Wafer Inspection System

Abstract

The flexibility of the illumination and collection subsystem allows for high speed detection of all defects. [Solution] The system includes an illumination subsystem configured to direct pulses of light onto an area on the wafer 114, a scanning subsystem configured to scan the pulses of light within the wafer 114, a collection subsystem configured to image the pulses of light scattered from the area on the wafer 114 onto sensors 130, 132, the sensors 130, 132 being configured to integrate a number of pulses of scattered light that is less than the number of pulses of scattered light that can be imaged onto the entire area of ​​the sensors 130, 132, the collection subsystem generating an output for the integrated pulses of scattered light, and a computer subsystem 136 that detects defects on the wafer 114 using the output generated by the sensors 130, 132.

Description

[Technical field]

[0001] [CROSS REFERENCE TO RELATED APPLICATIONS] This application claims priority to U.S. Provisional Application No. 61 / 506,892, entitled "Sample Inspection System," filed July 12, 2011, which is incorporated by reference as if fully set forth herein.

[0002] The present invention relates generally to a system configured to inspect a wafer. [Background technology]

[0003] The following descriptions and examples are not admitted to be prior art by virtue of their inclusion in this section.

[0004] Inspection processes are used at various steps during the semiconductor manufacturing process to detect defects on wafers, thereby obtaining higher yields in the manufacturing process and therefore greater profits. However, as semiconductor devices become smaller, inspection becomes increasingly important for the successful manufacture of acceptable semiconductor devices, since small defects can cause the devices to fail.

[0005] Improving sensitivity to particles, anomalies, and other defect types while maintaining the overall inspection speed (measured in wafers / hour) is desirable in wafer inspection systems. Dark field optical inspection systems typically use laser light to illuminate the wafer with a specific pattern - individual spots, lines, or areas - and collection optics to direct the scattered light onto a corresponding collection of sensors.

[0006] One advantage of inspection systems where a large area of ​​the wafer (on the order of 1 mm x 1 mm) is illuminated at once, as opposed to a spot (on the order of microns) or line (on the order of microns wide x mm long), is that many types of 2D sensors exist that can acquire information on thousands to millions of individual detectors in parallel. Furthermore, spot-illuminated inspection systems are practically limited to a few dozen spots because of the illumination optics and the complexity of integrating the individual sensors, thereby limiting the achievable throughput. One further disadvantage of spot and line-scanning systems is that the illumination energy is concentrated in a relatively small area, increasing the power density on the inspected surface and potentially undesirably altering sample properties.

[0007] It is well known that XY (or serpentine) inspection sequences offer lower inspection throughput compared to spiral sequences and are therefore preferable in spiral trajectory (commonly known as R-Theta) situations. Examples of spiral inspection systems include the SP1 and SP2 instruments, available commercially from KLA-Tencor Corporation (Milpitas, California).

[0008] As mentioned above and in the art (e.g., U.S. Patent No. 7,286,697 to Guetta), despite the advantages of area inspection systems, implementation of this configuration on the R-Theta platform has proven difficult because of the inherent mismatch between the spiral sequence of images produced and the linear nature of most two-dimensional array sensors. Detecting defects by aligning and registering polar images in real time is a computationally intensive process. Furthermore, the additional noise added to the measurements by most two-dimensional silicon-based sensors actually reduces the sensitivity performance of such systems compared to separate detectors such as photomultiplier tubes (PMTs). Although the coordinate mismatch problem does not exist for XY-based area inspection systems, past embodiments of such systems have been unable to detect all defects of interest at high speeds due to the lack of flexibility of the illumination and collection subsystems. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] U.S. Patent No. 7,286,697 Summary of the Invention [Problem to be solved by the invention]

[0010] Therefore, it would be advantageous to develop an inspection system and / or method that does not suffer from one or more of the above-mentioned drawbacks. [Means for solving the problem]

[0011] The following description of various embodiments is not to be construed in any way as limiting the subject matter of the appended claims.

[0012] One embodiment relates to a system configured to inspect a wafer. The system includes an illumination subsystem configured to simultaneously form a plurality of illumination areas on the wafer with a substantial absence of illumination flux between each of the areas. The system also includes a scanning subsystem configured to scan the plurality of illumination areas across the wafer. The system further includes a collection subsystem configured to simultaneously and separately image light scattered from each of the areas onto two or more sensors. Characteristics of the two or more sensors are selected such that the scattered light is not imaged into gaps between the two or more sensors. The two or more sensors generate an output for the scattered light. The system further includes a computer subsystem configured to detect defects on the wafer using the output of the two or more sensors. The system may be further configured as described herein.

[0013] Another embodiment relates to another system configured to inspect a wafer. The system includes an illumination subsystem configured to direct multiple light beams to substantially the same area on the wafer. The multiple light beams have substantially the same wavelength and polarization characteristics. The system also includes a scanning subsystem configured to scan the multiple light beams across the wafer. The system further includes a collection subsystem configured to image light scattered from substantially the same area on the wafer to a sensor. The sensor generates an output in response to the scattered light. The system further includes a computer subsystem configured to detect defects on the wafer using the output of the sensor. The system may be further configured as described herein.

[0014] Further embodiments relate to a system configured to inspect a wafer. The system includes an illumination subsystem configured to direct a first pulsed light beam of a plurality of pulsed light beams to an area on the wafer earlier in time than a second pulsed light beam of the plurality of pulsed light beams directed to the area by the illumination subsystem. The first pulsed light beam and the second pulsed light beam of the plurality of pulsed light beams have different shapes and sizes from one another on the wafer. The first pulsed light beam and the second pulsed light beam of the plurality of pulsed light beams have different wavelengths from one another, different polarizations from one another, or different wavelengths and polarizations from one another. The system also includes a scanning subsystem configured to scan the plurality of pulsed light beams across the wafer. The system further includes a collection subsystem configured to image light scattered from the area on the wafer to one or more sensors. The one or more sensors generate an output in response to the scattered light. The system further includes a computer subsystem configured to detect defects on the wafer using the output of the one or more sensors and to use the output for scattered light from the area due to illumination by a first pulsed light beam of the multiple pulsed light beams to determine a power of a second pulsed light beam of the multiple pulsed light beams to be directed to the area. The system may be further configured as described herein.

[0015] A further embodiment relates to another system configured to inspect a wafer. The system includes an illumination subsystem configured to direct pulses of light to an area on the wafer. The system also includes a scanning subsystem configured to scan the pulses of light across the wafer. The system further includes a collection subsystem configured to image the pulses of light scattered from the area on the wafer to a sensor. The sensor is configured to integrate a number of pulses of scattered light that is less than the number of pulses of scattered light that may be imaged onto the entire area of ​​the sensor. The sensor is configured to generate an output for the integrated pulses of scattered light. The system further includes a computer subsystem configured to detect defects on the wafer using the output generated by the sensor. The system may be further configured as described herein.

[0016] Another embodiment relates to a system configured to inspect a wafer. The system includes an illumination subsystem configured to direct light to an area on the wafer. The system also includes a scanning subsystem configured to scan the light across the wafer. The system further includes a collection subsystem configured to image light scattered from the area on the wafer to a sensor. The sensor is configured to generate an output for the scattered light. The system further includes a computer subsystem configured to detect point defects on the wafer using the output generated by the sensor, determine a size in pixels of the point defects, determine a focus state of the system based on the size of the point defects, and alter one or more parameters of the system based on the focus state. The system may be further configured as described herein.

[0017] A further embodiment relates to a system configured to inspect a wafer. The system includes an illumination subsystem configured to direct light to an area on the wafer. The system also includes a scanning subsystem configured to scan the light across the wafer. The system also includes a collection subsystem configured to image light scattered from the area on the wafer to a sensor. The sensor is configured to generate an output in response to the scattered light. The system also includes a computer subsystem configured to detect defects on the wafer using the output generated by the sensor. The system may be further configured as described herein.

[0018] Other objects and advantages of the present invention will become apparent upon reading the following detailed description and upon reference to the accompanying drawings. [Brief description of the drawings]

[0019] [Figure 1] FIG. 1 is a schematic diagram illustrating a side view of one embodiment of a system configured to inspect a wafer. [Diagram 2] FIG. 2 is a schematic diagram illustrating a top view of one embodiment of multiple illumination areas having rectangular shapes on a wafer. [Diagram 3] 1A-1D are schematic diagrams illustrating side views of various embodiments of systems configured to inspect a wafer. [Figure 4] 1A-1D are schematic diagrams illustrating side views of various embodiments of systems configured to inspect a wafer. [Diagram 5] 1A-1D are schematic diagrams illustrating side views of various embodiments of systems configured to inspect a wafer. [Figure 6] 1A-1D are schematic diagrams illustrating side views of various embodiments of systems configured to inspect a wafer. [Figure 7] FIG. 2 is a schematic diagram illustrating a top view of one embodiment of a central region of a wafer and an off-center region of the wafer. [Figure 8]FIG. 2 is a schematic diagram illustrating a plan view of one embodiment of another way in which a central region of a wafer and regions off the central region of a wafer may be scanned by embodiments described herein. [Figure 9] FIG. 1 is a schematic diagram illustrating a side view of one embodiment of a system configured to inspect a wafer. [Figure 10] FIG. 2 is a schematic diagram illustrating a top view of one embodiment of multiple light beams directed to substantially the same area on a wafer at substantially the same polar angle and different azimuthal angles. [Figure 11] FIG. 2 is a schematic diagram illustrating a top view of one embodiment of multiple light beams having different shapes and sizes on a wafer. [Figure 12] FIG. 1 is a schematic diagram illustrating a side view of one embodiment of a system configured to inspect a wafer. [Figure 13] FIG. 1 is a schematic diagram illustrating a side view of one embodiment of multiple light beams including one light beam generated by a light source of an illumination subsystem and an additional light beam formed by collecting light reflected from substantially the same area on the wafer and directing the collected reflected light back to substantially the same area on the wafer. [Figure 14] FIG. 2 is a schematic diagram showing a plan view of one embodiment of a sensor including a rectangular array of pixels. [Figure 15] FIG. 2 is a schematic diagram illustrating a plan view of how the size in pixels of a point defect can vary depending on the focus conditions of a system configured to inspect a wafer. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] While the invention is susceptible to various modifications and alternative forms, specific embodiments thereof have been shown by way of example in the drawings and are herein described in detail. However, the drawings and detailed description thereof are not intended to limit the invention to the particular forms disclosed, but on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.

[0021] In general, embodiments described herein relate to wafer inspection methods and systems that include: illumination (e.g., laser illumination) is incident on a wafer; the wafer or an illumination spot on the wafer is translated in some manner; scattered light is collected by a collection subsystem (which may include a collection objective lens); the scattered light can be split in the collection optics based on selectable polarization and / or scattering angle characteristics; selected portions of the scattered light are directed onto one or more sensors; and defects are detected by processed output (e.g., image information) generated by the sensors.

[0022] Referring now to the drawings, it is noted that the figures are not drawn to scale. In particular, the scale of some of the elements in the figures may be significantly exaggerated to emphasize the characteristics of the elements. It is also noted that the figures are not drawn to the same scale. Elements shown in two or more figures that may be similarly configured are designated using the same reference numerals.

[0023] One embodiment relates to a system configured to inspect a wafer. A spatially discontinuous illumination profile can be used to optimize the speed and / or sensitivity of the inspection. For example, the system includes an illumination subsystem configured to simultaneously form multiple illumination areas on the wafer with substantially no illumination flux between each of the areas. Thus, the system is configured for multi-spot ("multi-patch") inspection.

[0024] All illumination subsystems described herein include one or more light sources possibly coupled to some illumination optics. For example, multi-patch illumination can be generated in three ways: multiple lasers with one patch per laser, multiple laser beams from one laser, and diffractive optical elements that separate the beams of one or more lasers. In one such example, the illumination subsystem can include one laser source (or multiple laser sources) that illuminates the wafer with polarized light at a specific angle of incidence or multiple discrete angles of incidence. The optimal illumination incidence angle for inspection depends, among other factors, on the wafer type being inspected and the defects of interest being detected. The illumination subsystem can be configured to allow illumination at near normal angles of incidence and / or oblique angles of 45° or more, sequentially or simultaneously. Additionally, the laser source can be a pulsed laser.

