SB. Four of the eight extraction electrodes T are provided on one side of the circuit CR in the orthogonal direction and aligned in a row in the electrode arrangement direction. The remaining four of the eight extraction electrodes T are provided on the other side of the circuit CR in the orthogonal direction and aligned in a row in the electrode arrangement direction.

[0080] An area defined on one side of the circuit CR in the orthogonal direction and in which four extraction electrodes T are provided is called a first electrode forming area TA1. An area defined on the other side of the circuit CR in the orthogonal direction and in which four extraction electrodes T are provided is called a second electrode forming area TA2. The first and second electrode forming areas TA1 and TA2 are each an elongated area extending along the electrode arrangement direction.

[0081] The first and second electrode forming regions TA1 and TA2 are regions outside the circuit CR in a plan view of the substrate SB, and the circuit CR is not provided in the first and second electrode forming regions TA1 and TA2. The first electrode forming region TA1 and the second electrode forming region TA2 sandwich the circuit CR in the orthogonal direction.

[0082] The first and second electrode formation regions TA1 and TA2 are defined at positions away from the center of the substrate SB in the orthogonal direction. The first electrode formation region TA1 and the second electrode formation region TA2 are localized and spaced apart from each other in the orthogonal direction.

[0083] In this embodiment, the lead electrodes T are provided only in the region where the circuit CR is not provided in the orthogonal direction of the semiconductor chip CP.

[0084] The four alignment marks AM are provided at each of the four corners of the substrate SB. Each of the alignment marks AM may be a cross-shaped mark, a box-shaped mark, or the like.

[0085] The first insulating layer 131 to the fifth insulating layer 135 are formed of an insulating material such as silicon dioxide (SiO2), for example.

[0086] 9(b) and 10(b), a plurality of vias V1 are provided inside the first insulating layer 131. The plurality of vias V1 are provided on the lead-out electrodes T of the semiconductor chips CP1 to CP3, respectively.

[0087] 9(b) and 10(c), relay wiring (relay wiring layer) W2 is provided inside the second insulating layer 132. The relay wiring W2 of the semiconductor device 10 of this embodiment is composed of a set of wirings connected to multiple vias V1, respectively (described in detail later). The relay wiring W2 connects the via V1 and the via V3 (described later).

[0088] 9(b) and 10(d), a plurality of vias V3 are provided inside the third insulating layer 133. The plurality of vias V3 are respectively connected to a plurality of wirings that configure the relay wiring W2.

[0089] 9(b) and 10(e), rewiring (rewiring layer) W4 is provided inside the fourth insulating layer 134. The rewiring W4 of the semiconductor device 10 of this embodiment includes an output wiring (output wiring layer) W41 and an inter-chip wiring (inter-chip wiring layer) W42.

[0090] The output wiring W41 is configured by a set of wiring having one end at the position of the via V3 and the other end at a position different from the via V3. The output wiring W41, together with the vias V1 and V3 and the relay wiring W2, is connected to the semiconductor chips CP1 to CP3 and the electrodes T 10 (described later).

[0091] The inter-chip wiring W42 is composed of a set of wiring having one end at the position of the via V3 and the other end at the position of a via V3 different from the via V3. The inter-chip wiring W42, together with the vias V1, V3 and the relay wiring W2, connects the semiconductor chips CP1 to CP3 to one another.

[0092] As shown in FIG. 9(b) and FIG. 10(f), the fifth insulating layer 135 includes a plurality of electrodes (electrode layers) T 10 Electrode T 10 are provided on the end of each of the multiple wirings constituting the output wiring W41, opposite to the end connected to the via V3.

[0093] As shown in the flowchart of FIG. 12, the device manufacturing method of this embodiment mainly includes a chip mounting process S1, an error measuring process S2, a relay wiring pattern determining process S3, a relay wiring forming process S4, a rewiring forming process S5, and a dicing process S6.

[0094] [Chip attachment process S1] In the chip mounting step S1, a wafer W is prepared, and a plurality of semiconductor chips are mounted on the wafer W. In this embodiment, as the wafer W, a silicon wafer having a diameter of 300 mm as shown in FIG.

[0095] First, as shown in Fig. 13(a), the wafer W is divided into a plurality of sections SC. Each of the plurality of sections SC is rectangular and arranged in a matrix on the wafer W. In the following description, the short side direction and long side direction of the section SC are referred to as the X direction and the Y direction of the section SC and the wafer W, respectively. The thickness direction of the wafer W is referred to as the Z direction of the section SC and the wafer W. A circuit pattern may be formed on the wafer W. In this case, the plurality of sections SC may be divided by street lines between a plurality of circuit pattern formation areas on the wafer W.

[0096] Next, the semiconductor chips CP1 to CP3 (FIG. 11) are attached to each of the multiple sections SC.

[0097] In this embodiment, the semiconductor chips CP1 to CP3 are arranged in the section SC such that the semiconductor chips CP1 and CP2 are aligned in the X direction, and the semiconductor chips CP2 and CP3 are aligned in the Y direction (FIG. 13(b)).

[0098] The semiconductor chips CP1 to CP3 are arranged in the sections SC so that the electrode arrangement direction of the semiconductor chips CP1 to CP3 coincides with the Y direction of the sections SC, and the orthogonal direction of the semiconductor chips CP1 to CP3 coincides with the X direction of the sections SC.

[0099] 13(b), the semiconductor chips CP1 and CP2 are aligned in the X direction, and the lead electrodes T of the semiconductor chips CP1 and CP2 are in the same position in the Y direction. The semiconductor chips CP2 and CP3 are aligned in the Y direction, and the lead electrodes T of the semiconductor chips CP2 and CP3 are in the same position in the X direction. The electrode arrangement directions of the semiconductor chips CP1 to CP3 are the same.

[0100] The first electrode formation region TA1 of the semiconductor chip CP2 and the first electrode formation region TA1 of the semiconductor chip CP3 are aligned in a straight line along the Y direction, and the second electrode formation region TA2 of the semiconductor chip CP2 and the second electrode formation region TA2 of the semiconductor chip CP3 are aligned in a straight line along the Y direction. In this way, by aligning the first electrode formation regions TA1 or the second electrode formation regions TA2 of the multiple semiconductor chips CP in a straight line, in exposure by the pattern exposure unit 300, the exposure region extending in the Y3 axis direction (the region exposed by one scanning exposure) and the first electrode formation regions TA1 or the second electrode formation regions TA2 of the multiple semiconductor chips CP can be overlapped. This allows the exposure by the pattern exposure unit 300 to be performed efficiently (described in detail later).

[0101] In the following description, the positions of the semiconductor chips CP1 to CP3 arranged as shown in FIG. 13(b) will be referred to as "design positions."

[0102] After the semiconductor chips CP1 to CP3 are arranged in each of the sections SC of the wafer W, a fixing layer 12 is formed from resin to fix the semiconductor chips CP1 to CP3 to the wafer W. The upper surface of the fixing layer 12 and the upper surfaces of the semiconductor chips CP1 to CP3 may be flush with each other (FIG. 13(c)).

