Laser Processing Equipment

Abstract

A laser beam condensed by a condensing optical system is incident upon an optical fiber (200). A radiating mechanism (301) radiates light emitted from the optical fiber (200) onto a target object. A movement mechanism (302) causes a radiation region of the laser beam on the target object to move. The optical fiber (200) has a core including a surface of incidence upon which the laser beam condensed by the condensing optical system is incident. The shape of the surface of incidence is a first elongate shape which is longer in a first direction than in a second direction, the first direction and the second direction being orthogonal to one another. The shape of the radiation region is a second elongate shape corresponding to the first elongate shape. The movement mechanism (302) causes the radiation region to move in the first direction.

Description

[Technical field]

[0001] The present disclosure relates to a laser processing apparatus. [Background technology]

[0002] JP 2017-152630 A (Patent Document 1) proposes a laser light output device that outputs laser light. This laser light output device includes a plurality of light sources arranged in an array, a light collecting unit, and an optical fiber. Each of the plurality of light sources outputs a laser light. The light collecting unit collects the plurality of laser light beams output from the plurality of light sources. The collected laser light is incident on the optical fiber. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2017-152630 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-mentioned laser light output device, the light source can be arrayed to achieve high output. In general, in a laser processing device, it is desirable to increase the power density applied to a processing object.

[0005] The present disclosure has been made to solve such problems, and has an object to provide a laser processing apparatus that increases the power density applied to an object to be processed. [Means for solving the problem]

[0006] The laser processing apparatus of the present disclosure includes a plurality of light sources, a focusing optical system, an optical fiber, an irradiation mechanism, and a moving mechanism. The plurality of light sources output laser light. The focusing optical system focuses the laser light output from the plurality of light sources. The laser light focused by the focusing optical system is incident on the optical fiber. The irradiation mechanism irradiates the light emitted from the optical fiber to an object. The moving mechanism moves an irradiation area of ​​the laser light on the object. The optical fiber has a core including an incident surface on which the laser light focused by the focusing optical system is incident. The shape of the incident surface is a first elongated shape that is longer in the first direction than in the second direction in a first direction and a second direction that are orthogonal to each other. The shape of the irradiation area is a second elongated shape that corresponds to the first elongated shape. The moving mechanism moves the irradiation area in the first direction. Effect of the Invention

[0007] In the laser processing apparatus of the present disclosure, the power density applied to the workpiece can be increased. [Brief description of the drawings]

[0008] [Figure 1] 1 is a diagram for explaining the overall configuration of a laser processing apparatus according to an embodiment of the present invention; [Diagram 2] FIG. 2 is a diagram for explaining a configuration of a light source unit. [Diagram 3] FIG. 2 is a diagram for explaining an example of an arrangement of a plurality of light sources. [Figure 4] FIG. 2 is a diagram for explaining an example of a first surface of an optical fiber. [Diagram 5] 1 is a diagram for explaining an irradiation area of ​​a laser beam on an object; [Figure 6] FIG. 4 is a diagram for explaining an irradiation mode of the laser processing device of the first comparative example. [Figure 7] 4A to 4C are diagrams for explaining an irradiation mode of the laser processing apparatus according to the embodiment. [Figure 8] 10A and 10B are diagrams for explaining the power density given to a region of interest, etc.; [Figure 9]11 is a diagram for illustrating a comparison between the laser processing device of the present embodiment and a laser processing device of a second comparative example. FIG. [Figure 10] 11 is a diagram for explaining the energy density when the irradiation area has a circular shape. FIG. [Figure 11] 11 is a diagram for explaining the energy density when the irradiation region has a rectangular shape. FIG. [Figure 12] FIG. 13 is a diagram for explaining a laser processing device of a third comparative example. [Figure 13] FIG. 11 is a diagram for explaining a laser processing apparatus according to a second embodiment. [Figure 14] FIG. 13 is a diagram for explaining an irradiation region according to a third embodiment. [Figure 15] 13 is a diagram for explaining an entrance surface of a core according to the third embodiment. FIG. [Figure 16] FIG. 13 is a diagram for explaining a configuration example of a laser processing device according to a fourth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the drawings, the same or corresponding parts are designated by the same reference characters and their description will not be repeated.

[0010] <First embodiment> [Overall configuration of laser processing equipment] FIG. 1 is a diagram for explaining the overall configuration of a laser processing apparatus 500. The laser processing apparatus 500 according to this embodiment irradiates a processing object (hereinafter also referred to as "object 300" or work) with laser light to heat the object 300. As a result, the laser processing apparatus 500 processes the material constituting the object 300 by melting or evaporating it. In this embodiment, the processing includes welding and cutting. Note that the processing may be a process of forming a recess in the object.

[0011] The laser processing apparatus 500 includes a light source unit 100, an optical fiber 200, an irradiation mechanism 301, a moving mechanism 302, a placement stage 303, and a control device 400. On the placement stage 303, an object 300 is placed.