[0025] The illumination areas can have different cross-sectional shapes on the wafer, such as substantially flat-top area illumination, Gaussian area illumination, non-Gaussian area illumination, any other structured area illumination, etc. For example, flat-top illumination areas can be formed on the wafer with no illumination flux between them. The illumination areas can be formed on a surface of the wafer, such as the top surface of the wafer. However, the illumination areas can be formed on the wafer with the film, at a specific interface in the film stack, or even on the bottom surface (e.g., within the wafer).

[0026] In one embodiment, each of the plurality of illumination areas has a rectangular shape on the wafer. For example, as shown in FIG. 2, each of the plurality of illumination areas 200 can have a rectangular shape on the wafer 202, and the wafer travel direction can be in the direction indicated by the arrow 204. In the embodiment shown in FIG. 2, three separate illumination areas (or patches) are formed on the wafer as described further herein (e.g., by three separate laser beams or diffractive optical elements). Interleaving of the patches can be achieved in a manner similar to that used in current multi-spot inspection systems.

[0027] One advantage of this implementation in laser area inspection is that it is a solution to the problem that relatively fast sensors tend to be substantially rectangular (i.e., one dimension of the sensor is substantially longer than the other dimension). It is difficult to form a substantially rectangular patch (e.g., 40:1 or 100:1 aspect ratio) on a wafer. In the implementation described herein, three patches with 13:1 or 33:1 aspect ratios can represent one 40:1 or 100:1 patch, respectively, and three slow sensors can represent one larger, substantially elongated sensor. In general, for area inspection mode systems, ratios between 1:1 and 100:1 can be considered. In an embodiment, the multiple illumination areas do not overlap each other on the wafer. For example, because the system is "flash on the fly", the patches can be arranged to not overlap on the wafer, and the stage (described further herein) will move a reasonable amount between each flash. The patches may also be projected as a 1 x 3 array instead of a 3 x 1 array, if more convenient. "A rectangular shape on the wafer," as that term is used herein, refers to a shape that is substantially rectangular, but may not be precisely rectangular, for example, due to the inherent limitations of imaging an arbitrary light beam.

[0028] In one embodiment, the illumination subsystem forms multiple illumination areas on the wafer using multiple light beams generated from a single light beam. For example, the multiple light beams can be generated from one beam using a diffractive optical element. In one such embodiment shown in FIG. 1, the illumination subsystem includes a light source 100 and a diffractive optical element 110. The light source and the diffractive optical element are configured such that a light beam generated by the light source is directed to the diffractive optical element, which generates two or more (e.g., three) light beams 112 from the single light beam. The light source can include any of the light sources described herein, and the diffractive optical element can include any suitable diffractive optical element known in the art. As shown in FIG. 1, the multiple light beams can be directed to the wafer 114 at an oblique angle of incidence. However, the multiple light beams can be directed to the wafer at any other suitable angle of incidence as further described herein. The illumination subsystem shown in FIG. 1 can include any other suitable optical elements, such as reflective optical elements, refractive optical elements, polarizers, apertures, beam shaping elements, wavelength filters, and the like.

[0029] In another embodiment, the illumination subsystem uses multiple light beams generated by multiple light sources to form multiple illumination areas on the wafer. For example, as shown in FIG. 3, the illumination subsystem can include multiple light sources 300, 302, 304. The light sources can include any of the light sources described herein, such as pulsed lasers. Each of the multiple light sources is configured to generate light having the same characteristics (e.g., each of the multiple light sources can be the same make and model laser). As shown in FIG. 3, the multiple light sources can generate multiple light beams 306, and the multiple light beams can be directed to the wafer 114 at the same or near the same angle of incidence. However, the multiple light beams can be three laser beams injected at different angles. Additionally, although the multiple light beams are shown in FIG. 3 as being directed to the wafer at an oblique angle of incidence, the multiple light beams can be directed to the wafer at a normal or near normal angle of incidence. The illumination subsystem shown in FIG. 3 can include any other suitable optical elements as described above. The system shown in FIG. 3 can be further configured as described herein.

[0030] In some embodiments, the illumination subsystem includes a frequency converted laser, and the illumination subsystem is further configured to simultaneously form multiple illumination areas using pulses of light, where the pulses of light directed to the areas on the wafer do not vary spatially over the duration of the pulses of light and have a substantially constant intensity over the duration of the pulses of light. For example, the illumination subsystem described herein can use a frequency converted laser with spatial flat top illumination and temporal flat top illumination output in area mode inspection. Area mode inspection systems often utilize a Gaussian or "flat top" illumination profile that is continuous over the surface of the wafer. In one such embodiment, the illumination subsystem includes a beam shaping optical element coupled to the laser. For example, as shown in FIG. 6, the illumination subsystem can include a beam shaping optical element 600 coupled to the light source 100, which in this case can be a laser. The beam shaping optical element can include any suitable beam shaping optical element known in the art. Additionally, although the beam shaping optics are shown coupled to only one light source in FIG. 6 so as to be in the path of only one light beam, the beam shaping optics can be coupled to each of the light sources included in any of the illumination subsystems described herein or can be placed in the path of each of the illumination beams used by the systems described herein. The illumination subsystems and systems of FIG. 6 can be further configured as described herein. Flat-top beams can be generated by diffractive optical elements or other beam shaping optics external to the laser, as well as as a natural result of an optimized nonlinear frequency conversion process within the laser itself. One further option is to utilize lasers that provide a user-specified temporal pulse shape to further reduce the probability of wafer damage. For example, the most common pulsed lasers exhibit an approximately hyperbolic secant pulse shape in time with a peak intensity greater than twice the average intensity. However, recent developments in laser technology have allowed so-called "flat-top" or "box car" temporal pulse shapes to be generated.The peak intensity of these pulses is essentially the same as the average intensity, and an approximately two-fold improvement in inspection throughput can be achieved.

[0031] In another embodiment, the illumination subsystem includes a frequency converted laser, and the illumination subsystem is further configured to simultaneously form multiple illumination areas using pulses of light, where the pulses of light directed to the areas on the wafer have a substantially constant intensity over the duration of the pulses of light. Such an embodiment may be configured as described above, except that the pulses of light are allowed to vary spatially over the duration of the pulses of light.

[0032] The system also includes a scanning subsystem configured to scan multiple illumination areas within the wafer. The scanning subsystem can include a chuck that holds the wafer in place during inspection. For example, as shown in FIG. 1, the scanning subsystem can include a chuck 116. The chuck can be an edge-gripping chuck, a vacuum chuck, or an air-bearing chuck. A single chuck can support multiple wafer diameters (e.g., 300 mm and 450 mm) or a single substrate diameter. The scanning subsystem can also include a shaft 118 coupled to the chuck 116 and coupled to a positioning subsystem 120. The positioning subsystem 120 can include various elements such as motors, gears, stages, and the like configured to rotate and / or translate the shaft 118. The shaft 118 can be coupled to the chuck 116 such that rotation and / or translation of the shaft causes rotation and / or translation of the chuck and, thereby, the wafer.

[0033] The scanning subsystem can translate the wafer in a spiral fashion, an XY fashion, or some combination of both as described further herein. In particular, in addition to the spiral scan described above, both XY serpentine scans and RT-XY hybrid scans can be used to translate the wafer relative to the illumination and collection optics. The spiral motion inspection system described herein is similar to the SP1 and SP2 inspection systems available from KLA-Tencor Corporation (Milpitas, Calif.), with some notable exceptions described herein. For example, the illumination area on the wafer is fairly large, typically extending over hundreds of microns up to several millimeters, the spindle rotation rate is relatively modest, typically not exceeding 1,000-5,000 rpm, and the collection subsystem may have nearly diffraction-limited performance. Furthermore, substrates up to and exceeding 450 mm in diameter cannot be inspected by the systems described herein.

[0034] In a spiral inspection system, the rotation rate at the center of the wafer should be sufficient to support the generation of an inspection frame with a desired overlap. In one embodiment, the illumination subsystem is further configured to simultaneously form multiple illumination areas using pulses of light, where the light scattered from each of the areas comprises a pulse of scattered light, and the scanning subsystem is configured to scan the pulses of light within the wafer by rotating the wafer, where as the pulses of light are scanned across the central region of the wafer, the illumination subsystem is configured to simultaneously direct the pulses of light to multiple illumination areas on the wafer less frequently than when the pulses of light are scanned within the wafer outside the central region. For example, for inspection using a pulsed laser and area sensor on a rotary stage, near the center of the wafer, the laser pulses can be triggered less frequently because the linear velocity of the wafer decreases proportional to the radius at the center of the wafer. Thus, the scan proceeds at a slower rate in units of area / time while the inspection sensitivity remains constant. The total average power of the laser is not utilized. Alternatively, the illuminated area can be continuously reduced during the scan, as long as no damage to the wafer is induced by the light source. 7, the central region 700 of the wafer 114 may be the region that encompasses the center 702 of the wafer and is spaced from the edge 704 of the wafer. The central region may encompass, for example, the inner third of the wafer or the inner quarter of the wafer. The portion of the wafer that is included in the central region of the wafer may vary depending on, for example, the rotation speed of the wafer, the diameter of the wafer, the power of the laser, and any other parameters related to the power to which the wafer is exposed at any given time.

[0035] In an embodiment, the illumination subsystem is further configured to simultaneously form a plurality of illumination areas using the pulses of light, the light scattered from each of the areas comprising a pulse of scattered light, and the scanning subsystem is further configured to scan the pulses of light within the wafer by rotating and translating the wafer, the two or more sensors comprising area sensors, the scanning subsystem scans the pulses of light within the wafer in one or more non-curved straight lines when the pulses of light are scanned across a central region of the wafer, and the scanning subsystem scans the pulses of light within the wafer in a spiral manner when the pulses of light are scanned within the wafer outside the central region. Thus, the embodiments described herein can be configured for hybrid scanning during inspection using a pulsed laser and an area sensor on a rotating stage. For example, in a hybrid approach, most of the wafer can be scanned in a spiral manner. In one such example shown in FIG. 8, an area 800 of the wafer 114 outside the central region 700 of the wafer, which can be defined as described above, can be scanned in a spiral manner 802. The central area 700 of the wafer can then be scanned by a series of small xy serpentine moves, a single linear move, or a combination of linear moves followed by angular rotations. Thus, the central area can be scanned in a linear fashion 804, where the scans are performed in the x or y directions with stepwise translations in the opposite directions between scans, or in a radial fashion 806, where the scans are performed along the diameter of the wafer between stepwise rotations of the wafer. In this way, not inspecting any part of the wafer at the center of the wafer (which can occur if the alignment of the wafer to the scanning subsystem or optics is imperfect) is avoided, proper alignment of the output from the sensor is less of a challenge, and inspection throughput can be increased. Furthermore, the "smearing" effect of a circular track across a rectangular sensor can be minimized depending on the repetition rate of the light source.

[0036] The system includes a collection subsystem configured to simultaneously and separately image the light scattered from each of the areas onto two or more sensors. In general, the collection subsystems described herein can include some type of scattered light collector (e.g., a collection objective lens, such as the scattered light collector 122 shown in FIG. 1), and possibly some additional optical elements coupled to the scattered light collector (e.g., an aperture, a splitter, a polarizing element, one or more reflective optical elements, and one or more refractive optical elements, such as the refractive optical element 124 shown in FIG. 1). The same collection lens can image the scattered light from each of the areas on multiple sensors. For example, as shown in FIG. 1, the scattered light collector 122 can collect scattered light 126 from one illumination area of ​​the multiple illumination areas on the wafer and scattered light 128 from another illumination area of ​​the multiple illumination areas on the wafer.

[0037] The collection subsystem may include one or more objective lenses to collect light scattered from the wafer. In addition to a relatively high numerical aperture (NA) objective lens, an additional set of low NA or even non-imaging collection optics may be disposed in the collection hemisphere near the horizon, such that light scattering information from these angles may be collected, allowing for additional capture of defects and features of interest that would not otherwise be detected through the main objective lens.

[0038] The collection subsystem can also include various elements that selectively filter scattered light to increase the acquisition rate of defects of interest and reduce false alarm rates. The various elements can include elements such as the optical elements and micro-electro-mechanical system (MEMS) based devices described herein. Additionally, the various elements can include polarizers, beam splitters, apertures, spatial filters, and the like.

[0039] The collection subsystem may further include one or more optical elements configured to image the filtered light onto two or more sensors (e.g., two or more area sensors). For example, the refractive optical element 124 shown in FIG. 1 may be configured to image the filtered light onto the sensors 130, 132 shown in FIG.