[0103] In this specification, the state in which the semiconductor chip CP is attached to the wafer W by the fixing layer 12, which is obtained at the completion of the chip attachment step S1, may be regarded as a device.

[0104] [Error measurement process S2] In the chip mounting process S1, when the semiconductor chips CP1 to CP3 are mounted on the wafer W, the semiconductor chips CP1 to CP3 are often fixed in positions deviated from their designed positions (FIG. 13(b)). The positional deviation of the semiconductor chips CP1 to CP3 from their designed positions occurs, for example, due to non-uniform shrinkage of the resin when the resin is hardened to form the fixing layer 12.

[0105] An example of positional deviation is shown in Fig. 14. In Fig. 14, the design positions of the semiconductor chips CP1 to CP3 are indicated by dotted lines, and the actual positions of the semiconductor chips CP1 to CP3 are indicated by solid lines. The semiconductor chip CP1 is shifted in the -X and -Y directions from the design position. The semiconductor chip CP2 is shifted in the +X and -Y directions from the design position. As for the semiconductor chip CP3, no deviation from the design position occurs.

[0106] In the error measurement process S2, the measurement unit 100 measures the X-direction deviation ΔX, the Y-direction deviation ΔY, and the rotational deviation Δθ around an axis extending in the Z direction of the semiconductor chips CP1 to CP3 in each section SC relative to the design position. Hereinafter, the combination of the X-direction deviation ΔX, the Y-direction deviation ΔY, and the rotational deviation Δθ around an axis extending in the Z direction is referred to as positional deviation information DI.

[0107] First, the wafer W is placed on the wafer holder 122 of the slider 120 of the measurement unit 100. At this time, the X and Y directions of the wafer W are aligned with the X1 and Y1 directions of the measurement unit 100.

[0108] Next, the mark detection system 141 of the measurement unit 100 detects the alignment marks (substrate alignment marks) (not shown) of the wafer W and the alignment marks (chip alignment marks) AM of the semiconductor chips CP1 to CP3.

[0109] Since the position of each section SC on the wafer W and the design position of the semiconductor chips CP1 to CP3 in each section SC are known, the design positions of the semiconductor chips CP1 to CP3 can be obtained by detecting the alignment marks on the wafer W. Also, since each of the semiconductor chips CP1 to CP3 has four alignment marks AM arranged at the four corners, the actual position of each of the semiconductor chips CP1 to CP3 can be obtained based on the detection of these marks.

[0110] Therefore, it is possible to calculate the positional deviation information DI of each of the semiconductor chips CP1 to CP3 based on the detection result of the alignment mark of the wafer W and the detection result of the alignment mark AM of each of the semiconductor chips CP1 to CP3. The calculation of the positional deviation information DI is performed by, for example, the measurement control unit 170 of the measurement unit 100.

[0111] The measurement control section 170 outputs the obtained positional deviation information DI to the pattern determination section 200.

[0112] [Relay wiring pattern determination process S3] In the relay wiring pattern determination step S3, the pattern determination unit 200 determines the pattern of the relay wiring W2 for each section SC.

[0113] The reason for forming the relay wiring W2 in the device manufacturing method of this embodiment is as follows.

[0114] In the device manufacturing method of this embodiment, in a rewiring formation step S5 described later, a pattern of the rewiring W4 (FIG. 10(e)) is formed by exposure using a mask exposure unit 400. Here, the pattern of the rewiring W4 is designed based on the semiconductor chips CP1 to CP3 arranged in the design position (FIG. 13(b)). Therefore, for example, if the actual positions of the semiconductor chips CP1 to CP3 are deviated from the design positions as shown in FIG. 14, a connection failure such as a disconnection may occur between the lead electrodes T of the semiconductor chips CP1 to CP3 and the rewiring W4.

[0115] Therefore, in the device manufacturing method of this embodiment, relay wiring W2 (FIG. 10(c)) is formed, which is composed of a set of linear wiring extending between the positions of the lead electrodes T of the semiconductor chips CP1-CP3 in the actual positions and the positions of the lead electrodes T of the semiconductor chips CP1-CP3 in the designed positions. As a result, even if the actual positions of the semiconductor chips CP1-CP3 are shifted from the designed positions, the semiconductor chips CP1-CP3 and the rewiring W4 are well connected via the relay wiring W2.

[0116] Here, the pattern of the relay wiring W2 varies depending on the state of positional deviation from the design position of the semiconductor chip CP. Therefore, in the relay wiring pattern determination step S3, the pattern of the relay wiring W2 is determined for each of the semiconductor chips CP1 to CP3 based on the positional deviation information DI acquired in the error measurement step S2.

[0117] Specifically, the pattern of the relay wiring W2 is determined, for example, as follows.

[0118] First, the determination section 220 of the pattern determination section 200 receives, via the receiving section 230, the positional deviation information DI of each of the semiconductor chips CP1 to CP3 from the measurement control section 170 of the measurement section 100.

[0119] Next, the determining unit 220 determines the pattern of the relay wiring W2 for each of the semiconductor chips CP1 to CP3 based on the received positional deviation information DI and the table TB stored in the storage unit 210.

[0120] In the table TB, various kinds of misalignment information DI and various kinds of pattern information PI are stored in association with each other. Each of the various kinds of pattern information PI includes a pattern of relay wiring W2 suitable for the corresponding misalignment information DI. That is, in the table TB, various kinds of misalignment that the semiconductor chip CP may have are stored in association with the patterns of relay wiring W2 to be formed for the semiconductor chip CP having the misalignment.

[0121] Specifically, for example, table TB1 shown in FIG. 15 stores pattern information PI corresponding to various combinations of shift amounts ΔX and ΔY, which are predetermined values ​​in increments of 10 nm between −100 [nm] and +100 [nm], and a shift amount Δθ that is +100 [μrad].

[0122] Similarly, the table TB2 shown in Fig. 15 stores pattern information PI corresponding to various combinations of the deviation amounts ΔX and ΔY, which are predetermined values ​​between -100 [nm] and +100 [nm] in 10 nm increments, and the deviation amount Δθ of -90 [μrad]. The table TB3 shown in Fig. 15 stores pattern information PI corresponding to various combinations of the deviation amounts ΔX and ΔY, which are predetermined values ​​between -100 [nm] and +100 [nm] in 10 nm increments, and the deviation amount Δθ of -100 [μrad].

[0123] In addition to tables TB1 to TB3, table TB includes a plurality of tables that store pattern information PI corresponding to various combinations of the deviation amounts ΔX, ΔY, and Δθ.

[0124] Each of the various types of pattern information PI includes eight patterns PT extending between eight extraction electrodes T of the semiconductor chip CP in the actual position and eight extraction electrodes T of the semiconductor chip CP in the design position (FIG. 16).

[0125] 16 corresponds to misalignment information DI in which the amount of misalignment ΔX is −50 [nm], the amount of misalignment ΔY is −50 [nm], and the amount of misalignment Δθ is 0 [μrad]. Each of the eight patterns PT included in this pattern information PI includes a substantially square first end portion PT1, a substantially square second end portion PT2, and a straight portion PT3 extending between the first end portion PT1 and the second end portion PT2.