[0012] The configuration of the light source unit 100 will be described later with reference to FIG. 2. The optical fiber 200 receives the laser light from the light source unit 100 and propagates the laser light. FIG. 1 shows an incident surface 205A and an exit surface 205B of the optical fiber 200, which will be described later. The irradiation mechanism 301 has a condenser lens (not shown). The irradiation mechanism 301 condenses the laser light emitted from the optical fiber 200 using the condenser lens, and irradiates the laser light on the object 300. The moving mechanism 302 moves the irradiation area of ​​the object 300 of the laser light LB (the laser light LB irradiated from the irradiation mechanism 301). In this embodiment, the moving mechanism 302 moves the irradiation area by moving the irradiation mechanism 301.

[0013] The control device 400 controls the light source unit 100 and the moving mechanism 302 based on commands input by a user, etc. Specifically, the control device 400 controls the light emission of the light source 2 (see FIG. 2) included in the light source unit 100. The control device 400 also controls the moving mechanism 302.

[0014] The control device 400 has, as its main components, a CPU (Central Processing Unit) 401, a memory 402, and a communication I / F (interface) 403. The components are connected to each other via a data bus. The memory 402 includes a ROM (Read Only Memory), a RAM (Random Access Memory), and the like.

[0015] The ROM stores programs executed by the CPU 401. The RAM temporarily stores data generated by the execution of the programs in the CPU 401. The RAM can function as a temporary data memory used as a working area.

[0016] The communication I / F 403 is an interface for outputting control signals to other devices under the control of the CPU 401. The other devices are, for example, the light source unit 100 and the movement mechanism 302.

[0017] [Light source unit configuration] Fig. 2 is a diagram for explaining the configuration of the light source unit 100. As described later, the laser light emitted from the light source described later has a fast axis direction and a slow axis direction. Fig. 2 is a diagram showing the arrangement of each part of the light source unit 100 in a plane including the slow axis and Z axis of the laser light.

[0018] 2, the left side is also referred to as the "upstream side in the optical axis direction of the light source unit 100," and the right side is also referred to as the "downstream side in the optical axis direction of the light source unit 100." Furthermore, the upstream side in the optical axis direction of the light source unit 100 may simply be referred to as the "upstream side," and the downstream side in the optical axis direction of the light source unit 100 may simply be referred to as the "downstream side." Furthermore, various optical systems will be described below, and the optical systems may be composed of one lens, or may be composed of two or more lenses, or may include components other than lenses.

[0019] In Fig. 2, the slow axis direction of the laser light (hereinafter also referred to as "parallel light") collimated by a collimating optical system 3 described below is the vertical axis direction. Also, in Fig. 2, the fast axis direction of the collimated laser light is the depth direction, and the optical axis direction of the collimated laser light is the Z axis direction. Also, in Fig. 2, the slow axis direction is also referred to as the Y1 axis direction, the fast axis direction is also referred to as the X1 axis direction, and the Z axis direction is also referred to as the Z1 axis direction.

[0020] 2, the light source unit 100 includes S (S is an integer equal to or greater than 2) light sources 2, S collimating optical systems 3, and a focusing optical system 41. The S light sources 2 are also referred to as a "light source group 2A." The S collimating optical systems 3 are also referred to as a "collimating optical system group 3A."

[0021] The S light sources 2 each output S laser beams. The S collimating optical systems 3 are disposed in the optical paths of the laser beams from the S light sources 2, i.e., on the optical axes of the S lasers, corresponding to each other. In other words, one light source 2 and one collimating optical system 3 are disposed in a one-to-one relationship.

[0022] Moreover, each collimating optical system 3 is disposed at a position where the optical axis from the light source 2 passes through the center of the collimating optical system 3 (the center of the collimating lens constituting the collimating optical system 3). Hereinafter, the optical path between the light source 2 and the collimating optical system 3 is also referred to as an "optical path LD." In the example of FIG. 2, there are S optical paths LD.

[0023] Each collimating optical system 3 has an incident surface 311 on which the laser light LB is incident, and an exit surface 312 from which the laser light LB is emitted. The incident surface 311 is formed of a flat surface. The exit surface 312 is formed of a curved convex surface.

[0024] The collimating optical system 3 collimates the laser light LB from the corresponding light source 2. Specifically, the collimating optical system 3 converts the laser light LB from the corresponding light source 2 into parallel light in both the slow axis direction and the fast axis direction. The collimating optical system 3 may be composed of a combination lens.

[0025] A focusing optical system 41 is disposed on the optical path of the laser light LB, downstream of the collimating optical system 3. An optical fiber 200 is disposed downstream of the focusing optical system 41.

[0026] The focusing optical system 41 is a lens that focuses each laser light LB toward the optical fiber 200. The focusing optical system 41 has an incident surface 411 on which the laser light LB is incident, and an exit surface 412 from which the laser light LB exits. The incident surface 411 is configured as a curved convex surface. The exit surface 412 is configured as a flat surface.

[0027] The optical fiber 200 has a long shape. The optical fiber 200 has a first surface 201 and a second surface 202. The first surface 201 is an end surface on the upstream side of the optical fiber 200. The second surface 202 is an end surface on the downstream side of the optical fiber 200. A plurality of laser beams LB collected by the collecting optical system 41 are incident on the first surface 201 at once. The laser beams LB pass through the optical fiber 200 and are guided to the second surface 202, and are emitted from the second surface 202. The emitted laser beams LB are input to an irradiation mechanism 301.