[0040] Additionally, the collection subsystem is preferably configured such that light from each of the multiple illumination areas on the wafer is imaged separately only onto a corresponding sensor. For example, as shown in FIG. 2, only scattered light 126 from a first illumination area of ​​the multiple illumination areas is imaged onto sensor 130, while only scattered light 128 from a second illumination area of ​​the multiple illumination areas is imaged onto sensor 132. In this manner, light from two or more illumination areas of the multiple illumination areas is not imaged onto the same sensor.

[0041] The characteristics of the two or more sensors are selected so that scattered light is not imaged in the gap between the two or more sensors. For example, the sensors 130, 132 can be selected and configured so that scattered light 126 and 128 is not imaged in the gap 134 between the two sensors. In one such example, two smaller and less expensive sensors can be utilized without experiencing undesirable loss of sensitivity due to scattered laser light that would otherwise be imaged in the "gap" between the sensors. Gaps between discrete sensors are often unavoidable due to packing constraints, supporting electronics, etc. Furthermore, with two-dimensional sensors and their inherent limitations (e.g., in their data rate, column rate, etc.), the light source and the sensor may not always be very well coupled. Some systems currently used include a focal plane array of sensors to overcome these limitations. However, in the embodiments described herein, the characteristics of the light source and the two-dimensional sensor are matched to overcome the limitations.

[0042] The two or more sensors generate an output for the scattered light. The two or more sensors can include point sensors or sensors with relatively low resolution. The two or more sensors can also include, for example, discrete photomultiplier tubes (PMTs), charge-coupled devices (CCDs), time delay integrators (TDIs), complementary metal oxide semiconductor (CMOS) sensors, scientific CMOS (sCMOS), PMT arrays, electron bombarded CCDs (EB-CCDs), electron multiplying CCDs (EM-CCDs), intensified photodiodes, or avalanche photodiode (APD) arrays. Each channel and / or sensor can be configured for the illumination wavelength, additional wavelengths generated by wafer interaction, or some combination of both, by using wavelength filtering techniques. This allows for more selective detection of certain types of defects of interest. Furthermore, the sensors used in the systems described herein may vary depending on the type of scan used for inspection and / or the light source included in the illumination subsystem. For example, in an XY scan configuration, a high repetition rate mode-locked laser may be used to illuminate the wafer, thereby avoiding laser-induced wafer damage, possibly with a sensor configured to collect data in TDI mode.

[0043] In some cases, elements of the collection subsystem can be selected based on one or more characteristics of the two or more sensors. For example, in some cases, the collection subsystem can include one or more tube lenses, and the anamorphic ratio of the one or more tube lenses can be selected based on the aspect ratio of the two or more sensors. Additionally, when different sensor types are used for different channels of the system, the different tube lenses can have different anamorphic magnifications to ensure that each sensor measures the same area on the wafer.

[0044] The objective lens included in the collection subsystem may be diffraction-limited over the field of view with a relatively high NA. Alternatively, a non-diffraction-limited objective lens may be used. For example, in one embodiment, the collection subsystem includes a scattered light collector with a resolution that is not fully diffraction-limited. In particular, the design and manufacture of the collector may be appropriately matched to the distorted point spread function produced by the associated commonly used apertures and polarizers in the collection channel to reduce costs. The specification for the resolution of the objective lens may be calculated by knowing in advance the geometry and material (e.g., silica spheres) of the target defect, as well as the pupil or Fourier plane that optimizes the acquisition rate of that defect, given the substrate type. The reduction in resolution requirements from being fully diffraction-limited may result in significant cost savings for the system user.

[0045] The systems described herein may also include an autofocus subsystem (not shown). The autofocus subsystem may ensure that the surface of the wafer is always in focus at the sensor, regardless of movement of the wafer, light source, collection optics, and illumination optics. The autofocus subsystem may include a light source (which may or may not be the light source used for inspection), a sensor, circuitry, logic for determining the position of the wafer image relative to the sensor (e.g., a two-dimensional sensor), and a feedback system for correcting any shifts noted during inspection. The autofocus subsystem may be further configured as described herein.

[0046] The system further includes a computer subsystem configured to detect defects on the wafer using the output of the two or more sensors. The computer subsystem thus provides a means for detecting defects in signals or other outputs generated by the sensors. For example, the system shown in FIG. 1 may include a computer subsystem 136 coupled to the two or more sensors, such that the computer subsystem may receive outputs generated by the two or more sensors. The computer subsystem may be configured to detect defects on the wafer using the outputs and any suitable defect detection algorithms and / or methods. For example, the computer subsystem may apply a defect detection threshold to the outputs, and any outputs found to exceed the defect detection threshold may be identified as a defect or potential defect.

[0047] The computer subsystem may include any suitable computer system known in the art. For example, the computer subsystem 136 may take a variety of forms including a personal computer, a mainframe computer, a workstation, an image computer, a parallel processor, or any other device known in the art. In general, the term "computer subsystem" may be broadly defined to encompass any device having one or more processors that execute instructions from a memory medium.

[0048] One improvement of the embodiments described herein over currently used systems regarding the collection of scattered light is the selective and configurable collection of surface scattering to enhance particle and defect detection. Some previously used systems include rotating spatial filter systems within the collection optics to reduce the effects of pattern scattering and enhance scattering from point particles and point defects. In the embodiments described herein, the filtering can be fixed during the wafer scan at a specific orientation relative to the illumination angle while the wafer rotates. The filter eliminates a certain solid angle of collection (including unwanted scattered light from the background but not from the defect of interest) by using a combination of multiple polarizers arranged at selected angles and a movable section of material opaque to the scattering wavelength. The filtering is performed in the back Fourier plane of the objective lens, so that the unwanted background at each point in the illumination field can be eliminated simultaneously.

[0049] Multiple area type sensors can be used in conjunction with the spatial filtering techniques described herein as well. For example, the system can include a flexible collection system, with multiple sensors selectively configured to detect scattered light with multiple polarization states and / or solid angles of scattering. Each sensor can be arranged to collect scattered light that other sensors (if present) do not collect. Furthermore, each sensor can be a multi-element sensor and can have different characteristics. For example, one sensor can be an intensified EB-CCD sensor. Another sensor can include a stand-alone magnetic focusing fluorometer coupled to a CCD or CMOS chip by a relay lens. A third sensor can be a low resolution stand-alone CCD chip. Additional sensors may be present as well. The type and size of the sensor for each channel can be selected based on the expected scattering background characteristics in that channel as well as the sensitivity requirements of the defects of interest in that channel. If the point spread function projected onto a particular sensor is expected to be large due to spatial filtering, then low resolution is preferred. Thus, to reduce operating costs, the system can be optimized with low-cost sensors in channels dominated by other noise sources.

[0050] The system configuration described above can be implemented in several different embodiments that will be described herein. For example, in one embodiment, the system includes an optical element configured to simultaneously and separately split the light scattered from each of the areas collected at different segments of the collection NA of the collection subsystem, two or more sensors configured to detect one segment of the different segments, and the system includes another two or more sensors configured to detect another segment of the different segments. One such embodiment is shown in FIG. 4, where an optical element 400 is placed in the path of the light collected by the scattered light collector 122. Only scattered light 126 from only one illumination area of ​​the multiple illumination areas on the wafer is shown in FIG. 4 for clarity. The optical element can be preferably placed at the Fourier plane of the collection subsystem or at a conjugate of the Fourier plane. "At a Fourier plane" or "at a conjugate of the Fourier plane" is defined herein to mean not just at the Fourier plane or just at a conjugate of the Fourier plane. Instead, these terms are intended to mean "at or near a Fourier plane" or "at or near a conjugate of the Fourier plane," respectively. An optical element described herein may be considered to be "at or near a Fourier plane" if it is located at the exact location of the Fourier plane or at a position that is within about 5% error (due to whatever sources of error exist in the system and / or physical constraints within the system) of the exact location of the Fourier plane. "At or near a conjugate of the Fourier plane" may be described in a similar manner.

[0051] The optical element may include various optical elements such as an aperture, a mask, an apertured mirror, a liquid crystal display (LCD) element, or a micromirror array. In one such example, a suitable aperture may be formed by cutting out a portion of a folding mirror such that one portion of the folding mirror transmits light while another portion of the folding mirror reflects light. In another such example, an apertured mirror may be fabricated by forming a mask coating of a metal and / or dielectric film on a transparent substrate. Segmentation of the collection NA may be achieved similarly by using other beam-splitting optical elements such as prisms with various facet orientations that refract light in different directions. Other means of segmenting the collection NA are also possible, including digital micromirror devices as commonly used in digital light projectors.

[0052] The optical element (and other optical elements described herein) is used to separate the collection NA into different segments, so that scattered light in the different segments can be directed to different sensors or channels of the system. For example, as described above, the optical element can have one portion that reflects light and another portion that transmits light. Thus, the optical element can separate the collection NA into two segments, one segment that is directed to one channel by reflection and the other segment that is directed to another channel by transmission.

[0053] In one embodiment, as shown in cross section in Figure 4, the optical element may include a transmissive portion 402, 404 corresponding to one segment of the collection NA, and a reflective portion 406 corresponding to another distinct and mutually exclusive segment of the collection NA. The reflective portion 406 may reflect substantially all light in the segment of the collection NA corresponding to portion 406 (i.e., portion 406 may have approximately 0% transmission of scattered light), while portions 402, 404 may transmit substantially all light in the segment of the collection NA corresponding to portions 402, 404 (i.e., portions 402, 404 may have approximately 100% transmission of scattered light). Thus, the total collection NA may be separated into two mutually exclusive portions.

[0054] As described above, different portions of the optical element correspond to different segments of the collection NA, and the scattered light is separated into the different segments by the optical element. Furthermore, as shown in FIG. 4, the portions 402 and 404 are mirror symmetrical to each other with respect to the incidence plane of the illumination subsystem. Furthermore, the portions 402 and 404 can correspond to one of the different segments of the collection NA. Thus, one of the different segments can include two individual segments (corresponding to the portions 402 and 404) that are mirror symmetrical to each other with respect to the incidence plane of the illumination subsystem. Furthermore, as shown in FIG. 4, each of the portions 402 and 404 is spaced apart from the incidence plane. Furthermore, each of the portions can be defined by a first, second, and third surface, which are described with respect to the portion 402. In particular, the portion 402 includes a first surface 402a, a second surface 402b, and a third surface 402c. The first surface 402a is linear and is arranged at an angle with respect to the incidence plane. The second surface 402b is straight, substantially parallel to the plane of incidence, and substantially shorter than the first surface. Additionally, the third surface 402c is curved. As shown in FIG. 4, the portion 404 is also defined by these three surfaces.

[0055] As further shown in FIG. 4, the two or more sensors (shown as sensor 130) are configured to detect one segment of the different segments, and the system includes another two or more sensors (shown as sensor 408) configured to detect another segment of the different segments. The sensor 408 and the other two or more sensors may be further configured as described herein. Further, the two or more sensors and the other two or more sensors may be the same type of sensor or different types of sensors. For example, the two or more sensors and the other two or more sensors may be selected depending on the amount of light expected to be directed to each of the sensors. Further, an optical element as further described herein may be coupled to the other two or more sensors. For example, as shown in FIG. 4, a refractive optical element 410 may be configured to image light reflected by the optical element 400 onto the sensor 408 and any of the other two or more sensors included in the system. The system shown in FIG. 4 may be further configured as described herein.

[0056] In these or any other embodiments described herein, each channel may end up with a different shape and extent, pixel by pixel, of the point spread function on the corresponding sensor. Thus, different analog and / or filtering techniques may be applied to each individual sensor output to maximize sensitivity to anomalies. In particular, the expected shape of the point spread function based on the Fourier plane aperture may be calculated prior to inspection, and then appropriate filter coefficients may be applied during inspection.

[0057] In one such embodiment, the system is further configured to change or replace optical elements in response to one of the distinct segments detected by the two or more sensors and another of the distinct segments detected by the other two or more sensors. For example, the system can include a flexible aperture collection space in an area mode inspection system having multiple configurable channels. One improvement of this area inspection system over other inspection systems is the selective and configurable collection of surface scattering to enhance particle and defect detection. The system can be configured to change or replace optical elements in any suitable manner.