[0126] The center CT1 of the first end PT1 is spaced from the center CT2 of the second end PT2 by 50 [nm] in the X direction and 50 [nm] in the Y direction. That is, each pattern PT is designed so that when the first end PT1 is formed at the position of the extraction electrode T of the semiconductor chip CP in the actual position, the second end PT2 is located at the position of the electrode T of the semiconductor chip CP in the design position.

[0127] At least one of the length (wiring length) and extension direction of the straight line portion PT3 of the included patterns PT is different among multiple pieces of pattern information PI. In the pattern information PI corresponding to the misalignment information DI in which the deviation amount Δθ is 0 [μrad], the length and extension direction of the straight line portion PT3 of the eight patterns PT are the same, as shown in Fig. 16. In contrast, in the pattern information PI corresponding to the misalignment information DI in which the deviation amount Δθ is not 0 [μrad], the length and extension direction of the straight line portion PT3 of the eight patterns PT are not the same.

[0128] When the shift amount ΔX, the shift amount ΔY, and the shift amount Δθ are all zero or are small enough to be ignored, a combination of an approximately square pattern having only a first end portion PT1 and no second end portion PT2 or straight portion PT3 is selected.

[0129] The determining unit 220 reads the deviation amounts ΔX, ΔY, and Δθ included in the positional deviation information DI received from the measuring unit 100 for each of the semiconductor chips CP1 to CP3, and selects the pattern information PI corresponding to the combination from the table TB. Then, the determining unit 220 determines the pattern indicated by the selected pattern information PI as the pattern of the relay wiring W2 for the semiconductor chip.

[0130] The determination unit 220 sends the determined pattern to the pattern exposure unit 300 as an exposure pattern.

[0131] [Relay wiring formation process S4] In the relay wiring forming step S4, the relay wiring W2 having the pattern determined in the relay wiring pattern determining step S3 is formed on the semiconductor chips CP1 to CP3 in each section SC. Specifically, the relay wiring W2 is formed, for example, in the following procedure.

[0132] (1) A first insulating layer 131 is formed on the fixing layer 12 (FIG. 17(a)), and a first photosensitive layer 141 is formed on the first insulating layer 131 (FIG. 17(b)). When the fixing layer 12 covers the upper part of the semiconductor chip CP, the fixing layer 12 performs the function of the first insulating layer 131, so that the first photosensitive layer may be formed on the fixing layer 12 without forming the first insulating layer 131.

[0133] (2) Using the pattern exposure unit 300, the pattern of the via V1 (FIG. 10(b)) generated by the pattern generation device 320 is projected onto the first photosensitive layer 141. The scanning exposure by the pattern exposure unit 300 is performed with the scanning direction coinciding with the electrode arrangement direction of the semiconductor chips CP1 to CP3. Then, the first photosensitive layer 141 and the first insulating layer 131 are removed from the positions where the pattern of the via V1 is exposed (FIG. 17(c)), and after the remaining first photosensitive layer 141 is also removed, a conductor (copper, for example) is filled into the recess left in the first insulating layer 131 (FIG. 17(d)). As a result, the via V1 is formed inside the first insulating layer 131.

[0134] The via V1 is formed at the position of the lead electrodes T of the semiconductor chips CP1 to CP3 that are in the actual positions. The position of the via V1 can be determined based on the measurement results of the error measurement step S2.

[0135] (3) A second insulating layer 132 is formed on the first insulating layer 131, and a second photosensitive layer 142 is formed on the second insulating layer 132 (FIG. 17(e)).

[0136] (4) Using the pattern exposure unit 300, the pattern of the relay wiring W2 (FIG. 10(c)) generated by the pattern generation device 320 (i.e., the pattern determined in the relay pattern determination step S3) is projected onto the second photosensitive layer 142. The scanning exposure by the pattern exposure unit 300 is performed by matching the scanning direction with the electrode arrangement direction of the semiconductor chips CP1 to CP3 (Y direction of the wafer W). Then, the second photosensitive layer 142 and the second insulating layer 132 are removed from the positions where the pattern of the relay wiring W2 is exposed (FIG. 17(f)), and the remaining second photosensitive layer 142 is also removed, and then a conductor is embedded in the recess left in the second insulating layer 132 (FIG. 17(g)). As a result, the relay wiring (relay wiring layer) W2 is formed inside the second insulating layer 132. Before forming the second insulating layer 132 on the first insulating layer 131 in which the via V1 is formed, a planarization process (e.g., CMP) may be performed on the first insulating layer 131, or a planarization process may be performed on the second insulating layer 132 in which the relay wiring W2 is formed. Also, a planarization process may be performed on the first insulating layer 131 before the via V1 is formed.

[0137] [Rewiring formation process S5] In the rewiring formation process S5, the rewiring W4 having a predetermined pattern and the electrode T 10 is formed on the relay wiring W2 of each section SC. Specifically, the rewiring W4 is formed, for example, in the following procedure.

[0138] (1) A third insulating layer 133 is formed on the second insulating layer 132, and a third photosensitive layer 143 is formed on the third insulating layer 133. Then, using a mask exposure unit 400, a pattern of a via V3 (FIG. 10(d)) previously formed on a reticle (photomask) is projected onto the third photosensitive layer 143, and the third photosensitive layer 143 and the third insulating layer 133 are removed at the positions where the pattern of the via V3 is exposed (FIG. 18(a)). After the remaining third photosensitive layer 143 is also removed, a conductor is embedded in the recess left in the third insulating layer 133 (FIG. 18(b)). As a result, the via V3 is formed inside the third insulating layer 133. The via V3 is formed at the position of the lead electrode of the semiconductor chips CP1 to CP3 at the design position. Here, a planarization process may be performed after the formation of the third insulating layer 133.

[0139] (2) A fourth insulating layer 134 is formed on the third insulating layer 133, and a fourth photosensitive layer 144 is formed on the fourth insulating layer 134 (FIG. 18(c)). Note that a planarization process may be performed after the formation of the fourth insulating layer 134.

[0140] (3) Using a mask exposure unit 400, a pattern (mask pattern) of the rewiring W4 (FIG. 10(e)) previously formed on a reticle (photomask) is projected onto the fourth photosensitive layer 144. Then, the fourth photosensitive layer 144 and the fourth insulating layer 134 are removed from the positions where the pattern of the rewiring W4 is exposed (FIG. 18(d)), and the remaining fourth photosensitive layer 144 is also removed, after which a conductor is embedded in the recess left in the fourth insulating layer 134 (FIG. 18(e)). As a result, the rewiring (rewiring layer) W4 is formed inside the fourth insulating layer 134.

[0141] (4) A fifth insulating layer 135 is formed on the fourth insulating layer 134, and a fifth photosensitive layer 145 is formed on the fifth insulating layer 135 (FIG. 18(f)).