[0028] FIG. 3 is a diagram showing an example of an arrangement of S light sources 2. As shown in FIG. 3, the S light sources 2 are arranged in an array and two-dimensionally on the X1Y1 plane so as to form a rectangular (rectangular) shape. In the example of FIG. 3, the light sources 2 are arranged in N rows and M columns. N is an integer equal to or greater than 1, and more specifically, N is an integer equal to or greater than 2. M is an integer equal to or greater than 1, and more specifically, M is an integer equal to or greater than 2. S=M×N. The reason why the S light sources 2 are arranged in a rectangular (rectangular) shape in this way will be described later.

[0029] FIG. 4 is a diagram showing an example of the first surface 201 of the optical fiber 200. The optical fiber 200 has a core 205 and a cladding 206. The core 205 has an incident surface 205A. The laser light collected by the light collecting optical system 41 is incident on the incident surface 205A. The incident surface 205A has a shape in which the X1 axis direction is longer than the Y1 axis direction in the X1 axis direction and the Y1 axis direction which are perpendicular to each other. In this embodiment, the shape of the incident surface 205A is also referred to as a "first extension shape". In the example of FIG. 4, the shape of the incident surface 205A is a rectangle shape (rectangular shape). The long side of the incident surface 205A is the long side L3, and the short side is the short side L4. The core 205 has a long rectangular parallelepiped shape. That is, the shape of the exit surface of the core 205 is the same as the shape (rectangular shape) of the incident surface 205A.

[0030] 4, the beam diameter of the laser light collected by the collecting optical system 41 is elliptical. In this embodiment, the light source 2 is an edge-emitting laser diode. Therefore, the beam diameter in the fast axis direction is larger than the beam diameter in the slow axis direction, and the beam diameter is elliptical. In the present disclosure, the difference between the beam diameter in the fast axis direction and the beam diameter in the slow axis direction is also expressed as "having anisotropy."

[0031] FIG. 5 is a diagram showing an area (hereinafter also referred to as "irradiation area R") where the laser light LB from the irradiation mechanism 301 is irradiated on the target 300. Hereinafter, the shape of the irradiation area R is also referred to as "second extension shape". In the example of FIG. 5, the irradiation direction of the laser light is the Z2 axis direction. Also, the direction perpendicular to the Z2 axis direction is the X2 axis direction, and the direction perpendicular to the Z2 axis direction and the X2 axis direction is the "Y2 axis direction". Note that the X1 axis direction, Y1 axis direction, and Z1 axis direction in FIG. 4 may be the same as or different from the X2 axis direction, Y2 axis direction, and Z2 axis direction.

[0032] The irradiation area R has a shape in which the X2 axis direction is longer than the Y2 axis direction. The X2 axis direction corresponds to the "first direction" of the present disclosure, and the Y2 axis direction corresponds to the "second direction" of the present disclosure. In the example of FIG. 5, the irradiation area R has a rectangular shape. The irradiation area R also has a longitudinal direction (X2 axis direction, first direction) and a lateral direction (Y2 axis direction, second direction). The irradiation area R also has a long side L1 and a short side L2. The moving mechanism 302 moves the irradiation area R in the X2 axis direction (first direction, longitudinal direction) as indicated by the arrow P.

[0033] In this embodiment, the second extension shape (shape of the irradiation region R) is a shape corresponding to the first extension shape (shape of the incident surface 205A of the core 205). In other words, the first extension shape and the second extension shape are the same in shape type. For example, when the first extension shape is rectangular, the second extension shape may also be rectangular. In addition, the ratio of the long side to the short side may be the same in the first extension shape and the second extension shape. In this case, the following formula (1) is established.

[0034] L1:L2=L3:L4 (1) The array of the light sources 2 has a shape corresponding to the first elongated shape, that is, a rectangular shape. The ratio of the long side to the short side may be substantially the same in the array and the first elongated shape. In this case, the following formula (2) is satisfied.

[0035] L1:L2 = length according to M columns: length according to N rows (2) [Power density of laser light in the irradiation area] Next, a method for increasing the power density of the laser light in the irradiation region R will be described. In general, to increase the power density, it is necessary to increase the laser output value (≒ number of fiber couplings (number of light sources 2)) or reduce the area of ​​the irradiation region R (≒ fiber core area) (see formula (7) described later). However, as described later, it is difficult to increase the laser output value and reduce the area of ​​the irradiation region R at the same time.

[0036] Therefore, in the present embodiment, the first extension shape is made rectangular in order to increase the area of ​​the first extension shape, which allows the power density of the irradiation area to be virtually increased while increasing the laser output value, as described below.

[0037] First, the "output wattage (laser output value)" will be described. In order to increase the output wattage, the number of beams to be combined at the incident surface 205A of the optical fiber 200 (i.e., the number of light sources 2) should be increased. The maximum number C of beams to be combined is given by the following formula (3).

[0038] Maximum number of combined beams C=D / E (3) Here, D in formula (3) represents the beam quality that can be coupled to the optical fiber 200. Furthermore, E in formula (3) represents the beam quality in the fast axis direction of the laser light from the light source 2. Moreover, the beam quality D is represented by the following formula (4).