[0058] In another embodiment, the system includes an optical element configured to simultaneously and separately split the light scattered from each of the areas collected at different segments of the collection NA of the collection subsystem, and the two or more sensors are configured to detect one segment of the different segments using one portion of the two or more sensors and detect another segment of the different segments using a different portion of the two or more sensors, where the one portion and the other portion of the two or more sensors do not overlap each other and are not adjacent on the two or more sensors. For example, the system can be configured to separate the scattered light by angle in the collection space and reimage the light into two separate patches on a single sensor. In particular, the number of active pixels on a sensor can be controlled during or before a scan in conjunction with or independent of the shape and range of the illumination. All or a portion of the elements on a particular sensor can be utilized. One portion of a sensor containing many elements can receive scattered light from one range of solid angles and another portion of the sensor can receive scattered light from another range of solid angles. For example, if a sensor includes 1000×1000 individual elements, the 1000×500 elements can receive images of scattered light generated between 40° forward azimuth angles and 60° forward azimuth angles. The second half of the sensor (1000×500) can receive images of scattered light from the surface generated between 120° azimuth angles and 160° azimuth angles. In some cases, portions of the scattered light imaged onto the sensor surface can be inverted and other portions can remain non-inverted. One further configuration is to read out sensor data from both ends of each column (e.g., row 1 and row N) simultaneously, which can effectively double the sensor data rate in some sensors.

[0059] Each of the system embodiments described herein can be further configured as described in International Publication WO 2012 / 082501, filed December 7, 2011, by Zhao et al., which is incorporated by reference as if fully set forth herein.

[0060] In further embodiments, the system includes two or more additional sensors including an image intensifier, the collection subsystem configured to simultaneously and separately image the light scattered from each of the areas to the two or more additional sensors, the two or more additional sensors generating additional outputs for the scattered light, and the computer subsystem further configured to use the additional outputs instead of the outputs to detect defects on the wafer when the sensor electronic noise dominates the total channel noise in the two or more sensors. For example, such an embodiment may include one or more flexible apertures as described above to optimize the performance, cost, and reliability of the sensors. In one such embodiment, the system shown in FIG. 5 includes an optical element 500 configured to simultaneously and separately image the light scattered from each of the areas to two or more additional sensors (illustrated in FIG. 5 by sensor 502). The optical element 500 may also include a beam splitter configured to transmit a portion of the scattered light across the entire collection NA of the collection subsystem and reflect a portion of the scattered light across the entire collection NA of the collection subsystem. For example, the optical element 500 may be a simple 70 / 30 beam splitter. Furthermore, as mentioned above, the type and size of the sensor for each channel can be selected based on the expected scattering background characteristics in that channel as well as the sensitivity requirements of the defects of interest in that channel. In some such cases, when the sensor electronic noise dominates the total channel noise, a multiplied sensor may be desirable. However, when another noise source other than the sensor readout noise dominates, a non-multiplied sensor may be preferred. For example, two or more additional sensors (shown in FIG. 5 as sensor 502) may each include a fluorescence intensifier (shown in FIG. 5 as sensor 504), and two or more sensors (shown in FIG. 5 as sensor 130) may not include a fluorescence intensifier. Such a configuration may be inverted as well, whereby two or more sensors (shown in FIG. 5 as sensor 130) each include a fluorescence intensifier (not shown in FIG. 5), and two or more additional sensors (shown in FIG. 5 as sensor 520) may not include a fluorescence intensifier.Thus, various optical elements (e.g., flexible aperture and mirror arrangements) described herein can be used to direct light to a multiplied sensor when the light is low and to another non-multiplied sensor when the light is high. When the point spread function projected onto a particular sensor is expected to be large due to spatial filtering, a lower overall sensor resolution can be tolerated according to sampling theory. For example, in some channels, the illumination patch on the wafer can have a point spread function in the range of about 2000 when imaged through the collection optics and spatial filter. In other channels, the image of the illumination patch on the wafer can have a point spread function in the range of 1000, with a different spatial filter limiting the collection NA. Thus, the system can be optimized with low-cost sensors in channels dominated by other noise sources to reduce operating costs. Furthermore, this particular configuration also allows for improved system reliability, since multiplied sensors generally have a shorter lifetime than non-multiplied sensors. The system shown in FIG. 5 can be further configured as described herein. For example, as shown in Figure 5, the collection subsystem can include a refractive optical element 506 configured to image the scattered light from the optical element 500 to two or more additional sensors. The refractive optical element 506 can be further configured as described herein. The system shown in Figure 5 can be further configured as described herein.

[0061] Such an embodiment may also or alternatively include one or more flexible apertures as described above to direct the scattered light to the most appropriate sensor. For example, one sensor may be optimized for substantial light scattering, while another sensor may be optimized for substantially low light scattering. In such a configuration, a sensor optimized for relatively low light scattering, such as a fluorescence intensified sensor, may be damaged by substantial scattering and may not be necessary to achieve optimal sensitivity in the presence of relatively large background. Thus, during one portion of a scan, the optical element may be configured to direct one portion of the scattered light to a sensor optimized for substantial light scattering and another different portion of the scattered light to a different sensor optimized for low light scattering. In a different example, the optical element may be configured to direct all of the scattered light to only one sensor of multiple sensors included in the system, and the sensor to which the scattered light is directed may change during the scan.

[0062] In another embodiment, the system includes two or more additional sensors configured for photon counting, the collection subsystem further configured to simultaneously and separately split the light scattered from each of the areas to the two or more additional sensors, the two or more additional sensors generating additional outputs for the scattered light, and the computer subsystem further configured to use the additional outputs to detect defects on the wafer. For example, such an embodiment may include multiple flexible apertures as described above to optimize the performance, cost, and reliability of the sensors. In some such cases, so-called photon counting techniques may be used for one or more of the sensors included in the system. Such an embodiment may be configured as shown in FIG. 4 or FIG. 5, where the two or more additional sensors (shown as sensor 408 or the combination of sensor 502 and image intensifier 504) are replaced with sensors configured for photon counting. The sensors configured for photon counting may be any suitable such sensors known in the art, such as avalanche photodiodes.

[0063] In one embodiment, the system includes a MEMS-based optical switching device disposed between the collection subsystem and the two or more sensors. For example, there is a relatively fast MEMS-based optical switching device that can be reconfigured between every laser pulse. One or more of these optical switching devices can be disposed in a suitable location within the collection optics. For example, the optical elements 400, 500 shown in Figures 4 and 5 can each be replaced by a MEMS-based optical switching device. The MEMS-based optical switching device can include any suitable such element known in the art.

[0064] In one such embodiment, the system includes two or more additional sensors, the illumination subsystem is configured to simultaneously form multiple illumination areas using pulses of light, the light scattered from each of the areas includes pulses of scattered light, and the optical switching device is configured to direct a first set of pulses of scattered light generated by the first set of pulses of light to the two or more sensors, and a second set of pulses of scattered light generated by the second set of pulses of light following the first set of pulses of light to the two or more additional sensors. For example, if the optical elements 400, 500 shown in Figures 4 and 5 are each replaced by an optical switching device as described above, the two or more additional sensors shown as detector 408 in Figure 4 and detector 502 in Figure 5 can be used for the two or more additional sensors in this embodiment. Thus, the optical switching device in the collection optics can direct alternating frames onto alternating sensors to save costs. Thus, if a relatively high repetition rate laser is available, but the data rate and / or frame rate of a particular sensor type is limited, the scattered light generated by subsequent laser pulses can be directed to alternate sensors by reconfiguring the MEMS device between the laser pulses. For example, the scattered light generated by a pulsed laser at frequency f can be directed to an electro-optic beam splitter operating at frequency f. The electro-optic beam splitter can be used to relatively rapidly switch the scattered light alternately between two sensors, each having an effective frame rate of f / 2. Thus, if a sensor has a limited readout rate and the system does not allow for two or more sensors to be placed side-by-side for cost, packaging, or other reasons, some type of optical switching element may allow the data rate to be multiplied (e.g., doubled, tripled, etc.) by directing light onto different sensors as a function of time. The limitations of the individual sensor components may be overcome. Such an embodiment works particularly well for Q-switched lasers with repetition rates of about 2 kHz to about 40 kHz (low enough to allow the use of optical switches).

[0065] In another such embodiment, the illumination subsystem is configured to simultaneously form multiple illumination areas using pulses of light, the light scattered from each of the areas comprises pulses of scattered light, the optical switching device is configured to simultaneously and separately split the pulses of scattered light from each of the areas to be collected at different segments of the collection NA of the collection subsystem, and the optical switching device is configured to direct only one segment of the different segments of the first set of pulses of scattered light generated by the first set of pulses of light to the two or more sensors, and then direct only another segment of the different segments of the second set of pulses of scattered light generated by the second set of pulses of light following the first set of pulses of light to the two or more sensors. For example, one sensor may receive and process different sections of the scattered light hemisphere on the subsequent laser spot. The MEMS device would be configured to spatially select and direct a particular bundle of scattered light to the sensor. In particular, the MEMS device can be configured to function like the optical element 400 described above. The field size of the imaging objective can be reduced by at least a factor of two by this configuration, which allows for significant cost savings even after considering the extra cost of the switching device.

[0066] In some embodiments, the illumination subsystem is configured to simultaneously form multiple illumination areas using pulses of light, the light scattered from each of the areas comprising a pulse of scattered light, and two or more sensors are synchronized in time with the pulse of light to detect only the pulse of scattered light having a predetermined arrival time. In one such embodiment, the pulse of scattered light having a predetermined arrival time comprises fluorescence or photoluminescence. For example, the embodiments described herein can utilize camera shutter synchronization to look for fluorescence or the like. In particular, each channel and / or sensor can be synchronized in time with the laser pulse to acquire only photons having a particular arrival time. In this way, time-dependent effects such as fluorescence or photoluminescence can be observed independent of the scattered light generated by classical means, thereby providing further information about the surface and / or defect of interest.

[0067] In another embodiment where multiple illuminated areas are formed using pulses of light, the rotation and / or translation rate of the sensor acquisition and scanning subsystem can be synchronized to this pulse frequency (or vice versa) according to a "flash on the fly." Some spatial overlap between subsequent laser pulses is desirable, as discussed above.

[0068] In any of the embodiments in which the scattered light is split between two or more channels of the inspection system, each channel may include a separate anamorphic optical element disposed between the channel's Fourier plane and the sensor. The separate anamorphic optical elements in each of the channels may be different and dependent on the characteristics of the scattered light (e.g., the segment of scattered light) that the channel is used to detect.

[0069] Each of the above described embodiments may be further configured as described herein.

[0070] Another embodiment relates to another system configured to inspect a wafer. The system includes an illumination subsystem configured to direct multiple light beams to substantially the same area on the wafer. The multiple light beams have substantially the same wavelength and polarization characteristics. For example, two or more light beams of the same wavelength and polarization characteristics cannot be combined losslessly, but the two or more light beams can be made parallel to each other (using a folding mirror as shown in FIG. 9). In some embodiments, the multiple light beams are laser beams. Thus, the illumination subsystem can have a multiple laser beam configuration. In another embodiment, the multiple light beams are generated by only a single laser of the illumination subsystem. For example, multiple illumination beams used for area mode can be generated within a single laser. Some lasers have frequency conversion crystals, the lifetime of which can be limited by the intensity of the spot incident on the crystal. Multiple simultaneous incident spots can extend the lifetime of the crystal. In one such embodiment, shown in FIG. 9, the illumination subsystem can include only a single light source 900, which can be a laser. The laser can include any of the lasers described herein or any other suitable lasers known in the art.

[0071] Light from the light source can be directed to a beam splitter 902 of the illumination subsystem, which is configured to split the light beam from the light source into a first light beam 904 and another light beam. The illumination subsystem can also include a beam splitter 906, which is configured to split the light beam from the beam splitter 902 into a second light beam 908 and another light beam. The beam splitters 902, 906 can include any suitable beam splitters known in the art. The illumination subsystem can also include a reflective optical element 910, which is configured to reflect the light beam from the beam splitter 906 as a third light beam 911 to a refractive optical element 912 of the illumination subsystem. The illumination subsystem can also include a reflective optical element 914 disposed in the path of the first light beam and a reflective optical element 916 disposed in the path of the second light beam. The reflective optical elements 914 and 916 are configured to direct the first and second light beams, respectively, to the refractive optical element 912, such that the first, second, and third light beams are substantially parallel to one another when incident on the refractive optical element 912. Thus, the reflective optical elements disposed in the paths of each of the light beams can control the angle at which each of the light beams is directed to the refractive optical element, which controls the angle at which each of the light beams is directed to the wafer. The reflective optical elements 910, 914, and 916 can include any suitable reflective optical element known in the art, and the refractive optical element 912 can include any suitable refractive optical element known in the art. The system shown in FIG. 9 can be further configured as described herein.