[0142] (5) Using the mask exposure unit 400, the electrode T formed on the reticle is 10 The pattern of FIG. 10(f) is projected onto the fifth photosensitive layer 145. Then, the electrode T 10 The fifth photosensitive layer 145 and the fifth insulating layer 135 are removed from the positions where the pattern is exposed (FIG. 18(g)), and the remaining fifth photosensitive layer 145 is also removed, and then a conductor is embedded in the recess left in the fifth insulating layer 135 (FIG. 18(h)). As a result, an electrode T 10 is formed.

[0143] [Dicing process S6] In the dicing process S6, the wafer W is cut into sections SC, thereby forming a plurality of (86 in this embodiment) semiconductor devices 10. Each portion of the wafer W cut into sections SC becomes a substrate 11 of the semiconductor device 10.

[0144] The effects of the exposure system ES of this embodiment and the device manufacturing method using the same are summarized below.

[0145] The exposure system ES of this embodiment includes a pattern determination unit 200 that determines a pattern of the relay wiring W2, and a pattern exposure unit 300 that forms the relay wiring W2 having the pattern determined by the pattern determination unit 200. The device manufacturing method of this embodiment also includes a relay wiring pattern determination step S3 that determines the pattern of the relay wiring W2 using the pattern determination unit 200, and a relay wiring formation step S3 that forms the relay wiring W2 having the determined pattern using the pattern exposure unit 300.

[0146] Therefore, even if the positions of the semiconductor chips CP1 to CP3 arranged on the wafer W are shifted from their designed positions, the rewiring W4 designed to be connected to the semiconductor chips CP1 to CP3 in the designed positions can be relayed (electrically connected) by the relay wiring W2 to the semiconductor chips CP1 to CP3 in the positions shifted from the designed positions, thereby enabling a good connection.

[0147] As such, a method of connecting a semiconductor chip that is misaligned from its designed position to a rewiring may involve redesigning the pattern of the rewiring itself based on the misalignment of the semiconductor chip, as in Patent Document 1. However, if the pattern of the rewiring itself is redesigned each time in response to the misalignment of the semiconductor chip, which may take various forms, a significant amount of processing time is required.

[0148] In contrast, in the present embodiment, the pattern of the rewiring itself is not changed, and relay wiring is formed to relay the rewiring and the lead electrodes of the semiconductor chip that are located at positions shifted from the designed positions. Therefore, there is no need to redesign the rewiring pattern, and devices can be manufactured with high throughput.

[0149] Furthermore, in the exposure system ES of this embodiment and the device manufacturing method using the same, the pattern of the rewiring itself is not changed, so the rewiring can be formed by the mask exposure machine 400 using a reticle (photomask) on which the rewiring pattern is formed in advance. Therefore, devices can be manufactured with a higher throughput than the method of Patent Document 1 in which the redesigned rewiring is formed using a pattern exposure machine.

[0150] Furthermore, in the exposure system ES of this embodiment and the device manufacturing method using the same, a table TB that stores the correspondence between various types of misalignment information DI and various types of pattern information PI is used to determine the pattern of the relay wiring W2. Therefore, after acquiring the misalignment information DI of the semiconductor chip CP, the pattern of the relay wiring W2 can be quickly determined by referring to the table TB without requiring complex processing.

[0151] In the exposure system ES of this embodiment and the device manufacturing method using the same, the lead electrodes T of each of the semiconductor chips CP1 to CP3 are provided only in the first and second electrode formation areas TA1 and TA2 extending in the electrode arrangement direction outside the circuit CR. The semiconductor chips CP1 to CP3 are arranged in the section SC on the wafer W such that the electrode arrangement directions coincide with each other. Furthermore, the semiconductor chips CP2 and CP3 are arranged such that the first electrode formation area TA1 of the semiconductor chip CP2 and the first electrode formation area TA1 of the semiconductor chip CP3 are aligned on a straight line, and the second electrode formation area TA2 of the semiconductor chip CP2 and the second electrode formation area TA2 of the semiconductor chip CP3 are aligned on a straight line.

[0152] Therefore, in the relay wiring formation process S4, when forming the relay wiring W2 and the vias V1, V3, it is not necessary to expose the entire area of ​​the section SC in the X direction, and it is sufficient to expose only a portion of the area where the first and second electrode formation regions TA1, TA2 of the semiconductor chips CP1 to CP3 exist.

[0153] This is particularly advantageous considering that the exposure in the relay wiring formation step S4 is performed in the pattern exposure unit 300. That is, the width of the projection area IA of the pattern exposure unit 300 in the X direction (non-scanning direction) is generally small, about 0.1 to 0.2 mm. Therefore, if the electrodes of the semiconductor chip are present over the entire area of ​​the section SC in the X direction, it becomes necessary to perform a great many scanning exposures and stepping operations in the step-and-scan exposure.

[0154] In contrast, in the exposure system ES of this embodiment and the device manufacturing method using the same, it is sufficient to perform exposure on the first exposure area EA1 overlapping the first electrode formation area TA1 of the semiconductor chips CP2 and CP3, the second exposure area EA2 overlapping the second electrode formation area TA2 of the semiconductor chips CP2 and CP3, the third exposure area EA3 overlapping the first electrode formation area TA1 of the semiconductor chip CP1, and the fourth exposure area EA4 overlapping the second electrode formation area TA2 of the semiconductor chip CP1, as shown in Fig. 19. Therefore, for example, as shown by the trajectory Rt2 in Fig. 19, scanning exposure can be started from the starting point STA2, and exposure for one section SC can be completed with four scanning exposures and three step operations.

[0155] In this manner, in the exposure system ES of the present embodiment and the device manufacturing method using the same, the lead electrodes T of the semiconductor chips CP1 to CP3 are localized in a partial region in the X direction of the section SC. Therefore, exposure by the pattern exposure unit 300 in the relay wiring formation process S4 can be performed efficiently, and the throughput of device manufacturing can be increased.

[0156] <Modification> In the above embodiment, the following variations can also be used.

[0157] In the above embodiment, the semiconductor chips CP1 to CP3 have the same configuration, but this is not limited to the above. The semiconductor chips CP1 to CP3 may have different configurations. The number and arrangement of the lead-out electrodes T in the semiconductor chips CP1 to CP3 are also arbitrary. In the first electrode-forming region TA1 and / or the second electrode-forming region TA2, a plurality of rows of the lead-out electrodes T aligned in the electrode arrangement direction may be provided aligned in the perpendicular direction. The number and arrangement of the alignment marks AM of the semiconductor chip CP may be arbitrarily set so as to obtain the necessary positional deviation information DI.

[0158] The number of semiconductor chips arranged in the section SC, and the arrangement and arrangement of the semiconductor chips arranged in the section SC are arbitrary. However, when multiple semiconductor chips are arranged and each semiconductor chip has extraction electrodes aligned in a predetermined direction, the number of scan exposures by the pattern exposure unit 300 can be reduced by arranging the multiple semiconductor chips so that the predetermined directions coincide. In addition, the number of scan exposures by the pattern exposure unit 300 can be further reduced by arranging the multiple semiconductor chips so that the electrode formation regions of the multiple semiconductor chips are aligned in a straight line.

[0159] In the above embodiment, the error measurement step S2 is performed using the measurement unit 100, but this is not limiting. For example, the error measurement step S2 may be performed using the alignment system 350 of the pattern exposure tool 300. In this case, the measurement unit 100 may be omitted from the exposure system ES.