[0039] D = (π Lx NA) / 2λ (4) Here, Lx in formula (4) is the length of the side coinciding with the fast axis direction of the incident surface 205A (for example, the length of the long side L3 in the example of FIG. 4). Also, NA represents the aperture of the optical fiber 200. Also, λ represents the wavelength of the laser light from the light source 2.

[0040] In other words, combining equations (3) and (4) gives the following equation (5). C=(π Lx NA) / 2λ E (5) For example, when NA=0.2, λ=450 nm, the beam quality E in the fast axis direction of the laser light=1.3, and Lx=100 μm, the maximum number C of combined beams is 53. When NA=0.2, λ=450 nm, the beam quality E in the fast axis direction of the laser light=1.3, and Lx=200 μm, the maximum number C of combined beams is 107.

[0041] Furthermore, when Lx is a variable on the right side of equation (5) and values ​​other than Lx are constants, the output wattage G from the optical fiber 200 is expressed by the following equation (6).

[0042] Output wattage from optical fiber 200 G=a·Lx (6) Here, a in formula (6) is a constant. That is, as shown in formula (6), the output wattage G from the optical fiber 200 is proportional to the side Lx.

[0043] Next, we will explain the power density F. The power density F is expressed by the following formula (7). Power density F = output wattage G / area of ​​irradiation region R (7) As described above, when the laser processing apparatus 500 performs welding or cutting of the object 300 using a laser beam, the output of the optical fiber 200 is focused by the focusing optical system 41 or the like and irradiated onto the object 300. The area of ​​the irradiation region R (focused spot) on the object 300 is proportional to the area of ​​the entrance surface 205A of the core 205 of the optical fiber 200.

[0044] In the laser processing device 500, by making the irradiation area R smaller, finer processing is possible. In addition, by making the irradiation area R smaller, the power density is increased, and the penetration depth of the welding process or the thickness that can be cut by the cutting process can be increased. In addition, by moving the irradiation area at a low speed, the heat input to the object 300 per unit area can be increased. However, the speed of the cutting process or welding process is reduced. On the other hand, the laser processing device 500 can improve the speed of the cutting process or welding process by increasing the heat input to the object 300 per unit time or unit area. Therefore, it is not necessarily practical for processing purposes to focus only on increasing the output of the optical fiber 200 and increasing the area of ​​the incident surface 205A of the core 205 of the optical fiber 200, and a laser processing device 500 that achieves both high output and power density F is preferable.

[0045] As shown in formula (6), in order to increase the output wattage G, it is necessary to increase Lx and the number of light sources. However, when Lx is increased to increase the output wattage G, the area of ​​the incident surface 205A increases, and as a result, the "area of ​​the irradiation region R" in the denominator of the right side of formula (7) increases.

[0046] In other words, there is a trade-off between the laser output value (output wattage G) and the area of ​​the irradiation region R. Therefore, as described above, it is difficult to simultaneously increase the laser output value and reduce the area of ​​the irradiation region R. Therefore, conventionally, it has been difficult to increase the power density of the laser light in the irradiation region R.

[0047] Therefore, in the present embodiment, the irradiation region R is formed in the above-mentioned second elongated shape as shown in Fig. 5. This allows the laser processing apparatus 500 to increase the power density of the laser light in the irradiation region R of the target object 300, as will be described later.

[0048] Fig. 6 is a diagram showing an irradiation mode of the target 300 of the laser processing apparatus of the first comparative example. Fig. 7 is a diagram showing an irradiation mode of the target 300 of the laser processing apparatus 500 of this embodiment. The irradiation area in Fig. 6 and Fig. 7 is an area surrounded by a thick line. The irradiation area R1 of the laser processing apparatus of the first comparative example is a square, and the irradiation area R of the laser processing apparatus 500 of this embodiment is a rectangle as described above.

[0049] Moreover, the moving distance of the irradiation area R and the irradiation area R1 per unit time is a distance H. As shown in Fig. 6, the length L6 of one side of the square irradiation area R1 is twice the distance H. Moreover, the length L6 is half of L1 and twice the distance L2. As shown in Fig. 7, the long side L1 of the irradiation area R in this embodiment is four times the distance H, and the short side L2 is the same as the distance H.

[0050] 6 and 7 show the transition of the irradiation area for each unit time. Each time for each unit time is t1 to t5. Figs. 6(A) to 6(E) show the position of the irradiation area R1 at times t1 to t5, respectively. Figs. 7(A) to 7(E) show the position of the irradiation area R at times t1 to t5, respectively.

[0051] Also, the distance H is 50 μm. Therefore, the irradiation area R1 is a square area with one side of 100 μm, and the area of ​​the irradiation area R1 is 100 μm × 100 μm. Furthermore, the long side L1 of the irradiation area R is 200 μm, the short side L2 of the irradiation area R is 50 μm, and the area of ​​the irradiation area R is 50 μm × 200 μm. Therefore, the area of ​​the irradiation area R1 and the area of ​​the irradiation area R are the same.