[0072] In another embodiment, the light source 900, beam splitters 902, 906, and reflective optical elements 910, 914, 916 can be replaced with a single light source, such as a laser, from which multiple (e.g., three) beams emanate. The multiple beams emanating from the light source can be directed at substantially the same angle to the refractive optical element 912, which in turn directs them to the wafer. Such an embodiment can be further configured as described herein.

[0073] Two or more (e.g., three) light beams can be focused by a lens (e.g., refractive optical element 912) to the same location on the wafer when arranged to be parallel to each other. Such a configuration allows for spot sizes on the wafer of 100 μm or more. For example, in some such embodiments, the illumination subsystem can include a lens (e.g., refractive optical element 912) configured to direct multiple beams onto the wafer, where the lens can have an NA of about 0.1 or more, thereby allowing several relatively low NA input beams to be focused simultaneously. In one such example, for an illumination subsystem including a 266 nm laser, a spot size of about 100 μm to about 1 mm requires only an NA of less than 0.01 to form the spot. Because the NA of the lens is relatively low, all beams can illuminate the same patch on the wafer with approximately the same size. In contrast, for a spot of about 1 μm, the lens NA would need to be 0.5 or more, such that a single lens cannot inject multiple beams of the same wavelength. In general, any number of beams or light sources can be used by the illumination subsystems described herein.

[0074] In one embodiment, multiple light beams are directed to substantially the same area on the wafer at substantially the same polar angle and different azimuth angles. Thus, multiple light beams (e.g., laser beams) can illuminate the wafer at approximately the same angle of incidence. For example, one laser beam can be incident at a polar angle of 55° and an azimuth angle of 0°, and a second laser beam can be incident at a polar angle of 55° and an azimuth angle of 2°. Approximately the same angle of incidence and vector of polarization can be used, so that the scattered light generated by each light beam has the same characteristics and polarization state, and is thereby effectively filtered in the collection subsystem. Although light beams of the same wavelength cannot be combined and injected at exactly the same angle, injection within 5° of each other is possible and will result in approximately the same surface scattering characteristics so that sensitivity is not reduced. In another example, if the central beam is incident on the wafer at a polar angle of about X°, two other beams can be incident on the wafer at, for example, a polar angle of about X-2° and a polar angle of about X+2°, and there will be substantially little difference in the resulting surface scattering from each of the beams.

[0075] In another embodiment, multiple light beams are directed simultaneously to substantially the same area on the wafer. For example, if the multiple light beams have substantially the same wavelength and polarization characteristics, as described above, the multiple light beams can be directed simultaneously to substantially the same area on the wafer by splitting light from a single light source into multiple light beams that are directed to the wafer at slightly different azimuth and / or polar angles, or by using multiple light sources that generate multiple light beams that are directed to the wafer at slightly different azimuth and / or polar angles. Directing multiple light beams having the same wavelength and polarization characteristics simultaneously to the wafer has several advantages, as described further herein.

[0076] In another embodiment, the multiple light beams illuminate substantially the same area on the wafer in area illumination mode. For example, the illumination subsystem can have multiple illumination beam configurations for area mode. In some embodiments, the substantially same area on the wafer has a lateral dimension greater than 50 microns. For example, as shown in FIG. 10, the multiple light beams 904, 908, and 911 can be directed to the substantially same area 1000 on the wafer 114 by a refractive optical element 912. The lateral dimension 1002, which is the shortest dimension of the substantially same area 1000, can be greater than 50 microns. Furthermore, the substantially same area 1000 can have an elliptical shape on the wafer as shown in FIG. 10, although the substantially same area can have any other shape (e.g., rectangular) on the wafer as further described herein.

[0077] In another embodiment, the multiple light beams are pulsed light beams and the illumination subsystem is configured to direct one of the multiple light beams to substantially the same area on the wafer later than another of the multiple light beams directed by the illumination subsystem to the substantially same area, whereby the pulsed light beams illuminate substantially the same area as one continuous pulse of light having a longer duration than each of the pulsed light beams. In a further embodiment, the multiple light beams are pulsed light beams and the illumination subsystem is configured to direct one of the multiple light beams to substantially the same area on the wafer later than another of the multiple light beams directed by the illumination subsystem to the substantially same area, whereby the peak pulse power incident on the wafer by the multiple light beams is less than if the multiple light beams were directed simultaneously to the substantially same area on the wafer. Thus, these embodiments have the advantage that the pulse duration can be effectively extended compared to a single light beam. In a multiple illumination beam configuration for area mode, the pulse duration is extended, which may reduce the peak pulse power incident on the wafer, thereby reducing the probability of damaging the wafer. In one particular example, assuming that each of the lasers or light sources is a pulsed light source having a repetition rate between about 2 kHz and 50 kHz and a pulse duration between about 10 ns and 200 ns, if the pulses are all incident on the wafer at the same time, the energy density will be substantially higher. However, because the wafer moves substantially slowly compared to the pulse duration, the pulses may spread out in time and still expose essentially the same area. For example, a first pulse may be incident on the wafer at time t0, a second pulse may be incident on the wafer at time t0+t1, and a third pulse may be incident on the wafer at time t0+t2. × The laser can hit the wafer at t1. Therefore, the time interval between the first and last pulse (e.g., t0+2 in the above example) ×As long as the wafer has not moved across more than one sensor pixel relative to the sensor within t1), the overall signal to noise ratio will be approximately the same as if the pulses were all incident on the wafer simultaneously, but the peak power density incident on the wafer will be reduced so as not to damage the wafer.

[0078] In another embodiment, the multiple light beams are generated by multiple lasers in the illumination subsystem. For example, the multiple illumination beams used for the area mode can be generated from multiple lasers. In one such embodiment shown in FIG. 12, the illumination subsystem can include lasers 1200, 1201, and 1204 configured to generate light beams 1206, 1208, and 1210, respectively. The lasers 1200, 1201, and 1204 can be identical lasers (i.e., lasers having the same make and model). Alternatively, the lasers 1200, 1201, and 1204 can be different lasers (i.e., lasers having different makes and / or models) that generate light beams having the same wavelength and polarization characteristics as each of the other light beams. As shown in FIG. 12, each of the light beams can be directed to the wafer 114 by a single refractive optical element (e.g., refractive optical element 912), which can be configured as described above. The light beams shown in FIG. 12 can be directed to the wafer 114 (e.g., simultaneously or sequentially) as further described herein. Additionally, the system shown in FIG. 12 may be further configured as described herein.

[0079] In some embodiments, the multiple light beams include one light beam generated by a light source of the illumination subsystem and another light beam formed by collecting light reflected from substantially the same area on the wafer and directing the collected reflected light back to substantially the same area on the wafer. Such an embodiment may be functionally equivalent to using multiple light sources to generate multiple light beams. For example, multiple illumination beams used for area mode may be generated by recycling multiple passes of the same light beam (by collecting the reflected light beam from the wafer and directing the light beam back to the wafer). Thus, the reflected light from the first pass can be collected and reshaped into a second beam that is incident on substantially the same location on the wafer. In the multiple pass light beam option, the power available for each subsequent illumination pass will be reduced by recycling surface reflections and optics efficiency, but the effective illumination power may be increased by a factor of 50% or more. It should be noted that in general, these multi-beam techniques are challenging to implement on line or spot inspection systems in contrast to the systems described herein. One alternative illumination option is to use multiple laser beams of different wavelengths to allow more efficient detection of defects.

[0080] In one such embodiment, as shown in FIG. 13, the multiple light beams can include a light beam 1300 generated by a light source (not shown in FIG. 13) of the illumination subsystem. The light beam 1300 can be generated by any of the light sources described herein. As shown in FIG. 13, the light beam 1300 is directed to the wafer 114 by a refractive optical element 1302, which can be configured as further described herein (e.g., with respect to the refractive optical element 912). Light 1304 specularly reflected from substantially the same area on the wafer is collected by a reflective optical element 1306 of the illumination subsystem, which directs the collected reflected light beam to beam reshaping optics 1308. The reflective optical element 1306 can include any suitable reflective optical element, and the beam reshaping optics 1308 can include any suitable beam shaping element (e.g., anamorphic optical element, field stop, spatial filter, polarizing filter, and the like). The beam reshaping optics 1308 direct the collected reflected light beam to the reflecting optics 1310, which directs the collected reflected light back to substantially the same area on the wafer as light beam 1312. For example, as shown in FIG. 13, light 1314 specularly reflected from the wafer 114 can be collected by the reflecting optics 1306, which directs the collected reflected light beam to the beam reshaping optics 1308. The beam reshaping optics 1308 directs the collected reflected light back to substantially the same area on the wafer as light beam 1316. The portions of the illumination subsystem shown in FIG. 13 can be included in any of the system embodiments described and illustrated herein.

[0081] In one embodiment, the illumination subsystem includes a frequency converted laser, the multiple light beams include pulses of light, and the pulses of light directed to substantially the same area on the wafer do not vary spatially over the duration of the pulse of light and have a substantially constant intensity over the duration of the pulse of light. In one such embodiment, the illumination subsystem includes beam shaping optics coupled to the laser. In another embodiment, the illumination subsystem includes a frequency converted laser, the multiple light beams include pulses of light, and the pulses of light directed to substantially the same area on the wafer have a substantially constant intensity over the duration of the pulse of light. Such an embodiment may be further configured as described herein.

[0082] The system also includes a scanning subsystem configured to scan the multiple light beams across the wafer. The scanning subsystem may be further configured as described herein. The system further includes a collection subsystem configured to image light scattered from substantially the same area on the wafer onto a sensor. The sensor generates an output in response to the scattered light. The collection subsystem and the sensor may be further configured as described herein.

[0083] The zoom lens group in the collection optics allows different sized areas on the wafer to be imaged onto the same sensor (or sensors), depending on the required speed and / or sensitivity of the inspection. When a relatively high speed (more wafers per hour) inspection is desired, a large area of ​​the wafer (e.g. 2 mm x 2 mm) is imaged onto a sensor (or sensors) of constant size. When a high sensitivity (usually slow) inspection is desired, a smaller area is imaged onto the sensor after a magnifying element is inserted or moved into the path of the collection optics. This change in speed or sensitivity can generally be performed both during and before the inspection. The area of ​​the illumination spot is increased simultaneously to expose the appropriate region. The intensity of the illumination spot preferably remains the same when the illumination spot area is changed, but can be increased to improve the inspection sensitivity to the extent that laser-induced damage can be avoided (the multiple beam technique mentioned earlier can reduce the probability of laser-induced damage). Alternatively, a smaller zoom magnification of the collection optics can be used in conjunction with a larger illumination area, and additional sensors can be used to image a larger portion of the wafer, thereby improving inspection speed while maintaining inspection sensitivity.

[0084] In one embodiment, the collection subsystem includes a scattered light collector having a resolution that is not fully diffraction limited. Such an embodiment may be further configured as described herein.

[0085] In some embodiments, the illumination subsystem is configured to vary multiple light beams directed to substantially the same area on the wafer as a function of time, the collection subsystem is configured to image light scattered from multiple areas on the wafer onto a sensor, and the sensor and illumination subsystem light sources are gated synchronously with each other. Thus, the system can be configured for time-domain multi-spot inspection in area mode. For example, the illumination profile can vary not only as a function of position as described above, but also as a function of time. Scattered light from different parts of the wafer can be received by the same sensor, and it may be advantageous to gate the illumination and sensor together (which we will call time-domain multi-spot) to improve throughput, defect acquisition, or reduce the probability of surface damage. Temporally different illumination profiles can be generated by lasers or laser beams incident on the wafer from different azimuthal and / or polar angles. One substantial advantage of time-domain multi-spot inspection over inspecting the same wafer twice with two different optical configurations is the constant time overhead associated with inspecting each wafer. For example, loading, unloading, alignment, acceleration, and deceleration are only applied once, thereby increasing the overall throughput.

[0086] In one such embodiment, the multiple light beams are directed at substantially the same area on the wafer at different azimuth angles, different polar angles, or different azimuth angles and polar angles. For example, as described above, the multiple light beams can be simultaneously directed at substantially the same area on the wafer at different azimuth angles and the same polar angle, although both the azimuth angle and polar angle at which the multiple light beams are directed at the wafer can be varied over time (e.g., by changing the position of the reflective optical element shown in FIG. 9 or the multiple light sources shown in FIG. 12).