[0160] In the pattern determination section 200 of the above embodiment, the storage section 210 stores the table TB, and the determination section 220 selects one piece of pattern information PI from the table TB to determine the pattern of the relay wiring W2.

[0161] However, this is not limited to this, and the memory unit 210 may store a coarse adjustment table and a fine adjustment table instead of table TB, and the determination unit 220 may determine the pattern of the relay wiring W2 by combining one piece of pattern information selected from the coarse adjustment table and one piece of pattern information selected from the fine adjustment table.

[0162] In this case, for example, the coarse adjustment table stores the correspondence between many types of positional deviation information DI and many types of coarse adjustment pattern information, and the fine adjustment table stores the correspondence between many types of positional deviation information DI and many types of fine adjustment pattern information.

[0163] Each of the eight coarse adjustment patterns PTR (patterns of the first relay wiring) (Figure 20 (a)) included in the coarse adjustment pattern information includes a first end PTR1 that is approximately square, a second end PTR2 that is approximately square, and a straight portion PTR3 extending between the first end PTR1 and the second end PTR2.

[0164] Each of the eight fine-tuning patterns PTF (patterns of the second relay wiring) (Figure 20 (b)) included in the fine-tuning pattern information includes a substantially square first end PTF1, a substantially square second end PTF2, and a straight portion PTF3 extending between the first end PTF1 and the second end PTF2.

[0165] The straight line portion PTR3 of the coarse adjustment pattern PTR may be longer than the straight line portion PTF3 of the fine adjustment pattern PTF. The straight line portion PTR3 of the coarse adjustment pattern PTR may have a wider adjustment range for length than the straight line portion PTF3 of the fine adjustment pattern PTF. As an example, the length of the straight line portion PTR3 of the many types of coarse adjustment patterns PTR is within a width of about 10 μm to 12 μm, and the length of the straight line portion PTF3 of the many types of fine adjustment patterns PTF is within a width of about 10 μm to 10.2 μm.

[0166] In the determined pattern of the relay wiring W2, the first end PTR1 of the coarse adjustment pattern PTR is formed at the position of the lead electrode T of the semiconductor chip CP, and the second end PTR2 of the coarse adjustment pattern PTR is disposed at a position (first position) slightly spaced from the output wiring W4. The first end PTF1 of the fine adjustment pattern PTF is formed at the position of the second end PTR2 of the coarse adjustment pattern PTR, and the second end PTF2 of the fine adjustment pattern PTF is formed at a position (second position) connected to the rewiring W4. The part of the relay wiring W2 formed based on the coarse adjustment pattern PTR and the part formed based on the fine adjustment pattern PTF may be formed as a single wiring layer in the same insulating layer, or may be formed in different insulating layers.

[0167] In this way, by dividing the table TB into a coarse adjustment table and a fine adjustment table, the amount of information to be stored in the storage unit 210 can be reduced. For example, when using the table TB, it is necessary to store 100 types of pattern information PI corresponding to 100 types of position deviation information DI. In this case, if the fine adjustment table and the coarse adjustment table are used, 10 types of coarse adjustment pattern information can be stored in the coarse adjustment table and 10 types of fine adjustment pattern information can be stored in the fine adjustment table, and 100 types of pattern information can be provided by multiplying them. In other words, it is sufficient to store a total of 20 types of pattern information.

[0168] In the above embodiment, the pattern information PI for determining the pattern of the rewiring W4 and the pattern of the relay wiring W2 is designed so that when there is no positional misalignment of the semiconductor chip CP or when the positional misalignment is negligibly small, a dot-like pattern that does not extend in either the X direction or the Y direction is selected as the pattern of the relay wiring W2.

[0169] However, this is not limited to this, and the pattern and pattern information PI of the rewiring W4 may be designed so that when there is no positional misalignment of the semiconductor chip CP, a linear pattern extending in a direction intersecting the electrode arrangement direction of the semiconductor chip CP is selected.

[0170] As a result, even if the actual position of the semiconductor chip CP (solid line in FIG. 21) is significantly shifted in the electrode arrangement direction from the designed position of the semiconductor chip CP (dotted line in FIG. 21), for example, as shown in FIG. 21, the relay wiring W2 can be formed without causing a short circuit between the patterns PT.

[0171] In the table TB of the above embodiment, the number of pieces of misalignment information DI that correspond to one type of pattern information PI is arbitrary. The relay wiring W2 does not necessarily need to be formed so that the end T of the semiconductor chip CP is located at the center of the first end PT1 of the pattern PT, and it is sufficient that the end T of the semiconductor chip CP is formed so that it is electrically connected to the first end PT1. Therefore, one type of pattern information PI can cover multiple similar types of misalignment states.

[0172] The table TB in the above embodiment is configured so that the pattern information PI corresponds to the deviation amount ΔX and the deviation amount ΔY every 10 [nm], and the pattern information PI corresponds to the deviation amount Δθ every 10 [μrad]. The corresponding pattern information PI may be configured to change at a larger cycle than this, or may be configured to change at a smaller cycle than this.

[0173] In the above embodiment, the pattern determination unit 200 determines the pattern of the relay wiring W2 by using the table TB stored in the storage unit 210, but this is not limited to the above. The pattern determination unit 200 may determine the pattern of the relay wiring W2 without using the table TB. Specifically, for example, the pattern of the relay wiring W2 may be derived by a predetermined calculation process based on the positional deviation information DI.

[0174] In addition to the lead-out electrodes T aligned along the electrode arrangement direction, the semiconductor chips CP1 to CP3 may further include lead-out electrodes T aligned in the orthogonal direction on both sides of the circuit CR in the electrode arrangement direction.

[0175] When the pattern of the relay wiring W2 is exposed to the semiconductor chips CP1 to CP3 by the pattern exposure unit 300, the wafer W is first placed on the stage 341 so that the Y direction of the wafer W coincides with the Y3 direction of the pattern exposure unit 300. Then, as shown in Fig. 22, step-and-scan exposure is performed from a start point STA3 along a path Rt3 to expose a first exposure area EA1, a second exposure area EA2, a third exposure area EA3, and a fourth exposure area EA4. This results in exposure for forming the relay wiring W2 connected to the lead-out electrodes T aligned in the electrode arrangement direction of the semiconductor chips CP1 to CP3.

[0176] Next, the wafer W is first rotated 90° around an axis extending in the Z direction, and placed on the stage 341 so that the X direction of the wafer W coincides with the Y3 direction of the pattern exposure unit 300. Then, as shown in Fig. 22, step-and-scan exposure is performed from a start point STA4 along a path Rt4 to expose a fifth exposure area EA5, a sixth exposure area EA6, a seventh exposure area EA7, and an eighth exposure area EA8. This performs exposure to form relay wiring W2 connected to lead-out electrodes T aligned in the orthogonal direction of the semiconductor chips CP1 to CP3.