[0052] In the laser processing apparatus of the first comparative example and the laser processing apparatus 500 of this embodiment, the number of light sources 2 is the same, and the output wattage G from the optical fiber 200 is 100 W in both cases.

[0053] Next, the power density given to the region of interest (hatched region) shown in Fig. 6 and Fig. 7 will be described. Fig. 8 is a diagram showing the power density given to the region of interest, etc. In the example of Fig. 8, "energy density given to the region of interest at each time t (t1 to t5)" and "power density given to the region of interest during the period from time t1 to time t5" are shown. In the example of Fig. 8, the energy density given to the region of interest during one unit time is assumed to be "A". The energy (J) given to the region of interest is expressed by the following formula (8).

[0054] Energy (J) = Power (W) x Time (s) (8) Moreover, the energy density is expressed by the following formula (9).

[0055] Energy density = Energy (J) / Area of ​​interest (cm 2 ) (9) In the example of FIG. 6, in the laser processing device of the first comparative example in which the irradiation region R1 is a square, the target region is not included in the irradiation region R1 at times t1, t2, and t5. Therefore, as shown in FIG. 8, the energy density given to the target region is 0 at times t1, t2, and t5. Also, in the example of FIG. 6, the target region is included in the irradiation region R1 at times t3 and t4. Therefore, the energy density given to the target region is A at times t3 and t4. Therefore, the integrated value of the energy given to the target region between times t1 and t5 is 2A·S. Here, S is the area value of the irradiation region R.

[0056] In the example of FIG. 7, in the laser processing apparatus of this embodiment in which the irradiation region R is rectangular, the region of interest is included in the irradiation region R from time t1 to t4. Therefore, the energy density applied to the region of interest is A from time t1 to t4. Furthermore, at time t5, the region of interest is not included in the irradiation region. Therefore, the energy density applied to the region of interest is 0 at time t5. Therefore, the integrated value of the energy applied to the region of interest between time t1 and time t5 is 4 A·S.

[0057] Here, when the irradiation time 5t is sufficiently short and the influence of the diffusion of thermal energy in the object 300 and the like can be ignored, for example, the virtual power density is expressed by the following formula (10).

[0058] Virtual power density (W / cm 2 ) = Integrated energy during irradiation time (=5t) / (irradiation time x area of ​​irradiation region) (10) Therefore, based on formula (10), as shown in the "Power density at t1 to t5" column in FIG. 8, the power density of the comparative example during the irradiation time (5t) is 2A / 5t (W / cm 2 In addition, the power density in this embodiment during the irradiation time (5t) is 4A / 5t (W / cm 2 ) Therefore, the laser processing apparatus of this embodiment can apply to the object 300 a power density that is twice as high as that of the laser processing apparatus of the comparative example.

[0059] As described above, as shown in FIG. 8, the integrated value of the energy density of the laser beam in the irradiation area of ​​the object 300 by the laser processing apparatus 500 of this embodiment can be made larger than the integrated value of the energy density of the laser beam in the irradiation area of ​​the object by the laser processing apparatus of the first comparative example. In other words, as shown in the column "Power density at t1 to t5" in FIG. 8, the laser processing apparatus 500 of this embodiment can virtually increase the power density of the irradiation area. Therefore, the laser processing apparatus 500 can increase the depth or thickness of the laser beam on the object 300. In addition, if the processing requires the same power density, the laser processing apparatus 500 of this embodiment can move the irradiation area at a faster speed than the laser processing apparatus of the first comparative example (the laser processing apparatus in which the irradiation area is in the forward direction).

[0060] The conditions under which the effect of increasing the virtual power density is obtained or the magnitude of the increase varies depending on predetermined parameters of the object 300. The parameters include, for example, at least one of the thermal conductivity of the object 300, the thermal diffusivity of the object 300, the light absorptance of the object 300 for the wavelength of the light source 2, and a method of holding the object 300.

[0061] 9 is a diagram showing a comparison between the laser processing apparatus 500 of this embodiment and the laser processing apparatus of the second comparative example. As shown in FIG. 9(A), the irradiation area of ​​the laser processing apparatus 500 of this embodiment is rectangular. FIG. 9(A) is a diagram showing the transition of the irradiation area R from time t1 to time t2. FIG. 9(A) also shows the overlap area Ra from time t1 to time t2. The overlap area Ra is an area where the irradiation area R at time t1 and the irradiation area R at time t2 overlap.

[0062] As shown in Fig. 9(B), the irradiation area of ​​the laser processing apparatus 500 of the second comparative example is circular. Fig. 9(B) is a diagram showing the transition of the irradiation area R2 from time t1 to time t2. Fig. 9(B) also shows the overlap area R2a from time t1 to time t2.

[0063] As shown in Fig. 9(B), the overlap region R2a is an area surrounded by a circular arc. Therefore, the area of ​​the overlap region R2a is smaller than the area of ​​the overlap region Ra shown in Fig. 9(A). Therefore, the integrated value of the power density of the laser light in the irradiated area of ​​the target 300 by the laser processing apparatus 500 of the present embodiment can be made larger than the integrated value of the power density of the laser light in the irradiated area of ​​the target by the laser processing apparatus of the second comparative example.