[0087] In another such embodiment, the illumination subsystem is configured to vary the wavelength and polarization characteristics of the multiple light beams, such that the multiple light beams directed to substantially the same area on the wafer as a function of time have different wavelength characteristics, different polarization characteristics, or different wavelength and polarization characteristics. For example, as described above, the multiple light beams can have the same wavelength and polarization characteristics, but both the wavelength and polarization characteristics of the multiple light beams can be varied over time (e.g., using one or more polarizers having time-dependent polarization characteristics (e.g., by rotating the polarizer) and / or using one or more wavelength filters having time-dependent wavelength characteristics).

[0088] In one embodiment, the multiple light beams include pulses of light, the scattered light includes pulses of scattered light, and the sensor detects only the pulses of scattered light having a predetermined arrival time synchronized in time with the pulses of light. In one such embodiment, the pulses of scattered light having a predetermined arrival time include fluorescence or photoluminescence. Such an embodiment may be further configured as described herein.

[0089] The system further includes a computer subsystem configured to detect defects on the wafer using the output of the sensor. The computer subsystem may be further configured as described herein.

[0090] For substrates where the scattering intensity across the entire surface exceeds a predetermined value in one or more of the collected light scattering channels, the optical attenuation and / or optical or electronic gain of the specific sensors associated with those channels can be adjusted prior to inspection to maximize inspection sensitivity or dynamic range.

[0091] In one embodiment, the multiple light beams are pulsed light beams, the illumination subsystem is further configured to direct a first light beam of the multiple light beams to substantially the same area on the wafer earlier in time than a second light beam of the multiple light beams directed to substantially the same area by the illumination subsystem, the first light beam and the second light beam of the multiple light beams having different shapes and sizes from one another on the wafer, and the computer subsystem is further configured to determine whether the second light beam of the multiple light beams should be directed to substantially the same area using the output for scattered light from the substantially same area due to illumination by the first light beam of the multiple light beams. Such an embodiment may be advantageous because the leading beam (e.g., the first multiple light beams) may be used to detect relatively large particles on the wafer, thereby preventing damage to the wafer that may be caused by illuminating the relatively large particles with the main inspection beam (e.g., the second multiple light beams). Additionally, the leading beam can be used to detect if the haze on the wafer is getting too high, thereby preventing damage to the sensor that may be caused by light scattering due to the haze that may exceed the damage threshold or the usable dynamic range of the sensor. FIG. 11 shows an example of a secondary beam illumination spot 1100 on a wafer 1102 that precedes a spot 1104 illuminated by the main inspection beam. The relatively elongated spot of the secondary beam has the advantage of not significantly increasing the field of view of the optics. As shown in FIG. 11, the two beams can have significantly different profiles on the wafer, both temporally and spatially. The direction of movement of the spots on the wafer is indicated by arrow 1106. As described further herein, the light scattered from the illumination area of ​​the inspection beam can be coupled onto multiple sensors, and the illumination used for the inspection beam can be pulsed illumination. In response to the scattered light from the secondary beam, the computer subsystem can generate a trigger, which is a signal to the light source to not pulse the light source to be used for the inspection beam.

[0092] The scattered light from substantially the same area due to illumination by the first light beam and the second light beam of the multiple light beams may be detected by the same sensor. However, the scattered light from substantially the same area due to illumination by the first light beam and the second light beam of the multiple light beams may be detected by different sensors. In this case, the above-mentioned sensor would be used to detect the scattered light from substantially the same area due to illumination by the second light beam of the multiple light beams, and another sensor would be used to detect the scattered light from substantially the same area due to illumination by the first light beam of the multiple light beams. The other sensor may be further configured as described herein.

[0093] Thus, the elements of the system used for inspection (or further optical subsystems included in the system) can be configured to detect relatively large defects or other light scattering events before the scattered light from these events is incident on the area inspection sensor. For example, a significant amount of scattered light may saturate or damage the image sensor or exceed the sensor's ability to quantitatively measure scattering. It is preferable to reduce the incident intensity before inspection of the scattering area. The system (or further optical subsystem) scans the wafer ahead of the main inspection spot and the corresponding sensor area, and if significant scattered light is detected, a control signal reduces (e.g., eliminates) the power incident on that area of ​​the surface. Alternatively, attenuation of the scattered light can be added to the collection subsystem, or the optical or electronic gain of the sensor or multiplication element can be adjusted in time (e.g., using an electro-optical shutter).

[0094] In one such embodiment, the illumination subsystem includes a Q-switched laser, and the computer subsystem prevents the second of the multiple light beams from illuminating substantially the same area if the computer subsystem determines that the second of the multiple light beams should not be directed to substantially the same area. For example, as described above, in response to scattered light from the secondary beams, the computer subsystem can generate a trigger that is a signal to the Q-switched laser not to emit a pulse that would be used for the inspection beam. However, the computer subsystem can prevent the second of the multiple light beams from illuminating substantially the same area without controlling the Q-switched laser. For example, the computer subsystem controls an optical element, such as a relatively fast electro-optical shutter coupled to the Q-switched laser, such that the optical element prevents pulses generated by the Q-switched laser from illuminating substantially the same area. Additionally, the above-described embodiments can be implemented with other pulsed light sources, such as CW lasers or mode-locked lasers.

[0095] In another embodiment, the multiple light beams are pulsed light beams, the illumination subsystem is configured to direct a first light beam of the multiple light beams to substantially the same area on the wafer earlier in time than a second light beam of the multiple light beams directed to the substantially same area by the illumination subsystem, the first light beam and the second light beam of the multiple light beams having different shapes and sizes from each other on the wafer, and the computer subsystem is configured to use the power for the scattered light from the substantially same area due to illumination by the first light beam of the multiple light beams to determine a power of the second light beam of the multiple light beams to be directed to the substantially same area. The power of the second light beam of the multiple light beams determined by the computer subsystem can be zero power, full power, or a partial power of the second light beam. For example, if the scattered light from the first light beam indicates a relatively large particle on the wafer, the computer subsystem can determine that the second light beam should be directed to the wafer at zero power or partial power to prevent the particle from breaking down due to heating by the full power of the second light beam. Alternatively, if the light scattered by the first light beam indicates that no relatively large particles are present on the wafer, the computer subsystem may determine that the second light beam should be directed at the wafer at full power to enable detection of relatively small particles. Such embodiments may be further configured as described herein.

[0096] In one such embodiment, the illumination subsystem includes a Q-switched laser and the computer subsystem attenuates the power of the Q-switched laser based on the determined power. For example, the computer subsystem may be coupled to the Q-switched laser in any suitable manner, whereby the computer subsystem may control the power of the laser to match the power determined by the computer subsystem.

[0097] In one such embodiment, the computer subsystem is configured to monitor the power of the second of the multiple light beams actually directed to the substantially same area, and modify one or more parameters of the system based on the power directed to the substantially same area to normalize the power of the second of the multiple light beams actually directed to the substantially same area. Thus, software and hardware can be used to normalize the pulse-to-pulse laser energy variation. Such an embodiment is advantageous because the pulse-to-pulse laser energy variation of a Q-switched laser can be considered not insignificant.

[0098] While the systems described herein can normalize the system for changes in laser pulse energy by attenuating the power of a light beam directed to substantially the same area, the systems described herein can also or alternatively normalize the system for changes in laser pulse energy by detecting the energy of the laser pulse and normalizing the gain of the sensor based on the detected energy and / or normalizing the output generated by the sensor using a computer subsystem.

[0099] In one embodiment, the system includes an optical element configured to separate scattered light collected at different segments of a collection NA of the collection subsystem, the sensor configured to detect one segment of the different segments, and the system includes another sensor configured to detect another segment of the different segments. In one such embodiment, the system is configured to change or replace the optical element depending on one segment of the different segments detected by the sensor and the other segment of the different segments detected by the other sensor. Such an embodiment may be configured as further described and illustrated herein.

[0100] Another embodiment includes an optical element configured to separate scattered light collected at different segments of a collection NA of the collection subsystem, and the sensor is configured to detect one segment of the different segments using one portion of the sensor and detect another segment of the different segments using a different portion of the sensor, where the one portion of the sensor and the other portion do not overlap each other and are not adjacent on the sensor. Such an embodiment may be configured as further described and illustrated herein.

[0101] In some embodiments, the system includes an additional sensor including an image intensifier, the collection subsystem configured to image light scattered from substantially the same area on the wafer to the additional sensor, the additional sensor generating an additional output for the scattered light, and the computer subsystem configured to use the additional output instead of the output at the sensor when sensor electronic noise dominates the total channel noise to detect defects on the wafer. Such embodiments may be configured as further described and illustrated herein.

[0102] In another embodiment, the system includes an additional sensor configured for photon counting, the collection subsystem configured to image light scattered from substantially the same area on the wafer to the additional sensor, the additional sensor generating an additional output for the scattered light, and the computer subsystem configured to use the additional output to detect defects on the wafer. Such embodiments may be configured as further described herein.

[0103] In one embodiment, the system includes a MEMS-based optical switching device disposed between the collection subsystem and the sensor. In one such embodiment, the system includes at least one further sensor, the multiple light beams include pulses of light, the scattered light includes pulses of scattered light, and the optical switching device is configured to direct a first pulse of scattered light of the pulses of scattered light generated by the first set of pulses of light to the sensor and a second pulse of scattered light of the pulses of scattered light generated by the second set of pulses of light following the first set of pulses of light to the at least one further sensor. In another such embodiment, the multiple light beams include pulses of light, the scattered light includes pulses of scattered light, and the optical switching device is configured to separate the scattered light collected at different segments of the collection NA of the collection subsystem, and the optical switching device is configured to direct only one segment of the different segments of the pulses of scattered light generated by the first set of pulses of light to the sensor and then direct only another segment of the different segments of the pulses of scattered light generated by the second set of pulses of light following the first set of pulses of light to the sensor. Such an embodiment may be configured as further described and illustrated herein.

[0104] In one embodiment, the multiple light beams include pulses of light, the scattered light includes pulses of scattered light, the scanning subsystem is configured to scan the pulses of light across the wafer by rotating the wafer, and the illumination subsystem is configured to direct the pulses of light to substantially the same area on the wafer less frequently when the pulses of light are scanned across a central region of the wafer than when the pulses of light are scanned across the wafer outside the central region. Such embodiments may be configured as further described herein.

[0105] In another embodiment, the multiple light beams include pulses of light, the scattered light includes pulses of scattered light, the scanning subsystem is configured to scan the pulses of light within the wafer by rotating and translating the wafer, the sensor includes an area sensor, and when the pulses of light are scanned across a central region of the wafer, the scanning subsystem scans the pulses of light within the wafer in one or more non-curved straight lines, and when the pulses of light are scanned within the wafer outside the central region, the scanning subsystem scans the pulses of light within the wafer in a spiral manner. Such embodiments may be configured as further described herein.

[0106] Each of the above described embodiments may be configured as described herein.

[0107] Further embodiments relate to a system configured to inspect a wafer, the system including an illumination subsystem configured to direct a first pulsed light beam of a plurality of pulsed light beams to an area on the wafer earlier in time than a second pulsed light beam of the plurality of pulsed light beams directed to the area by the illumination subsystem, the first pulsed light beam and the second pulsed light beam of the plurality of pulsed light beams having different shapes and sizes from one another on the wafer, the first pulsed light beam and the second pulsed light beam of the plurality of pulsed light beams having different wavelengths from one another, different polarizations from one another, or different wavelengths and polarizations from one another, the illumination subsystem may be configured as further described and illustrated herein.

[0108] The system also includes a scanning subsystem configured to scan the plurality of pulsed light beams across the wafer. The scanning subsystem may be configured as further described and illustrated herein. The system further includes a collection subsystem configured to image light scattered from an area on the wafer to one or more sensors. The one or more sensors generate an output in response to the scattered light. The collection subsystem and the sensors may be configured as further described and illustrated herein.

[0109] The system further includes a computer subsystem configured to detect defects on the wafer using the output of the one or more sensors and to use the output for light scattered from the area due to illumination by a first pulsed light beam of the multiple pulsed light beams to determine a power of a second pulsed light beam of the multiple pulsed light beams to be directed to the area. The computer subsystem may be configured as further described and illustrated herein.

[0110] In one embodiment, the illumination subsystem includes a Q-switched laser, and the computer subsystem attenuates the power of the Q-switched laser based on the determined power. In another embodiment, the illumination subsystem includes a Q-switched laser, and if the determined power is zero, the computer subsystem prevents the Q-switched laser from generating a second pulsed light beam of the plurality of pulsed light beams that would illuminate the area. In a further embodiment, the computer subsystem is configured to monitor a power of the second pulsed light beam of the plurality of pulsed light beams that is actually directed to the area, and alter one or more parameters of the system based on the power directed to the area to normalize the power of the second pulsed light beam of the plurality of pulsed light beams that is actually directed to the area. Such embodiments may be configured as further described herein.