[0177] When electrodes T arranged in the orthogonal direction are exposed by scanning exposure along the electrode arrangement direction (Y direction of wafer W), the number of scanning exposures increases because the area in which electrodes T exist in the orthogonal direction (X direction of wafer W) is wide. However, exposure can be performed efficiently by rotating wafer W to change the scanning direction.

[0178] In the above embodiment, the pattern determination unit 200 is provided separately from the pattern exposure apparatus 300 and the mask exposure unit 400, but this is not limited thereto. The pattern determination unit 200 may be provided as a part of the pattern exposure apparatus 300 or the mask exposure unit 400. Furthermore, the pattern exposure apparatus 300 including the pattern determination unit 200 or the mask exposure unit 400 including the pattern determination unit 200 may be configured as an exposure apparatus independent of the exposure system ES.

[0179] In the above embodiment, the entire pattern of the rewiring W4 is exposed by the mask exposure apparatus 400, but this is not limited to the above. Only at least a part of the pattern of the rewiring W4 (output wiring W41 and / or inter-chip wiring W42) may be formed on the reticle (photomask), and only at least a part of the pattern of the rewiring W4 may be exposed by the mask exposure apparatus 400. The remaining pattern may be exposed by the pattern exposure apparatus 300.

[0180] In the above embodiment, in the relay wiring forming step S4, the pattern of the relay wiring W2 is exposed using the pattern exposure unit 300, but this is not limited to this. In the relay wiring forming step S4, the pattern of the relay wiring W2 may be exposed using a mask exposure unit 400.

[0181] In the above embodiment, in the rewiring formation process S5, the pattern of the rewiring W4 is exposed using the mask exposure unit 400, but this is not limited to this. In the rewiring formation process S5, the pattern of the rewiring W4 may be exposed using the pattern exposure unit 300.

[0182] The relay wiring W2 does not necessarily have to be a wiring that connects the lead-out electrode T of the semiconductor chip CP and the rewiring W4. The relay wiring W2 may be a wiring that connects the lead-out electrode T and a predetermined position on the wafer W, and the pattern of the relay wiring W2 may be a pattern of such a wiring. In this case, the second end PT2 of the pattern PT and the second end PTF2 of the fine adjustment pattern PTF are formed at the predetermined position.

[0183] In the above embodiment, a plurality of semiconductor chips CP1 to CP3 are attached to each of the plurality of sections SC of the wafer W, but one semiconductor chip may be attached to each of the plurality of sections SC. In this case, the semiconductor chips may be arranged in the sections SC such that the electrode arrangement direction of the semiconductor chip attached to one section SC and the electrode arrangement direction of the semiconductor chip attached to another section located on the Y-direction side of the one section are aligned in the same Y direction.

[0184] In the above embodiment, a silicon wafer W is used, but the present invention is not limited to this. Any substrate made of glass, resin, or the like may be used instead of the silicon wafer W. Also, in the above embodiment, a circular substrate is used, but for example, a square substrate may be used.

[0185] As long as the characteristics of the present invention are maintained, the present invention is not limited to the above-described embodiments, and other forms conceivable within the scope of the technical idea of ​​the present invention are also included within the scope of the present invention.

[0186] (Additional Note) It will be understood by those skilled in the art that the above-described embodiments or variations thereof are specific examples of the following aspects.

[0187] (Section 1) 1. A device manufacturing method for manufacturing a device including a plurality of semiconductor chips each having an extraction electrode, relay wiring having one end electrically connected to the extraction electrode, and output wiring having the other end electrically connected to the relay wiring, comprising the steps of: measuring positions of the plurality of semiconductor chips provided on a substrate to determine positional deviations of the plurality of semiconductor chips from their designed positions; determining a pattern of the relay wiring based on the positional deviation.

[0188] (Section 2) forming a photosensitive layer over the plurality of semiconductor chips; 2. The device manufacturing method according to claim 1, further comprising exposing the determined pattern of relay wiring to the photosensitive layer by an energy beam via a pattern forming device.

[0189] (Section 3) forming the relay wiring using the exposed photosensitive layer; forming a photosensitive layer different from the photosensitive layer on the relay wiring; 3. The device manufacturing method according to claim 2, further comprising exposing the different photosensitive layer to a pattern of the output wiring using exposure light through a mask having a mask pattern of at least a part of the output wiring.

[0190] (Section 4) 4. The device manufacturing method according to claim 2 or 3, further comprising exposing a pattern of the relay wiring to an exposure area extending in the uniaxial direction on the photosensitive layer while moving the substrate from one side to the other side in the uniaxial direction in which the plurality of semiconductor chips are arranged.

[0191] (Section 5) When the exposure area is a first exposure area, moving the substrate on which the plurality of semiconductor chips are provided in a direction intersecting the one axial direction after exposure to the first exposure region; 5. The device manufacturing method of claim 4, further comprising: exposing the relay wiring pattern to a second exposure area on the photosensitive layer, the second exposure area being spaced apart from the first exposure area in the intersecting direction, while moving the substrate from the other side to the one side in the uniaxial direction.

[0192] (Section 6) 6. The device manufacturing method according to any one of claims 1 to 5, wherein the extraction electrode is provided in an electrode formation region extending along the one axis direction on the semiconductor chip.

[0193] (Section 7) Providing the substrate; mounting the semiconductor chips in a plurality of compartments on the substrate; 7. The device manufacturing method according to any one of items 1 to 6, further comprising:

[0194] (Section 8) 8. The device manufacturing method according to claim 7, further comprising dividing the substrate into the plurality of sections.

[0195] (Section 9) 9. The device manufacturing method according to any one of claims 1 to 8, wherein the other end of the relay wiring is located at a predetermined position with respect to the substrate.

[0196] (Section 10) 10. The device manufacturing method according to any one of claims 1 to 9, wherein determining the pattern of the relay wiring includes selecting at least one wiring pattern from a plurality of wiring patterns stored in advance based on the positional deviation.

[0197] (Section 11) 11. The device manufacturing method according to item 10, wherein the plurality of wiring patterns are linear patterns, and at least one of the wiring lengths and extending directions of the plurality of wiring patterns is different from each other.

[0198] (Section 12) The plurality of pre-stored wiring patterns include A plurality of first wiring patterns; a plurality of second wiring patterns, each of which has a wiring length shorter than a wiring length of each of the plurality of first wiring patterns; 12. The device manufacturing method according to claim 10 or 11, wherein selecting at least one wiring pattern from the pre-stored wiring patterns includes selecting one of the plurality of first wiring patterns and one of the plurality of second wiring patterns.

[0199] (Section 13) Each of the plurality of semiconductor chips has a circuit provided at a center portion, and a plurality of the extraction electrodes electrically connected to the circuit and provided outside the circuit in a first direction, 13. The device manufacturing method according to any one of items 1 to 12, wherein in each of the plurality of semiconductor chips, the plurality of extraction electrodes are arranged in a second direction intersecting the first direction.

[0200] (Section 14) 14. The device manufacturing method according to item 13, wherein, when the semiconductor chips are located at the design positions, the directions in which the lead electrodes of each of the semiconductor chips are arranged are aligned in agreement with one another.