[0064] Fig. 10 is a diagram showing the energy density when the irradiation area is circular. Fig. 11 is a diagram showing the energy density when the irradiation area is rectangular. Fig. 10(A) and Fig. 11(A) are diagrams showing the energy density in the X2Y2 plane, and Fig. 10(B) and Fig. 10(B) are diagrams showing the energy density in the X2Z2 plane.

[0065] As shown in Fig. 10, when the irradiation area is circular, the energy density distribution in the irradiation area is a so-called Gaussian shape. In the Gaussian shape, the energy density in the center Q1 is higher than the energy density in the peripheral area Q2. As shown in Fig. 11, when the irradiation area is rectangular, the energy density is uniform in the irradiation area.

[0066] 10, when the irradiation area has a circular shape, excessive energy is applied to the center of the irradiation area on the target object 300. Therefore, processing different from processing expected by the user of the laser processing device 500 may be performed.

[0067] On the other hand, in the laser processing apparatus 500 of the present embodiment, the irradiation area is rectangular, so that the energy density is uniform in the irradiation area, and the laser processing apparatus 500 can perform the processing that the user or the like has envisioned.

[0068] In this way, the laser processing apparatus 500 of this embodiment has a rectangular irradiation area R, and the irradiation area R is moved in the longitudinal direction of the irradiation area R. Therefore, the area of ​​the overlapping area (hereinafter also referred to as the "overlap area") at time t1 to time t5 can be made larger than that of the first comparative example. Therefore, as shown in Figs. 7 and 8, even if the output wattage and power density are both the same, the integrated value of the power density of the laser light in the irradiation area of ​​the object 300 by the laser processing apparatus 500 of this embodiment can be made larger than the integrated value of the power density of the laser light in the irradiation area of ​​the object by the laser processing apparatus of the first comparative example. Therefore, the laser processing apparatus 500 of this embodiment can increase the power density of the laser light in the irradiation area of ​​the object compared to the laser processing apparatus of the first comparative example. Similarly, the laser processing apparatus 500 of this embodiment can increase the power density of the laser light in the irradiation area of ​​the object compared to the laser processing apparatus of the second comparative example.

[0069] Moreover, the irradiation area R in this embodiment has a rectangular shape. Therefore, as described in Fig. 11, the energy density becomes uniform in the irradiation area, and the laser processing apparatus 500 can perform processing that the user or the like has expected.

[0070] Moreover, the shape of the irradiation region R corresponds to the shape of the incident surface 205A of the core 205. For example, if the shape of the incident surface 205A of the core 205 is circular, the shape of the irradiation region R will also be circular. If the shape of the incident surface 205A of the core 205 is square, the shape of the irradiation region R will also be square. If the shape of the incident surface 205A of the core 205 is rectangular, the shape of the irradiation region R will also be rectangular.

[0071] In the laser processing apparatus 500 of this embodiment, the shape of the incident surface 205A of the core 205 is rectangular (see FIG. 4). Therefore, in the laser processing apparatus 500 of this embodiment, even if there is no adjustment optical system between the exit surface 205B (see FIG. 1) of the core 205 and the target object 300, the irradiation area R can be made rectangular, so that the number of parts is not increased and loss of laser light can be suppressed.

[0072] 3, the S light sources 2 are two-dimensionally arranged in an elongated shape corresponding to the first elongated shape (incident surface 205A). With this configuration, the laser processing apparatus 500 can cause the laser beams from the S light sources 2 to be incident on the incident surface 205A of the first elongated shape without using a special optical system.

[0073] 1 and 5, the laser processing apparatus 500 moves the irradiation mechanism 301 so as to move the irradiation area R in the direction of the arrow P (i.e., the X2 axis direction and the first direction). Therefore, the laser processing apparatus 500 can move the irradiation area R along the longitudinal direction (first direction), and therefore can increase the integrated value of the energy of the overlap area Ra of the irradiation area R.

[0074] 5 shows an example in which the X2-axis direction coincides with the direction of the arrow P, that is, an example in which the irradiation region R is moved along the X2-axis direction. When changing the moving direction of the irradiation region R, the laser processing apparatus 500 changes the moving direction of the irradiation region R so that the moving direction coincides with the longitudinal direction of the irradiation region R. For example, when the laser processing apparatus 500 changes the moving direction of the irradiation region R from the X2-axis direction to the Y2-axis direction, the control device 400 causes the moving mechanism 302 to drive the irradiation mechanism 301 so that the longitudinal direction of the irradiation region R coincides with the Y2-axis direction.

[0075] <Second embodiment> Fig. 12 is a diagram for explaining a laser processing apparatus of a comparative example (hereinafter also referred to as a "third comparative example") in the second embodiment. The example of Fig. 12 is a diagram showing an incident surface 205A of a core 205 of the third comparative example and a laser beam BM incident on the incident surface 205A.