[0111] Each of the above described embodiments may be configured as described herein.

[0112] A further embodiment relates to a system configured to inspect a wafer that includes an illumination subsystem configured to direct pulses of light to an area on the wafer, the illumination subsystem may be configured as further described and illustrated herein.

[0113] In one embodiment, the illumination subsystem includes a frequency converted laser, the multiple light beams include pulses of light, the pulses of light directed to the area on the wafer do not vary spatially over the duration of the pulses of light and have a substantially constant intensity over the duration of the pulses of light, and the pulses of light illuminate the area on the wafer in an area illumination mode. In one such embodiment, the illumination subsystem includes beam shaping optics coupled to the laser. In another embodiment, the illumination subsystem includes a frequency converted laser, the pulses of light directed to the area on the wafer have a substantially constant intensity over the duration of the pulses of light, and the pulses of light illuminate the area on the wafer in an area illumination mode. These embodiments may be configured as further described and illustrated herein.

[0114] The system also includes a scanning subsystem configured to scan the pulses of light across the wafer, The scanning subsystem may be configured as further described and illustrated herein.

[0115] In one embodiment, the scanning subsystem is configured to scan the pulses of light across the wafer by rotating the wafer, and when the pulses of light are scanned across a central region of the wafer, the illumination subsystem is configured to direct the pulses of light to areas on the wafer less frequently than when the pulses of light are scanned across the wafer outside the central region. Such embodiments may be configured as further described herein.

[0116] In another embodiment, the scanning subsystem is configured to scan the pulse of light across the wafer by rotating and translating the wafer, and the sensor includes an area sensor, where the scanning subsystem scans the pulse of light across the wafer in one or more non-curved straight lines when the pulse of light is scanned across a central region of the wafer, and where the scanning subsystem scans the pulse of light across the wafer in a spiral manner when the pulse of light is scanned across the wafer outside the central region. Such embodiments may be configured as further described herein.

[0117] Laser repetition rates of 1 kHz or higher are generally acceptable. One obvious drawback of relatively high repetition rates or CW lasers for rotating area inspection systems is the undesirably high data rate required to avoid smearing of the image during a single sensor acquisition cycle. However, a low repetition rate may increase the probability of wafer damage. Some wafers (e.g., wafers containing organic films) are more easily damaged. For the same average laser intensity incident on the wafer, a low repetition rate will be more likely to damage the wafer than a high repetition rate if nonlinear heating effects are ignored. A relatively low repetition rate spreads the intensity of the laser illumination over a large area, thereby reducing the probability of damage, but increases the field of view requirements of the optics and possibly the sensor size requirements, adding significant cost to the system. The maximum laser repetition rate may be similarly constrained by the maximum sensor frame rate, in terms of one laser pulse / frame. However, the sensor frame rate may possibly be increased by reducing the number of active pixels or elements on the sensor.

[0118] To improve sensitivity while avoiding surface damage, multiple laser pulses can be used per area on the wafer. The sample is still moved continuously, but there is a large overlap in the exposed area between subsequent light source pulses. In this case, the sensor speed (frame rate) can be increased to maintain inspection throughput. The scattering signal generated by each individual laser pulse can be read out from the sensor, aligned, overlapped, and processed in post-sensor hardware or software.

[0119] Alternatively, the system includes a collection subsystem configured to image pulses of light scattered from an area on the wafer onto a sensor. The sensor is configured to integrate a number of pulses of scattered light that is less than the number of pulses of scattered light that can be imaged onto the entire area of ​​the sensor. Thus, the sensor can be run in partial TDI mode / partial CCD mode. For example, the sensor can be run in TDI mode to effectively optically integrate one or more (or another suitably small number) pulses. In some embodiments, the number of pulses integrated by the sensor is one pulse of scattered light, and the sensor integrates for the duration of one pulse of scattered light and then transfers any charge for one pulse of scattered light out of the sensor. Having only a small number of pulses can limit the "smearing" effect of rectangular sensors operating on r-theta inspection systems. For example, the number of pixels integrated can be only 2 or 3 pixels, which can be achieved by limiting the number of pixels integrated, which differs from the integration method typically performed using sensors (e.g., pixels over the entire sensor are typically integrated). The sensor is configured to generate an output for the integrated pulse of scattered light. The collection subsystem and the sensor may be further configured as described and shown herein. Such embodiments may also be configured as described in U.S. patent application Ser. No. 61 / 569,611, filed Dec. 12, 2011, which is incorporated by reference as if fully set forth herein.

[0120] In one embodiment, the collection subsystem includes a scattered light collector having a resolution that is not fully diffraction limited. Such an embodiment may be further configured as described herein.

[0121] In one embodiment, the scanning subsystem is configured to scan the pulses of light across the wafer by rotating and translating the wafer, and the sensor includes a rectangular array of pixels. For example, as shown in FIG. 14, the sensor 1400 can include a rectangular array of pixels 1402.

[0122] In another embodiment, the collection subsystem includes one or more anamorphic optical elements configured to image all of the scattered light within one of the pulses of scattered light onto only one pixel of the sensor. For example, the anamorphic ratio of the optical components included in the collection subsystem can be changed to collect all the light onto one pixel. One other way to solve the problem of the laser pulse extending across several pixels due to the duration of the laser pulse is to have a magnifying optical component that magnifies the smeared image of the spot so that it ends up round on the sensor instead of elliptical. One of the optical axes will have a different magnification than the other axis. Apart from the problem of laser pulses of finite duration, these anamorphic optical configurations can be used to match channels that use optical sensors with different aspect ratios, resolutions, and / or sizes.

[0123] In a further embodiment, the sensor integrates in one direction for the duration of the pulse of scattered light and transfers any charge for the pulse of scattered light bidirectionally off the sensor. For example, as shown in FIG. 14, the sensor integrates in one direction as indicated by arrow 1404 and then transfers any charge bidirectionally as indicated by arrow 1406. As further shown in FIG. 14, the direction of integration can be perpendicular to the direction of charge transfer. Thus, the sensor can integrate for the duration of the pulse and then reverse the charge transfer direction on the sensor. Furthermore, the sensor can be a CCD, and many CCDs allow charge to be transferred from both sides of the CCD, thereby effectively doubling the data rate. However, the laser spot only smears towards one side of the sensor. Thus, if one integrates in one direction and then stops when the laser pulse ends and then shifts the charge off bidirectionally, most of the data rate / throughput is obtained while still optically integrating all the light.

[0124] In some embodiments, the sensor includes an image intensifier and an area sensor, and the sensor integrates for the duration of the pulse of scattered light and until all the fluorescent energy of the image intensifier corresponding to the pulse of scattered light has completely decayed. In such embodiments, the sensor can be a TDI sensor, a CCD, or a CMOS sensor. For example, if the sensor detects the output of an image intensifier, the image intensifier contains fluorescent light (like a TV) that takes a relatively long time to decay. The pixels of the sensor can be integrated for as long as necessary to collect all this fluorescent energy, and then the transfer of charge (in the case of a CCD) or the readout of the pixel voltages (in the case of a CMOS) can begin. Obviously, this sacrifices throughput by waiting for the fluorescent light to decay, but at least all the energy will be collected in a small number of pixels. Such embodiments can be configured as described and shown herein.

[0125] In one embodiment, the sensor detects only pulses of scattered light having a predetermined arrival time synchronized in time with the pulses of light. In one such embodiment, the pulses of scattered light having a predetermined arrival time include fluorescence or photoluminescence. Such an embodiment may be configured as described and shown herein.

[0126] The system includes a computer subsystem configured to detect defects on the wafer using output generated by the sensor, The computer subsystem may be further configured as described and illustrated herein.

[0127] In one embodiment, the system includes an optical element configured to separate pulses of scattered light collected at different segments of a collection NA of the collection subsystem, the sensor configured to detect one segment of the different segments, and the system includes another sensor configured to detect another segment of the different segments. In one such embodiment, the system is configured to change or replace the optical element depending on one segment of the different segments detected by the sensor and the other segment of the different segments detected by the other sensor. Such an embodiment may be further configured as described and illustrated herein.

[0128] In one embodiment, the system includes an optical element configured to separate pulses of scattered light collected at different segments of a collection NA of the collection subsystem, and the sensor is configured to detect one segment of the different segments using one portion of the sensor and detect another segment of the different segments using a different portion of the sensor, where the one portion of the sensor and the other portion do not overlap each other and are not adjacent on the sensor. Such an embodiment may be further configured as described and illustrated herein.

[0129] In some embodiments, the system includes an additional sensor including an image intensifier, the collection subsystem configured to image the pulse of light scattered from the area on the wafer to the additional sensor, the additional sensor generating an additional output in response to the pulse of scattered light, and the computer subsystem configured to use the additional output instead of the output at the sensor when sensor electronic noise dominates the total channel noise to detect defects on the wafer. Such embodiments may be further configured as described and illustrated herein.

[0130] In an embodiment, the system includes an additional sensor configured for photon counting, the collection subsystem configured to image the pulses of light scattered from the area on the wafer to the additional sensor, the additional sensor generating an additional output in response to the pulses of scattered light, and the computer subsystem configured to use the additional output to detect defects on the wafer. Such embodiments may be further configured as described and illustrated herein.

[0131] In some embodiments, the system includes a microelectromechanical system based optical switching device disposed between the collection subsystem and the sensor. In one such embodiment, the system includes at least one further sensor, and the optical switching device is configured to direct a first scattered light pulse of the pulses of scattered light generated by the first light pulse of the pulses of light to the sensor and a second scattered light pulse of the pulses of scattered light generated by the second light pulse of the pulses of light following the first light pulse of the pulses of light to the at least one further sensor. In another such embodiment, the optical switching device is configured to separate the pulses of scattered light collected at different segments of the collection NA of the collection subsystem, and the optical switching device is configured to direct only one segment of the different segments of scattered light generated by the first light pulse of the pulses of light to the sensor and then direct only another segment of the different segments of scattered light generated by the second light pulse of the pulses of light following the first light pulse of the pulses of light to the sensor. Such embodiments may be configured as further described and illustrated herein.

[0132] Each of the above described embodiments may be further configured as described herein.

[0133] Another embodiment relates to a system configured to inspect a wafer. The system includes an illumination subsystem configured to direct light to an area on the wafer. The illumination subsystem may be configured as further described and illustrated herein. The system includes a scanning subsystem configured to scan the light across the wafer. The scanning subsystem may be configured as further described and illustrated herein. Additionally, the system includes a collection subsystem configured to image light scattered from the area on the wafer to a sensor. The sensor is configured to generate an output in response to the scattered light. The collection subsystem and the sensor may be configured as further described and illustrated herein.

[0134] The system further includes a computer subsystem configured to detect point defects on the wafer using the output generated by the sensor, determine the size in pixels of the point defects, determine the focus state of the system based on the size of the point defects, and modify one or more parameters of the system based on the focus state. Thus, the system can perform autofocus by looking at the point spread function of the defects. In other words, one possible means of determining the height of the wafer is to look at the size of the point defects in pixels detected by the actual inspection process. Thus, the embodiments described herein can be configured to measure the focus state by the inspection algorithm. In particular, since many defects detected on a non-patterned inspection system will be point defects on top of a substantially small background, the algorithms that detect these defects, imaged on the 2D sensor, can also characterize the size of these defects. If the defects are larger than the defects specified by the system calibration, this can correspond to a defocus state. 15, a defect 1500 imaged onto a two-dimensional sensor 1502 will have one size when the system is in focus, and a defect 1504 imaged onto the two-dimensional sensor 1502 will have a different (e.g., larger) size when the system is out of focus. Such an embodiment may make a separate auto-focus detection system unnecessary, or existing auto-focus detection systems may be made simpler.

[0135] The one or more parameters of the system that are altered by the computer subsystem may include the position of the inspection illumination, the position of the illumination optics, the position of the collection optics, the wafer height, the tilt of the chuck, or the temperature and / or pressure within the inspection system. The one or more parameters may be altered using feed-forward techniques. The depth of focus of the system depends on the apertures and / or polarizers present in the collection optics between the wafer and the sensor as previously described, and the system operation may be configured to reflect these various modes that are developed to optimize the inspection of different types of wafers.