[0201] (Section 15) determining the pattern of the relay wiring includes selecting at least one wiring pattern from a plurality of wiring patterns stored in advance based on the positional deviation; 15. The device manufacturing method according to item 14, wherein if there is no misalignment, a pattern extending in a direction intersecting the second direction is selected as the at least one wiring pattern.

[0202] (Section 16) Each of the plurality of semiconductor chips includes a circuit provided at a central portion of the plurality of semiconductor chips; the extraction electrodes include a plurality of first extraction electrodes electrically connected to the circuit and provided on the outside of the circuit in a first direction along a second direction intersecting the first direction, and a plurality of second extraction electrodes electrically connected to the circuit and provided on the outside of the circuit in the second direction along the first direction, When the plurality of semiconductor chips are located at the design positions, directions in which the second extraction electrodes of the plurality of semiconductor chips are arranged are aligned in the same direction; exposing the determined pattern of the relay wiring to the photosensitive layer by an energy beam via a pattern forming device; scanning and exposing the energy beam along a first direction of the plurality of semiconductor chips; 4. The device manufacturing method according to claim 2 or 3, further comprising scanning and exposing the energy beam along a second direction of the plurality of semiconductor chips.

[0203] (Section 17) a measurement unit that measures the positions of a plurality of semiconductor chips provided on a substrate; a pattern determination unit that determines a positional deviation from a design position of the plurality of semiconductor chips based on the measured positions, and determines a pattern of relay wiring that relays the plurality of semiconductor chips and output wiring based on the positional deviation; a pattern exposure unit that exposes the determined interconnection pattern onto the semiconductor chips using an energy beam via a pattern forming device.

[0204] (Section 18) 18. The exposure system according to claim 17, further comprising a mask exposure unit that exposes a pattern of the output wiring onto the relay wiring that is formed using an exposed pattern of the relay wiring, using exposure light through a mask having a mask pattern of at least a part of the output wiring.

[0205] (Section 19) The pattern determination unit: a storage unit that stores a correspondence relationship between a plurality of types of positional deviations and a plurality of wiring patterns; 13. The exposure system according to item 11 or 12, further comprising a determination unit that determines a pattern of the relay wiring based on the positional deviation and the correspondence relationship.

[0206] (Section 19) The pattern determination unit: a storage unit that stores a first correspondence relationship between the plurality of types of positional deviations and a plurality of first wiring patterns, and a second correspondence relationship between the plurality of types of positional deviations and a plurality of second wiring patterns; a determination unit that determines a pattern of the relay wiring based on the positional deviation, a first correspondence relationship, and a second correspondence relationship; a wiring length of each of the plurality of second wiring patterns is shorter than a wiring length of each of the plurality of first wiring patterns; The exposure system described in item 11 or 12, wherein the determination unit determines the pattern of the relay wiring based on one of a plurality of first wiring patterns selected based on the positional shift and a first correspondence relationship, and one of a plurality of second wiring patterns selected based on the positional shift and a second correspondence relationship.

[0207] (Section 20) 20. The exposure system according to any one of items 17 to 19, wherein the pattern exposure unit includes the pattern determination unit.

[0208] (Section 21) An exposure apparatus for exposing a plurality of semiconductor chips provided on a substrate, comprising: a pattern determination unit that determines a pattern of relay wiring that relays the plurality of semiconductor chips and output wiring based on a positional deviation from a design position of the plurality of semiconductor chips; an exposure unit that exposes the determined relay wiring pattern onto the plurality of semiconductor chips by an energy beam via a pattern forming device that is set using an output from the pattern determination unit.

[0209] (Section 22) The pattern determination unit: a storage unit that stores a correspondence relationship between a plurality of types of positional deviations and a plurality of wiring patterns; 22. The exposure apparatus according to claim 21, further comprising a determination unit that determines a pattern of the relay wiring based on the positional deviation and the corresponding relationship.

[0210] (Section 23) The pattern determination unit: a storage unit that stores a first correspondence relationship between the plurality of types of positional deviations and a plurality of first wiring patterns, and a second correspondence relationship between the plurality of types of positional deviations and a plurality of second wiring patterns; a determination unit that determines a pattern of the relay wiring based on the positional deviation, a first correspondence relationship, and a second correspondence relationship; a wiring length of each of the plurality of second wiring patterns is shorter than a wiring length of each of the plurality of first wiring patterns; 23. The exposure apparatus according to claim 21 or 22, wherein the determination unit determines the pattern of the relay wiring based on one of a plurality of first wiring patterns selected based on the positional shift and a first correspondence relationship, and one of a plurality of second wiring patterns selected based on the positional shift and a second correspondence relationship.

[0211] (Section 24) A substrate; A device comprising: Each of the plurality of semiconductor chips has a circuit provided in a central portion and a plurality of electrodes electrically connected to the circuit and arranged in one direction outside the circuit; The plurality of semiconductor chips are fixed to the wafer such that the one direction in which the plurality of electrodes of each of the plurality of semiconductor chips are arranged coincides or approximately coincides with one another.

[0212] (Section 25) 25. The device of claim 24, wherein the plurality of electrodes are provided only on the outside of the circuit.

[0213] (Section 26) 26. The device of claim 24 or 25, wherein at least two of the plurality of semiconductor chips are provided in a first section on the substrate, and at least two of the plurality of semiconductor chips different from the at least two of the plurality of semiconductor chips are provided in a second section on the substrate different from the first section.

[0214] (Section 27) 27. The device according to claim 26, wherein the at least two semiconductor chips in each of the first and second sections are aligned in the one direction.

[0215] (Section 28) a fixing layer for fixing the semiconductor chips to the substrate; 28. The device according to any one of items 24 to 27, wherein an upper surface of the fixing layer and upper surfaces of the plurality of semiconductor chips are flush with each other.

[0216] (Section 29) An output wiring layer is provided above the plurality of semiconductor chips, 29. The device according to any one of items 26 to 28, wherein the output wiring layer has output wiring for each of the sections that connects the at least two semiconductor chips.

[0217] (Section 30) a relay wiring layer provided above the plurality of semiconductor chips and below the output wiring layer; 30. The device according to item 29, wherein the relay wiring layer has relay wiring for electrically connecting the at least two semiconductor chips and the output wiring pattern for each of the plurality of regions. [Explanation of symbols]

[0218] 10. Semiconductor Devices 100 Measurement section 200 Pattern determination section 300 Pattern Exposure Section 320 Pattern Generator 400 Mask exposure section CP1, CP2, CP3 Semiconductor Chips T extraction electrode TA1 1st electrode formation area TA2 2nd electrode formation area W2 Relay wiring (relay wiring layer) W4 Rewiring (Rewiring layer) W41 Output wiring (output wiring layer) W42 Inter-chip wiring (inter-chip wiring layer)

Claims

1. An exposure apparatus for exposing a photosensitive layer formed on an upper layer of extraction electrodes provided on a plurality of semiconductor chips arranged on a substrate, comprising: a substrate stage on which the substrate on which the plurality of semiconductor chips are arranged along one axial direction is placed; an exposure unit that irradiates exposure light toward the extraction electrodes provided in an electrode formation region extending along the one axis direction on the semiconductor chip; a pattern determination unit that determines an exposure pattern to be exposed onto the photosensitive layer by the exposure unit; a control unit that controls at least the substrate stage and the exposure unit, the pattern determination unit determines, as the exposure pattern, a pattern of relay wiring connecting the extraction electrodes and a predetermined position on the substrate, using an output from a measurement unit that measures positions of a plurality of semiconductor chips provided on the substrate and determines a positional deviation of the plurality of semiconductor chips; The control unit is an exposure device that exposes a pattern of the relay wiring onto an exposure area extending in the uniaxial direction on the photosensitive layer using the exposure unit while moving the substrate from one side to the other side in the uniaxial direction using the substrate stage.