[0076] As shown in FIG. 12, the major axis BMc of the elliptical laser beam BM may be longer than the long side L3 of the incident surface 205A. In this case, not all of the laser beam is incident on the incident surface (non-incident laser beam BM1 exists). Therefore, the output value of the optical fiber 200 decreases. In addition, among the entire area of ​​the incident surface 205A, there is a non-incident area 205M into which the laser beam is incident. In FIG. 12, the non-incident area 205M is hatched. Therefore, the area of ​​the incident surface 205A is larger than necessary, and the power density of the laser beam in the target object 300 decreases. In this way, in the laser processing apparatus of the third comparative example, a problem may occur in that the output value of the optical fiber 200 or the power density of the laser beam decreases.

[0077] FIG. 13 is a diagram for explaining the laser processing apparatus 500 of the second embodiment. As shown in FIG. 13, the long axis BMd of the laser light BM on the incident surface 205A coincides with the diagonal line D of the incident surface 205A. Specifically, the shape of the focusing optical system 41 is such that the long axis BMd of the laser light BM coincides with the diagonal line D of the incident surface 205A. In addition, "coincidence" also includes "substantially coincidence". "Substantially coincidence" means that the long axis BMd and the diagonal line D may be slightly shifted as long as the effect of increasing the power density given by the laser light in the irradiation area of ​​the laser light is achieved. With this configuration, even if the long axis BMc of the elliptical laser light BM is longer than the long side L3 of the incident surface 205A, the laser light can be appropriately incident on the incident surface 205A. Therefore, the problems that may occur in the laser processing apparatus of the third comparative example can be suppressed.

[0078] <Third embodiment> In the first and second embodiments, the configuration has been described in which the shape of the irradiation area is rectangular, as explained with reference to Fig. 5. However, the shape of the irradiation area may be another shape.

[0079] Fig. 14 is a diagram showing the irradiation area R3 of the third embodiment. In the example of Fig. 14, the irradiation area R3 has an elliptical shape. As in Fig. 5, this elliptical shape is longer in the X2 axis direction than in the Y2 axis direction.

[0080] Fig. 15 is a diagram showing an incident surface 205C of a core 205 of an optical fiber 200 according to the third embodiment. In the example of Fig. 15, the incident surface 205C has a shape corresponding to the irradiation region R3. In the third embodiment, the shape of the incident surface 205C is an ellipse.

[0081] Fig. 9C is a diagram showing the transition of the irradiation region R3 from time t1 to time t2. Also, Fig. 9C shows the overlap region R3a from time t1 to time t2.

[0082] As shown in Fig. 9(C), in the laser processing apparatus of the third embodiment, the area of ​​the overlap region R3a can be made larger than that of the first comparative example (see Fig. 6). Therefore, even in the laser processing apparatus of the third embodiment, the integrated value of the power density of the laser light in the irradiation region R3 of the object 300 can be made large. Therefore, the laser processing apparatus of this embodiment can increase the power density of the laser light in the irradiation region of the object 300 compared to the laser processing apparatus of the first comparative example.

[0083] Next, the irradiation area R of the laser processing device of the first embodiment will be compared with the irradiation area R3 of the laser processing device of the third embodiment. As described above, Fig. 9(A) shows the time transition of the irradiation area R of the laser processing device of the first embodiment. Also, Fig. 9(C) shows the time transition of the irradiation area R3 of the laser processing device of the third embodiment.

[0084] As shown in Fig. 9(C), the overlap area Ra3 is an area surrounded by an ellipse curve. Therefore, the area of ​​the overlap area Ra3 is smaller than the area of ​​the overlap area Ra shown in Fig. 9(A). The irradiation area is appropriately designed to be either a rectangular shape or an elliptical shape depending on the processing content of the object 300.

[0085] The irradiation area does not have to be rectangular or elliptical, but may be any shape as long as it is an elongated shape in which the X2 axis direction (first direction) is longer than the Y2 axis direction (second direction). The irradiation area may be any shape, such as a parallelogram, a diamond, or an oval.

[0086] <Fourth embodiment> In the first embodiment, as shown in Fig. 1, the moving mechanism 302 moves the irradiation mechanism 301 to move the irradiation region R. However, the laser processing apparatus may move the irradiation region R by using another method.

[0087] FIG. 16 is a diagram showing a configuration example of a laser processing apparatus 500A according to a fourth embodiment. As shown in FIG. 16, the laser processing apparatus 500A does not include a moving mechanism 302, but instead includes a galvanometer mirror 310. The laser light LB irradiated from the irradiation mechanism 301 is reflected by the galvanometer mirror 310, and the reflected laser light LB is irradiated onto the target object 300. The control device 400 is capable of driving the galvanometer mirror 310. The control device 400 rotationally drives the galvanometer mirror 310 so that the irradiation region R moves in the first direction (see FIG. 5). Even in such a fourth embodiment, the irradiation region R can be moved in the first direction.

[0088] <Modification> In the above embodiment, the moving mechanism 302 moves the irradiation region by moving the irradiation mechanism 301. However, the moving mechanism 302 may move the placement table 303 so as to move the irradiation region R in the first direction, instead of the irradiation mechanism 301. Even with this configuration, the power density of the laser light in the irradiation region of the object 300 can be increased. Moreover, the moving mechanism 302 may move both the irradiation mechanism 301 and the placement table 303. That is, the moving mechanism 302 may relatively move at least one of the placement table 303 and the irradiation mechanism 301 so as to move the irradiation region in the first direction. Even with this configuration, the power density of the laser light in the irradiation region of the object can be increased.