[0136] Determining the wafer height based on the size of the point defect is most advantageously done in non-patterned inspection applications. In patterned wafer inspection applications, there are many different structures on the wafer that scatter light on the sensor. Each of these structures can be smaller or larger in size than the point spread function of the imaging lens. It becomes difficult to ascertain which scattered light pattern in any particular sensor frame will provide an adequate autofocus error signal. On the other hand, in non-patterned inspection applications, many defects are point defects and are substantially smaller in size than the point spread function of the imaging system (which can be about 250-300 nm), and therefore will appear on the sensor to be approximately the exact size of the point spread function. In this case, the deviation can be easily calculated.

[0137] In one embodiment, the computer subsystem is configured to determine the focus state and to alter one or more parameters during an inspection process performed on the wafer. In this manner, the computer subsystem may control the focus in situ, thereby maintaining the wafer in focus during the inspection process. The computer subsystem may be configured in any suitable manner to perform the in situ control.

[0138] In another embodiment, the system includes a further subsystem configured to direct another light to a further area on the wafer prior to the light directed to the area by the illumination subsystem, the further subsystem includes a further sensor configured to detect light scattered from the further area, and the computer subsystem is configured to modify the power of the light directed to the area by the illumination subsystem based on the detected light scattered from the further area. The area and the further area may be configured as shown in FIG. 11, except that they do not necessarily have different sizes and shapes in this embodiment. Furthermore, the further subsystem may be arranged in a manner similar to that shown in FIG. 12, with one of the light sources 1200, 1202, and 1204 being used as a light source for the further subsystem and one of the sensors 130 and 502 being used as a sensor for the further subsystem. In this manner, both the further subsystem and the main inspection subsystem may utilize some of the same optical elements, such as the refractive optical element 912 and the scattered light collector 122. The further subsystem may include any other suitable optical elements. The computer subsystem may be configured to modify the power of the light directed to the area by the illumination subsystem, as further described herein in this embodiment.

[0139] In some embodiments, the collection subsystem is configured to image the light scattered from the area on the wafer to one or more additional sensors, the one or more additional sensors are configured to generate an output for the scattered light, each of the sensor and the one or more additional sensors is configured to detect the scattered light collected at a different segment of the collection NA of the collection subsystem, and the computer subsystem is configured to detect point defects on the wafer using the output generated by the one or more additional sensors, determine different sizes in pixels for at least one of the point defects using the different outputs generated by the one or more additional sensors for at least one of the point defects, respectively, determine a weighted size for at least one of the point defects based on the size and the different sizes, determine a focus state of the system based on the weighted size, and modify one or more parameters of the system based on the focus state. For example, the point spread function can be weighted by various channels (each channel collects a different part of the scattering hemisphere and therefore generates a slightly different point spread function) to obtain a better feedback signal. The collection subsystem, the additional sensors, and the computer subsystem can be further configured as described herein.

[0140] In another embodiment, the collection subsystem is configured to image light scattered from different point defects on the wafer onto different portions of the sensor, and the computer subsystem is configured to determine whether and how much the wafer is tilted based on a relationship between the sizes of the different point defects and the different portions of the sensor on which the light scattered from the different point defects is imaged. For example, wafer tilt can be corrected in real time by tilting a gripping chuck based on the response across the sensor (a point spread function for one defect at the edge of the sensor relative to a point spread function for another defect at the center of the sensor can indicate that the wafer is not level and therefore tilted).

[0141] Each of the above described embodiments may be further configured as described herein.

[0142] A further embodiment relates to a system configured to inspect a wafer, the system including an illumination subsystem configured to direct light to an area on the wafer, the light illuminating the area on the wafer in an area illumination mode, the illumination subsystem may be configured as further described and illustrated herein.

[0143] In one embodiment, the illumination subsystem includes a frequency converted laser, the light includes pulses of light, and the pulses of light directed to the area on the wafer do not vary spatially over the duration of the pulses of light and have a substantially constant intensity over the duration of the pulses of light. In one such embodiment, the illumination subsystem includes beam shaping optics coupled to the laser. Such an embodiment may be further configured as described and illustrated herein. In some embodiments, the illumination subsystem includes a frequency converted laser, the light includes pulses of light, and the pulses of light directed to the area on the wafer have a substantially constant intensity over the duration of the pulses of light. Such an embodiment may be further configured as described herein.

[0144] The system also includes a scanning subsystem configured to scan the light across the wafer, The scanning subsystem may be configured as further described and illustrated herein.

[0145] In one embodiment, the light comprises pulses of light, the scattered light comprises pulses of scattered light, and the scanning subsystem is configured to scan the pulses of light within the wafer by rotating the wafer, and when the pulses of light are scanned across a central region of the wafer, the illumination subsystem is configured to direct the pulses of light to an area on the wafer less frequently than when the pulses of light are scanned across the wafer outside the central region. In another embodiment, the light comprises pulses of light, the scattered light comprises pulses of scattered light, and the scanning subsystem is configured to scan the pulses of light within the wafer by rotating and translating the wafer, and the sensor comprises an area sensor, and when the pulses of light are scanned across the central region of the wafer, the scanning subsystem scans the pulses of light within the wafer in one or more non-curved straight lines, and when the pulses of light are scanned across the wafer outside the central region, the scanning subsystem scans the pulses of light within the wafer in a spiral manner. Such embodiments may be further configured as described herein.

[0146] The system further includes a collection subsystem configured to image light scattered from the area on the wafer to a sensor configured to generate an output in response to the scattered light, the collection subsystem and the sensor may be further configured as described herein.

[0147] In one embodiment, the light comprises pulses of light, the scattered light comprises pulses of scattered light, and the sensor detects only pulses of scattered light having a predetermined arrival time synchronized in time to the pulses of light. In one such embodiment, the pulses of scattered light having a predetermined arrival time comprise fluorescence or photoluminescence. Such an embodiment may be further configured as described herein.

[0148] The system also includes a computer subsystem configured to detect defects on the wafer using output generated by the sensor, The computer subsystem may be configured as further described and illustrated herein.

[0149] In one embodiment, the system includes an additional sensor including an image intensifier, the collection subsystem configured to image light scattered from an area on the wafer to the additional sensor, the additional sensor generating an additional output for the scattered light, and the computer subsystem configured to use the additional output instead of an output at the sensor when sensor electronic noise dominates the total channel noise to detect defects on the wafer. Such an embodiment may be further configured as described and illustrated herein.

[0150] In another embodiment, the system includes an additional sensor configured for photon counting, the collection subsystem configured to image light scattered from an area on the wafer to the additional sensor, the additional sensor generating an additional output for the scattered light, and the computer subsystem configured to detect defects on the wafer using the additional output. Such embodiments may be further configured as described herein.

[0151] In some embodiments, the system includes a MEMS-based optical switching device disposed between the collection subsystem and the sensor. In one such embodiment, the system includes at least one further sensor, the light includes pulses of light, the scattered light includes pulses of scattered light, and the optical switching device is configured to direct a first scattered light pulse of the pulses of scattered light generated by a first light pulse of the pulses of light to the sensor and a second scattered light pulse of the pulses of scattered light generated by a second light pulse of the pulses of light following the first light pulse of the pulses of light to the at least one further sensor. In another such embodiment, the light includes pulses of light, the scattered light includes pulses of scattered light, and the optical switching device is configured to separate the pulses of scattered light collected at different segments of the collection NA of the collection subsystem, and the optical switching device is configured to direct only one segment of the different segments of the pulses of scattered light generated by the first light pulse of the pulses of light to the sensor and then direct only another segment of the different segments of the pulses of scattered light generated by a second light pulse of the pulses of light following the first light pulse of the pulses of light to the sensor. Such embodiments may be further configured as described herein.

[0152] Each of the above described embodiments may be further configured as described herein.

[0153] Any of the systems described herein may include additional channels and / or subsystems (not shown) designed to detect defects independently or in conjunction with the main inspection optical channel described above. One example of such an additional channel is a Nomarski differential interference contrast (DIC) "bright field" channel.

[0154] All channels of any of the inspection systems described herein generate information regarding surface quality as well as defects of interest. Outputs from multiple channels can be combined by various logical means and / or various arithmetic operations as described in U.S. Patent Application Publication No. 2010 / 0188657, published July 29, 2010 to Chen et al., and U.S. Patent Application Publication No. 2012 / 0044486, published February 23, 2012 to Chen et al., which are incorporated by reference as if fully set forth herein in their entirety. Sometimes this is referred to as image or channel fusion, which advantageously improves anomaly capture rates while reducing false count rates.

[0155] The embodiments described herein may also be further configured as described in U.S. Pat. No. 7,286,697 to Guetta, U.S. Pat. No. 7,339,661 to Korngut et al., U.S. Pat. No. 7,525,659 to Furman et al., U.S. Pat. No. 7,826,049 to Furman et al., and U.S. Pat. No. 7,843,558 to Furman et al., all of which are incorporated by reference as if fully set forth herein.

[0156] Further modifications and alternative embodiments of various aspects of the invention may be apparent to those skilled in the art in view of this description. For example, a system configured to inspect a wafer is provided. This description is therefore to be construed as illustrative only and is intended to teach those skilled in the art the general manner of carrying out the invention. The forms of the invention shown and described herein are presently considered to be preferred embodiments. Elements and materials may be substituted for those shown and described herein, components and processes may be reversed, and certain features of the invention may be utilized independently, all as will become apparent to those skilled in the art after having the benefit of the description of the invention. Changes may be made in the elements described herein without departing from the spirit and scope of the invention as set forth in the appended claims.

Claims

1. 1. A system configured to inspect a wafer, comprising: an illumination subsystem configured to direct light to an area on the wafer; a scanning subsystem configured to scan light across the wafer; a collection subsystem configured to image light scattered from the area on the wafer to a sensor, the sensor configured to generate an output in response to the scattered light; a computer subsystem configured to detect defects on the wafer using the output generated by the sensor; The sensor includes: It consists of a multiplier sensor and a non-multiplier sensor. the collection subsystem directs the scattered light to the multiplied sensor during relatively low light conditions during the scan and directs the scattered light to the non-multiplied sensor during relatively high light conditions; a microelectromechanical systems based optical switching device disposed between the collection subsystem and the sensor; the light comprises pulses of light, the scattered light comprises pulses of scattered light, the optical switching device is configured to separate the pulses of scattered light collected at different segments of a collection numerical aperture of the collection subsystem, the optical switching device is configured to direct only one segment of the different segments of the pulses of scattered light generated by a first pulse of light of the pulses of light to the multiplied sensor, and then to direct only another segment of the different segments of the pulses of scattered light generated by a second pulse of light of the pulses of light following the first pulse of light of the pulses of light to the non-multiplied sensor. system.

2. 10. The system of claim 1, wherein the illumination subsystem comprises a frequency converted laser, the light comprises pulses of light, and the pulses of light directed to the area on the wafer do not vary spatially over a duration of the pulse of light and have a substantially constant intensity over a duration of the pulse of light.

3. The system of claim 2 , wherein the illumination subsystem further comprises a beam shaping optical element coupled to the laser.

4. 10. The system of claim 1 , wherein the illumination subsystem comprises a frequency converted laser, the light comprises pulses of light, and the pulses of light directed to the area on the wafer have a substantially constant intensity over the duration of the pulses of light.

5. 2. The system of claim 1, wherein the light comprises pulses of light, the scattered light comprises pulses of scattered light, and the sensor detects only the pulses of scattered light having a predetermined arrival time synchronized with the pulses of light.

6. The system of claim 5 , wherein the pulse of scattered light having the predetermined arrival time comprises fluorescence or photoluminescence.

7. 2. The system of claim 1 , wherein the light comprises pulses of light, and the scattered light comprises pulses of scattered light, and the scanning subsystem is further configured to scan the pulses of light across the wafer by rotating the wafer, and wherein when the pulses of light are scanned across a central region of the wafer, the illumination subsystem is further configured to direct the pulses of light to the area on the wafer less frequently than when the pulses of light are scanned across the wafer outside of the central region.

8. 2. The system of claim 1 , wherein the light comprises a pulse of light, the scattered light comprises a pulse of scattered light, the scanning subsystem is further configured to scan the pulse of light across the wafer by rotating and translating the wafer, the sensor comprising an area sensor, wherein the scanning subsystem scans the pulse of light across the wafer in one or more non-curved straight lines when the pulse of light is scanned across a central region of the wafer, and wherein the scanning subsystem scans the pulse of light across the wafer in a spiral manner when the pulse of light is scanned across the wafer outside of the central region.

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