2. 2. The exposure apparatus according to claim 1, wherein the electrode formation region in at least two of the plurality of semiconductor chips overlaps with the exposure region extending in the uniaxial direction.

3. When the exposure area is a first exposure area, The control unit is After the exposure to the first exposure region, the substrate on which the plurality of semiconductor chips are provided is moved in a direction intersecting the one axial direction by using the substrate stage; 3. The exposure apparatus according to claim 1, wherein the substrate stage moves the substrate from the other side to the one side in the uniaxial direction while the exposure section exposes the pattern of the relay wiring onto a second exposure area on the photosensitive layer that is separated from the first exposure area in the intersecting direction.

4. 4. The exposure apparatus according to claim 3, wherein the first and second exposure regions do not overlap central portions of the respective semiconductor chips.

5. 5. The exposure apparatus according to claim 1, wherein the electrode formation region is localized away from the center of the semiconductor chip in a direction intersecting the one axial direction.

6. The pattern determination unit includes a storage unit that stores a correspondence relationship between a plurality of types of positional deviations and a plurality of types of relay wiring patterns; 6. The exposure apparatus according to claim 1, further comprising a determination unit that determines a pattern of the relay wiring based on an output from the measurement unit and the correspondence relationship.

7. the storage unit stores the patterns of the plurality of types of relay wiring; 7. The exposure apparatus according to claim 6, wherein the determination unit selects at least one relay wiring pattern from among the multiple types of relay wiring patterns.

8. 8. The exposure apparatus according to claim 6, wherein the relay wiring pattern comprises a first relay wiring pattern extending from the extraction electrode to a first position, and a second relay wiring pattern extending from the first position to a second position.

9. the storage unit stores a plurality of types of patterns of the first and second relay wirings, The exposure apparatus according to claim 8, wherein the determination unit selects at least one first relay wiring pattern and at least one second relay wiring pattern from among the multiple types of first and second relay wiring patterns so that the second position becomes the specified position.

10. the exposure unit includes a light pattern forming member that forms a light pattern corresponding to a portion of the exposure pattern; 10. The exposure apparatus according to claim 1, wherein the light pattern formed by the light pattern forming member changes as the substrate moves in the uniaxial direction.

11. 11. The exposure apparatus according to claim 1, wherein the relay wiring pattern is a pattern extending in one direction.

12. 12. The exposure apparatus according to claim 1, wherein the measurement unit measures a substrate alignment mark provided on the substrate and a chip alignment mark provided on each of the plurality of semiconductor chips.

13. The exposure apparatus according to any one of claims 1 to 12, comprising the measurement unit.

14. 14. The exposure apparatus according to claim 1, further comprising a receiving section that receives an output from the measurement section provided externally and transmits the output to the pattern determination section.

15. When the measurement unit provided outside is defined as a first measurement unit, the first measurement unit measures a substrate alignment mark provided on the substrate and a chip alignment mark provided on each of the plurality of semiconductor chips; The exposure apparatus according to claim 13 , further comprising a second measurement unit that measures the substrate alignment mark provided on the substrate.

16. When the exposure area is a first exposure area, The control unit is The exposure apparatus according to any one of claims 1 to 15, wherein after exposure to the first exposure area, the substrate on which the plurality of semiconductor chips are provided is moved in a direction intersecting the uniaxial direction using the substrate stage, while the exposure section exposes a pattern of the relay wiring to a second exposure area on the photosensitive layer that intersects with the first exposure area.

17. 17. The exposure apparatus according to claim 16, wherein the first and second exposure regions do not overlap with central portions of the respective semiconductor chips.

18. 18. The exposure apparatus according to claim 1, wherein the exposure section comprises a variable pattern generating member that forms, on the photosensitive layer, a light pattern that corresponds to the exposure pattern determined by the pattern determination section.

19. 1. An exposure method for exposing a photosensitive layer formed on an upper layer of extraction electrodes provided on a plurality of semiconductor chips arranged on a substrate, comprising: An exposure method for exposing the photosensitive layer by using the exposure apparatus according to any one of claims 1 to 18.

20. 1. An exposure method for exposing a photosensitive layer formed on an upper layer of extraction electrodes provided on a plurality of semiconductor chips arranged along one axial direction on a substrate, the method comprising the steps of: measuring positions of a plurality of semiconductor chips provided on the substrate to obtain positional deviations of the plurality of semiconductor chips; Irradiating the exposure light toward the extraction electrodes provided in electrode formation regions extending along the one axis direction on the plurality of semiconductor chips; determining, as an exposure pattern, a pattern of relay wiring connecting the extraction electrodes and a predetermined position on the substrate, using the determined positional deviations of the plurality of semiconductor chips; and exposing the pattern of the relay wiring to an exposure area extending in the uniaxial direction on the photosensitive layer while moving the substrate from one side to the other in the uniaxial direction.

21. When the exposure area is a first exposure area, moving the substrate on which the plurality of semiconductor chips are provided in a direction intersecting the one axial direction after exposure to the first exposure region; The exposure method according to claim 19 or 20, further comprising exposing the pattern of the relay wiring to a second exposure area on the photosensitive layer, the second exposure area being spaced apart from the first exposure area in the intersecting direction, while moving the substrate from the other side to the one side in the uniaxial direction.

22. 22. The exposure method according to claim 21, wherein the first and second exposure regions do not overlap central portions of the respective semiconductor chips.

23. The exposure method according to any one of claims 19 to 22, wherein the measuring comprises measuring a substrate alignment mark provided on the substrate and a chip alignment mark provided on each of the plurality of semiconductor chips.

24. 1. A device manufacturing method for manufacturing a device including a plurality of semiconductor chips each having an extraction electrode, relay wiring having one end electrically connected to the extraction electrode, and output wiring having the other end electrically connected to the relay wiring, comprising the steps of: forming a photosensitive layer on the plurality of semiconductor chips; exposing the pattern of the relay wiring on the photosensitive layer by using the exposure method according to any one of claims 19 to 23; developing the exposed photosensitive layer to form a pattern in the photosensitive layer; forming the relay wiring using the formed pattern of the photosensitive layer.

25. forming a second photosensitive layer on the relay wiring layer on which the relay wiring is formed; 25. The device manufacturing method according to claim 24, further comprising exposing at least a part of the pattern of the output wiring to exposure light through a photomask having a mask pattern of at least a part of the output wiring on the second photosensitive layer.

Images