[0089] [Aspects] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0090] (Item 1) A laser processing apparatus according to one aspect of the present disclosure includes a plurality of light sources, a focusing optical system, an optical fiber, an irradiation mechanism, and a moving mechanism. The plurality of light sources output laser light. The focusing optical system focuses the laser light output from the plurality of light sources. The laser light focused by the focusing optical system is incident on the optical fiber. The irradiation mechanism irradiates the light emitted from the optical fiber to an object. The moving mechanism moves an irradiation area of ​​the laser light on the object. The optical fiber has a core including an incident surface on which the laser light focused by the focusing optical system is incident. The incident surface has a first elongated shape that is longer in the first direction than in the second direction in a first direction and a second direction that are orthogonal to each other. The irradiation area has a second elongated shape that corresponds to the first elongated shape. The moving mechanism moves the irradiation area in the first direction.

[0091] According to this configuration, the irradiation area having a second elongated shape in which the first direction is longer than the second direction is moved in the first direction, and the overlapping area of ​​the irradiation area can be enlarged by the movement. Therefore, the power density of the laser light in the overlapping area can be increased, and as a result, the power density of the laser light in the irradiation area can be increased. In addition, since the shape of the incident surface is the first elongated shape in which the first direction is longer than the second direction, the irradiation area can be made into the second elongated shape without using a special optical system.

[0092] (Item 2) In the laser processing apparatus described in Item 1, the first extension shape is a first rectangle, and the second extension shape is a second rectangle.

[0093] With this configuration, the irradiation area can be made rectangular without using a special optical system.

[0094] (Item 3) In the laser processing device described in Item 2, the laser light output from the multiple light sources has anisotropy, and the major axis of the laser light on the incident surface coincides with a diagonal line of the first rectangle.

[0095] According to this configuration, even in a case where the cross section of the beam is elliptical due to the anisotropy of the laser beam, the laser beam focused by the focusing optical system can be made to enter the rectangular incident surface.

[0096] (Item 4) In the laser processing apparatus described in Item 2, the first stretched shape is an ellipse, and the second stretched shape is an ellipse.

[0097] With this configuration, the irradiation area can be made elliptical without using a special optical system.

[0098] (Item 5) In the laser processing device according to any one of items 1 to 4, the multiple light sources are two-dimensionally arranged in an elongated shape corresponding to the first elongated shape.

[0099] According to this configuration, laser light from a plurality of light sources can be incident on the incident surface of the first elongated shape without using a special optical system.

[0100] (Item 6) In the laser processing apparatus according to any one of items 1 to 5, the movement mechanism relatively moves at least one of the object and the irradiation mechanism so as to move the irradiation region in the first direction.

[0101] With this configuration, the irradiation area can be moved along the first direction. (Item 7) In the laser processing device according to any one of items 1 to 6, the movement mechanism has a mirror that can be driven to move the irradiation region in the first direction.

[0102] With this configuration, the irradiation area can be moved along the first direction. The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is defined by the claims, not by the description of the embodiments described above, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0103] 2 light source, 2A light source group, 3 collimating optical system, 3A collimating optical system group, 41 focusing optical system, 100 light source unit, 200 optical fiber, 201 first surface, 202 second surface, 205 core, 205A, 205B, 311, 411 incident surface, 205M non-incident area, 206 clad, 300 object, 301 irradiation mechanism, 302 moving mechanism, 303 placement stand, 310 galvanometer mirror, 400 control device, 402 memory, 500, 500A laser processing device.

Claims

1. A plurality of light sources that output laser light; a focusing optical system that focuses the laser beams output from the plurality of light sources; an optical fiber into which the laser light focused by the focusing optical system is incident; an irradiation mechanism that irradiates an object with the light emitted from the optical fiber; a moving mechanism for moving an irradiation area of ​​the laser light on the object, the optical fiber has a core including an incident surface onto which the laser light focused by the focusing optical system is incident, The shape of the incident surface is a first elongated shape in a first direction and a second direction perpendicular to each other, the first direction being longer than the second direction, the shape of the irradiation region is a second elongated shape corresponding to the first elongated shape, The moving mechanism moves the irradiation area in the first direction.

2. the first elongated shape is a first rectangle; The laser processing apparatus of claim 1 , wherein the second elongated shape is a second rectangle.

3. The laser light output from the plurality of light sources has anisotropy, The laser processing apparatus according to claim 2 , wherein a major axis of the laser light on the incident surface coincides with a diagonal of the first rectangle.

4. the first stretched shape is an ellipse; The laser processing apparatus of claim 1 , wherein the second elongated shape is an ellipse.

5. The laser processing apparatus according to claim 1 , wherein the plurality of light sources are two-dimensionally arranged in an elongated shape corresponding to the first elongated shape.

6. The laser processing apparatus according to claim 1 , wherein the movement mechanism relatively moves at least one of the object and the irradiation mechanism so as to move the irradiation region in the first direction.

7. The laser processing apparatus according to claim 1 , wherein the moving mechanism has a mirror that can be driven to move the irradiation area in the first direction.

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